CN107800026A - A kind of adjustment method of the outer beam path alignment of laser - Google Patents

A kind of adjustment method of the outer beam path alignment of laser Download PDF

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Publication number
CN107800026A
CN107800026A CN201711026432.XA CN201711026432A CN107800026A CN 107800026 A CN107800026 A CN 107800026A CN 201711026432 A CN201711026432 A CN 201711026432A CN 107800026 A CN107800026 A CN 107800026A
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China
Prior art keywords
laser
photosensitive device
collimation
adjustment method
expanding lens
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CN201711026432.XA
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Chinese (zh)
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CN107800026B (en
Inventor
徐方华
吕启涛
郭丽
王杰
高云峰
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Han s Laser Technology Industry Group Co Ltd
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Han s Laser Technology Industry Group Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0071Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/30Collimators

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Lasers (AREA)
  • Laser Surgery Devices (AREA)

Abstract

The present invention relates to laser field, the embodiment of the invention discloses a kind of adjustment method of beam path alignment outside laser, including:Laser, collimation chamber and beam expanding lens are installed successively and photosensitive device is placed in the light output end of the beam expanding lens;Opening laser makes it produce laser;Regulation makes laser be radiated at successively by the collimation chamber and beam expanding lens on the photosensitive device, forms hot spot and diffraction ring located at the yawing moment of the speculum of the collimation intracavitary;The photosensitive device is moved to the direction away from the beam expanding lens, while adjusts the yawing moment of the speculum, until the hot spot and diffraction ring are completely superposed.By above-described embodiment, the present invention only can carry out collimation debugging by a photosensitive device simple in construction to light path outside laser, abandoned the calibrating installation of complexity, improved debugging precision, and simple to operate, improve operating efficiency.

