CN108195566B - The method for detecting any wavelength arbitrary shape bore optical system transmission wavefront - Google Patents
The method for detecting any wavelength arbitrary shape bore optical system transmission wavefront Download PDFInfo
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- CN108195566B CN108195566B CN201810003794.5A CN201810003794A CN108195566B CN 108195566 B CN108195566 B CN 108195566B CN 201810003794 A CN201810003794 A CN 201810003794A CN 108195566 B CN108195566 B CN 108195566B
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Abstract
The present invention provides a kind of methods for detecting any wavelength arbitrary shape bore optical system transmission wavefront, comprising the following steps: step 1 is λ using R kind wavelength1~λRDetection device optical system is detected respectively, obtain optical system wavelength be λ1~λREvery wave front aberration Step 2, every wave front aberration that step 1 is obtainedSubstitute into formula:In formula,It is λ for wavelengthmWhen, coordinate is (xi, yi) the corresponding wave front aberration of point, i=1,2,3 ..., k, m=1,2,3 ..., R, R >=2,2R-1≤VR‑1≤ 2R, calculating parameter A1i(xi,yi)、A2i(xi,yi) ..., ARi(xi,yi) value；Step 3, the A that will be calculated1i(xi,yi)、A2i(xi,yi)…ARi(xi,yi) value substitute into formula in, calculate any optical system wavelength be λnWave front aberrationStep 4, according to every wave front aberrationObtaining wavelength is λnThe complete transmission wavefront of optical system, wherein 200nm≤λ1≠…≠λR≠λn≤2000nm。
Description
Technical field
The present invention relates to a kind of methods for detecting transmission wavefront, and in particular to a kind of any wavelength arbitrary shape bore of detection
The method of optical system transmission wavefront.
Background technique
Optical system transmission wavefront is detected usually using laser interferometer, and laser interferometer can accurately detect specific wavelength
Optical system (Optical System Design wavelength is consistent with interferometer optical source wavelength) has different type wave according to detection needs at present
Long laser interferometer, for detecting the transmission wavefront of different type optical system.For example, 248nm and 363nm laser interferometer
For detecting ultraviolet lens system, 405nm laser interferometer is used to detect the lens of dvd pickup storage and audio-visual equipment,
1053nm laser interferometer is for Study of Laser fusion, fusion etc..
In the prior art, the laser interferometer of only several specific wavelengths, therefore, the optical system of all band can not make
It is detected with laser interferometer, the application range for causing laser interferometer to detect in optical system transmission wavefront is smaller.In addition, laser
The research and development difficulty of interferometer is larger, and special wavelength laser interferometer involves great expense, therefore, the laser of existing special wavelength
The type of interferometer is less.
In actual application, although can use the functional relation of transmission wavefront Zernike coefficient and wavelength, it can incite somebody to action
Optical system specific wavelength wave front data is converted to any wavelength wave front data, realizes any wavelength optical system transmission wavefront
Detection.But Zernike coefficient is only orthogonal in unit circle, the clear aperature of tested optical system has to be round, for it
The optical system of his shape clear aperture cannot then use.
Summary of the invention
The present invention is to carry out to solve the above-mentioned problems, and it is an object of the present invention to provide a kind of any wavelength arbitrary shape of detection
Bore optical system transmission wavefront method.
The present invention provides a kind of methods for detecting any wavelength arbitrary shape bore optical system transmission wavefront, have this
The feature of sample, comprising the following steps: step 1 is λ using R kind wavelength1~λRDetection device optical system is examined respectively
It surveys, respectively obtaining optical system in wavelength is λ1~λREvery wave front aberration Step 2 obtains step 1
The every wave front aberration arrivedSubstitute into formula:
In formula,It is λ for wavelengthmWhen, coordinate is (xi, yi) the opposite corrugated that refers to of the corresponding wavefront of point
Deviation value, i=1,2,3 ..., k,
M=1,2,3 ..., R, R >=2,
2R-3≤VR-1≤ 2R-2,
Calculating parameter A1i(xi,yi)、A2i(xi,yi) ..., ARi(xi,yi) value；
Step 3, the A that will be calculated1i(xi,yi)、A2i(xi,yi)…ARi(xi,yi) value substitute into formula in, calculate light
System is λ in wavelengthnWave front aberrationAnd step 4, according to wave front aberrationObtain wave
A length of λnThe complete transmission wavefront of optical system, wherein 200nm≤λ1≠…≠λR≠λn≤2000nm。
It, can be in the method for any wavelength arbitrary shape bore optical system transmission wavefront of detection provided by the invention
It has a feature in that wherein, the clear aperature of optical system is arbitrary shape.
