CN106550528A - A kind of multimode fibre focal plane adjusting means for plasma detection - Google Patents
A kind of multimode fibre focal plane adjusting means for plasma detection Download PDFInfo
- Publication number
- CN106550528A CN106550528A CN201610973016.XA CN201610973016A CN106550528A CN 106550528 A CN106550528 A CN 106550528A CN 201610973016 A CN201610973016 A CN 201610973016A CN 106550528 A CN106550528 A CN 106550528A
- Authority
- CN
- China
- Prior art keywords
- multimode fibre
- fixed
- moving mechanism
- adjusting means
- parallel moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
- H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
- H05H1/0037—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by spectrometry
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Electromagnetism (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
The invention provides a kind of multimode fibre focal plane adjusting means for plasma detection, which is used to the plane of incidence of multimode fibre and the outgoing focal plane of Cheney Tener light channel structure are adjusted to overlapping, which includes multimode fibre adjustment seat, and the first adjusting apparatus for being set up in parallel and the second adjusting apparatus, wherein, Cheney Tener light channel structure is arranged in the first adjusting apparatus, the multimode fibre adjustment seat is arranged in the second adjusting apparatus, first adjusting apparatus and second adjusting apparatus each have multiple degree of freedom, the multimode fibre is contained in the multimode fibre adjustment seat, so that outlet of the plane of incidence of multimode fibre towards Cheney Tener light channel structure.The adjusting means of the present invention can be realized the plane of incidence of multimode fibre and the outgoing focal plane of Cheney Tener light channel structure being adjusted to overlapping, and can realize quickly flexibly adjusting, so as to improve sensitivity and the degree of accuracy of plasma spectrometry information gathering.
Description
Technical field
The present invention relates to field of analytic instrument, and in particular to adjust a kind of multimode fibre focal plane for plasma detection
Regulating device.
Background technology
Spectrogrph is general spectrometric instrument, by diffraction grating by the photolysis of complicated component for different wave length
Light, Application Optics principle are observed, analyze and are processed to the structure and composition of material, is widely used in every field.Such as exist
In IC equipment research and development, by the other elements such as spectrogrph and photomultiplier tube are combined and can be produced with plasma glow discharge
Spectral information be acquired analysis, real-time detection reacting phenomenon obtains plasma physics parameter, in various plasma health check-ups
There is in measurement equipment non-intrusion type, response quickly.Simultaneously for complicated thing in the plasma of non-constant state
Physicochemical process, it usually needs many faint spectral line of the collection in addition to main intense line, detection difficulty are very big.
The detection meanss for mainly adopting to optic spectrum line at present mainly have two kinds：One kind is, by spectrogrph light splitting, to pass through
Exit slit adjusts the optical signal for coordinating photomultiplier tube to gather single wavelength；Another kind is by the CCD with two-dimensional array
Camera, can gather the spectral signal in different wavelength range.The first detection method has sensitivity height, response quickly etc. excellent
Point, particularly photomultiplier tube are used as current sensitivity highest optical detection original paper, it is possible to achieve single photon nanosecond when
Between resolved measurement.And common CCD camera sensitivity and time resolution are poor, though the enhancement mode CCD camera for occurring at present
Nanosecond accuracy of detection can also be so reached, but is limited by the factor such as photocathode material and fluorescent screen luminous efficiency, be strengthened
The detection efficiency of type CCD camera is less than photomultiplier tube, and is not used to the measurement that transient state does not repeat optical signal.
For this purpose, have started to consider to be used as spectra collection element by replacing ccd array with array fibre in this area, then
Photomultiplier tube array is accessed in the outfan of array fibre carries out photoelectric signal transformation, and photomultiplier tube is to be currently known
Most sensitive optical detection device, thus, fiber array that this system is adopted needs and light channel structure middle outlet focal plane
Position height overlap can just collect accurate spectral signal.However, not putting down with Jiao for this multimode fibre at present
The adjusting means of position relationship between face, is all that spectrogrph is affixed directly on optical table in prior art, although ensured
The stability of spectrogrph, but cannot realize the outlet focal plane of spectrogrph is overlapped with fiber array face, cause precision compared with
It is low.
The content of the invention
The main object of the present invention is to provide a kind of multimode fibre focal plane adjusting means for plasma detection, its
Multimode fibre plane of incidence can be conveniently realized the quick soft readjustment focusing of focal plane is exported with spectrogrph.
For achieving the above object, the technical scheme of employing is as follows：
A kind of multimode fibre focal plane adjusting means for plasma detection, which is used to put down the incidence of multimode fibre
Face is adjusted to overlapping with the outgoing focal plane of Cheney-Tener light channel structure, and which includes multimode fibre adjustment seat and is set up in parallel
The first adjusting apparatus and the second adjusting apparatus, wherein, the Cheney-Tener light channel structure be arranged on the first adjusting apparatus on,
The multimode fibre adjustment seat is arranged in the second adjusting apparatus, and first adjusting apparatus and second adjusting apparatus are each
With multiple degree of freedom, the multimode fibre is contained in the multimode fibre adjustment seat so that the plane of incidence court of multimode fibre
To the outlet of the Cheney-Tener light channel structure.
