CN100589780C - A reflective artificial lens aberration Hartmann measuring instrument - Google Patents

A reflective artificial lens aberration Hartmann measuring instrument Download PDF

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CN100589780C
CN100589780C CN200710304513A CN200710304513A CN100589780C CN 100589780 C CN100589780 C CN 100589780C CN 200710304513 A CN200710304513 A CN 200710304513A CN 200710304513 A CN200710304513 A CN 200710304513A CN 100589780 C CN100589780 C CN 100589780C
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aberration
measuring instrument
reflective
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CN101278867A (en
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戴云
饶学军
王海英
张雨东
王宁利
熊瑛
万修华
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Institute of Optics and Electronics of CAS
Beijing Tongren Hospital
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Beijing Tongren Hospital
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Abstract

反射式人工晶体像差哈特曼测量仪主要包括:光源、光束匹配系统、标准球面反射镜、孔径分割元件、光电探测器和计算机,其中孔径分割元件、光电探测器构成哈特曼波前传感器;由光源发出的光被准直为平行光出射,该平行光依次经反射镜和分光镜穿过待测人工晶体,透射光波到达标准球面反射镜,轴向调整标准球面反射镜,使待测人工晶体的后焦点与标准球面反射镜的球心重合,反射光波沿原光路返回再次穿过待测人工晶体,依次经分光镜和光束匹配系统后,被孔径分割元件分割采样并聚焦到光电探测器上形成光斑阵列,采集的光斑数据送入计算机,经处理得到待测人工晶体的像差。本发明结构简单、稳定,为眼科临床人工晶体移植以及个性化人眼像差矫正人工晶体的加工和检测提供方便、快捷和可靠的检测工具。

Figure 200710304513

Reflective intraocular lens aberration Hartmann measuring instrument mainly includes: light source, beam matching system, standard spherical mirror, aperture division element, photodetector and computer, among which the aperture division element and photodetector constitute the Hartmann wavefront sensor ; The light emitted by the light source is collimated as parallel light, and the parallel light passes through the artificial crystal to be tested through the reflector and the beam splitter in turn, and the transmitted light wave reaches the standard spherical reflector, and the standard spherical reflector is adjusted axially to make the test The back focus of the artificial lens coincides with the center of the standard spherical mirror, and the reflected light wave returns along the original optical path and passes through the artificial lens to be tested again. After passing through the beam splitter and the beam matching system in turn, it is divided and sampled by the aperture division element and focused to the photoelectric detector. A light spot array is formed on the device, and the collected light spot data is sent to the computer, and the aberration of the artificial lens to be tested is obtained after processing. The invention has a simple and stable structure, and provides a convenient, fast and reliable detection tool for the implantation of ophthalmic clinical artificial lens and the processing and detection of individualized human eye aberration correction artificial lens.

Figure 200710304513

Description

一种反射式人工晶体像差哈特曼测量仪 A reflective artificial lens aberration Hartmann measuring instrument

技术领域 technical field

本发明涉及一种反射式人工晶体像差哈特曼测量仪,它是眼科临床移植人工晶体时的专用设备,同时也是生产人工晶体的一种高精度设备。The invention relates to a reflective Hartmann measuring instrument for intraocular lens aberration, which is a special equipment for clinical ophthalmology implantation of intraocular lens, and is also a high-precision equipment for producing intraocular lens.

背景技术 Background technique

目前,人工晶体已广泛应用于高度屈光不正和白内障手术后的光学矫正,但大都只能矫正人眼低阶像差如离焦、像散等。研究表面,人眼光学系统不仅存在低阶像差,还存在高阶像差如彗差、球差等,同时矫正人眼低阶和高阶像差可以获得更佳的视觉质量改善(“VisualPerformance after correcting the monochromatic and chromatic aberrations of the eye”,Geun-YoungYoon and David R.Williams,J.Opt.Soc.Am.A/Vol.19,No.2/February)。因此,单一矫正人眼低阶像差的人工晶体已不能满足人们对人眼屈光矫正的需求,能够矫正人眼高阶像差的人工晶体成为新的研究热点和未来发展的趋势。实现这一目标的基础是人眼高阶像差矫正人工晶体的制作,而人工晶体检测是制作的基础。At present, intraocular lenses have been widely used in the optical correction of high refractive errors and cataract surgery, but most of them can only correct low-order aberrations of the human eye such as defocus and astigmatism. Research shows that the human eye optical system not only has low-order aberrations, but also high-order aberrations such as coma, spherical aberration, etc. Correcting the low-order and high-order aberrations of the human eye at the same time can achieve better visual quality improvement (“VisualPerformance after correcting the monochromatic and chromatic aberrations of the eye", Geun-YoungYoon and David R.Williams, J.Opt.Soc.Am.A/Vol.19, No.2/February). Therefore, intraocular lenses that can only correct low-order aberrations of the human eye can no longer meet people's needs for refractive correction of the human eye, and intraocular lenses that can correct high-order aberrations of the human eye have become a new research hotspot and a future development trend. The basis for realizing this goal is the production of high-order aberration-correcting intraocular lenses of the human eye, and the detection of intraocular lenses is the basis of production.

