CN103454068A - X-ray combination refractor focusing performance test device based on CCD detection - Google Patents
X-ray combination refractor focusing performance test device based on CCD detection Download PDFInfo
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- CN103454068A CN103454068A CN2013103640556A CN201310364055A CN103454068A CN 103454068 A CN103454068 A CN 103454068A CN 2013103640556 A CN2013103640556 A CN 2013103640556A CN 201310364055 A CN201310364055 A CN 201310364055A CN 103454068 A CN103454068 A CN 103454068A
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Abstract
The invention discloses an X-ray combination refractor focusing performance test device based on CCD detection. The X-ray combination refractor focusing performance test device based on CCD detection comprises a base guide rail, an X-ray light tube, a laser device and an X-ray CCD, wherein the base guide rail, the laser device and the X-ray CCD are longitudinally located on the base guide rail. An adjustment table is located on one side of the base guide rail, the optical axis of the X-ray light tube and the optical axis of the laser device are longitudinally arranged, and the X-ray light tube and the laser device can be transversely and movably installed on the adjustment table; an X-ray combination refractor to be detected is located in the middle of the base guide rail, and the optical axis of the X-ray combination refractor to be detected is longitudinally arranged; the X-ray CCD is located on the other side of the base guide rail, and the optical axis of the X-ray CCD and the optical axis of the X-ray combination refractor are on the same straight line; the exit end of the X-ray light tube or the exit end of the laser device and the incidence end of the X-ray combination refractor to be detected are oppositely arranged, and the exit end of the X-ray combination refractor to be detected and the X-ray CCD are oppositely arranged. The X-ray combination refractor focusing performance test device based on CCD detection is simplified in structure, greatly reduces cost and is good in practicability.
Description
Technical field
The present invention relates to X-ray detection and imaging field, the especially a kind of device that can measure X ray combination refractor focusing performance.
Background technology
X ray combination refractor is a kind of New X ray focusing device based on refraction effect, its theoretical focused spot size can reach nanometer scale, actual test gained focused spot size is usually at several microns, and have advantages of that but size is little, manufacture craft is simple, the good batch machining of robustness, X-ray detection and the imaging system of applicable high detection resolution; Secondly, the non-constant width of photon energy that X ray combination refractor covers, therefore based on its framework X-ray detection and imaging system, be applicable to various application occasions; Finally due to it based on refraction effect, therefore do not need the light path of turning back when X-ray beam is focused on, so formed sniffer compact conformation, size are little, lightweight.In view of above advantage, X ray combination refractor is expected to obtain application at numerous X-ray detections and imaging device (comprising X-ray microscope, X ray microprobe, X-ray diffractometer, X ray scatterometer, X ray reflection instrument, X ray tomography, X ray projection lithography device etc.).The focusing performance of X ray combination refractor is its most important performance as X-ray detection and imaging system core devices, and therefore the method and apparatus of invention measurement X ray combination refractor focusing performance is very important.
Because X ray combination refractor is a kind of novel X ray optical device, up to now, there is no the device that its focusing performance is carried out to special test, general is all that developer by this device carries out experimental study to its focusing performance on the synchrotron radiation wire harness and checking is (happy diligent pure, Liang Jingqiu, Dong Wen, Deng, the experimental result of sigmatron compound lens focusing performance, Acta Optica, 2006, 26 (2): 317-320), but synchrotron radiation is ultra-large type science device, operation and maintenance cost is extremely expensive, during machine, with demand, compare very rare, can't meet actual testing requirement.