Preferably, first adjusting apparatus include：The the first adjustment component that can be rotated around first direction；Installed in institute
State the second adjustment component on the first adjustment component, can rotating around second direction；Wherein described first direction is different from institute
Second direction is stated, wherein, the Cheney-Tener light channel structure is on the described second adjustment component.
Preferably, the first adjustment component and/or the second adjustment component include：
Fixed base plate, is provided with the first arc-shaped guide rail on the fixed base plate；
Traverser, the traverser are provided with the second arc-shaped guide rail being engaged with first arc-shaped guide rail；
The jacking block being fixedly connected on below the traverser, the jacking block have contact surface；
The push rod device being fixedly mounted on the fixed base plate, preferred electric pushrod device, the push rod device have
Telescopic push rod, described in the push rod pushing tow during contact surface of jacking block, drives the traverser relative to the fixation
Base plate is rotated.
Preferably, the contact surface includes multistage planar section in smoothing junction and/or curved sections；Preferably, it is described to connect
Tactile surface includes side plate bending and the planar section positioned at the upper and lower both sides of the side plate bending.
Preferably, the multimode fibre adjustment seat includes：
It is fixedly attached to the fixed seat of second adjusting apparatus；
Optical fiber installing pipe, its first end are connected to the fixed seat, and the second end is towards the Cheney-Tener light channel structure
Outlet, the multimode fibre gap are ordinatedly arranged in the optical fiber installing pipe, and the plane of incidence of the multimode fibre is located at
Second end of the optical fiber installing pipe.
Preferably, the multimode fibre adjustment seat also includes flange and flexible pipe, wherein, the flange is fixed and is connected
The outlet side of the Cheney-Tener light channel structure is connected to, the interior of the flange is stretched at the second end of the optical fiber installing pipe
Kong Zhong, the external diameter at the second end of the optical fiber installing pipe are less than the diameter of the endoporus of the flange, and the flexible pipe is by impermeable
Luminescent material is made, and the flexible pipe is set in the periphery of the optical fiber installing pipe, and the two ends of the flexible pipe are connected respectively to described connecing
Mouth flange and the fixed seat.
Preferably, second adjusting apparatus include：
3rd adjustment component, which can be rotated around third direction, be provided with the multimode fibre adjustment seat thereon；
First parallel moving mechanism, its can translation in the first direction, be provided with thereon it is described 3rd adjustment component；
Second parallel moving mechanism, its can translation in a second direction, first parallel moving mechanism is installed thereon；
3rd parallel moving mechanism, which can be provided with second parallel moving mechanism thereon along third direction translation.
Preferably, first parallel moving mechanism and/or second parallel moving mechanism include：
Support base, which is provided with line slideway；
Translation platform, which can slide along the line slideway；
Screw pair, which connects the support base and the translation platform.
Preferably, the 3rd parallel moving mechanism includes：Base plate, fixed flat planar, fixed support bar, the 3rd screw pair,
Nut support plate, the 3rd translation platform and sliding supporting bar, wherein, the fixed support bar is installed on the base plate, described
Fixed flat planar is installed on the top of the fixed support bar, and the leading screw in the 3rd screw pair is rotatably supported in institute
State between base plate and the fixed flat planar, the nut in the 3rd screw pair is fixed on the nut support plate, institute
State sliding supporting bar and pass through the fixed flat planar with being slidably matched, the nut support is fixed in the lower end of the sliding supporting bar
On plate, the 3rd translation platform is fixed on the upper end of the sliding supporting bar.
Preferably, face of the area of the upper surface of first parallel moving mechanism more than the bottom surface of the described 3rd adjustment component
Product, the 3rd adjustment component are fixedly installed to first parallel moving mechanism via right angle block；
And/or, the area of the bottom surface of any one in the first parallel moving mechanism, the second parallel moving mechanism and the 3rd parallel moving mechanism is little
In the area of installation surface below, so as to which is fixedly installed to the installation surface of lower section via right angle block.
The multimode fibre focal plane adjusting means for plasma detection of the present invention can be realized multimode fibre
Plane of incidence and the outgoing focal plane of Cheney-Tener light channel structure are adjusted to overlapping, and can realize quickly flexibly adjusting,
So as to improve sensitivity and the degree of accuracy of plasma spectrometry information gathering.
