CN102607820B - Focal length measurement method for micro-lens array - Google Patents

Focal length measurement method for micro-lens array Download PDF

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CN102607820B
CN102607820B CN201210098272.0A CN201210098272A CN102607820B CN 102607820 B CN102607820 B CN 102607820B CN 201210098272 A CN201210098272 A CN 201210098272A CN 102607820 B CN102607820 B CN 102607820B
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microlens array
image
subelement
lens
focal plane
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CN102607820A (en
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朱咸昌
伍凡
曹学东
吴时彬
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Institute of Optics and Electronics of CAS
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Abstract

The invention relates to a focal length measurement method for a micro-lens array. All sub-units of the micro-lens array are used for dividing the front parts of spherical surface waves and are imaged on respective focal surfaces; the imaging principle is analyzed, and normal directions of all divided wave surfaces pass through the centers of all sub-hole diameters, the centers of light spots on the focal surfaces and the converging centers of the front parts of the spherical surface waves; and the offsets of the centers of the light spots of all the sub-units of the micro-lens array with an optical axis can be measured through determining the converging centers of the front parts of the spherical surface waves, so as to complete the measurement for the focal lengths of the all the sub-units. According to the method, the measurement for the focal lengths of a plurality of sub-units can be completed through one-time image acquisition and treatment, so that the measurement efficiency and the measurement accuracy are higher, and the method can be used for detecting the micro-lens array with more arrays.