It, can be in the method for any wavelength arbitrary shape bore optical system transmission wavefront of detection provided by the invention
It has a feature in that wherein, optical system is cylindrical optical system.
It, can be in the method for any wavelength arbitrary shape bore optical system transmission wavefront of detection provided by the invention
It has a feature in that wherein, 300nm≤λ1≠…≠λR≠λn≤1600nm。
It, can be in the method for any wavelength arbitrary shape bore optical system transmission wavefront of detection provided by the invention
It has a feature in that wherein, as R=3, formula are as follows:
In formula, i=1,2,3 ..., k,
M=1 or 2 or 3,1≤V1≤ 2,3≤V2≤4。
It, can be in the method for any wavelength arbitrary shape bore optical system transmission wavefront of detection provided by the invention
It has a feature in that wherein, as R=4, formula are as follows:
In formula, i=1,2,3 ..., k,
M=1 or 2 or 3 or 4,1≤V1≤ 2,3≤V2≤ 4,5≤V3≤6。
It, can be in the method for any wavelength arbitrary shape bore optical system transmission wavefront of detection provided by the invention
It has a feature in that wherein, detection device is fizeau interferometer or safe graceful Green interferometer.
The action and effect of invention
The method of any wavelength arbitrary shape bore optical system transmission wavefront of detection involved according to the present invention, because
R kind wavelength is used as λ1~λRDetection device optical system is detected, obtain optical system wavelength be λ1~λR's
Then every wave front aberration will obtain every wave front aberrationSubstitute into formula:
Calculating parameter A1i(xi,yi)、A2i(xi,yi) ..., A3i(xi,yi) value；Any wavelength X is calculated further according to formulan's
The wave front aberration of optical system, and then obtain any wavelength XnOptical system transmission wavefront.So detection of the invention is appointed
The method of meaning wavelength arbitrary shape bore optical system transmission wavefront can detecte any wavelength in a wavelength range
The transmission wavefront of optical system, and the light hole of optical system that this method uses is through can have any shape, it is not limited to
The optical system of round light hole warp, increases the applicability of the detection method in practical applications.
Detailed description of the invention
Fig. 1 is the schematic diagram of wave front aberration in the embodiment of the present invention；
Fig. 2 is the detection device signal that the transmission wavefront of any wavelength optical system is detected in the embodiment of the present invention one
Figure；
Fig. 3 is the detection device schematic diagram that any wavelength optical system transmission wavefront is detected in the embodiment of the present invention two；
Fig. 4 is the solution curve and theoretic acquisition data and curves comparative diagram that detection method of the invention obtains；And
Fig. 5 is the solution curve and theoretic acquisition data and curves percentage error that detection method of the invention obtains
Figure.
Specific embodiment
In order to be easy to understand the technical means, the creative features, the aims and the efficiencies achieved by the present invention, tie below
Embodiment is closed to be specifically addressed the method for any wavelength arbitrary shape bore optical system transmission wavefront of detection of the invention.
Fig. 1 is the schematic diagram of wave front aberration in the embodiment of the present invention.
As shown in Figure 1, in figure dotted portion indicate optical system wavelength be λmWhen detection device under theoretical wavefront,
A point is any point in the theoretical wavefront, and coordinate is A (xA, yA, zA), bold portion indicate the optical system in same inspection
The actual wavefront under device is surveyed, B point is point corresponding with A point in actual wavefront, and coordinate is B (xA, yA, zB), wave front aberration A
Point with the distance between B point that is,
<embodiment one>
Fig. 2 is the detection device signal that the transmission wavefront of any wavelength optical system is detected in the embodiment of the present invention one
Figure.
As shown in Fig. 2, the detection device 200 for detecting the transmission wavefront of any wavelength optical system includes three laser interferences
Instrument 20, standard spherical mirror 21, infinite conjugate optical system 22 and plane of reflection mirror 23.Three laser interferometer 20 are to infinite total
The light path and method of conjugate optics system 22 are identical, in the present embodiment, are elaborated for one of them.
Infinite conjugate optical system 22 is detected with specific wavelength laser interferometer 20, laser interferometer 20 issues flat
Row light obtains wave of the infinite conjugate optical system 22 under the wavelength of specific wavelength laser interferometer 20 by standard spherical mirror 21
Preceding aberration.
