CN201569493U - Optical spectrum analyzer - Google Patents
Optical spectrum analyzer Download PDFInfo
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- CN201569493U CN201569493U CN2009201723375U CN200920172337U CN201569493U CN 201569493 U CN201569493 U CN 201569493U CN 2009201723375 U CN2009201723375 U CN 2009201723375U CN 200920172337 U CN200920172337 U CN 200920172337U CN 201569493 U CN201569493 U CN 201569493U
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Abstract
The utility model discloses an optical spectrum analyzer. The optical spectrum analyzer comprises a narrow slit, a collimating mirror, a plane grating, a focusing mirror and a detector, wherein, the collimating mirror is arranged on the incident light path of the narrow slit; the collimating mirror is an independent lens or a reflecting mirror; the grating is arranged on the reflected light path of the collimating mirror; the focusing mirror is arranged on the reflected light path of the grating; and the acquisition of light spectrum signals is fulfilled by the detector. By scattering light into a plurality of beams through the grating according to wavelengths, projecting the light on the CCD detector through the focusing mirror, and adjusting the grating to a certain angle through a stepping motor at the same time, the utility model ensures that light with different wavelengths are imaged on the CCD detector through splitting, thereby realizing wide light spectrum and high resolution.
Description
Technical field
The utility model relates to technical field of analytical instruments, especially a kind of spectroanalysis instrument.
Background technology
Spectrometer is a kind of important and commonly used scientific instrument, is used for light source and material are carried out accurate analysis.The tradition ultraviolet-visual spectrometer adopts Wavelength scanning mechanism, realizes the scanning of wavelength, adopts photomultiplier as photoelectric receiving device, once can only receive the monochromatic light of a wavelength, and instrument has entrance slit and exit slit, and sample cell is positioned on the monochromatic light path.Because need the scanning of wavelength, stepper motor once rotates and can only carry out the measurement of a wavelength.Therefore the Measuring Time of finishing the overall optical spectral limit is longer, generally need be about tens of seconds.Simultaneously, for the wavelength that makes output beam by linear change, be the spectrogram of even scale to obtain the wavelength coordinate, general Wavelength scanning mechanism adopts cam mechanism, sine mechanism, cosecant mechanism etc.Scanning mechanism is connected with the grating seat, can make the grating workplace around its central shaft rotation.Sine mechanism is the most frequently used a kind of of Wavelength scanning mechanism, and it can make the wavelength output reading that is directly proportional with monochromatic light angle of diffraction sine become simple linearity.The length scanning of spectral instruments such as present most spectrometer and atomic absorption uses sine mechanism.Sine mechanism is a kind of in the lever transmission in the mechanical system, and it requires precision height and high reliability features, and therefore processing, assembly difficulty are big, the cost height.
With respect to traditional ultraviolet spectrophotometer, more modern microspectrophotometers have adopted line array CCD to make detecting device, have cancelled complicated Wavelength scanning mechanism, and for example AvaSpec series mini fiber spectrometer adopts line array CCD to make detecting device exactly.The defective of CCD spectrometer maximum is exactly that wide spectral range and high spectral resolution can not be taken into account simultaneously, for example need narrow slit and many grid strokes logarithm during high resolving power, and the grid stroke logarithm for a long time, and the spectral range that every block of grating covers is just very narrow.For head it off Avantes has released the multichannel light optical fiber spectrograph, can accomplish that the synchronous high-speed of broad spectrum high resolution is measured.Can reach at 200-1100nm scope intrinsic resolution＜the outstanding resolution of 0.1nm.Each passage of multi-channel spectrometer based is all formed (128,256,1024 or 2048 pixel) by the detector of same type.Certainly, each passage of spectrometer can cover different wavelength coverages or have different resolution.So all will indicate used grating model to each passage, wavelength coverage and other option.The multichannel light optical fiber spectrograph needs many spectrometer parallel runnings, and every spectrometer carries out the Measurement and analysis of certain spectral range, and not only the volume of system is big, Heavy Weight, and the cost height.During real work, often only need carry out the spectral analysis of a certain particular range of wavelengths sometime in addition, only need a spectrometer job, and other spectrometer be in waiting status, has caused great waste.
