CN100562723C - The positive-branch confocal unstable resonator in-cavity aberration detection system - Google Patents
The positive-branch confocal unstable resonator in-cavity aberration detection system Download PDFInfo
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Abstract
Positive-branch confocal unstable resonator is transferred chamber and aberration detection system, it is characterized in that: it is by He-Ne light source, positive-branch confocal unstable resonator chamber mirror, Beam matching telescope, Shack-Hartmann wavefront sensor, four-way limit intensity sensor, image pick-up card, computing machine is formed, wherein positive-branch confocal unstable resonator chamber mirror is by 45 ° of reflector group, output coupling mirror, and convex reflecting mirror, concave mirror constitute.Adopt ultimate principle of the present invention can realize accurately that the fast velocity modulation of optical cavity chamber is coaxial, and to in-cavity aberratio survey, analyzing and processing and judgement, and the Shack-Hartmann wavefront sensor that adopts among the present invention also has advantages such as simple in structure, easy to use, that antijamming capability is strong, and Aberration Analysis software then has the advantage that real-time is good, be convenient to implement the in-cavity aberratio dynamic instrumentation.
Description
Technical field
The present invention relates to the resonator cavity in-cavity aberration detection system that a kind of optical detection system uses, particularly positive-branch confocal unstable resonator and transfer chamber and aberration detection system.
Background technology
Because the laser works wavelength that adopts at present the positive-branch confocal unstable resonator structure is generally all at region of ultra-red, whether resonator cavity was adjusted just very crucially before work so, and this is to guarantee that resonator cavity exports one of important prerequisite of better beam quality.There are forefathers to do some explorations and trial at present in this respect.
People such as Jack Hanlon are at " Alignment Technique for Unstable Resonators ", Jack Hanlon and Steve Aiken, Applied Optics, Vol.13, No.11, November1974, a kind of method is proposed among the pp.2461, promptly near the mirror of concave surface chamber, insert 45 ° of catoptrons of a band coupling aperture, utilize an auto-collimator, surely be coupled respectively output cavity mirror center, protruding anti-mirror center and recessed anti-mirror center are adjusted recessed anti-mirror again the autocollimation picture of concave, convex chamber mirror are overlapped.Precision is higher though this method is adjusted, and shortcoming is to look for the spherical mirror autocollimation as consuming time very long, and requires auto-collimator to possess big focusing range.
People such as William F.Krupke are at " Properties of an Unstable ConfocalResonator Laser System ", IEEE Journal of Quantum Electronics, Vol.QE-5, No.12, December 1969, research positive-branch confocal chamber CO in pp.575～586
2What then adopt during the Laser Output Beam characteristic is such detection method, be that an electron optics thermal imaging system (Electro-Optics Associates thermal screen) detection light intensity is placed in the near field, use the far field to monitor far-field intensity distribution by amount detector (A High Speed HgCdTe Detector) more separately.Though this method can be seen near, the far field intensity pattern of light beam intuitively, distinct disadvantage is intuitively reflected collimated light beam phase characteristic, and the resultant effect that will not reflect is subdivided into each rank optical aberration, instructs justice also not obvious to the optical cavity adjustment.
People such as D.Anafi are at " Intracavity Adaptive Optics.2:Tilt Correctionperformance ", Applied Optics, Vol.20, No.11,1 June 1981, research positive-branch confocal chamber CO in pp.1926～1932
2The adaptive optics timing of laser instrument in-cavity aberratio is then placed a reflectivity near the output coupling mirror in the chamber be that 3% chamber inner light beam beam splitter (Intracavity BeamSplitter) comes intensity mode in the direct detection chamber, advantage is directly to reflect light intensity pattern in the chamber, but its shortcoming may directly influence coupling output cavity mould at the aberration owing to itself, even generation higher order mode, and the generally not anti-strong illumination of this class device, thereby can not directly place high-energy laser to survey.
Summary of the invention
Technology provided by the present invention is dealt with problems and is: overcome the deficiencies in the prior art, provide a kind of positive-branch confocal unstable resonator to transfer chamber and aberration detection system, but within a short period of time, fast velocity modulation chamber was coaxial, shortened the preceding stand-by period of laser instrument bright dipping, can also provide the low order, higher order aberratons data, intensity distributions etc. of coupling output beam, thereby overall understanding is transferred chamber light beam quality and is transferred the coaxial degree in chamber.
