CN110440715A - Error compensating method of the photoelectric auto-collimator under long range operating condition - Google Patents
Error compensating method of the photoelectric auto-collimator under long range operating condition Download PDFInfo
- Publication number
- CN110440715A CN110440715A CN201910452371.6A CN201910452371A CN110440715A CN 110440715 A CN110440715 A CN 110440715A CN 201910452371 A CN201910452371 A CN 201910452371A CN 110440715 A CN110440715 A CN 110440715A
- Authority
- CN
- China
- Prior art keywords
- error
- formula
- function
- image
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/045—Correction of measurements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
A kind of error compensating method of photoelectric auto-collimator under long range operating condition is claimed in the present invention, and imaging facula approximation is square the following steps are included: 1. calculate imaging facula irradiation level on photoelectric sensor using two-dimentional exponential approximation function by method；2. calculating the shift offset parameter l between image and contour line edge, compare the radius R of l and imagemSize, different error amount is substituted into according to the relationship of the two in the measurement and carries out error compensation.
Description
Technical field
The invention belongs to optical gauge fields, specifically propose a kind of photoelectric auto-collimator in long range operating condition
When Error Compensation Algorithm to increase the operating distance of photoelectric auto-collimator.
Background technique
Autocollimator is the important kind of measurement instrument for small angle measurement using optical autocollimating principle.Since itself has
There are higher accuracy and Measurement Resolution, thus be widely used in accurate measurement work, such as ship and aircraft manufacturing
In terms of the monitoring of industry and engine and radar antenna.In order to enable these advantages of photoelectric auto-collimator to obtain more sufficiently
Application, big measurement range and high-precision become the hot spot of Recent study.
Zhu (document Zhu F, Tan J, Cui J.Common-path design criteria for laser datum
based measurement of small angle deviations and laser autocollimation method
in compliance with the criteria with high accuracy and stability[J].Optics
Express, 2013,21 (9): 11391.) propose it is a kind of based on low-angle deviation measurement laser datum be total to diameter design standard
Then, long distance and high precision measurement is realized.Chen (document Chen Y L, Shimizu Y, Kudo Y, et al. " Optical
frequency domain angle measurement in a femtosecond laser autocollimator,”
Opt. Express 25 (14), 16725-16738 (2017)) a kind of angle measurement method based on optical frequency domain is proposed, it is real
21600 " measurement range is showed.Li (document Renpu Li, Min Zhou, Igor Konyakhin, Ke Di et al.
“Cube-corner autocollimator with expanded measurement range,”Opt. Express27
(5), 6389~6403 (2019)) use a kind of corner mirror to be expanded to angle measurement range from 1.2 ° as reflecting mirror
12°.These technologies increase the measurement range of photoelectric auto-collimator, but but also under photoelectric auto-collimator work over long distances
Error amount increases.Algorithm proposed by the present invention reduces this error, keeps measured value more accurate.
Summary of the invention
Present invention seek to address that the above problem of the prior art.A kind of photoelectric auto-collimator is proposed to work item in long range
Error compensating method under part.Technical scheme is as follows:
A kind of error compensating method of photoelectric auto-collimator under long range operating condition comprising following steps:
Step 1, to the imaging facula on photoelectric sensor, analyze and compensate spot by a two-dimentional exponential approximation formula
The energy center value of point imaging calculates, and calculates imaging facula irradiation level on photoelectric sensor, tool using two-dimentional exponential approximation function
Body includes: irradiance distribution E (x, the y) function for calculating picture are as follows:
Wherein D, D2For the diameter of photoelectric auto-collimator, D3 is the diameter of reflecting mirror, and f is the focal length of photoelectric auto-collimator, a
For the radius of light source, Rm is the radius of image,X, y is expressed as transverse and longitudinal coordinate value.With two-dimentional approximate function
Calculation formula Ec (x, y) is distributed as the two dimensional pyramid of true optical amplitude, passes through two-dimensional measurement formula E with photoelectric sensor
(x, y) measurement position information, at this moment as the separable geometries of irradiance distribution Ee (x, y) function be written as:
Wherein RmFor the radius of image, k=0.61 can be acquired by two-dimentional exponential approximation formula E (x, y) and least square method,
Intend imaging surface irradiance distribution using two-dimentional exponential approximation formula modulus, asks exact function and approximate two-dimentional exponential function poor respectively
(E (x, y)-Ee (x, y)) and exact function and approximate two-dimentional circular cone difference of function (E (x, y)-Ec (x, y)), the index of proposition
Approximating function can be by carrying out two-dimensional transform along OX, OY axis variables separation；
Step 2 proposes a kind of Error Compensation Algorithm for E ((x, y)-Ec (x, y)) error in step 1, we are right
The irradiation level of imaging facula is calculated using two dimension exponential approximation function Ee (x, y) on photoelectric sensor, by round imaging
Spot approximate processing is square, then calculating parameter l compares l and RmSize, according to size relation band in the measurement respectively
Enter different error amounts.
