CN102288132B - Method for measuring vertex curvature radius deviation of aspheric surface by using laser tracking instrument - Google Patents
Method for measuring vertex curvature radius deviation of aspheric surface by using laser tracking instrument Download PDFInfo
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Abstract
采用激光跟踪仪测量非球面顶点曲率半径偏差的方法，涉及一种补偿检验中非球面顶点曲率半径偏差的测量方法，它解决现有非球面曲率半径的测量精度低、稳定性差，并且测量过程繁琐的问题，使补偿器、干涉仪和待检测非球面同轴；采用激光跟踪仪获得补偿器的光轴位置数据；根据光轴位置数据和补偿器的机械设计参数，获得补偿器后顶点的空间位置数据；采用激光跟踪仪测量待检测非球面的基准面数据，根据获得的基准面数据、机械设计参数和待检测非球面的设计参数，获得待测非球面顶点的空间位置数据；采用激光跟踪仪检测待检测非球面与补偿器之间的光学间隔，即待检测非球面顶点曲率半径的偏差。本发明测量时间短、精度高、通用性好。
The method of using a laser tracker to measure the deviation of the radius of curvature of the apex of an aspheric surface relates to a measurement method for compensating the deviation of the radius of curvature of the apex of an aspheric surface in the inspection. To solve the problem, make the compensator, interferometer and the aspheric surface to be tested coaxial; use the laser tracker to obtain the optical axis position data of the compensator; according to the optical axis position data and the mechanical design parameters of the compensator, obtain the space of the rear apex of the compensator Position data; use a laser tracker to measure the datum data of the aspheric surface to be tested, and obtain the spatial position data of the vertex of the aspheric surface to be tested according to the obtained datum data, mechanical design parameters and design parameters of the aspheric surface to be tested; use laser tracking The instrument detects the optical distance between the aspheric surface to be detected and the compensator, that is, the deviation of the radius of curvature of the apex of the aspheric surface to be detected. The invention has short measurement time, high precision and good versatility.
Description
Technical field
The present invention relates to the measuring method of aspheric surface vertex curvature radius deviation in a kind of compensation tests.
Background technology
For sphere, the method of control radius-of-curvature is many, can utilize spherometer to detect radius-of-curvature in the fine grinding stage, the polishing stage can see that aperture controls radius-of-curvature and local error by testplate, also has in addition interferometric method directly to utilize with the guide rail survey workpiece centre of sphere of high precision grating scale and the distance between the summit etc.And will difficulty for the control of aspheric vertex curvature radius many, so because concerning aspheric surface except the summit radius-of-curvature of each point all the interferometric method in the different similar spherical surface measurements from vertex curvature radius can't be applied to the measurement of aspheric surface vertex curvature radius, although spherometer method and template method can be compared with local radius of curvature by the endless belt measurement and indirectly be measured, precision and stability is not high; Have in addition and mention the method for utilizing measuring staff to detect vertex curvature radius in the document, the method benchmark is changed the more precision and very high to the measuring staff requirement on machining accuracy that affects, and has that will to process different measuring staffs for different aspheric surfaces also very loaded down with trivial details again.
Summary of the invention
The present invention is low, the poor stability of measuring accuracy of the existing aspheric curvature radius of solution, and the loaded down with trivial details problem of measuring process, and a kind of method that adopts laser tracker to measure aspheric surface vertex curvature radius deviation is provided.
The method that adopts laser tracker to measure aspheric surface vertex curvature radius deviation is realized by following steps:
The reference field of step 2, employing laser tracker measuring process one described compensator, the optical axis position data of acquisition compensator;
The spatial position data on summit and the spatial position data on aspheric surface to be measured summit behind step 5, the compensator that obtains according to step 3 and step 4, the employing laser tracker detects the optical interval between aspheric surface to be detected and the compensator, and the deviation of described optical interval is the deviation of aspheric surface vertex curvature radius to be detected.
