CN103148941A - Device and method for measuring beam quality of supercontinuum source - Google Patents

Device and method for measuring beam quality of supercontinuum source Download PDF

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CN103148941A
CN103148941A CN2013100747551A CN201310074755A CN103148941A CN 103148941 A CN103148941 A CN 103148941A CN 2013100747551 A CN2013100747551 A CN 2013100747551A CN 201310074755 A CN201310074755 A CN 201310074755A CN 103148941 A CN103148941 A CN 103148941A
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light source
supercontinuum
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靳爱军
侯静
张斌
陈胜平
王泽锋
刘文广
姜宗福
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National University of Defense Technology
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Abstract

本发明涉及超连续谱光源光束质量的测量技术,提供一种用于测量超连续谱光源光束质量的测量装置和方法。测量装置包括光谱仪、反射镜、宽波段分光棱镜、近场面阵CCD、远场面阵CCD和用于处理测量信息的计算机。测量方法包括:使用光谱仪对超连续谱光源的光谱进行测量,根据测量结果求得光谱重心;使用面阵CCD对近场光场分布以及远场光场分布进行测量,求得近场光斑半径与远场发散角;构造理想高斯基模光束,计算SC-M2因子,使用SC-M2因子对超连续谱光源光束质量进行评价。本发明可以对宽光谱超连续谱光源的光束质量进行整体评价,而不是仅仅对光源中某些光谱成分的光束质量进行评价与测量。

The invention relates to a measurement technology for the beam quality of a supercontinuum light source, and provides a measuring device and method for measuring the beam quality of a supercontinuum light source. The measuring device includes a spectrometer, a mirror, a wide-band beam splitting prism, a near-field array CCD, a far-field array CCD and a computer for processing measurement information. The measurement method includes: use a spectrometer to measure the spectrum of the supercontinuum light source, and obtain the spectral center of gravity according to the measurement results; use an area array CCD to measure the near-field light field distribution and the far-field light field distribution, and obtain the near-field spot radius and Far-field divergence angle; construct an ideal Gaussian mode beam, calculate the SC-M 2 factor, and use the SC-M 2 factor to evaluate the beam quality of the supercontinuum light source. The invention can evaluate the overall beam quality of the wide-spectrum supercontinuum light source instead of just evaluating and measuring the beam quality of certain spectral components in the light source.

Description

用于测量超连续谱光源光束质量的测量装置和方法Measuring device and method for measuring beam quality of supercontinuum light source

技术领域technical field

本发明涉及超连续谱光源光束质量的测量技术,尤其是一种使用光谱重心对超连续谱光源光束质量进行测量的方法。The invention relates to a technique for measuring the beam quality of a supercontinuum light source, in particular to a method for measuring the beam quality of a supercontinuum light source by using the spectral center of gravity.

背景技术Background technique

光束质量是激光应用技术中极为重要的参数,它是从质的方面评价激光特性的性能指标,对激光器的设计、制造、检测和应用等均具有十分重要的指导意义。Beam quality is an extremely important parameter in laser application technology. It is a performance index for evaluating laser characteristics in terms of quality. It has very important guiding significance for the design, manufacture, detection and application of lasers.

目前已经有很多的方法对激光的光束质量进行评价,如M2因子、桶中功率、斯特列尔比等[冯国英,周寿桓,“激光光束质量综合评价的探讨,”中国激光,2009,36,1643-1653],其中M2因子定义为实际光束的光斑半径与其远场发散角的乘积与理想高斯基模光束的相应乘积之比,桶中功率为远场平面内实际光束在某一固定半径的桶内的功率与该光源总功率的比值,斯特列尔比定义为实际光束峰值功率与理想光束峰值功率的比值。针对这些方法也有相应的光束质量测量装置对其进行测量(如专利号ZL 200620039036.1和200510030096.7的专利所述)。但是这些方法与测量装置仅适用于传统的准单色窄带光谱激光光源。At present, there are many methods to evaluate the laser beam quality, such as M2 factor, power in the barrel, Strehl ratio, etc. , 1643-1653], where the M2 factor is defined as the ratio of the product of the spot radius of the actual beam and its far-field divergence angle to the corresponding product of the ideal Gaussian mode beam, and the power in the bucket is the actual beam in the far-field plane at a fixed The ratio of the power in the bucket of the radius to the total power of the light source, Strehl ratio is defined as the ratio of the actual beam peak power to the ideal beam peak power. For these methods, there are also corresponding beam quality measuring devices to measure them (as described in patent Nos. ZL 200620039036.1 and 200510030096.7). However, these methods and measuring devices are only applicable to traditional quasi-monochromatic narrow-band spectral laser light sources.