Description

A kind of focal length of micro-lens array measuring method
Technical field
The present invention relates to a kind of focal length of micro-lens array detection method, belong to optical detective technology field, can be used for the detection of the more focal length of micro-lens array of unit number.
Background technology
The sign that micro-optics develops rapidly is exactly the appearance of small array optical element.Microlens array is as the vitals of array diffraction optics, because its diffraction efficiency is high, service band is wide, the advantage such as microminiaturized and integrated, is widely used in the fields such as wavefront detection, optically-coupled and optical storage.Focal length is as the core parameter of microlens array, and its detection directly affects use and the accuracy of detection of microlens array optical system.
Detection to focal length of micro-lens array, traditional measurement method mainly contains theoretical detection computations method, light intensity meter mensuration, focometer mensuration, interferometer and focuses method, relief depth detection method, magnification method, optical grating diffraction mensuration and logitudinal magnification detection method etc.
Theoretical detection method is with clock gauge, to measure the rise h of microlens array subelement, then with microscope, measures the caliber size of subelement , according to computing formula, complete focal length of micro-lens array and measure.
f ′ = R n - 1 = h 2 + φ 2 / 4 2 h ( n - 1 )
In formula, R is the radius-of-curvature of microlens array subelement, and n is refractive index.Because microlens array size is less, the method practical operation difficulty, measuring accuracy is on the low side, can only carry out rough measure; And need detect one by one each subelement, measure efficiency lower.
Luminous intensity measurement method is to utilize light intensity meter to detect near the light intensity of microlens array focal plane to change, to determine the position of focal plane of microlens array.The method has higher precision to the focometry of single lens; Microlens array is detected, and the method can not be measured the focal length of each subelement of microlens array, can only determine the average focal length of all subelements of microlens array.
Focometer detection method is utilized microscopic examination microlens array: vertex position the mark of determining subelement; Along optical axis, move microscope again, determine the position of apex marker imaging on focal plane; The distance that microscope moves is the focal length of microlens array.This method measurement has higher precision, but be unsuitable for the microlens array that size is little, detects, and complicated operation, once observe the detection that can only complete a microlens array subelement, measure efficiency on the low side.
Interferometer focuses method and focometer detection method principle is similar, utilizes interferometer to determine respectively summit and the focal position of microlens array subelement, and the distance that while focusing measurement for twice, the probe of interferometer moves is the focal length of this subelement.The method precision is higher, is suitable for the measurement of all types of focal length of micro-lens arrays; But need each subelement of microlens array one by one to focus measurement, complicated operation, measures efficiency on the low side.
Relief depth method, by measuring relief depth h and the subelement bore d of microlens array, is calculated the focal length of microlens array according to formula.
f = d 2 8 ( n - 1 ) h
In formula, n is refractive index.Utilize the method to measure the relief depth error causing due to microlens array in the process of exposure, development and etching larger, so measuring accuracy is not high.
Magnification method is detection method more conventional in focometry process, and its detection principle is: detect on the parallel light tube star tester using and have two apertures; After light illumination, the emergent light of parallel light tube is two bundle directional lights; Directional light converges through microlens array, becomes two some pictures on the focal plane of its each subelement.According to how much image-forming principles, can calculate the focal length of each subelement of microlens array.
f i F = d i d
The focal length that in formula, F is parallel light tube, d is the centre distance of two apertures on star tester, f ifor the focal length of tested lenticule subelement, d icentre distance for picture point on this subelement focal plane.The method is simple to operate, measures cost lower, and one-shot measurement can complete the measurement of a plurality of focal length of micro-lens arrays, has higher measuring accuracy and measures efficiency; But due to the focal length of parallel light tube is long and microlens array focal plane on the restriction of hot spot diffraction limit, be difficult for the detection of short focal length microlens array.
Grating Diffraction Method is the method that replaces precise rotating platform to measure microlens array with common diffraction grating.According to measuring the centre distance of each subelement of microlens array to 0 of grating grade and 1 order diffraction light imaging, in conjunction with grating parameter, complete focal length of micro-lens array measurement.
f i＝h i/tan?a
F in formula ifor the focal length in the sub-aperture of microlens array, h ifor the centre distance of 0 grade and 1 grade hot spot of this subelement, α is 1 order diffraction angle of diffraction grating.The method once gathers the focometry that can complete a plurality of sub-apertures of microlens array, measures efficiency higher; But because the hot spot between adjacent sub-aperture disturbs, be unsuitable for the detection of long-focus microlens array.
Logitudinal magnification detection method is utilized the logitudinal magnification of detection system, and by the graticule of moving parallel light pipe, twice imaging in each subelement of microlens array, completes the measurement to focal length of micro-lens array.
f i = F · x / x i ′
In formula, the focal length that F is parallel light tube; The distance that x moves while being twice imaging of graticule of parallel light tube; x i' the axial distance of image planes while being twice imaging of microlens array subelement.The focal length that the method one-time detection can complete a plurality of subelements detects, and has higher measurement efficiency; But be only suitable for detecting in the microlens array of long-focus, on the low side to the microlens array accuracy of detection of short focal length.
Summary of the invention
The technical problem to be solved in the present invention is: for overcoming the deficiency of existing measuring method in microlens array testing process, a kind of focal length of micro-lens array measuring method is provided, take into account measuring accuracy and measure efficiency, being applicable to the more microlens array of unit number and detecting.
The technical scheme that the present invention solves the problems of the technologies described above employing is: provide a kind of and detect based on Hartmann-picogram wavefront the method that principle is measured focal length of micro-lens array, detection system of the present invention is comprised of monochromator 1, parallel light tube 2, standard lens 3, tested microlens array 4, ccd detector 5 and grating dial gauge 6.Wherein, standard lens 3 adopts the good cemented doublet of aberration correction, makes its emerging wavefront close to desirable spherical wave wavefront.The method is in conjunction with the technology that focuses of sharpness function, and the focal plane by settle the standard lens 3 and tested microlens array 4, completes the measurement of focal length of micro-lens array, it is characterized in that: the method can complete each subelement of microlens array by following steps and measure:
Near step 1: regulate light path to make parallel light tube 2, standard lens 3 consistent with the axis of ccd detector 5, utilize ccd detector 5 to gather image standard lens 3 focal planes;
