CN102607820A - Focal length measurement method for micro-lens array - Google Patents
Focal length measurement method for micro-lens array Download PDFInfo
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Abstract
The invention relates to a focal length measurement method for a micro-lens array. All sub-units of the micro-lens array are used for dividing the front parts of spherical surface waves and are imaged on respective focal surfaces; the imaging principle is analyzed, and normal directions of all divided wave surfaces pass through the centers of all sub-hole diameters, the centers of light spots on the focal surfaces and the converging centers of the front parts of the spherical surface waves; and the offsets of the centers of the light spots of all the sub-units of the micro-lens array with an optical axis can be measured through determining the converging centers of the front parts of the spherical surface waves, so as to complete the measurement for the focal lengths of the all the sub-units. According to the method, the measurement for the focal lengths of a plurality of sub-units can be completed through one-time image acquisition and treatment, so that the measurement efficiency and the measurement accuracy are higher, and the method can be used for detecting the micro-lens array with more arrays.
Description
Technical field
The present invention relates to a kind of microlens array focal distance detecting method, belong to the optical detective technology field, can be used for the detection of the more microlens array focal length of unit number.
Background technology
The sign that micro-optics develops rapidly is exactly the appearance of small array optical element.Microlens array is as the vitals of array diffraction optics, because its diffraction efficiency is high, service band is wide, advantage such as microminiaturized and integrated, is widely used in fields such as wavefront detection, optically-coupled and optical storage.Focal length is as the core parameter of microlens array, and its detection directly influences the use and the accuracy of detection of microlens array optical system.
To the detection of microlens array focal length, traditional measurement method mainly contains theoretical detection computations method, light intensity meter mensuration, focometer mensuration, interferometer and focuses method, relief depth detection method, magnification method, optical grating diffraction mensuration and logitudinal magnification detection method etc.
Theoretical detection method is to measure the rise h of microlens array subelement with clock gauge; Measure the caliber size
of subelement again with microscope, accomplish the microlens array focometry according to computing formula.
R is the radius-of-curvature of microlens array subelement in the formula, and n is a refractive index.Because the microlens array size is less, this method practical operation difficulty, measuring accuracy is on the low side, can only carry out rough measure; And need detect each sub-cells one by one, efficiency of measurement is lower.
The luminous intensity measurement method is to utilize light intensity meter to detect near the light intensity of microlens array focal plane to change, to confirm the position of focal plane of microlens array.This method has higher precision to the focometry of single lens; Microlens array is detected, and this method is the focal length of each sub-cells of energy measurement microlens array not, can only confirm the average focal length of all subelements of microlens array.
The focometer detection method is utilized the microscopic examination microlens array: vertex position and the mark of confirming subelement; Move microscope along optical axis again, confirm the position that apex marker forms images on focal plane; The distance that microscope moves is the focal length of microlens array.This method measurement has higher precision, detects but be inappropriate for the little microlens array of size, and complicated operation, once observe the detection that can only accomplish a microlens array subelement, efficiency of measurement is on the low side.
Interferometer focuses method and focometer detection method principle is similar, utilizes interferometer to confirm the summit and the focal position of microlens array subelement respectively, focuses the focal length that distance that the probe of interferometer when measuring moves is this subelement for twice.This method precision is higher, is suitable for the measurement of all types of microlens array focal lengths; Each sub-cells of microlens array focuses measurement but need one by one, complicated operation, and efficiency of measurement is on the low side.
The relief depth method is calculated the focal length of microlens array through measuring the relief depth h and the subelement bore d of microlens array according to formula.
In the formula, n is a refractive index.Utilize this method to measure because the relief depth error that microlens array causes in the process of exposure, development and etching is bigger, so measuring accuracy is not high.
The magnification method is a detection method relatively more commonly used in the focometry process, and its detection principle is: detecting on the parallel light tube star tester that uses has two apertures; Behind light illumination, the emergent light of parallel light tube is two bundle directional lights; Directional light converges through microlens array, on the focal plane of its each sub-cells, becomes two some pictures.Based on how much image-forming principles, can calculate the focal length of each sub-cells of microlens array.