超连续谱光源是一种新型的宽谱光源,具有传统激光相干性好、亮度高、方向性好等优点,同时也具有很宽的光谱(通常大于1 THz)。由于超连续谱光源的宽谱特性,前面介绍的传统激光光束质量的评价方法与测量装置并不适合对超连续谱光源的光束质量进行评价与测量。目前对超连续谱光源光束质量进行评价所采取的主要方法是使用滤波的方法(如窄带滤波片)将超连续谱光源中的光谱成分滤出,对滤出的窄带光使用传统光束质量测量装置进行测量[X.Chenan,X.Zhao,M.N.Islam,F.L.Terry,M.J.Freeman,A.Zakel,andJ.Mauricio,″10.5W Time-Averaged Power Mid-IR SupercontinuumGeneration Extending Beyond 4μm With Direct Pulse Pattern Modulation,″IEEE Journal of Selected Topics in Quantum Electronics,2009,15,422-434],并没有对超连续谱光源的整体光束质量进行测量,这样就不能反映整个光源的特性,失去其整体作为新型的宽光谱光源的价值。除此之外,研究人员也对产生超连续谱光源的重要非线性介质光子晶体光纤的光束质量进行了研究,但这一方法同样也是针对单一波长进行的,并不能反映通过光子晶体光纤产生的超连续谱光源的整体光束质量[Y.Vidne and M.Rosenbluh,″Spatialmodes in a PCF fiber generated continuum,″Opt.Express,2005,13,9721-9728]。The supercontinuum light source is a new type of wide-spectrum light source, which has the advantages of good coherence, high brightness, and good directionality of traditional lasers, and also has a wide spectrum (usually greater than 1 THz). Due to the wide-spectrum characteristics of the supercontinuum light source, the traditional laser beam quality evaluation methods and measurement devices introduced above are not suitable for evaluating and measuring the beam quality of the supercontinuum light source. At present, the main method used to evaluate the beam quality of supercontinuum light sources is to use filtering methods (such as narrow-band filters) to filter out the spectral components in supercontinuum light sources, and use traditional beam quality measurement devices for the filtered narrowband light Making measurements [X.Chenan, X.Zhao, M.N.Islam, F.L.Terry, M.J.Freeman, A.Zakel, and J.Mauricio, "10.5W Time-Averaged Power Mid-IR SupercontinuumGeneration Extending Beyond 4μm With Direct Pulse Pattern Modulation, "IEEE Journal of Selected Topics in Quantum Electronics, 2009, 15, 422-434], did not measure the overall beam quality of the supercontinuum light source, so it cannot reflect the characteristics of the entire light source, and loses its overall value as a new wide-spectrum light source. In addition, researchers have also studied the beam quality of photonic crystal fibers, an important nonlinear medium for supercontinuum light sources, but this method is also carried out for a single wavelength and cannot reflect the beam quality generated by photonic crystal fibers. Overall beam quality of supercontinuum sources [Y.Vidne and M.Rosenbluh, "Spatialmodes in a PCF fiber generated continuum," Opt. Express, 2005, 13, 9721-9728].

发明内容Contents of the invention

本发明要解决的技术问题是:提供一种用于测量超连续谱光源光束质量的测量装置及方法,采用该装置及方法可以将超连续谱光源作为一个整体对其光束质量进行评价与测量,而不是对其光束质量进行分波长的测量。The technical problem to be solved by the present invention is to provide a measuring device and method for measuring the beam quality of a supercontinuum light source, which can evaluate and measure the beam quality of the supercontinuum light source as a whole, Instead of measuring its beam quality by wavelength.

本发明的原理是:首先使用光谱仪对超连续谱光源的光谱进行测量,根据测量结果求得光谱分布的一阶矩即光谱重心。使用面阵CCD对超连续谱光束的近场光场分布以及远场光场分布进行测量,由测量结果使用二阶矩方法求得近场光斑半径与远场发散角。将光谱重心处的理想高斯基模光束作为参考光束,计算测得的超连续谱光束参数积(beam parameter product,记作BPP,即其近场光斑半径与远场发散角的乘积)与参考光束的光束参数积的比值,定义该比值为SC-M2因子(SC:supercontinuum,超连续谱),使用该值对超连续谱光源光束质量进行评价。The principle of the present invention is as follows: firstly, a spectrometer is used to measure the spectrum of a supercontinuum light source, and the first-order moment of the spectral distribution, that is, the spectral center of gravity, is obtained according to the measurement result. The near-field light field distribution and the far-field light field distribution of the supercontinuum beam are measured by an area array CCD, and the near-field spot radius and the far-field divergence angle are obtained by using the second-order moment method from the measurement results. Taking the ideal Gaussian mode beam at the center of gravity of the spectrum as the reference beam, calculate the measured supercontinuum beam parameter product (beam parameter product, denoted as BPP, that is, the product of the near-field spot radius and the far-field divergence angle) and the reference beam The ratio of the beam parameter product is defined as the SC-M 2 factor (SC: supercontinuum, supercontinuum), and this value is used to evaluate the beam quality of the supercontinuum light source.