2, error compensation side of a kind of photoelectric auto-collimator according to claim 1 under long range operating condition
Method, which is characterized in that step 2 Error Compensation Algorithm specifically includes: using approximate function Ee (x, y) come simulating cut image
The light irradiance of the middle plane of delineation is distributed and profile variations, round imaging facula approximate processing is square, the parameter l of introducing
It is the shift offset between image and contour line edge, the relationship of parameter l and picture displacement can indicate are as follows:
L=x- (Rm- a) (6),
X is, a is light source radius, RmFor the radius of image.
So in l < Rm, the error of image coordinate is given by:
Indicate the error of image coordinate when l < Rm, Ee(x, y) indicates two-dimentional exponential approximation function.
In l > Rm, error is given by:
Formula (5) are substituted into formula (6), (7), (8) obtain the expectation expression formula of image coordinate measurement error, utilize photoelectric auto
The characteristic parameter R of straight instrumentmMeasurement error is normalized, calculation formula is
Wherein σxError amount after indicating normalization
As l < Rm, can be obtained from formula (4):
Q is through RmImage measured displacements after normalization, k=0.61 can by two-dimentional exponential approximation formula E (x, y) and most
Small square law acquires.
As l > Rm, can be obtained from formula (5):
It substitutes into measured value and carries out error compensation, wherein k=0.61 is the parameter of approximate function Ee (x, y) in formula (2), value q
For the image measured displacements l after Rm is normalized, it is expressed as
It advantages of the present invention and has the beneficial effect that:
Due to the complexity of integrand in center of energy calculation formula E (x, y), E (x, y) is not suitable for measurement error pass
The research of system, when calculating image planes irradiance distribution, in order to obtain as central coordinate surveying error calculation formula, the present invention makes
The irradiance distribution E (x, y) of picture is calculated with simpler algebraic calculation method two dimension exponential approximation function method.This method pole
Big reduces calculation amount, and by Digital Simulation and experimental verification, it is remote which can effectively reduce photoelectric auto-collimator
Error caused by non-ideal point source in measurement.
Detailed description of the invention
Fig. 1 is that the present invention provides preferred embodiment algorithm block diagram；
The schematic diagram of Fig. 2 photoelectric auto-collimator
Fig. 3 autocollimator radiates schematic diagram；
Fig. 4 autocollimator measuring system schematic diagram and optical structure chart；
Fig. 5 is experiment light channel structure schematic diagram
Fig. 6 off-axial beam imaging displacement figure on object lens aperture；
Plane of delineation profile diagram when Fig. 7 reflecting mirror is static；
Fig. 8 irradiation level E (x) distribution map
Two-dimensional imaging radiation diagram when Fig. 9 reflecting mirror is static
The image outline of light source when Figure 10 plane mirror rotates
As the two-dimentional irradiation level figure of plane when Figure 11 plane mirror rotates
The relative position of Figure 12 light source image profile circle and imaging boundary
Imaging surface irradiance distribution when Figure 13 circular cone approximation；
Figure 14 dimensional formula simulates irradiance distribution figure；
When Figure 15 (a) exponential approximation when difference (b) the circular cone approximation of two-dimensional function two-dimensional function difference；
Figure 16 approximate function analog imaging irradiation level profile and border figure
The irradiance distribution figure of Figure 17 imaging
Figure 18 normalizes formula error figure
The differential chart of Figure 19 approximation and exact formulas model
Figure 20 experimental bench structure chart
The actual deflection angle of Figure 21 plane mirror and the measurement angle figure of autocollimator
Figure 22 cmos imaging figure
Figure 23 overall measurement error figure
Figure 24 random error figure
Plane mirror rotation angle and autocollimator measurement angle figure after Figure 25 error compensation
Measurement error comparison diagram before and after Figure 26 error compensation
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, detailed
Carefully describe.Described embodiment is only a part of the embodiments of the present invention.