Description

A kind of adjustment method of the outer beam path alignment of laser
Technical field
Embodiment of the present invention is related to laser field, more particularly to a kind of adjustment method of beam path alignment outside laser.
Background technology
Needed in sector application or design, it is desirable to which the light of laser output is propagated along another parallel light path, is needed simultaneously Beam-expanding collimation processing is done, therefore light path increase to collimate chamber outside laser.The collimated chamber of light path is collimated by beam expanding lens again, it is desirable to Light passes through along beam expanding lens center.If during debugging, laser and beam expanding lens axis have deviation, then can cause to produce aberration, to follow-up Laser application has adverse effect on.But when debugging laser alignment light path, generally require increases a calibration after chamber is collimated Device, using the debugging standard as collimation chamber.The calibrating installation generally comprises calibration frame member and be fixed in frame member two Individual aperture, aperture have certain intervals distance.By adjusting the mirror deflection direction of collimation intracavitary repeatedly, make light path Successively from two apertures centrally through reaching the purpose of collimated light path, finally remove calibrating installation, in the defeated of collimater Outlet connection beam expanding lens, to the collimation of light beam and is expanded with realization.The debugging process is relative complex, the dismounting comprising calibrating installation And the alignment repeatedly of diaphragm, if the frame member or collimater of calibration have error, may result in laser can not Accurate collimation.
The content of the invention
Embodiment of the present invention mainly solving the technical problems that provide a kind of adjustment method of the outer beam path alignment of laser, The problem of can solve the problem that debugging process complexity.
In order to solve the above technical problems, the technical scheme that embodiment of the present invention uses is:A kind of outer light of laser The adjustment method of road collimation, including:Laser, collimation chamber and beam expanding lens are installed successively and photosensitive device is placed in described expand The light output end of mirror;Opening laser makes it produce laser;Regulation is located at the yawing moment of the speculum of the collimation intracavitary, Laser is radiated at successively by the collimation chamber and beam expanding lens on the photosensitive device, form hot spot and diffraction ring;By described in Photosensitive device moves to the direction away from the beam expanding lens, while adjusts the yawing moment of the speculum, until the hot spot It is completely superposed with diffraction ring.
Preferably, after installing the laser and collimation chamber, methods described also includes:The photosensitive device is placed in The light equipped at outlet port of the collimation chamber;Opening laser makes it produce laser;According to the presence or absence of hot spot on the photosensitive device And change in location, the yawing moment of the speculum of the collimation intracavitary is adjusted, makes laser from the delivery outlet of the collimation chamber The heart exports.
Preferably, the photosensitive device is sensitive film.
Preferably, the photosensitive device is visible ray conversion sheet.
Preferably, the photosensitive device is put down with the light delivery outlet of the collimation chamber and the light output end of the beam expanding lens OK.
Preferably, the speculum has two pieces, is respectively arranged on the light input port and delivery outlet of the collimation chamber.
Preferably, the sensitive film is blank sheet of paper.
Preferably, the visible ray conversion sheet is frequency multiplication piece.
The beneficial effect of embodiment of the present invention is:The situation of prior art is different from, the embodiment of the present invention provides a kind of The adjustment method of the outer beam path alignment of laser, only light path outside laser is carried out by a photosensitive device simple in construction accurate Straight debugging, has abandoned the calibrating installation of complexity, has improved debugging precision, and simple to operate, improves operating efficiency.
Brief description of the drawings
Technical scheme in order to illustrate the embodiments of the present invention more clearly, below will be to embodiment or description of the prior art In the required accompanying drawing used be briefly described, it should be apparent that, drawings in the following description be only the present invention some Embodiment, for those of ordinary skill in the art, without having to pay creative labor, can also be according to these Accompanying drawing obtains other accompanying drawings.
Fig. 1 is a kind of flow chart of the adjustment method of the outer beam path alignment of laser provided in an embodiment of the present invention;
Fig. 2 be a kind of outer beam path alignment of laser provided in an embodiment of the present invention adjustment method in hot spot on photosensitive device And the schematic diagram of diffraction ring change;
Fig. 3 is the flow debugged in advance in a kind of adjustment method of the outer beam path alignment of laser provided in an embodiment of the present invention Figure.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and It is not used in the restriction present invention.
Refering to Fig. 1 and Fig. 2, Fig. 1 is the flow chart of the adjustment method of the outer beam path alignment of laser provided by the invention, Fig. 2 It is the signal of hot spot and diffraction ring change on photosensitive device in the adjustment method of beam path alignment chamber outside laser provided by the invention Figure, the adjustment method of the outer beam path alignment of laser provided by the invention include:
11:By laser, collimation chamber and beam expanding lens install successively and photosensitive device is placed in the beam expanding lens light it is defeated Go out end;
