CN103454070A - Focus performance test method for X-ray combined refraction lens on basis of CCD detection - Google Patents
Focus performance test method for X-ray combined refraction lens on basis of CCD detection Download PDFInfo
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Abstract
The invention provides a focus performance test method for an X-ray combine refraction lens on the basis of CCD detection. A device for achieving the method comprises a base guide rail, an adjusting table, the X-ray combined refraction lens and an X-ray CCD, wherein the adjusting table, the X-ray combined refraction lens and the X-ray CCD are sequentially located on the base guide rail, and an X-ray light tube / laser, the X-ray combined refraction lens and the X-ray CCD form a detection light path. The method comprises the following steps that (1) an optical axis of the X-ray combined refraction lens is observed, manufactured and marked under a microscope; (2) the laser is moved into the detection light path, and a marking line of the optical axis of the laser and a marking line of the optical axis of the X-ray combined refraction lens coincide; (3) the laser is moved out of the light path, and meanwhile the X-ray light tube is moved into the detection light path; (4) the X-ray CCD carries out image recording, image processing is carried out on the recorded image, a focus light spot dimension and light spot strength of the X-ray combined refraction lens are obtained, and a focus performance test result is obtained. The focus performance test method is convenient to detect, reduces cost and good in practicability.
Description
Technical field
The present invention relates to X-ray detection and imaging field, the especially a kind of method that can measure X ray combination refractor focusing performance.
Background technology
X ray combination refractor is a kind of New X ray focusing device based on refraction effect, its theoretical focused spot size can reach nanometer scale, actual test gained focused spot size is usually at several microns, and have advantages of that but size is little, manufacture craft is simple, the good batch machining of robustness, X-ray detection and the imaging system of applicable high detection resolution; Secondly, the non-constant width of photon energy that X ray combination refractor covers, therefore based on its framework X-ray detection and imaging system, be applicable to various application occasions; Finally due to it based on refraction effect, therefore do not need the light path of turning back when X-ray beam is focused on, so formed sniffer compact conformation, size are little, lightweight.In view of above advantage, X ray combination refractor is expected to obtain application at numerous X-ray detections and imaging device (comprising X-ray microscope, X ray microprobe, X-ray diffractometer, X ray scatterometer, X ray reflection instrument, X ray tomography, X ray projection lithography device etc.).The focusing performance of X ray combination refractor is its most important performance as X-ray detection and imaging system core devices, and therefore the method and apparatus of invention measurement X ray combination refractor focusing performance is very important.
Because X ray combination refractor is a kind of novel X ray optical device, up to now, there is no the device that its focusing performance is carried out to special test, general is all that developer by this device carries out experimental study to its focusing performance on the synchrotron radiation wire harness and checking is (happy diligent pure, Liang Jingqiu, Dong Wen, Deng, the experimental result of sigmatron compound lens focusing performance, Acta Optica, 2006, 26 (2): 317-320), but synchrotron radiation is ultra-large type science device, operation and maintenance cost is extremely expensive, during machine, with demand, compare very rare, can't meet actual testing requirement.
Summary of the invention
In order to overcome the deficiency that mechanism is complicated, operation and maintenance cost is expensive, practicality is poor of existing X ray combination refractor focusing performance test mode, the invention provides a kind of easy to detect, reduce the cost, the X ray of surveying based on CCD combination refractor focusing performance method of testing that practicality is good.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of X ray combination refractor focusing performance method of testing of surveying based on CCD, the device of realizing the method comprises that base rail, the adjustment platform, the X ray that are positioned on described base rail successively combine refractor and X ray CCD, but be arranged on described adjustment platform X ray light pipe, laser instrument transverse shifting, described X ray light pipe/laser instrument, X ray combination refractor, X ray CCD form and survey light path, and described focusing performance method of testing comprises the steps:
(1) optical axis of described X ray combination refractor is determined when making, and examines under a microscope and make its optical axis of labeling indicia, during in order to laser calibration, uses;
(2) laser instrument is moved into and surveys light path, make laser instrument overlap with two optical axis mark lines on X ray combination refractor;
(3) laser instrument is shifted out to light path, the X ray light pipe moves into and surveys light path simultaneously;
(4) X ray CCD carries out recording image, by institute's document image is carried out to the image processing, obtains focused spot size and the spot intensity of X ray combination refractor, obtains the focusing performance test result.
