CN107167301A - The method for evaluating laser beam quality Improvement - Google Patents
The method for evaluating laser beam quality Improvement Download PDFInfo
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- CN107167301A CN107167301A CN201710560143.1A CN201710560143A CN107167301A CN 107167301 A CN107167301 A CN 107167301A CN 201710560143 A CN201710560143 A CN 201710560143A CN 107167301 A CN107167301 A CN 107167301A
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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Abstract
The present invention provides a kind of method for evaluating laser beam quality Improvement.By determining the near-field intensity distribution and far-field intensity distribution of Laser Output Beam, power P IR values in the ring for obtaining light beam are calculated.The potentiality that beam quality is lifted are evaluated according to power P IR values in ring.The measurement of power P IR values is convenient in ring, calculate simple, explicit physical meaning, is a kind of easy, quick, method of the beam quality Improvement of effectively evaluating laser.
Description
Technical field
The present invention relates to laser technology field, a kind of side for evaluating laser beam quality Improvement is specifically related to
Method.
Background technology
Beam quality is the important parameter for describing laser.The quality of beam quality determines that the remote of laser beam is used
Effect.Due to the influence of the factors such as optical element thermal deformation, optical medium thermal distoftion, the beam quality that laser is directly exported leads to
It is often poor, its beam quality need to further be lifted using adaptive optics system.However, the lifting effect of beam quality not only with
The performance of adaptive optics system is relevant, relevant also with the characteristic of Laser Output Beam.Different types of laser, its light beam
The Improvement of quality is different.Using same adaptive optics system, the beam quality of some laser output can be big
Width is lifted, and the beam quality of some laser output only being capable of small elevation.Although existing a variety of methods evaluate laser at present
Beam quality, but also lack simple and effective evaluation method for the Improvement of laser beam quality.
The content of the invention
In order to solve the above-mentioned technical problem, laser beam quality lifting is evaluated it is an object of the invention to provide one kind to dive
The method of power.
The present invention provides a kind of method for evaluating laser beam quality Improvement, comprises the following steps：
Step S100：Measure Laser Output Beam near-field intensity distribution and far-field intensity distribution after, by formula (1)~
(2) low frequency power P is calculated1With high frequency power P2,
Wherein,For the polar coordinate representation of far-field intensity distribution, R1For the radius of far field beam the first diffraction Crape ring,
R2For the radius of the diffraction Crape ring of far field beam the 4th；
Step S200：Power P IR in ring is calculated according to formula (3)：
Wherein, P1For low frequency power, P2For high frequency power；
Step S300：Judge in ring that power P IR is proximate to 1 and is also proximate to 0, if power P IR is close to 1, laser in ring
The potentiality of the beam quality lifting of device are big；If power P IR is close to 0 in ring, the potentiality of the beam quality lifting of laser are small.
Further, the radius R of the first diffraction of far field beam Crape ring1With the radius R of the diffraction Crape ring of far field beam the 4th2, press
Formula (4)~(5) are calculated：
Wherein, λ is the wavelength of laser beam, and f is the focal length of far-field measurement lens, and D is the equivalent diameter of laser beam.
Further, the equivalent diameter D of laser beam is calculated as follows：
Wherein, σ2For the second moment of near field light intensity.
Further, the second moment σ of near field light intensity2Calculate as follows：
Wherein,For the polar coordinate representation of near-field intensity distribution.
The technique effect of the present invention：
1st, the present invention provides the method for evaluating laser beam quality Improvement, only need to measure high-energy laser output light
The near-field intensity distribution and far-field intensity distribution of beam, and it is that can obtain power P IR values in ring to carry out simple calculate, by that can have
Imitate lifting of the power P IR values to laser beam quality in the ring for the far-field intensity distribution situation for reflecting Laser Output Beam
Potentiality are evaluated, and are capable of the potentiality of Efficient Characterization Laser Output Beam increased quality.This method has simple, fast spy
Point.
2nd, the present invention provides the method for evaluating laser beam quality Improvement, and be particularly suitable for use in high-energy laser light beam
The evaluation of increased quality potentiality.
It is specific to refer to the various implementations proposed according to the method for the evaluation laser beam quality Improvement of the present invention
Example it is described below, will cause apparent in terms of the above and other of the present invention.