Technical solution of the present invention is: positive-branch confocal unstable resonator is transferred chamber and aberration detection system, its characteristics are: it is by the He-Ne light source, positive-branch confocal unstable resonator chamber mirror, the Beam matching system, Shack-Hartmann wavefront sensor, the four-quadrant intensity sensor, spectroscope, image pick-up card, data handling machine is formed, wherein positive-branch confocal unstable resonator chamber mirror is by 45 ° of reflector group, output coupling mirror, convex reflecting mirror, concave mirror constitutes, the He-Ne light source is before 45 ° of reflector group, two catoptron angles in 45 ° of reflector group are 90 °, convex reflecting mirror is positioned at before the concave mirror, and output coupling mirror is positioned at before the convex reflecting mirror; Spectroscope is positioned at coupling output beam the place ahead, the four-quadrant intensity sensor is positioned at spectroscopical transmission direction, the Beam matching system is positioned at spectroscopical reflection direction, the output of Beam matching system is delivered in the Data Management Analysis computing machine through Shack-Hartmann wavefront sensor, and the measurement result of four-quadrant intensity sensor output is simultaneously also delivered in the Data Management Analysis computing machine.
It is also close before that described convex reflecting mirror is positioned at concave mirror, the two position relation does not also require very accurate, but must guarantee that the resonator cavity chamber is long long for the desired chamber of design, distance+second catoptron of distance+first catoptron to the second catoptron of the long L=light beam in resonator cavity chamber from first catoptron to convex reflecting mirror is to the distance of concave mirror.
Described output coupling mirror is positioned at before the convex reflecting mirror and near convex reflecting mirror, and with optical axis included angle be 45 °.
Have the aperture of Φ 1.5mm on described first catoptron (21).
Described Shack-Hartmann wavefront sensor is 32 * 32 microlens array, photoelectric coupled device formation by the beam system that contracts, sub-aperture number, wherein microlens array is contracting between beam system and the photoelectric coupled device, and photoelectric coupled device is positioned on the focal plane of microlens array.
Described four-way limit intensity sensor mainly is 32 * 32 microlens array, four-quadrant facula mass center detector and photoelectric signal processing circuit formation by the beam system that contracts, sub-aperture number, wherein microlens array is contracting between beam system and the four-quadrant facula mass center detector, and four-quadrant facula mass center detector is positioned on the focal plane of microlens array.
Adopt above-mentioned detection system to carry out the positive-branch confocal unstable resonator cavity adjustment method, its characteristics are: comprise following optical cavity set-up procedure:
(1) adjusting the chamber mirror makes the long L in chamber long for the design chamber;
(2), make the He-Ne light source evenly pass first catoptron in 45 ° of reflector group, adjust convex reflecting mirror again, make first catoptron and convex reflecting mirror common optical axis;
(3) adjust the concave mirror mirror, make second catoptron and convex reflecting mirror common optical axis;
(4) in light path, place output coupling mirror, output coupling mirror places before the convex reflecting mirror and close convex reflecting mirror, adjust output coupling mirror and systematic optical axis angle at 45, detect by an unaided eye, transfer the even annulus of the good coupling output beam intensity distributions in chamber for weakening gradually from inside to outside, the ratio of obstruction is about 1: 2;
(5) with intensity sensor output beam intensity is measured, required each intensity distributions in limit even substantially; Adopt Shack-Hartmann wavefront sensor that Beam Wave-Front is measured simultaneously, each rank Zernike aberration coefficients＜0.15 that requires Shack-Hartmann wavefront sensor to record, and the criterion of having adjusted as resonator cavity.
The present invention compared with prior art has following beneficial effect:
(1) aligns a confocal resonator and accomplished rapid adjustment, shortened the preceding stand-by period of laser instrument bright dipping.The present invention transfers the chamber common optical axis respectively owing at first adopting, promptly adjust the He-Ne laser instrument earlier, first catoptron in 45 ° of reflector group, the convex reflecting mirror common optical axis, make second catoptron, concave mirror common optical axis in convex reflecting mirror, the 45 ° of reflector group again, thereby make the total system common optical axis, the output beam homogeneity that detects by an unaided eye earlier, this is the coarse adjustment process.If this step does to such an extent that illustrate then that better optical cavity is coaxial substantially.Again in conjunction with the corrugated aberration characteristic (measuring in real time) of Shack-Hartmann wavefront sensor reflection, each rank aberration Zernike coefficient after segmentation reflects the adjustment state of resonator cavity in real time, make comprehensive targetedly judgement or adjustment measure, for example if the 3rd Zernike coefficient (out of focus) is bigger, then can adjust the long L in chamber, this is the accurate adjustment process, thereby reaches the purpose in fast velocity modulation chamber.
