CN114253003B - Tube shell laser collimation debugging device and method - Google Patents
Tube shell laser collimation debugging device and method Download PDFInfo
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- CN114253003B CN114253003B CN202111511630.1A CN202111511630A CN114253003B CN 114253003 B CN114253003 B CN 114253003B CN 202111511630 A CN202111511630 A CN 202111511630A CN 114253003 B CN114253003 B CN 114253003B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/30—Collimators
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
- H01S5/0078—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for frequency filtering
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Abstract
The invention provides a tube shell laser collimation debugging device and method, based on the 1 st path helium neon red light calibration of a laser optical axis, a diaphragm is adjusted to enable light spots to be as small as possible, a coordinate paper and a height ruler are positioned and pitching deflection is carried out at the same time, and the position of a laser chip is positioned at the upper, lower, left and right straight line positions of the red light; based on the 2 nd He-Ne red light calibration of the 1 st He-Ne red light, determining an initial position according to the 1 st He-Ne red light, and calibrating the pitching deflection when the 2 nd He-Ne red light falls at the 1 st He-Ne red light luminous point; calibrating the pitching deflection position of the laser tube shell based on the calibrated red light and the flat reflector; the pitching deflection and the up-down, left-right positions of the long Jiao Pingtu focusing lens are debugged based on two paths of red light; calibrating the up-down, left-right positions of the aperture diaphragm based on the focused red light; the diaphragm front and back positions are adjusted based on the long Jiao Pingtu focus lens working focal length. The invention solves the problems of high laser collimation and debugging difficulty, unparallel laser optical axis and tube shell, large debugging space requirement and the like, and is suitable for debugging the laser optical paths of various tube shells.
Description
Technical Field
The invention relates to the technical field of measurement and test, in particular to a device and a method for calibrating and debugging tube shell laser.
Background
Semiconductor lasers have been widely used in the fields of laser welding, optical sensing, infrared detection, etc. because of the advantages of high photoelectric conversion efficiency, light weight, wide wavelength coverage, etc. As an engineering application dominant light source, a semiconductor laser is limited by a chip luminescence principle, and the divergence angle of directly outputting laser light is large, so that collimation is required. The semiconductor laser chip is used as a sensitive element, and needs to be packaged in a tube shell so as to be installed in various optical systems, which requires that the tube shell laser should output laser light which is collimated and parallel to the mechanical structure of the tube shell. The scheme adopted by the collimation of the current tube shell laser is a knife edge method or a beam quality analyzer, the knife edge method is high in debugging difficulty, poor in collimation effect and needs a large optical axis space, and the reference of the optical axis of the beam quality analyzer is equipment, so that when the tube shell of the laser is fixed with deviation, the collimated laser optical axis cannot be parallel to the tube shell of the laser, the laser is installed in a system without the reference of the optical axis, difficulty is brought to practical engineering application, and the laser can be collimated only outside in many times, which definitely increases engineering complexity, and further influences system stability.
Disclosure of Invention
The invention aims to solve the problems that the laser collimation and debugging difficulty is high, the consistency of an optical axis and the center of a tube shell cannot be realized, and the debugging space requirement is high. The invention realizes the collimation of the tube shell laser by a simple and visual method, ensures the output laser to be parallel to the tube shell, and improves the tube shell laser collimation efficiency and the engineering usability of the tube shell laser.
The invention provides a tube shell laser collimation debugging device, which comprises a first helium-neon laser, a second helium-neon laser, an adjustable diaphragm, a power meter, a small aperture diaphragm, a long Jiao Pingtu focusing lens, a flat reflector, a movable height ruler, a coordinate paper, a movable positioning screw and a collimating lens, wherein the first helium-neon laser is arranged at two sides of a tube shell laser to be collimated and used for emitting 1 st path of helium-neon red light, the second helium-neon laser is used for emitting 2 nd path of helium-neon red light, the adjustable diaphragm, the power meter, the small aperture diaphragm, the long Jiao Pingtu focusing lens are sequentially arranged between the output end of the first helium-neon laser and the laser output end of the tube shell laser to be collimated, the flat reflector is arranged between the tube shell laser to be collimated and the second helium-neon laser, the movable positioning screw is used for fixing the tube shell laser to be collimated, the first helium-neon laser, the second helium-neon laser, the power meter, the small aperture diaphragm and the long Jiao Pingtu focusing lens, the two-dimensional optical adjusting frame and the collimating lens arranged in the tube shell laser to be collimated;
The adjustable diaphragm is arranged at the laser output end of the first helium-neon laser, the flat reflector is attached to the outer wall of the rear side of the tube shell laser to be collimated, the one-dimensional linear translation table and the two-dimensional optical adjusting frame are arranged on the optical platform, the positioning screw is arranged on the optical platform and used as a position datum point of the height ruler, and the tube shell laser to be collimated comprises a laser chip.
According to the tube shell laser collimation debugging device, as a preferable mode, a tube shell laser to be collimated, a first helium-neon laser, a second helium-neon laser and a long Jiao Pingtu focusing lens are respectively arranged on a five-dimensional adjusting system, the five-dimensional adjusting system comprises 3 one-dimensional linear translation stages and 1 two-dimensional optical adjusting frame, a small aperture diaphragm is arranged on a three-dimensional debugging system, the three-dimensional debugging system comprises 3 one-dimensional linear translation stages, and a power meter is arranged on the 1 one-dimensional linear translation stages;
the adjustable diaphragm is a circular aperture diaphragm with adjustable diameter, and the diameter adjustment range is 0-8 mm; the positioning screw is an inner hexagon screw, the flat reflector is square, and the power meter and the aperture diaphragm are the same in height.
The invention provides a tube shell laser collimation debugging method, which comprises the following steps:
S1, calibrating pitching of 1 st path helium-neon red light emitted by a first helium-neon laser according to an optical platform plane;
s2, calibrating the deflection of the 1 st path helium neon red light;
s3, lowering the upper and lower positions of the tube shell laser to be collimated, and calibrating the upper, lower, left and right straight line positions of the 1 st path of helium neon red light according to the positions of laser chips in the tube shell laser to be collimated;
s4, using the calibrated 1 st path of helium-neon red light as a reference to calibrate the 2 nd path of helium-neon red light emitted by the second helium-neon laser;
s5, correcting the pitching deflection position of the tube shell laser to be collimated according to the 1 st path of helium-neon red light, the 2 nd path of helium-neon red light and the plane mirror;
s6, calibrating the positions of a long Jiao Pingtu focusing lens and an aperture diaphragm according to the 1 st path of HeNe red light and the 2 nd path of HeNe red light, and installing a power meter;
and S7, lifting the tube shell laser to be collimated to an initial position, and precisely adjusting the position of the collimating lens until the power meter displays the maximum output power, and finishing debugging the tube shell laser to be collimated.
The invention relates to a tube shell laser collimation debugging method, which is characterized in that the step S1 comprises the following steps:
s11, enabling the output of the 1 st path helium-neon red light spot to be as small as possible through an adjustable diaphragm, and forming a diffraction-free effect;
S12, recording the near-field light spot height H1 by using a height ruler attached with coordinate paper;
s13, moving the height ruler to be far away from the far end of the optical platform of the 1 st path of helium-neon red light, and adjusting a pitching knob of a two-dimensional optical adjusting frame for fixing the 1 st path of helium-neon red light to enable far-field light spots to fall at the position H1;
s14, moving the height ruler back to the position in the step S12 to acquire the height of the near-field light spot again, judging whether H1 is the near-field light spot, and if so, completing the pitching calibration of the 1 st path helium-neon red light; if not, return to step S13.