Summary of the invention
In order to overcome the deficiency that mechanism is complicated, operation and maintenance cost is expensive, practicality is poor of existing X ray combination refractor focusing performance test mode, the X ray that the invention provides a kind of simplified structure, reduce the cost, practicality is good combination refractor focusing performance proving installation.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of X ray combination refractor focusing performance proving installation of surveying based on CCD, comprise base rail, be positioned at X ray light pipe, laser instrument and X ray CCD on described base rail, and described base rail is vertical layout;
Adjust the side that platform is positioned at described base rail, the optical axis of described X ray light pipe, laser instrument all is vertical layout, but described X ray light pipe, is arranged on described adjustment platform the laser instrument transverse shifting; X ray combination refractor to be detected is positioned at the middle part of described base rail, and the optical axis of described X ray combination refractor to be detected is vertical layout; Described X ray CCD is positioned at the opposite side of described base rail, and the optical axis of the optical axis of described X ray CCD and described X ray combination refractor is on same straight line; The incident end of the exit end of described X ray light pipe or laser instrument and described X ray to be detected combination refractor is and is oppositely arranged, and the exit end of described X ray combination refractor to be detected and X ray CCD are and are oppositely arranged.
Further, described laser instrument is the visible light wave range laser instrument.Such as He-Ne laser instrument of red-emitting etc.
Described adjustment platform is the accurate platform of adjusting of the multidimensional in order to X ray light pipe and laser instrument are moved in and out to light path.
One side of described base rail is installed the first support, described adjustment platform is installed on described the first support, install in order to place the second support of X ray combination refractor to be detected at the middle part of described base rail, the opposite side of described base rail is installed the 3rd support, and X ray CCD is installed on described the 3rd support.
Described the first support, the second support and the 3rd support are arranged on described base rail with longitudinal movement.
The surface of described X ray combination refractor to be detected is provided with the mark that indicates optical axis.
In the present invention, the first support vertically moves control on described base rail, transverse shifting on described adjustment platform of described X ray light pipe, laser instrument is controlled, and the second support vertically moves control on described base rail, and the 3rd support vertically moves control on described base rail; Above various motion control, can adopt manual control, also can adopt Electric Machine Control or other type of drive.
In the present invention, the X ray light pipe of usining builds the proving installation of X ray combination refractor as light source, not only can meet actual testing requirement, more can explore and research and develop and utilize the X ray light pipe as light source, various novel detection and imaging system based on X ray combination refractor, therefore have very important significance.
Beneficial effect of the present invention is mainly manifested in: the X ray combination refractor focusing performance proving installation that 1, to have invented a kind of light source be the X ray light pipe, can to the focusing performance of X ray combination refractor, be tested easily; 2, because the X ray light pipe that probe source is miniaturization also can provide technical foundation for X-ray detection and the imaging system of research and development based on the X ray light pipe; 3, whole apparatus structure is compact, size is little, lightweight, the convenient use.
The accompanying drawing explanation
Fig. 1 is the schematic diagram that the present invention is based on the X ray combination refractor focusing performance proving installation of CCD detection, wherein, the 1st, X ray light pipe, the 2nd, laser instrument, the 3rd, the accurate platform, the 4th of adjusting of multidimensional, X ray combination refractor, the 5th, base rail, the 6th, X ray CCD.
Fig. 2-1 and 2-2 are front elevation and the vertical views of two-dimension focusing X-ray compound refractive lens.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
See figures.1.and.2, a kind of X ray combination refractor focusing performance proving installation of surveying based on CCD, comprise base rail 5, be positioned at X ray light pipe 1, laser instrument 2 and X ray CCD6 on described base rail 5, and described base rail 5 is vertical layout;
Adjust the side that platform 3 is positioned at described base rail 5, the optical axis of described X ray light pipe 1, laser instrument 2 all is vertical layout, but described X ray light pipe 1, is arranged on described adjustment platform 3 laser instrument 2 transverse shiftings; X ray combination refractor 4 to be detected is positioned at the middle part of described base rail 5, and the optical axis of described X ray combination refractor 4 to be detected is vertical layout; Described X ray CCD6 is positioned at the opposite side of described base rail 5, and the optical axis of the optical axis of described X ray CCD6 and described X ray combination refractor 4 is on same straight line; The incident end of the exit end of described X ray light pipe 1 or laser instrument 2 and described X ray to be detected combination refractor 4 is and is oppositely arranged, and the exit end of described X ray combination refractor 4 to be detected and X ray CCD6 are and are oppositely arranged.