本发明具体采用的技术方案是:The technical scheme that the present invention specifically adopts is:

一种用于测量超连续谱光源光束质量的测量装置,包括光谱仪、反射镜、宽波段分光棱镜、近场面阵CCD、远场面阵CCD和用于处理测量信息的计算机;所述光谱仪用于测量所述超连续谱光源的光谱;所述超连续谱光源输出的超连续谱光束经反射镜进行准直扩束,再经过宽波段分光棱镜进行分光得到反射光束和透射光束,所述反射光束由近场面阵CCD测量近场光场分布,所述透射光束由远场面阵CCD测量远场光场分布,所述远场面阵CCD距离所述反射镜的距离大于所述超连续谱光源光束的瑞利距离;所述计算机根据所述超连续谱光源的光谱、所述近场光场分布和所述远场光场分布计算得到测量结果。A measuring device for measuring the beam quality of a supercontinuum light source, comprising a spectrometer, a reflector, a broadband beam splitter, a near-field array CCD, a far-field array CCD and a computer for processing measurement information; the spectrometer is used for measuring The spectrum of the supercontinuum light source; the supercontinuum light beam output by the supercontinuum light source is collimated and expanded by a reflector, and then split through a wide-band beamsplitter prism to obtain a reflected beam and a transmitted beam, and the reflected beam is obtained by The near-field surface array CCD measures the near-field light field distribution, and the transmitted light beam is measured by the far-field surface array CCD to measure the far-field light field distribution. The distance; the computer calculates and obtains the measurement result according to the spectrum of the supercontinuum light source, the near-field light field distribution and the far-field light field distribution.

优选地,所述远场面阵CCD距离所述反射镜的距离为所述超连续谱光源光束的瑞利距离的10倍。Preferably, the distance between the far-field CCD and the reflector is 10 times the Rayleigh distance of the supercontinuum light source beam.

优选地,所述光谱仪的光谱测量范围包括整个所述超连续谱光源的光谱范围。Preferably, the spectral measurement range of the spectrometer includes the entire spectral range of the supercontinuum light source.

优选地,所述反射镜为镀金膜的离轴抛物面反射镜。Preferably, the reflector is a gold-coated off-axis parabolic reflector.

本发明还提供一种用于测量超连续谱光源光束质量的测量方法,包括以下步骤:The present invention also provides a method for measuring the beam quality of a supercontinuum light source, comprising the following steps:

S1.使用光谱仪对所述超连续谱光源的光谱进行测量,然后根据测量结果计算光谱分布的一阶矩,得到光谱重心;S1. Use a spectrometer to measure the spectrum of the supercontinuum light source, and then calculate the first-order moment of the spectral distribution according to the measurement results to obtain the spectral center of gravity;

S2.分别使用面阵CCD对超连续谱光束的近场光场分布以及远场光场分布进行测量,对测量结果分别采用二阶矩方法计算得到近场光斑半径和远场发散角,然后计算所述超连续谱光束的光束参数积;S2. Use the area array CCD to measure the near-field light field distribution and far-field light field distribution of the supercontinuum beam respectively, and use the second-order moment method to calculate the near-field spot radius and far-field divergence angle for the measurement results, and then calculate The beam parameter product of the supercontinuum beam;

S3.以步骤S1得到的光谱重心为波长构造理想高斯基模光束,计算所述理想高斯基模光束的光束参数积;S3. take the center of gravity of the spectrum obtained in step S1 as the wavelength to construct an ideal Gaussian mode beam, and calculate the beam parameter product of the ideal Gaussian mode beam;

S4.将步骤S2得到的超连续谱光束的的光束参数积除以步骤S3得到的理想高斯基模光束的光束参数积的结果作为用于评价所述超连续谱光源的光束质量的评价因子,对所述超连续谱光源的光束质量进行评价。S4. the result of dividing the beam parameter product of the supercontinuum beam obtained by step S2 by the beam parameter product of the ideal Gaussian mode beam obtained by step S3 is used as an evaluation factor for evaluating the beam quality of the supercontinuum light source, Evaluate the beam quality of the supercontinuum light source.

优选地,所述步骤S4中对所述超连续谱光源的光束质量进行评价的步骤包括:根据所述评价因子与1进行比较,评价因子接近1的光束为质量好的光束。Preferably, the step of evaluating the beam quality of the supercontinuum light source in the step S4 includes: comparing the evaluation factor with 1, and the beam with the evaluation factor close to 1 is a beam of good quality.