The invention relates to a tube shell laser collimation debugging method, which is characterized in that the step S2 comprises the following steps:
s21, fixing a positioning screw on the optical platform, recording column number information of the positioning screw on the optical platform, wherein the position of the positioning screw is near to the output end in the near field of the 1 st path of helium neon red light, and the left and right parts deviate from the optical axis of the 1 st path of helium neon red light;
s22, taking the positioning screw as a datum point, placing a height ruler stuck with coordinate paper, obtaining the accurate position of the near-field light spot, and marking a point on the coordinate paper;
s23, taking down the positioning screw, fixing the positioning screw at the far-field position of the same column on the optical platform, taking the positioning screw as a datum point, placing a height ruler stuck with coordinate paper, observing the left-right offset position of far-field light spots, and adjusting the deflection knob of the two-dimensional optical adjusting frame for fixing the 1 st path helium-neon red light so as to enable the light spots to coincide with the marking points in the step S22;
S24, taking down the positioning screw and installing the positioning screw at the near-field position, judging whether the light spot falls on the marking point made in the step S22, if so, entering the step S25; if not, returning to the step S22;
s25, judging whether the near-field light spot position changes in pitching in the adjusting process, wherein the pitching changes to the condition that the near-field light spot falls above or below the marking point, if so, returning to the step S1, and if not, finishing the deflection calibration of the 1 st path helium-neon red light.
The invention relates to a tube shell laser collimation debugging method, which is characterized in that the step S3 comprises the following steps:
s31, reducing the height of the tube laser to be collimated to the minimum, and then ascending to the 1/2 position of the stroke of the one-dimensional linear translation stage for fixing the tube laser to be collimated;
s32, adjusting the up-down and left-right positions of the one-dimensional linear translation stage to enable light spots to coincide with laser chips of the tube shell laser to be collimated, recording micrometer data of the one-dimensional linear translation stage for fixing the tube shell laser to be collimated and the first helium-neon laser, installing a positioning screw at a far field position in the 1 st path of helium-neon red light deflection calibration, placing a height ruler and making a marking point M, and completing the 1 st path of helium-neon red light up-down and left-right linear position calibration.
The invention relates to a tube shell laser collimation debugging method, which is characterized in that step S4 comprises the following steps:
s41, determining the initial positions of the 2 nd helium neon red light up, down, left and right;
s42, turning off the 1 st path of He-Ne red light, turning on the 2 nd path of He-Ne red light, and adjusting and fixing a pitching deflection knob of a two-dimensional optical adjusting frame of the second He-Ne laser to enable the centers of diaphragms of the 2 nd path of He-Ne red light and the 1 st path of He-Ne red light to coincide;
s43, turning off the 2 nd He-Ne red light, turning on the 1 st He-Ne red light, judging whether the 1 st He-Ne red light falls at the 2 nd He-Ne red light luminous point, if so, finishing the 2 nd He-Ne red pitching deflection calibration, and if not, returning to the step S41.
The invention relates to a tube shell laser collimation debugging method, which is characterized in that step S5 comprises the following steps:
s51, lowering the height of the tube laser to be collimated to the lowest, and starting the 1 st path of helium-neon red light;
s52, confirming that a two-dimensional optical adjusting frame for fixing the second He-Ne laser has no offset included angle with the horizontal and vertical directions of the optical platform from above, adjusting the up-down left-right position of the 2 nd He-Ne red light through a one-dimensional linear translation platform, enabling the 1 st He-Ne red light to fall on the 2 nd He-Ne red light emitting point, and fixing the up-down left-right position of the second He-Ne laser;
S53, recovering the height of the tube shell laser to be collimated according to micrometer data recorded in the step S32;
s54, starting the 2 nd path of HeNe red light, attaching the plane reflecting mirror to the center of the rear wall of the tube shell laser to be collimated, forming reflected light by the 2 nd path of HeNe red light, adjusting and fixing the two-dimensional optical adjusting frame knob of the tube shell laser to be collimated, and enabling the reflected light formed by the plane reflecting mirror to be located at the luminous point of the 2 nd path of HeNe red light, wherein the pitching deflection position of the tube shell laser to be collimated is calibrated.
The invention relates to a tube shell laser collimation debugging method, which is characterized in that step S6 comprises the following steps:
s61, reducing the height of the tube laser to be collimated to the minimum, closing the 1 st path of helium-neon red light, and confirming that a two-dimensional optical adjusting frame of a fixed length Jiao Pingtu focusing lens and an optical platform form no offset included angle in the horizontal and vertical directions from the upper part;
s62, adjusting a knob of a two-dimensional optical adjusting frame of a fixed length Jiao Pingtu focusing lens to enable the focused 2 nd He-Ne red light spot to coincide with the center of the 1 st He-Ne red light diaphragm; the up-down, left-right positions of a one-dimensional translation stage of a fixed length Jiao Pingtu focusing lens are adjusted, so that the reflected light of the length Jiao Pingtu focusing lens coincides with the center of a 2 nd path helium-neon red light emitting point;
S63, starting a 1 st path of helium neon red light, initially installing a small aperture diaphragm according to the 1 st path of helium neon red light position, debugging to enable the small aperture diaphragm to be positioned between the 1 st path of helium neon red light and a long Jiao Pingtu focusing lens, and debugging the upper, lower, left and right positions of the small aperture diaphragm through a one-dimensional translation table for fixing the small aperture diaphragm until the center of the small aperture diaphragm is completely overlapped with the 1 st path of helium neon red light spot;
s64, debugging the front and back positions of the aperture diaphragm through a one-dimensional translation table until the aperture diaphragm is positioned at the focal position of the long Jiao Pingtu focusing lens, measuring the distance between the aperture diaphragm and the long Jiao Pingtu focusing lens through a vernier caliper, wherein the focal position is a set parameter of the long Jiao Pingtu focusing lens;
s65, adjusting a one-dimensional linear translation stage of the fixed power meter to enable the center height of a receiving port of the power meter to be concentric with the 1 st path helium-neon red light, and fixing the power meter behind the aperture diaphragm.
In the invention, as a preferable mode, in the step S7, the adjustment method of the collimating lens is as follows: the preliminary position of the collimating lens was calibrated using he—ne 2 red light, and the position of the collimating lens was adjusted in real time using a combination of a power meter, aperture stop, and long Jiao Pingtu focusing lens until the power meter showed maximum.