The photosensitive device is abutted and parallel to the output end of the beam expanding lens, between photosensitive device and beam expanding lens Distance is so easy to observe in 20MM or so.The photosensitive device is sensitive film or visible ray conversion sheet, when laser is sent out When the laser penetrated is visible ray, then debugged using sensitive film, it is preferable that sensitive film is debugged using blank sheet of paper, and blank sheet of paper was both It is economical to be seen everywhere again, it is very easy to use;When the laser of laser transmitting is black light, then turned using visible ray Change piece to be debugged, visible ray can be shown as when the laser of black light is radiated at visible ray conversion sheet, it is preferable that visible ray Conversion sheet uses frequency multiplication piece.
12:Opening laser makes it produce laser;
13:Regulation located at it is described collimation intracavitary speculum yawing moment, make laser successively by it is described collimation chamber and Beam expanding lens is radiated on the photosensitive device, forms hot spot and diffraction ring;
Laser now will increase power, so be in order that projection of the laser beam on photosensitive device is high-visible. Due to there is two sides mirror in beam expanding lens, so can be seen that diffraction ring and hot spot on photosensitive device, in laser beam not from expanding During the center oculo cardiac reflex of two mirrors of mirror, the center of hot spot and diffraction ring would not overlap.That is the phenomenon shown in A in Fig. 2.
14:The photosensitive device is moved to the direction away from the beam expanding lens, while adjusts the deflection of the speculum Direction, until the hot spot and diffraction ring are completely superposed;
Yawing moment by adjusting collimation intracavity reflecting mirror can enable the center of laser beam mirror from beam expanding lens Reflect, the center of such diffraction ring and hot spot can overlap, and show further through by photosensitive device movement so on photosensitive device The diffraction ring shown will reduce, and be so easy to observe diffraction ring and whether hot spot is completely superposed.Phenomenon in Fig. 2 shown in D is Phenomenon after being completely superposed.If only simply regulation speculum because being to visually observe, may be observed visually diffraction ring and The center superposition of hot spot, but it is not of uniform size, so can also there is error, only center and size, which are completely superposed, could represent light Road collimates.
A to D change is in Fig. 2:Change in A to B is diminished, become in B to C by mobile photosensitive device, diffraction ring Change is by adjusting the deflection angle of collimation intracavity reflecting mirror the center of diffraction ring and hot spot to be made to be overlapped by being offset to, last shape Complete to overlap into diffraction ring and spot size and center, i.e. the result represented in D.
It should be noted that stain is hot spot in Fig. 2, thick lines ring and hachure ring are diffraction rings, because expanding There are two mirrors in mirror, so producing two diffraction rings.
In embodiments of the present invention, only light path outside laser is collimated by a photosensitive device simple in construction Debugging, the calibrating installation of complexity is abandoned, has improved debugging precision, and it is simple to operate, improve operating efficiency.
Referring to Fig. 3, Fig. 3 is advance in the adjustment method of beam path alignment outside a kind of laser provided in an embodiment of the present invention The flow chart of debugging;After the laser and collimation chamber is installed, i.e., before beam expanding lens is installed, methods described is also wrapped Include:
111:The photosensitive device is placed in the light equipped at outlet port of the collimation chamber;
The photosensitive device is close to and parallel to the delivery outlet of the beam expanding lens, between photosensitive device and beam expanding lens Distance is so easy to observe in 20MM or so.
112:Opening laser makes it produce laser:
113:According to the presence or absence of hot spot and change in location on the photosensitive device, the speculum of the collimation intracavitary is adjusted Yawing moment, make center output of the laser from the delivery outlet of the collimation chamber;
It is no regulation collimation intracavitary speculum when, laser beam possibly into collimation intracavitary after can not from collimation chamber it is defeated Outlet output or delivery outlet output that may be from collimation chamber but the output that can not be collimated.When laser beam can not be from collimation chamber output It is that no any hot spot image is shown on photosensitive device during mouth output, now adjusts the deflection angle of speculum, make laser Beam can then show hot spot, continue to adjust speculum and observe sense from collimation chamber delivery outlet output so on photosensitive device The change in location of hot spot enables center output of the laser beam from collimation chamber delivery outlet on electro-optical device, that is to say, that passes through regulation Mirror deflecting angle, it can make hot spot of the hot spot on photosensitive device that position movement occur, mobile position is in collimation During the center of the part of chamber delivery outlet face and photosensitive device, then confirm output of the laser from collimation chamber by naked eyes can The center of mouth outputs, because it not is accurate to visually observe, this part is rough debugging, is to install Laser beam can pass through collimation chamber and enter in beam expanding lens and can be exported from the delivery outlet of beam expanding lens after beam expanding lens.
It should be noted that now the output current of laser need not be very strong, it is only necessary to can make laser beam photosensitive Visible on device, the now debugging of external light path is intended merely to enable laser beam to enter peace below after collimating chamber In the beam expanding lens of dress, but it cannot be guaranteed that laser beam exports from beam expanding lens center, if the speculum installation of collimation intracavitary is not smart Really cause laser to be exported along beam expanding lens, then can not subsequently be debugged, because not can determine that laser position.
Embodiments of the present invention are the foregoing is only, are not intended to limit the scope of the invention, it is every to utilize this The equivalent structure or equivalent flow conversion that description of the invention and accompanying drawing content are made, or directly or indirectly it is used in other correlations Technical field, it is included within the scope of the present invention.