优选地,所述步骤S2中分别使用面阵CCD对超连续谱光束的近场光场分布以及远场光场分布进行测量的步骤包括:Preferably, the step of measuring the near-field light field distribution and the far-field light field distribution of the supercontinuum light beam using an area array CCD respectively in the step S2 includes:

S21.将超连续谱光源输出的超连续谱光束经过反射镜进行准直扩束;S21. Collimating and expanding the supercontinuum beam output by the supercontinuum light source through a reflector;

S22.再通过宽波段分光棱镜进行分光得到反射光束和透射光束;S22. Splitting light through a broadband beam splitting prism to obtain reflected light beams and transmitted light beams;

S23.对步骤S22得到的反射光束采用近场面阵CCD测量近场光场分布,并且对所述透射光束采用远场面阵CCD测量远场光场分布,所述远场面阵CCD距离所述反射镜的距离大于所述超连续谱光源光束的瑞利距离。S23. The reflected light beam obtained in step S22 adopts a near-field surface array CCD to measure the near-field light field distribution, and adopts a far-field surface array CCD to measure the far-field light field distribution for the transmitted light beam, and the far-field surface array CCD is at a distance from the reflector The distance is greater than the Rayleigh distance of the supercontinuum light source beam.

优选地,所述步骤S23中远场面阵CCD距离所述反射镜的距离为所述超连续谱光束的瑞利距离的10倍。Preferably, in the step S23, the distance between the CCD of the far-field surface array and the mirror is 10 times the Rayleigh distance of the supercontinuum light beam.

优选地,所述步骤S1中光谱仪的光谱测量范围包括整个所述超连续谱光源的光谱范围。Preferably, the spectral measurement range of the spectrometer in the step S1 includes the entire spectral range of the supercontinuum light source.

优选地,所述步骤S2中的反射镜为镀金膜的离轴抛物面反射镜。Preferably, the reflector in the step S2 is a gold-coated off-axis parabolic reflector.

本发明可以达到以下技术效果:对超连续谱光源光谱的测量计算其光谱重心,以光谱重心为中心波长构建高斯基模光束作为参考光束,通过对超连续谱光源近场束宽及远场发散角的测量,可对宽光谱超连续谱光源的光束质量进行整体评价,而不是仅仅对光源中某些光谱成分的光束质量进行评价与测量。The present invention can achieve the following technical effects: measure and calculate the spectral center of gravity of the supercontinuum light source spectrum, construct a Gaussian mode beam as a reference beam with the spectral center of gravity as the center wavelength, and measure the near-field beam width and far-field divergence of the supercontinuum light source The measurement of the angle can evaluate the beam quality of the wide-spectrum supercontinuum light source as a whole, instead of just evaluating and measuring the beam quality of certain spectral components in the light source.

附图说明Description of drawings

图1为超连续谱光源光谱测量示意图;Fig. 1 is a schematic diagram of supercontinuum light source spectrum measurement;

图2为本发明测量装置实施例的结构示意图;Fig. 2 is the structural representation of measuring device embodiment of the present invention;

图3为本发明测量方法的流程图;Fig. 3 is the flowchart of measuring method of the present invention;

图4是本发明测量方法实施例中测量近场光场分布和远场光场分布的流程图。Fig. 4 is a flow chart of measuring near-field light field distribution and far-field light field distribution in an embodiment of the measurement method of the present invention.

具体实施方式Detailed ways

图1所示为超连续谱光源光谱测量示意图,图中超连续谱输出端1输出的超连续谱由光谱仪2接收并对其光谱进行测量。测量过程中根据光谱仪2的性能选择分辨率,并且其光谱测量范围应覆盖整个超连续谱光源的光谱范围,一般为从所测光谱最大值对应的波长与小于该最大值60dB的值对应的波长之间的范围。Figure 1 is a schematic diagram of the spectrum measurement of a supercontinuum light source, in which the supercontinuum output from the supercontinuum output port 1 is received by a spectrometer 2 and its spectrum is measured. During the measurement process, the resolution is selected according to the performance of the spectrometer 2, and its spectral measurement range should cover the entire spectral range of the supercontinuum light source, generally from the wavelength corresponding to the maximum value of the measured spectrum to the wavelength corresponding to the value less than 60dB of the maximum value range between.

图2所示为本发明超连续谱光源光束质量测量装置的一个实施例。包括镀金膜的离轴抛物面反射镜3、分光棱镜4、近场面阵CCD 5和远场面阵CCD6,以及用于处理测量信息的计算机7。图中加箭头的实线表示光束。Fig. 2 shows an embodiment of the light beam quality measuring device of the supercontinuum light source of the present invention. It includes a gold-plated off-axis parabolic reflector 3, a dichroic prism 4, a near-field array CCD 5 and a far-field array CCD6, and a computer 7 for processing measurement information. A solid line with an arrow in the figure indicates a light beam.