Principle of work of the present invention: the device that the method for employing laser tracker check aspheric surface vertex curvature radius deviation of the present invention need be used comprises laser tracker, aspheric surface to be measured, high precision aspheric surface compensator and computing machine etc.Can know that by ray tracing and TOLERANCE ANALYSIS control aspheric surface compensator is to the of equal value and control aspheric surface vertex curvature radius of optical interval on aspheric surface summit, so the present invention at first utilizes laser tracker to measure the spatial positional information that the pre-designed mechanical references that is closely related with optical axis on the high-accuracy compensation device is determined summit behind the optical surface of optical axis and compensator, then utilize laser tracker to measure reference field pre-designed on the aspheric surface to be measured, according to mathematical model, with software construction aspheric summit spatial positional information and resolve the accurate measured value of optical interval, thereby make aspheric vertex curvature radius precisely controlled.The key point of this invention is that not only measuring process implements, and the more important thing is the system of the measuring basis that is applicable to laser tracker that compensator and aspheric surface are carried out, and suitable measuring basis is extremely important to the assurance of whole measuring accuracy.The method repeatable accuracy of mentioning in this invention and absolute precision are all very high, this is verified in the actual measurement process, and the stronger actual effect that has shown the method for superior optical property that aspheric surface is packed into and shown after the optical system in a plurality of case histories.
Beneficial effect of the present invention: the present invention adopts laser tracker control aspheric surface vertex curvature radius, Measuring Time is short, precision is high, versatility is good, and the present invention can be applicable in the non-spherical reflector polishing process or the accurate control of final inspection stage vertex curvature radius deviation.
Description of drawings
Fig. 1 is the detection synoptic diagram that employing laser tracker of the present invention is measured the method for aspheric surface vertex curvature radius deviation.
Among the figure: 1, interferometer, 2, compensator, 3, laser tracker, 4, aspheric surface to be detected.
Embodiment
Embodiment one, in conjunction with Fig. 1 present embodiment is described, adopts laser tracker to measure the method for aspheric surface vertex curvature radius deviation, the method is realized by following steps:
The relative position of step 1, adjustment compensator 2, interferometer 1 and aspheric surface to be detected 4 makes compensator 2, interferometer 1 and aspheric surface to be detected 4 coaxial;
The reference field of step 2, employing laser tracker 1 measuring process one described compensator 2, the optical axis position data of acquisition compensator 2;
The spatial position data on step 5, the compensator 2 rear summits that obtain according to step 3 and step 4 and the spatial position data on aspheric surface to be measured 4 summits, the optical interval that adopts laser tracker 3 to detect between aspheric surface 4 to be detected and the compensator 2, the deviation of described optical interval is the deviation of aspheric surface 4 vertex curvature radius to be detected.
The Machine Design parameter of the compensator 2 described in the present embodiment comprises flatness, cylinder degree, verticality and the mechanical dimension etc. of compensator; The design parameter of described aspheric surface to be detected 4 comprises the optical design parameters such as quadric surface coefficient, vertex curvature radius, high-order term coefficient and component profile size etc.
Embodiment two, present embodiment are the embodiment that embodiment one described employing laser tracker is measured the method for aspheric surface vertex curvature radius deviation:
Directional light or the sphere optical registration of a, adjustment compensator 2 and interferometer 1 outgoing, adjust both relative positions of aspheric surface 4 element under tests to be detected and compensator 2 and interferometer 1 according to the principle of the primary aberration minimum of compensator 2, make whole compensator 2, interferometer 1 and aspheric surface to be detected 4 threes coaxial, this is generally repeated multiple times, finally could adjust and finish; The compensator 2 that has is designed with a little field angle, and then can suitably relaxing collimation according to the field angle size, to require described primary aberration mainly be both direction astigmatism, both direction coma and out of focus.
All mechanical reference surface can be arranged when b, compensator 2 design, these reference fields are associated with the optical axis information of compensator, therefore after finishing interferometer, compensator, aspherics to be checked adjustment, we utilize the reference field on laser tracker 3 measuring compensators, and according to reference field information calculations emergent shaft position, precision plain shaft precision general and the final assembling of compensator is suitable, and overall accuracy is approximately less than 5 rads.According to the optical axis data, we just can by the Machine Design parameter of compensator, be compensated the spatial positional information on device 2 rear summits simultaneously;
Also be useful on the reference field that detects and assemble on c, the aspheric surface to be detected 4, the reference field information that we utilize laser tracker 3 to measure on the aspheric surface 4 to be detected, measurement data and Machine Design parameter and aspheric surface design parameter according to reference field can draw by structure the spatial positional information on aspheric surface summit;
The spatial positional information on summit and the spatial positional information on aspheric surface summit utilize laser tracker 3 subsidiary softwares just can calculate the optical interval of aspheric surface interference detection to be checked behind d, the compensator that obtains according to b and c;
E, repeating step a take multiple measurements to d, and carry out precision analysis.According in the past we in the number of actual measurements of a plurality of engineering projects according to one's analysis, the final optical interval of measuring of this method, that is: vertex curvature radius, relative deviation generally is better than 5/10000ths, some situation even can reach ten thousand/.
