CN103454070B - A kind of X-ray combination refractor focusing performance method of testing based on CCD detection - Google Patents
A kind of X-ray combination refractor focusing performance method of testing based on CCD detection Download PDFInfo
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Abstract
A kind of focusing performance method of testing of X-ray combination refractor, the device realizing the method comprises base rail, is positioned at adjustment platform, X-ray combination refractor and X ray CCD on base rail successively, X ray light pipe/laser instrument, X-ray combination refractor, X ray CCD form detection light path, comprise the steps: that (1) examines under a microscope and makes the optical axis of labeling indicia X-ray combination refractor; (2) laser instrument is moved into detection light path, laser instrument is overlapped with the optical axis mark line of two on X-ray combination refractor; (3) laser instrument is shifted out light path, X ray light pipe moves into detection light path simultaneously; (4) X ray CCD carries out image record, by carrying out image procossing to recorded image, obtaining focused spot size and the spot intensity of X-ray combination refractor, obtaining focusing performance test result.The present invention is easy to detect, reduce the cost, practicality is good.
Description
Technical field
The present invention relates to X-ray detection and imaging field, especially a kind of method can measuring X-ray combination refractor focusing performance.
Background technology
X-ray combination refractor is a kind of New X ray focusing device based on refraction effect, its theoretical focused spot size can reach nanometer scale, actual test gained focused spot size is usually at several micron, and have that size is little, manufacture craft is simple, robustness is good, can the advantage of batch machining, be applicable to X-ray detection and the imaging system of high detection resolution; Secondly, the non-constant width of photon energy that X-ray combination refractor covers, therefore based on its framework X-ray detection and imaging system, is applicable to various application occasions; Last because it is based on refraction effect, therefore do not need light path of turning back when focusing on X-ray beam, therefore formed sniffer compact conformation, size are little, lightweight.In view of above advantage, X-ray combination refractor is expected to obtain application at numerous X-ray detection and imaging device (comprising X-ray microscope, X ray microprobe, X-ray diffractometer, X ray scatterometer, X ray reflection instrument, X ray tomography, X ray projection lithography device etc.).The focusing performance of X-ray combination refractor is it as the most important performance of X-ray detection and imaging system core devices, and therefore to measure the method and apparatus of X-ray combination refractor focusing performance very important in invention.
Because X-ray combination refractor is a kind of novel X ray optical device, up to now, there is no the device its focusing performance being carried out to special test, general is all on synchrotron radiation wire harness, carry out experimental study by the developer of this device to its focusing performance and checking is (happy diligent pure, Liang Jingqiu, Dong Wen, Deng, the experimental result of sigmatron compound lens focusing performance, Acta Optica, 2006, 26 (2): 317-320), but synchrotron radiation is ultra-large type science apparatus, operation and maintenance cost is extremely expensive, very rare compared with demand during machine, actual testing requirement cannot be met.
Summary of the invention
In order to the deficiency that the mechanism overcoming existing X-ray combination refractor focusing performance test mode is complicated, operation and maintenance cost is expensive, practicality is poor, the invention provides a kind of easy to detect, reduce the cost, the X-ray combination refractor focusing performance method of testing based on CCD detection that practicality is good.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of X-ray combination refractor focusing performance method of testing based on CCD detection, the device realizing the method comprises base rail, is positioned at adjustment platform, X-ray combination refractor and X ray CCD on described base rail successively, X ray light pipe, laser instrument can be arranged on described adjustment platform transverse shifting, described X ray light pipe/laser instrument, X-ray combination refractor, X ray CCD form detection light path, and described focusing performance method of testing comprises the steps:
(1) optical axis of described X-ray combination refractor is determined when making, and examines under a microscope and makes its optical axis of labeling indicia, using in order to during laser calibration;
(2) laser instrument is moved into detection light path, laser instrument is overlapped with the optical axis mark line of two on X-ray combination refractor;
(3) laser instrument is shifted out light path, X ray light pipe moves into detection light path simultaneously;
(4) X ray CCD carries out image record, by carrying out image procossing to recorded image, obtaining focused spot size and the spot intensity of X-ray combination refractor, obtaining focusing performance test result.
Further, adjustment platform is positioned at the side of described base rail, and described X ray light pipe, laser instrument can be arranged on described adjustment platform transverse shifting; X ray light pipe and laser instrument are arranged on multidimensional precision adjustment platform, precision adjusts and fixes two gears, ensures that mechanical axis is parallel with the optical axis of described laser instrument with described X ray light pipe.