The utility model content
The purpose of this utility model provides a kind of spectroanalysis instrument, carries out wavelength by rotating grating and selects, and need not the purpose that many machine assemblies can realize the spectral analysis of continuous wavelength scope to reach.
In order to achieve the above object, the technical scheme that the utility model adopted is:
Spectroanalysis instrument includes shell, it is characterized in that: have the slit of injecting for light on the described side wall of outer shell, be provided with collimating mirror in the described shell inner cavity, described collimating mirror is positioned on the input path of the light of slit incident, and with reflection again behind the optical alignment of incident; Also be provided with rotating grating and focus lamp in the described shell inner cavity, described grating is positioned on the catoptrical light path of collimating mirror, and with secondary reflection again after the beam split of collimating mirror reflected light, described focus lamp is positioned on the light path of optical grating reflection light, and secondary reflection again after optical grating reflection light focused on; Also include detector in the described shell inner cavity, described focus lamp reflected light focuses on the detector of post-concentration in being installed on casing.
Described spectroanalysis instrument is characterized in that: motor-driven grating seat is installed in the described shell inner cavity, and described grating is installed on the grating seat, and is rotated by motor-driven grating seat and grating.
Described spectroanalysis instrument is characterized in that: described detector adopts slim back lighting type CCD detector.
The utility model provide a kind of efficiency of light energy utilization height, wide spectrum, high resolving power, simple in structure, cost is low to satisfy the spectroanalysis instrument of modern spectral detection demand.The utility model has adopted unique light path design structure, incident light is reflexed to grating through collimating mirror, the driven by motor grating rotating becomes different angles, grating beam splitting is to focus lamp, focus lamp can just have been realized multi-channel measurement under the situation that existing single channel CCD spectrometer is simply transformed with the optical convergence of optical grating reflection different wavelength range on the different pixels of detector.The CCD of Cai Yonging simultaneously, pixel height not only, and adopted the ultraviolet enhancement techniques, can guarantee wide spectrum and high-resolution spectra collection simultaneously.This device detects simply, volume is little, in light weight, greatly reduces cost for the user simultaneously.
Description of drawings
Fig. 1 is the utility model structural representation.
Embodiment
As Fig. 1, spectroanalysis instrument includes shell, has the slit of injecting for light 6 on the side wall of outer shell, is provided with collimating mirror 2 in the shell inner cavity, and collimating mirror 2 is positioned on the input path of the light of slit 6 incidents, and with reflection again behind the optical alignment of incident; Also be provided with rotating grating 4 and focus lamp 1 in the shell inner cavity, the grating seat that motor 3 drives is installed in the shell inner cavity, grating 4 is installed on the grating seat, and drives grating seat and grating 4 rotations by motor 3.Grating 4 is positioned on the collimating mirror 2 catoptrical light paths, and with secondary reflection again after the collimating mirror 2 reflected light beam split, focus lamp 1 is positioned on the grating 4 catoptrical light paths, and secondary reflection again after grating 4 reflected light are focused on; Also include detector 5 in the shell inner cavity, focus lamp 1 reflected light focuses on post-concentration on detector 5, and detector 5 adopts slim back lighting type CCD detector.
The spectroanalysis instrument that the utility model relates to, its basic functional principle is: flashlight is entered by slit 6, and earlier through collimating mirror 2, the light that slit 6 is sent becomes directional light.By a grating 4 this collimated light is become many light beams by wavelength dispersion then, line focus mirror 1 forms the picture of a series of entrance slits on the focal plane again, wherein every bit is corresponding to a certain specific wavelength, the picture of decline spectrum just is projected onto on the ccd detector array 5, for example grating 4 is in initial position, detecting spectrum on the CCD is 200-400nm, utilizing motor 3 to drive grating 4 again rotates to an angle, can detected spectrum be 400-600nm on the CCD then, by that analogy, and, then can carry out the spectral analysis of 200-1100nm gamut by software processes.Certainly can also expand its check and analysis scope as required.