Claims (8)

  1. A kind of 1. adjustment method of the outer beam path alignment of laser, it is characterised in that including:
    Laser, collimation chamber and beam expanding lens are installed successively and photosensitive device is placed in the light output end of the beam expanding lens;
    Opening laser makes it produce laser;
    Regulation makes laser be shone successively by the collimation chamber and beam expanding lens located at the yawing moment of the speculum of the collimation intracavitary Penetrate on the photosensitive device, form hot spot and diffraction ring;
    The photosensitive device is moved to the direction away from the beam expanding lens, while adjusts the yawing moment of the speculum, directly It is completely superposed to the hot spot and diffraction ring.
  2. 2. adjustment method according to claim 1, it is characterised in that
    After installing the laser and collimation chamber, methods described also includes:
    The photosensitive device is placed in the light equipped at outlet port of the collimation chamber;
    Opening laser makes it produce laser;
    According to the presence or absence of hot spot and change in location on the photosensitive device, the deflection side of the speculum of the regulation collimation intracavitary To, make laser from it is described collimation chamber delivery outlet center output.
  3. 3. adjustment method according to claim 2, it is characterised in that
    The photosensitive device is sensitive film.
  4. 4. adjustment method according to claim 2, it is characterised in that
    The photosensitive device is visible ray conversion sheet.
  5. 5. adjustment method according to claim 1 or 2, it is characterised in that
    The photosensitive device is parallel with the light delivery outlet of the collimation chamber and the light output end of the beam expanding lens.
  6. 6. adjustment method according to claim 1 or 2, it is characterised in that
    The speculum has two pieces, is respectively arranged on the light input port and delivery outlet of the collimation chamber.
  7. 7. adjustment method according to claim 3, it is characterised in that
    The sensitive film is blank sheet of paper.
  8. 8. adjustment method according to claim 4, it is characterised in that
    The visible ray conversion sheet is frequency multiplication piece.
CN201711026432.XA 2017-10-27 2017-10-27 A kind of adjustment method of the outer beam path alignment of laser Active CN107800026B (en)

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108363217A (en) * 2018-04-20 2018-08-03 中国科学院物理研究所 Method and the application of parallelism of raster pair are adjusted and monitored using automatic leveling laser scale
CN108646425A (en) * 2018-04-03 2018-10-12 Oppo广东移动通信有限公司 Laser projecting apparatus, image acquiring device and electronic equipment
CN111010868A (en) * 2018-08-08 2020-04-14 西安大医集团有限公司 Method and device for correcting collimator of radiotherapy equipment
CN112260043A (en) * 2020-10-16 2021-01-22 北京卓镭激光技术有限公司 Laser light path debugging device and laser light path debugging method
CN113263273A (en) * 2021-06-02 2021-08-17 珠海中京电子电路有限公司 Jig and method for improving precision of laser drilling machine
CN113433706A (en) * 2021-06-21 2021-09-24 深圳市大族数控科技股份有限公司 Debugging and checking method of laser shaping light path
CN114253003A (en) * 2021-12-06 2022-03-29 北京遥测技术研究所 Tube shell laser alignment debugging device and method

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CN108646425A (en) * 2018-04-03 2018-10-12 Oppo广东移动通信有限公司 Laser projecting apparatus, image acquiring device and electronic equipment
CN108646425B (en) * 2018-04-03 2019-08-23 Oppo广东移动通信有限公司 Laser projecting apparatus, image acquiring device and electronic equipment
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CN111010868A (en) * 2018-08-08 2020-04-14 西安大医集团有限公司 Method and device for correcting collimator of radiotherapy equipment
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CN112260043A (en) * 2020-10-16 2021-01-22 北京卓镭激光技术有限公司 Laser light path debugging device and laser light path debugging method
CN113263273A (en) * 2021-06-02 2021-08-17 珠海中京电子电路有限公司 Jig and method for improving precision of laser drilling machine
CN113263273B (en) * 2021-06-02 2022-10-25 珠海中京电子电路有限公司 Jig and method for improving precision of laser drilling machine
CN113433706A (en) * 2021-06-21 2021-09-24 深圳市大族数控科技股份有限公司 Debugging and checking method of laser shaping light path
CN114253003A (en) * 2021-12-06 2022-03-29 北京遥测技术研究所 Tube shell laser alignment debugging device and method
CN114253003B (en) * 2021-12-06 2023-09-29 北京遥测技术研究所 Tube shell laser collimation debugging device and method

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