F is the focal length of parallel light tube in the formula, and d is the centre distance of two apertures on the star tester, f
iBe the focal length of tested lenticule subelement, d
iCentre distance for picture point on this subelement focal plane.This method is simple to operate, and it is lower to measure cost, and one-shot measurement can be accomplished the measurement of a plurality of microlens array focal lengths, has higher measuring accuracy and efficiency of measurement; But because the focal length of parallel light tube is difficult for accomplishing the detection of short focal length microlens array than the restriction of hot spot diffraction limit on long and the microlens array focal plane.
The optical grating diffraction method is the method that replaces precise rotating platform that microlens array is measured with common diffraction grating.Based on measuring the 0 grade centre-to-centre spacing that with 1 order diffraction light formed images of each sub-cells of microlens array, in conjunction with grating parameter completion microlens array focometry to grating.
f
i＝h
i/tan?a
F in the formula
iBe the focal length in the sub-aperture of microlens array, h
iBe the centre distance of 0 grade and 1 grade hot spot of this subelement, α is 1 order diffraction angle of diffraction grating.This method is once gathered the focometry that can accomplish a plurality of sub-apertures of microlens array, and efficiency of measurement is higher; But, be inappropriate for the detection of long-focus microlens array because the hot spot between adjacent sub-aperture disturbs.
The logitudinal magnification detection method is utilized the logitudinal magnification of detection system, and through moving the graticule of parallel light tube, the measurement to the microlens array focal length is accomplished in twice imaging in each sub-cells of microlens array.
In the formula, F is the focal length of parallel light tube; The distance that x moves when being twice of the graticule imaging of parallel light tube; x
i' the axial distance of image planes when being twice imaging of microlens array subelement.The focal length that this method one-time detection can be accomplished a plurality of subelements detects, and has higher efficiency of measurement; But the microlens array that only is suitable for long-focus detects, and is on the low side to the microlens array accuracy of detection of short focal length.
Summary of the invention
The technical matters that the present invention will solve is: for overcoming the deficiency of current measuring methods in the microlens array testing process; A kind of microlens array focal-length measurement method is provided; Take into account measuring accuracy and efficiency of measurement, be applicable to that the more microlens array of unit number detects.
The technical scheme that the present invention solves the problems of the technologies described above employing is: provide a kind of and detect the method that principle is measured the microlens array focal length based on Hartmann-picogram wavefront, detection system of the present invention is made up of monochromator 1, parallel light tube 2, standard lens 3, tested microlens array 4, ccd detector 5 and grating dial gauge 6.Wherein, standard lens 3 adopts aberration correction cemented doublet preferably, makes its emerging wavefront approach desirable spherical wave wavefront.This method combines the technology that focuses of sharpness function, through the focal plane of settle the standard lens 3 and tested microlens array 4, accomplishes the measurement of microlens array focal length, it is characterized in that: this method can be accomplished each sub-cells of microlens array through following steps and measure:
Step 1: regulate light path and make parallel light tube 2, standard lens 3 consistent, utilize near ccd detector 5 images acquired standard lens 3 focal planes with the axis of ccd detector 5;
Step 2: the image that utilizes the sharpness function treatment step 1 of digital picture to gather, the focal position a of the lens that settle the standard (3), promptly the spherical wave wavefront compiles the center;
Step 3: regulate tested microlens array 4 and get into detection system, standard lens 3 shifts out detection system, utilizes near the ccd detector 5 images acquired focal plane of tested microlens array 4;
Step 4: utilize the image of sharpness function treatment step 3 collections equally, confirm the position of focal plane b of tested microlens array 4 each sub-cells
i, wherein i is the numbering of each sub-cells of lenticule truth, utilizes grating dial gauge 6 to combine to focus principle, calculating location a and b
iAxial distance L
i
Step 5: standard lens 3 is moved into detection systems, gather near the hot spot of tested microlens array 4 focal planes of spherical wave wavefront incidents with ccd detector 5, and with the position c of grating dial gauge 6 record acquisition images;
Step 6: detect principle and geometric optical imaging principle according to Hartmann-picogram wavefront, analyze the vertical axle offset Δ y of tested microlens array 4 each sub-cells b of putting on the throne and position c hot spot
iWith axial offset delta x
i, can calculate the focal distance f of each sub-cells of microlens array
i:
In the formula, d
iHot spot during c and spherical wave wavefront compile the vertical axle centre distance at center in the position for microlens array i sub-cells; Δ y
iVertical shift for microlens array i sub-cells b and c in the position; Δ x
iBe axial dipole field; L
iBe position a and b
iAxial distance, i.e. the axial distance that compiles center and microlens array i sub-cells focus of spherical wave wavefront.
