CN106841236A - Transmission optical component defect test device and method - Google Patents
Transmission optical component defect test device and method Download PDFInfo
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- CN106841236A CN106841236A CN201611147850.XA CN201611147850A CN106841236A CN 106841236 A CN106841236 A CN 106841236A CN 201611147850 A CN201611147850 A CN 201611147850A CN 106841236 A CN106841236 A CN 106841236A
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- defect
- imaging system
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- laser
- optical element
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
Abstract
The drawbacks of being taken time and effort to solve conventional test methodologies, be limited to the defect measurement inside optical element, the invention provides a kind of test device and method of transmission optical component defect, wherein device includes laser, collimating mirror, tight shot, CCD, travel mechanism and acquisition control computer；The collimating mirror is arranged on the output light path of laser；The tight shot and CCD are rigidly connected composition imaging system, and the monitoring face of imaging system passes through tight shot and CCD photosurfaces into conjugate relation；The imaging system is fixed in travel mechanism；The travel mechanism is connected with acquisition control computer.
Description
Technical field
The invention belongs to optical field, it is related in the method for testing and device, more particularly to laser optical path of optical element defect
Transmission-type large caliber flat plate and the method for testing and device of wedge surface, sub-surface and internal defect position.
Background technology
It is a large amount of using flat boards and wedge optical element in the host apparatus of God Light III, flat board and wedge defect can make element compared with
Damage is produced under low flux, laser induced damage can accelerate the damage of element, while causing the beam quality of device to become
Difference, influences the output energy and focus characteristics of device, and thermal imagery is produced in subsequent optical path, causes new damage, makes the energy of target practice
Amount declines, very harmful.Therefore, device middle plateform is particularly significant with the control of defect in wedge.
Conventional test methodologies：
Method 1, visual method amplifies the defect of sem observation flat board and wedge surface, sub-surface and inside, the party by low power
When method is tested bigbore element, human eye is observed easily cause asthenopia for a long time, and measurement confidence level is relatively low, the party
Method takes time and effort, inefficiency.
Method 2, micro-imaging method carries optical elements of large caliber using motion scan mechanism, using LED illumination, uses
Dark-field imaging, the defect of optical element is tested by CCD microscopic systems, and the method is limited by microscopic system visual field and working distance,
The defect of optical element surface or sub-surface can only be tested, it is limited to the defect measurement inside optical element, while using micro-
System, visual field is smaller, time-consuming more long using scan mode during measurement.
The content of the invention
The drawbacks of being taken time and effort to solve conventional test methodologies, be limited to the defect measurement inside optical element, this hair
It is bright to propose a kind of transmission optical component defect method of testing and device, can be to heavy caliber transmissive optical element surface and inside
Defect is used for quickly detecting.
Technical solution of the invention is as follows：
The test device of transmission optical component defect, it is characterized in that：Including laser, collimating mirror, tight shot,
CCD, travel mechanism and acquisition control computer；The collimating mirror is arranged on the output light path of laser；The tight shot
It is rigidly connected composition imaging system with CCD, the monitoring face of imaging system passes through tight shot and CCD photosurfaces into conjugate relation；
The imaging system is fixed in travel mechanism；The travel mechanism is connected with acquisition control computer.
To improve detection efficiency, automatic test is realized, above-mentioned test device also includes objective table and sweep mechanism；It is described
Objective table is used to place and fix optical element to be measured；The sweep mechanism is used to move integrally objective table and treats photometry unit
Part；The sweep mechanism is connected with the acquisition control computer.
The method that transmission optical component defect is detected using above-mentioned test device, it is characterized in that：Including following step
Suddenly：
1) laser 1 is opened, laser injection collimating mirror is collimated；
2) laser beam after collimation is made to irradiate the region a certain to be tested of the measured optical unit；
3) image of imaging system is observed, if there is diffraction pattern, shows the current irradiated area of the measured optical unit
There is defect at place, into step 4)；
4) position of the travel mechanism of adjustment vertically makes diffraction ring from large to small up to diffraction ring disappears, now imaging system
Monitoring face overlapped with the defect position of the measured optical unit；
5) mobile the measured optical unit, makes laser beam pass through next test zone of the measured optical unit bore, uses
Step 3)~4) identical method the region is tested；
6) repeat step 3) to step 5), until completing the test in all regions of whole optical element；
7) position data that there is defect in all test zones is spliced, the space for obtaining whole optical element lacks
The information of falling into.