Further, described step (4), first moves X ray CCD along base rail y direction, reaches the position that distance X-ray combination refractor is nearest, record position coordinate and X ray ccd image; Again X ray CCD is moved to the direction away from X-ray combination refractor along base rail y direction, the position coordinates of record move, carry out image record.
Further again, described X ray CCD is along the translating step 0.2 ~ 5 millimeter of base rail y direction movement.
Further, described image recording mode is off-line record image file or Real time displaying image information and records image file.
Further again, the testing precision of described spot size and spot intensity is determined by the pixel dimension of X ray CCD.
In the present invention, the proving installation of X-ray combination refractor is built using X ray light pipe as light source, not only can meet actual testing requirement, more can explore and research and develop utilize X ray light pipe as light source, based on the various novel detection of X-ray combination refractor and imaging system, therefore have very important significance.
Beneficial effect of the present invention is mainly manifested in: 1, invented the X-ray combination refractor focusing performance method of testing that a kind of light source is X ray light pipe, can test the focusing performance of X-ray combination refractor easily; 2, because probe source is the X ray light pipe of miniaturization, also technical foundation can be provided for research and development based on the X-ray detection of X ray light pipe and imaging system; 3, whole apparatus structure is compact, size is little, lightweight, easy to use.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the X-ray combination refractor focusing performance proving installation that the present invention is based on CCD detection, wherein, 1 be X ray light pipe, 2 are laser instruments, 3 are multidimensional precision adjustment platforms, 4 are X-ray combination refractors, 5 are base rails, 6 is X ray CCD.
Fig. 2-1 and 2-2 is front elevation and the vertical view of two-dimension focusing X-ray compound refractive lens.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
See figures.1.and.2, a kind of X-ray combination refractor focusing performance method of testing based on CCD detection, the device realizing the method comprises base rail 5, is positioned at adjustment platform 3, X-ray combination refractor 4 and X ray CCD6 on described base rail 5 successively, X ray light pipe 1, laser instrument 2 can be arranged on described adjustment platform 3 transverse shifting, described X ray light pipe 1/ laser instrument 2, X-ray combination refractor 4, X ray CCD6 form detection light path, and described focusing performance method of testing comprises the steps:
(1) optical axis of described X-ray combination refractor 4 is determined when making, and examines under a microscope and makes its optical axis of labeling indicia, using in order to during laser calibration;
(2) laser instrument 2 is moved into detection light path, laser instrument 2 is overlapped with the optical axis mark line of two on X-ray combination refractor 4;
(3) laser instrument 2 is shifted out light path, X ray light pipe 1 moves into detection light path simultaneously;
(4) X ray CCD carries out image record, by carrying out image procossing to recorded image, obtaining focused spot size and the spot intensity of X-ray combination refractor, obtaining focusing performance test result.
Further, adjustment platform 3 is positioned at the side of described base rail 5, and described X ray light pipe 1, laser instrument 2 can be arranged on described adjustment platform 3 transverse shifting; X ray light pipe 1 and laser instrument 2 are arranged on multidimensional precision adjustment platform, precision adjusts and fixes two gears, ensures that mechanical axis is parallel with the optical axis of described laser instrument with described X ray light pipe.
Described step (4), first moves X ray CCD6 along base rail 5 y direction, reaches the position that distance X-ray combination refractor is nearest, record position coordinate and X ray ccd image; Again X ray CCD6 is moved to the direction away from X-ray combination refractor along base rail y direction, the position coordinates of record move, carry out image record.
Further again, described X ray CCD6 is along the translating step 0.2 ~ 5 millimeter of base rail 5 y direction movement.
Further, described image recording mode is off-line record image file or Real time displaying image information and records image file.
Further again, the testing precision of described spot size and spot intensity is determined by the pixel dimension of X ray CCD.
In described step (4), described image processing process is as follows:
For off-line record X ray ccd image file situation: after fixing the lengthwise position of X ray CCD each time, record lengthwise position coordinate, record X ray ccd image file, carry out image procossing, the change curve of the light intensity X ray CCD pixel under each fixing lengthwise position coordinate can be drawn, this change curve is exactly light distribution, and the full width at half maximum (FWHM, full width at half maximum) of light distribution is exactly the size of hot spot.Move X ray CCD6 along the base rail longitudinal axis, obtain the light distribution under each lengthwise position coordinate and spot size value, minimum spot size is exactly the focused spot size of described X-ray combination refractor, and corresponding light distribution is exactly spot intensity.