The whole set of debugging device is arranged on an optical platform and comprises helium-neon red light, a tube shell laser to be collimated, a height ruler attached with coordinate paper, a positioning screw, a two-dimensional optical adjusting frame, a one-dimensional linear translation table, an adjustable diaphragm, a flat reflector, a long Jiao Pingtu focusing lens, a small aperture diaphragm, a power meter and a vernier caliper;
the positioning screw is placed at the near-field position and the far-field position of the optical platform to provide uniform positioning points; the height ruler pasted with the coordinate paper provides an observation reference for helium-neon red light calibration;
the 1 st path of helium neon red light, the 2 nd path of helium neon red light, the tube shell laser to be collimated and the long Jiao Pingtu focusing lens are all assembled on a five-dimensional adjusting system formed by combining 3 one-dimensional linear translation stages and 1 two-dimensional optical adjusting frames, the aperture diaphragm is all assembled on a three-dimensional adjusting system formed by 3 one-dimensional linear translation stages, and the power meter is assembled on the 1 one-dimensional linear translation stages; the positioning screw is an inner hexagonal M6 screw arranged on the optical platform; the adjustable diaphragm is a round hole diaphragm, the size of the adjustable diaphragm is adjustable, the aperture is adjusted by utilizing the adjustable diaphragm, and the light spot of the 1 st path helium neon red light is reduced;
a laser chip is fixedly arranged in the tube shell laser to be collimated, and the five-dimensional adjusting system is adjusted to enable the 1 st path of helium neon red light and the 2 nd path of helium neon red light to be respectively positioned at two sides of the tube shell laser and have the same optical axis; the long Jiao Pingtu focusing lens focuses 2 nd helium-neon red light, the focusing point is positioned at the aperture diaphragm, the lens plane reflection light spot coincides with the optical axis, the power meter is installed behind the aperture diaphragm at the same height, and the focusing lens, the laser collimating lens, the aperture diaphragm and the power meter jointly form a laser chip imaging system; the flat reflector is closely attached to the outer wall of the tube shell laser, laser tube shell calibration is completed by reflecting 1 path of red light, the flat reflector is regular square, and the parallelism of the mirror surface and the reflecting surface is good, so that the flat reflector can be tightly attached to the tube shell of the laser tube to be collimated;
The primary position of a laser collimating lens of a tube shell to be collimated is calibrated by utilizing the 2 nd helium neon red light, the position of the collimating lens is adjusted in real time by utilizing a long Jiao Pingtu focusing lens, a small aperture diaphragm and a power meter combination until the power meter shows the maximum, and the laser with the collimating tube shell outputs laser which is well collimated and parallel to the laser tube shell;
calibrating the 1 st path of He-Ne red light to pitch, yaw and vertical and horizontal straight line positions according to the position of a laser chip in the tube shell laser to be collimated and the optical platform, wherein the calibrated 1 st path of He-Ne red light is used as a reference to calibrate the 2 nd path of He-Ne red light; the 1 st and 2 nd helium neon red lights are adjusted to calibrate the long-focus plano-convex focusing lens, the aperture diaphragm and the power meter; the two-dimensional optical adjusting frame realizes pitching deflection adjustment, and the one-dimensional linear translation table realizes up-down linear position adjustment.
The step of 1 st helium neon red pitching calibration is as follows:
(1) The 1 st path helium-neon red light spot output is as small as possible through the adjustable diaphragm, namely no diffraction effect is achieved;
(2) Recording the near-field light spot height H1 by adopting a height ruler attached with coordinate paper;
(3) Moving the height ruler to be far away from the far end of the optical platform of the 1 st path of helium-neon red light, and adjusting the pitching knob of the two-dimensional optical adjusting frame of the 1 st path of helium-neon red light to enable far-field light spots to fall at the position H1;
(4) Moving the height ruler back to the position in the step (2) to acquire the height of the near-field light spot again, wherein the height is H1, namely pitch calibration is considered to be completed; and (3) repeating the steps (2) and (3) if the light spots at different heights until the far-near-field light spots are at the same height.
The step of the 1 st path helium neon red light deflection calibration is as follows:
(1) The positioning screw is fixed on the optical platform and records the column number information of the optical platform where the positioning screw is positioned; the position of the positioning screw is near the output end in the 1 st path of He-Ne red light near field, and the left and right parts deviate from the 1 st path of He-Ne red light optical axis;
(2) Taking the screw as a datum point, placing a height ruler stuck with coordinate paper, obtaining the accurate position of a near-field light spot and making a mark point on the coordinate paper;
(3) Taking down the screws in the step (1), fixing the screws at far-field positions of the same column on the optical platform, placing a height ruler stuck with coordinate paper in a mode of the step (2), observing left-right deviation positions of light spots, and adjusting a deflection knob of the 1 st path He-Ne-Red two-dimensional optical adjusting frame to enable the light spots to coincide with marking points made in the step (2);
(4) Taking down the screw again, installing the screw at a near field position, observing whether the light spot falls on the mark point, and repeating the steps (2), (3) and (4) until the light spot far from or near to the field does not swing left and right if the light spot does not fall on the mark point;
(5) And judging whether the light spot position changes in a pitching manner in the adjusting process, namely, whether the light spot falls above or below the marking point, and if so, restarting the pitching of the 1 st path helium-neon red light.
The calibration steps of the up-down, left-right straight line position of the 1 st path helium neon red light are as follows:
(1) Lowering the height of the tube shell laser to be collimated to the lowest, and raising the height to the 1/2 position of the stroke of the one-dimensional linear translation stage;
(2) And adjusting the vertical and horizontal linear translation stages of the 1 st path of helium-neon red light to enable the light spots to coincide with the laser chip, recording the data of the laser and the micrometer of the linear translation stages of the 1 st path of helium-neon red light, installing a positioning screw at the far field position in the deflection calibration of the 1 st path of helium-neon red light, placing a height ruler, and marking the point M.
The step of the 2 nd helium neon red pitching deflection calibration is as follows:
s1, determining the initial positions of the 2 nd path helium neon red light up, down, left and right;
s2, turning off the 1 st path of He-Ne red light, turning on the 2 nd path of He-Ne red light, and adjusting a pitching deflection knob of the 2 nd path of He-Ne red light two-dimensional optical adjusting frame to enable the centers of the 2 nd path of He-Ne red light and the 1 st path of He-Ne red light diaphragm to completely coincide;
s3, turning off the 2 nd He-Ne red light, turning on the 1 st He-Ne red light, observing whether the 1 st He-Ne red light falls at the 2 nd He-Ne red light luminous point, and if not, restarting execution from S1 until the 2 nd He-Ne red light and the 1 st He-Ne red light completely coincide;
The method for determining the initial positions of the 2 nd helium neon red light up, down, left and right comprises the following steps:
and the height of the tube shell laser to be collimated is reduced to the lowest, a 1 st He-Ne red light is started, a 2 nd He-Ne red light two-dimensional optical adjusting frame has no offset included angle with the horizontal vertical direction of the optical platform when seen from the top, the up-down left-right position of the 2 nd He-Ne red light is adjusted through a one-dimensional linear translation platform, the 1 st He-Ne red light is ensured to fall at a 2 nd He-Ne red light luminous point, and the initial position of the 2 nd He-Ne red light is fixed.
The pitching deflection calibration steps of the laser tube shell to be collimated are as follows:
and recovering the height of the shell laser according to the recorded micrometer data, starting the 2 nd path of helium-neon red light, enabling the plane reflecting mirror to be attached to the center of the back wall of the shell, forming reflected light by the 2 nd path of helium-neon red light at the moment, and adjusting the knob of the two-dimensional optical adjusting frame of the laser to enable the reflected light formed by the plane reflecting mirror to be positioned at the luminous point of the 2 nd path of helium-neon red light.
The long Jiao Pingtu focusing lens calibration steps are as follows:
lowering the height of the tube shell laser to be collimated to the lowest, closing the 1 st path of helium-neon red light, looking up a Jiao Pingtu focusing lens two-dimensional optical adjusting frame from the upper side, adjusting a focusing lens two-dimensional optical adjusting frame knob without an offset included angle in the horizontal vertical direction of the optical platform, and enabling the focused 2 nd path of red light spots to coincide with the 1 st path of helium-neon red light diaphragm center; and (3) adjusting the one-dimensional translation stage, and moving the focusing lens up, down, left and right so that the reflected light coincides with the center of the 2 nd path helium-neon red light emitting point.
