CN102914373A - Hartmann wave-front sensor based on micro-cylindrical lens array - Google Patents
Hartmann wave-front sensor based on micro-cylindrical lens array Download PDFInfo
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- CN102914373A CN102914373A CN2012104727923A CN201210472792A CN102914373A CN 102914373 A CN102914373 A CN 102914373A CN 2012104727923 A CN2012104727923 A CN 2012104727923A CN 201210472792 A CN201210472792 A CN 201210472792A CN 102914373 A CN102914373 A CN 102914373A
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Abstract
The invention relates to a Hartmann wave-front sensor based on a micro-cylindrical lens array. The sensor comprises an optical matching system, a first micro-cylindrical lens array and a second micro-cylindrical lens array and also comprises a beam splitter, a first photoelectric detector and a second photoelectric detector, wherein the optical matching system is used for expanding beams of incident light waves, so that the size of the incident light waves is matched with light-transmitting caliber of the micro-cylindrical lens array; the incident light waves are segmented into a plurality of beams of sub-light waves through the first micro-cylindrical lens array and the second micro-cylindrical lens array and are respectively focused on a target surface of the photoelectric detector which is positioned in a focal plane; the image acquired by the first photoelectric detector and the image acquired by the second photoelectric detector are subjected to orthogonal fusion and superposition, and continuous gridded focusing line spots are formed. The defect that the traditional Hartmann wave-front sensor is narrow in dynamic measuring range is overcome under the condition that the measurement accuracy is guaranteed, and the Hartmann wave-front sensor can be widely applied to large-aberration wave-front detection.
Description
Technical field
The present invention relates to a kind of optical wave-front sensor, particularly a kind of Hartmann wave front sensor of the large range of dynamic measurement based on the microtrabeculae lens arra belongs to the optical detection field.
Background technology
Hartmann wave front sensor is detecting instrument before a kind of effective optics dynamic wave.Its widespread use human eyes wave-front optical aberration is surveyed, the high power wavefront aberration detects and various beam quality comprehensive detection, especially in the human eyes wave-front optical aberration field of detecting, adaptive optics ophthalmoscope, individualized contact lenses, personalized laser cornea operations all had important directive significance.Traditional Hartmann wave front sensor selects microlens array realization corrugated to cut apart usually.When incident light wave was directional light, all beamlets all focused on the corresponding lenticular optical axis; When there is wavefront distortion in incident light wave, the hot spot that they form in the focal plane just can depart from corresponding optical axis, produce certain displacement, by judging facula mass center and position relationship with reference to barycenter, after obtaining the slope information on the incident light wave wavefront orthogonal directions, restructural incident light wave wavefront to be measured distribution situation.
The range of dynamic measurement of tradition Hartmann wave front sensor is determined by clear aperature and the focal length of the sub-lens of microlens array, the sub-aperture that is microlens array is separated into corresponding subregion with the target surface of photodetector, when there is large aberration in incident light wave, some focal beam spot can exceed the scope of its corresponding subregion, and then can't carry out correct identification, accurately reconstruct wave front aberration has been caused impact.
In the optical detection of reality, Hartmann wave front sensor should guarantee under the high-precision measurement prerequisite, improve as much as possible the dynamic range of measuring.At present, document " increases the method for Shack Hartmann wave front sensor range of dynamic measurement ", the optical precision engineering, 2008,16 (7), introduced a kind of software processing method-extrapolation method that increases range of dynamic measurement, this method certain focal spot corresponding to sub-aperture given in advance, just can extrapolate with this as the starting point obtains focal spot corresponding to all sub-apertures.Document " increases the algorithm research of Shack Hartmann wave front sensor dynamic range ", Acta Optica, 2011,31 (8), proposed effectively to increase the data processing method hot spot homing of dynamic range of sensor, this method makes the hot spot of irregular arrangement get back to various original positions, is rearranged into the spot array of rule, finds wherein certain hot spot and lenticular corresponding relation again.The advantage of these methods is not change under the prerequisite of sensor hardware and has effectively improved range of dynamic measurement, but shortcoming the has been complicated algorithm affects travelling speed of sensor, the amplitude that dynamic range promotes is limited, has certain limitation.China Patent No. is the patent of ZL02123756.5, the adjustable Hartmann wave front sensor of a kind of measuring accuracy and dynamic range is disclosed, added the control element of measuring sub-aperture gating, cut apart the sampling array sampling cycle by this element control corrugated, to reach the purpose of adjusting the sensor measurement dynamic range.The shortcoming of this patent is that structure is too complicated, has reduced measuring accuracy when improving the sensor measurement dynamic range.Document is arranged again: Measurement and compensation of optical aberrations using a single spatial light modulator. (OPTICS EXPRESS.Vol.15, No.23, author: Justo Arines) propose before minute sub-aperture of wavefront, to add a LCD space light modulator to realize removable mask function, thereby improve the dynamic range of Hartmann sensor, but the defective that still exists measuring accuracy to descend.