The technical solution that the present invention solves above-mentioned technical problem is:
As shown in Figure 1, a kind of Error Compensation Algorithm of photoelectric auto-collimator under long range operating condition comprising following
Step:
1) imaging facula irradiation level on photoelectric sensor is calculated using two-dimentional exponential approximation function, is approximately by imaging facula
Square；
2 calculating parameter l, compare l and RmSize, according to the relationship of the two substitute into the measurement different error amounts into
Row error compensation.
The step 1) specifically includes:
Firstly, collimation instrument light channel structure is analyzed, the schematic diagram of typical photoelectric auto-collimator is as shown in Fig. 2.It adopts
Use 485 P of semiconductor diode SFH that power is 10mw as light source, collimated light beam is projected plane by photoelectric auto-collimator
On reflecting mirror, plane mirror is mounted in the measurement target that distance is L.The light beam being reflected by a reflector is through photoelectric auto-collimator
It focuses on photoelectric sensor again.CMOS matrix used as photoelectric sensor measure the displacement of focused light source point.Measure mesh
Target inclination will change the displacement of reflection light point on CMOS.It is ideal point light source that this measurement method, which is based on light source, but practical
Upper light source is not point light source.So the measuring principle will lead to the measurement error under the conditions of long range.The radiation of autocollimator
Partial schematic diagram is as shown in Figure 3.
The radiation laser beam of light source forms collimated light beam by collimating mirror, and each section light beam is all close to parallel, Ta Mendou
From each radiant of light source, the radius of light source is a, and certain hair is formed between radiation laser beam and autocollimator primary optical axis
Dissipating angle is β.The maximum angle of divergence is βm, which may be expressed as:
βm=arctg (a/f) (1)
Wherein f is the focal length of photoelectric auto-collimator.Entire optical path can be divided into two regions, i.e. interior zone I and outside
Region II.The region determines that they are radiated by the point light source at the top of light source respectively by light beam B, b and C, c.
Each point irradiation level having the same in the I of region, region I is defined as Uniform Irradiation degree region, and reflects
The optimum position of mirror is located in the I of region.Distance L of the vertex of object lens to P pointfrIt is defined as the gauged distance of light beam.LfrIt can be with
It calculates in the following manner:
Wherein D1To collimate lens diameter.
For traditional autocollimator, reflecting mirror is located in gauged distance, the radiation laser beam of light source will on CMOS at
Picture.The phenomenon can be described with equivalent light path figure, and wherein object lens 2' is imaged by reflecting mirror 3, as shown in Fig. 4.When whole image
When irradiating uniform, reflecting mirror 3 is equivalent to the diaphragm of entire autocollimator.In this case, the Optical irradation of imaging plane
Degree will not change with the primary deflector of plane mirror.At this moment the operating distance of photoelectric auto-collimator may be expressed as:
Wherein D1=D2It is the diameter of lens, D3It is the diameter of reflecting mirror 3.
In general, the performance of Traditional photovoltaic autocollimator is D2=50mm, f=500mm, a=0.25mm.By plane mirror
The energy loss of the light beam of 3 reflections is not more than 25%, and the bore of plane mirror 3 is not less than D225%.In such case
Under, D3=40 millimeters.According to above-mentioned performance and formula (3), the exemplary operation distance of photoelectricity autocollimator is 10m.The work
Distance significantly limits the application of photoelectric auto-collimator.In order to extend the operating distance of photoelectricity autocollimator, we will be anti-
It penetrates mirror to be placed in the subsequent region I of point P, i.e. L2>Lfr, the operating distance L of autocollimator2It may be expressed as:
Work as L2>LfrWhen, the light beam from radiant is limited by plane mirror 3 and collimation lens diameter.In light source
Radiation beam B, b and the C of boundary, c will appear gradual halation phenomena.Due to this gradual halation phenomena, the irradiation level of image is no longer uniform.When
When mirror rotates, the irradiation level of image becomes no longer symmetrical, this will lead to measurement error.