Further, adjust the side that platform is positioned at described base rail, but described X ray light pipe, be arranged on described adjustment platform the laser instrument transverse shifting; X ray light pipe and laser instrument are arranged on the accurate adjustment of multidimensional platform, and two gears are adjusted and fixed to precision, guarantees that mechanical axis is parallel with the optical axis of described X ray light pipe and described laser instrument.
Further, described step (4), at first move X ray CCD along the base rail y direction, reaches the distance X ray combination nearest position of refractor, record position coordinate and X ray ccd image; X ray CCD is moved to the direction away from X ray combination refractor along the base rail y direction, the position coordinates of record move, carry out recording image again.
Further again, 0.2～5 millimeter of the translation step-length that described X ray CCD moves along the base rail y direction.
Further, described recording image mode is off-line document image file or online displays image information document image file.
Further again, the testing precision of described spot size and spot intensity is determined by the pixel dimension of X ray CCD.
In the present invention, the X ray light pipe of usining builds the proving installation of X ray combination refractor as light source, not only can meet actual testing requirement, more can explore and research and develop and utilize the X ray light pipe as light source, various novel detection and imaging system based on X ray combination refractor, therefore have very important significance.
Beneficial effect of the present invention is mainly manifested in: the X ray combination refractor focusing performance method of testing that 1, to have invented a kind of light source be the X ray light pipe, can to the focusing performance of X ray combination refractor, be tested easily; 2, because the X ray light pipe that probe source is miniaturization also can provide technical foundation for X-ray detection and the imaging system of research and development based on the X ray light pipe; 3, whole apparatus structure is compact, size is little, lightweight, the convenient use.
The accompanying drawing explanation
Fig. 1 is the schematic diagram that the present invention is based on the X ray combination refractor focusing performance proving installation of CCD detection, wherein, the 1st, X ray light pipe, the 2nd, laser instrument, the 3rd, the accurate platform, the 4th of adjusting of multidimensional, X ray combination refractor, the 5th, base rail, the 6th, X ray CCD.
Fig. 2-1 and 2-2 are front elevation and the vertical views of two-dimension focusing X-ray compound refractive lens.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
See figures.1.and.2, a kind of X ray combination refractor focusing performance method of testing of surveying based on CCD, the device of realizing the method comprises that base rail 5, the adjustment platform 3, the X ray that are positioned on described base rail 5 successively combine refractor 4 and X ray CCD6, but be arranged on described adjustment platform 3 X ray light pipe 1, laser instrument 2 transverse shiftings, described X ray light pipe 1/ laser instrument 2, X ray combination refractor 4, X ray CCD6 form and survey light path, and described focusing performance method of testing comprises the steps:
(1) optical axis of described X ray combination refractor 4 is determined when making, and examines under a microscope and make its optical axis of labeling indicia, during in order to laser calibration, uses;
(2) laser instrument 2 is moved into and surveys light path, make laser instrument 2 overlap with two optical axis mark lines on X ray combination refractor 4;
(3) laser instrument 2 is shifted out to light path, X ray light pipe 1 moves into and surveys light path simultaneously;
(4) X ray CCD carries out recording image, by institute's document image is carried out to the image processing, obtains focused spot size and the spot intensity of X ray combination refractor, obtains the focusing performance test result.
Further, adjust the side that platform 3 is positioned at described base rail 5, but described X ray light pipe 1, be arranged on described adjustment platform 3 laser instrument 2 transverse shiftings; X ray light pipe 1 and laser instrument 2 are arranged on the accurate adjustment of multidimensional platform, and two gears are adjusted and fixed to precision, guarantees that mechanical axis is parallel with the optical axis of described X ray light pipe and described laser instrument.
Described step (4), at first move X ray CCD6 along base rail 5 y directions, reaches the distance X ray combination nearest position of refractor, record position coordinate and X ray ccd image; X ray CCD6 is moved to the direction away from X ray combination refractor along the base rail y direction, the position coordinates of record move, carry out recording image again.