由超连续谱输出端1输出的超连续谱光束经反射镜3准直扩束,之后经宽波段分光棱镜4分光,反射光束由近场面阵CCD 5测量近场光场分布,对测量结果使用二阶矩方法可以计算出光场近场光斑大小w。透射光束经传输十倍的超连续谱光束瑞利距离即图中所示的z=10L(L为超连续谱光束瑞利距离)时,光场分布是超连续谱光束的远场分布,由远场面阵CCD6测量,对结果使用二阶矩方法可以计算出光场近场光斑大小,将之除以传输距离即可得到光束远场发散角θ。同时根据超连续谱光源光谱分布计算得到的光谱重心,然后计算得到超连续谱光源的整体光束质量。The supercontinuum beam output from the supercontinuum output terminal 1 is collimated and expanded by the reflector 3, and then split by the wide-band beam splitter prism 4. The reflected beam is measured by the near-field array CCD 5. The near-field light field distribution is used for the measurement results. The second-order moment method can calculate the near-field spot size w of the light field. When the transmitted beam is transmitted ten times the Rayleigh distance of the supercontinuum beam, that is, z=10L shown in the figure (L is the Rayleigh distance of the supercontinuum beam), the light field distribution is the far field distribution of the supercontinuum beam, which is given by Far-field surface array CCD6 measurement, the second-order moment method can be used to calculate the light field near-field spot size, and divide it by the transmission distance to obtain the beam far-field divergence angle θ. At the same time, the center of gravity of the spectrum is calculated according to the spectral distribution of the supercontinuum light source, and then the overall beam quality of the supercontinuum light source is calculated.

图3和图4所示为本发明测量方法的流程图。本发明的测量方法的具体技术方案可以进一步说明如下:Fig. 3 and Fig. 4 show the flowchart of the measuring method of the present invention. The concrete technical scheme of measuring method of the present invention can be further described as follows:

首先使用光谱仪对超连续谱光源的光谱进行测量,测量过程中根据光谱仪的性能选择分辨率,并且光谱测量范围应覆盖整个超连续谱光源的光谱范围,一般为从所测光谱最大值对应的波长与小于该最大值60dB的值对应的波长之间的范围。对测得的光谱求一阶矩,如下式First, use a spectrometer to measure the spectrum of the supercontinuum light source. During the measurement process, select the resolution according to the performance of the spectrometer, and the spectral measurement range should cover the entire spectral range of the supercontinuum light source, generally from the wavelength corresponding to the maximum value of the measured spectrum The range between wavelengths corresponding to values 60 dB less than the maximum value. Find the first-order moment of the measured spectrum, as follows

λλ ‾‾ == ∫∫ 00 ∞∞ PP λλ (( λλ )) λdλλdλ ∫∫ 00 ∞∞ PP λλ (( λλ )) dλdλ -- -- -- (( 11 ))

式中Pλ(λ)为光谱分布,λ为波长,

Figure BDA00002900453100062
为光谱重心。由于光谱仪测得的数据为分立的数据点,并不是连续值,因此在计算中使用求和来代替积分,如下式Where P λ (λ) is the spectral distribution, λ is the wavelength,
Figure BDA00002900453100062
is the center of gravity of the spectrum. Since the data measured by the spectrometer are discrete data points and not continuous values, the summation is used instead of the integral in the calculation, as shown in the following formula

λλ ‾‾ == ΣΣ λλ PP λλ (( λλ )) λΔλλΔλ ΣΣ λλ PP λλ (( λλ )) ΔλΔλ -- -- -- (( 22 ))

式中Δλ为光谱仪的分辨率。where Δλ is the resolution of the spectrometer.

其次使用镀金膜的离轴抛物面反射镜对输出的超连续谱光束进行准直,然后使用对整个光谱范围响应的面阵CCD对反射镜输出附近对超连续谱光束的光场近场分布进行测量,对测量结果使用二阶矩方法求得光束的束宽。具体方法为首先使用一阶矩求得光束的重心,如下式Secondly, use a gold-coated off-axis parabolic mirror to collimate the output supercontinuum beam, and then use an area array CCD that responds to the entire spectral range to measure the near-field distribution of the supercontinuum beam near the output of the mirror , using the second-order moment method to obtain the beam width of the beam. The specific method is to first use the first-order moment to obtain the center of gravity of the beam, as follows

xx ‾‾ == ∫∫ ∫∫ -- ∞∞ ∞∞ -- xPwxya (( xx ,, ythe y )) dxdydxdy ∫∫ ∫∫ -- ∞∞ ∞∞ PP (( xx ,, ythe y )) dxdydxdy -- -- -- (( 33 ))

ythe y ‾‾ == ∫∫ ∫∫ -- ∞∞ ∞∞ yPyP (( xx ,, ythe y )) dxdydxdy ∫∫ ∫∫ -- ∞∞ ∞∞ PP (( xx ,, ythe y )) dxdydxdy -- -- -- (( 44 ))