Further, described laser instrument 2 is the visible light wave range laser instrument.Such as He-Ne laser instrument of red-emitting etc.
Described adjustment platform 3 is in order to move in and out X ray light pipe and laser instrument the accurate platform of adjusting of multidimensional of light path.
One side of described base rail 5 is installed the first support, described adjustment platform 3 is installed on described the first support, install in order to place the second support of X ray combination refractor 4 to be detected at the middle part of described base rail 5, the opposite side of described base rail 5 is installed the 3rd support, and X ray CCD6 is installed on described the 3rd support.
Described the first support, the second support and the 3rd support are arranged on described base rail 5 with longitudinal movement.
The surface of described X ray combination refractor 4 to be detected is provided with the mark that indicates optical axis.
In the present invention, the first support vertically moves control on described base rail, transverse shifting on described adjustment platform of described X ray light pipe, laser instrument is controlled, and the second support vertically moves control on described base rail, and the 3rd support vertically moves control on described base rail; Above various motion control, can adopt manual control, also can adopt Electric Machine Control or other type of drive.
In the present embodiment, described X ray light pipe 1, as the light source of emission X-radiation, to launch X ray light invisible.
Described laser instrument 2, as light path regulation light source of the present invention, need to select visible light wave range laser instrument (such as the He-Ne laser instrument of red-emitting), when calibration X ray light pipe, X ray combination refractor and X ray CCD are coaxial, uses.
The accurate platform 3 of adjusting of described multidimensional, as mechanical movement and adjusting mechanism, effect is to guarantee that X ray light pipe and laser instrument accurately move in and out light path.
Described X ray light pipe 1 and described laser instrument 2 are assembled on the accurate adjustment of described multidimensional platform 3, by the precision optical machinery adjustment, make X ray light pipe and laser instrument alternately enter light path, when laser instrument moves into light path, be align mode, utilize the optical axis of visible ray calibration X ray combination refractor and the optical axis coincidence of proving installation of the present invention; When the X ray light pipe moves into light path, be test mode, the focusing performance of X ray combination refractor is tested.
Described X ray combination refractor 4, be the tested target in the present invention, mainly detects its focusing performance.
Described X ray CCD6, for hot spot is carried out to recording image, pass through computer programming, recorded light spot image is carried out to the image processing, obtain the change curve of spot intensity with the pixel number, this change curve is exactly light distribution, and the full width at half maximum of light distribution (FWHM, full width at half maximum) is exactly the size of hot spot.Draw the focusing performance of described X ray combination refractor with this.
Described base rail 5, on it, being equipped with can be along a plurality of support of guide rail translation, and described support is for accurate platform, X ray combination refractor, the X ray CCD of adjusting of fixing described multidimensional.
The optical axis of described X ray combination refractor 4 to be detected need to be demarcated in advance, and makes mark on the surface of X ray combination refractor along its optical axis, and described mark is coaxial with detecting light beam for laser instrument 2 calibration X ray combination refractors.
Described X ray light pipe 1 and laser instrument 2 need to be pre-assembled on the accurate adjustment of described multidimensional platform, and guaranteeing that by the adjustment of two gears described X ray light pipe and laser instrument alternately enter the detection light path, described multidimensional is accurate to be adjusted platform and also possesses the Precision trimming function of described X ray light pipe and described laser instrument being carried out respectively to displacement and angle.
The 3rd support of described fixedly X ray CCD6, possess along the function of the accurate translation of guide rail long axis direction, and 0.2～5 millimeter of translation step-length.Described X ray CCD6 carries out recording image, and spot intensity, by institute's document image is carried out to the image processing, obtains the change curve of light intensity pixel number, and spot size obtains by the full width at half maximum of measuring curve, realizes that focusing performance detects.
