CN215727694U - Specular reflectivity measuring device - Google Patents

Specular reflectivity measuring device Download PDF

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Publication number
CN215727694U
CN215727694U CN202121881231.XU CN202121881231U CN215727694U CN 215727694 U CN215727694 U CN 215727694U CN 202121881231 U CN202121881231 U CN 202121881231U CN 215727694 U CN215727694 U CN 215727694U
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light source
mirror
calibration
source vision
collimating mirror
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王灵光
陈光磊
吴常林
邹勇
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Intelligent Automation Equipment Zhuhai Co Ltd
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Intelligent Automation Equipment Zhuhai Co Ltd
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Abstract

The utility model aims to provide a specular reflectivity measuring device which is low in cost, good in calibration effect and capable of measuring reflectivity of a product under different incidence angles. The laser beam detection device comprises a linear moving mechanism, a fiber laser, a collimating mirror, a detection assembly and a calibration assembly, wherein the output end of the fiber laser is connected with the collimating mirror, the collimating mirror is arranged on a first angle adjusting mechanism, the detection assembly is matched with the collimating mirror to detect unreflected and reflected light beams, a bearing platform is arranged on a movable part of the linear moving mechanism, the calibration assembly comprises a reference mirror, a calibration tool, a first light source vision assembly and a second light source vision assembly, the reference mirror and the calibration tool are matched with a connecting groove of the bearing platform, the first light source vision assembly and the second light source vision assembly are respectively matched with the reference mirror to perform calibration and positioning, and the calibration tool is provided with an inclined surface and a vertical surface. The utility model is applied to the technical field of mirror surface product testing.