Above-mentioned steps 5) in optical element to be measured is placed on objective table, using sweep mechanism move integrally objective table and
Optical element to be measured.
The advantage of the invention is that：
1st, the present invention controls laser, collimating mirror, objective table, sweep mechanism, tight shot, CCD, travel mechanism and collection
Computer combination processed, using diffraction characteristic and the object-image conjugate imaging relations of laser, is realized to large-aperture optical unit by scanning
The flaw inspection of part, is able to detect that surface, sub-surface and the internal flaw information of whole optical element, to optical element inside
Defect measurement it is unrestricted, and detection efficiency is high, simultaneously as when defect is irradiated through laser, even if yardstick is in sub-micrometer scale,
Also clearly diffraction fringe can be produced, therefore the measuring precision is high.
2nd, high degree of automation of the present invention, is adapted to the lossless non-touch precision measurement of optical element defect.
Brief description of the drawings
Fig. 1 is structural scheme of mechanism of the invention；
In figure, 1- lasers, 2- collimating mirrors, 3- objective tables, 4- sweep mechanisms, 5- tight shots, 6-CCD, 7- moving machine
Structure, 8- acquisition controls computer, 9- optical elements to be measured.
Specific embodiment
The test device of transmission optical component defect provided by the present invention include laser 1, collimating mirror 2, objective table 3,
Sweep mechanism 4, tight shot 5, CCD 6, travel mechanism 7 and acquisition control computer 8.
Collimating mirror 2 is arranged on the output light path of laser 1, will export directional light after the output laser alignment of laser
Beam.
Objective table 3 is used to place optical element to be measured, and ensures that optical element to be measured is located at the output light path of collimating mirror 2
On, collimated light beam is passed through some test zone of optical element to be measured.
Sweep mechanism 4 is arranged on the lower end of objective table 3, for moving integrally objective table 3 and being placed on treating on objective table 3
Photometry element, makes laser beam pass through next test zone of optical element bore to be measured.
Tight shot 5 and CCD 6 are rigidly connected, and constitute imaging system.Whole imaging system is fixed in travel mechanism 7,
The monitoring face of imaging system passes through tight shot 5 and the photosurfaces of CCD 6 into conjugate relation.Imaging system treats photometry for test
The current test zone of element whether there is defect.
Sweep mechanism 4, imaging system and travel mechanism 7 are connected with acquisition control computer 8；
Acquisition control computer 8 has three functions：
1st, the moving step length of control sweep mechanism and travel mechanism；
2nd, gathered data：Positional information, the measured optical unit irradiated area information in the monitoring face including imaging system；
3rd, processing data：The regional position that the measured optical unit has defect is spliced, whole optics is obtained
The spatial defects information of element.
Based on above-mentioned test device, invention also provides a kind of method of testing of transmission optical component defect, including
Following steps：
1) laser 1 is opened, after laser is injected into collimating mirror 2, collimated light beam is collimated into, the measured optical unit is fixed on
On objective table 3, collimated light beam is set to irradiate the region a certain to be measured of the measured optical unit；The directional light of collimation is through the measured optical unit
After transmission, into the imaging system being made up of tight shot 5 and CCD 6.
If 2) occur diffraction pattern in imaging system, show there is defect at the measured optical unit irradiated area, enter
Step 3).
3) position for adjusting travel mechanism 7 (axially in parallel with collimating mirror) vertically, when the diffraction pattern in imaging system
When sample is tapered into, show that the monitoring face of imaging system moves closer to the defect position of the measured optical unit；Continue to adjust movement
The position of mechanism 7, when diffraction ring disappears, meets Image relaying principle, illustrates the now monitoring face of imaging system and by photometry
The defect position of element overlaps.