Claims (3)
1. spectroanalysis instrument, include shell, it is characterized in that: have the slit of injecting for light on the described side wall of outer shell, be provided with collimating mirror in the described shell inner cavity, described collimating mirror is positioned on the input path of the light of slit incident, and with reflection again behind the optical alignment of incident; Also be provided with rotating grating and focus lamp in the described shell inner cavity, described grating is positioned on the catoptrical light path of collimating mirror, and with secondary reflection again after the beam split of collimating mirror reflected light, described focus lamp is positioned on the light path of optical grating reflection light, and secondary reflection again after optical grating reflection light focused on; Also include detector in the described shell inner cavity, described focus lamp reflected light focuses on the detector of post-concentration in being installed on casing.
2. spectroanalysis instrument according to claim 1 is characterized in that: motor-driven grating seat is installed in the described shell inner cavity, and described grating is installed on the grating seat, and is rotated by motor-driven grating seat and grating.
3. spectroanalysis instrument according to claim 1 is characterized in that: described detector adopts slim back lighting type CCD detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201723375U CN201569493U (en) | 2009-05-31 | 2009-05-31 | Optical spectrum analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201723375U CN201569493U (en) | 2009-05-31 | 2009-05-31 | Optical spectrum analyzer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201569493U true CN201569493U (en) | 2010-09-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2009201723375U Expired - Fee Related CN201569493U (en) | 2009-05-31 | 2009-05-31 | Optical spectrum analyzer |
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Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102507443A (en) * | 2011-10-31 | 2012-06-20 | 中国科学院长春光学精密机械与物理研究所 | Broadband multi-LED light source synthesizer for near infrared spectroscopy analysis |
| CN102738039A (en) * | 2011-03-30 | 2012-10-17 | 东京毅力科创株式会社 | Measuring apparatus and plasma processing apparatus |
| CN103323123A (en) * | 2013-06-25 | 2013-09-25 | 长沙理工大学 | Full-automatic light wave length measuring method and device |
| CN104501953A (en) * | 2014-12-25 | 2015-04-08 | 中国科学院长春光学精密机械与物理研究所 | Staggered folding optical path structure of small-sized grating monochromator with high spectral resolution |
| CN104729708A (en) * | 2015-03-11 | 2015-06-24 | 航天东方红卫星有限公司 | Anastigmatic broadband spectrum detection grating spectrometer |
| CN104865206A (en) * | 2015-04-24 | 2015-08-26 | 上海伯顿医疗设备有限公司 | Single photoelectric tube five-channel atomic absorption spectrometer |
| CN106770185A (en) * | 2016-12-28 | 2017-05-31 | 湖北省地质实验测试中心 | A kind of elemental detection system and detection method based on ccd sensor |
| CN106769898A (en) * | 2016-12-29 | 2017-05-31 | 同方威视技术股份有限公司 | Multiresolution spectrometer |
| CN108020319A (en) * | 2016-10-31 | 2018-05-11 | 长春理工大学 | A kind of adjustable spectrometer shell of separate modular structure |
| CN109030427A (en) * | 2018-07-13 | 2018-12-18 | 上海倍蓝光电科技有限公司 | A kind of CCD spectrometer of dedicated luminescence generated by light spectral measurement |
| CN110108360A (en) * | 2019-05-14 | 2019-08-09 | 长光禹辰信息技术与装备(青岛)有限公司 | A kind of manufacturing method of convex grating imaging spectrograph |
| CN112683817A (en) * | 2020-06-23 | 2021-04-20 | 长庚大学 | Spectrum analyzer |
| CN112945380A (en) * | 2019-11-26 | 2021-06-11 | 中国科学院国家空间科学中心 | Compact high-resolution broadband ultraviolet spectrometer |