Then, measurement error caused by non-ideal point light source is studied, after plane mirror is located at light beam gauged distance
When face, it is necessary to analyze the irradiance distribution characteristic of imaging surface, limit caused angle measurement error by light beam to find
Influence factor.Assuming that D3Diameter be greater than Fig. 5 in photoelectric auto-collimator D1(and D2) diameter, i.e. D3>D1And D3>D2, research
Light beam imaging on CMOS, reflecting mirror are located at the light path schematic diagram after light beam gauged distance.As shown in figure 5, the light from light source
Beam is collimated and projects on reflecting mirror, and then the reflected beams are focused on CMOS by photoelectric auto-collimator, and most of energy
Amount focuses on point O.As shown in figure 5, the radiant that the distance apart from light source center O is r generates radiation beam, the radiation beam is opposite
The angle β is tilted in primary optical axis.After through photoelectric auto-collimator 1, light beam is reflected into object lens 2' by mirror 3.Passing through photoelectricity certainly
After some axis outer light beams of collimator 1, diameter is that the light of D1 will be radiated on equivalent object lens 2'.Hot spot is relative to equivalent object lens
Displacement be r'.It can be indicated are as follows:
R'=2Ltg (β) (5)
β is the angle of divergence between off-axial beam and primary optical axis.
The light beam that off-axis luminous point is given off, in the intersection of the irradiance value and objective lens diameter and off-axial beam of image planes
This intersecting area of the directly proportional of area is less than the aperture scale of light beam on axis, then off-axial beam is formed by hot spot in image planes
The irradiation level possessed is less than the irradiance value on E0 point.According to the analysis of index path 6, radiance E's (x) in CMOS plane
Distribution is decayed according to certain rules from maximum point E (0) to minimum radiant g.From g point to the centre coordinate of CMOS plane
Distance is r=Rm.Being ultimately imaged on CMOS is as shown in fig. 7, number 1 indicates that the image boundary of light source on CMOS, number 2 indicate
The conjugate meshing on light source boundary.On last imaging surface, the aperture that radius is a is not that the imaging of all radiants on light source is total
With, but light source internal and light source center point distance RmRadiant imaging summation correspond to Fig. 4 in G point picture plane
The irradiation level of conjugate point g is 0.
According to the optical path of the radiant G on light source, the conjugate point g of the G on the plane of delineation can be found, and can be obtained
Following relationship:
By calculating E (r) function, can obtaining such as the two-dimensional imaging pattern of Fig. 8 E (r) shown and scheming as shown in Fig. 9
The irradiance distribution figure of picture.
Finally, measuring error calculation in different deflection angles to plane mirror.After plane mirror is located at point P
In the Uniform Irradiation degree region I in face, i.e. L > Lfr.When plane mirror corresponds to primary optical axis deflection θ, the displacement of light source imaging is
x:
X=ftg (θ) (9)
After the reflecting mirror reflection that collimated light beam is deflected, the reflected beams will be deflected with the angle of 2 θ from primary optical axis, light
Fringe radiation point in source may be expressed as: in the displacement of the conjugation aperture of image planes
As shown in Figure 10,1 for the upper light source of CCD image boundary, 2 for light source boundary conjugate meshing.When the conjugation of radiant
Circle 2 is greater than l relative to the displacement of image outline 10When, a part of image is truncated, and the irradiance distribution of image is no longer symmetrical.
Value l0It can indicate are as follows:
The deviation angle θ of plane mirror0Imaging can generate θ offset on caused CMOS, can be expressed as following formula:
Due to the inhomogeneities of imaging cutting and radiant energy distribution, the displacement x generated by the center of energy of imagecDiffer
Picture displacement x in equation (9).Since the photoelectric sensor of autocollimator directly measures the displacement x at image energy centerc,
Measurement error is caused by following reason: since the photoelectric sensor of autocollimator is the displacement of the center of energy of direct measurement picture
Xc, so as to cause measurement error are as follows:
The step 2) specifically includes:
First of all for the calculating of error amount in simplification figure (10), it is believed that the picture of light source does not move, only profile
Circle 2 produces displacement x corresponding with center, and Figure 11 shows the relative position of profile circle 2 and image boundary 1.At this point, by cutting
The energy center value of image is directly equal to the measurement error of picture displacement, can indicate are as follows:
In fact, the center of energy coordinate of cutting image is equal to the error amount in formula 13.It is ginseng with the reference axis in Figure 12
It examines, the center of energy coordinate in formula 14 can be expressed as
Wherein b1 in formula 15, b2 indicate the point in OX reference axis, F1(x, y) indicates the expression formula on the boundary 1 of light source picture,
F2(x, y) indicates the expression formula of the profile circle of the image planes conjugate point of 2 light source boundary radiants；The light amplitude of E (x, y) expression picture
The two-dimentional expression formula of distribution.InIn the case where, function E (x, y) has given the assignment meaning of formula (7).Function E
(x, y) gives the assignment meaning of equation (7).However, E (x, y) is not suitable for due to the complexity of integrand in equation (15)
In the research of measurement error relationship.