式中P(x,y)为由面阵CCD测得的光场强度分布,x、y分别为面阵CCD两垂直的坐标轴。然后使用二阶矩计算光束束宽如下式In the formula, P(x, y) is the light field intensity distribution measured by the area array CCD, and x and y are the two vertical coordinate axes of the area array CCD, respectively. Then use the second moment to calculate the beam width as follows

ww xx == 22 ∫∫ ∫∫ -- ∞∞ ∞∞ (( xx -- xx ‾‾ )) 22 PP (( xx ,, ythe y )) dxdydxdy ∫∫ ∫∫ -- ∞∞ ∞∞ PP (( xx ,, ythe y )) dxdydxdy -- -- -- (( 55 ))

ww ythe y == 22 ∫∫ ∫∫ -- ∞∞ ∞∞ (( ythe y -- ythe y ‾‾ )) 22 PP (( xx ,, ythe y )) dxdydxdy ∫∫ ∫∫ -- ∞∞ ∞∞ PP (( xx ,, ythe y )) dxdydxdy -- -- -- (( 66 ))

式中wx、wy分别为光束半径。由于面阵CCD测量结果为分立数据,因此上式中的积分均应使用求和代替,如下式Where w x , w y are beam radii respectively. Since the measurement results of the area array CCD are discrete data, the integrals in the above formula should be replaced by summation, as shown in the following formula

xx ‾‾ == ΣΣ xx ΣΣ ythe y xPwxya (( xx ,, ythe y )) ΔxΔyΔxΔy ΣΣ xx ΣΣ ythe y ΣPΣP (( xx ,, ythe y )) ΔxΔyΔxΔy -- -- -- (( 77 ))

ythe y ‾‾ == ΣΣ xx ΣΣ ythe y yPyP (( xx ,, ythe y )) ΔxΔyΔxΔy ΣΣ xx ΣPΣP ythe y (( xx ,, ythe y )) ΔxΔyΔxΔy -- -- -- (( 88 ))

ww xx == 22 ΣΣ xx ΣΣ ythe y (( xx -- xx ‾‾ )) 22 PP (( xx ,, ythe y )) ΔxΔyΔxΔy ΣΣ xx ΣΣ ythe y PP (( xx ,, ythe y )) ΔxΔyΔxΔy -- -- -- (( 99 ))

ww ythe y == 22 ΣΣ xx ΣΣ ythe y (( ythe y -- ythe y ‾‾ )) 22 PP (( xx ,, ythe y )) ΔxΔyΔxΔy ΣΣ xx ΣΣ ythe y PP (( xx ,, ythe y )) ΔxΔyΔxΔy -- -- -- (( 1010 ))

式中Δx、Δy分别为面阵CCD的分辨率。Where Δx and Δy are the resolution of the area array CCD, respectively.

由测得的近场光束束宽wx和wy与光谱重心

Figure BDA00002900453100077
定义超连续谱光束的瑞利距离From the measured near-field beam width w x and w y and the spectral center of gravity
Figure BDA00002900453100077
Defining the Rayleigh distance of a supercontinuum beam

LL :: LL == ππ (( (( ww xx ++ ww ythe y )) // 22 )) 22 // λλ ‾‾ ..

由高斯基模光束的理论可知,在光束束腰位置两端瑞利距离以内可以认为光束是准直的,远大于瑞利距离处的光场分布可以认为是光束的远场分布。因此使用面阵CCD在距离离轴抛物面反射镜十倍瑞利距离处对超连续谱光束的光场分布分别进行测量。使用二阶矩方法同理求得光束束宽,由该束宽除以传输距离得到超连续谱光束远场发散角θx和θyAccording to the theory of Gaussian mode beams, the beam can be considered collimated within the Rayleigh distance at both ends of the beam waist position, and the light field distribution far greater than the Rayleigh distance can be considered as the far field distribution of the beam. Therefore, the light field distribution of the supercontinuum beam is measured respectively at a distance of ten times the Rayleigh distance from the off-axis parabolic mirror by using an area array CCD. The beam width is obtained similarly by using the second-order moment method, and the far-field divergence angles θ x and θ y of the supercontinuum beam are obtained by dividing the beam width by the transmission distance.