The invention has the beneficial effects as follows: the present invention utilizes Hartmann-picogram wavefront to detect principle, accomplishes microlens array and detects.Through standard lens being moved into or shifts out the microlens array imaging facula that spherical wave wavefront and plane wave wavefront are converged in the detection system simulation, easy to operation, it is lower to measure cost.The detection methods such as magnification method, optical grating diffraction method of comparing, the microlens array that can be used for all kinds focal length detects, and range of application is wider; Utilize the Definition of digital picture function to confirm the image planes position of microlens array simultaneously, the interferometry of comparing focus analysis, one group of data processing can be accomplished the measurement of a plurality of subelements of microlens array, has improved detection efficiency.
Description of drawings
Fig. 1 is Hartmann-picogram Wavefront sensor spherical wave wavefront Principle of sub-division synoptic diagram.
Fig. 2 is a detection system operation chart of the present invention.
Among the figure, 1. monochromator, 2. parallel light tube, 3. standard lens, 4. tested microlens array, 5.CCD detector, 6. grating dial gauge.
Embodiment
In conjunction with accompanying drawing the present invention is described further: Fig. 1 is that Hartmann-picogram Wavefront sensor is to spherical wave wavefront Principle of sub-division synoptic diagram for core technology of the present invention.Compare with the plane wave wavefront; During spherical wave wavefront irradiation microlens array; The axial skew (except the subelement of center) of hanging down appears in each sub-cells hot spot of microlens array; According to the wavefront Principle of sub-division, can be regarded as the plane wave wavefront of oblique incidence by the spherical wave wavefront of each sub-cells segmentation, and the normal direction of plane wave wavefront to converge the center by subelement center and spherical wave wavefront definite; According to the geometric optical imaging principle, the center of microlens array subelement, subelement are to segmenting the center of converging three's conllinear of corrugated imaging facula and spherical wave simultaneously.Through measuring microlens array focal plane and the distance L that converges the center
i, the centre distance Δ y of conllinear hot spot
iAnd d
i, according to Δ MM among Fig. 1
1The similarity relation of C and Δ OBC can be accomplished the calculating of microlens array focal length and measure.
The present invention is used for the detection of microlens array focal length, and its detection system is made up of monochromator, parallel light tube, standard lens, tested microlens array, ccd detector and grating dial gauge.Fig. 2 is an operation chart of the present invention, mainly divides three parts: at first, utilize the sharpness function to focus near the image change of technical Analysis standard lens focus, the focal position of the lens that settle the standard is position a; Then, utilize grating dial gauge control ccd detector to move near the focal plane of fixing distance L to microlens array, utilize the sharpness function to focus the position of focal plane b that technology is confirmed each sub-cells of microlens array equally
iThe position c of images acquired when utilizing the incident of grating dial gauge record spherical wave wavefront at last.
For microlens array position of focal plane b and standard lens focal position c, utilize the sharpness function to focus curve and focus analysis, it is characterized in that: the axial location that the sharpness function mainly is used for confirming twice imaging of each sub-cells of microlens array is apart from x
i', according to the graphical analysis principle, image clear more (more near image planes), its acutance is big more, and the gray scale difference between corresponding image neighbor also increases.
In the formula; G (x, y) point (x, gray-scale value y) on the expression images acquired; And the width of M and N presentation video and height;
is the images acquired average gray, and on image space, the sharpness function ' G ' of reaction gray scale difference variation tendency has maximum value.In in measuring process; Ccd detector 5 is placed on the motorized precision translation stage; With near suitable step pitch images acquired and with each the two field picture number consecutively focal plane of standard lens 3, utilize Matlab software processes analysis image and confirm position of focal plane (representing) n with picture number
aMove near the focal plane of ccd detector 5 to microlens array 4 and images acquired, write down the axial distance L of twice IMAQ reference position with the grating dial gauge; Utilize Matlab software processes analysis image equally and confirm tested microlens array 4 each sub-cells position of focal plane (representing) n with picture number
Bi, calculating location a and position b
iAxial line distance L
i
L
i＝(n
bi-n
a)×l+L
In the formula, l is the step pitch of stepper motor.