Then calculate image planes irradiance distribution, in order to obtain as central coordinate surveying error calculation formula, use
Simpler algebraic calculation method goes to calculate the irradiance distribution E (x, y) of picture, which relies in formula 7 and 8 as upper
Approximation point parameter carries out calculating .Khusnutdinov and proposes to be used as true optical amplitude with two dimension approximate formula Ec (x, y)
Two dimensional pyramid distribution.Dotted line in Fig. 8 indicates one-dimensional approximation.Known two dimension is approximate as shown in figure 13.This approximate analysis
The coordinate position error of image can be made to reduce and be no more than 80%.Pass through in the measurement of two-dimensional signal with photoelectric sensor
Location information in two-dimensional measurement formula E (x, y) measure equation 8, at this moment two dimension formula Ee (x, y) has based on exponential function
Separable geometries are writeable are as follows:
Wherein Rm is the radius of image, and k=0.61 can be acquired by two-dimentional exponential approximation formula E (x, y) and least square method.
It is distributed using two-dimentional exponential approximation formula (16) analog image surface irradiation degree, as shown in figure 14.Utilize two-dimentional exponential approximation formula
(13) modulus intend imaging surface irradiance distribution, ask respectively exact function with it is approximate two dimension exponential function it is poor (E (x, y)-Ee (x,
Y)) and exact function and approximate two-dimentional circular cone difference of function (E (x, y)-Ec (x, y)), as shown in figure 15.By comparing, index is close
It is more accurate than circular cone approximate function like average value of a function.In addition, the exponent approximation function proposed can be by along OX, OY axis point
Two-dimensional transform is carried out from variable, enormously simplifies analytical calculation.
A kind of Error Compensation Algorithm finally is proposed for this kind of error, the model of the plane of delineation, which should suitably change calculating, to be made
Irradiance distribution exponential approximation function formula Ee (x, y).Such as the approximate function on the emulation irradiation level boundary that Figure 16 is image
Figure, number 1 and 2 indicate the conjugate meshing on plane of delineation boundary and light source contour images surface.Actual image boundary and conjugate point
Profile not instead of Fig. 9 in boundary 1 and circle 2, such as the square 1 and 2 in Figure 16.As shown in figure 17, using approximate function
Ee (x, y) carrys out the light irradiance distribution and profile variations of the plane of delineation in simulating cut image.The parameter l of introducing is image and wheel
Shift offset 2 between profile edge.Parameter l and the relationship of picture displacement can indicate are as follows:
L=x- (Rm-a) (17)
So in l < Rm, the error of image coordinate is given by:
In l > Rm, error is given by:
Formula (16) are substituted into formula (17), (18), (19) obtain the expectation expression formula of image coordinate measurement error.Utilize photoelectricity
The characteristic parameter R of autocollimatormMeasurement error is normalized, calculation formula is
As l < RmWhen, it can be obtained from formula (18):
Work as l > RmWhen, it can be obtained from formula (19):
Wherein k=0.61 is the parameter of approximate function Ee (x, y) in formula (16).Value q is through RmImage after normalization is real
Displacement l can be expressed as
If Figure 18 is error when displacement measurement is respectively q<l and q>l in normalized image
The measuring system of the step 3,
First of all for the reliability for checking model obtained, we have carried out numerical value meter to error character in two ways
Calculate: approximate irradiation profile function Ee (x, y) and definite function E (x, y) test result carry out analogue measurement.As shown in figure 19, mould
Draft experiment shows that the difference between the irradiance distribution simulated with near-sighted formula and accurate formula is no more than a few percent.
Computer model demonstrates the reliability of analysis theories.
Then carry out experimental verification, experiment porch by photoelectric auto-collimator and plane microscope group at.Photoelectric auto-collimator installation
On the rigid body based on wall surface 1.Plane mirror is fixed on turntable.As shown in figure 20, turntable is placed on the rigid body pedestal of wall 2
On.The distance between wall 1 and wall 2 are 20.5 meters.In the first stage of experiment, we give plane mirror along y-axis by turntable
Accurate artificial inclination angle, and with photoelectric auto-collimator measurement data compare.Available error result.In reality
The second stage tested, we input a new image processing algorithm, repeat the first stage of experiment, obtain new error knot
Fruit.By the comparative analysis to two kinds of results, the correctness of compensation method is demonstrated.Photoelectric auto-collimator and plane reflector it
Between distance be greater than Lfr, the measurement distance for testing photoelectric auto-collimator needs to reach 20.5m.Measurement range need to reach 4.5 jiaos
Second, required precision is no more than 2 rads.