Description

Specular reflectivity measuring device
Technical Field
The utility model is applied to the technical field of mirror surface product testing, and particularly relates to a mirror surface reflectivity measuring device.
Background
Reflectivity is one of the common parameters in the optical field, and is defined as the ratio of the energy reflected by an object to the total received energy, which represents the strength of the light reflection capability of a material or a substance. The reflectivity is mainly determined by the properties of the object itself, such as material, surface roughness, etc. Changes in parameters such as angle of incidence, wavelength of incident light, polarization state of incident light, etc., also greatly affect reflectivity. The value of the reflectivity is 0-1. Among the existing methods for measuring reflectivity, a relatively accurate and common method is to use a spectrophotometer measurement method. A beam of light emitted by the monochromator is irradiated on the sample and the reference standard after multiple reflections, the reflectivity Rs of the reference standard is known, the energy of the light source irradiated on the PMT through the sample is P1, the energy irradiated on the PMT through the sample is P2, and the reflectivity of the sample is Rs P2/P1.
The testing method is more accurate and generally applied, but in order to be compatible with various wavelengths, a monochromator is used as a standard light source, and the price is higher. In the method, the reference standard is used as a reference, and in an actual scene, the reference standard sample is easily interfered by an external environment, such as scratches, dirt, corrosion and the like, so that the reflectivity is unstable, and the measurement precision is influenced. In the above-mentioned test method, the sample to be tested is not excessively inked with the angle of the incident light, and in theory, the reflectivity of the same sample is different for the incidence of the light in different directions.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem of overcoming the defects of the prior art and provides the specular reflectivity measuring device which is low in cost, good in calibration effect and capable of measuring the reflectivity of a product under different incident angles.
The technical scheme adopted by the utility model is as follows: the utility model comprises a linear moving mechanism, a fiber laser, a collimating mirror, a detection component and a calibration component, wherein the output end of the fiber laser is connected with the collimating mirror, the collimating mirror is arranged on a first angle adjusting mechanism, the detection component is matched with the collimating mirror to detect unreflected and reflected light beams, a bearing platform is arranged on a movable part of the linear moving mechanism, the calibration component comprises a reference mirror, a calibration tool, a first light source visual component and a second light source visual component, the reference mirror and the calibration tool are matched with a connecting groove of the bearing platform, the first light source visual component and the second light source visual component are respectively matched with the top surface and the side surface which are orthogonal to the reference mirror to calibrate and position, the calibration tool is provided with an inclined surface and a vertical surface, and the reference mirror is matched with the first light source visual component to calibrate through the inclined surface, the second light source vision assembly is matched and calibrated with the vertical surface.
According to the scheme, the monochromatic collimation light source consisting of the fiber laser and the collimating mirror is adopted, so that the measurement cost is reduced. The collimating lens is arranged at the movable end of the first angle adjusting mechanism to drive the collimating lens to adjust the angle relative to a product to be measured, and the first angle adjusting mechanism is a mechanical arm or a movable mechanism which takes a test point as a circle center to do circular motion. The detection assembly is used for acquiring the emergent laser power of the collimating mirror and the power of the laser after reflection. Through setting up the calibration subassembly carries out load-bearing platform's calibration, and then calibrates the measured object and the directionality of incident ray guarantees all to obtain accurate reflectivity under the different angles. The calibration of the first light source visual component and the second light source visual component is carried out by simulating an object to be measured through the reference mirror, the first light source visual component is adjusted to be right above the object to be measured, meanwhile, the second light source visual component is adjusted to be right side of the object to be measured, two orthogonal reference surfaces are obtained, the vertical surface is further positioned through the second light source visual component, the calibration work positioning calibration effect is achieved, light beams emitted by the collimating mirror can accurately pass through the inclined surface and then are reflected to the first light source visual component along the vertical direction, the included angle between the light beams and the center of the first light source visual component is twice the included angle between the inclined surface and the horizontal plane, and the calibration tool with the inclined surface different from the included angle between the vertical surface is used as an angle calibration structure, so that the angle of incident light can be accurately calibrated, thereby improving the detection precision.
One preferred scheme is, the determine module includes first photoelectric detector and second photoelectric detector, first photoelectric detector sets up rectilinear movement mechanism below and with the collimating mirror is located same straight line, the second photoelectric detector sets up rectilinear movement mechanism top and receive the light beam through the determinand reflection, first photoelectric detector with second photoelectric detector sets up respectively at second angle adjustment mechanism and third angle adjustment mechanism.
According to the scheme, the laser energy directly emitted by the collimating mirror and the laser energy reflected by the object to be detected are respectively detected through the first photoelectric detector and the second photoelectric detector, and then the accurate reflectivity is obtained. The second angle adjusting mechanism and the third angle adjusting mechanism are used for adjusting the positions of the first photoelectric detector and the second photoelectric detector, and the fact that laser can accurately enter the image center of the photoelectric detector is guaranteed. The second angle adjusting mechanism and the third angle adjusting mechanism are manipulators or movable mechanisms which do circular motion by taking the test points as circle centers
Preferably, the first light source vision component and the second light source vision component both comprise a collimator and an image sensor, the first light source vision component is arranged right above the detection position of the linear movement mechanism, and the second light source vision component is arranged along the horizontal direction and is at the same horizontal height with the intersection point of the collimating mirror and the light path of the first light source vision component.
According to the scheme, the beam is emitted through the collimator, the beam reflected by the reference mirror is obtained through the image sensor, and the calibration states of the first light source visual component and the second light source visual component are obtained through calibrating the imaging position of the beam on the image sensor.
According to a preferable scheme, the reference mirror is a cube, and six surfaces of the reference mirror are mirror surfaces.
According to the scheme, the square reference mirror is adopted, so that each pair of adjacent surfaces of the reference mirror are in a mutually orthogonal state, and the calibration accuracy of the first light source vision component and the second light source vision component is further guaranteed. The reference mirror does not need to distinguish the front side from the back side by adopting the design that the six sides are mirror surfaces.