以光谱重心为波长构造理想高斯基模光束,作为评价超连续谱光源光束质量的参考光束,该光束的光束参数积为

Figure BDA00002900453100081
由测量得到的超连续谱光源光束束宽与远场发散角可以计算得到评价超连续谱光源整体光束质量的评价因子(记为SC-M2)如下式:The ideal Gaussian mode beam is constructed with the spectral center of gravity as the wavelength, and it is used as a reference beam for evaluating the beam quality of the supercontinuum light source. The beam parameter product of the beam is
Figure BDA00002900453100081
The evaluation factor (denoted as SC-M 2 ) for evaluating the overall beam quality of supercontinuum light sources can be calculated from the measured beam width and far-field divergence angle of supercontinuum light sources as follows:

SCSC -- Mm xx 22 == ππ λλ ‾‾ ww xx θθ xx -- -- -- (( 1111 ))

SCSC -- Mm ythe y 22 == ππ λλ ‾‾ ww ythe y θθ ythe y -- -- -- (( 1212 ))

使用该因子对超连续谱光源的光束质量进行评价,该值越接近1,说明光束质量越好。Use this factor to evaluate the beam quality of the supercontinuum light source, the closer the value is to 1, the better the beam quality.

Claims (10)

1.一种用于测量超连续谱光源光束质量的测量装置,其特征在于:包括光谱仪(2)、反射镜(3)、宽波段分光棱镜(4)、近场面阵CCD(5)、远场面阵CCD(6)和用于处理测量信息的计算机(7);所述光谱仪(2)用于测量所述超连续谱光源的光谱;所述超连续谱光源输出的超连续谱光束经反射镜(3)进行准直扩束,再经过宽波段分光棱镜(4)进行分光得到反射光束和透射光束,所述反射光束由近场面阵CCD(5)测量近场光场分布,所述透射光束由远场面阵CCD(6)测量远场光场分布;所述远场面阵CCD(6)距离所述反射镜(3)的距离大于所述超连续谱光源光束的瑞利距离;所述计算机(7)根据所述超连续谱光源的光谱、所述近场光场分布和所述远场光场分布计算得到测量结果。1. A measuring device for measuring the beam quality of a supercontinuum light source, characterized in that it includes a spectrometer (2), a reflector (3), a broadband beam splitter (4), a near field array CCD (5), a far A field array CCD (6) and a computer (7) for processing measurement information; the spectrometer (2) is used for measuring the spectrum of the supercontinuum light source; the supercontinuum beam output by the supercontinuum light source is reflected The mirror (3) collimates and expands the beam, and then splits the beam through the broadband beam splitter (4) to obtain the reflected beam and the transmitted beam. The near-field light field distribution of the reflected beam is measured by the near-field array CCD (5), and the transmitted beam The beam is measured by the far-field surface array CCD (6) to measure the far-field light field distribution; the distance between the far-field surface array CCD (6) and the mirror (3) is greater than the Rayleigh distance of the supercontinuum light source beam; the The computer (7) calculates and obtains measurement results according to the spectrum of the supercontinuum light source, the near-field light field distribution and the far-field light field distribution. 2.根据权利要求1所述的用于测量超连续谱光源光束质量的测量装置,其特征在于:所述远场面阵CCD(6)距离所述反射镜(3)的距离为所述超连续谱光源光束的瑞利距离的10倍。2. The measuring device for measuring the beam quality of a supercontinuum light source according to claim 1, characterized in that the distance between the far-field array CCD (6) and the mirror (3) is the supercontinuum 10 times the Rayleigh distance of the spectral source beam. 3.根据权利要求1或2所述的用于测量超连续谱光源光束质量的测量装置,其特征在于:所述光谱仪(2)的光谱测量范围包括整个所述超连续谱光源的光谱范围。3. The measuring device for measuring the beam quality of a supercontinuum light source according to claim 1 or 2, characterized in that: the spectral measurement range of the spectrometer (2) includes the entire spectral range of the supercontinuum light source. 4.根据权利要求1或2所述的用于测量超连续谱光源光束质量的测量装置,其特征在于:所述反射镜(3)为镀金膜的离轴抛物面反射镜。4. The measuring device for measuring the beam quality of a supercontinuum light source according to claim 1 or 2, characterized in that: the reflector (3) is a gold-coated off-axis parabolic reflector. 5.一种用于测量超连续谱光源光束质量的测量方法,其特征在于包括以下步骤:5. A method for measuring the beam quality of a supercontinuum light source, characterized in that it may further comprise the steps: S1.使用光谱仪对所述超连续谱光源的光谱进行测量,然后根据测量结果计算光谱分布的一阶矩,得到光谱重心;S1. Use a spectrometer to measure the spectrum of the supercontinuum light source, and then calculate the first-order moment of the spectral distribution according to the measurement results to obtain the spectral center of gravity; S2.