(2) can measure monitoring in real time to the aberration in the chamber after adjusting, in time judge the coaxial state of unsteady cavity, advantage such as the in-cavity aberratio sniffer of employing has simple in structure, easy to use, and antijamming capability is strong.The present invention is because the conventional beam aberration measurement generally adopts interferometer, from shape of interference fringe reflected collimated light beam aberration characteristic.But the interferometer shortcoming is a poor anti jamming capability, must use on air cushion vibrationproof platform; And structure is complicated, must adjust (making reference light form interference fringe with treating photometry) during measurement to interferometer light path, and is consuming time longer.And Shack-Hartmann wavefront sensor is simple in structure: constitute an integral body by the beam system that contracts, microlens array and ccd detector.Easy to use: as not need to adjust the inner light path of Wavefront sensor, only need tested light beam and Wavefront sensor are adjusted coaxial getting final product.Antijamming capability is strong: need not air cushion vibrationproof platform, just can use under the common application environment.
(3) the present invention adopts the intensity and the phase place of near field light beam is measured simultaneously, determine the adjustment state of unsteady cavity with this dual criterion, and far-field measurement method commonly used reflection is the resultant effect of beam quality, be not subdivided into each rank aberration, and measuring system is comparatively complicated.
Description of drawings
Fig. 1 is a system architecture schematic block diagram of the present invention;
The hot spot that Fig. 2 detects for Shack-Hartmann wavefront sensor carries out near field light beam PHASE DISTRIBUTION (the 100 frames are averaged) situation that obtains behind the wavefront reconstruction through type method;
Fig. 3 is the near field of light beam intensity mode profile figure that detects;
Fig. 4 images in the hot spot dot chart on the CCD target surface for Shack-Hartmann wavefront sensor detects;
The far-field spot image of Fig. 5 for calculating by the aberration corrugated;
The encircled power scatter chart of Fig. 6 for calculating by aberration coefficients;
Fig. 7 is the process flow diagram of wavefront calculations routine analyzer of the present invention.
Embodiment
As shown in Figure 1, detection system of the present invention is by He-Ne laser instrument 1, chamber, positive-branch confocal chamber mirror group, spectroscope 9, optical match (expanding the bundle or the bundle that contracts) system 6, Hartmann-Shack Wavefront sensor 7, four-way limit intensity sensor 8 and Data Management Analysis computing machine 10 are formed, wherein the positive-branch confocal chamber is folding die cavity, two that comprise the light path of turning back are 45 ° of reflector group 2, output coupling mirror 3, convex reflecting mirror 4, concave mirror 5 constitutes, first catoptron 21 in 45 ° of reflector group 2 wherein, the angle of second catoptron 22 is 90 °, convex reflecting mirror 4 be arranged in 45 ° of reflector group 2 open first catoptron 21 of coupling aperture (have on first catoptron 21 coupling aperture order be to make He-Ne light 1 to claim to transfer chamber light again, be coupled into resonator cavity fully and adjust state to check optical cavity, but it is excessive that this coupling aperture should not opened, otherwise will influence the back and forth oscillatory process of light beam in the chamber, be generally about Φ 1.5mm) before, and the position is near concave mirror 5, the position, mirror chamber of concave mirror 5 and convex reflecting mirror 4 does not require accurate especially, but should guarantee that the resonator cavity chamber is long for designing the long L in chamber.Concave mirror 5 is arranged in before 45 ° of reflector group, 2 second catoptrons 22, and output coupling mirror 3 is positioned at before the convex reflecting mirror 4 and presses close to 4 (position does not require accurate especially), with optical axis included angle be 45 °, to realize the side-coupled output of light beam.He-Ne laser instrument (λ=0.6328 μ m), be used for introducing accent chamber light, Beam matching (expanding the bundle or the bundle that contracts) system 6 matches the microlens array caliber size with the incident beam bore, image in again on the CCD target surface, Shack-Hartmann wavefront sensor (7) is mainly by the beam system that contracts (being Φ 4.16mm with the directional light of the Φ 120mm bundle that contracts), sub-aperture number is 32 * 32 microlens array, photoelectric coupled device (ccd detector) constitutes, wherein microlens array is contracting between beam system and the photoelectric coupled device, and photoelectric coupled device is positioned on the focal plane of microlens array.The parameter of Shack-Hartmann wavefront sensor is: bore φ 80mm, sub-aperture number 32 * 32 arrays, dynamic range ± 1.5 λ/sub-aperture, wavefront measurement precision PV＜1/10 λ, RMS＜1/20 λ, integral inclination measurement range ± 50 ".