Description of the drawings
The Figure of description for constituting the part of the present invention is used for providing a further understanding of the present invention, and the present invention's shows
Meaning property embodiment and its illustrated for explaining the present invention, does not constitute inappropriate limitation of the present invention.In the accompanying drawings：
Fig. 1 is the contour structures schematic diagram of the multimode fibre focal plane adjusting means of the preferred embodiment of the present invention；
Fig. 2 a and Fig. 2 b is the installation diagram schematic diagram and decomposing schematic representation of rotatable platform respectively；
Fig. 3 a and 3b are the main section view and left view structural representation of the traverser part of rotatable platform respectively；
Fig. 4 is Cheney-Tener light channel structure schematic diagram；
Fig. 5 a and 5b are the decomposing schematic representation and assembling schematic diagram of multimode fibre adjustment seat respectively；
Fig. 6 a and 6b are that the end of multimode fibre regards and side structure schematic view respectively；
Fig. 7 is the assembling structure schematic diagram of the first translation platform；
Fig. 8 is the left view decomposing schematic representation of the first translation platform；
Fig. 9 is the assembling structure schematic diagram of the 3rd translation platform；
Figure 10 is the attachment structure schematic diagram between the 3rd rotatable platform and the first translation platform.
Wherein, above-mentioned accompanying drawing includes the following drawings labelling：
10th, optical table；20th, the first rotatable platform；30th, the second rotatable platform；40th, Cheney-Tener light channel structure；50、
Multimode fibre adjusts seat；60th, the 3rd rotatable platform；70th, the first translation platform；80th, the second translation platform；90th, the 3rd translation is put down
Platform；100th, firm banking；110a, 110b, right angle block；201st, traverser；202a, 202b, arc-shaped guide rail；203rd, jacking block；
203a, 203c, planar section；203b, side plate bending；203d, connecting portion；204th, fixed base plate；205th, push rod fixed seat；206th, push rod
Device；206a, push rod；401st, entrance slit；402nd, collimating mirror；403rd, diffraction grating；404th, focusing mirror；405th, it is burnt
Plane；501st, fixed seat；501a, fixed seat endoporus；502nd, flexible pipe；503rd, flange；503a, flange groove；503b、
Flange endoporus；504th, multimode fibre；504a, plane of incidence；504b, ferrule；505th, optical fiber installing pipe；505a, installation
Pipe groove；505b, optical fiber installing hole；505c, installation pipe orifice；505d, optical fiber installing pipe first end；604th, the 3rd rotatable platform
Fixed base plate；701st, translation platform；702nd, nut；703rd, leading screw；704th, motor；705th, guide support；706th, support base；707,
707a, 707b, bearings platform；708a, 708b, bearing；709th, line slideway；901st, the 3rd translation platform；902nd, fixed flat planar；
903rd, fixed support bar；904th, base plate；905th, motor；906th, nut；907th, leading screw；908th, sliding supporting bar；909th, spiral shell
Female gripper shoe.
Specific embodiment
In the following description, a large amount of concrete details are given to provide more thorough understanding of the invention.So
And, it will be apparent to one skilled in the art that the present invention can be able to without the need for one or more of these details
Implement.In other examples, in order to avoid obscuring with the present invention, for some technical characteristics well known in the art do not enter
Row description.
In order to thoroughly understand the present invention, detailed structure will be proposed in following description.Obviously, embodiments of the invention
It is not limited to the specific details is familiar with by those skilled in the art.Presently preferred embodiments of the present invention is described in detail as follows, so
And in addition to these detailed descriptions, the present invention can also have other embodiment.
The present invention proposes a kind of multimode fibre focal plane adjusting means for plasma detection, and which is used for multimode
The plane of incidence of optical fiber and the outgoing focal plane of Cheney-Tener light channel structure are adjusted to overlapping.The adjusting means includes multimode light
Fine adjustment seat and the first adjusting apparatus being set up in parallel and the second adjusting apparatus, wherein, as shown in figure 1, the Cheney-spy
Light channel structure 40 of receiving is arranged in the first adjusting apparatus, and the multimode fibre adjustment seat 50 is arranged in the second adjusting apparatus, institute
State the first adjusting apparatus and second adjusting apparatus each have multiple degree of freedom, the multimode fibre is contained in the multimode
In optical fiber adjustment seat 50 so that outlet of the plane of incidence of multimode fibre towards the Cheney-Tener light channel structure 40.
By the adjustment of the first adjusting apparatus and multiple degree of freedom of the second adjusting apparatus, can realize multimode fibre
The outgoing focal plane of plane of incidence and Cheney-Tener light channel structure is adjusted to coinciding with one another.
Referring specifically to Fig. 1, the multimode fibre focal plane that illustrated therein is preferred implementation of the invention adjusts dress
The schematic diagram put.For the ease of direction indication, the coordinate system being made up of X, Y and three directions of Z-direction is figure 1 illustrates,
Wherein X-direction is expressed as horizontal on horizontal plane, and Y-direction is expressed as the longitudinal direction on horizontal plane, and Z-direction is expressed as perpendicular to level
Face it is vertical.As shown in figure 1, the support being for example positioned on ground is illustrated therein is, and such as optical table 10, the optical table
10 are used to lay the multimode fibre focal plane adjusting means.