Summary of the invention
The present invention seeks to overcome the shortcoming of above-mentioned prior art, propose a kind of simple in structurely, strong adaptability is taken into account the Hartmann wave front sensor based on the microtrabeculae lens arra of high precision and large range of dynamic measurement.
The Hartmann wave front sensor of the large range of dynamic measurement based on the microtrabeculae lens arra provided by the invention comprises optical match system (1), the first microtrabeculae lens arra (3) and the second microtrabeculae lens arra (5), spectroscope (2), the first photodetector (4) and the second photodetector (6); Optical match system (1) adds a spectroscope (2) afterwards, place the first microtrabeculae lens arra (3) and the first photodetector (4) at the transmission end of spectroscope (2), place the second microtrabeculae lens arra (5) and the second photodetector (6) at the reflection end of spectroscope (2); Described optical match system (1) expands incident light wave, makes the clear aperature of the size coupling microtrabeculae lens arra of incident light wave; Described microtrabeculae lens arra is realized the wavefront aperture segmentation; Described spectroscope (2) is divided into two bundles with incident light wave, a branch of through forming focal line spot array behind the first microtrabeculae lens arra (3), the first photodetector (4) that focal line spot array is positioned at place, the first microtrabeculae lens (3) focal plane gathers; Another bundle is through forming focal line spot array behind the second microtrabeculae lens arra (5), the second photodetector (6) that focal line spot array is positioned at place, the second microtrabeculae lens (5) focal plane gathers.The image of the first photodetector (4) collection and the image of the second photodetector (6) collection are carried out quadrature fusion stack, form continuous latticed focal line spot.By the continuous line spot of trace accurately judge facula mass center with reference to the position relationship of barycenter, obtain the slope information on the incident light wave wavefront orthogonal directions after, restructural incident light wave wavefront to be measured distribution situation.
In the technique scheme, described optical match system is positioned over spectroscopical front end, and the incident light wave after spectroscope will expand is divided into two bundles, wherein the equivalent optical path of transmitted light to the light path of the first microtrabeculae lens arra and reflected light to the second microtrabeculae lens arra.
Described the first microtrabeculae lens arra and the second microtrabeculae lens arra are realized the wavefront aperture segmentation to transmitted light beam and folded light beam respectively.
The clear aperture of described the second microtrabeculae lens arra and the first microtrabeculae lens arra, size, radius-of-curvature, thickness, material and the quantity of sub-lens are identical, but mutually vertical with the first microtrabeculae lens arra placement location.
Sub-lens quantity in described the second microtrabeculae lens arra and the first microtrabeculae lens arra clear aperature determines the precision of the special Wavefront sensor of Hamann.
Sub-lens quantity ranks number average in the described microtrabeculae lens arra clear aperature is greater than 10.
Described the first photodetector and the second photodetector adopt ccd detector, cmos detector, or the quadrant sensors array.
In the technique scheme, described spectroscope adopts plane beam splitter, or Amici prism.
Advantage of the present invention
Hartmann wave front sensor based on the microtrabeculae lens arra disclosed in this invention has adopted the microtrabeculae lens arra to realize the wavefront aperture segmentation, to obtain continuous latticed focal line spot.When measuring large aberration, even the facula mass center skew is larger, the scope that has exceeded its corresponding subregion, can by the continuous line spot of trace accurately judge facula mass center with reference to the position relationship of barycenter, therefore it is little to have overcome the special Wavefront sensor dynamic range of traditional Hamann, can't accurately measure the defective of large aberration light wave, guarantee to have significantly improved the dynamic range of measuring under the high-precision prerequisite.
Description of drawings:
Fig. 1 is the structural representation that the present invention is based on the special Wavefront sensor embodiment of Hamann of microlens array.
Fig. 2 is the structural representation of the sub-lens array 4 * 1 of microtrabeculae lens arra of the present invention.
Fig. 3 is that microtrabeculae lens arra of the present invention is treated photometry ripple realization wavefront aperture segmentation, and obtains the work synoptic diagram of sequential focusing line spot array at photodetector.
Fig. 4 is the synoptic diagram of the sequential focusing line spot array that receives of electric explorer of the present invention, and wherein (a) is the line spot array synoptic diagram that the first photodetector receives, and (b) is the line spot array synoptic diagram that the second photodetector receives.
Fig. 5 is that the image of the present invention's the first photodetector collection and the image of the second photodetector collection carry out quadrature fusion stack, forms continuous latticed focal line spot synoptic diagram.
Among the figure, 1-optical match system, 2-spectroscope, the 3-the first microtrabeculae lens arra, the 4-the first photodetector, the 5-the second microtrabeculae lens arra, the 6-the second photodetector.