In an experiment, we provide an angle θ, range " 30 " from 0 to 4, each interval given between angle to rotating platform
It is 10 ".As shown in figure 21, it may be seen that the performance statistics θ of autocollimatortThe inclination angle theta of=Φ (θ) trunnion axis indicates flat
The deflection of face reflecting mirror is θ.The longitudinal axis indicates the angle, θ t of photoelectric auto instrument measurement.
Figure 22 respectively illustrates the image and plane mirror of reflection point on the CMOS that plane mirror image is static and rotates 200 degree
Angle when CMOS on reflection point image.Figure 22 verifies error phenomenon caused by non-ideal point source.Measurement error is turntable
The difference of deflection angle and photoelectric auto-collimator measured value.
Measurement error is the measurement difference of deflection angle and photoelectric auto-collimator from turntable, can be expressed as
σ θ=θt-θ (24)
Error is formed by system and at random, as systematic error can approximation can be written as σ θ=Φ (θ).In plane reflection
The angular turn of mirror is more than θ0When=30 ", the systematic error of photoelectric auto-collimator is almost nil, this kind of state is formula (11)
In be no more than its restrictive condition the case where, as shown in figure 23.It obtains from initial experiment and is surveyed in the case where no algorithm compensation
The ratio between the output valve of the systematic error and turntable that measure, has reached 35%.As shown in figure 24, overall measurement error and approximate system
Between difference be random error can indicate are as follows:
σ θ=δ θ-σ θ (25)
The mean square error of measurement is about 2 rads:
σ θ=stdev (σ θ)=1.91 (26)
As shown in figure 25, in the experiment of second stage, compensation formula is for compensating the measurement of photoelectric auto-collimation telescope
θt.Figure 26 is compensated measurement error, and point curve is the error before compensation.
Finally, herein, it has been found that photoelectric auto-collimation device is produced in long range measurements due to non-ideal point light source
Raw measurement error.Herein by the analysis to error, influence of the halation to measurement is summed up, it is then approximate using known two dimension
Calculation formula is analyzed and is compensated to error.But since the complexity of formula can not be achieved compensation, we
A two-dimentional exponential approximation formula is proposed to analyze and compensate hot spot imaging.Pass through Digital Simulation and experimental verification, the algorithm
Error caused by non-ideal point source in photoelectric auto-collimator telemeasurement can be effectively reduced.
The above embodiment is interpreted as being merely to illustrate the present invention rather than limit the scope of the invention.In
After the content for having read record of the invention, technical staff can be made various changes or modifications the present invention, these equivalent changes
Change and modification equally falls into the scope of the claims in the present invention.
Claims (2)
1. a kind of error compensating method of photoelectric auto-collimator under long range operating condition, which is characterized in that including following step
It is rapid:
Step 1, to the imaging facula on photoelectric sensor, analyze and compensate by a two-dimentional exponential approximation formula spot at
The energy center value of picture calculates, and calculates imaging facula irradiation level on photoelectric sensor using two-dimentional exponential approximation function, specific to wrap
It includes: calculating irradiance distribution E (x, y) function of picture are as follows:
Wherein D, D2For the diameter of photoelectric auto-collimator, D3 is the diameter of reflecting mirror, and f is the focal length of photoelectric auto-collimator, and a is light
The radius in source, Rm are the radius of image,X, y is expressed as transverse and longitudinal coordinate value.It is calculated with two-dimentional approximate function
Formula Ec (x, y) as true optical amplitude two dimensional pyramid be distributed, with photoelectric sensor by two-dimensional measurement formula E (x,
Y) measurement position information, at this moment as the separable geometries of irradiance distribution Ee (x, y) function be written as:
Wherein RmFor the radius of image, k=0.61 can be acquired by two-dimentional exponential approximation formula E (x, y) and least square method, be utilized
Two-dimentional exponential approximation formula modulus intends imaging surface irradiance distribution, asks exact function and the poor (E of approximate two-dimentional exponential function respectively
(x, y)-Ee (x, y)) and exact function and approximate two-dimentional circular cone difference of function (E (x, y)-Ec (x, y)), the exponent approximation of proposition
Function can be by carrying out two-dimensional transform along OX, OY axis variables separation；
Step 2 proposes a kind of Error Compensation Algorithm for E ((x, y)-Ec (x, y)) error in step 1, to photoelectric sensing
The irradiation level of imaging facula is calculated using two dimension exponential approximation function Ee (x, y) on device, at round imaging facula approximation
Reason is square, then calculating parameter l compares l and RmSize, brought into the measurement respectively according to size relation different
Error amount.