Illustratively, in the multimode fibre focal plane adjusting means, first adjusting apparatus include：Can be around first direction
The first adjustment component that (such as Y-direction) is rotated, such as the first rotatable platform 20；On the described first adjustment component, energy
Enough the second adjustment components rotated around second direction (such as X-direction), such as the second rotatable platform 30；Wherein described first direction is not
The second direction is same as, and wherein, the Cheney-Tener light channel structure 40 is on the described second adjustment component 30.
Illustratively, second adjusting apparatus include：
3rd adjustment component, which can be rotated around third direction (such as Z-direction), for example, the 3rd rotatable platform 60, thereon
The multimode fibre adjustment seat 50 is installed；
First parallel moving mechanism, its can translation in the first direction, for example, the first translation platform 70 is provided with described thereon
3rd adjustment component；
Second parallel moving mechanism, its can translation in a second direction, for example, the second translation platform 80 is provided with described thereon
First parallel moving mechanism；
3rd parallel moving mechanism, which can be provided with described thereon along third direction translation, for example, the 3rd translation platform 90
Second parallel moving mechanism.
Illustratively, there is firm banking 100 on optical table 10, the 3rd translation platform 90 is installed on firm banking 100.
Therefore, Cheney-Tener light channel structure 40 can adjust two via the first rotatable platform 20 and the second rotatable platform 30
The rotational freedom in individual direction, multimode fibre then can be put down via the 3rd rotatable platform 60, the first translation platform 70, the second translation
Platform 80 and the 3rd translation platform 90 adjust the translation in three directions and the rotational freedom in a direction, so as to realize whole six
The regulation of individual degree of freedom, finally easily can put down the plane of incidence of multimode fibre burnt with the outgoing of Cheney-Tener light channel structure
Face is adjusted to coincidence.
The structural representation of the first rotatable platform of the invention 20 is shown in detail in Fig. 2 a-3b, in the present invention
In, first, second, and third rotatable platform can have identical frame for movement, as an example, only to the first rotatable platform 20
It is described.
As shown in figures 2 a through 3b, the first rotatable platform 20 is made up of upper and lower two parts, and its middle and lower part point is included for by first
The fixed base plate 204 that rotatable platform itself is fixed, upper part are then included for providing the traverser 201 of rotational motion.
Wherein, the first arc-shaped guide rail 202b is provided with the fixed base plate 204, the traverser 201 is then provided with and described
The second arc-shaped guide rail 202a that one arc-shaped guide rail 202b is engaged, when the second arc-shaped guide rail 202a and the first arc-shaped guide rail 202b it
Between when there is relative movement, traverser 201 produces rotation relative to fixed base plate 202.
Easily to realize rotation of the traverser 201 relative to fixed base plate 202, below the traverser 201
Jacking block 203 is fixedly connected with, the jacking block 203 has contact surface, it is flat which is for example connected to activity by means of connecting portion 204d
On the lower surface of platform 201；Meanwhile, push rod device 206, preferred electric pushrod dress are installed with the fixed base plate 204
Put, the push rod device has telescopic push rod 206a, it is for the contact surface of pushing tow jacking block 203, described so as to drive
Traverser 201 is rotated relative to the fixed base plate 204.
For ensure push rod 206a can the reliably contact surface of pushing tow jacking block 203 all the time, the cross section of jacking block 203 is preferred
It is arranged to swallow-tail form, thus its contact surface includes multistage planar section in smoothing junction and/or curved sections.Preferably, it is described to connect
Tactile surface includes side plate bending 203b and the planar section 203c and 203a positioned at the upper and lower both sides of side plate bending 203b, and push rod 206 is led
Want pushing tow side plate bending 203b.
Preferably, on the upper surface of fixed base plate 204, a pair of push rods dress is symmetrically provided with the both sides of jacking block 203
206 are put, and 203 both sides of jacking block also have symmetrical contact surface, thereby may be ensured that in both direction while pushing tow jacking block
203, to ensure the accuracy and reliability of the turned position of traverser 201.For example, when positioned at right side push rod 206a to the left
During stretching motion (while being arranged in the push rod also indentation campaign to the left in left side), push rod 206a is just promoted with the abutting of jacking block 203
The upper part of the first rotatable platform 20 along guide rail 202a and 202b slide, it is achieved thereby that the first rotatable platform 20 around Y side
To rotate clockwise, the rotational freedom of Y-direction is adjusted.
Wherein, the push rod device includes the push rod fixed seat 205 of the upper surface for being connected to fixed base plate 204, in the push rod
It is provided with fixed seat 205 for example by motor-driven electric pushrod, the push rod 206a wherein in electric pushrod can be in electricity
Stretching motion is realized in the presence of machine.
Preferably, the second arc-shaped guide rail 202b is crossed roller arc-shaped guide rail.
It will be appreciated by those skilled in the art that being based on identical structure and principle, it is also possible to realize second and the 3rd rotation
Rotation of the platform rotating around X-direction and Z-direction.