According to a preferred scheme, the calibration tool is a triangular prism, and the inclined surface and the vertical surface are mirror surfaces.
According to the scheme, the three surfaces of the calibration tool are fixed with the bearing platform in position relation by adopting the triangular prism-shaped calibration tool, and accurate included angle information can be obtained by the three rectangular surfaces of the calibration tool.
In a preferred embodiment, the included angle between the inclined plane and the horizontal plane is half of the included angle between the collimating mirror and the normal of the surface to be measured of the product to be measured.
According to the technical scheme, the included angle between the inclined plane and the horizontal plane is different, the calibration tool is used for adjusting the position of the collimating mirror by matching the first light source vision assembly with the inclined plane and the collimating mirror, and the calibration of different incident angle requirements of light beams is realized.
Preferably, the movable part of the linear moving mechanism is connected with the bearing platform through a rotating mechanism.
According to the scheme, the rotating mechanism is arranged to drive the bearing platform to rotate along the normal line of the movable part of the linear moving mechanism, so that the material posture on the bearing platform can be adjusted.
In a preferred embodiment, the fiber laser is connected to the collimating mirror through an exit fiber, and the exit fiber is a single-mode polarization maintaining fiber.
Preferably, the collimating lens is an aspheric collimating lens.
Drawings
FIG. 1 is a schematic diagram of a first calibration state of the present invention;
FIG. 2 is a structural diagram illustrating a second calibration state of the present invention;
FIG. 3 is a schematic diagram of a third calibration state of the present invention;
FIG. 4 is a schematic diagram of a fourth calibration state according to the present invention.
Detailed Description
As shown in fig. 1 to 4, in this embodiment, the present invention includes a linear moving mechanism 1, a fiber laser 2, a collimating mirror 3, a detecting component and a calibrating component, an output end of the fiber laser 2 is connected to the collimating mirror 3, the collimating mirror 3 is disposed on a first angle adjusting mechanism, the detecting component cooperates with the collimating mirror 3 to detect unreflected and reflected light beams, a bearing platform 4 is disposed on a movable part of the linear moving mechanism 1, the calibrating component includes a reference mirror 5, a calibrating tool 6, a first light source visual component 7 and a second light source visual component 8, the reference mirror 5 and the calibrating tool 6 are adapted to a connecting slot of the bearing platform 4, the first light source visual component 7 and the second light source visual component 8 cooperate with a top surface and a side surface of the reference mirror 5, which are orthogonal to each other, to perform self-calibration and positioning, the calibration tool 6 is provided with an inclined surface 6a and a vertical surface 6b, the reference mirror 5 is calibrated in a matched mode through the inclined surface 6a and the first light source vision component 7, and the second light source vision component 8 is calibrated in a matched mode through the vertical surface 6 b.
In this embodiment, the detecting component includes a first photoelectric detector 9 and a second photoelectric detector 10, the first photoelectric detector 9 is disposed below the linear moving mechanism 1 and on the same straight line with the collimating mirror 3, the second photoelectric detector 10 is disposed above the linear moving mechanism 1 and receives the light beam reflected by the object to be measured, and the first photoelectric detector 9 and the second photoelectric detector 10 are respectively disposed on the second angle adjusting mechanism and the third angle adjusting mechanism.
In this embodiment, the first light source vision component 7 and the second light source vision component 8 both include a collimator and an image sensor, the first light source vision component 7 is disposed right above the detection position of the linear movement mechanism 1, and the second light source vision component 8 is disposed along the horizontal direction and at the same horizontal height as the intersection point of the collimating mirror 3 and the light path of the first light source vision component 7.
In the present embodiment, the reference mirror 5 is a cube and all six surfaces are mirror surfaces.
In this embodiment, the calibration fixture 6 is a triangular prism, and the inclined surface 6a and the vertical surface 6b are both mirror surfaces.
In this embodiment, the included angle between the inclined surface 6a and the horizontal plane is half of the included angle between the collimating mirror 3 and the normal line of the surface to be measured of the product to be measured.
In this embodiment, the movable part of the linear moving mechanism 1 is connected with the bearing platform 4 through a rotating mechanism 11.
In this embodiment, the fiber laser 2 is connected to the collimating mirror 3 through an exit fiber 12, and the exit fiber 12 is a single-mode polarization maintaining fiber. The collimating lens 3 is an aspheric collimating lens.
The working principle of the utility model is as follows:
firstly, as shown in fig. 1, the linear moving mechanism 1 drives the bearing platform 4 to move to a test position, the reference mirror 5 is limited by the connecting groove, light emitted by the collimator of the first light source vision component 7 reaches the top surface of the reference mirror 5, the image sensor of the first light source vision component 7 acquires reflected light, whether the setting direction is perpendicular to the top surface of the reference mirror 5 is determined by imaging, similarly, whether the second light source vision component 8 is perpendicular to the front side surface of the reference mirror 5 is determined by imaging, and an optical propagation plane perpendicular to both the top surface and the front side surface of the reference mirror 5 is established.
After the correction is completed, as shown in fig. 2, the reference mirror 5 is taken down, the calibration tool 6 matched with the target incident angle is placed on the bearing platform 4, the posture of the calibration tool 6 is adjusted through the rotating mechanism 11, the second light source vision component 8 is perpendicular to the vertical surface 6b according to the imaging of the second light source vision component 8, and then the included angle between the light path of the first light source vision component 7 and the normal line of the inclined surface 6a is the same as the included angle between the inclined surface 6a and the bottom surface of the calibration tool 6. And adjusting the incident angle of the collimating mirror 3 to enable laser to be reflected by the inclined surface 6a and then to be emitted into the center of the first light source vision component 7, wherein the included angle of the light path between the collimating mirror 2 and the first light source vision component 7 is twice of the included angle between the inclined surface 6a and the bottom surface of the calibration tool 6. Thereby completing the adjustment of the collimator 3, i.e. the angle of incidence, to the target angle.
As shown in fig. 3, the linear moving mechanism 1 moves the carrying platform 4 away to expose the first photodetector 9, and by adjusting the angle of the first photodetector 9, the laser light emitted from the collimating mirror 3 enters the center of the first photodetector 9, and the first photodetector 9 obtains the laser power P1 that is not reflected.
As shown in fig. 4, after the reference mirror 5 is placed on the carrying platform 4 again, the linear moving mechanism 1 drives the carrying platform 4 to return to the testing position, and by adjusting the angle of the second photodetector 10, the reflected laser enters the center of the second photodetector 10, and the adjustment of all components is completed.
During testing, the object to be tested is placed in the bearing platform 4, the surface to be tested of the object to be tested is made to coincide with the plane where the top surface of the reference mirror 5 is located during calibration, and at this time, the second photodetector 10 obtains the reflected laser power P2, so that the reflectivity R = P2/P1 of the object to be tested at the incident angle is obtained.