The installation steps of the aperture diaphragm and the power meter are as follows:
starting a 1 st path of helium neon red light, initially installing an aperture diaphragm debugging system according to the 1 st path of helium neon red light, and debugging the upper, lower, left and right positions of an aperture through a one-dimensional translation table between the 1 st path of helium neon red light and a focusing lens until the center of the aperture diaphragm is completely overlapped with a 1 st path of helium neon red light spot; debugging the front and back positions of the aperture diaphragm through a one-dimensional translation table until the aperture diaphragm is positioned at the focal position of the focusing lens, wherein the distance between the front and back positions is measured through a vernier caliper, and the focal position is a preset parameter of the lens; and (3) adjusting a one-dimensional linear translation stage of the power meter to ensure that the center height of the receiving port is concentric with the 1 st path helium-neon red light, and fixing the power meter behind the aperture diaphragm.
Compared with the prior art, the invention has the advantages that:
the common collimation method of the semiconductor shell laser is knife edge method or beam quality analyzer collimation. When the knife edge method is used for collimation, the knife edge is required to be arranged at a position far away from output light, the debugging space is large, and the knife edge is used for restraining one axial light spot of laser, so that the collimation degree of the other axial light spot cannot be ensured, and therefore, the quality of the collimated laser beam is poor. The other is a beam quality analyzer, which can intuitively measure the beam quality of the collimated laser, and can ensure the collimation effect, but the reference light is the self-contained light source, so that the collimated laser beam is parallel to the reference light. However, in practical engineering application, the laser tube is usually used as a mechanical positioning device when the tube laser is installed, which requires that the output laser is parallel to the tube, but the laser alignment and adjustment of the beam quality analyzer cannot guarantee this. The invention establishes 2 paths of helium neon red indicating lights through the laser chip position, establishes a standard for the subsequent debugging of the focusing lens and the collimating lens, is a reference of the laser tube shell position, and is an engineering requirement which is not paid attention to in the traditional method. The invention establishes a collimating lens, a collecting lens, a small aperture diaphragm and a power meter laser chip imaging observation system, can visually detect the collimating effect of a laser through power meter reading, and is different from the traditional knife edge method of long-distance and large-space multipoint test and analog calculation, and the method is visual and simple. The invention realizes the collimation of the tube shell laser by a simple and visual method, ensures the output laser to be parallel to the tube shell, and improves the tube shell laser collimation efficiency and the engineering usability of the tube shell laser.
Drawings
FIG. 1 is a schematic diagram of a tube shell laser collimation adjustment device;
FIG. 2 is a schematic diagram of a one-dimensional linear translation stage of a tube shell laser collimation adjustment device;
FIG. 3 is a schematic view of a two-dimensional optical adjusting frame of a tube shell laser collimation adjustment device;
fig. 4 is a flow chart of a tube shell laser collimation debugging method.
Reference numerals:
1. a first helium-neon laser; 2. a second helium-neon laser; 3. an adjustable diaphragm; 4. a power meter; 5. a small aperture stop; 6. a long Jiao Pingtu focusing lens; 7. a flat mirror; 8. a height ruler; 9. coordinate paper; 10. a set screw; 11. a one-dimensional linear translation stage; 12. a two-dimensional optical adjustment frame; 13. a collimating lens.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments.
Example 1
As shown in fig. 1-3, a tube shell laser collimation debugging device comprises a first helium-neon laser 1, a second helium-neon laser 2, an adjustable diaphragm 3, a power meter 4, a small aperture diaphragm 5, a long Jiao Pingtu focusing lens 6, a flat reflector 7, a movable height rule 8, a coordinate paper 9, a movable positioning screw 10, a one-dimensional linear translation stage 11, a two-dimensional optical adjustment frame 12 and a collimating lens diaphragm 13, wherein the first helium-neon laser 1 is arranged at two sides of a tube shell laser to be collimated and used for emitting 1 st path of helium-neon red light, the second helium-neon laser 2 is used for emitting 2 nd path of helium-neon red light, the adjustable diaphragm 3, the power meter 4, the small aperture diaphragm 5, the long Jiao Pingtu focusing lens 6 are sequentially arranged between the output end of the first helium-neon laser 1 and the laser output end of the tube shell laser to be collimated, the flat reflector 7 is arranged between the tube shell laser to be collimated, the movable height rule 8, the coordinate paper 9 is arranged on the height rule 8, and the movable positioning screw 10 is used for fixing the tube shell laser to be collimated, the first helium-neon laser 1, the second helium-neon laser 2, the power meter 4, the small aperture diaphragm 5, the long Jiao Pingtu focusing lens 12 are arranged in the tube to be collimated;
The adjustable diaphragm 3 is attached to the laser output end of the first helium-neon laser 1, the flat reflector 7 is attached to the outer wall of the rear side of the tube shell laser to be collimated, the one-dimensional linear translation stage 11 and the two-dimensional optical adjusting frame 12 are arranged on an optical platform, the positioning screw 10 is arranged on the optical platform, the positioning screw 10 is used as a position datum point of the height ruler 8, and the tube shell laser to be collimated comprises a laser chip;
the device comprises a tube laser to be collimated, a first helium-neon laser 1, a second helium-neon laser 2 and a long Jiao Pingtu focusing lens 6, wherein the tube laser to be collimated, the first helium-neon laser 1, the second helium-neon laser 2 and the long Jiao Pingtu focusing lens 6 are respectively arranged on a five-dimensional adjusting system, the five-dimensional adjusting system comprises 3 one-dimensional linear translation stages 11 and 1 two-dimensional optical adjusting frame 12, an aperture diaphragm 5 is arranged on a three-dimensional debugging system, the three-dimensional debugging system comprises 3 one-dimensional linear translation stages 11, and a power meter 4 is arranged on the 1 one-dimensional linear translation stages 11;
the adjustable diaphragm 3 is a circular aperture diaphragm with adjustable diameter, and the diameter adjustment range is 0-8 mm; the positioning screw 10 is an inner hexagon screw, the flat reflector 7 is square, and the power meter 4 and the aperture diaphragm 5 are the same in height.
Example 2
As shown in fig. 1-3, a tube shell laser collimation and adjustment device is arranged on an optical platform, and comprises a first helium-neon laser 1, a first helium-neon laser 2, a tube shell laser to be collimated, a height ruler 8 attached with coordinate paper 9, a positioning screw 10, a two-dimensional optical adjusting frame 12, a one-dimensional linear translation table 11, an adjustable diaphragm 3, a flat reflector 7, a long Jiao Pingtu focusing lens 6, a small aperture diaphragm 5, a power meter 4 and a vernier caliper.
The positioning screw 10 is placed at the near-field position and the far-field position of the optical platform to provide uniform positioning points; the height ruler pasted with the coordinate paper provides an observation reference for helium-neon red light calibration;
the first helium-neon laser 1, the first helium-neon laser 2, the tube shell laser to be collimated and the long Jiao Pingtu focusing lens 6 are all assembled on a five-dimensional adjusting system formed by combining 3 one-dimensional linear translation stages and 1 two-dimensional optical adjusting frame, the small aperture diaphragm 5 is all assembled on a three-dimensional debugging system formed by 3 one-dimensional linear translation stages, and the power meter 4 is assembled on 1 one-dimensional linear translation stage; the positioning screw 10 is an inner hexagonal M6 screw arranged on the optical platform; the adjustable diaphragm 3 is a round hole diaphragm, and the size of the adjustable diaphragm is adjustable. And the aperture is adjusted by using the adjustable aperture, so that the light spot of the No. 1 He-Ne red light is reduced.