2. a kind of error compensating method of the photoelectric auto-collimator according to claim 1 under long range operating condition,
It is characterized in that, step 2 Error Compensation Algorithm specifically includes: being schemed in simulating cut image using approximate function Ee (x, y)
Light irradiance distribution and profile variations as plane, round imaging facula approximate processing are square, the parameter l of introducing is figure
The relationship of picture and the shift offset 2 between contour line edge, parameter l and picture displacement can indicate are as follows:
L=x- (Rm- a) (6),
X is, a is light source radius, RmFor the radius of image；
So in l < Rm, the error of image coordinate is given by:
Indicate the error of image coordinate when l < Rm, Ee(x, y) indicates two-dimentional exponential approximation function.
In l > Rm, error is given by:
Formula (5) are substituted into formula (6), (7), (8) obtain the expectation expression formula of image coordinate measurement error, utilize photoelectric auto-collimator
Characteristic parameter RmMeasurement error is normalized, calculation formula is
Wherein σxError amount after indicating normalization
As l < Rm, can be obtained from formula (4):
Q is through RmImage measured displacements after normalization, k=0.61 can be by two-dimentional exponential approximation formula E (x, y) and least squares
Method acquires；
As l > Rm, can be obtained from formula (5):
It substitutes into measured value and carries out error compensation, wherein k=0.61 is the parameter of approximate function Ee (x, y) in formula (2), and value q is warp
Image measured displacements l after Rm normalization, is expressed as
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910452371.6A CN110440715B (en) | 2019-05-28 | 2019-05-28 | Error compensation method of photoelectric autocollimator under long-distance working condition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910452371.6A CN110440715B (en) | 2019-05-28 | 2019-05-28 | Error compensation method of photoelectric autocollimator under long-distance working condition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110440715A true CN110440715A (en) | 2019-11-12 |
| CN110440715B CN110440715B (en) | 2020-11-17 |
Family
ID=68428785
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910452371.6A Active CN110440715B (en) | 2019-05-28 | 2019-05-28 | Error compensation method of photoelectric autocollimator under long-distance working condition |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110440715B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112254682A (en) * | 2020-09-23 | 2021-01-22 | 重庆邮电大学 | Three-dimensional angle measurement method of wide-range photoelectric autocollimator |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1304879C (en) * | 2005-06-23 | 2007-03-14 | 哈尔滨工业大学 | Bidimension photoelectric self collimating device based on optical length multiplication compensation method and its measuring method |
| CN102060105A (en) * | 2010-11-23 | 2011-05-18 | 中国兵器工业第二〇五研究所 | Course calibration device with tilt compensation |
| CN103501141A (en) * | 2013-10-10 | 2014-01-08 | 中国科学院上海技术物理研究所 | Angle position error detecting and compensating device of round angle position sensor and compensating method |
| CN103116173B (en) * | 2013-01-25 | 2015-08-19 | 四川九洲电器集团有限责任公司 | For the error test device of photoelectric tracking |
| CN106403989A (en) * | 2015-07-31 | 2017-02-15 | 北京航天计量测试技术研究所 | Detection apparatus and method for swing frequency error and swing zeroing error of rotary table |
| US20170042500A1 (en) * | 2013-06-13 | 2017-02-16 | Siemens Medical Solutions Usa, Inc. | Method and apparatus for sensitivity calibration |
| CN107314890A (en) * | 2017-08-08 | 2017-11-03 | 成都优博创通信技术股份有限公司 | Beam collimation degree detection components and detection method |
| CN109238654A (en) * | 2018-08-20 | 2019-01-18 | 河南省高远公路养护技术有限公司 | A kind of raising laser depth of parallelism calibrating installation and method |
-
2019
- 2019-05-28 CN CN201910452371.6A patent/CN110440715B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1304879C (en) * | 2005-06-23 | 2007-03-14 | 哈尔滨工业大学 | Bidimension photoelectric self collimating device based on optical length multiplication compensation method and its measuring method |
| CN102060105A (en) * | 2010-11-23 | 2011-05-18 | 中国兵器工业第二〇五研究所 | Course calibration device with tilt compensation |
| CN102060105B (en) * | 2010-11-23 | 2012-12-26 | 中国兵器工业第二〇五研究所 | Course calibration device with tilt compensation |
| CN103116173B (en) * | 2013-01-25 | 2015-08-19 | 四川九洲电器集团有限责任公司 | For the error test device of photoelectric tracking |