Brief description of the drawings
Fig. 1 is the method flow schematic diagram for the evaluation laser beam quality Improvement that the present invention is provided；
Fig. 2 is measurement near-field intensity distribution and the light path signal used in far-field intensity distribution in the preferred embodiment of the present invention
Figure；
Fig. 3 is incipient beam of light quality factor β in the preferred embodiment of the present invention0Pass through Unit 61 for 4.2 high-energy laser
Adaptive optics system correction after beam quality result schematic diagram；
Fig. 4 is incipient beam of light quality factor β in the preferred embodiment of the present invention0Pass through Unit 91 for 4.2 high-energy laser
Adaptive optics system correction after beam quality result schematic diagram；
Fig. 5 is incipient beam of light quality factor β in the preferred embodiment of the present invention0Pass through Unit 127 for 4.2 high-energy laser
Adaptive optics system correction after beam quality result schematic diagram.
Marginal data：
1st, high-energy laser；2nd, high reflective mirror；3rd, attenuator；4th, spectroscope；5th, near field measurement CCD camera；6th, far-field measurement
Lens (focal length is f)；7th, far-field measurement CCD camera.
Embodiment
The accompanying drawing for constituting the part of the application is used for providing a further understanding of the present invention, schematic reality of the invention
Apply example and its illustrate to be used to explain the present invention, do not constitute inappropriate limitation of the present invention.
The method for the evaluation laser beam quality Improvement that the present invention is provided is particularly suitable for use in high-energy laser 1.This
The high-energy laser 1 at place refers to continuous-wave laser of the average output power in more than 10kW.
Referring to Fig. 1, the method for the evaluation laser beam quality Improvement that the present invention is provided comprises the following steps：
Step S100：Measure Laser Output Beam near-field intensity distribution and far-field intensity distribution after, by formula (1)~
(2) low frequency power P is calculated1With high frequency power P2,
Wherein,For the polar coordinate representation of far-field intensity distribution, R1For the radius of far field beam the first diffraction Crape ring,
R2For the radius of the diffraction Crape ring of far field beam the 4th；
Step S200：Power P IR in ring is calculated according to formula (3),
Wherein, P1For low frequency power and P2For high frequency power；
Step S300：Judge in ring that power P IR is proximate to 1 and is also proximate to 0, if power P IR is close to 1, laser in ring
The potentiality of the beam quality lifting of device are big；If power P IR is close to 0 in ring, the potentiality of the beam quality lifting of laser are small.
The Improvement of laser beam quality depends primarily on the spatial frequency composition of output beam wavefront distortion.Typically
For, if the spatial frequency of wavefront distortion is based on low-frequency component, the potentiality of laser beam quality lifting are big；If wavefront is abnormal
The spatial frequency of change is based on radio-frequency component, then the potentiality of laser beam quality lifting are small.
The method that the present invention is provided, by analyzing the far-field intensity distribution situation of Laser Output Beam, obtains laser
The Improvement of beam quality.Power P IR values represent LOW FREQUENCY DISTORTION composition in output beam and accounted in resultant distortion composition in ring
Share, be capable of the potentiality of Efficient Characterization Laser Output Beam increased quality.P1Represent first in far field beam intensity distribution
Diffraction Crape ring reflects the LOW FREQUENCY DISTORTION composition in light beam to power between the 4th diffraction Crape ring；P2Represent far field beam intensity
Power in distribution outside the 4th diffraction Crape ring, reflects the high frequency distortion composition in light beam.0.7024 is ideal beam far field
The power ratio outside power and the first diffraction Crape ring in intensity distribution between first to fourth diffraction Crape ring, here as
Normalized parameter.
Power P IR values are between 0 and 1 in ring, represent in output beam LOW FREQUENCY DISTORTION composition in resultant distortion composition
The share accounted for.If power P IR values illustrate this light beam based on LOW FREQUENCY DISTORTION composition, its wavefront is easy close to 1 in the ring of a certain light beam
In adaptive optics system correction, the potentiality of its beam quality lifting are big；If power P IR values are said close to 0 in the ring of a certain light beam
This bright light beam is based on high frequency distortion composition, and its wavefront is difficult to be corrected by adaptive optics system, and it is latent that its beam quality is lifted
Power is small.So as to whether be worth further correcting it by the easy all kinds of laser beams of evaluation of power P IR values in ring, carry
High light beam quality.
Near-field intensity distribution and far-field intensity distribution in the method provided by the present invention can be determined conventionally.For example
Using the light path shown in Fig. 2, the near-field intensity distribution and far-field intensity distribution of Laser Output Beam are measured.Near-field intensity distribution
Polar coordinate representation beThe polar coordinate representation of far-field intensity distribution is
It is preferred that, R1For the radius of far field beam the first diffraction Crape ring, R2For the radius of the diffraction Crape ring of far field beam the 4th,
It can be tried to achieve according to existing method according to gained near-field intensity distribution and far-field intensity distribution.It is specific as follows：
Wherein, λ is the wavelength of laser beam, and f is the focal length of far-field measurement lens 6, and D is the equivalent diameter of laser beam.