The course of work of the present invention is: at first adopt and adjust respectively that element makes the light path common optical axis in the chamber, promptly adjust He-Ne laser instrument (1) earlier, first catoptron (21) in 45 ° of reflector group (2), convex mirror (4) common optical axis, make convex mirror (4) again, second catoptron (22), concave mirror (5) common optical axis, put into output coupling mirror (3) output at last and transfer chamber light, thereby make the total system common optical axis, the output beam homogeneity detects by an unaided eye earlier, this is the coarse adjustment course of work, if coarse adjustment is finished better (the even annulus of coupling output beam for weakening gradually from inside to outside, the ratio of obstruction is about 1: 2) and is illustrated that then optical cavity is coaxial substantially.Secondly, Shack-Hartmann wavefront sensor (7) and intensity sensor (8) are measured output coupling mirror (3) output annular beam intensity and PHASE DISTRIBUTION.Wavefront reconstruction software carries out real-time wavefront reconstruction to (speed was 25 frame/seconds) hot spot dot chart (referring to Fig. 4) that Shack-Hartmann wavefront sensor (7) collects, and calculates each rank aberration Zernike coefficient (about 6～7 frame/seconds of computing velocity) and demonstration in real time.Each rank coefficient has reflected the light beam aberration characteristic, the adjustment state that also reflects simultaneously resonator cavity in real time, thereby can make comprehensive targetedly judgement or adjustment measure, for example if the 3rd Zernike coefficient (out of focus) is bigger, can adjust then that (the chamber mirror is undertaken by accurate machine construction along axle or vertical axial adjustment, and precision is 0.02mm to the long L in chamber; The chamber mirror rotates to adjust and is undertaken by stepper motor, precision 0.6 "), and at every turn to observing each rank aberration Zernike coefficient after the mirror adjustment of chamber again, until each rank coefficient＜0.15, as the criterion that resonator cavity has been adjusted, this also is the accurate adjustment process of optical cavity.More than be the dynamic duty process of Fig. 1.
Figure 7 shows that corrugated of the present invention analysis software is the wavefront reconstruction process software of independent research, promptly calculate microlens array picture point barycenter and carry out the software of wave front restoration, this software is made up of Shack-Hartmann wavefront sensor 7 demarcating modules and wavefront measurement module, the demarcating module selection standard is with reference to parallel beam, the actual light beam aberration is for this normative reference, and the wavefront measurement module is calculated (about 6 frame/seconds) in real time and shown current corrugated aberration Zernike coefficient, can provide Zernike aberration coefficients (the preceding 10 rank) curve map and the average Zernike aberration coefficients on 100 frame corrugateds, the PV on 100 frame corrugateds (peak-to-valley value) and RMS (root-mean-square value) curve map and mean value thereof, the x of light beam barycenter, y direction drift etc.Data processing software can carry out the wavefront reconstruction playback with the data that collect, and reproduces the dynamic changing process of corrugated aberration.
