CN103926058B - The method using autocollimatic plane mirror measurement optical axis in Aspherical-surface testing - Google Patents
The method using autocollimatic plane mirror measurement optical axis in Aspherical-surface testing Download PDFInfo
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- CN103926058B CN103926058B CN201410120021.7A CN201410120021A CN103926058B CN 103926058 B CN103926058 B CN 103926058B CN 201410120021 A CN201410120021 A CN 201410120021A CN 103926058 B CN103926058 B CN 103926058B
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Abstract
The method using autocollimatic plane mirror measurement optical axis in Aspherical-surface testing, belong to technical field of optical detection, for solving the problem that in Aspherical-surface testing, optical axis direction certainty of measurement is low, the method is to adjust plane mirror position relative with interferometer and angle, making plane mirror direction vertical with the emergent light of interferometer, producing interference fringe is zero striation；Use laser tracker respectively measurement space any space coordinates and the space coordinates of this mirror point in plane mirror, this two point coordinates obtain optical axis direction；Adjust compensator to be directed at interferometer, and use the concave surface debuging definition instrument alignment compensation device lens outer surface；Utilize laser tracker measurement to debug position finder convergence center position, i.e. lens outer surface sphere center position, obtain the space coordinates of any on optical axis, the optical axis direction obtained in integrating step two, obtain detecting the optical axis in light path；Measure mirror body characteristics after obtaining optical axis non-spherical reflector is positioned, can take multiple measurements and precision analysis.
Description
Technical field
The present invention relates to the optical axis measuring method in a kind of Aspherical-surface testing, the longest radius of curvature aspheric surface
Optical axis measuring method in detection, belongs to technical field of optical detection.
Background technology
In Aspherical-surface testing light path, optical axis is the benchmark of detected element location, by the measurement to optical axis,
Can measure or calculate the geometric senses such as aspheric offset, vertex curvature radius further.The measurement of optical axis
Being the link of the most critical of location in detection light path, its certainty of measurement decides aspheric surface offset, summit
The certainty of measurement of the geometric senses such as radius of curvature.The method measuring optical axis in prior art in Aspherical-surface testing is permissible
It is divided into two kinds.One is to use laser tracker to measure the frame for movement benchmark (mechanical frock of such as compensator
Side benchmark) and set up model, according to the space phase such as parallel, vertical existed between mechanical references with optical axis
Relation is carried out datum tool and calculating and obtains optical axis；The second is by measuring compensator optical surface ball
The centre of sphere in face, according to the definition of optical axis, measures two centre of sphere points and obtains optical axis.The method letter of mechanical references
Single, effective, but the precision of frame for movement benchmark is subject to processing technique and laser tracker surveys quantitative limitation,
Typically being merely able to reach the precision of 0.02mm, in the non-spherical measuring of long radius of curvature, this error will increase
To several millimeters (as the certainty of measurement of optical axis is about 2mm in the detection light path of 10m magnitude), repeatability
Certainty of measurement is low.The centre of sphere measure determine the method for optical axis typically use debug in position finder autocollimatic positioning compensation device saturating
The centre of sphere of mirror outer surface, then use laser tracker measure the position of the centre of sphere and build straight line in a model and obtain
To optical axis, when lens outer surface is convex surface or radius of curvature is little, 2 distances on optical axis are less, survey
Accuracy of measurement reduces.Above-mentioned both of which can not meet the aspheric optical axis of long vertex curvature radius and measure
Requirement.
Summary of the invention
The present invention solves the problem that in Aspherical-surface testing, optical axis direction certainty of measurement is low, propose a kind of according to flat
The method that optical axis is measured in face mirror autocollimatic detection.
Plane mirror is used to realize by following steps from the method for locating tab assembly optical axis:
Step one, interferometer are directed at placement with plane mirror, adjust the angle of plane mirror so that it is will be dry
The directional light reflection that interferometer sends, the striped that the light after reflection is formed in interferometer, without tilting, i.e. realizes flat
Face reflecting mirror autocollimatic；
Step 2, employing laser tracker measure a little and the measurement of mirror point respectively, obtain two spaces of points
Coordinate data；Remove plane mirror；
Step 3, compensator is filled in light path, adjusts the angle of compensator so that it is be directed at interferometer；Will
Adjustment is debug position finder and is filled in light path, adjusts position and the angle debuging position finder so that it is with compensator
Optical surface is directed at；
Step 4, employing laser tracker measure the above-mentioned convergence center point debuging position finder, obtain in this convergence
The spatial data of heart point, this convergence center point is a bit on optical axis；
Step 5, measure convergence center point on point, mirror point and optical axis according to what step 2 and step 4 obtained
Spatial data, uses the three dimensional space coordinate modeling software of laser tracker, according to measuring point and mirror image
The straight line that point connects is perpendicular to the principle of plane mirror, calculates the straight line representing optical axis in a model；
Step 6, obtain optical axis after, can by measure mirror body characteristics non-spherical reflector is positioned, meter
Calculate the vertex curvature radius parameter obtaining reflecting mirror；Repetition step one, to step 5, takes multiple measurements and essence
Degree is analyzed.