It is preferred that, the equivalent diameter D of wherein laser beam can be tried to achieve as the following formula：
Wherein, σ2For the second moment of near field light intensity.
It is preferred that, the second moment σ of near field light intensity2It can try to achieve as the following formula：
Wherein,For the polar coordinate representation of near-field beam intensity distribution.
Below in conjunction with specific simulation example, the method that the present invention is provided is described in detail.
First, referring to Fig. 2, the near-field intensity distribution and far field intensity of the light path measurement output beam of high-energy laser 1 are built
Distribution.It is saturating that the light path includes the high-energy laser 1 of light path connection, high reflective mirror 2, attenuator 3, spectroscope 4 and far-field measurement successively
Mirror 6.Laser beam is after 4 points of spectroscope is two-way, and beam of laser enters near field measurement CCD camera 5 and is captured.Another Shu Ji
Light enters far-field measurement CCD camera 7 after far-field measurement lens 6.
The light beam that high-energy laser 1 is exported passes through (the reflectivity of high reflective mirror 2>99.8%) it is divided into two parts, work(after reflecting
The larger reflected light of rate is unprocessed.By attenuator 3, (uniformity is better than 0.01 to lower-powered transmitted light, and optical density regards light
Depending on beam intensity) after decay to milliwatt magnitude.Light beam after decay is split the (splitting ratio 50 of mirror 4:50) it is divided into two-way, enters all the way
It is mapped to (the number of pixels of near field measurement CCD camera 5>640 × 480, dynamic range>In 8bit), the near field intensity point of light beam is measured
(the number of pixels of far-field measurement CCD camera 7 is incided after far-field measurement lens 6 (equivalent focal length is f) in cloth, another road>640
× 480, dynamic range>In 8bit), the far-field intensity distribution of light beam is measured.
Secondly, according to formula (1)-(7), the value of power P IR in the ring for obtaining light beam is calculated.
To illustrate the validity of the power P IR values description beam quality Improvement of high-energy laser 1 in ring, numerical simulation
The beam quality lifting situation of high-energy laser 1 with different wavefront distortions.In numerical computations, the output light of high-energy laser 1
Beam has different wavefront distortion situations.176 kinds of wavefront distortions are randomly generated, these wavefront distortions have different space frequencies
Rate is distributed, and adjusts the size of these wavefront distortions so that the output beam quality factor-beta of high-energy laser 10It is 4.2.According to
Formula (1)-(7) calculate the PIR values of light beam in the case of this 176 kinds respectively.Then, Unit 61, Unit 91,127 are respectively adopted
The preferable adaptive optics system of unit carries out wavefront correction to above-mentioned 176 kinds of high energy laser beams, calculates obtain 176 kinds high respectively
Beam quality factor β after energy laser beam alignment1.The PIR values of high energy laser beam and the beam quality factor β after correction1Between
Relation is as seen in figures 3-5.
From acquired results, the energy of the lifting situation of the beam quality of high-energy laser 1 not only with adaptive optics system
Power is relevant, and also the PIR values with light beam are closely related.For same adaptive optics system, the output beam of high-energy laser 1
PIR values are bigger, the beam quality factor β after adaptive optics system correction1It is smaller, show that the beam quality of high-energy laser 1 is carried
Rising must be more.From figure 2 it can be seen that for the adaptive optics system of Unit 61, the PIR of the output beam of high-energy laser 1
Value shows that the Improvement of its beam quality is very huge more than 0.83, and its beam quality factor can be brought up to close to 1 by 4.2
Level；For the adaptive optics system of Unit 91, the PIR values of the output beam of high-energy laser 1 are more than 0.7, then show it
The Improvement of beam quality is very huge, and its beam quality factor can bring up to the level close to 1 by 4.2；For Unit 127
Adaptive optics system, the PIR values of the output beam of high-energy laser 1 are more than 0.35 Improvement for showing its beam quality
Very huge, its beam quality factor can bring up to the level close to 1 by 4.2.To sum up, the ring of the output beam of high-energy laser 1
Middle power P IR values can effectively characterize in the Improvement of its beam quality, ring that power P IR values are bigger, show beam quality
The potentiality of lifting are bigger.
Those skilled in the art will be clear that the scope of the present invention is not restricted to example discussed above, it is possible to which it is carried out
Some changes and modification, the scope of the present invention limited without departing from appended claims.Although oneself is through in accompanying drawing and explanation
The present invention is illustrated and described in book in detail, but such explanation and description are only explanations or schematical, and it is nonrestrictive.
The present invention is not limited to the disclosed embodiments.