Further again, 0.2～5 millimeter of the translation step-length that described X ray CCD6 moves along base rail 5 y directions.
Further, described recording image mode is off-line document image file or online displays image information document image file.
Further again, the testing precision of described spot size and spot intensity is determined by the pixel dimension of X ray CCD.
In described step (4), described image processing process is as follows:
Record X ray ccd image file situation for off-line: each time fixedly after the lengthwise position of X ray CCD, record the lengthwise position coordinate, record X ray ccd image file, carry out the image processing, can draw each fixedly change curve of the light intensity X ray CCD pixel under the lengthwise position coordinate, this change curve is exactly light distribution, and the full width at half maximum of light distribution (FWHM, full width at half maximum) is exactly the size of hot spot.Move X ray CCD6 along the base rail longitudinal axis, obtain light distribution and spot size value under each lengthwise position coordinate, minimum spot size is exactly the focused spot size of described X ray combination refractor, and corresponding light distribution is exactly spot intensity.
For online displays image information document image file situation: can first along the base rail longitudinal axis, move X ray CCD6, move mode for take X ray combination refractor exit end as object of reference by near to far away, by at line image, showing the smaller scope of spot size that finds, afterwards this among a small circle in, repeat the process that above-mentioned off-line records X ray ccd image file, can improve the efficiency that image is processed.
In the present embodiment, described base rail 5 is vertical layout; Adjust the side that platform 3 is positioned at described base rail 5, the optical axis of described X ray light pipe 1, laser instrument 2 all is vertical layout, but described X ray light pipe 1, is arranged on described adjustment platform 3 laser instrument 2 transverse shiftings; X ray combination refractor 4 to be detected is positioned at the middle part of described base rail 5, and the optical axis of described X ray combination refractor 4 to be detected is vertical layout; Described X ray CCD6 is positioned at the opposite side of described base rail 5, and the optical axis of the optical axis of described X ray CCD6 and described X ray combination refractor 4 is on same straight line; The incident end of the exit end of described X ray light pipe 1 or laser instrument 2 and described X ray to be detected combination refractor 4 is and is oppositely arranged, and the exit end of described X ray combination refractor 4 to be detected and X ray CCD6 are and are oppositely arranged.
One side of described base rail 5 is installed the first support, described adjustment platform 3 is installed on described the first support, install in order to place the second support of X ray combination refractor 4 to be detected at the middle part of described base rail 5, the opposite side of described base rail 5 is installed the 3rd support, and X ray CCD6 is installed on described the 3rd support.Described the first support, the second support and the 3rd support are arranged on described base rail 5 with longitudinal movement.
In the present invention, the first support vertically moves control on described base rail, transverse shifting on described adjustment platform of described X ray light pipe, laser instrument is controlled, and the second support vertically moves control on described base rail, and the 3rd support vertically moves control on described base rail; Above various motion control, can adopt manual control, also can adopt Electric Machine Control or other type of drive.
In the present embodiment, described X ray light pipe 1, as the light source of emission X-radiation, to launch X ray light invisible.
Described laser instrument 2, as light path regulation light source of the present invention, need to select visible light wave range laser instrument (such as the He-Ne laser instrument of red-emitting), when calibration X ray light pipe, X ray combination refractor and X ray CCD are coaxial, uses.
The accurate platform 3 of adjusting of described multidimensional, as mechanical movement and adjusting mechanism, effect is to guarantee that X ray light pipe and laser instrument accurately move in and out light path.
Described X ray light pipe 1 and described laser instrument 2 are assembled on the accurate adjustment of described multidimensional platform 3, by the precision optical machinery adjustment, make X ray light pipe and laser instrument alternately enter light path, when laser instrument moves into light path, be align mode, utilize the optical axis of visible ray calibration X ray combination refractor and the optical axis coincidence of proving installation of the present invention; When the X ray light pipe moves into light path, be test mode, the focusing performance of X ray combination refractor is tested.
Described X ray combination refractor 4, be the tested target in the present invention, mainly detects its focusing performance.