Beneficial effects of the present invention: after plane mirror and interferometer autocollimatic, the directional light direction sent due to interferometer
Being exactly to detect optical axis direction, therefore the plane of this autocollimatic plane mirror is just perpendicular to optical axis direction；Utilize laser with
The function of plane mirror picpointed coordinate measured by track instrument, and respectively measurement space is a little and the mirror point coordinate of this point；
According to the definition of mirror image, it is perpendicular to mirror surface through this straight line of 2, due to minute surface and interferometer outgoing
Light autocollimatic, then this straight line parallel is in optical axis, is so just obtained by the measurement of 2 symmetrical about minute surface
The direction of optical axis in space；Utilize the function debuging position finder spherical wave alignment so that it is with in compensator
Individual lens sphere is directed at, and the sphere of recycling laser tracker target ball is directed at debuging position finder, such target
The centre of sphere of mark ball is exactly a bit on optical axis, just obtains light by the position of laser tracker measurement target drone ball
A bit on axle；After obtaining on optical axis direction and optical axis a bit, also determine that optical axis.
The present invention utilizes autocollimatic plane mirror method to measure the method precision height of optical axis, solves the light in distance detection
The problem that axle positioning precision is low, improves optical axis positioning precision in the detection light path of 10m magnitude to 0.1mm,
To in Aspherical-surface testing, the geometric sense such as vertex curvature radius, offset is accurately measured and control provides guarantee.
Accompanying drawing explanation
Fig. 1 is that the mirror point measurement utilizing laser tracker and autocollimatic plane mirror in the inventive method is to determine optical axis
The schematic diagram in direction.
Fig. 2 is that in the inventive method, position finder is debug in utilization and laser tracker is measured the measurement of any on optical axis and shown
It is intended to.
In figure: 1, interferometer, 2, autocollimatic plane mirror, 3, directional light, 4, laser tracker, 5, measure
Point, 6, measure the mirror point of point, 7, be parallel to the straight line of optical axis, 8, compensator, 9, debug position finder,
10, tested aspheric surface, 11, tested melatope.
Detailed description of the invention
Below in conjunction with the accompanying drawings the present invention is described in further details.
The method using autocollimatic plane mirror measurement optical axis, the method is realized by following steps:
As it is shown in figure 1, step one, interferometer 1 are directed at placement with autocollimatic plane mirror 2, adjust autocollimatic plane mirror
The angle of 2 so that it is the directional light 3 sent by interferometer 1 reflects, the light after reflection is formed in interferometer 1
Striped without tilt, i.e. realize autocollimatic plane mirror 2 autocollimatic；
Step 2, laser tracker 4 is used to measure a little 5 and the measurement of mirror point 6 respectively, acquisition two
Space of points coordinate data；Remove autocollimatic plane mirror 2；
As in figure 2 it is shown, step 3, be filled in light path by compensator 8, adjust the angle of compensator 8 so that it is
It is directed at interferometer 1；Adjustment is debug position finder 9 be filled in light path, adjust the position debuging position finder 9
And angle so that it is it is directed at the optical surface of compensator 8；
Step 4, employing laser tracker 4 measure the above-mentioned tested melatope 11 debuging position finder 9, obtain
The spatial data of this tested melatope 11, this tested melatope 11 is a bit on optical axis；
Step 5, measure light tested on point 5, mirror point 6 and optical axis according to what step 2 and step 4 obtained
The spatial data of axle point 11, uses the three dimensional space coordinate modeling software of laser tracker 4, according to survey
Amount point 5 straight line being connected with mirror point 6 is perpendicular to the principle of autocollimatic plane mirror 2, calculates generation in a model
The straight line of mass color axle；
Step 6, obtain optical axis after, can by measure mirror body characteristics tested aspheric surface 10 is positioned,
It is calculated the vertex curvature radius parameter of reflecting mirror；Repeat step one to step 5, take multiple measurements and
Precision analysis.