| CN113280917A (en) * | 2021-05-19 | 2021-08-20 | 苏州灵析精密仪器有限公司 | High resolution wide spectrum calibration light source |
| CN114112033A (en) * | 2021-11-22 | 2022-03-01 | 杭州谱育科技发展有限公司 | Full-waveband spectrometer and working method thereof |
-
2009
- 2009-05-31 CN CN2009201723375U patent/CN201569493U/en not_active Expired - Fee Related
Cited By (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102738039A (en) * | 2011-03-30 | 2012-10-17 | 东京毅力科创株式会社 | Measuring apparatus and plasma processing apparatus |
| CN102738039B (en) * | 2011-03-30 | 2015-01-21 | 东京毅力科创株式会社 | Measuring apparatus and plasma processing apparatus |
| CN102507443A (en) * | 2011-10-31 | 2012-06-20 | 中国科学院长春光学精密机械与物理研究所 | Broadband multi-LED light source synthesizer for near infrared spectroscopy analysis |
| CN103323123A (en) * | 2013-06-25 | 2013-09-25 | 长沙理工大学 | Full-automatic light wave length measuring method and device |
| CN104501953A (en) * | 2014-12-25 | 2015-04-08 | 中国科学院长春光学精密机械与物理研究所 | Staggered folding optical path structure of small-sized grating monochromator with high spectral resolution |
| CN104729708A (en) * | 2015-03-11 | 2015-06-24 | 航天东方红卫星有限公司 | Anastigmatic broadband spectrum detection grating spectrometer |
| CN104865206A (en) * | 2015-04-24 | 2015-08-26 | 上海伯顿医疗设备有限公司 | Single photoelectric tube five-channel atomic absorption spectrometer |
| CN108020319A (en) * | 2016-10-31 | 2018-05-11 | 长春理工大学 | A kind of adjustable spectrometer shell of separate modular structure |
| CN106770185A (en) * | 2016-12-28 | 2017-05-31 | 湖北省地质实验测试中心 | A kind of elemental detection system and detection method based on ccd sensor |
| WO2018121744A1 (en) * | 2016-12-29 | 2018-07-05 | 同方威视技术股份有限公司 | Multi-resolution spectrometer |
| CN106769898A (en) * | 2016-12-29 | 2017-05-31 | 同方威视技术股份有限公司 | Multiresolution spectrometer |
| EP3564651A4 (en) * | 2016-12-29 | 2020-09-09 | Nuctech Company Limited | Multi-resolution spectrometer |
| CN106769898B (en) * | 2016-12-29 | 2024-01-26 | 同方威视技术股份有限公司 | Multi-resolution spectrometer |
| CN109030427A (en) * | 2018-07-13 | 2018-12-18 | 上海倍蓝光电科技有限公司 | A kind of CCD spectrometer of dedicated luminescence generated by light spectral measurement |
| CN109030427B (en) * | 2018-07-13 | 2023-10-13 | 上海倍蓝光电科技有限公司 | CCD spectrometer special for photoluminescence spectrum measurement |
| CN110108360A (en) * | 2019-05-14 | 2019-08-09 | 长光禹辰信息技术与装备(青岛)有限公司 | A kind of manufacturing method of convex grating imaging spectrograph |
| CN112945380A (en) * | 2019-11-26 | 2021-06-11 | 中国科学院国家空间科学中心 | Compact high-resolution broadband ultraviolet spectrometer |
| CN112683817A (en) * | 2020-06-23 | 2021-04-20 | 长庚大学 | Spectrum analyzer |
| CN113280917A (en) * | 2021-05-19 | 2021-08-20 | 苏州灵析精密仪器有限公司 | High resolution wide spectrum calibration light source |
| CN113280917B (en) * | 2021-05-19 | 2023-05-02 | 苏州灵析精密仪器有限公司 | High resolution broad spectrum calibration light source |
| CN114112033A (en) * | 2021-11-22 | 2022-03-01 | 杭州谱育科技发展有限公司 | Full-waveband spectrometer and working method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: ANHUI WANYI SCI. + TECH. CO., LTD. Free format text: FORMER NAME: HEFEI WANYI TECHNOLOGY CO., LTD. |
|
| CP01 | Change in the name or title of a patent holder |
Address after: Tianda high tech Zone 230031 Hefei Road, Anhui province No. 71 Huayi Science Park building B building Anhui instrument Patentee after: Anhui Wanyi Science and Technology Co., Ltd. Address before: Tianda high tech Zone 230031 Hefei Road, Anhui province No. 71 Huayi Science Park building B building Anhui instrument Patentee before: Hefei Wanyi Technology Co., Ltd. |
|
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100901 Termination date: 20130531 |