A laser chip is fixedly arranged in the tube shell laser to be collimated, and the five-dimensional adjusting system is adjusted to enable the 1 st path of helium neon red light and the 2 nd path of helium neon red light to be respectively positioned at two sides of the tube shell laser and have the same optical axis; a long Jiao Pingtu focusing lens 6 focuses 2 nd helium-neon red light, the focusing point is positioned at the aperture diaphragm 3, the lens plane reflection light spot coincides with the optical axis, a power meter 4 is arranged behind the aperture diaphragm 3 at the same height, and the focusing lens, a laser collimating lens 13, the aperture diaphragm 3 and the power meter 4 form a laser chip imaging system together; the flat reflector 7 is closely attached to the outer wall of the tube shell laser, laser tube shell calibration is completed by reflecting 1 path of red light, the flat reflector 7 is regular square, the parallelism of a mirror surface and a reflecting surface is good, and the tight attachment of the flat reflector and the tube shell of the laser tube to be collimated is ensured.
A first helium-neon laser 1 and a first helium-neon laser 2: outputting collimation visible helium-neon red light, and providing an indication for debugging a collimation system of the tube shell laser;
a tube laser to be collimated: the laser chip is powered on to output large-divergence-angle laser, and a collimating lens is needed to be inserted to realize the output of collimated light;
the height gauge 8 with the coordinate paper 9 attached: providing an observation reference for helium neon light calibration;
set screw 10: a uniform positioning point is provided for placing the height ruler at the near-field position and the far-field position of the optical platform, and an inner hexagonal M6 screw is arranged on the optical platform;
two-dimensional optical adjustment frame 12: the lens is assembled in helium-neon red light, a lens and other systems to realize pitching deflection adjustment;
one-dimensional linear translation stage 11: the device is assembled in helium-neon red light, lenses and other systems to realize the adjustment of the straight line positions of the upper part, the lower part, the left part, the right part, the front part, the back part and the back part;
adjustable aperture 3: the aperture is adjusted, 1 path of helium-neon red light spots are reduced, and the diameter can be adjusted within 0-8 mm;
flat mirror 7: the mirror surface and the reflecting surface are regular square, have good parallelism, can be tightly attached to the tube shell of the laser to be collimated, and realize pitching deflection adjustment of the tube shell;
long Jiao Pingtu focusing lens 6: long focal length, plane shape being plano-convex, known working distance, high transmittance at laser working wavelength;
Aperture stop 5: the aperture is smaller than the imaging size of the light-emitting unit of the laser chip;
power meter 4: the wavelength of the laser to be collimated can be measured, and the test range covers the laser power;
vernier caliper: and a distance between the focusing lens and the aperture diaphragm is positioned by a common vernier caliper.
The helium neon red light is a small helium neon laser for outputting collimated red light, can provide indication for near-field and far-field light paths, contains 2 paths of helium neon red light, specifically outputs helium neon laser with wavelength of 633nm, outputs collimated light spot diameter of 4mm, is visible to human eyes, and is convenient to debug;
the first He-Ne laser 1 and the first He-Ne laser 2 specifically output He-Ne laser with wavelength of 633nm and output collimation light spot diameter of 4mm; a tube-shell laser to be collimated: the chip comprises a laser chip, wherein the specific embodiment is a laser chip with the wavelength of 1.5 mu m, the average power is 50mw, and the luminous size of the chip is 2 times 150 mu m; flat mirror 7: regular squares, 5 x 5mm gold-plated mirrors employed in this embodiment; long Jiao Pingtu focusing lens 6: the embodiment adopts the method that the focal length is 80mm, the plane working distance is 76.2mm, and the transmittance at the wavelength of 1.5 mu m is 98%; aperture stop 5: the aperture of the diaphragm of the embodiment is 0.5mm; power meter 4: the laser with the diameter of 1.5 mu m can be measured, and the power test range is 0-100 mW.
Example 3
As shown in fig. 4, a tube shell laser collimation debugging method comprises the following steps:
s1, calibrating pitching of 1 st path helium-neon red light emitted by a first helium-neon laser 1 according to an optical platform plane;
s11, enabling the output of the 1 st path helium-neon red light spot to be as small as possible through the adjustable diaphragm 3, and forming a diffraction-free effect;
s12, recording the near-field light spot height H1 by using a height ruler 8 attached with a coordinate paper 9;
s13, moving the height ruler 8 to be far away from the far end of the optical platform of the 1 st path of helium-neon red light, and adjusting the pitching knob of the two-dimensional optical adjusting frame 12 for fixing the 1 st path of helium-neon red light to enable far-field light spots to fall at the position H1;
s14, moving the height ruler 8 back to the position in the step S12 to acquire the height of the near-field light spot again and judging whether H1 is the near-field light spot, if so, completing the pitching calibration of the 1 st path helium-neon red light; if not, returning to the step S13;
s2, calibrating the deflection of the 1 st path helium neon red light;
s21, fixing the positioning screw 10 on an optical platform, recording column number information of the positioning screw 10 on the optical platform, wherein the position of the positioning screw 10 is near to an output end in a near field of the 1 st path of He-Ne red light, and the left and right parts deviate from the optical axis of the 1 st path of He-Ne red light;
s22, taking the positioning screw 10 as a datum point, placing a height ruler 8 stuck with the coordinate paper 9, obtaining the accurate position of the near-field light spot and making a mark point on the coordinate paper 9;
S23, taking down the positioning screw 10, fixing the positioning screw 10 at far-field positions of the same column on the optical platform, taking the positioning screw 10 as a datum point, placing the height ruler 8 stuck with the coordinate paper 9, observing the left-right offset position of far-field light spots, and adjusting the deflection knob of the two-dimensional optical adjusting frame 12 for fixing the 1 st path helium-neon red light so as to enable the light spots to coincide with the marking points in the step S22;
s24, taking down the positioning screw 10 and installing the positioning screw in a near-field position, judging whether a light spot falls on the marking point made in the step S22, if so, entering the step S25; if not, returning to the step S22;
s25, judging whether the near-field light spot position changes in pitching in the adjusting process, wherein the pitching changes to the condition that the near-field light spot falls above or below the marking point, if so, returning to the step S1, and if not, finishing the deflection calibration of the 1 st path helium-neon red light;
s3, lowering the upper and lower positions of the tube shell laser to be collimated, and calibrating the upper, lower, left and right straight line positions of the 1 st path of helium neon red light according to the positions of laser chips in the tube shell laser to be collimated;
s31, reducing the height of the tube laser to be collimated to the lowest, and then ascending to the 1/2 position of the stroke of the one-dimensional linear translation stage 11 for fixing the tube laser to be collimated;
S32, adjusting the up-down and left-right positions of the one-dimensional linear translation stage 11 to enable light spots to coincide with laser chips of the tube shell laser to be collimated, recording micrometer data of the one-dimensional linear translation stage 11 for fixing the tube shell laser to be collimated and the first helium-neon laser 1, installing a positioning screw 10 at a far field position in the 1 st path of helium-neon red light deflection calibration, placing a height ruler 8 and making a marking point M, and completing the 1 st path of helium-neon red light up-down and left-right linear position calibration;
s4, using the calibrated 1 st path of helium-neon red light as a reference to calibrate the 2 nd path of helium-neon red light emitted by the second helium-neon laser 2;
s41, determining the initial positions of the 2 nd helium neon red light up, down, left and right;
s42, turning off the 1 st path of He-Ne red light, turning on the 2 nd path of He-Ne red light, and adjusting and fixing a pitching deflection knob of the two-dimensional optical adjusting frame 12 of the second He-Ne laser 2 to enable the centers of diaphragms of the 2 nd path of He-Ne red light and the 1 st path of He-Ne red light to coincide;
s43, turning off the 2 nd He-Ne red light, turning on the 1 st He-Ne red light, judging whether the 1 st He-Ne red light falls at the 2 nd He-Ne red light luminous point, if so, finishing the 2 nd He-Ne red pitching deflection calibration, and if not, returning to the step S41;