Step 1 is respectively λ using wavelength1、λ2And λ3Three kinds of laser interferometer optical system is detected, point
It is λ that optical system is not obtained in wavelength1、λ2And λ3Every wave front aberration
Step 2, every wave front aberration that step 1 is obtainedSubstitute into formula:
In formula,It is λ for wavelengthmWhen, coordinate is (xi, yi) the corresponding wave front aberration of point, i=1,2,
3 ..., k, k determined according to the shape and resolution ratio of optical system, m=1 or 2 or 3,1≤V1≤ 2,3≤V2≤4。
Calculating parameter A1i(xi,yi)、A2i(xi,yi) and A3i(xi,yi) value；
Step 3, the A that will be calculated1i(xi,yi)、A2i(xi,yi) and A3i(xi,yi) value substitute into above-mentioned public affairs again
In formula, calculating any optical system in wavelength is λnEvery wave front aberration
Step 4, according to every wave front aberrationObtaining wavelength is λnThe complete transmitted wave of optical system
Before.
<embodiment two>
Fig. 3 is the detection device schematic diagram that any wavelength optical system transmission wavefront is detected in the embodiment of the present invention two.
As shown in figure 3, the transmission wavefront detection device 300 for detecting any wavelength optical system includes four laser interferometer
30, standard spherical mirror 31, finite conjugate optical system 32 and reflecting spherical mirror 33.Four laser interferometer 30 are to finite conjugate
The light path and method of optical system 32 are identical, in the present embodiment, are elaborated for one of them.
Finite conjugate optical system 32 is detected with specific wavelength laser interferometer 30, laser interferometer 30 issues flat
Row light obtains wave of the finite conjugate optical system 32 under the wavelength of specific wavelength laser interferometer 30 by standard spherical mirror 31
Preceding aberration.
Step 1 is respectively λ using wavelength1、λ2、λ3And λ4Four kinds of laser interferometer optical system is detected,
It is λ that optical system, which is respectively obtained, in wavelength1、λ2、λ3And λ4Every wave front aberration And
Step 2, every wave front aberration that step 1 is obtainedSubstitute into formula:
In formula,It is λ for wavelengthmWhen, coordinate is (xi, yi) the opposite corrugated that refers to of the corresponding wavefront of point
Deviation value, i=1,2,3 ..., k, k are determined according to the shape and resolution ratio of optical system, m=1 or 2 or 3 or 4,1≤
V1≤ 2,3≤V2≤ 4,5≤V3≤6。
Calculating parameter A1i(xi,yi)、A2i(xi,yi), A3i(xi,yi), A4i(xi,yi) value.
Step 3, the A that will be calculated1i(xi,yi)、A2i(xi,yi), A3i(xi,yi), A4i(xi,yi) value substitute into again
In above-mentioned formula, calculating any optical system in wavelength is λnWave front aberration
Step 4, according to every wave front aberrationObtaining wavelength is λnThe complete transmitted wave of optical system
Before.
In the above-described embodiments, detection device is laser interferometer, the laser interferometer can for fizeau interferometer or
Safe graceful Green interferometer.
In addition, the range of the Detection wavelength of the laser interferometer in above-described embodiment is 200nm≤λ1≠…≠λR≠λn≤
2000nm.Further, the range of Detection wavelength is 300nm≤λ1≠…≠λR≠λn≤1600nm。
Fig. 4 is the solution curve and theoretic acquisition data and curves comparative diagram that detection method of the invention obtains.
As shown in figure 4, the method for any wavelength arbitrary shape bore optical system transmission wavefront of detection of the invention exists
Wavelength is obtained curve under the detection of the laser interferometer of 530nm, 560nm, 670nm, wherein solid line date1 is dry for laser
The curve that interferometer directly detects, solid line date2 are the obtained curve calculated using detection method of the invention using formula.
Fig. 5 is the solution curve and theoretic acquisition data and curves percentage error that detection method of the invention obtains
Figure.
As shown in figure 5, solid line date1 and two maximum errors of curve of solid line date2 are 0.07%.
The action and effect of embodiment
The side of any wavelength arbitrary shape bore optical system transmission wavefront of detection according to involved in above-described embodiment
Method, because using R kind wavelength as λ1~λRDetection device optical system is detected, obtaining optical system in wavelength is
λ1~λREvery wave front aberration, then by every obtained wave front aberrationSubstitute into formula:
Calculating parameter A1i(xi,yi)、A2i(xi,yi) ..., A3i(xi,yi) value；Any wavelength X is calculated further according to formulan's
The wave front aberration of optical system, and then obtain any wavelength XnOptical system transmission wavefront.So detection of the invention is appointed
The method of meaning wavelength arbitrary shape bore optical system transmission wavefront can detecte any wavelength in a wavelength range
The transmission wavefront of optical system, and the light hole of optical system that this method uses is through can have any shape, it is not limited to
The optical system of round light hole warp, increases the applicability of the detection method in practical applications.