Claims (3)
1. adopt laser tracker to measure the method for aspheric surface vertex curvature radius deviation, it is characterized in that the method is realized by following steps:
The relative position of step 1, adjustment compensator (2), interferometer (1) and aspheric surface to be detected (4) makes compensator (2), interferometer (1) and aspheric surface to be detected (4) coaxial;
The reference field of step 2, employing laser tracker (3) measuring process one described compensator (2), the optical axis position data of acquisition compensator (2);
Step 3, according to the optical axis position data that the Machine Design parameter of compensator (2) and step 2 obtain, obtain the spatial position data on summit behind the compensator (2);
Step 4, employing laser tracker (3) are measured the reference field data of aspheric surface to be detected (4), according to the design parameter of the reference field data, Machine Design parameter and the aspheric surface to be detected (4) that obtain, obtain the spatial position data on aspheric surface to be measured (4) summit;
The spatial position data on summit and the spatial position data on aspheric surface to be measured (4) summit behind step 5, the compensator (2) that obtains according to step 3 and step 4, employing laser tracker (3) detects the optical interval between aspheric surface to be detected (4) and the compensator (2), and the deviation of described optical interval is the deviation of aspheric surface to be detected (4) vertex curvature radius.
2. employing laser tracker according to claim 1 is measured the method for aspheric surface vertex curvature radius deviation, it is characterized in that the Machine Design parameter of compensator (2) comprises the flatness of compensator, cylinder degree, verticality and mechanical dimension.
3. employing laser tracker according to claim 1 is measured the method for aspheric surface vertex curvature radius deviation, it is characterized in that the design parameter of described aspheric surface to be detected (4) comprises quadric surface coefficient, vertex curvature radius, three optical design parameters of high-order term coefficient and component profile size.
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Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102879182B (en) * | 2012-09-27 | 2014-12-24 | 中国科学院长春光学精密机械与物理研究所 | Method for measuring off-axis aspheric surface eccentricity by laser tracker |
| CN103175481B (en) * | 2013-03-04 | 2016-07-06 | 中国科学院长春光学精密机械与物理研究所 | The measuring method of a kind of off-axis optics aspherical mirror vertex radius and device |
| CN103499310B (en) * | 2013-10-18 | 2016-03-30 | 中国科学院光电技术研究所 | Device and method for measuring parameters of hyperboloid mirror by laser tracker |
| CN103591888B (en) * | 2013-10-28 | 2016-04-27 | 中国科学院长春光学精密机械与物理研究所 | The measuring method of large-caliber off-axis non-spherical optical element geometric parameter |
| CN103673928B (en) * | 2013-12-21 | 2017-07-21 | 大连宏海新能源发展有限公司 | A kind of measurement apparatus of the micro- curvature of high-precision optical speculum |
| CN103926058B (en) * | 2014-03-27 | 2016-08-17 | 中国科学院长春光学精密机械与物理研究所 | The method using autocollimatic plane mirror measurement optical axis in Aspherical-surface testing |
| CN106840023B (en) * | 2016-07-25 | 2018-02-16 | 中国科学院长春光学精密机械与物理研究所 | The complex-curved optical parametric of heavy caliber is accurately tested and caliberating device and method |
| CN106767471B (en) * | 2016-09-28 | 2022-12-27 | 中国科学院西安光学精密机械研究所 | Optical interval measuring system and method in aspheric surface detection light path |
| CN106871819B (en) * | 2017-01-12 | 2019-03-26 | 北京理工大学 | Aspherical vertex curvature radius error measurement method based on optimal compensation position |
| CN108007380B (en) * | 2017-11-23 | 2019-06-04 | 北京理工大学 | Device and method for online detection of spherical surface shape error and curvature radius error |
| CN111076898B (en) * | 2019-12-02 | 2021-07-13 | 北京空间机电研究所 | A method for measuring the optical axis of aspheric mirror with laser tracker and CGH |
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