Claims (9)

1. A specular reflectance measuring apparatus, comprising: it includes rectilinear movement mechanism (1), fiber laser (2), collimating mirror (3), determine module and calibration subassembly, the output of fiber laser (2) with collimating mirror (3) are connected, collimating mirror (3) set up on first angle guiding mechanism, determine module with collimating mirror (3) cooperation is carried out and is not reflected and the detection of reflection back light beam, be provided with load-bearing platform (4) on the movable part of rectilinear movement mechanism (1), the calibration subassembly includes benchmark mirror (5), calibration frock (6), first light source vision subassembly (7) and second light source vision subassembly (8), benchmark mirror (5) with calibration frock (6) all with the connecting groove looks adaptation of load-bearing platform (4), first light source vision subassembly (7) and second light source vision subassembly (8) respectively with the top surface and the side cooperation that are the quadrature of benchmark mirror (5) carry out the calibration of self And positioning, wherein an inclined plane (6 a) and a vertical plane (6 b) are arranged on the calibration tool (6), the reference mirror (5) is calibrated in a matching way through the inclined plane (6 a) and the first light source vision component (7), and the second light source vision component (8) is calibrated in a matching way through the vertical plane (6 b).
2. A specular reflectance measuring apparatus according to claim 1, wherein: the detection assembly comprises a first photoelectric detector (9) and a second photoelectric detector (10), the first photoelectric detector (9) is arranged below the linear moving mechanism (1) and is located on the same straight line with the collimating mirror (3), the second photoelectric detector (10) is arranged above the linear moving mechanism (1) and receives a light beam reflected by an object to be detected, and the first photoelectric detector (9) and the second photoelectric detector (10) are respectively arranged at a second angle adjusting mechanism and a third angle adjusting mechanism.
3. A specular reflectance measuring apparatus according to claim 1, wherein: the first light source vision component (7) and the second light source vision component (8) both comprise a collimator and an image sensor, the first light source vision component (7) is arranged right above the detection position of the linear moving mechanism (1), and the second light source vision component (8) is arranged along the horizontal direction and is at the same horizontal height with the intersection point of the collimating mirror (3) and the light path of the first light source vision component (7).
4. A specular reflectance measuring apparatus according to claim 1, wherein: the reference mirror (5) is a cube, and six surfaces of the reference mirror are mirror surfaces.
5. A specular reflectance measuring apparatus according to claim 1, wherein: the calibration tool (6) is a triangular prism, and the inclined surface (6 a) and the vertical surface (6 b) are mirror surfaces.
6. A specular reflectance measuring apparatus according to claim 1, wherein: the included angle between the inclined plane (6 a) and the horizontal plane is half of the included angle between the collimating mirror (3) and the normal line of the surface to be measured of the product to be measured.
7. A specular reflectance measuring apparatus according to claim 1, wherein: the movable part of the linear moving mechanism (1) is connected with the bearing platform (4) through a rotating mechanism (11).
8. A specular reflectance measuring apparatus according to claim 1, wherein: the fiber laser (2) is connected with the collimating mirror (3) through an emergent fiber (12), and the emergent fiber (12) is a single-mode polarization-preserving fiber.
9. A specular reflectance measuring apparatus according to claim 1, wherein: the collimating lens (3) is an aspheric collimating lens.
CN202121881231.XU 2021-08-12 2021-08-12 Specular reflectivity measuring device Active CN215727694U (en)

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Application Number Priority Date Filing Date Title
CN202121881231.XU CN215727694U (en) 2021-08-12 2021-08-12 Specular reflectivity measuring device

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Application Number Priority Date Filing Date Title
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114978301A (en) * 2022-03-28 2022-08-30 昂纳信息技术(深圳)有限公司 Optical test system, calibration method thereof and calibration piece

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114978301A (en) * 2022-03-28 2022-08-30 昂纳信息技术(深圳)有限公司 Optical test system, calibration method thereof and calibration piece
CN114978301B (en) * 2022-03-28 2023-09-12 昂纳科技(深圳)集团股份有限公司 Optical test system, calibration method thereof and calibration piece

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