Described X ray CCD6, for hot spot is carried out to recording image, pass through computer programming, recorded light spot image is carried out to the image processing, obtain the change curve of spot intensity with the pixel number, this change curve is exactly light distribution, and the full width at half maximum of light distribution (FWHM, full width at half maximum) is exactly the size of hot spot.Draw the focusing performance of described X ray combination refractor with this.
Described base rail 5, on it, being equipped with can be along a plurality of support of guide rail translation, and described support is for accurate platform, X ray combination refractor, the X ray CCD of adjusting of fixing described multidimensional.
The optical axis of described X ray combination refractor 4 to be detected need to be demarcated in advance, and makes mark on the surface of X ray combination refractor along its optical axis, and described mark is coaxial with detecting light beam for laser instrument 2 calibration X ray combination refractors.
Described X ray light pipe 1 and laser instrument 2 need to be pre-assembled on the accurate adjustment of described multidimensional platform, and guaranteeing that by the adjustment of two gears described X ray light pipe and laser instrument alternately enter the detection light path, described multidimensional is accurate to be adjusted platform and also possesses the Precision trimming function of described X ray light pipe and described laser instrument being carried out respectively to displacement and angle.
The 3rd support of described fixedly X ray CCD6, possess along the function of the accurate translation of guide rail long axis direction, and 0.2～5 millimeter of translation step-length.Described X ray CCD6 carries out recording image, and spot intensity, by institute's document image is carried out to the image processing, obtains the change curve of light intensity pixel number, and spot size obtains by the full width at half maximum of measuring curve, realizes that focusing performance detects.
Claims (6)
1. an X ray of surveying based on CCD combines refractor focusing performance method of testing, it is characterized in that: the device of realizing the method comprises that base rail, the adjustment platform, the X ray that are positioned on described base rail successively combine refractor and X ray CCD, but be arranged on described adjustment platform X ray light pipe, laser instrument transverse shifting, described X ray light pipe/laser instrument, X ray combination refractor, X ray CCD form and survey light path, and described focusing performance method of testing comprises the steps:
(1) optical axis of described X ray combination refractor is determined when making, and examines under a microscope and make its optical axis of labeling indicia, during in order to laser calibration, uses;
(2) laser instrument is moved into and surveys light path, make laser instrument overlap with two optical axis mark lines on X ray combination refractor;
(3) laser instrument is shifted out to light path, the X ray light pipe moves into and surveys light path simultaneously;
(4) X ray CCD carries out recording image, by institute's document image is carried out to the image processing, obtains focused spot size and the spot intensity of X ray combination refractor, obtains the focusing performance test result.
2. the X ray of surveying based on CCD as claimed in claim 1 combines refractor focusing performance method of testing, it is characterized in that: adjust the side that platform is positioned at described base rail, but described X ray light pipe, be arranged on described adjustment platform the laser instrument transverse shifting; X ray light pipe and laser instrument are arranged on the accurate adjustment of multidimensional platform, and two gears are adjusted and fixed to precision, guarantees that mechanical axis is parallel with the optical axis of described X ray light pipe and described laser instrument.
3. the X ray of surveying based on CCD as claimed in claim 1 or 2 combines refractor focusing performance method of testing, it is characterized in that: described step (4), at first move X ray CCD along the base rail y direction, reach the distance X ray combination nearest position of refractor, record position coordinate and X ray ccd image; X ray CCD is moved to the direction away from X ray combination refractor along the base rail y direction, the position coordinates of record move, carry out recording image again.
4. the X ray combination refractor focusing performance method of testing of surveying based on CCD as claimed in claim 1 or 2, is characterized in that: 0.2～5 millimeter of the translation step-length that described X ray CCD moves along the base rail y direction.
5. the X ray of surveying based on CCD as claimed in claim 1 or 2 combines refractor focusing performance method of testing, it is characterized in that: in described step (4), described recording image mode is off-line document image file or online displays image information document image file.
6. the X ray of surveying based on CCD as claimed in claim 1 or 2 combines refractor focusing performance method of testing, it is characterized in that: the testing precision of described spot size and spot intensity is determined by the pixel dimension of X ray CCD.
