CN104330897A - Multipath laser beam automatic collimation device - Google Patents
Multipath laser beam automatic collimation device Download PDFInfo
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- CN104330897A CN104330897A CN201410522084.5A CN201410522084A CN104330897A CN 104330897 A CN104330897 A CN 104330897A CN 201410522084 A CN201410522084 A CN 201410522084A CN 104330897 A CN104330897 A CN 104330897A
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Abstract
The invention discloses a multipath laser beam automatic collimation device. Multipath beam near-field and far-field reference synchronous images are transmitted to a photosensitive screen based on an image transmission automatic collimation structure of plug-in type fork wire arrays and fluorescence imaging by utilizing a double-cross fork wire array image transmission light path, and fluorescence imaging records of multiple beams generated by visible light CCD are utilized so that a problem of light path collimation near-field and far-field reference is solved, and integrated high-efficiency automatic collimation of multipath laser beams is also realized.
Description
Technical field
The autocollimation method, particularly one that the present invention relates to a kind of multi-path laser light beam are applicable to laser system multichannel light beam Real-Time Monitoring and self-adjusting device.
Background technology
Large-scale device of high power laser comprises series laser amplifier and a large amount of optical elements and assembly, and optical length, link is many.The Effec-tive Function of system requires the corresponding light path automatically collimating system of configuration, to correct fast because micro-vibration of temperature variation, ground and bracing frame, the creep of catoptron physical construction, air-flow and other enchancement factor cause departing from of light beam, increases work efficiency.
So-called beam path alignment, exactly after optical system light path has been set up and provided alignment fiducial, to the minute adjustment that light path light axis carries out, realizes overlapping of offset beam and reference beam.As shown in Figure 1, in theory, light beam is output reference light path after front mirror 1 and back mirror 2, and according to " two one lines " principle, benchmark optical axis can be determined with near-field baseline 3 and far field benchmark 4.But due to the impact of the factors such as vibration in light path, temperature, air-flow or component structure stability, make light path that drift or deviation (in Fig. 1, dotted line represents) occur.In this case, can, by the pitching of front mirror 1 and back mirror 2 in adjustment light path and deflection angle, beam alignment correction be made to be reference light path.Therefore, light path automatically collimating system is a closed-loop control system, it comprises many parts links such as collimated light source, nearly far field benchmark, light beam detection device and adjustment topworks, wherein electric reflector mirror is performer, computing machine is control hardware, error originated from input amount is detecting light beam and set benchmark center of gravity deviation, exports the driving step number that controlled quentity controlled variable is stepper motor, contacting as control algolithm between input quantity and output quantity.
At present, the light path automatically collimating method that research and development is got up is based on high power solid-state laser device, select the geometric center of certain optical element in light path as near-field baseline point, in light path, the geometric center of the filtering aperture of spatial filter is as far field reference point, with this near, far field reference point reflex original optical path, benchmark sampling object is circular light spot.Acta Optica (Vol.19,1999, p1279) a kind of autocollimation Experiment of Principle based on crosshair imaging is described, be initial thing with single tine silk, single tine silk passes through the imaging of spatial filter as near field, far field benchmark then selects the pinhole imaging system pattern of spatial filter, obtains and collimates experimental result preferably.But the method is using spatial filter as the collimating components of key, and common optical system there is no the nearly far field benchmark such as spatial filter, can not be grafted directly in the laser system without spatial filter benchmark and use.
In addition in the automatic-aligning system of multiple beam, multichannel light beam mutual spacing is much larger than hot spot yardstick, need accurately to measure compared with the multiple beam picture position in large regions, and detector is limited to self photosurface size, be difficult to multi-path laser perfect imaging in single detector, at this moment not only need multiple detectors of Integrated design complexity could meet the position measurement of multiple beam, when optical maser wavelength is non-visible wave band, cost expends also comparatively serious.
Summary of the invention
The present invention is directed to conventional Image relaying laser system multichannel light beam, propose a kind of multi-path laser light beam autocollimation device, this device is based on the Image relaying autocollimation structure of plug-in type cross hair array and fluorescence imaging, both solve beam path alignment nearly far field benchmark problem, achieve again the integrated efficient autocollimation of multi-path laser light beam.