Fig. 7 is a wavefront reconstruction software basic flow sheet, the annular of positive-branch confocal unstable resonator output transfers chamber light to be surveyed by the CCD in the Shack-Hartmann wavefront sensor, but what it detected is intensity distributions dot chart (shown in Figure 4) only, for being finally inversed by the light beam PHASE DISTRIBUTION, need carry out wavefront reconstruction.As shown in Figure 7: before measuring, need earlier sensor to be demarcated (before promptly selecting standard directional light or standard wave, for example choose light beam that parallel light tube sends as measurement standard, the aberration that then records all is for this standard), after the microlens array imaging of light beam so to be measured (aberration wavefront) in Shack-Hartmann wavefront sensor, the light beam picture point barycenter to be measured in each sub-aperture just has difference with respect to calibration light beam barycenter.Thereby can carry out wavefront reconstruction to light beam based on Zernike polynomial expression wavefront reconstruction principle, following steps are arranged in brief: obtain light beam picture point center-of-mass coordinate to be measured in each sub-aperture earlier, and then obtain wavefront slope G (promptly with respect to the deviation of calibrating the light beam barycenter), need calculate Zernike restructuring matrix Z and generalized inverse Z thereof simultaneously
+, computation schema Jacobian matrix A has A=Z then
+G.Further can calculate aberration wavefront to be measured and relevant optical property parameter again.Wherein the CCD sampling rate was 25 frame/seconds in the Hartmann sensor; Software reads the image (read a two field picture earlier, read next frame after handling again) that CCD collects in real time, carries out wavefront reconstruction and demonstration (about 6～7 frame/seconds of speed).Because each rank aberration Zernike coefficient, aberration wavefront and the relevant optical property parameter (as far-field characteristic, encircled power etc.) of light beam to be measured all obtain in real time and are shown by software, have so also just finished the real-time detection process of chamber inner light beam aberration.
As shown in Figure 1, the quick cavity adjustment method of positive-branch confocal unstable resonator of the present invention, step is as follows:
(1) determines that at first the chamber is long, adjust the chamber mirror and make the long L in chamber long for the design chamber.For the long chamber of growing (as several meters), chamber, and do not require that beginning just is accurate to millimeter, this is owing to require L=(R1-R2)/2, R1 and R2 are respectively the radius-of-curvature in concave mirror and convex reflecting mirror mirror chamber, and the processing of chamber mirror always has error, the aberration characteristic that can measure according to Shack-Hartmann wavefront sensor is to chamber progress row accurate adjustment, even out of focus aberration coefficients minimum.
(2) light beam coupling aperture on first catoptron 21 in 45 ° of reflector group 2 of sending of He-Ne laser instrument 1 enters resonator cavity, adjust He-Ne laser instrument 1, need to guarantee 2 points: 1. requiring to pass first catoptron, 21 back laser faculas is a speck very uniformly; 2. should make the chamber light of propagating behind the segment distance of wearing at first arrive convex reflecting mirror 4, adjust He-Ne laser instrument 1 and convex reflecting mirror 4, spot center is overlapped with convex reflecting mirror 4 centers.
(3) adjust convex reflecting mirror 4, return first catoptron 21 along former road after making beam reflection, arrive second catoptron, 22, the second catoptrons 22 and first catoptron, 21 common structures reflector group 2 at 45 then.
(4) second catoptrons 22 are designed to micro-adjusting mechanism, finely tuning second catoptron 22 makes the hot spot after the reflection be positioned at concave mirror 5 centers, after the vibration light beam partly enters the visual field in the chamber, adjust convex reflecting mirror 4 and concave mirror 5 simultaneously, keep reflector group 2 motionless, principle is to make second catoptron 22 coaxial with convex reflecting mirror 4 earlier, make the concave mirror 5 and second reflector group 22 coaxial again, detect by an unaided eye the even circular distribution that vibration is good, transfer the coaxial light beam in chamber to show as from inside to outside weakens gradually, light and shade replaces on minute surface.
(5) treat in resonator cavity, to put into output coupling mirror 3 after step (4) is finished, output coupling mirror 3 must place convex reflecting mirror 4 before also near it, adjust simultaneously output coupling mirror 3 front and back positions and with systematic optical axis angle at 45, through the annulus that the good light beam visual inspection of the adjustment of resonator cavity coupling output weakens from inside to outside gradually for very even, intensity, the ratio of obstruction is about 1: 2.
(6) the coupling output beam is after spectroscope 9 reflection, through Beam matching system 6 (if can mate just, then not light requirement bundle matching system 6) with the H-S bore, with H-S Wavefront sensor 7 carry out that Beam Wave-Front is surveyed and the analysis light beam in aberration.Should carefully adjust sensor when noting measuring with elimination chamber outer incline aberration, and He-Ne laser should be done suitably decay, the hot spot that CCD is collected is even and unsaturated, could reduce error effectively like this when carrying out wavefront reconstruction.
(7) the coupling output beam enters intensity sensor 8 after spectroscope 9 transmissions, requires the interior intensity distributions of its four-way limit even substantially.If less demanding, can be without intensity sensor 8, chamber light intensity distributions homogeneity is transferred in the output that directly detects by an unaided eye.