由于人眼高阶像差矫正人工晶体不仅矫正人眼低阶像差,同时还要矫正人眼高阶像差,单纯的光焦度检测不能满足对高阶像差矫正人工晶体的检测要求,需要全面客观地测量人工晶体各阶像差(低阶和高阶)。目前,人眼高阶像差矫正人工晶体还是一种新颖的人工晶体,配套技术还在积极研究之中,本发明提出采用哈特曼波前探测技术实现人工晶体像差测量,它不但可以测量人工晶体低阶像差,还可以测量人工晶体高阶像差。Since the high-order aberration-correcting intraocular lens of the human eye not only corrects the low-order aberration of the human eye, but also corrects the high-order aberration of the human eye, the pure power detection cannot meet the detection requirements for the high-order aberration-correcting intraocular lens. It is necessary to measure the various order aberrations (low order and high order) of IOL comprehensively and objectively. At present, the high-order aberration-correcting intraocular lens of the human eye is still a novel type of intraocular lens, and the supporting technology is still under active research. The present invention proposes to use the Hartmann wavefront detection Low-order aberrations of intraocular lenses can also be used to measure high-order aberrations of intraocular lenses.

哈特曼波前传感器是一种结构简单、稳定的波前传感器,它将入射光束分割采样并聚焦到光电探测器上,通过数据处理获得入射光波前相位分布。目前,哈特曼波前传感器主要有基于微透镜阵列(“哈特曼波前传感器的应用”,姜文汉,鲜浩,杨泽平等,量子电子学报,15卷2期228-235页,1998年)和基于微棱镜阵列(“Hartmann-Shack Wavefront Sensor Based on aMicro-Grating Array”,Haiying Wang,Haifeng Duan,Changtao Wang,Yudong Zhang,SPIE,Vol.6018,2005)两种形式。哈特曼波前探测技术已广泛用于人眼像差测量、光束质量诊断、光学元件检测等诸多领域。但是,哈特曼波前传感器应用于人工晶体像差测量尚属空白,本发明正是针对这一情况提出的。The Hartmann wavefront sensor is a simple and stable wavefront sensor, which divides and samples the incident light beam and focuses it on the photodetector, and obtains the wavefront phase distribution of the incident light through data processing. At present, Hartmann wavefront sensors are mainly based on microlens arrays ("Application of Hartmann wavefront sensors", Jiang Wenhan, Xian Hao, Yang Zeping, Journal of Quantum Electronics, Volume 15, Issue 2, Pages 228-235, 1998 Year) and two forms based on microprism array (“Hartmann-Shack Wavefront Sensor Based on a Micro-Grating Array”, Haiying Wang, Haifeng Duan, Changtao Wang, Yudong Zhang, SPIE, Vol.6018, 2005). Hartmann wavefront detection technology has been widely used in many fields such as human eye aberration measurement, beam quality diagnosis, and optical component inspection. However, the application of the Hartmann wavefront sensor to the measurement of the aberration of the artificial lens is still blank, and the present invention is proposed for this situation.

发明内容 Contents of the invention

本发明所提供的技术解决问题是:克服现有技术的不足,提供一种通用性好,可以对任意屈光度的人工晶体进行像差测量的反射式人工晶体像差哈特曼测量仪,为眼科临床人工晶体移植以及人工晶体的加工和检测等提供方便、快捷和可靠的检测。The problem solved by the technology provided by the present invention is: to overcome the deficiencies of the prior art, to provide a reflective intraocular lens aberration Hartmann measuring instrument with good versatility, which can measure the aberration of intraocular lenses of any diopter Provide convenient, fast and reliable detection for clinical intraocular lens implantation and processing and detection of intraocular lens.