分别使用面阵CCD对超连续谱光束的近场光场分布以及远场光场分布进行测量,对测量结果分别采用二阶矩方法计算得到近场光斑半径和远场发散角,然后计算所述超连续谱光束的光束参数积;S2. Use the area array CCD to measure the near-field light field distribution and far-field light field distribution of the supercontinuum beam respectively, and use the second-order moment method to calculate the near-field spot radius and far-field divergence angle for the measurement results, and then calculate The beam parameter product of the supercontinuum beam; S3.以步骤S1得到的光谱重心为波长构造理想高斯基模光束,计算所述理想高斯基模光束的光束参数积;S3. take the center of gravity of the spectrum obtained in step S1 as the wavelength to construct an ideal Gaussian mode beam, and calculate the beam parameter product of the ideal Gaussian mode beam; S4.将步骤S2得到的超连续谱光束的的光束参数积除以步骤S3得到的理想高斯基模光束的光束参数积的结果作为用于评价所述超连续谱光源的光束质量的评价因子,对所述超连续谱光源的光束质量进行评价。S4. the result of dividing the beam parameter product of the supercontinuum beam obtained by step S2 by the beam parameter product of the ideal Gaussian mode beam obtained by step S3 is used as an evaluation factor for evaluating the beam quality of the supercontinuum light source, Evaluate the beam quality of the supercontinuum light source. 6.根据权利要求5所述的用于测量超连续谱光源光束质量的测量方法,其特征在于:所述步骤S4中对所述超连续谱光源的光束质量进行评价的步骤包括:根据所述评价因子与1进行比较,评价因子接近1的光束为质量好的光束。6. the method for measuring the beam quality of a supercontinuum light source according to claim 5, characterized in that: the step of evaluating the beam quality of the supercontinuum light source in the step S4 comprises: according to the The evaluation factor is compared with 1, and the beam with the evaluation factor close to 1 is a beam with good quality. 7.根据权利要求5或6所述的用于测量超连续谱光源光束质量的测量方法,其特征在于:所述步骤S2中分别使用面阵CCD对超连续谱光束的近场光场分布以及远场光场分布进行测量的步骤包括:7. according to claim 5 or 6 described for measuring the measuring method of supercontinuum light source beam quality, it is characterized in that: use area array CCD respectively in the described step S2 to the near-field light field distribution of supercontinuum light beam and The steps for measuring the far-field optical field distribution include: S21.将超连续谱光源输出的超连续谱光束经过反射镜进行准直扩束;S21. Collimating and expanding the supercontinuum beam output by the supercontinuum light source through a reflector; S22.再通过宽波段分光棱镜进行分光得到反射光束和透射光束;S22. Splitting light through a broadband beam splitting prism to obtain reflected light beams and transmitted light beams; S23.对步骤S22得到的反射光束采用近场面阵CCD测量近场光场分布,并且对所述透射光束采用远场面阵CCD测量远场光场分布,所述远场面阵CCD距离所述反射镜的距离大于所述超连续谱光源光束的瑞利距离。S23. The reflected light beam obtained in step S22 adopts a near-field surface array CCD to measure the near-field light field distribution, and adopts a far-field surface array CCD to measure the far-field light field distribution for the transmitted light beam, and the far-field surface array CCD is at a distance from the reflector The distance is greater than the Rayleigh distance of the supercontinuum light source beam. 8.根据权利要求7所述的用于测量超连续谱光源光束质量的测量方法,其特征在于:所述步骤S23中远场面阵CCD距离所述反射镜的距离为所述超连续谱光束的瑞利距离的10倍。8. The measuring method for measuring the beam quality of a supercontinuum light source according to claim 7, characterized in that: in the step S23, the distance between the far-field surface array CCD and the reflector is the ray of the supercontinuum beam. 10 times the benefit distance. 9.根据权利要求8所述的用于测量超连续谱光源光束质量的测量方法,其特征在于:所述步骤S1中光谱仪的光谱测量范围包括整个所述超连续谱光源的光谱范围。9. The measurement method for measuring the beam quality of a supercontinuum light source according to claim 8, characterized in that: the spectral measurement range of the spectrometer in the step S1 includes the entire spectral range of the supercontinuum light source. 10.根据权利要求8所述的用于测量超连续谱光源光束质量的测量方法,其特征在于:所述步骤S2中的反射镜为镀金膜的离轴抛物面反射镜。10. The measurement method for measuring the beam quality of a supercontinuum light source according to claim 8, characterized in that: the reflector in the step S2 is a gold-coated off-axis parabolic reflector.
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CN107607195A (en) * 2017-08-07 2018-01-19 南京理工大学 A kind of beam quality measuring method obtained in real time based on complex amplitude
CN107607195B (en) * 2017-08-07 2019-11-15 南京理工大学 A Beam Quality Measurement Method Based on Complex Amplitude Acquisition in Real Time
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