(8) Shack-Hartmann wavefront sensor 7 carries out real-time wavefront reconstruction with the hot spot dot matrix that measures, ultimate principle is as follows: in sensor, the hot spot that each lenticule forms drops in the subwindow scope corresponding on the CCD target surface, and hot spot is that the side-play amount with respect to the lenticule focus is directly proportional with the average gradient of incident beam wavefront in sub-aperture on the CCD target surface in the focal plane.Facula mass center coordinate (x
c, y
c) computing formula be:
In the following formula: x
i, y
jBe (i, j) coordinate of individual pixel on the CCD target surface; I
IjBe (i, j) light intensity signal received of individual pixel-by-pixel basis on the CCD target surface.
According to the principle of work of Shack-Hartmann wavefront sensor, before experiment, incide on the sensor with the standard parallel beam earlier, the spot array that form this moment on the CCD target surface can be considered each lenticule focus, with each hot spot coordinate (x of this moment
Co, y
Co) preserved and be used as demarcating initial point.In experiment, exist the light beam of Wave-front phase distortion to incide on the sensor, and on the CCD target surface, form spot array, calculate facula mass center coordinate (x
c, y
c) with respect to the side-play amount of demarcating initial point:
Δx＝x
c-x
co Δy＝y
c-y
co (II)
The average gradient G of incident beam Wave-front phase x and y direction in sub-aperture then
xAnd G
yFor:
(III) in the formula: s is sub-aperture area; (x y) is the incident beam Wave-front phase to W; F is the lenticule focal length.
Carry out wavefront reconstruction according to type method wavefront reconstruction principle again, can obtain each rank aberration Zernike coefficient and complete Wave-front phase.
Wavefront measurement and calculation procedure can show the barycenter drift curve of each rank aberration Zernike coefficient (preceding 35 rank), corrugated distribution, corrugated PV and RMS curve, x and y direction etc. in real time in real time.
(9) judge according to the aberration situation that calculates, (mainly see preceding 10 rank with each rank aberration coefficients that Shack-Hartmann wavefront sensor 7 measures, ignore 1,2 inclination) all less＜0.15, and the four-way that intensity sensor 8 detects limit intensity distributions is even substantially, the criterion of having adjusted as resonator cavity; If some aberration Zernike coefficient is bigger, then make and judge the corresponding accent chamber measure of taking according to different situations, if the 3rd Zernike coefficient (out of focus) is bigger, then tackles the long L in chamber and adjust.
Below promptly finished the rapid adjustment and the in-cavity aberratio of positive-branch confocal unstable resonator have been surveyed.
Shown in Figure 2, for the hot spot that Shack-Hartmann wavefront sensor detects (is removed the 1st, 2 rank), near field light beam PHASE DISTRIBUTION (the 100 frames are averaged) situation that obtains during reconstruct after type method carries out wavefront reconstruction.Corrugated PV (peak-to-valley value) is 1.042 λ, and RMS (root-mean-square value) is 0.140 λ, and wavelength X is 0.6328 μ m.
Table 1 has provided pairing each the rank aberration Zernike coefficient (preceding 10 rank) in Fig. 2 corrugated, PV and RMS value and each rank aberration implication explanation.
Table 1
Table 1 is preceding 10 Zernike coefficient tables of the coupling output beam corrugated aberration that records.Wherein Z1 and Z2 represent that x and y direction tilt, be illustrated in the whole deviation (being difficult in the adjustment it is decreased to zero fully) of light beam barycenter to be measured with the calibration light beam barycenter of the imaging of CCD target surface, but do not reflect the corrugated aberration characteristic, therefore in wavefront reconstruction, often these two are ignored.Two expressions of Z4, Z5 low order astigmatism, Z6, Z7 represent x and y direction coma, and Z8, Z9 represent that higher-order astigmatism, Z10 represent spherical aberration.Rule of thumb, (this example provides preceding 10 rank to general each rank Zernike aberration RMS value, if have relatively high expectations desirable preceding 35 rank)＜0.15 (ignoring Z1 and Z2), it is better to think that promptly optical cavity is adjusted state, it is the almost plane ripple that the chamber light beam is transferred in output, at this moment laser instrument can be started working, and even Z4, Z5 are bigger, and explanation may be that the stress that chamber mirror clamping tension brings causes; If Z6 or Z7 are bigger, concave mirror 5 or convex reflecting mirror 4 are described, and laterally off-axis (along x and y direction) is more; If Z3 or Z10 are bigger, illustrate that optical cavity may depart from desirable chamber and grow morely etc., so just can reflect that the actual light intonation puts in order state according to each rank Zernike aberration characteristic, can adjust optical cavity targetedly.