4) objective table 3 and the measured optical unit are moved integrally, laser beam is passed through the next of the measured optical unit bore
Test zone, using step 2)~3) identical method the region is tested.
5) repeat step 2) to step 4), until completing the test of whole optical element.
6) position data of the presence defect of all test zones is spliced, the space for obtaining whole optical element lacks
The information of falling into.
Here step 6) in specific joining method be those skilled in the art's data processing common technology means, this hair
It is bright to will not be repeated here.
Claims (4)
1. the test device of transmission optical component defect, it is characterised in that：Including laser, collimating mirror, tight shot, CCD, shifting
Motivation structure and acquisition control computer；The collimating mirror is arranged on the output light path of laser；The tight shot and CCD are firm
Property connection composition imaging system, the monitoring face of imaging system passes through tight shot and CCD photosurfaces into conjugate relation；The imaging
System is fixed in travel mechanism；The travel mechanism is connected with acquisition control computer.
2. the test device of transmission optical component defect according to claim 1, it is characterised in that：Also include objective table and
Sweep mechanism；The objective table is used to place and fix optical element to be measured；The sweep mechanism is used to move integrally objective table
With optical element to be measured；The sweep mechanism is connected with the acquisition control computer.
3. the method that transmission optical component defect is detected using the test device described in claim 1 or 2, it is characterised in that：Bag
Include following steps：
1) laser 1 is opened, laser injection collimating mirror is collimated；
2) laser beam after collimation is made to irradiate the region a certain to be tested of the measured optical unit；
3) image of imaging system is observed, if there is diffraction pattern, shows have at the current irradiated area of the measured optical unit
Defect, into step 4)；
4) position of the travel mechanism of adjustment vertically makes diffraction ring taper into up to diffraction ring disappears, now the prison of imaging system
Overlapped with the defect position of the measured optical unit depending on face；
5) mobile the measured optical unit, makes laser beam pass through next test zone of the measured optical unit bore, using step
3)~4) identical method the region is tested；
6) repeat step 3) to step 5), until completing the test in all regions of whole optical element；
7) position data that there is defect in all test zones is spliced, is obtained the spatial defects letter of whole optical element
Breath.
4. it is according to claim 3 detection transmission optical component defect method, it is characterised in that：Comprise the following steps：
The step 5) in optical element to be measured is placed on objective table, moved integrally using sweep mechanism and objective table and treat photometry
Element.
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| CN201611147850.XA CN106841236B (en) | 2016-12-13 | 2016-12-13 | Transmission optical element defect testing device and method |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107800026A (en) * | 2017-10-27 | 2018-03-13 | 大族激光科技产业集团股份有限公司 | A kind of adjustment method of the outer beam path alignment of laser |
| CN109142391A (en) * | 2018-09-13 | 2019-01-04 | 深圳阜时科技有限公司 | A kind of sensing device and equipment |
| CN109297989A (en) * | 2018-10-11 | 2019-02-01 | 广州博冠光电科技股份有限公司 | A kind of spherical optics element surface flaw inspection device and method |
| CN112903236A (en) * | 2021-01-29 | 2021-06-04 | 上海交通大学 | Focal plane scanning-based aerodynamic thermal parameter optical test device and method |
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| WO2016004550A1 (en) * | 2014-07-04 | 2016-01-14 | 中国科学院长春光学精密机械与物理研究所 | Large-numerical-aperture phase-shifting double-pinhole diffraction interferometer and testing method thereof |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107800026A (en) * | 2017-10-27 | 2018-03-13 | 大族激光科技产业集团股份有限公司 | A kind of adjustment method of the outer beam path alignment of laser |
| CN109142391A (en) * | 2018-09-13 | 2019-01-04 | 深圳阜时科技有限公司 | A kind of sensing device and equipment |
| CN109297989A (en) * | 2018-10-11 | 2019-02-01 | 广州博冠光电科技股份有限公司 | A kind of spherical optics element surface flaw inspection device and method |
| CN112903236A (en) * | 2021-01-29 | 2021-06-04 | 上海交通大学 | Focal plane scanning-based aerodynamic thermal parameter optical test device and method |
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| CN106841236B (en) | 2023-04-11 |
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