Public affairs are specifically calculated when the kind number of laser interferometer is 3 or a variety of in addition, also teaching in above-described embodiment
Formula improves the precision of the transmission wavefront of entire detection method detection optical system.
In addition, the method for any wavelength arbitrary shape bore optical system transmission wavefront of detection of the invention can not only be examined
The transmission wavefront of the optical system of arbitrary shape clear aperature is measured, and the detection method is also applied for cylindrical optical system,
Substantially increase the generality of this method.
Above embodiment is preferred case of the invention, the protection scope being not intended to limit the invention.
Claims (7)
1. a kind of method for detecting any wavelength arbitrary shape bore optical system transmission wavefront, which is characterized in that including following
Step:
Step 1 is λ using R kind wavelength1~λRDetection device optical system is detected respectively, respectively obtain the light
System is λ in wavelength1~λREvery wave front aberration
Step 2, every wave front aberration that step 1 is obtainedSubstitute into formula:
In formula,It is λ for wavelengthmWhen, coordinate is (xi, yi) the corresponding opposite deviation value for referring to corrugated of point, i
=1,2,3 ..., k,
M=1,2,3 ..., R, R >=2,
2R-3≤VR-1≤ 2R-2,
Calculating parameter A1i(xi,yi)、A2i(xi,yi) ..., ARi(xi,yi) value；
Step 3, the A that will be calculated1i(xi,yi)、A2i(xi,yi)…ARi(xi,yi) value substitute into the formula, calculate and appoint
Optical system of anticipating is λ in wavelengthnEvery wave front aberrationAnd
Step 4, according to every wave front aberrationObtaining wavelength is λnThe complete transmission wavefront of optical system,
Wherein, 200nm≤λ1≠…≠λR≠λn≤2000nm。
2. the method for any wavelength arbitrary shape bore optical system transmission wavefront of detection according to claim 1, special
Sign is:
Wherein, the clear aperature of the optical system is arbitrary shape.
3. the method for any wavelength arbitrary shape bore optical system transmission wavefront of detection according to claim 1, special
Sign is:
Wherein, the optical system is cylindrical optical system.
4. the method for any wavelength arbitrary shape bore optical system transmission wavefront of detection according to claim 1, special
Sign is:
Wherein, 300nm≤λ1≠…≠λR≠λn≤1600nm。
5. the method for any wavelength arbitrary shape bore optical system transmission wavefront of detection according to claim 1, special
Sign is:
Wherein, as R=3, the formula are as follows:
In formula, i=1,2,3 ..., k,
M=1 or 2 or 3,
1≤V1≤ 2,3≤V2≤4。
6. the method for any wavelength arbitrary shape bore optical system transmission wavefront of detection according to claim 1, special
Sign is:
Wherein, as R=4, the formula are as follows:
In formula, i=1,2,3 ..., k,
M=1 or 2 or 3 or 4,
1≤V1≤ 2,3≤V2≤ 4,5≤V3≤6。
7. the method for any wavelength arbitrary shape bore optical system transmission wavefront of detection according to claim 1, special
Sign is:
Wherein, the detection device is fizeau interferometer or safe graceful Green interferometer.
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| CN111999042B (en) * | 2019-06-28 | 2022-06-28 | 苏州维纳仪器有限责任公司 | Method for detecting any wavelength transmission wavefront of optical system |
| CN110307963B (en) * | 2019-08-08 | 2020-11-03 | 苏州维纳仪器有限责任公司 | Method for detecting any wavelength focal length of transmission type optical system |
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| US8836928B2 (en) * | 2009-10-20 | 2014-09-16 | Nikon Corporation | Method for measuring wavefront aberration and wavefront aberration measuring apparatus |
| JP5517108B2 (en) * | 2010-08-25 | 2014-06-11 | 株式会社ニコン | Wavefront aberration measuring device |
| CN102507155B (en) * | 2011-11-03 | 2014-03-26 | 中国科学院光电技术研究所 | Device for detecting wave front of large-aperture optical system |
| CN103335824B (en) * | 2013-07-04 | 2016-01-13 | 中国科学院长春光学精密机械与物理研究所 | Detection method of outfield wave front aberration of large-aperture space optical system |
| CN104181779B (en) * | 2014-09-05 | 2016-10-12 | 中国科学院光电技术研究所 | A kind of optical system wave aberration detection device |
| CN107462401B (en) * | 2017-07-26 | 2019-07-05 | 苏州维纳仪器有限责任公司 | The method for detecting the transmission wavefront of any wavelength optical system |
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