本发明的技术解决方案是:反射式人工晶体像差哈特曼测量仪,主要包括:光源、光束滤波系统、光束匹配系统、标准球面反射镜、孔径分割元件、光电探测器和计算机,其中孔径分割元件、光电探测器构成哈特曼波前传感器;由光源发出的光经光束滤波系统滤波和准直为平行光后出射,该平行光依次经反射镜和分光镜穿过待测人工晶体,透射光波到达标准球面反射镜,轴向调整标准球面反射镜,使待测人工晶体的后焦点与标准球面反射镜的球心重合,反射光波沿原光路返回再次穿过待测人工晶体,依次经分光镜和光束匹配系统后,被孔径分割元件分割采样并聚焦到光电探测器上形成光斑阵列,光电探测器将采集的光斑数据送入计算机,经计算机处理得到待测人工晶体的像差。The technical solution of the present invention is: reflective intraocular lens aberration Hartmann measuring instrument, mainly including: light source, beam filtering system, beam matching system, standard spherical mirror, aperture division element, photodetector and computer, wherein the aperture Segmentation elements and photodetectors constitute the Hartmann wavefront sensor; the light emitted by the light source is filtered and collimated by the beam filtering system and then emitted as parallel light. The transmitted light wave reaches the standard spherical reflector, and the standard spherical reflector is adjusted axially so that the back focus of the IOL to be tested coincides with the spherical center of the standard spherical reflector, and the reflected light wave returns along the original optical path and passes through the IOL to be tested again. After the beam splitter and the beam matching system, it is divided and sampled by the aperture division element and focused on the photodetector to form a spot array. The photodetector sends the collected spot data to the computer, and the aberration of the artificial lens to be tested is obtained by computer processing.

所述的标准球面反射镜可以是标准凹球面反射镜,也可以是标准凸球面反射镜。The standard spherical reflector can be a standard concave spherical reflector, or a standard convex spherical reflector.

所述的孔径分割元件为微透镜阵列,或微棱镜阵列;当孔径分割元件为微透镜阵列时,光电探测器件位于微透镜阵列焦面上;当为微棱镜阵列时,在微棱镜阵列后面还加有傅立叶透镜或成像透镜,傅立叶透镜或成像透镜紧靠微棱镜阵列,光电探测器件位于傅立叶透镜或成像透镜的焦面上。The aperture division element is a microlens array, or a microprism array; when the aperture division element is a microlens array, the photodetection device is located on the focal plane of the microlens array; A Fourier lens or an imaging lens is added, the Fourier lens or the imaging lens is close to the microprism array, and the photoelectric detection device is located on the focal plane of the Fourier lens or the imaging lens.

所述的光束滤波系统由针孔和准直镜构成,光束经针孔滤波,由准直镜准直为平行光出射。The beam filtering system is composed of a pinhole and a collimating mirror. The beam is filtered by the pinhole and collimated by the collimating mirror to be parallel light to exit.

所述的光电探测器既可以是成像相机,也可以是位置敏感器阵列。The photodetector can be either an imaging camera or a position sensor array.

本发明与现有技术相比的优点在于:The advantage of the present invention compared with prior art is:

(1)本发明采用哈特曼波前传感器测量人工晶体,探测光束两次穿过待测人工晶体,通过沿光轴方向前后移动反射镜或固定反射镜,沿光轴方向前后移动其余部分可以方便地实现对人工晶体屈光度进行补偿,将较大的离焦与其余像差分开测量,减小人工晶体像差测量对哈特曼动态范围的要求,仪器通用性好,可以对任意屈光度的人工晶体进行像差测量,为眼科临床人工晶体移植以及人工晶体的加工和检测等提供方便、快捷和可靠的检测。(1) The present invention adopts the Hartmann wavefront sensor to measure the artificial crystal, and the detection beam passes through the artificial crystal to be measured twice, and by moving the mirror or fixing the mirror back and forth along the optical axis direction, the remaining part can be moved back and forth along the optical axis direction. It is convenient to realize the compensation of the diopter of the intraocular lens, measure the larger defocus and other aberrations separately, and reduce the requirement of the Hartmann dynamic range for the measurement of the aberration of the intraocular lens. The aberration measurement of the lens provides convenient, fast and reliable detection for ophthalmology clinical intraocular lens implantation and intraocular lens processing and testing.

(2)本发明所采用的沿光轴方向前后移动反射镜或其余部分对人工晶体屈光度进行补偿,补偿量等于人工晶体光焦度大小,因此在获得人工晶体综合像差的同时可以获得晶体屈光度的大小,通用性好。(2) The present invention adopts moving the reflector back and forth along the optical axis direction or other parts to compensate the diopter of the intraocular lens, and the compensation amount is equal to the focal power of the intraocular lens, so the crystal diopter can be obtained while obtaining the comprehensive aberration of the intraocular lens Small size, good versatility.

(3)本发明通过测量哈特曼传感器光斑的位置偏移,由复原算法重构波前像差,相对于干涉仪像差检测方法,本发明对环境要求低,容易实现小口径(人工晶体光学区5mm左右)复杂高阶像差检测,具有结构简单和稳定的优点。(3) The present invention reconstructs the wavefront aberration by the restoration algorithm by measuring the position offset of the Hartmann sensor spot. Compared with the interferometer aberration detection method, the present invention has low requirements on the environment and is easy to realize small-caliber (intraocular lens) The optical zone is about 5mm) complex high-order aberration detection, with the advantages of simple structure and stability.

附图说明 Description of drawings

图1为本发明基于微透镜哈特曼的人工晶体像差测量原理图;Fig. 1 is the principle diagram of the artificial lens aberration measurement based on the microlens Hartmann of the present invention;

图2为本发明中基于微透镜阵列的哈特曼波前传感器结构及工作原理示意图;Fig. 2 is the Hartmann wavefront sensor structure and working principle schematic diagram based on microlens array among the present invention;

图3为本发明基于微棱镜哈特曼的人工晶体像差测量原理图;Fig. 3 is the schematic diagram of the artificial lens aberration measurement based on the microprism Hartmann of the present invention;

图4为本发明中基于微棱镜阵列的哈特曼波前传感器结构及工作原理示意图。Fig. 4 is a schematic diagram of the structure and working principle of the Hartmann wavefront sensor based on the microprism array in the present invention.

具体实施方式 Detailed ways

如图1所示,为本发明中的孔径分割元件为微透镜阵列的人工晶体像差测量原理图,它包括光源1、光束滤波系统,光束匹配系统8、标准球面反射镜5、孔径分割元件,即微透镜阵列91、光电探测器92和计算机10,其中孔径分割元件91和光电探测器92构成哈特曼波前传感器,光束滤波系统由针孔2和准直镜3构成,光束匹配系统8由两个不同焦距的透镜或反射镜构成的光束匹配望远镜。由光源1发出的光,经针孔2滤波,由准直镜3准直为平行光出射,经反射镜4、分光镜7穿过待测人工晶体6,透射光波到达标准球面反射镜5,轴向调整标准球面反射镜5,使待测人工晶体后焦点与标准球面反射镜的球心重合,反射光波沿原光路返回再次穿过待测人工晶体6,经分光镜7和光束匹配系统8后,被微透镜阵列91分割采样并聚焦到光电探测器92上形成光斑阵列,光电探测器92将采集的光斑数据送入计算机10,经计算机10处理得到待测人工晶体的像差。As shown in Figure 1, it is a schematic diagram of the intraocular lens aberration measurement principle diagram of the microlens array for the aperture division element in the present invention, and it comprises light source 1, beam filter system, beam matching system 8, standard spherical reflector 5, aperture division element , that is, the microlens array 91, the photodetector 92 and the computer 10, wherein the aperture division element 91 and the photodetector 92 form a Hartmann wavefront sensor, the beam filtering system consists of a pinhole 2 and a collimating mirror 3, and the beam matching system 8 A beam-matched telescope consisting of two lenses or mirrors of different focal lengths. The light emitted by the light source 1 is filtered by the pinhole 2, collimated by the collimator 3 to be parallel light exiting, passes through the artificial lens 6 to be tested through the reflector 4 and the beam splitter 7, and the transmitted light wave reaches the standard spherical reflector 5, Adjust the standard spherical reflector 5 axially so that the back focus of the IOL to be tested coincides with the spherical center of the standard spherical reflector, and the reflected light wave returns along the original optical path and passes through the IOL to be tested 6 again, passing through the beam splitter 7 and the beam matching system 8 Afterwards, it is segmented and sampled by the microlens array 91 and focused onto the photodetector 92 to form a spot array, and the photodetector 92 sends the collected spot data to the computer 10, and the aberration of the IOL to be tested is obtained through the computer 10 processing.

如图2所示,基于微透镜阵列的哈特曼波前传感器主要由微透镜阵列91和光电探测器件92组成,其中光电探测器件92位于微透镜阵列91焦面上。As shown in FIG. 2 , the Hartmann wavefront sensor based on the microlens array is mainly composed of a microlens array 91 and a photodetection device 92 , wherein the photodetection device 92 is located on the focal plane of the microlens array 91 .

基于微透镜阵列的哈特曼波前传感器的工作原理为:入射光束经微透镜阵列91后,在其焦面上形成一个光斑阵列,整个光束孔径被均匀分割。保存标准平面波入射产生的光斑阵列作为标定数据。当具有一定像差的波前入射时,各个微透镜上的局部波前倾斜引起微透镜阵列焦面上的光斑位置发生偏移。The working principle of the Hartmann wavefront sensor based on the microlens array is as follows: After the incident light beam passes through the microlens array 91, a spot array is formed on the focal plane, and the entire beam aperture is evenly divided. Save the spot array generated by standard plane wave incidence as calibration data. When a wavefront with a certain aberration is incident, the local wavefront tilt on each microlens causes the position of the spot on the focal plane of the microlens array to shift.

光电探测器件92接收到的光斑信号可通过计算机10进行处理,采用质心算法:由公式①计算光斑的位置(xi,yi),探测全孔径的波面误差信息:The light spot signal received by the photodetector device 92 can be processed by the computer 10, using the centroid algorithm: calculate the position (xi , y i ) of the light spot by the formula ①, and detect the wave surface error information of the full aperture:

x i = Σ m = 1 M Σ n = 1 N x nm I nm Σ m = 1 M Σ n = 1 N I nm , y i = Σ m = 1 M Σ n = 1 N y nm I nm Σ m = 1 M Σ n = 1 N I nm x i = Σ m = 1 m Σ no = 1 N x nm I nm Σ m = 1 m Σ no = 1 N I nm , the y i = Σ m = 1 m Σ no = 1 N the y nm I nm Σ m = 1 m Σ no = 1 N I nm

式中,m=1~M,n=1~N为子孔径映射到光电探测器件92上对应的像素区域,Inm是光电探测器件92上第(n,m)个像素接收到的信号,xnm,ynm分别为第(n,m)个像素的x坐标和y坐标。In the formula, m=1~M, n=1~N is that the sub-aperture is mapped to the corresponding pixel area on the photodetector device 92, and l nm is the signal received by the (n, m) pixel on the photodetector device 92, x nm , y nm are the x coordinate and y coordinate of the (n, m)th pixel respectively.

再根据公式②计算入射波前的波前斜率gxi,gyiThen calculate the wavefront slope g xi and g yi of the incident wavefront according to formula ②:

g xi = Δx λf = x i - x o λf , g yi = Δy λf = y i - y o λf g xi = Δx λ f = x i - x o λ f , g yi = Δy λf = the y i - the y o λf

式中,(x0,y0)为标准平面波标定哈特曼传感器获得的光斑中心基准位置;哈特曼传感器探测波前畸变时,光斑中心偏移到(xi,yi),完成哈特曼波前传感器对信号的检测。In the formula, (x 0 , y 0 ) is the reference position of the center of the spot obtained by calibrating the Hartmann sensor with a standard plane wave; when the Hartmann sensor detects wavefront distortion, the center of the spot is shifted to ( xi , y i ), completing the Hartmann sensor Signal detection by a Terman wavefront sensor.

如图3所示,为本发明中的孔径分割元件为微棱镜阵列的人工晶体像差测量原理图。它包括光源1、光束滤波系统,光束匹配系统8、标准球面反射镜5、孔径分割元件,即微棱镜阵列91’、傅立叶透镜或成像透镜93、光电探测器92和计算机10,其中孔径分割元件91’、傅立叶透镜或成像透镜93和光电探测器92构成哈特曼波前传感器,光束滤波系统由针孔2和准直镜3构成,光束匹配系统8由两个不同焦距的透镜或反射镜构成的光束匹配望远镜。由光源1发出的光,经针孔2滤波,由准直镜3准直为平行光出射,经反射镜4、分光镜7穿过待测人工晶体6,透射光波到达标准球面反射镜5,轴向调整标准球面反射镜5,使待测人工晶体后焦点与标准球面反射镜的球心重合,反射光波沿原光路返回再次穿过待测人工晶体6,经分光镜7和光束匹配系统8后,被微棱镜阵列91’,傅立叶透镜或成像透镜93后被分割采样并聚焦到光电探测器92上形成光斑阵列,采集光斑数据送入计算机10,经处理得到待测人工晶体的像差。As shown in FIG. 3 , it is a schematic diagram of an intraocular lens aberration measurement in which the aperture division element is a microprism array in the present invention. It includes a light source 1, a beam filtering system, a beam matching system 8, a standard spherical mirror 5, an aperture division element, that is, a microprism array 91', a Fourier lens or an imaging lens 93, a photodetector 92 and a computer 10, wherein the aperture division element 91', Fourier lens or imaging lens 93 and photodetector 92 form the Hartmann wavefront sensor, the beam filtering system is made up of pinhole 2 and collimating mirror 3, the beam matching system 8 is made up of two lenses or mirrors with different focal lengths The resulting beam matches the telescope. The light emitted by the light source 1 is filtered by the pinhole 2, collimated by the collimator 3 to be parallel light exiting, passes through the artificial lens 6 to be tested through the reflector 4 and the beam splitter 7, and the transmitted light wave reaches the standard spherical reflector 5, Adjust the standard spherical reflector 5 axially so that the back focus of the IOL to be tested coincides with the spherical center of the standard spherical reflector, and the reflected light wave returns along the original optical path and passes through the IOL to be tested 6 again, passing through the beam splitter 7 and the beam matching system 8 Finally, the microprism array 91 ′, Fourier lens or imaging lens 93 are segmented and sampled and focused on the photodetector 92 to form a spot array, and the collected spot data is sent to the computer 10, and the aberration of the artificial lens to be tested is obtained after processing.

如图4所示,基于微棱镜阵列的哈特曼波前传感器主要由锯齿形相位光栅结构的微棱镜阵列91’、傅立叶透镜93和光电探测器件92组成,其中傅立叶透镜93紧靠微棱镜阵列91’,光电探测器件92位于傅立叶透镜93的焦面上。As shown in Figure 4, the Hartmann wavefront sensor based on the microprism array is mainly composed of a microprism array 91' with a sawtooth phase grating structure, a Fourier lens 93 and a photodetector device 92, wherein the Fourier lens 93 is close to the microprism array 91 ′, the photodetector device 92 is located on the focal plane of the Fourier lens 93 .

基于微棱镜阵列的哈特曼波前传感器的工作原理为:入射光束经微棱镜阵列91’后,各个子孔径的光束分别产生了相应的相位变化,通过紧贴其后的傅立叶透镜或成像透镜93成像,由位于傅立叶透镜或成像透镜93焦面上的光电探测器件92探测其光强分布,该光强分布包含着二维锯齿形相位光栅阵列所产生的相位信息,每个子孔径所产生的相位变化不同,因而在傅立叶透镜或成像透镜93焦面上形成一个光斑阵列,整个光束孔径被均匀分割。标准平面波入射产生的光斑阵列将被保存起来作为标定数据。当具有一定像差的波前入射时,各个局部倾斜平面波对其子孔径内二维锯齿形相位光栅产生新的附加相位,该相位变化将反映到傅立叶透镜或成像透镜93焦面的光斑位置偏移上。The working principle of the Hartmann wavefront sensor based on the microprism array is as follows: After the incident beam passes through the microprism array 91', the beams of each sub-aperture respectively produce corresponding phase changes, and pass through the Fourier lens or imaging lens next to it. 93 imaging, the light intensity distribution is detected by the photodetector device 92 located on the focal plane of the Fourier lens or imaging lens 93, and the light intensity distribution contains the phase information generated by the two-dimensional sawtooth phase grating array, and the generated by each sub-aperture The phase changes are different, so a spot array is formed on the focal plane of the Fourier lens or the imaging lens 93, and the entire beam aperture is evenly divided. The spot array generated by standard plane wave incidence will be saved as calibration data. When a wavefront with a certain aberration is incident, each local inclined plane wave produces a new additional phase to the two-dimensional sawtooth phase grating in its sub-aperture, and this phase change will be reflected in the spot position deviation of the Fourier lens or the focal plane of the imaging lens 93 move on.

光电探测器件92接收到的光斑信号可通过计算机10进行处理,处理方式与前面所述的基于微透镜阵列的哈特曼波前传感器相同。采用质心算法:由公式①计算光斑的位置(xi,yi),探测全孔径的波面误差信息:The light spot signal received by the photodetector device 92 can be processed by the computer 10 in the same way as the aforementioned Hartmann wavefront sensor based on the microlens array. Using the centroid algorithm: Calculate the position ( xi , y i ) of the spot by the formula ①, and detect the wavefront error information of the full aperture:

x i = Σ m = 1 M Σ n = 1 N x nm I nm Σ m = 1 M Σ n = 1 N I nm , y i = Σ m = 1 M Σ n = 1 N y nm I nm Σ m = 1 M Σ n = 1 N I nm x i = Σ m = 1 m Σ no = 1 N x nm I nm Σ m = 1 m Σ no = 1 N I nm , the y i = Σ m = 1 m Σ no = 1 N the y nm I nm Σ m = 1 m Σ no = 1 N I nm

式中,m=1~M,n=1~N为子孔径映射到光电探测器件92上对应的像素区域,Inm是光电探测器件92上第(n,m)个像素接收到的信号,xnm,ynm分别为第(n,m)个像素的x坐标和y坐标。In the formula, m=1~M, n=1~N is that the sub-aperture is mapped to the corresponding pixel area on the photodetector device 92, and l nm is the signal received by the (n, m) pixel on the photodetector device 92, x nm , y nm are the x coordinate and y coordinate of the (n, m)th pixel respectively.

再根据公式②计算入射波前的波前斜率gxi,gyiThen calculate the wavefront slope g xi and g yi of the incident wavefront according to formula ②:

g xi = Δx λf = x i - x o λf , g yi = Δy λf = y i - y o λf g xi = Δx λf = x i - x o λ f , g yi = Δy λf = the y i - the y o λf

式中,(x0,y0)为标准平面波标定哈特曼传感器获得的光斑中心基准位置;哈特曼传感器探测波前畸变时,光斑中心偏移到(xi,yi),完成哈特曼波前传感器对信号的检测。In the formula, (x 0 , y 0 ) is the reference position of the center of the spot obtained by calibrating the Hartmann sensor with a standard plane wave; when the Hartmann sensor detects wavefront distortion, the center of the spot is shifted to ( xi , y i ), completing the Hartmann sensor Signal detection by a Terman wavefront sensor.

Claims (7)

1、反射式人工晶体像差哈特曼测量仪,其特征在于主要包括:光源、光束滤波系统、光束匹配系统、标准球面反射镜、孔径分割元件、光电探测器和计算机,其中孔径分割元件、光电探测器构成哈特曼波前传感器;由光源发出的光经光束滤波系统滤波和准直为平行光后出射,该平行光依次经反射镜和分光镜穿过待测人工晶体,透射光波到达标准球面反射镜,轴向调整标准球面反射镜,使待测人工晶体的后焦点与标准球面反射镜的球心重合,反射光波沿原光路返回再次穿过待测人工晶体,依次经分光镜和光束匹配系统后,被孔径分割元件分割采样并聚焦到光电探测器上形成光斑阵列,光电探测器将采集的光斑数据送入计算机,经计算机处理得到待测人工晶体的像差。1. The reflective artificial lens aberration Hartmann measuring instrument is characterized in that it mainly includes: a light source, a beam filtering system, a beam matching system, a standard spherical mirror, an aperture division element, a photodetector and a computer, wherein the aperture division element, The photodetector constitutes a Hartmann wavefront sensor; the light emitted by the light source is filtered and collimated by the beam filtering system and then emitted as parallel light. Standard spherical reflector, adjust the standard spherical reflector axially, so that the back focus of the artificial lens to be tested coincides with the spherical center of the standard spherical reflector, and the reflected light wave returns along the original optical path and passes through the artificial lens to be tested again, and passes through the beam splitter and After the beam matching system, it is segmented and sampled by the aperture division element and focused on the photodetector to form a spot array. The photodetector sends the collected spot data to the computer, and the aberration of the artificial lens to be tested is obtained by computer processing. 2、根据权利要求1所述的反射式人工晶体像差哈特曼测量仪,其特征在于:所述的标准球面反射镜为标准凹球面反射镜,或标准凸球面反射镜。2. The reflective IOL aberration Hartmann measuring instrument according to claim 1, characterized in that: said standard spherical reflector is a standard concave spherical reflector, or a standard convex spherical reflector. 3、根据权利要求1所述的反射式人工晶体像差哈特曼测量仪,其特征在于:所述的孔径分割元件为微透镜阵列,或微棱镜阵列;当孔径分割元件为微透镜阵列时,光电探测器件位于微透镜阵列焦面上;当为微棱镜阵列时,在微棱镜阵列后面还加有傅立叶透镜或成像透镜,傅立叶透镜或成像透镜紧靠微棱镜阵列,光电探测器件位于傅立叶透镜或成像透镜的焦面上。3. The reflective intraocular lens aberration Hartmann measuring instrument according to claim 1, characterized in that: the aperture division element is a microlens array or a microprism array; when the aperture division element is a microlens array , the photodetection device is located on the focal plane of the microlens array; when it is a microprism array, a Fourier lens or an imaging lens is added behind the microprism array, and the Fourier lens or imaging lens is close to the microprism array, and the photodetection device is located in the Fourier lens Or the focal plane of the imaging lens. 4、根据权利要求1所述的反射式人工晶体像差哈特曼测量仪,其特征在于:所述的光电探测器为成像相机,或位置敏感器阵列。4. The reflective IOL aberration Hartmann measuring instrument according to claim 1, characterized in that: said photodetector is an imaging camera, or an array of position sensors. 5、根据权利要求1所述的反射式人工晶体像差哈特曼测量仪,其特征在于:所述的光束滤波系统由针孔和准直镜构成,光束经针孔滤波,由准直镜准直为平行光出射。5. The reflective intraocular lens aberration Hartmann measuring instrument according to claim 1, characterized in that: the beam filtering system is composed of a pinhole and a collimating mirror, the beam is filtered by the pinhole, and the collimating mirror Collimated for parallel light exit. 6、根据权利要求1所述的反射式人工晶体像差哈特曼测量仪,其特征在于:所述的光束匹配系统由两个不同焦距的透镜或反射镜构成。6. The reflective IOL aberration Hartmann measuring instrument according to claim 1, characterized in that: said beam matching system is composed of two lenses or mirrors with different focal lengths. 7、根据权利要求1所述的反射式人工晶体像差哈特曼测量仪,其特征在于:所述的光源是激光器、或超辐射半导体器件。7. The reflective artificial lens aberration Hartmann measuring instrument according to claim 1, characterized in that: said light source is a laser or a superradiative semiconductor device.
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CN101694414B (en) * 2009-10-20 2011-06-29 中国科学院光电技术研究所 Girdle band splicing detection system based on Hartmann sensor
CN102008289A (en) * 2010-12-08 2011-04-13 苏州六六宏医疗器械有限公司 Aberration compensation fundus microscope based on automatic optimization algorithm
CN102564731A (en) * 2010-12-16 2012-07-11 中国科学院西安光学精密机械研究所 Lens focal length and wavefront distortion measuring device
CN103376076A (en) * 2012-04-23 2013-10-30 鸿富锦精密工业(深圳)有限公司 Three-dimensional probe compensation and space error measuring system and method
CN104236856B (en) * 2014-09-10 2017-01-18 中国科学院上海光学精密机械研究所 Wave aberration detection device of objective lens imaging system and system error correction method of wave aberration detection device
CN107525654B (en) * 2017-08-23 2024-06-11 重庆连芯智能科技研究院有限公司 Imaging system aberration detection method and device
CN108037594B (en) * 2018-01-02 2020-05-22 北京全欧光学检测仪器有限公司 Assembly method and device of full-field lens
CN109029288B (en) * 2018-07-25 2020-10-16 中国科学院光电技术研究所 Reflective large-gradient aspheric surface and free-form surface detection device and method based on DMD wave-front sensing technology
CN108776005A (en) * 2018-09-05 2018-11-09 武汉华工激光工程有限责任公司 A kind of optical element aberration detecting and system
FR3104258B1 (en) * 2019-12-06 2021-12-31 Saint Gobain METHOD FOR MEASURING THE OPTICAL QUALITY OF A GIVEN ZONE OF GLAZING, ASSOCIATED MEASURING DEVICE
CN112790895B (en) * 2020-12-28 2022-12-27 上海美沃精密仪器股份有限公司 Artificial crystal compensation correction system and method
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1601231A (en) * 2003-09-28 2005-03-30 中国科学院光电技术研究所 Human eye aberration Hartmann wavefront sensor based on microprism array
US20050219461A1 (en) * 2004-03-30 2005-10-06 Kabushiki Kaisha Topcon Opthalmological apparatus
CN1951340A (en) * 2005-10-17 2007-04-25 南开大学 Artificial crystal design based on personalized human's eye model

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1601231A (en) * 2003-09-28 2005-03-30 中国科学院光电技术研究所 Human eye aberration Hartmann wavefront sensor based on microprism array
US20050219461A1 (en) * 2004-03-30 2005-10-06 Kabushiki Kaisha Topcon Opthalmological apparatus
CN1951340A (en) * 2005-10-17 2007-04-25 南开大学 Artificial crystal design based on personalized human's eye model

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