Cheney of the invention-Tener light channel structure 40 is figure 4 illustrates, the wherein light channel structure includes：It is incident
Slit 401, wherein continuous spectrum to be detected is entered in light channel structure by the entrance slit 401；Collimating mirror 402,
Which receives the incident illumination from entrance slit 401 and is reflected as directional light；Diffraction grating 403, the diffraction grating 403 connect
The directional light for being reached, makes diffraction light reach focusing mirror 404 Jing after by its diffraction；Focusing mirror 404, the focusing reflect
Mirror causes the monochromatic light of different wave length to focus on the various location of focal plane 405；And put down with Jiao of 401 homonymy of entrance slit
Face 405.
Show that the multimode fibre in the present invention adjusts seat 50 in figs. 5 a and 5 b, in Fig. 5 b in multimode fibre adjustment seat
Multimode fibre 504 is installed.
Wherein the multimode fibre adjustment seat includes：
Fixed seat 501, such as right angle fixed seat, the multimode fibre adjustment seat 50 are connected to second via the fixed seat 501
On the 3rd rotatable platform 60 in adjusting apparatus, fixed seat endoporus 501a is provided with the vertical section of the fixed seat 501；
Optical fiber installing pipe 505, its first end are connected to the fixed seat 501, for example, be ordinatedly arranged on fixed seat endoporus
In 501a so that outlets of its second end 505d towards the Cheney-Tener light channel structure 40,504 gap of the multimode fibre
Ordinatedly it is arranged in the optical fiber installing pipe 505, the plane of incidence 504a of the multimode fibre 504 is installed positioned at the optical fiber
Second end of pipe 505 such that it is able to towards the outlet of the Cheney-Tener light channel structure 40, in order to adjust weight with focal plane
Close.
Outwardly annular boss is provided with outside optical fiber installing pipe 505, the end face of annular boss can be used for optical fiber
Installing pipe itself carries out spacing.Optical fiber installing hole 505b is provided with inside optical fiber installing pipe 505, optical fiber installing hole 505b is arranged on
At second end, for coordinating with ferrule 504b of multimode fibre 504 (referring to Fig. 6 a and 6b) gap.Except the optical fiber installing hole
Outside 505b, the remainder diameter of the endoporus 505c of optical fiber installing pipe becomes big, in order to optical fiber without interferingly passing through.Using
When the left end of optical fiber installing pipe 505 is inserted in the fixed seat endoporus 501a of fixed seat 501, you can complete dress therebetween
Match somebody with somebody.
Preferably, multimode fibre adjustment seat also includes flange 503 and flexible pipe 502.Wherein, flange 503 is preferred
The outlet side of Cheney-Tener light channel structure 40 is connected to by threaded fastener, the flange 503 has annular boss and method
Blue endoporus 503b, the second end of the optical fiber installing pipe 505 are stretched in the endoporus 503b of the flange 503, and wherein this connects
The diameter of the second end 505d with diameter greater than optical fiber installing pipe 505 of mouth flange endoporus 503b, so that optical fiber installing pipe 505
Radial position adjustment can be carried out relative to flange 503.The flexible pipe 502 is preferably light tight material and with good
Elasticity, the two ends of flexible pipe 502 are separately mounted at the boss of flange 503 and the boss of installing pipe 505, are set in the light
The periphery of fine installing pipe 505, preferably can process groove 503a on the boss radially-outer surface of flange 503, in peace
Groove 505a is processed on the radially-outer surface of the boss of tubulature 505, then the two ends of flexible pipe 502 two can be fixed on into by cassette tape
Individual groove.
The right-hand member of optical fiber installing pipe 505 is arranged in the endoporus 501a of fixed seat 501, is preferably also fixed by jackscrew
(not shown).When fixed seat 501 drives optical fiber installing pipe 505 to move, multimode fibre 504 can realize compliant motion, pass through
The motion of each motion structure, can cause the incident end face 504a of multimode fibre 504 to put down with Jiao of Cheney-Tener light channel structure 40
Face 405 overlaps.
Show that the end of multimode fibre head of the invention regards and side structure schematic view in Fig. 6 a and Fig. 6 b.As schemed
Shown, the rectangular distribution of optical fiber input plane 504a of multimode fibre 504 is simultaneously embedded in ferrule 504b, wherein optical fiber input
In plane 504a, the array quantity of optical fiber can be customized according to the actual requirements, but the size of optical fiber input plane 504a need to be little
In the size of ferrule 504b.
The structure of the first translation platform 70 is shown in Fig. 7-8.In the present invention, the second translation platform 80 can have phase
Same frame for movement, as an example, is only described to the first translation platform 70.