| US20170042500A1 (en) * | 2013-06-13 | 2017-02-16 | Siemens Medical Solutions Usa, Inc. | Method and apparatus for sensitivity calibration |
| CN103501141A (en) * | 2013-10-10 | 2014-01-08 | 中国科学院上海技术物理研究所 | Angle position error detecting and compensating device of round angle position sensor and compensating method |
| CN106403989A (en) * | 2015-07-31 | 2017-02-15 | 北京航天计量测试技术研究所 | Detection apparatus and method for swing frequency error and swing zeroing error of rotary table |
| CN107314890A (en) * | 2017-08-08 | 2017-11-03 | 成都优博创通信技术股份有限公司 | Beam collimation degree detection components and detection method |
| CN109238654A (en) * | 2018-08-20 | 2019-01-18 | 河南省高远公路养护技术有限公司 | A kind of raising laser depth of parallelism calibrating installation and method |
Non-Patent Citations (1)
| Title |
|---|
| RENPU LI: "Error compensation for long-distance measurements", 《OPTICAL ENGINEERING》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112254682A (en) * | 2020-09-23 | 2021-01-22 | 重庆邮电大学 | Three-dimensional angle measurement method of wide-range photoelectric autocollimator |
| CN112254682B (en) * | 2020-09-23 | 2022-07-01 | 重庆邮电大学 | Three-dimensional angle measurement method of wide-range photoelectric autocollimator |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110440715B (en) | 2020-11-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108050933B (en) | Pyramid prism retroreflection light spot positioning precision detection device and method | |
| US7298468B2 (en) | Method and measuring device for contactless measurement of angles or angle changes on objects | |
| CN103926058B (en) | The method using autocollimatic plane mirror measurement optical axis in Aspherical-surface testing | |
| CN107782254B (en) | A kind of mixed compensating mode sub-aperture stitching surface testing method | |
| CN104930971B (en) | Partial compensation lens and detected surface alignment device and alignment method in non-null detection | |
| JP5896792B2 (en) | Aspherical surface measuring method, aspherical surface measuring device, and optical element processing device | |
| CN100585362C (en) | Omnibearing detection method for large-diameter aspherical mirror | |
| CN109724532B (en) | Accurate testing device and method for geometric parameters of complex optical curved surface | |
| US4763006A (en) | Device determining surface element inclination angle for the optical detection of form errors of a low order | |
| CN103471524A (en) | Vertex curvature radius measurement method for confocal paraboloid | |
| CN110082071B (en) | Device and method for measuring optical parallel difference of right-angle prism | |
| CN106017864A (en) | Oscillating mirror characteristic parameter test device and test method | |
| CN109580182B (en) | Method and device for measuring refractive index of curved optical element based on Brewster's law | |
| JP4340625B2 (en) | Optical inspection method and apparatus | |
| CN110440715A (en) | Error compensating method of the photoelectric auto-collimator under long range operating condition | |
| CN107764518B (en) | A kind of optical lens focal length measuring equipment and method | |
| CN109579782A (en) | A kind of big working distance auto-collimation three-dimensional perspective measuring device of high-precision and method | |
| JP3377820B2 (en) | Surface curvature measurement device | |
| CN105737758B (en) | A kind of long-range profile measuring instrument | |
| CN116381708A (en) | High-precision laser triangular ranging system | |
| CN107036791B (en) | Device and method for measuring focal length, back intercept and discrimination of different coaxial optical system | |
| CN109579778A (en) | One kind being based on dual wave length spectrophotometry auto-collimation three-dimensional perspective measuring device and method | |
| CN108106560B (en) | Method and device for measuring large radius of curvature of optical element by comparison method | |
| Lovchy | Modeling a broad-band single-coordinate autocollimator with an extended mark and a detector in the form of a linear-array camera | |
| Lovchy | Modeling the parameters of a two-coordinate autocollimator with a multi-element mark and a matrix photodetector |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20211123 Address after: 114000 No.260 Yueling Road, high tech Zone, Anshan City, Liaoning Province Patentee after: ANSHAN OPOINTING TECHNOLOGY CO.,LTD. Address before: 400065 Chongwen Road, Nanshan Street, Nanan District, Chongqing Patentee before: CHONGQING University OF POSTS AND TELECOMMUNICATIONS |