Embodiment:
The present invention is described further below in conjunction with embodiment and accompanying drawing, but should not be construed as protection domain of the present invention of task limits.
As shown in Figure 1, the present invention is based on the Hartmann wave front sensor of microtrabeculae lens arra, the spectroscope 2 that comprises optical match system 1 and back thereof, the transmission end of spectroscope 2 are being placed the first microtrabeculae lens arra 3, the first photodetectors 4 and are being placed on the focal plane of the first microtrabeculae lens arra 3; The reflection end of spectroscope 2 is being placed the second microtrabeculae lens arra 5, the second photodetectors 6 and is being placed on the focal plane of the second microtrabeculae lens arra 5.In this example, optical match system 1 employing enlargement factor is 3 telescopic system, and it is the plane beam splitter of 5:5 that spectroscope 2 adopts saturating inverse ratio; The extraneous aberration of introducing in order to reduce the microtrabeculae lens arra causes the impact of extra wavefront distortion to incident light wave, and it is the anaberration lens of 10mm that the sub-lens of the first microtrabeculae lens arra 3 and the second microtrabeculae lens arra 5 all adopts focal length.
Described the first microtrabeculae lens arra 3 and the second microtrabeculae lens arra 5 are realized the wavefront aperture segmentation; When the wave front aberration of incident light wave is carried out composite measurement, light wave to be measured is realized expanding through optical match system 2, then be divided into two bundles by spectroscope, a branch of incide on the first microtrabeculae lens arra 3 and by its imaging wherein, whole light beam forms continuous focal line spot array by aperture segmentation and at the target surface of first photodetector 4 at place, the first microtrabeculae lens arra 3 focal planes; In addition light beam then incides on the second microtrabeculae lens arra 5 and by its imaging, and whole light beam forms continuous focal line spot array by aperture segmentation and at the target surface of second photodetector 6 at place, the second microtrabeculae lens arra 5 focal planes.
As shown in Figure 2, the structural representation of sub-lens 4 * 1 arrays of microtrabeculae lens arra, wherein the sub-lens structural parameters are as shown in Table 1.
Table one, the sub-lens structural parameters of microtrabeculae lens arra (unit: millimeter mm)
| Focal length | 10 |
| Thickness | 2.5 |
| Material | Plastics PMMA |
As shown in Figure 3, the microtrabeculae lens arra is treated the photometry ripple and is realized the wavefront aperture segmentation, forms continuous focal line spot array.The microtrabeculae lens arra carries out wavefront division with light wave to be measured, by each sub-lens the light wave after cutting apart is carried out imaging again, by the characteristic of post lens wire imaging as can be known, acquisition be the wire focal spot.
As shown in Figure 4, the line spot array that obtains of photodetector compares as can be known with (a) of Fig. 4 and (b), and the structural parameters of the first microtrabeculae lens arra and the second microtrabeculae lens arra are in full accord, but placement location is mutually vertical.
As shown in Figure 5, at first with reference to the structural parameters of microtrabeculae lens arra the pixel of photodetector is divided, to determine with reference to center-of-mass coordinate (X
0, Y
0).The image that the image that the first photodetector is obtained and the second photodetector obtain carries out quadrature and merges stack, calculates the center-of-mass coordinate (X of hot spot intersection point
i, Y
i) and with reference to center-of-mass coordinate (X
0, Y
0) side-play amount (Δ X on X and Y-direction
i, Δ Y
i), calculate light wave wavefront slope information, just restructural light wave wavefront to be measured distribution situation by following formula again:
Wherein f is the focal length of the first and second microtrabeculae lens.Sub-lens quantity in the microtrabeculae lens arra clear aperature is more, and the light wave wavefront to be measured of reconstruct distributes more accurate, should guarantee that usually sub-lens quantity ranks number average is greater than 10.
Claims (7)
1. the Hartmann wave front sensor based on the microtrabeculae lens arra comprises optical match system (1), the first microtrabeculae lens arra (3) and the second microtrabeculae lens arra (5), spectroscope (2), the first photodetector (4) and the second photodetector (6); It is characterized in that optical match system (1) adds a spectroscope (2) afterwards, place the first microtrabeculae lens arra (3) and the first photodetector (4) at the transmission end of spectroscope (2), place the second microtrabeculae lens arra (5) and the second photodetector (6) at the reflection end of spectroscope (2); Described optical match system (1) expands incident light wave, makes the clear aperature of the size coupling microtrabeculae lens arra of incident light wave; Described microtrabeculae lens arra is realized the wavefront aperture segmentation; Described spectroscope (2) is divided into two bundles with incident light wave, a branch of through forming focal line spot array behind the first microtrabeculae lens arra (3), the first photodetector (4) that focal line spot array is positioned at place, the first microtrabeculae lens (3) focal plane gathers; Another bundle is through forming focal line spot array behind the second microtrabeculae lens arra (5), the second photodetector (6) that focal line spot array is positioned at place, the second microtrabeculae lens (5) focal plane gathers.