Fig. 6 distributes for the encircled power that calculates according to aberration coefficients, and curve " 1 " number is theoretical aberrationless value, and curve " 2 " number is an actual value.To transfer the chamber light quality to enclose the place at 0.4 ring be 1.46 times of diffraction limits (theoretical value is 1 times of diffraction limit) in output in the present embodiment, illustrates that optical cavity has reached to transfer the coaxial state in chamber preferably.
Claims (5)
1, the positive-branch confocal unstable resonator in-cavity aberration detection system, it is characterized in that: it is by He-Ne light source (1), positive-branch confocal unstable resonator chamber mirror, Beam matching system (6), Shack-Hartmann wavefront sensor (7), four-quadrant intensity sensor (8), spectroscope (9), Data Management Analysis computing machine (10) is formed, wherein positive-branch confocal unstable resonator chamber mirror is by 45 ° of reflector group (2), output coupling mirror (3), convex reflecting mirror (4), concave mirror (5) constitutes, He-Ne light source (1) in 45 ° of reflector group (2) before, angle in 45 ° of reflector group (2) between first catoptron (21) and second catoptron (22) is 90 °, has the aperture of Φ 1.5mm on described first catoptron (21); Convex reflecting mirror (4) is positioned at concave mirror (5) before, and output coupling mirror (3) is positioned at convex reflecting mirror (4) before; Spectroscope (9) is positioned at coupling output beam the place ahead, four-quadrant intensity sensor (8) is positioned at the transmission direction of spectroscope (9), Beam matching system (6) is positioned at the reflection direction of spectroscope (9), the output of Beam matching system (6) is delivered in the Data Management Analysis computing machine (10) through Shack-Hartmann wavefront sensor (7), and the measurement result of four-quadrant intensity sensor (8) output is simultaneously also delivered in the Data Management Analysis computing machine (10).
2, positive-branch confocal unstable resonator in-cavity aberration detection system according to claim 1, it is characterized in that: described convex reflecting mirror (4) is positioned at concave mirror (5) before also near (5), the two position relation does not also require very accurate, but must guarantee that the resonator cavity long L in chamber is long for designing desired chamber, the distance of distance+first catoptron (21) of the long L=light beam in resonator cavity chamber from first catoptron (21) to convex reflecting mirror (4) to distance+second catoptron (22) of second catoptron (22) to concave mirror (5).
3, positive-branch confocal unstable resonator in-cavity aberration detection system according to claim 1 is characterized in that: described output coupling mirror (3) is positioned at convex reflecting mirror (4) before and near convex reflecting mirror (4), and with optical axis included angle be 45 °.
4, positive-branch confocal unstable resonator in-cavity aberration detection system according to claim 1, it is characterized in that: described Shack-Hartmann wavefront sensor (7) is 32 * 32 microlens array, photoelectric coupled device formation by the beam system that contracts, sub-aperture number, wherein microlens array is contracting between beam system and the photoelectric coupled device, and photoelectric coupled device is positioned on the focal plane of microlens array.
5, positive-branch confocal unstable resonator in-cavity aberration detection system according to claim 1, it is characterized in that: described four-quadrant intensity sensor (8) mainly is 32 * 32 microlens array, four-quadrant facula mass center detector and photoelectric signal processing circuit formation by the beam system that contracts, sub-aperture number, wherein microlens array is contracting between beam system and the four-quadrant facula mass center detector, and four-quadrant facula mass center detector is positioned on the focal plane of microlens array.
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| CN103913299B (en) * | 2014-04-10 | 2016-08-17 | 中国人民解放军国防科学技术大学 | Optical resonator pattern based on optical cavity ring-down method and loss measurement apparatus and method |
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| CN113933496B (en) * | 2021-07-19 | 2023-02-03 | 安徽桐康医疗科技股份有限公司 | Calibration device for fluorescence immunoassay quantitative analyzer |
| CN113985539B (en) * | 2021-11-04 | 2022-09-23 | 中国人民解放军国防科技大学 | Array beam tilt aberration correction system |
| CN114720402A (en) * | 2022-03-31 | 2022-07-08 | 中国科学院光电技术研究所 | Calibration device for composite sensing passive cavity |
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