s5, correcting the pitching deflection position of the tube shell laser to be collimated according to the 1 st path of HeNe red light, the 2 nd path of HeNe red light and the plane mirror 7;
S51, lowering the height of the tube laser to be collimated to the lowest, and starting the 1 st path of helium-neon red light;
s52, confirming that no offset included angle exists between the two-dimensional optical adjusting frame 12 for fixing the second He-Ne laser 2 and the horizontal and vertical directions of the optical platform from above, adjusting the up-down left-right position of the 2 nd He-Ne red light through the one-dimensional linear translation table 11, enabling the 1 st He-Ne red light to fall on the 2 nd He-Ne red light emitting point, and fixing the up-down left-right position of the second He-Ne laser 2;
s53, recovering the height of the tube shell laser to be collimated according to micrometer data recorded in the step S32;
s54, starting the 2 nd path of HeNe red light, attaching the plane reflector 7 to the center of the rear wall of the tube shell laser to be collimated, forming reflected light by the 2 nd path of HeNe red light, adjusting and fixing the knob of the two-dimensional optical adjusting frame 12 of the tube shell laser to be collimated to enable the reflected light formed by the plane reflector 7 to be positioned at the luminous point of the 2 nd path of HeNe red light, and finishing the pitching deflection position calibration of the tube shell laser to be collimated;
s6, calibrating the positions of the long Jiao Pingtu focusing lens 6 and the aperture diaphragm 5 according to the 1 st path of HeNe red light and the 2 nd path of HeNe red light, and installing the power meter 4;
s61, the height of the tube laser to be collimated is reduced to the lowest, the 1 st path of helium-neon red light is closed, and a two-dimensional optical adjusting frame 12 of a fixed length Jiao Pingtu focusing lens 6 and an optical platform are confirmed to have no offset included angle in the horizontal and vertical directions from the upper part;
S62, adjusting a knob of the two-dimensional optical adjusting frame 12 of the fixed length Jiao Pingtu focusing lens 6 to enable the focused 2 nd He-Ne red light spot to coincide with the center of the 1 st He-Ne red light diaphragm; the vertical and horizontal positions of the one-dimensional translation table 11 of the fixed length Jiao Pingtu focusing lens 6 are adjusted to enable the reflected light of the length Jiao Pingtu focusing lens 6 to coincide with the center of the 2 nd path of helium-neon red light emitting point;
s63, starting a 1 st path of helium neon red light, initially installing an aperture diaphragm 5 according to the 1 st path of helium neon red light position, debugging to enable the aperture diaphragm 5 to be positioned between the 1 st path of helium neon red light and a long Jiao Pingtu focusing lens 6, and debugging the upper, lower, left and right positions of the aperture diaphragm 5 through a one-dimensional translation table 11 for fixing the aperture diaphragm 5 until the center of the aperture diaphragm 5 is completely overlapped with the 1 st path of helium neon red light spots;
s64, debugging the front and back positions of the aperture diaphragm 5 through the one-dimensional translation table 11 until the aperture diaphragm 5 is positioned at the focal position of the long Jiao Pingtu focusing lens 6, and measuring the distance between the aperture diaphragm 5 and the long Jiao Pingtu focusing lens 6 through a vernier caliper, wherein the focal position is a set parameter of the long Jiao Pingtu focusing lens 6;
s65, adjusting a one-dimensional linear translation table 11 of the fixed power meter 4 to enable the center height of a receiving port of the power meter 4 to be concentric with the 1 st path of helium-neon red light, and fixing the power meter 4 against the rear of the aperture diaphragm 5;
S7, lifting the tube shell laser to be collimated to an initial position, and precisely adjusting the position of the collimating lens 13 until the power meter 4 displays the maximum output power, and finishing debugging the tube shell laser to be collimated;
the adjustment method of the collimator lens 13 is as follows: the preliminary position of the collimator lens 13 was calibrated using he—ne 2 red light, and the position of the collimator lens 13 was adjusted in real time using the combination of the power meter 4, the aperture stop 5 and the long Jiao Pingtu focusing lens 6 until the power meter 4 showed maximum.
Example 4
As shown in fig. 4, a tube shell laser collimation debugging method comprises the following steps:
(1) Calibrating 1-path helium neon red pitching according to the position of the laser chip;
(2) 1 st line He-Ne red light pitching deflection calibration;
(3) The 1 st line helium neon red light is in a straight line position from top to bottom to left and right;
(4) The 1 st line of the calibrated He-Ne red light is used as a reference to calibrate the 2 nd line of He-Ne red light;
(5) Calibrating pitching deflection of the laser tube shell by using a flat reflector:
(6) Mounting a calibration length Jiao Pingtu focusing lens:
(7) Installing an aperture diaphragm and a power meter:
the detailed steps are as follows:
developing 1 st-path helium neon red pitching deflection calibration: the positioning screw 10 is fixed on the optical platform, the fixed position of the embodiment is the 6 th row from the edge of the optical platform, and the optical axis of the 1 st path of helium-neon red light emitted by the first helium-neon laser 1 is in the 5 th row; taking the vertex of the positioning screw 10 as a datum point, placing the height rule 8, obtaining the accurate position of the near-field light spot and making a mark point on the coordinate paper 9; taking down the screw, fixing the screw at the 6 th column position of the far field on the optical platform, placing the height ruler 8 in the same way, and observing the left and right positions of the light spots; adjusting the deflection knob of the first He-Ne laser 1 to enable the light spot to fall to coincide with a mark point made in a near place (if the pitching is found to change, namely the light spot should fall right above or right below the mark point); the positioning screw 10 is taken down again and is arranged at the near field position, whether the light spot falls on the mark point is observed, otherwise, the positioning point is needed to be made again and calibrated for many times until the light spot far from the near field does not swing left and right, and the embodiment is repeatedly debugged for 3 times; if the change of pitching of the light spot is found, the pitching should be recalibrated after the yaw calibration is completed, the left and right positions are checked until the light spots in the far-near field coincide, the change is found in the embodiment, and the check is correct after 1 adjustment.
Calibrating the vertical, horizontal and vertical linear positions of the 1 st helium neon red light: lowering the height of the laser with the tube shell to the lowest, and raising the height to the position of 1/2 of the stroke of the one-dimensional linear translation stage 11, wherein the height is specifically 24mm, so that the debugging system of the post-collimating lens 13 can freely enter and exit the tube shell; and adjusting the up-down translation stage and the left-right translation stage of the 1 st helium-neon red light so as to enable the light spot to coincide with the laser chip, and recording the data of the shell laser and the micrometer of the 1 st helium-neon infrared translation stage. And installing the positioning screw 10 at the 6 th column far field position, placing the height ruler 8, and marking the point M, wherein the 1 st helium-neon red light calibration is completed.
Calibration helium neon red on line 2: the height of the laser with the tube shell is reduced to the lowest, the 1 st helium neon red light is started, no offset included angle is formed between the 2 nd adjusting frame and the horizontal vertical direction of the optical platform when the laser is seen from the top, the up-down left-right position of the 2 nd helium neon red light is adjusted, the 1 st helium neon red light is ensured to fall at the 2 nd helium neon red light luminous point, and the 2 nd helium neon red light initial position is fixed. Closing the 1 st path of helium-neon red light, opening the 2 nd path of helium-neon red light, and adjusting the 2 nd path of pitching deflection knob to enable the 2 nd path of helium-neon red light to completely coincide with the 1 st path of diaphragm center; and closing the 2 nd He-Ne red light, opening the 1 st He-Ne red light, observing whether the 1 st He-Ne red light falls at the position of the 2 nd He-Ne red light luminous point, repeating debugging until the 2 nd He-Ne red light completely coincides with the 1 st He-Ne red light, recording the data of the 2 nd He-Ne red linear translation stage micrometer, and repeating debugging for 4 times in the embodiment to realize the calibration of the 2 nd He-Ne red light.