Image file situation is recorded for Real time displaying image information: first can move X ray CCD6 along the base rail longitudinal axis, move mode is for object of reference is by near extremely far away with X-ray combination refractor exit end, by showing the scope finding spot size smaller at line image, afterwards this among a small circle in, repeat the process of above-mentioned off-line record X ray ccd image file, the efficiency of image procossing can be improved.
In the present embodiment, described base rail 5 is in longitudinally arranging; Adjustment platform 3 is positioned at the side of described base rail 5, and the optical axis of described X ray light pipe 1, laser instrument 2 is all in longitudinally arranging, described X ray light pipe 1, laser instrument 2 can be arranged on described adjustment platform 3 transverse shifting; X-ray combination refractor 4 to be detected is positioned at the middle part of described base rail 5, and the optical axis of described X-ray combination refractor 4 to be detected is in longitudinally arranging; Described X ray CCD6 is positioned at the opposite side of described base rail 5, and the optical axis of described X ray CCD6 and the optical axis of described X-ray combination refractor 4 are on the same line; The exit end of described X ray light pipe 1 or laser instrument 2 and the incidence end of described X-ray combination refractor 4 to be detected are in being oppositely arranged, and the exit end of described X-ray combination refractor 4 to be detected and X ray CCD6 are in being oppositely arranged.
The first support is installed in the side of described base rail 5, described adjustment platform 3 installed by described first support, the second support in order to place X-ray combination refractor 4 to be detected is installed at the middle part of described base rail 5, the opposite side of described base rail 5 installs the 3rd support, and X ray CCD6 installed by described 3rd support.Described first support, the second support and the 3rd support are arranged on described base rail 5 with longitudinal movement.
In the present invention, first support vertically moves control on described base rail, transverse shifting on described adjustment platform of described X ray light pipe, laser instrument controls, and the second support vertically moves control on described base rail, and the 3rd support vertically moves control on described base rail; Various motion control above, can adopt Non-follow control, also can adopt Electric Machine Control or other type of drive.
In the present embodiment, described X ray light pipe 1, as launching the light source of X-radiation, to launch X ray light invisible.
Described laser instrument 2, as light path calibration light source of the present invention, need select visible light wave range laser instrument (the He-Ne laser instrument of such as red-emitting), uses when calibrating X ray light pipe, X-ray combination refractor and X ray CCD and being coaxial.
Described multidimensional precision adjustment platform 3, as mechanical movement and adjusting mechanism, effect ensures that X ray light pipe and laser instrument accurately move in and out light path.
Described X ray light pipe 1 and described laser instrument 2 are assembled on described multidimensional precision adjustment platform 3, adjusted by precision optical machinery, X ray light pipe and laser instrument is made alternately to enter light path, when laser instrument moves into light path, be align mode, utilize visible ray to calibrate the optical axis of X-ray combination refractor and the optical axis coincidence of proving installation of the present invention; When X ray light pipe moves into light path, be test mode, the focusing performance of X-ray combination refractor is tested.
Described X-ray combination refractor 4 is the tested targets in the present invention, main its focusing performance of detection.
Described X ray CCD6, for carrying out image record to hot spot, pass through computer programming, image procossing is carried out to recorded light spot image, obtain the change curve of spot intensity with pixel number, this change curve is exactly light distribution, and the full width at half maximum (FWHM, fullwidth at half maximum) of light distribution is exactly the size of hot spot.The focusing performance of described X-ray combination refractor is drawn with this.
Described base rail 5, it is equipped with can along multiple supports of guide rail translation, and described support is used for the fixing described adjustment of multidimensional precision platform, X-ray combination refractor, X ray CCD.
The optical axis of described X-ray combination refractor 4 to be detected needs to demarcate in advance, and makes mark on the surface of X-ray combination refractor along its optical axis, and it is coaxial with detecting light beam that described mark calibrates X-ray combination refractor for laser instrument 2.
Described X ray light pipe 1 and laser instrument 2 need to be pre-assembled on described multidimensional precision adjustment platform, and ensureing that described X ray light pipe and laser instrument alternately enter detection light path by the adjustment of two gears, described multidimensional precision adjustment platform also possesses the Precision trimming function of described X ray light pipe and described laser instrument being carried out respectively to displacement and angle.