Claims (6)
1. an X ray of surveying based on CCD combines refractor focusing performance proving installation, it is characterized in that: described focusing performance proving installation comprises base rail, is positioned at X ray light pipe, laser instrument and X ray CCD on described base rail, and described base rail is vertical layout;
Adjust the side that platform is positioned at described base rail, the optical axis of described X ray light pipe, laser instrument all is vertical layout, but described X ray light pipe, is arranged on described adjustment platform the laser instrument transverse shifting; X ray combination refractor to be detected is positioned at the middle part of described base rail, and the optical axis of described X ray combination refractor to be detected is vertical layout; Described X ray CCD is positioned at the opposite side of described base rail, and the optical axis of the optical axis of described X ray CCD and described X ray combination refractor is on same straight line; The incident end of the exit end of described X ray light pipe or laser instrument and described X ray to be detected combination refractor is and is oppositely arranged, and the exit end of described X ray combination refractor to be detected and X ray CCD are and are oppositely arranged.
2. the X ray of surveying based on CCD as claimed in claim 1 combines refractor focusing performance proving installation, and it is characterized in that: described laser instrument is the visible light wave range laser instrument.
3. the X ray combination refractor focusing performance proving installation of surveying based on CCD as claimed in claim 1 or 2 is characterized in that: described adjustment platform is in order to move in and out X ray light pipe and laser instrument the accurate platform of adjusting of multidimensional of light path.
4. the X ray of surveying based on CCD as claimed in claim 1 or 2 combines refractor focusing performance proving installation, it is characterized in that: a side of described base rail is installed the first support, described adjustment platform is installed on described the first support, install in order to place the second support of X ray combination refractor to be detected at the middle part of described base rail, the opposite side of described base rail is installed the 3rd support, and X ray CCD is installed on described the 3rd support.
5. the X ray of surveying based on CCD as claimed in claim 1 or 2 combines refractor focusing performance proving installation, and it is characterized in that: described the first support, the second support and the 3rd support are arranged on described base rail with longitudinal movement.
6. the X ray of surveying based on CCD as claimed in claim 1 or 2 combines refractor focusing performance proving installation, it is characterized in that: the surface of described X ray combination refractor to be detected is provided with the mark that indicates optical axis.
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Cited By (3)
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| CN106500965A (en) * | 2016-09-28 | 2017-03-15 | 北方夜视技术股份有限公司 | Lobster eye x-ray imaging optical element focusing performance test device and method based on ccd detector |
| CN106768874A (en) * | 2016-11-18 | 2017-05-31 | 中国科学院西安光学精密机械研究所 | A kind of X-ray focusing optical focus device for measuring properties |
| CN108459037A (en) * | 2018-04-23 | 2018-08-28 | 浙江工业大学 | Microbeam X-ray fluorescence analytical method based on X-ray array combination refractor |
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| CN108459037A (en) * | 2018-04-23 | 2018-08-28 | 浙江工业大学 | Microbeam X-ray fluorescence analytical method based on X-ray array combination refractor |
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Effective date of registration: 20200729 Address after: No.10 Tianqiao West Road, Yulin City, Guangxi Zhuang Autonomous Region Patentee after: Guangxi Yulin River Power Generation Equipment Co.,Ltd. Address before: 510000 unit 2414-2416, building, No. five, No. 371, Tianhe District, Guangdong, China Patentee before: GUANGDONG GAOHANG INTELLECTUAL PROPERTY OPERATION Co.,Ltd. Effective date of registration: 20200729 Address after: 510000 unit 2414-2416, building, No. five, No. 371, Tianhe District, Guangdong, China Patentee after: GUANGDONG GAOHANG INTELLECTUAL PROPERTY OPERATION Co.,Ltd. Address before: The city Zhaohui six districts Chao Wang Road Hangzhou City, Zhejiang province 310014 18 Patentee before: ZHEJIANG University OF TECHNOLOGY |
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Granted publication date: 20160413 Termination date: 20210820 |