Detect principle and geometric optical imaging principle according to Hartmann-picogram wavefront, analyze tested microlens array 4 each sub-cells b of putting on the throne
iVertical axle offset Δ y with position c hot spot
iWith axial offset delta x
i, can calculate the focal distance f of each sub-cells of microlens array
i:
In the formula, d
iHot spot during c and spherical wave wavefront compile the vertical axle centre distance at center in the position for microlens array i sub-cells; Δ y
iFor microlens array i sub-cells in the position b
iVertical shift with c; Δ x
iBe axial dipole field; L
iBe position a and b
iAxial distance, i.e. the axial distance that compiles center and microlens array i sub-cells focus of spherical wave wavefront.Calculate according to formula, the collection of set of diagrams picture can be confirmed the position of focal plane of a plurality of subelements of microlens array, and promptly image once is handled the focometry that can accomplish a plurality of subelements, and this method has higher detection efficient.
The part that the present invention does not set forth in detail belongs to the known technology of this area.
Claims (2)
1. microlens array focal-length measurement method; Detect principle based on Hartmann-picogram wavefront and measure the microlens array focal length, this detection system is made up of monochromator (1), parallel light tube (2), standard lens (3), tested microlens array (4), ccd detector (5) and grating dial gauge (6); Wherein, Standard lens (3) adopts aberration correction cemented doublet preferably; Make its emerging wavefront approach desirable spherical wave wavefront, utilize the technology that focuses of sharpness function, through the focal plane of lens that settle the standard (3) and tested microlens array (4); Accomplish the measurement of microlens array focal length, it is characterized in that: accomplish each sub-cells of microlens array through following steps and measure:
Step 1: regulate light path and make parallel light tube (2), standard lens (3) consistent, utilize near ccd detector (5) images acquired standard lens (3) focal plane with the axis of ccd detector (5);
Step 2: the image that utilizes the sharpness function treatment step 1 of digital picture to gather, the focal position a of the lens that settle the standard (3), promptly the spherical wave wavefront compiles the center;
Step 3: regulate tested microlens array (4) and get into detection system, standard lens (3) shifts out detection system, utilizes near ccd detector (5) images acquired focal plane of tested microlens array (4);
Step 4: utilize the image of sharpness function treatment step 3 collections equally, confirm the position of focal plane b of each sub-cells of tested microlens array (4)
i, wherein i is the numbering of each sub-cells of microlens array, utilizes grating dial gauge (6) to combine to focus principle, calculating location a and b
iAxial distance L
i
Step 5: standard lens (3) is moved into detection system, gather near the hot spot of the spherical wave tested microlens array of wavefront incident (4) focal plane with ccd detector (5), and with the position c of grating dial gauge (6) record acquisition image;
Step 6: detect principle and geometric optical imaging principle according to Hartmann-picogram wavefront, analyze the vertical axle offset Δ y of each sub-cells of tested microlens array (4) b of putting on the throne and position c hot spot
iWith axial offset delta x
i, the focal distance f of each sub-cells of calculating microlens array
i:
In the formula, d
iHot spot during c and spherical wave wavefront compile the vertical axle centre distance at center in the position for microlens array i sub-cells; Δ y
iVertical shift for microlens array i sub-cells b and c in the position; Δ x
iBe axial dipole field; L
iBe position a and b
iAxial distance, i.e. the axial distance that compiles center and microlens array i sub-cells focus of spherical wave wavefront.