3rd support of described fixing X ray CCD6, possesses the function along the accurate translation of guide rail long axis direction, and translating step 0.2 ~ 5 millimeter.Described X ray CCD6 carries out image record, and spot intensity, by carrying out image procossing to recorded image, obtains the change curve of light intensity pixel number, and spot size is obtained by the full width at half maximum of experiment curv, realizes focusing performance and detects.
Claims (5)
1. the X-ray combination refractor focusing performance method of testing based on CCD detection, it is characterized in that: the device realizing the method comprises base rail, is positioned at adjustment platform, X-ray combination refractor and X ray CCD on described base rail successively, X ray light pipe, laser instrument can be arranged on described adjustment platform transverse shifting, described X ray light pipe/laser instrument, X-ray combination refractor, X ray CCD form detection light path, and described focusing performance method of testing comprises the steps:
(1) optical axis of described X-ray combination refractor is determined when making, and examines under a microscope and makes its optical axis of labeling indicia, using in order to during laser calibration;
(2) laser instrument is moved into detection light path, laser instrument is overlapped with the optical axis mark line of two on X-ray combination refractor;
(3) laser instrument is shifted out light path, X ray light pipe moves into detection light path simultaneously;
(4) X ray CCD carries out image record, by carrying out image procossing to recorded image, obtaining focused spot size and the spot intensity of X-ray combination refractor, obtaining focusing performance test result;
First move X ray CCD along base rail y direction, reach the position that distance X-ray combination refractor is nearest, record position coordinate and X ray ccd image; Again X ray CCD is moved to the direction away from X-ray combination refractor along base rail y direction, the position coordinates of record move, carry out image record.
2. as claimed in claim 1 based on the X-ray combination refractor focusing performance method of testing of CCD detection, it is characterized in that: adjustment platform is positioned at the side of described base rail, and described X ray light pipe, laser instrument can be arranged on described adjustment platform transverse shifting; X ray light pipe and laser instrument are arranged on multidimensional precision adjustment platform, precision adjusts and fixes two gears, ensures that mechanical axis is parallel with the optical axis of described laser instrument with described X ray light pipe.
3., as claimed in claim 1 or 2 based on the X-ray combination refractor focusing performance method of testing of CCD detection, it is characterized in that: described X ray CCD is along the translating step 0.2 ~ 5 millimeter of base rail y direction movement.
4. as claimed in claim 1 or 2 based on the X-ray combination refractor focusing performance method of testing of CCD detection, it is characterized in that: in described step (4), described image recording mode is off-line record image file or Real time displaying image information and records image file.
5., as claimed in claim 1 or 2 based on the X-ray combination refractor focusing performance method of testing of CCD detection, it is characterized in that: the testing precision of described spot size and spot intensity is determined by the pixel dimension of X ray CCD.
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| CN104034517B (en) * | 2014-07-04 | 2016-07-06 | 西华大学 | A kind of sub-wavelength photon screen focusing performance detection method |
| CN105679391B (en) * | 2016-01-18 | 2017-06-30 | 浙江工业大学 | A kind of X-ray combination refractor Focused Optical system optimization method |
| CN106500965B (en) * | 2016-09-28 | 2018-11-30 | 北方夜视技术股份有限公司 | Lobster eye x-ray imaging optical element focusing performance test device and method based on ccd detector |
| CN108459037B (en) * | 2018-04-23 | 2020-06-30 | 浙江工业大学 | Micro-beam X-ray fluorescence analysis method based on X-ray array combined refraction lens |
| CN108709899B (en) * | 2018-04-23 | 2020-06-30 | 浙江工业大学 | Microbeam X-ray fluorescence analysis system based on X-ray array combined refraction lens |
| CN109916596B (en) * | 2019-04-01 | 2020-12-08 | 歌尔光学科技有限公司 | Optical path calibration method and calibration device |
| CN114253003B (en) * | 2021-12-06 | 2023-09-29 | 北京遥测技术研究所 | Tube shell laser collimation debugging device and method |
| CN114593898B (en) * | 2022-05-07 | 2022-07-15 | 深圳市润之汇实业有限公司 | Lens quality analysis method, device, equipment and medium based on refraction data |
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