Embodiment:
A, autocollimatic plane mirror 2 is disposed close to position (the distance interferometer 1 near detected aspheric surface 10
The most remote, the precision of measurement is the highest), and make the directional light 3 of interferometer 1 outgoing be radiated at autocollimatic plane mirror 2
In effective aperture；Adjust rocking and two angle directions of pitching of autocollimatic plane mirror 2 so that it is at interferometer 1
The interference fringe of middle formation is zero striation；Use interferometer 1 to measure and analyze, check face shape inspection
Survey the tilt quantity (the tilt item after zernike matching) in result, and continue to adjust autocollimatic plane mirror 2 until tilting
It is close to 0, has adjusted the autocollimatic i.e. achieving autocollimatic plane mirror 2 to interferometer；
B, utilize the target ball of laser tracker 4 that the laser of laser tracker 4 is caused autocollimatic plane mirror 2 also
Formed reflection, use target ball obtain reflection laser, target ball is placed on autocollimatic plane mirror 2 hang down
Straight apart from the position of about half optical path distance, as it is shown in figure 1, be set as that measuring point 5 (places ball seat and keep
Motionless), due to through reflection, measure that obtain is the spatial data (x6, y6, z6) of mirror point 6；
By in target ball playback to laser tracker 4 ball seat, traction laser is to above-mentioned ball seat position i.e. the most again
Measure point 5, be this time laser not through reflecting mirror, therefore use laser tracker 4 to measure a little 5
Space coordinates measure, obtain coordinate data (x5, y5, z5)；Autocollimatic plane mirror 2 is removed in the optical path after measurement；
C, it is filled to compensator 8 in light path (place suitable distance, it is ensured that between to be measured and tested aspheric surface 10
Every), utilize the feature end face of compensator 8 to adjust compensator so that it is to be directed at interferometer 1, protect during this
Holding interferometer 1 motionless, adjusting the emergent light direction of interferometer 1 after being directed at is exactly optical axis direction；Keep compensating
Device 8 is motionless, will debug position finder 9 and be filled in light path；Adjust position and the angle debuging position finder 9, make
It is directed at the last one side (or first face) of battery of lens in compensator 8；
D, keep that to debug position finder 9 motionless, the target ball of laser tracker 4 is placed in light path and (extensive to put
Near the convergent point debuging position finder 9 emergent light), adjust the D translation of the target ball of laser tracker 4,
Making it reflect light and debug position finder and 9 be directed at, the tested melatope 11 debuging position finder 9 emergent light is exactly
The center of target ball；Laser tracker 4 is used to measure after alignment, acquisition point 11 (i.e. on optical axis a bit)
Coordinate (x11, y11, z11)；
E, the measurement point 5,6 and 11 obtained according to laser tracker 4 measurement in above-mentioned steps b and d, root
According to the definition of optical axis, in the software of laser tracker 4 model, optical axis for be parallel to point (x5, y5, z5),
(x6, y6, z6) and through the straight line of point (x11, y11, z11), the formula of foundation is:
After confirming that data are without gross error, the target ball debuging position finder 9 and laser tracker 4 is removed light path,
Prepare the measurement of tested aspheric surface 10；
F, obtain optical axis after, can by measure mirror body characteristics tested aspheric surface 10 is positioned, calculate
The parameters such as the vertex curvature radius to reflecting mirror；Repeat step a to e, take multiple measurements and precision analysis.
Claims (1)
1. the method using autocollimatic plane mirror measurement optical axis, is characterized in that, the method is realized by following steps:
Step one, interferometer (1) is directed at placement with autocollimatic plane mirror (2), adjusts autocollimatic plane mirror (2)
Angle so that it is interferometer (1) is sent directional light (3) reflection, the light after reflection is in interferometer (1)
The striped of middle formation, without tilting, i.e. realizes autocollimatic plane mirror (2) autocollimatic；
Step 2, uses laser tracker (4) to measure point (5) and the survey of mirror point (6) thereof respectively
Amount, obtains two space of points coordinate datas；Remove autocollimatic plane mirror (2)；
Step 3, is filled to compensator (8) in light path, adjusts the angle of compensator (8) so that it is with dry
Interferometer (1) is directed at；Adjustment is debug position finder (9) be filled in light path, adjust and debug position finder (9)
Position and angle so that it is be directed at the optical surface of compensator (8)；
Step 4, uses laser tracker (4) to measure the above-mentioned tested melatope debuging position finder (9)
(11), obtaining the spatial data of this tested melatope (11), this tested melatope (11) is
A bit on optical axis；
Step 5, according to quilt on measurement point (5), mirror point (6) and optical axis that step 2 and step 4 obtain
The spatial data of the melatope (11) surveyed, uses the three dimensional space coordinate modeling of laser tracker (4)
Software, is perpendicular to the former of autocollimatic plane mirror (2) according to the straight line that measurement point (5) is connected with mirror point (6)
Reason, calculates the straight line representing optical axis in a model；
Step 6, after obtaining optical axis, can carry out tested aspheric surface (10) determining by measuring mirror body characteristics
Position, is calculated the vertex curvature radius parameter of reflecting mirror；Repetition step step one, to step 5, carries out many
Secondary measurement and precision analysis.
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