By the research to accompanying drawing, specification and claims, when implementing the present invention, those skilled in the art can be with
Understand and realize the deformation of the disclosed embodiments.In detail in the claims, term " comprising " is not excluded for other steps or element,
And indefinite article " one " or " one kind " be not excluded for it is multiple.The some measures quoted in mutually different dependent claims
The fact does not mean that the combination of these measures can not be advantageously used.Any reference marker in claims is not constituted pair
The limitation of the scope of the present invention.
Claims (4)
1. a kind of method for evaluating laser beam quality Improvement, it is characterised in that comprise the following steps：
Step S100：After the near-field intensity distribution and far-field intensity distribution that measure the Laser Output Beam, by formula (1)~
(2) low frequency power P is calculated1With high frequency power P2,
Wherein,For the polar coordinate representation of far-field intensity distribution, R1For the radius of far field beam the first diffraction Crape ring, R2For
The radius of the diffraction Crape ring of far field beam the 4th；
Step S200：Power P IR in ring is calculated according to formula (3)：
<mrow>
<mi>P</mi>
<mi>I</mi>
<mi>R</mi>
<mo>=</mo>
<mfrac>
<mn>1</mn>
<mn>0.7024</mn>
</mfrac>
<mo>&CenterDot;</mo>
<mfrac>
<msub>
<mi>P</mi>
<mn>1</mn>
</msub>
<mrow>
<msub>
<mi>P</mi>
<mn>1</mn>
</msub>
<mo>+</mo>
<msub>
<mi>P</mi>
<mn>2</mn>
</msub>
</mrow>
</mfrac>
<mo>-</mo>
<mo>-</mo>
<mo>-</mo>
<mrow>
<mo>(</mo>
<mn>3</mn>
<mo>)</mo>
</mrow>
</mrow>
Wherein, P1For the low frequency power, P2For the high frequency power；
Step S300：Judge in the ring that power P IR is proximate to 1 and is also proximate to 0, if power P IR is close to 1 in the ring,
The potentiality of the beam quality lifting of the laser are big；If power P IR is close to 0, the light beam of the laser in the ring
The potentiality of increased quality are small；The bigger potentiality for representing laser beam quality lifting of power P IR values are bigger in ring, power in ring
The smaller potentiality for representing laser beam quality lifting of PIR values are smaller.
2. the method according to claim 1 for evaluating laser beam quality Improvement, it is characterised in that the light beam
The radius R of far field the first diffraction Crape ring1With the radius R of the diffraction Crape ring of far field beam the 4th2, calculated by formula (4)~(5)：
<mrow>
<msub>
<mi>R</mi>
<mn>1</mn>
</msub>
<mo>=</mo>
<mn>1.22</mn>
<mfrac>
<mi>&lambda;</mi>
<mi>D</mi>
</mfrac>
<mo>&CenterDot;</mo>
<mi>f</mi>
<mo>-</mo>
<mo>-</mo>
<mo>-</mo>
<mrow>
<mo>(</mo>
<mn>4</mn>
<mo>)</mo>
</mrow>
</mrow>
<mrow>
<msub>
<mi>R</mi>
<mn>2</mn>
</msub>
<mo>=</mo>
<mn>4.24</mn>
<mfrac>
<mi>&lambda;</mi>
<mi>D</mi>
</mfrac>
<mo>&CenterDot;</mo>
<mi>f</mi>
<mo>-</mo>
<mo>-</mo>
<mo>-</mo>
<mrow>
<mo>(</mo>
<mn>5</mn>
<mo>)</mo>
</mrow>
</mrow>
Wherein, λ is the wavelength of laser beam, and f is the focal length of far-field measurement lens, and D is the equivalent diameter of laser beam.
3. the method according to claim 2 for evaluating laser beam quality Improvement, it is characterised in that the laser
The equivalent diameter D of light beam is calculated as follows：
<mrow>
<mi>D</mi>
<mo>=</mo>
<mn>2</mn>
<msqrt>
<mrow>
<mn>2</mn>
<msup>
<mi>&sigma;</mi>
<mn>2</mn>
</msup>
</mrow>
</msqrt>
<mo>-</mo>
<mo>-</mo>
<mo>-</mo>
<mrow>
<mo>(</mo>
<mn>6</mn>
<mo>)</mo>
</mrow>
</mrow>
Wherein, σ2For the second moment of near field light intensity.
4. the method according to claim 3 for evaluating laser beam quality Improvement, it is characterised in that the near field
The second moment σ of light intensity2Calculate as follows：
Wherein,For the polar coordinate representation of the near-field beam intensity distribution.
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| CN115683576A (en) * | 2022-12-28 | 2023-02-03 | 中国科学院长春光学精密机械与物理研究所 | Detection device and method for optical coupling device |
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| Publication number | Publication date |
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| CN107167301B (en) | 2019-07-30 |
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