The technical solution used in the present invention is:
A kind of multi-path laser light beam autocollimation method and device, comprise front mirror array, back mirror array, a level lens array, two level lens arrays, near field cross hair array, far field cross hair array, beam splitter array, three step lens array, the photosensitive screen of near field light beam, near field CCD, quadrupole lenses array, the photosensitive screen of far field beams, far field CCD;
Wherein front mirror array, back mirror array, a level lens array, two level lens arrays and beam splitter array are successively set in the input path of multi-path laser light beam, multichannel light beam is divided into two bundles by beam splitter array, wherein a branch ofly be incident to the photosensitive screen of near field light beam through three step lens array, another bundle is incident to the photosensitive screen of far field beams through quadrupole lenses array; Near field CCD and far field CCD obtains the light beam image on the photosensitive screen of near field light beam and the photosensitive screen of far field beams respectively;
Near field cross hair array is arranged before being close to a level lens array, and extensible and immigration light beam; Far field cross hair array is arranged after being close to two level lens arrays, and extensible and immigration light beam; Light beam photosensitive screen near field becomes Nonimage Conjugate Relations with near field cross hair array; The photosensitive screen of far field beams becomes Nonimage Conjugate Relations with far field cross hair array.
In above-mentioned multi-path laser light beam autocollimation method and device, between a level lens array and two level lens arrays, be provided with laser amplifier.
In above-mentioned multi-path laser light beam autocollimation method and device, below near field cross hair array and far field cross hair array, be provided with automatically controlled transfer table.
In above-mentioned multi-path laser light beam autocollimation method and device, front mirror array, back mirror array are provided with automatically controlled servo optical adjusting frame.
In above-mentioned multi-path laser light beam autocollimation method and device, cross hair adopts Linear cut stainless steel structure.
In above-mentioned multi-path laser light beam autocollimation method and device, photosensitive screen adopts and is fixed on high stable bracing frame ultraviolet band laser fluorescence, the good white board of visible waveband scattering laser effect.
Advantage of the present invention is:
1, the present invention adopts the alignment method of two cross hair array benchmark, using input cross hair array as " near field point ", using output cross hair array as " far field point ", both solved the problem of common laser device without natural reference such as spatial filters, also achieved the efficient collimation of laser multipath light beam.
2, the present invention adopts Image relaying method to distinguish imaging to light beam detection device to two cross hair array, both can adjust imaging scale according to detector resolution, makes again to gather cross hair array light spot image edge clear, alleviates later image intractability.
3, the present invention adopts the method for photosensitive screen and imaging CCD to achieve the alignment measurement of multiple beam, ensure that the accurate measurement to each light beam under the larger condition of space multiple beam spacing, the method utilizes the white board material of the irregular braiding of vitreous fibre to produce fluorescence to the laser of ultraviolet 325nm wavelength, realize light spot image collection with Visible-light CCD, avoid the high engineering cost brought when adopting this wave band CCD to carry out imaging.
4, the alignment method of two cross hair array benchmark of the present invention's employing, cross hair array is close to lens arra, both the master reference requirement of lens arra had been met, do not need collimated light source to the unified illumination of lens yet, illumination cross hair array center position, eliminates the aberration introduced in lens arra light beam adjustment process simultaneously.
5, two cross hair arrays that the present invention adopts are crosshair array benchmark, crosshair is not only simple but also be convenient to imaging, and easily judge beam center position in the picture, under the prerequisite meeting beam-pointing benchmark completely, also simplifies later image intractability.
6, the alignment method of two cross hair array benchmark of the present invention's employing, cross hair material have employed Linear cut stainless steel structure, meet cross hair array hardness and flatness of edges demand, reduce and cause change in location not because of cross hair hardness or too much cause imaging unintelligible because of burrs on edges.
7, the present invention adopts two pieces of photosensitive screens to carry out imaging to the nearly far field of multi-path laser light beam, has both solved the mutual collision problem of space structure that multi-path laser light beam utilizes detector array to produce, has greatly reduced again the quantity of detector and image pick-up card.
8, the alignment method of two cross hair array benchmark that adopts of the present invention, all adopts high precision stepping electric displacement platform to control for not belonging to the cross hair array of main optical path, image-forming component and detector etc., need be exited main optical path after collimation terminates.
Accompanying drawing explanation
Fig. 1, typical single channel light beam autocollimation schematic diagram;
Fig. 2, Typical laser three beams MOPA system collimation layout;
Fig. 3, near field light beam sniffer become Nonimage Conjugate Relations schematic diagram with near field cross hair array;
Fig. 4, far field beams sniffer become Nonimage Conjugate Relations schematic diagram with far field cross hair array;
Fig. 5, cross hair array structure schematic diagram.
Reference numeral is as follows: 1-front mirror, 2-back mirror, 3-near-field baseline, 4-far field benchmark, 5-reference light path, 6-deviation light path, 7-front mirror array, 8-back mirror array, 9-near field cross hair array, 10-automatically controlled transfer table, 11-one level lens array, 12-laser amplifier, 13-two level lens arrays, 14-far field cross hair array, 15-automatically controlled transfer table, 16-beam splitter array, 17-three step lens array, the photosensitive screen of 18-near field light beam, 19-near field CCD, 20-quadrupole lenses array, the photosensitive screen of 21-far field beams, 22-far field CCD.