And recovering the height of the shell laser according to the recorded micrometer data, and adjusting the knob of the two-dimensional optical adjusting frame 12 of the laser according to the plane mirror 7 to enable the plane mirror 7 to form a luminous point of the reflected light positioned in the 2 nd path of helium-neon red light. In this example, a piece of a generally rectangular white paper piece was used to observe red light. Particularly, in this embodiment, the plane orientation of the long Jiao Pingtu focusing lens 66 is 1 st path of he—ne red light, the height of the tube shell laser to be collimated is reduced to the lowest again, the 1 st path of he—ne red light is closed, the two-dimensional optical adjusting frame 12 of the long Jiao Pingtu focusing lens 6 has no offset included angle with the horizontal vertical direction of the optical platform when seen from above, and the knob of the two-dimensional optical adjusting frame 12 of the long Jiao Pingtu focusing lens 6 is adjusted, so that the focused 2 nd path of red light spot coincides with the center of the 1 st path of he—ne red light diaphragm; the one-dimensional linear translation stage 11 is adjusted, and the focusing lens 6 with the length Jiao Pingtu is moved up and down and left and right, so that the reflected light coincides with the center of the 2 nd path helium-neon red light emitting point. In particular, according to the present embodiment, the focal length of the collimating lens 13 is 5.5mm, and the focal spot size is 2.18 x 0.03mm according to the imaging system principle, and the position should fall on the working distance 76.2mm of the plane of the long Jiao Pingtu focusing lens 6, and the aperture of the small hole in this embodiment is 0.5mm. Starting a 1 st path of helium neon red light, initially installing a small aperture diaphragm 5 debugging system, and debugging the upper, lower, left and right positions of the small aperture diaphragm 5 until the center of the small aperture is completely overlapped with the 1 st path of helium neon red light spot; debugging the front and back positions of the aperture diaphragm 5 until the distance between the aperture diaphragm 5 and the plane of the focusing lens is 76.2mm, and measuring the distance between the aperture diaphragm 5 and the plane of the focusing lens by a vernier caliper; the one-dimensional linear translation table 11 of the power meter 4 is adjusted to ensure that the center height of the receiving port is concentric with the 1 st path helium-neon red light, the power meter 4 is fixedly arranged behind the aperture diaphragm 5, and the focusing lens, the laser collimating lens 13, the aperture diaphragm 5 and the power meter 4 form a laser chip imaging system together.
In this embodiment, the installation of the collimator adjustment system is completed, and the adjustment of the collimator lens 13 is performed. And (3) according to the initial adjustment of the focal length of the lens, the position of the collimating lens 13 is arranged, the pitching deflection position of the lens is adjusted by referring to the 2 nd path of helium-neon light, and the height of the 1.5 mu m tube shell laser to be collimated is recovered. Starting the laser chip and the power meter 4, and debugging the upper, lower, left and right positions of the lens until the indication display of the power meter 4 is highest, wherein the maximum indication display is 10.3mw in the embodiment, at the moment, the laser collimation is considered to be finished, and the quality of the test laser beam is consistent with the direct adjustment result of the beam quality analyzer device.
The foregoing is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art, who is within the scope of the present invention, should make equivalent substitutions or modifications according to the technical scheme of the present invention and the inventive concept thereof, and should be covered by the scope of the present invention.
Claims (10)
1. A tube shell laser collimation debugging device is characterized in that: the laser collimator comprises a first helium-neon laser (1) which is arranged at two sides of a tube shell laser to be collimated and is used for emitting 1 st path of helium-neon red light, a second helium-neon laser (2) which is used for emitting 2 nd path of helium-neon red light, an adjustable diaphragm (3), a power meter (4), a small hole diaphragm (5) and a long Jiao Pingtu focusing lens (6) which are sequentially arranged between the output end of the first helium-neon laser (1) and the laser output end of the tube shell laser to be collimated, a flat reflector (7) which is arranged between the tube shell laser to be collimated and the second helium-neon laser (2), a movable height rule (8), coordinate paper (9) which is arranged on the height rule (8), a movable positioning screw (10) which is used for fixing the tube shell laser to be collimated, the first helium-neon laser (1), the second helium-neon laser (2), the power meter (4), the small hole diaphragm (5), a one-dimensional linear translation stage (11) of the long Jiao Pingtu focusing lens (6), a two-dimensional optical adjustment frame (12) and a laser collimator lens (13) which are arranged in the tube shell laser to be collimated;
The adjustable diaphragm (3) is arranged at the laser output end of the first helium-neon laser (1), the flat reflecting mirror (7) is attached to the outer wall of the rear side of the tube shell laser to be collimated, the one-dimensional linear translation table (11) and the two-dimensional optical adjusting frame (12) are arranged on an optical platform, the positioning screw (10) is arranged on the optical platform, the positioning screw (10) is used as a position datum point of the height ruler (8), and the tube shell laser to be collimated comprises a laser chip.
2. The tube shell laser collimation adjustment device as set forth in claim 1, wherein: the to-be-collimated shell laser, the first helium-neon laser (1), the second helium-neon laser (2) and the long Jiao Pingtu focusing lens (6) are respectively arranged on a five-dimensional adjusting system, the five-dimensional adjusting system comprises 3 one-dimensional linear translation stages (11) and 1 two-dimensional optical adjusting frame (12), the aperture diaphragm (5) is arranged on a three-dimensional debugging system, the three-dimensional debugging system comprises 3 one-dimensional linear translation stages (11), and the power meter (4) is arranged on 1 one-dimensional linear translation stage (11);
the adjustable diaphragm (3) is a circular aperture diaphragm with adjustable diameter, and the diameter adjustment range is 0-8 mm; the positioning screw (10) is an inner hexagon screw, the flat reflector (7) is square, and the height of the power meter (4) is the same as that of the small-hole diaphragm (5).
3. The debugging method of the tube shell laser collimation debugging device according to claim 1, wherein the debugging method is characterized in that: the method comprises the following steps:
s1, calibrating pitching of a 1 st path of helium-neon red light emitted by a first helium-neon laser (1) according to an optical platform plane;
s2, calibrating the deflection of the 1 st path helium neon red light;
s3, lowering the upper and lower positions of the tube shell laser to be collimated, and calibrating the upper, lower, left and right straight line positions of the 1 st path of helium neon red light according to the positions of laser chips in the tube shell laser to be collimated;
s4, taking the calibrated 1 st path of helium-neon red light as a reference to calibrate the 2 nd path of helium-neon red light emitted by the second helium-neon laser (2);
s5, correcting the pitching deflection position of the tube shell laser to be collimated according to the 1 st path of helium-neon red light, the 2 nd path of helium-neon red light and the flat reflector (7);
s6, calibrating the positions of a long Jiao Pingtu focusing lens (6) and a small aperture diaphragm (5) according to the 1 st path of He-Ne-Red light and the 2 nd path of He-Ne-Red light, and installing a power meter (4);
and S7, lifting the tube shell laser to be collimated to an initial position, and precisely adjusting the position of the collimating lens (13) until the power meter (4) displays the maximum output power, wherein the tube shell laser to be collimated is debugged.