Specifically, the first translation platform is to drive leading screw rotation by motor so that pair of nut drives translation platform straight line
The mechanism of motion.The first translation platform includes：
Support base 706, which is provided with line slideway 709, and which is used to fixedly mount first platform itself, and straight line is led
Rail 709 is fixedly mounted on support base 706 by means of guide support 705；
Translation platform 701, which can slide along the line slideway 709, such as including guide rail slide block (not shown)；
Screw pair, which connects the support base 706 and the translation platform 701, including nut 702 and leading screw 703, example
Such as, nut 702 is fixed on 701 lower surface of translation platform, and leading screw 703 (is specifically included positioned at two ends via bearings platform 707
Two bearings platform 707a and 707b) in bearing 708a and 708b rotatably support, bearings platform 707 is fixedly connected on
On support base 706.One end of leading screw 703 is connected with motor 704.
When motor 704 rotates, leading screw 703 is driven to rotate, due to connecting for worm drive between nut 702 and leading screw 703
Connect, with the rotation of leading screw 703, nut 702 can occur the displacement linearly gone up on leading screw 703, and then drive translation
There is translation in an x or y direction relative to support base 706 in platform 701.
Figure 9 illustrates the structure chart of the 3rd translation platform 90 moved in Z-direction.Wherein the 3rd translation platform 90
Including：Base plate 904, fixed flat planar 902, fixed support bar 903, the 3rd screw pair (including leading screw 907 and nut 906),
Nut support plate 909, the 3rd translation platform 901, and sliding supporting bar 908.Wherein, the fixed support bar 903 is installed on institute
State on base plate 904, the fixed flat planar 902 is installed on the top of the fixed support bar 903, three constitutes a stable frame
Frame structure.Leading screw 907 in 3rd screw pair is rotatably supported in the base plate 904 and the fixed flat planar
Between 902, motor 905 is connected with the leading screw 907 in bottom, and the nut 906 in the 3rd screw pair is fixed on institute
State on nut support plate 909, the sliding supporting bar 908 passes through the fixed flat planar 902, the sliding support with being slidably matched
The lower end of bar 908 is fixed on the nut support plate 909, and the 3rd translation platform 901 is fixed on the sliding supporting bar 908
Upper end, nut support plate 909, the 3rd translation platform 901 and sliding supporting bar 908 also constitute a stable frame structure.
When motor 905 rotates, leading screw 907 is driven to rotate, due to connecting for worm drive between nut 906 and leading screw 907
Connect, with the rotation of leading screw 907, nut 906 can occur the displacement vertically gone up on leading screw 907, and then drive nut
There is translation in z-direction in the 3rd translation platform 901 of gripper shoe 909 and connection fixed thereto.
Figure 10 illustrates the attachment structure figure between adjacent rotatable platform and/or translation platform.As an example, its
In show around Z-direction rotate the 3rd rotatable platform 60 and in X direction between the first translation platform 70 of translation connection knot
Composition.The area of the bottom surface (fixing the bottom surface of base plate 604) of wherein the 3rd rotatable platform 60 is less than installation surface below
The area of (in this example, being the upper surface of the first translation platform 70), is threaded hole in the side of fixed base plate 604, and first
Also hole is threaded on the upper surface of the translation platform 701 of translation platform 70, just can be put down with 110b by right angle block 110a
Dynamic platform 701 is secured together with fixed base plate 604, that is, the 3rd rotatable platform 60 is fixed to the first translation platform 70.It is similar
Ground, in the present invention, between the first rotatable platform 20 rotated in optical table 10 and around Y-direction, first turn rotated around Y-direction
Between moving platform 20 and the second rotatable platform 30 for rotating around X-direction, in X direction the first translation platform 70 of translation with along Y side
To between the second translation platform 80 of translation, along the second translation platform 80 and the 3rd translation along Z-direction translation of Y-direction translation
Between platform 90, between the 3rd translation platform 90 and firm banking 100 of Z-direction translation, firm banking 100 and optical table
Between 10, etc., installation positioning can be carried out using this right angle block 110a, 110b.
The operational approach of multimode fibre focal plane of the invention adjusting means is described below.
When in use, the rotation around Y-direction and X-direction can be realized by the first adjusting apparatus, and passes through the second adjustment
Device can be realized around Z-direction and the translation on tri- directions of XYZ, thus can realize between the two the 6 of 3 D stereo from
By degree adjustment, and then the focal plane of Cheney-Tener light channel structure can be made to realize strictly overlapping with the plane of incidence of multimode fibre, with
The spectral signal transmitted by Cheney-Tener light channel structure is gathered accurately.
Those skilled in the art is it is easily understood that on the premise of not conflicting, above-mentioned each preferred version can be free
Ground combination, superposition.
It should be appreciated that above-mentioned embodiment is only illustrative, and not restrictive, without departing from the basic of the present invention
In the case of principle, those skilled in the art can be directed to the modification of the various obvious or equivalent that above-mentioned details is made or replace
Change, be all included in scope of the presently claimed invention.