Embodiment
Below in conjunction with accompanying drawing, collimation step of the present invention is further described:
Be described using the light beam autocollimation of excimer laser apparatus 18 road as embodiment.Excimer laser system in order to the high efficiency energy realizing amplifier extract, the compression of system output pulse width and the laser beam smoothing of target surface, design employing 18 road narrow spaces laser carries out Energy extraction according to predetermined beam Propagation path to polystage amplifier, and realizes multiple beam superposition and the beam uniformity of target surface by Image relaying structure.For simplified characterization, the present invention is described for 3 road light beams.
Multi-path laser light beam automatic-aligning system of the present invention as shown in Figure 2, for main optical path, the 3 tunnel input premenstrual reflection mirror arrays 7 of laser beam and back mirror array 8 carry out energy amplification according to specified angle and location transmission to laser amplifier 12, in order to avoid amplifier discharge is uneven, the impact on beam quality such as turbulent flow, Image relaying structure is have employed in light path design, Image relaying lens are respectively level lens array 11 and two level lens arrays 13, export 3 road amplifying laser beam Propagation and again carry out energy amplification to next stage amplifier.But due to impacts such as laboratory temperature, vibration, turbulent flow and optical element drifts, can deviation be there is in optic path to during amplifier, the extraction of amplifier power can be affected on the one hand, cause exporting energy to reduce, light beam deviation can cause non-perpendicular center incident when a level lens array 11 and two level lens arrays 13 on the other hand, produce larger aberration, considerable influence is produced to beam quality.Therefore, need to be equipped with the automatic adjustment that corresponding multichannel automatic-aligning system realizes light path.
In Fig. 2, front mirror array 7, back mirror array 8, level lens array 11, two level lens array 13 and beam splitter array 16 are successively set in the input path of multi-path laser light beam, multichannel light beam is divided into two bundles by beam splitter array 16, wherein a branch ofly be incident to the photosensitive screen 18 of near field light beam through three step lens array 17, another bundle is incident to the photosensitive screen 21 of far field beams through quadrupole lenses array 20; Near field cross hair array 9 is arranged before being close to a level lens array 11, and extensible and immigration light beam; Described far field cross hair array 14 is arranged after being close to two level lens arrays 13, and extensible and immigration light beam; The photosensitive screen 18 of near field light beam and near field cross hair array 9 one-tenth Nonimage Conjugate Relations, as shown in Figure 3; The photosensitive screen 21 of far field beams and far field cross hair array 14 one-tenth Nonimage Conjugate Relations, as shown in Figure 4.Wherein be provided with laser amplifier 12, for Energy extraction between a level lens array 11 and two level lens arrays 13.
In Fig. 3, Fig. 4, near field cross hair array 9 and two level lens arrays 13 are apart from being 5940mm, three step lens array 17 is 2000mm apart from two level lens arrays 13, light beam photosensitive screen 18 near field is 500mm apart from three step lens array 17, two level lens array 13 focal lengths are 2970mm, and three step lens array 17 focal length is 375mm; Far field cross hair array 14 and beam splitter array 16 are apart from being 1240mm, quadrupole lenses array 20 is apart from beam splitter array 16500mm, the photosensitive screen 21 of far field beams and quadrupole lenses array 20 are apart from being 500mm, quadrupole lenses array 20 focal length is 573mm, utilizes Newton's imaging equation to calculate known near field cross hair array 9 and the photosensitive screen of near field light beam 18, far field cross hair array 14 and the strict Nonimage Conjugate Relations of the photosensitive screen 21 one-tenth of far field beams.Image relaying makes the high-fidelity transmission of initial thing cross hair array on the one hand, cross hair array image-forming is clear, image planes position is easily determined, on the other hand the uneven intensity distributions existed in light path (especially Fourier plane place influence factor) is transmitted in the optical path step by step, reimaging is in frequency inverted position, thus the growth of intensity noise is greatly reduced in the image planes of original input distribution, reach and improve beam quality object.
Fig. 5 is cross hair structural representation of the present invention, and cross hair material have employed Linear cut stainless steel structure, meets cross hair array hardness and flatness of edges demand, reduces and causes change in location not because of cross hair hardness or too much cause imaging unintelligible because of burrs on edges.Meanwhile, cross hair array is crosshair array benchmark, and crosshair is not only simple but also be convenient to imaging, and easily judges beam center position in the picture, also simplifies later image intractability under the prerequisite meeting beam-pointing benchmark completely.
The present invention is adopted to carry out the autocollimating step of multi-path laser light beam as follows:
[1] origin reference location and collection.Near field cross hair array and far field cross hair array move in light path, through near field light beam sniffer, far field beams sniffer measuring basis image.