2. the Hartmann wave front sensor based on the microtrabeculae lens arra according to claim 1, it is characterized in that described optical match system (1) is positioned over the front end of spectroscope (2), incident light wave after spectroscope (2) will expand is divided into two bundles, wherein the equivalent optical path of transmitted light to the light path of the first microtrabeculae lens arra and reflected light to the second microtrabeculae lens arra.
3. the Hartmann wave front sensor based on the microtrabeculae lens arra according to claim 1, size, radius-of-curvature, thickness, material and the quantity of clear aperture, sub-lens that it is characterized in that described the second microtrabeculae lens arra (5) and the first microtrabeculae lens arra (3) is identical, but mutually vertical with the first microtrabeculae lens arra (3) placement location.
4. the Hartmann wave front sensor based on the microtrabeculae lens arra according to claim 3 is characterized in that the interior sub-lens quantity of described the second microtrabeculae lens arra (5) and the first microtrabeculae lens arra (3) clear aperature determines the precision of Hartmann wave front sensor.
5. each described Hartmann wave front sensor based on the microtrabeculae lens arra in 4 according to claim 1 is characterized in that sub-lens quantity ranks number average in the microtrabeculae lens arra clear aperature is greater than 10.
6. each described Hartmann wave front sensor based on the microtrabeculae lens arra in 4 according to claim 1, it is characterized in that described the first photodetector (4) and the second photodetector (6) adopt ccd detector, cmos detector, or the quadrant sensors array.
7. each described Hartmann wave front sensor based on the microtrabeculae lens arra in 4 according to claim 1 is characterized in that described spectroscope (2) adopts plane beam splitter, or Amici prism.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103557947A (en) * | 2013-10-30 | 2014-02-05 | 东南大学 | Double-mode wave-front sensor capable of conducting automatic alignment and measuring method thereof |
| CN106767391A (en) * | 2016-12-23 | 2017-05-31 | 浙江大学 | The sensitivity intensifier and method of four wavefront lateral shearing interference Wavefront sensors |
| CN110703394A (en) * | 2018-07-09 | 2020-01-17 | 余姚舜宇智能光学技术有限公司 | Large-area signal light energy acquisition system and method |
| CN111829671A (en) * | 2020-09-08 | 2020-10-27 | 中国工程物理研究院应用电子学研究所 | High-resolution wavefront detection device and wavefront restoration method |
| CN112097923A (en) * | 2020-07-30 | 2020-12-18 | 福建华科光电有限公司 | Simple wavefront measurement method for optical element |
| CN112229528A (en) * | 2020-09-28 | 2021-01-15 | 中国科学院上海光学精密机械研究所 | Hartmann wavefront sensor based on Fermat spiral self-interference multifocal lens array |
| CN114777933A (en) * | 2022-06-20 | 2022-07-22 | 中国工程物理研究院应用电子学研究所 | Mesh-free large dynamic range Hartmann wavefront measuring device and measuring method |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103557947A (en) * | 2013-10-30 | 2014-02-05 | 东南大学 | Double-mode wave-front sensor capable of conducting automatic alignment and measuring method thereof |
| CN103557947B (en) * | 2013-10-30 | 2015-10-14 | 东南大学 | A kind of self-aligning double mode Wavefront sensor and measuring method |
| CN106767391A (en) * | 2016-12-23 | 2017-05-31 | 浙江大学 | The sensitivity intensifier and method of four wavefront lateral shearing interference Wavefront sensors |
| CN110703394A (en) * | 2018-07-09 | 2020-01-17 | 余姚舜宇智能光学技术有限公司 | Large-area signal light energy acquisition system and method |
| CN112097923A (en) * | 2020-07-30 | 2020-12-18 | 福建华科光电有限公司 | Simple wavefront measurement method for optical element |
| CN111829671A (en) * | 2020-09-08 | 2020-10-27 | 中国工程物理研究院应用电子学研究所 | High-resolution wavefront detection device and wavefront restoration method |
| CN112229528A (en) * | 2020-09-28 | 2021-01-15 | 中国科学院上海光学精密机械研究所 | Hartmann wavefront sensor based on Fermat spiral self-interference multifocal lens array |
| CN114777933A (en) * | 2022-06-20 | 2022-07-22 | 中国工程物理研究院应用电子学研究所 | Mesh-free large dynamic range Hartmann wavefront measuring device and measuring method |
| CN114777933B (en) * | 2022-06-20 | 2022-09-20 | 中国工程物理研究院应用电子学研究所 | Mesh-free large dynamic range Hartmann wavefront measuring device and measuring method |
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Application publication date: 20130206 |