Claims (10)
1. it is a kind of for plasma detection multimode fibre focal plane adjusting means, which is used for the plane of incidence of multimode fibre
Adjust to overlapping with the outgoing focal plane of Cheney-Tener light channel structure, it is characterised in that including multimode fibre adjust seat and
The first adjusting apparatus being set up in parallel and the second adjusting apparatus, wherein, the Cheney-Tener light channel structure is installed in the first adjustment
On device, the multimode fibre adjustment seat is arranged in the second adjusting apparatus, and first adjusting apparatus and described second are adjusted
Device each has multiple degree of freedom, and the multimode fibre is contained in the multimode fibre adjustment seat so that multimode fibre
Outlet of the plane of incidence towards the Cheney-Tener light channel structure.
2. adjusting means according to claim 1, it is characterised in that first adjusting apparatus include：Can be around first
The first adjustment component that direction rotates；Second tune on the described first adjustment component, can rotating around second direction
Whole group part；Wherein described first direction is different from the second direction, wherein, the Cheney-Tener light channel structure is arranged on institute
State on the second adjustment component.
3. adjusting means according to claim 2, it is characterised in that the first adjustment component and/or the second adjustment group
Part includes：
Fixed base plate, is provided with the first arc-shaped guide rail on the fixed base plate；
Traverser, the traverser are provided with the second arc-shaped guide rail being engaged with first arc-shaped guide rail；
The jacking block being fixedly connected on below the traverser, the jacking block have contact surface；
The push rod device being fixedly mounted on the fixed base plate, preferred electric pushrod device, the push rod device has can stretch
The push rod of contracting, described in the push rod pushing tow during contact surface of jacking block, drives the traverser relative to the fixed base plate
Rotate.
4. adjusting means according to claim 3, it is characterised in that the contact surface includes in smoothing junction flat of multistage
Face section and/or curved sections；Preferably, the contact surface includes side plate bending and the plane positioned at the upper and lower both sides of the side plate bending
Section.
5. the adjusting means according to one of claim 1-4, it is characterised in that the multimode fibre adjustment seat includes：
It is fixedly attached to the fixed seat of second adjusting apparatus；
Optical fiber installing pipe, its first end are connected to the fixed seat, and the second end goes out towards the Cheney-Tener light channel structure
Mouthful, the multimode fibre gap is ordinatedly arranged in the optical fiber installing pipe, and the plane of incidence of the multimode fibre is located at institute
State the second end of optical fiber installing pipe.
6. adjusting means according to claim 5, it is characterised in that the multimode fibre adjustment seat also includes flange
And flexible pipe, wherein, the flange is fixedly attached to the outlet side of the Cheney-Tener light channel structure, and the optical fiber is installed
Second end of pipe is stretched in the endoporus of the flange, and the external diameter at the second end of the optical fiber installing pipe is less than the interface method
The diameter of blue endoporus, the flexible pipe are made up of light-proof material, and the flexible pipe is set in the periphery of the optical fiber installing pipe, institute
The two ends for stating flexible pipe are connected respectively to the flange and the fixed seat.
7. the adjusting means according to one of claim 1-6, it is characterised in that second adjusting apparatus include：
3rd adjustment component, which can be rotated around third direction, be provided with the multimode fibre adjustment seat thereon；
First parallel moving mechanism, its can translation in the first direction, be provided with thereon it is described 3rd adjustment component；
Second parallel moving mechanism, its can translation in a second direction, first parallel moving mechanism is installed thereon；
3rd parallel moving mechanism, which can be provided with second parallel moving mechanism thereon along third direction translation.
8. adjusting means according to claim 7, it is characterised in that first parallel moving mechanism and/or described second flat
Motivation structure includes：
Support base, which is provided with line slideway；
Translation platform, which can slide along the line slideway；
Screw pair, which connects the support base and the translation platform.
9. adjusting means according to claim 7, it is characterised in that the 3rd parallel moving mechanism includes：Base plate, fixation are flat
Plate, fixed support bar, the 3rd screw pair, nut support plate, the 3rd translation platform and sliding supporting bar, wherein, it is described solid
Determine support bar to be installed on the base plate, the fixed flat planar is installed on the top of the fixed support bar, the 3rd leading screw
Leading screw in pair of nut is rotatably supported between the base plate and the fixed flat planar, in the 3rd screw pair
Nut is fixed on the nut support plate, and the sliding supporting bar passes through the fixed flat planar, the slip with being slidably matched
The lower end of support bar is fixed on the nut support plate, and the 3rd translation platform is fixed on the upper end of the sliding supporting bar.