[2] image acquisition and process.Adopt region segmentation image processing method, for multi-path laser light beam imaging characteristics, based on many hot spots smallest offset index principle of identity, utilize region computing method, every road laser is freely limited to the region calculated by rectangle frame, the position coordinates of accurate Calculation every road laser.
[3] deviation main optical path image variants.Shift out near field cross hair array and far field cross hair array, gather multichannel deviation multi-path light beam images, calculate corresponding position coordinates.
[4] close-loop feedback controls.According to multichannel deviation light beam image barycentric coordinates and cross hair reference coordinate difference, control a pair automatically controlled reflection mirror array by computing machine feedback closed loop, realize the coincidence of multichannel hot spot center of gravity.
Data, detector rate and imaging magnification respectively by experiment, on laser instrument two window, distinguishable BEAM SQUINT is 107.6 μm, amplifier window bore is 20mm again, and beam deviation is only 0.5 ‰ of amplifier window bore, can meet amplifier angle multichannel light beam transmission requirement.
The present invention is not only applicable to the autocollimation of Image relaying laser system multichannel light beam, other is not had to the multichannel laser system of natural reference, as long as have employed above-mentioned design philosophy and structure, belongs to protection scope of the present invention yet.
Claims (7)
1. a multi-path laser light beam autocollimation device, is characterized in that: comprise front mirror array (7), back mirror array (8), a level lens array (11), two level lens arrays (13), near field cross hair array (9), far field cross hair array (14), beam splitter array (16), three step lens array (17), the photosensitive screen of near field light beam (18), near field CCD (19), quadrupole lenses array (20), the photosensitive screen of far field beams (21), far field CCD (22);
Described front mirror array (7), back mirror array (8), one level lens array (11), two level lens arrays (13) and beam splitter array (16) are successively set in the input path of multi-path laser light beam, multichannel light beam is divided into two bundles by described beam splitter array (16), wherein a branch ofly be incident to the photosensitive screen of near field light beam (18) through three step lens array (17), another bundle is incident to the photosensitive screen of far field beams (21) through quadrupole lenses array (20), described near field CCD (19) and far field CCD (22) obtains the light beam image on the photosensitive screen of near field light beam (18) and the photosensitive screen of far field beams (21) respectively,
Described near field cross hair array (9) is arranged before being close to a level lens array (11), and extensible and immigration light beam; Described far field cross hair array (14) is arranged after being close to two level lens arrays (13), and extensible and immigration light beam.
2. multi-path laser light beam autocollimation device according to claim 1, is characterized in that: the described photosensitive screen of near field light beam (18) becomes Nonimage Conjugate Relations with near field cross hair array (9); The photosensitive screen of described far field beams (21) becomes Nonimage Conjugate Relations with far field cross hair array (14).
3. multi-path laser light beam autocollimation device according to claim 1, is characterized in that: be provided with laser amplifier (12) between a described level lens array (11) and two level lens arrays (13).
4. multi-path laser light beam autocollimation device according to claim 1, is characterized in that: described near field cross hair array (9) and below, far field cross hair array (14) are provided with automatically controlled transfer table.
5. multi-path laser light beam autocollimation device according to claim 1, is characterized in that: described front mirror array (7), back mirror array (8) are provided with automatically controlled servo optical adjusting frame.
6. multi-path laser light beam autocollimation device according to claim 1, is characterized in that: described cross hair adopts the stainless steel structure of Linear cut.
7. multi-path laser light beam autocollimation device according to claim 1, is characterized in that: the photosensitive screen of described light beam adopts the good white board of Ultra-Violet Laser fluorescence excitation effect.
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| CN107800026A (en) * | 2017-10-27 | 2018-03-13 | 大族激光科技产业集团股份有限公司 | A kind of adjustment method of the outer beam path alignment of laser |
| CN111082298A (en) * | 2020-01-17 | 2020-04-28 | 中国工程物理研究院激光聚变研究中心 | Automatic light path collimation method of off-axis eight-pass amplification laser system |
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| WO2021216991A1 (en) * | 2020-04-23 | 2021-10-28 | Dolby Laboratories Licensing Corporation | Projection system and method with adjustable angle illumination |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104732042A (en) * | 2015-04-13 | 2015-06-24 | 中国工程物理研究院激光聚变研究中心 | Rapid modeling method for light path of large laser device |
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| CN111082298A (en) * | 2020-01-17 | 2020-04-28 | 中国工程物理研究院激光聚变研究中心 | Automatic light path collimation method of off-axis eight-pass amplification laser system |
| CN111082298B (en) * | 2020-01-17 | 2020-12-18 | 中国工程物理研究院激光聚变研究中心 | Automatic light path collimation method of off-axis eight-pass amplification laser system |
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