Step 2: the image that utilizes the sharpness function treatment step 1 of digital picture to gather, the focal position a of the lens that settle the standard (3), spherical wave wavefront collects center;
Near step 3: regulate tested microlens array 4 to enter detection system, standard lens 3 shifts out detection system, utilizes ccd detector 5 to gather image the focal plane of tested microlens array 4;
Step 4: utilize equally the image of sharpness function treatment step 3 collections, determine the position of focal plane b of tested microlens array 4 each subelements i, wherein i is the numbering of each subelement of lenticule truth, utilizes grating dial gauge 6 in conjunction with focusing principle, calculating location a and b iaxial distance L i;
Step 5: standard lens 3 is moved into detection system, gather near the hot spot of tested microlens array 4 focal planes of spherical wave wavefront incident with ccd detector 5, and gather the position c of image with grating dial gauge 6 records;
Step 6: detect principle and geometric optical imaging principle according to Hartmann-picogram wavefront, analyze tested microlens array 4 each subelements at the vertical axle offset Δ y of position b and position c hot spot iwith axial offset delta x i, can calculate the focal distance f of each subelement of microlens array i:
f i = Δ y i d i - Δ y i ( L i ± Δ x i ) + ‾ Δ x i
In formula, d ihot spot during for i the subelement c of putting in place of microlens array and spherical wave wavefront collect the vertical axle centre distance at center; Δ y ifor i subelement of microlens array vertical shift of putting b and c in place; Δ x ifor axial dipole field; L ifor position a and b iaxial distance, i.e. the axial distance that collects center and i subelement focus of microlens array of spherical wave wavefront.
The invention has the beneficial effects as follows: the present invention utilizes Hartmann-picogram wavefront to detect principle, complete microlens array and detect.By standard lens being moved into or shifted out the microlens array imaging hot spot that spherical wave wavefront and plane wave wavefront are converged in detection system simulation, easy to operation, measure cost lower.The detection methods such as magnification method, grating Diffraction Method of comparing, the microlens array that can be used for all kinds focal length detects, and range of application is wider; Utilize Definition of digital picture function to determine the image planes position of microlens array simultaneously, the interferometry of comparing focus analysis, one group of data processing can complete the measurement of a plurality of subelements of microlens array, has improved detection efficiency.
Accompanying drawing explanation
Fig. 1 is Hartmann-picogram Wavefront sensor spherical wave wavefront Principle of sub-division schematic diagram.
Fig. 2 is detection system operation chart of the present invention.
In figure, 1. monochromator, 2. parallel light tube, 3. standard lens, 4. tested microlens array, 5.CCD detector, 6. grating dial gauge.
Embodiment
The invention will be further described by reference to the accompanying drawings: Fig. 1 is that core technology of the present invention is that Hartmann-picogram Wavefront sensor is to spherical wave wavefront Principle of sub-division schematic diagram.Compare with plane wave wavefront, when spherical wave wavefront irradiates microlens array, there is the axial skew (except the subelement of center) of hanging down in each subelement hot spot of microlens array, according to wavefront Principle of sub-division, the spherical wave wavefront being segmented by each subelement can be regarded the plane wave wavefront of oblique incidence as, and the normal direction of plane wave wavefront is determined by subelement center and spherical wave wavefront convergence center; According to geometric optical imaging principle, the center of microlens array subelement, subelement are to segmenting the convergence center three conllinear of corrugated imaging facula and spherical wave simultaneously.By measuring the distance L of microlens array focal plane and convergence center i, the centre distance Δ y of conllinear hot spot iand d i, according to Δ MM in Fig. 1 1the similarity relation of C and Δ OBC, can complete the computation and measurement of focal length of micro-lens array.
The present invention is for the detection of focal length of micro-lens array, and its detection system is comprised of monochromator, parallel light tube, standard lens, tested microlens array, ccd detector and grating dial gauge.Fig. 2 is operation chart of the present invention, mainly divides three parts: first, utilize sharpness function to focus near the image change of technical Analysis standard lens focus, the focal position of the lens that settle the standard is position a; Then, utilize grating dial gauge to control ccd detector and move fixing distance L near the focal plane of microlens array, utilize equally sharpness function to focus the position of focal plane b that technology is determined each subelement of microlens array i; While finally utilizing grating dial gauge to record the incident of spherical wave wavefront, gather the position c of image.
For microlens array position of focal plane b and standard lens focal position c, utilize sharpness function to focus curve and focus analysis, it is characterized in that: the axial location that sharpness function is mainly used to determine twice imaging of each subelement of microlens array is apart from x i', according to graphical analysis principle, image more clear (more approaching image planes), its acutance is larger, and the gray scale difference between corresponding image neighbor also increases.
In formula, g (x, y) represents to gather the gray-scale value of point (x, y) on image, and the width of M and N presentation video and height, for gathering gradation of image mean value, on image space, the sharpness function ' G ' of reaction gray scale difference variation tendency has maximum value.In in measuring process, ccd detector 5 is placed on motorized precision translation stage, with suitable step pitch, near the focal plane of standard lens 3, gather image and by each two field picture number consecutively, utilize Matlab software Treatment Analysis image and determine position of focal plane (representing with picture number) n a; Mobile ccd detector 5 is near the focal plane of microlens array 4 and gather image, records the axial distance L of twice image acquisition reference position with grating dial gauge; Utilize equally Matlab software Treatment Analysis image and determine tested microlens array 4 each subelement position of focal plane (representing with picture number) n bi, calculating location a and position b iaxial line distance L i.
L i＝(n bi-n a)×l+L
In formula, the step pitch that l is stepper motor.
According to Hartmann-picogram wavefront, detect principle and geometric optical imaging principle, analyze tested microlens array 4 each subelements at position b ivertical axle offset Δ y with position c hot spot iwith axial offset delta x i, can calculate the focal distance f of each subelement of microlens array i:
f i = Δ y i d i - Δ y i ( L i ± Δ x i ) + ‾ Δ x i
In formula, d ihot spot during for i the subelement c of putting in place of microlens array and spherical wave wavefront collect the vertical axle centre distance at center; Δ y ifor i subelement of microlens array b that puts in place ivertical shift with c; Δ x ifor axial dipole field; L ifor position a and b iaxial distance, i.e. the axial distance that collects center and i subelement focus of microlens array of spherical wave wavefront.According to formula, calculate, one group of image acquisition can be determined the position of focal plane of a plurality of subelements of microlens array, and an image is processed the focometry that can complete a plurality of subelements, and the method has higher detection efficiency.
The part that the present invention does not elaborate belongs to the known technology of this area.