10. adjusting means according to claim 7, it is characterised in that the area of the upper surface of first parallel moving mechanism
More than the area of the bottom surface of the described 3rd adjustment component, the 3rd adjustment component is fixedly installed to described first via right angle block
Parallel moving mechanism；
And/or, the area of the bottom surface of any one in the first parallel moving mechanism, the second parallel moving mechanism and the 3rd parallel moving mechanism is less than which
The area of the installation surface of lower section, so as to which is fixedly installed to the installation surface of lower section via right angle block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610973016.XA CN106550528B (en) | 2016-10-28 | 2016-10-28 | A kind of multimode fibre focal plane regulating device for plasma detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610973016.XA CN106550528B (en) | 2016-10-28 | 2016-10-28 | A kind of multimode fibre focal plane regulating device for plasma detection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106550528A true CN106550528A (en) | 2017-03-29 |
| CN106550528B CN106550528B (en) | 2019-03-26 |
Family
ID=58395549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610973016.XA Expired - Fee Related CN106550528B (en) | 2016-10-28 | 2016-10-28 | A kind of multimode fibre focal plane regulating device for plasma detection |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106550528B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7016035B2 (en) * | 2003-09-25 | 2006-03-21 | General Electric Company | Fiber optical apparatus and system for in situ laser plasma spectroscopy |
| ES2401143R1 (en) * | 2011-04-07 | 2013-04-19 | Univ Madrid Complutense | DISCRIMINATION OF INDIVIDUALS FROM OSEO FABRIC USING LASER ABLATION SPECTROSCOPY AND MATHEMATICAL PROCEDURES. |
| KR20130087846A (en) * | 2012-01-30 | 2013-08-07 | 한국원자력연구원 | Detecting method and apparatus using laser-induced breakdown spectroscopy |
| CN103592025A (en) * | 2013-10-30 | 2014-02-19 | 清华大学 | Spectrum analysis system |
| CN104458665A (en) * | 2014-12-28 | 2015-03-25 | 冶金自动化研究设计院 | Measuring device and method for spectral spatial distribution in LIBS (Laser-Induced Breakdown Spectroscopy) component analysis |
-
2016
- 2016-10-28 CN CN201610973016.XA patent/CN106550528B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7016035B2 (en) * | 2003-09-25 | 2006-03-21 | General Electric Company | Fiber optical apparatus and system for in situ laser plasma spectroscopy |
| ES2401143R1 (en) * | 2011-04-07 | 2013-04-19 | Univ Madrid Complutense | DISCRIMINATION OF INDIVIDUALS FROM OSEO FABRIC USING LASER ABLATION SPECTROSCOPY AND MATHEMATICAL PROCEDURES. |
| KR20130087846A (en) * | 2012-01-30 | 2013-08-07 | 한국원자력연구원 | Detecting method and apparatus using laser-induced breakdown spectroscopy |
| CN103592025A (en) * | 2013-10-30 | 2014-02-19 | 清华大学 | Spectrum analysis system |
| CN104458665A (en) * | 2014-12-28 | 2015-03-25 | 冶金自动化研究设计院 | Measuring device and method for spectral spatial distribution in LIBS (Laser-Induced Breakdown Spectroscopy) component analysis |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106550528B (en) | 2019-03-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2015062445A1 (en) | Spectrum analysis system | |
| CN201569493U (en) | Optical spectrum analyzer | |
| CN204495749U (en) | Continuous diffraction light splitting and sniffer and sequential Xray fluorescence spectrometer | |
| CN202188902U (en) | Nearfield distribution photometer | |
| CN103913419B (en) | Double light path switches imaging spectrum system | |
| CN105628720B (en) | Continuous diffraction light splitting and detection device and sequential Xray fluorescence spectrometer | |
| CN101093200A (en) | Consecutive diffractive spectrum of curved crystal on X ray, control method and device for detection | |
| CN102279048A (en) | Broadband microscopic imaging spectrum system and wavelength conversion rapid focusing control method thereof | |
| CN102297720A (en) | Measuring apparatus for brightness of sky background | |
| CN101806622A (en) | Ground imaging spectral measurement system | |
| CN103454070A (en) | Focus performance test method for X-ray combined refraction lens on basis of CCD detection | |
| CN103954359A (en) | Zoom spectrograph with spectral measuring range and resolution ratio adjustable | |
| US7869034B2 (en) | Multi-angle and multi-channel inspecting device | |
| CN106550528A (en) | A kind of multimode fibre focal plane adjusting means for plasma detection | |
| CN101109693A (en) | Accelerated weathering device with optical slip ring | |
| CN103299167A (en) | Spectrophotometer for the automated optical characterization of solar collector tubes and method for the operation thereof | |
| US20200348172A1 (en) | Multichannel broadband high-resolution spectrograph | |
| CN1719232A (en) | Open-air BRDF fixed point self-operated measuring unit | |
| CN205607532U (en) | Multi -functional micro - confocal spectrum appearance | |
| Wiehr et al. | Solar observations at the Göttingen University Observatory | |
| CN108760244B (en) | A kind of high-resolution optical information networks device and method | |
| CN1613004A (en) | Spectroscope | |
| CN205157055U (en) | Multi -functional grating spectrometer experimental apparatus | |
| CN207487859U (en) | A kind of integrated form die stress detection device | |
| JP2000329714A (en) | X-ray fluorescence analyzer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB03 | Change of inventor or designer information |
Inventor after: Yang Yiyong Inventor after: Han Chuangun Inventor before: Han Chuangun Inventor before: Yang Yiyong |
|
| CB03 | Change of inventor or designer information | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190326 Termination date: 20191028 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |