CN102721476B - Large-caliber high-speed infrared laser measurement device based on PSD (phase-sensitive detector) array - Google Patents
Large-caliber high-speed infrared laser measurement device based on PSD (phase-sensitive detector) array Download PDFInfo
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Abstract
The invention discloses a large-caliber high-speed infrared laser measurement device based on a PSD (phase-sensitive detector) array. The large-caliber high-speed infrared laser measurement device comprises a focusing lens array, an infrared PSD array, a multi-channel preamplifier, a data collection memory and a data processing computer, wherein the focusing lens array directly cuts and focuses a large-caliber infrared laser beam and omits a huge beam concentrating system; focused spots are directly imaged on the infrared DSP array, stored by the data collection memory at a high speed after passing through the multi-channel preamplifier, and then analyzed and calculated by a wave-front processing computer, so as to rapidly and accurately obtain wave-front distribution information, strength distribution information and the like. The large-caliber high-speed infrared laser measurement device based on the PSD array is simple in structure and compact in assembly, not only can be applied to infrared laser beam diagnosis, but also can be applied to a self-adapting optical system, and has wide application prospect.
Description
Technical field
The present invention relates to a kind of based on PSD(Position and Sensing Devices) the high speed infrared laser measuring device for measuring of array.Can realize the wavefront distributed intelligence of the infrared laser light beam that heavy caliber is changed at a high speed, the high-speed multifunctional detection of strength distributing information.Can overcome conventional sense method to the heavy caliber problem of the infrared laser beam detection scarce capacity of variation at a high speed.Can be used for the field such as the multi-functional detection of infrared laser light beam and the fast wave pre-test of adaptive optics.
Background technology
Due to the restriction of the structural design defect of infrared laser or technology, physical problem, the infrared laser beam quality producing is declined.Infrared laser beam quality checkout equipment is a lot, mainly contains far-field spot measuring instrument, Hartmann wave front sensor and near field intensity distribution detection instrument etc., can compare accurate measurement to the far-field spot of laser light, Wave-front phase, light distribution.
Taking existing Hartmann wave front sensor as example, its structural representation as shown in Figure 2, Hartmann wave front sensor mainly comprises one-level contracting beam system 6, microlens array 7, secondary contracting beam system 8, ccd detector 9, data storage 10 and data handling machine 11 etc.Its working method is first heavy caliber light beam to be contracted after bundle through one-level contracting beam system 6, tested light beam after adopting lenticule 7 or other cutting elements to contracting bundle carries out separate division sampling, then the sub-hot spot in far field in each sub-aperture is imaged onto on the target surface of ccd detector 9 through secondary contracting beam system 8, acquired data storage is in data storage device 10, data handling machine 11, by data in reading out data apparatus for acquiring and storing 10, restores Beam Wave-Front aberration to be measured by calculating each sub-facula mass center position.Along with the development of infrared laser technology, demand of high speed measuring to heavy caliber infrared laser beam quality is increasing, Hartmann wave front sensor cannot finely meet this measurement requirement in actual measurement, be mainly manifested in following several respects: (1) is in the time carrying out the measurement of heavy caliber infrared laser beam quality, for mating with infrared CCD detector target surface, need a set of complexity and huge multipole contracting beam system, system debug difficulty, processing cost is high, and the lead time is long.Because equipment is huge heavy, cannot be in the on-the-spot flexible Application of the experiment of the finite space.(2) large target surface high speed infrared CCD camera is expensive, and product type is little, is difficult to find desirable infrared CCD camera.Infrared CCD target surface is generally smaller, and after Division Sampling, resolution is also just lower, and measuring accuracy and measurement range are all very limited, and cannot carry out high-acruracy survey to large aberration infrared laser light beam.(3) heavy caliber infrared CCD frame frequency is closely-related with detection target surface, and large target surface high speed infrared camera is difficult to obtain.Available infrared CCD camera sample frequency is generally up to several kHz now, and the infrared laser beam quality that cannot carry out in high time frequency domain is measured.
Therefore traditional Hartmann sensor is generally used for to be less than the infrared laser light beam of 0.3m bore and to change less wave aberration and measures.The high speed that cannot meet being greater than heavy caliber infrared laser light beam more than 0.3m bore is measured requirement, improves the measuring accuracy of measuring system and measures speed in the urgent need to new technology.
Summary of the invention
The technical matters that the present invention solves is: overcome the deficiencies in the prior art, a kind of heavy caliber high speed infrared laser measuring device for measuring based on PSD array is provided, realize the light intensity to heavy caliber infrared laser light beam, the high speed measurement of phase place.
The present invention solves the solution that its technical matters adopts: as shown in Figure 1, heavy caliber high speed infrared laser measuring device for measuring based on PSD array, comprising: focusing lens array 1, infrared PSD array 2, hyperchannel pre-amplifier 3, data acquisition storer 4 and data handling machine 5; The square condenser lens splicing that it is 0.01m-0.02m that described focusing lens array 1 adopts by a series of bores forms, can directly cut apart focusing to the infrared laser light beam between 0.3m-1m, focal beam spot direct imaging to infrared PSD array 2, spot array location coordinate information and strength information after 2 outputs of infrared PSD array focus on; Described information is by data acquisition storer 4 high speed storing after hyperchannel pre-amplifier 3 signals amplify, and the data of storage are processed and calculated via data handling machine 5, and four current signals of each infrared PSD detector output are made as respectively I
a, I
b, I
c, I
d, the facula mass center coordinate and the spot intensity I that detect are:
Calibrate the center-of-mass coordinate x of each sub-hot spot of infrared PSD array with standard directional light
i0, y
i0as measuring basis, each sub-facula mass center of infrared laser light beam of actual measurement zonal aberration is x
i, y
i.Each facula mass center side-play amount that wave front aberration causes is:
dx＝x
i-x
i0，dy＝y
i-y
i0
By the upper hot spot centroid motion x of each infrared PSD
i, y
i, can calculate the wavefront variation information in wave front aberration size and the time frequency domain of incident laser light beam with region restoration algorithm or Zernike modal reconstruction algorithm.Spot array strength information splices the intensity high speed change information of infrared laser light beam on unified, makes up the less difficult problem of high speed infrared camera target surface, detects and the real-time Wavefront detecting of ADAPTIVE OPTICS SYSTEMS for the beam quality of the high temporal frequency of infrared laser.
The square condenser lens that it is 0.01m-0.02m that described focusing lens array 1 adopts by a series of bores is spliced into two-dimensional array according to necessarily putting in order and forms, and directly the infrared laser light beam between 0.3m-1m is carried out focusing on respectively and forming focal beam spot array by single square condenser lens.
The quantity of described focusing lens array 1 and infrared PSD array 2 is unrestricted in theory, can measure any bigbore laser beam and can not affect measuring accuracy and the field range of equipment.
The present invention's advantage is compared with prior art:
(1) the heavy caliber high speed infrared laser measuring device for measuring that the present invention is based on PSD array adopts the infrared PSD detector of large target surface, is ensureing that, under measuring accuracy condition, effectively measured angular visual field is much larger than traditional Hartmann wave front sensor search angle visual field.Therefore can carry out high speed, high-precision wavefront measurement to larger wave front aberration.
(2) the infrared PSD detector that target surface separates with preamplifying circuit is surveyed in the heavy caliber high speed infrared laser measuring device for measuring employing that the present invention is based on PSD array, external diameter is less than 0.01m, can realize in the situation that measurement space resolution is constant any heavy caliber infrared laser light beam is measured, and can not affect measuring accuracy and the field range of equipment.
(3) the present invention is based on PSD array heavy caliber high speed infrared laser measuring device for measuring wavefront detect principle similar to traditional Hartmann wave front sensor wave front restoration principle, but it directly carries out lens arra Division Sampling on heavy caliber, the infrared PSD array of arranging on lens arra focal plane, save complex structure, the multistage contracting beam system that system is huge, therefore its is simple in structure, assembling is compact, volume is small and exquisite, can be applied to flexibly the on-the-spot infrared laser picture element of experiment detects, system debug and adaptive optics wavefront detect, the fields such as control, be with a wide range of applications.
(4) the heavy caliber high speed infrared laser measuring device for measuring employing hyperchannel pre-amplifier employing analog electrical signal that the present invention is based on PSD array is exported, can realize the high-speed data acquisition storage that is greater than 100kHz by data acquisition storer, make up traditional Hartmann wave front sensor and measure the lower deficiency of speed.
(5) the heavy caliber high speed infrared laser measuring device for measuring that the present invention is based on PSD array adopt high precision infrared PSD array to infrared light spot barycenter displacement carry out high-acruracy survey, under coupling suitable optical system condition, facula mass center positional accuracy measurement can reach or be better than traditional Hartmann Wavefront Sensing sensor measurement precision.
Brief description of the drawings
Fig. 1 is testing apparatus principle schematic of the present invention;
Fig. 2 is traditional Hartmann wave front sensor principle schematic;
Fig. 3 is the infrared PSD sensor schematic diagram using in the present invention;
Fig. 4 is the focusing lens array schematic diagram of arranging in the present invention;
Fig. 5 is infrared PSD array arrangement schematic diagram in the present invention.
Embodiment
Be described in further detail the present invention below in conjunction with the drawings and the specific embodiments.
Fig. 1 is the principle schematic of the embodiment of the present invention, and the heavy caliber high speed infrared laser measuring device for measuring based on PSD array comprises focusing lens array 1, infrared PSD array 2, hyperchannel pre-amplifier 3, data acquisition storer 4 and data handling machine 5.Workflow is: focusing lens array 1 is directly cut apart focusing to bigbore infrared laser light beam, focuson spot array is imaged onto respectively on the infrared PSD array 2 of corresponding unit, through hyperchannel pre-amplifier 3 signals amplify after by data acquisition storer 4 high speed storing, then process calculating by data handling machine 5, can synchronously obtain at a high speed wavefront distributed intelligence, strength distributing information and laser beam Strength Changes information etc.
In concrete enforcement, the infrared PSD model of selecting is IGA-030-PSD, produced by EOS Corp. of the U.S., as shown in Figure 3, effectively target surface is 3 × 3mm to structure, and its response wave length scope is 1.0～1.7um, this infrared PSD displacement measurement precision dx < 0.5um, the mode that this infrared PSD adopts detector target surface to separate with preamplifying circuit, device external diameter is 8.7mm, is conveniently arranged into closely two-dimensional array by 10mm spacing.The focusing lens array adopting forms structure as shown in Figure 4, two-dimensional lens array size Unit 30 × 30, and totally 708 condenser lenses, every lens size is 10 × 10mm, focal distance f=500mm.Scalability port footpath is the infrared laser light beam of 300mm, and such lens are easy to process with existing process equipment, and cost is also lower.
Lower surface analysis is under above-mentioned design parameter, and the measured angular range Theta of present device and measured angular precision d θ, carry out detailed comparison with measurement range and the measuring accuracy of existing Hartmann wave front sensor simultaneously.
The computing formula of measured angular range Theta is:
wherein D is the effective target surface size of infrared PSD, and f is condenser lens focal length.
The computing formula of measured angular precision d θ is:
wherein dx is displacement measurement precision, and f is condenser lens focal length.
Can show that by above formula computing formula measured angular range Theta and the measured angular precision d θ of present device under different designs scheme is as shown in the table:
In specific embodiments, employing be the systematic parameter of scheme one, if change the focal length of lens into 600mm, can realize more high-precision measurement.
In existing infrared Hartmann wave front sensor, the CCD camera highest resolution that can obtain be 512 × 512 pixels, pixel size is 20um.As be divided into 30 × 30 sub-array of apertures, in every sub-aperture, account for 16 × 16 pixels, linear measurement precision is 1/10pix, focal length of micro-lens array combined focal length after beam-expanding system amplifies is 1m, the measured angular scope that therefore can calculate infrared Hartmann wave front sensor by above-mentioned formula is 0.32mrad, and measured angular precision is 2urad.As be divided into 60 × 60 sub-array of apertures, and in every sub-aperture, accounting for 8 × 8 pixels, the measured angular scope that calculates infrared Hartmann wave front sensor is 0.16mrad, measured angular precision is 2urad.By upper table analysis, contrast present device and existing infrared Hartmann wave front sensor measuring accuracy and measured angular scope, can obviously find out that apparatus of the present invention are larger than general infrared Hartmann wave front sensor field range, and measuring accuracy is high.And infrared Hartmann wave front sensor under identical measurement bore is due to the contracting beam system of needs complexity, wave front detector is longer than the present invention system, heavier.Present device volume is smaller and more exquisite, applies more flexibly, and therefore apparatus of the present invention have application prospect more widely.
By the spliced array of infrared PSD device as shown in Figure 5, PSD array is corresponding one by one with focusing lens array.Four current signals of each infrared PSD detector output are made as respectively I
a, I
b, I
c, I
d, the facula mass center coordinate and the spot intensity I that detect are:
Calibrate the center-of-mass coordinate x of each sub-hot spot of infrared PSD array with standard directional light
i0, y
i0as measuring basis, each sub-facula mass center of infrared laser light beam of actual measurement zonal aberration is x
i, y
i.Each facula mass center side-play amount that wave front aberration causes is:
dx＝x
i-x
i0，dy＝y
i-y
i0
By the upper hot spot centroid motion x of each infrared PSD
i, y
i, can calculate the wavefront variation information in wave front aberration size and the time frequency domain of incident laser light beam with region restoration algorithm or Zernike modal reconstruction algorithm.If restore wavefront error by field method, can set up one for each sub-aperture and represent in this sub-aperture the relation equation formula between Wave-front phase on centroid motion and adjacent measurement points, can set up 2m centroid offset equation for m sub-aperture, obtain the wavefront error of n tested point by solving an equation, general n is less than a therefore Simultaneous Equations of these equations formations of 2m, and this system of equations can be expressed as the form of matrix:
S＝AW
Wherein S is the facula mass center side-play amount of 2m unit, and W is the Wave-front phase vector of n unit, and A is the matrix of coefficients of 2m × n, the relation between wavefront slope and the drive point Wave-front phase in its each corresponding sub-aperture of element representation.Therefore the value of many elements of A matrix is zero, and A matrix is a sparse matrix, after having set up matrix A, just can obtain its inverse matrix A+ by various linear algebra methods, thereby obtain restoring wavefront:
W＝A+S
Each the sub-aperture light spot centroid offset S obtaining according to device measuring, just can calculate each wavefront error in sub-aperture location vector W, and Here it is restores the ultimate principle of wavefront error by field method.Due to consistent with traditional Hartmann wave front sensor wave front restoration method, be not described in detail in this.
Because infrared PSD array can bring translation error and the coordinate axis rotation error between each infrared SPD in manufacturing process.To be demarcated and be revised at Data processing.
The variation of energy by the upper hot spot of each PSD in time domain, the information such as the overall intensity distribution that calculates incident laser light beam that can be rough and the Strength Changes in time frequency domain.
In sum, no matter from equipment volume, weight or measuring accuracy, measurement range, the present invention has obvious advantage than existing Hartmann wave front sensor, the Beam Wave-Front that not only can be applied to flexibly various outfield experiments and infrared laser light beam is measured, also can be used for the optical field that atmospheric turbulence correction etc. is had relatively high expectations to ADAPTIVE OPTICS SYSTEMS calibration capability, if use other sensor devices instead, and cooperation changes material and the coating process of lens, present device can be extended to visible light wave range, in infrared or high IR wave band, therefore there is application prospect very widely.
Claims (3)
1. the heavy caliber high speed infrared laser measuring device for measuring based on PSD array, is characterized in that comprising: focusing lens array (1), infrared PSD array (2), hyperchannel pre-amplifier (3), data acquisition storer (4) and data handling machine (5); The square condenser lens splicing that it is 0.01m-0.02m by a series of bores that described focusing lens array (1) adopts forms, can directly cut apart focusing to the infrared laser light beam between 0.3m-1m, focal beam spot direct imaging is upper to infrared PSD array (2), spot array location coordinate information and strength information after infrared PSD array (2) output focuses on; Described information through hyperchannel pre-amplifier (3) signal amplify after by data acquisition storer (4) high speed storing, the data of storage are processed and are calculated via data handling machine (5), and four current signals of each infrared PSD detector output are made as respectively I
a, I
b, I
c, I
d, the facula mass center coordinate and the spot intensity I that detect are:
Calibrate the center-of-mass coordinate x of each sub-hot spot of infrared PSD array with standard directional light
i0, y
i0as measuring basis, each sub-facula mass center of infrared laser light beam of actual measurement zonal aberration is x
i, y
i, each facula mass center side-play amount that wave front aberration causes is:
dx＝x
i-x
i0，dy＝y
i-y
i0
By the upper hot spot centroid motion x of each infrared PSD
i, y
i, can calculate the wavefront variation information in wave front aberration size and the time frequency domain of incident laser light beam with region restoration algorithm or Zernike modal reconstruction algorithm.
2. the heavy caliber high speed infrared laser measuring device for measuring based on PSD array according to claim 1, it is characterized in that: the square condenser lens that it is 0.01m-0.02m by a series of bores that described focusing lens array (1) adopts is spliced into two-dimensional array according to necessarily putting in order and forms, directly the infrared laser light beam between 0.3m-1m is carried out focusing on respectively and forming focal beam spot array by single square condenser lens.
3. the heavy caliber high speed infrared laser measuring device for measuring based on PSD array according to claim 1, it is characterized in that: the quantity of described focusing lens array (1) and infrared PSD array (2) is unrestricted in theory, can measure any bigbore laser beam and can not affect measuring accuracy and the field range of equipment.
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| US9835724B2 (en) * | 2014-08-15 | 2017-12-05 | The Boeing Company | System and method for summing outputs in a lateral effect position sensing detector array |
| CN104198055B (en) * | 2014-08-29 | 2018-10-23 | 浙江依诺威声信息技术有限公司 | A kind of wavefront sensing device |
| TWI645169B (en) * | 2018-02-09 | 2018-12-21 | 國立中央大學 | Wavefront detection system and method |
| CN109029719B (en) * | 2018-06-25 | 2020-12-25 | 南京理工大学 | Ultraviolet light energy distribution detection system based on shack Hartmann method and detection method thereof |
| CN110487425A (en) * | 2019-08-26 | 2019-11-22 | 中国人民解放军国防科技大学 | A kind of wavefront sensing methods and its device based on defocus type light-field camera |
| CN117232785A (en) * | 2023-08-18 | 2023-12-15 | 青岛芯微半导体科技有限公司 | Device for improving optical wavefront error detection precision with controllable sub-optical path channel switch |
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| CN1796949A (en) * | 2004-12-22 | 2006-07-05 | 中国科学院光电技术研究所 | PSD type Hartmann-Sheck wave front sensor based on microprism array |
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