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| CN104034517A (en) * | 2014-07-04 | 2014-09-10 | 西华大学 | Sub-wavelength photon screen focusing performance detection method |
| CN105679391A (en) * | 2016-01-18 | 2016-06-15 | 浙江工业大学 | Optimization method of X-ray combined refractor focusing optical system |
| CN106500965A (en) * | 2016-09-28 | 2017-03-15 | 北方夜视技术股份有限公司 | Lobster eye x-ray imaging optical element focusing performance test device and method based on ccd detector |
| CN108459037A (en) * | 2018-04-23 | 2018-08-28 | 浙江工业大学 | Microbeam X-ray fluorescence analytical method based on X-ray array combination refractor |
| CN108709899A (en) * | 2018-04-23 | 2018-10-26 | 浙江工业大学 | MICRO-BEAM XRF ANALYSIS system based on X-ray array combination refractor |
| CN109916596A (en) * | 2019-04-01 | 2019-06-21 | 歌尔股份有限公司 | Light path calibration method and calibrating installation |
| CN114253003A (en) * | 2021-12-06 | 2022-03-29 | 北京遥测技术研究所 | Tube shell laser alignment debugging device and method |
| CN114593898A (en) * | 2022-05-07 | 2022-06-07 | 深圳市润之汇实业有限公司 | Lens quality analysis method, device, equipment and medium based on refraction data |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104034517A (en) * | 2014-07-04 | 2014-09-10 | 西华大学 | Sub-wavelength photon screen focusing performance detection method |
| CN105679391A (en) * | 2016-01-18 | 2016-06-15 | 浙江工业大学 | Optimization method of X-ray combined refractor focusing optical system |
| CN105679391B (en) * | 2016-01-18 | 2017-06-30 | 浙江工业大学 | A kind of X-ray combination refractor Focused Optical system optimization method |
| CN106500965A (en) * | 2016-09-28 | 2017-03-15 | 北方夜视技术股份有限公司 | Lobster eye x-ray imaging optical element focusing performance test device and method based on ccd detector |
| CN106500965B (en) * | 2016-09-28 | 2018-11-30 | 北方夜视技术股份有限公司 | Lobster eye x-ray imaging optical element focusing performance test device and method based on ccd detector |
| CN108459037A (en) * | 2018-04-23 | 2018-08-28 | 浙江工业大学 | Microbeam X-ray fluorescence analytical method based on X-ray array combination refractor |
| CN108709899A (en) * | 2018-04-23 | 2018-10-26 | 浙江工业大学 | MICRO-BEAM XRF ANALYSIS system based on X-ray array combination refractor |
| CN109916596A (en) * | 2019-04-01 | 2019-06-21 | 歌尔股份有限公司 | Light path calibration method and calibrating installation |
| CN109916596B (en) * | 2019-04-01 | 2020-12-08 | 歌尔光学科技有限公司 | Optical path calibration method and calibration device |
| CN114253003A (en) * | 2021-12-06 | 2022-03-29 | 北京遥测技术研究所 | Tube shell laser alignment debugging device and method |
| CN114253003B (en) * | 2021-12-06 | 2023-09-29 | 北京遥测技术研究所 | Tube shell laser collimation debugging device and method |
| CN114593898A (en) * | 2022-05-07 | 2022-06-07 | 深圳市润之汇实业有限公司 | Lens quality analysis method, device, equipment and medium based on refraction data |
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Effective date of registration: 20200831 Address after: No.168, ecological road, Lianshui Economic Development Zone, Huaian City, Jiangsu Province Patentee after: HANMEN ELECTRONICS (JIANGSU) Co.,Ltd. Address before: Unit 2414-2416, main building, no.371, Wushan Road, Tianhe District, Guangzhou City, Guangdong Province Patentee before: GUANGDONG GAOHANG INTELLECTUAL PROPERTY OPERATION Co.,Ltd. Effective date of registration: 20200831 Address after: Unit 2414-2416, main building, no.371, Wushan Road, Tianhe District, Guangzhou City, Guangdong Province Patentee after: GUANGDONG GAOHANG INTELLECTUAL PROPERTY OPERATION Co.,Ltd. Address before: The city Zhaohui six districts Chao Wang Road Hangzhou City, Zhejiang province 310014 18 Patentee before: ZHEJIANG University OF TECHNOLOGY |