Claims (2)

1. a focal length of micro-lens array measuring method, based on Ha Teman ?picogram wavefront, detect principle and measure focal length of micro-lens array, this detection system is comprised of monochromator (1), parallel light tube (2), standard lens (3), tested microlens array (4), ccd detector (5) and grating dial gauge (6); Wherein, standard lens (3) adopts the good cemented doublet of aberration correction, make its emerging wavefront close to desirable spherical wave wavefront, utilize the technology that focuses of sharpness function, by the focal plane of the lens that settle the standard (3) and tested microlens array (4), complete the measurement of focal length of micro-lens array, it is characterized in that: by following steps, complete each subelement of microlens array and measure:
Near step 1: regulate light path to make parallel light tube (2), standard lens (3) consistent with the axis of ccd detector (5), utilize ccd detector (5) to gather image standard lens (3) focal plane;
Step 2: the image that utilizes the sharpness function treatment step 1 of digital picture to gather, the focal position a of the lens that settle the standard (3), spherical wave wavefront collects center;
Step 3: regulate tested microlens array (4) to enter detection system, standard lens (3) shifts out detection system, utilizes ccd detector (5) near the focal plane of tested microlens array (4), to gather image;
Step 4: utilize equally the image of sharpness function treatment step 3 collections, determine the position of focal plane b of each subelement of tested microlens array (4) i, wherein i is the numbering of each subelement of microlens array, utilizes grating dial gauge (6) in conjunction with focusing principle, calculating location a and b iaxial distance L i;
Step 5: standard lens (3) is moved into detection system, gather near the hot spot of the spherical wave tested microlens array of wavefront incident (4) focal plane with ccd detector (5), and gather the position c of image with grating dial gauge (6) record;
Step 6: detect principle and geometric optical imaging principle according to Hartmann-picogram wavefront, analyze each subelement of tested microlens array (4) at the vertical axle offset Δ y of position b and position c hot spot iwith axial offset delta x i, the focal distance f of each subelement of calculating microlens array i:
f i = Δ y i d i - Δ y i ( L i ± Δ x i ) + ‾ Δ x i
In formula, d ihot spot during for i the subelement c of putting in place of microlens array and spherical wave wavefront collect the vertical axle centre distance at center; Δ y ifor i subelement of microlens array vertical shift of putting b and c in place; Δ x ifor axial dipole field; L ifor position a and b iaxial distance, i.e. the axial distance that collects center and i subelement focus of microlens array of spherical wave wavefront.
2. method according to claim 1, it is characterized in that: its digital picture automatic focusing technology based on image definition, utilize this to focus technology microlens array imaging is analyzed, sharpness function be used for the settling the standard focal position of lens (3) is convergence center position a and each subelement position of focal plane of microlens array b of spherical wave wavefront iaxial distance L iaccording to graphical analysis principle, image is more clear, more approach image planes, its acutance is larger, gray scale difference between corresponding image neighbor also increases, therefore, on image space, the sharpness function of reflection grey scale change trend has maximum value, and in measuring process 2, ccd detector (5) is placed on motorized precision translation stage, with suitable step pitch, near the focal plane of standard lens (3), gather image and by each two field picture number consecutively, Treatment Analysis image is also determined the picture number n that position of focal plane gathers a; Mobile ccd detector (5) is near the focal plane of microlens array (4) and gather image, records the axial distance L of twice image acquisition reference position with grating dial gauge; Same Treatment Analysis image is also determined the picture number n that each subelement position of focal plane of tested microlens array (4) gathers bi, the axial line distance L of calculating location a and position b i:
L i＝(n bi-n a)×l+L
In formula, the step pitch that l is stepper motor, calculates according to formula, and one group of image acquisition can be determined the position of focal plane of a plurality of subelements of microlens array, i.e. image focometry of a plurality of subelements of finishing dealing with.
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