4. A method for adjusting and controlling the collimation of a tube shell laser according to claim 3, wherein: step S1 comprises the steps of:
s11, enabling the 1 st path helium-neon red light to form a diffraction-free effect through an adjustable aperture (3);
s12, recording the near-field light spot height H1 by using a height ruler (8) attached with a coordinate paper (9);
s13, moving the height ruler (8) to the far end of an optical platform far away from the 1 st path of helium-neon red light, and adjusting a pitching knob of a two-dimensional optical adjusting frame (12) for fixing the 1 st path of helium-neon red light to enable a far-field light spot to fall at H1;
s14, moving the height ruler (8) back to the position in the step S12 to acquire the height of the near-field light spot again and judge whether H1 is the near-field light spot, if so, completing the pitching calibration of the 1 st path helium-neon red light; if not, return to step S13.
5. A method for adjusting and controlling the collimation of a tube shell laser according to claim 3, wherein: step S2 comprises the steps of:
s21, fixing a positioning screw (10) on the optical platform, and recording column number information of the positioning screw (10) on the optical platform, wherein the position of the positioning screw (10) is close to an output end at a near field of the 1 st path of helium-neon red light, and the left and right parts deviate from the optical axis of the 1 st path of helium-neon red light;
S22, taking the positioning screw (10) as a datum point, placing a height ruler (8) attached with coordinate paper (9), obtaining the accurate position of a near-field light spot, and making a mark point on the coordinate paper (9);
s23, taking down the positioning screw (10), fixing the positioning screw (10) at a far-field position of the same column on the optical platform, taking the positioning screw (10) as a reference point, placing the height ruler (8) attached with the coordinate paper (9), observing the left-right offset position of a far-field light spot, and adjusting a deflection knob of a two-dimensional optical adjusting frame (12) for fixing the 1 st path helium-neon red light so as to enable the light spot to coincide with the marking point of the step S22;
s24, taking down the positioning screw (10) and installing the positioning screw at a near-field position, judging whether a light spot falls on the marking point made in the step S22, and if yes, entering the step S25; if not, returning to the step S22;
s25, judging whether the near-field light spot position changes in pitching in the adjusting process, wherein the pitching changes to the fact that the near-field light spot is located above or below a marking point, if so, returning to the step S1, and if not, completing the deflection calibration of the No. 1 helium-neon red light.
6. A method for adjusting and controlling the collimation of a tube shell laser according to claim 3, wherein: step S3 comprises the steps of:
S31, reducing the height of the tube shell laser to be collimated to the minimum, and then lifting the tube shell laser to the 1/2 position of the stroke of a one-dimensional linear translation table (11) for fixing the tube shell laser to be collimated;
s32, adjusting the up-down and left-right positions of the one-dimensional linear translation stage (11) to enable light spots to coincide with laser chips of the tube shell laser to be collimated, recording micrometer data of the tube shell laser to be collimated and the one-dimensional linear translation stage (11) for fixing the first helium-neon laser (1), installing a positioning screw (10) at a far field position in the 1 st path helium-neon red light deflection calibration, placing a height ruler (8) and making a marking point M, and completing the up-down and left-right linear position calibration of the 1 st path helium-neon red light.
7. A method for adjusting and controlling the collimation of a tube shell laser according to claim 3, wherein: step S4 comprises the steps of:
s41, determining the initial positions of the 2 nd helium neon red light up, down, left and right;
s42, closing the 1 st path of He-Ne-Red light, opening the 2 nd path of He-Ne-Red light, and adjusting and fixing a pitching deflection knob of a two-dimensional optical adjusting frame (12) of the second He-Ne laser (2) to enable the 2 nd path of He-Ne-Red light to coincide with the center of a diaphragm of the 1 st path of He-Ne-Red light;
S43, closing the No. 2 He-Ne red light, opening the No. 1 He-Ne red light, judging whether the No. 1 He-Ne red light falls at the No. 2 He-Ne red light luminous point, if so, finishing the pitch deflection calibration of the No. 2 He-Ne red light, and if not, returning to the step S41.
8. The tube shell laser collimation debugging method as set forth in claim 6, wherein: step S5 comprises the steps of:
s51, reducing the height of the tube shell laser to be collimated to the lowest, and starting the 1 st path of helium neon red light;
s52, confirming that a two-dimensional optical adjusting frame (12) for fixing the second He-Ne laser (2) has no offset included angle with the horizontal and vertical directions of the optical platform from the upper part, and adjusting the up-down left-right position of the 2 nd He-Ne red light through a one-dimensional linear translation table (11) to enable the 1 st He-Ne red light to fall on the 2 nd He-Ne red light emitting point, and fixing the up-down left-right position of the second He-Ne laser (2);
s53, recovering the height of the shell laser to be collimated according to micrometer data recorded in the step S32;
s54, starting the 2 nd path of helium-neon red light, enabling the flat reflector (7) to be attached to the center of the rear wall of the tube shell laser to be collimated, enabling the 2 nd path of helium-neon red light to form reflected light at the moment, adjusting and fixing a knob of a two-dimensional optical adjusting frame (12) of the tube shell laser to be collimated, enabling the reflected light formed by the flat reflector (7) to be located at a luminous point of the 2 nd path of helium-neon red light, and calibrating the pitching deflection position of the tube shell laser to be collimated.
9. A method for adjusting and controlling the collimation of a tube shell laser according to claim 3, wherein: step S6 includes the steps of:
s61, the height of the tube shell laser to be collimated is reduced to the minimum, the 1 st path of helium-neon red light is closed, and a two-dimensional optical adjusting frame (12) of a fixed length Jiao Pingtu focusing lens (6) and the optical platform are confirmed to have no offset included angle in the horizontal and vertical directions from the upper part;
s62, adjusting a knob of a two-dimensional optical adjusting frame (12) for fixing the long Jiao Pingtu focusing lens (6) to enable the focused 2 nd helium-neon red light spot to coincide with the center of the 1 st helium-neon red light diaphragm; the vertical, horizontal and horizontal positions of a one-dimensional linear translation table (11) for fixing the long Jiao Pingtu focusing lens (6) are adjusted, so that the reflected light of the long Jiao Pingtu focusing lens (6) coincides with the center of the 2 nd helium-neon red light emitting point;
s63, starting the 1 st path of helium neon red light, initially installing a small hole diaphragm (5) according to the 1 st path of helium neon red light position, debugging to enable the small hole diaphragm (5) to be positioned between the 1 st path of helium neon red light and a long Jiao Pingtu focusing lens (6), and debugging the upper, lower, left and right positions of the small hole diaphragm (5) through a one-dimensional linear translation table (11) for fixing the small hole diaphragm (5) until the center of the small hole diaphragm (5) is completely overlapped with the 1 st path of helium neon red light spots;
S64, debugging the front and back positions of the aperture diaphragm (5) through the one-dimensional linear translation table (11) until the aperture diaphragm (5) is positioned at the focal position of the long Jiao Pingtu focusing lens (6), and measuring the distance between the aperture diaphragm (5) and the long Jiao Pingtu focusing lens (6) through a vernier caliper, wherein the focal position is a set parameter of the long Jiao Pingtu focusing lens (6);
s65, adjusting and fixing a one-dimensional linear translation table (11) of the power meter (4), enabling the center height of a receiving port of the power meter (4) to be concentric with the 1 st path of helium-neon red light, and fixing the power meter (4) against the rear of the aperture diaphragm (5).
10. A method for adjusting and controlling the collimation of a tube shell laser according to claim 3, wherein: in step S7, the adjustment method of the collimating lens (13) includes: -calibrating the preliminary position of the collimator lens (13) using the 2 nd he—ne red light, -adjusting the position of the collimator lens (13) in real time using the combination of the power meter (4), the aperture stop (5) and the long Jiao Pingtu focusing lens (6) until the power meter (4) shows maximum.
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