2. method according to claim 1 is characterized in that: it utilizes this to focus technological microlens array is formed images and analyzes based on the digital picture automatic focusing technology of image definition; Sharpness function be used for the settling the standard focal position of lens (3) is the axial distance Li that converges center a and each sub-cells position of focal plane bi of microlens array of spherical wave wavefront, and according to the graphical analysis principle, image is clear more; Promptly more near image planes; Its acutance is big more, and the gray scale difference between corresponding image neighbor also increases, therefore; On image space; The sharpness function of reflection grey scale change trend has maximum value, and in measuring process 2, ccd detector (5) is placed on the motorized precision translation stage; With near suitable step pitch images acquired and with each the two field picture number consecutively focal plane of standard lens (3), the Treatment Analysis image is also confirmed the picture number n that gather the position of focal plane
a; Move near and the images acquired of focal plane of ccd detector (5) to microlens array (4), write down the axial distance L of twice IMAQ reference position with the grating dial gauge; Same Treatment Analysis image is also confirmed the picture number n that gather each sub-cells position of focal plane of tested microlens array (4)
Bi, the axial line distance L of calculating location a and position b
i:
L
i＝(n
bi-n
a)×l+L
In the formula, l is the step pitch of stepper motor, calculates according to formula, and the collection of set of diagrams picture can be confirmed the position of focal plane of a plurality of subelements of microlens array, i.e. the image once focometry of a plurality of subelements of finishing dealing with.
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| CN102889980A (en) * | 2012-10-15 | 2013-01-23 | 中国科学院光电技术研究所 | Method for detecting micro lens fixed focus based on grating shear interference detection system |
| CN104198164A (en) * | 2014-09-19 | 2014-12-10 | 中国科学院光电技术研究所 | Focus detection method based on principle of Hartman wavefront detection |
| CN104613871A (en) * | 2015-02-09 | 2015-05-13 | 北京航空航天大学 | Calibration method of coupling position relationship between micro lens array and detector |
| CN105277132A (en) * | 2014-07-25 | 2016-01-27 | 香港理工大学 | Three-dimensional measurement method and instrument |
| CN106802233A (en) * | 2017-04-07 | 2017-06-06 | 上海汇珏网络通信设备有限公司 | A kind of microlens array test device and method |
| CN107817093A (en) * | 2016-09-12 | 2018-03-20 | 三星显示有限公司 | For the apparatus and method for the characteristic for measuring microlens array |
| CN110460785A (en) * | 2018-05-08 | 2019-11-15 | 财团法人多次元智能It融合系统 | Camera system and the colour-mixed method of compensation |
| CN111220361A (en) * | 2020-01-17 | 2020-06-02 | 中国工程物理研究院激光聚变研究中心 | Method for measuring focal length of micro-lens array |
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|---|---|---|---|---|
| CN102889980B (en) * | 2012-10-15 | 2015-07-15 | 中国科学院光电技术研究所 | Method for detecting micro lens fixed focus based on grating shear interference detection system |
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| CN104613871A (en) * | 2015-02-09 | 2015-05-13 | 北京航空航天大学 | Calibration method of coupling position relationship between micro lens array and detector |
| CN107817093A (en) * | 2016-09-12 | 2018-03-20 | 三星显示有限公司 | For the apparatus and method for the characteristic for measuring microlens array |
| CN107817093B (en) * | 2016-09-12 | 2021-04-02 | 三星显示有限公司 | Apparatus and method for measuring characteristics of microlens array |
| CN106802233A (en) * | 2017-04-07 | 2017-06-06 | 上海汇珏网络通信设备有限公司 | A kind of microlens array test device and method |
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| CN110460785A (en) * | 2018-05-08 | 2019-11-15 | 财团法人多次元智能It融合系统 | Camera system and the colour-mixed method of compensation |
| CN111220361A (en) * | 2020-01-17 | 2020-06-02 | 中国工程物理研究院激光聚变研究中心 | Method for measuring focal length of micro-lens array |
| CN111220361B (en) * | 2020-01-17 | 2022-02-01 | 中国工程物理研究院激光聚变研究中心 | Method for measuring focal length of micro-lens array |
| CN112229528A (en) * | 2020-09-28 | 2021-01-15 | 中国科学院上海光学精密机械研究所 | Hartmann wavefront sensor based on Fermat spiral self-interference multifocal lens array |
| CN112229528B (en) * | 2020-09-28 | 2022-09-02 | 中国科学院上海光学精密机械研究所 | Hartmann wavefront sensor based on Fermat spiral self-interference multifocal lens array |
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