CN111562716B - Multichannel KB microscope structure with accurate coaxial observation function - Google Patents
Multichannel KB microscope structure with accurate coaxial observation function Download PDFInfo
- Publication number
- CN111562716B CN111562716B CN202010294854.0A CN202010294854A CN111562716B CN 111562716 B CN111562716 B CN 111562716B CN 202010294854 A CN202010294854 A CN 202010294854A CN 111562716 B CN111562716 B CN 111562716B
- Authority
- CN
- China
- Prior art keywords
- speculum
- reflector
- multilayer film
- group
- film structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B42/00—Obtaining records using waves other than optical waves; Visualisation of such records by using optical means
- G03B42/08—Visualisation of records by optical means
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21B—FUSION REACTORS
- G21B1/00—Thermonuclear fusion reactors
- G21B1/11—Details
- G21B1/23—Optical systems, e.g. for irradiating targets, for heating plasma or for plasma diagnostics
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- General Physics & Mathematics (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The invention relates to a multi-channel KB microscope structure with a quasi-coaxial observation function, which comprises a plurality of reflector groups sequentially arranged along the optical axis direction, wherein each reflector group consists of a first reflector arranged along the meridional direction and a second reflector arranged along the sagittal direction, so that a plurality of independent imaging channels are formed. Compared with the prior art, the invention has the advantages of strong coaxiality, reduced observation visual angle difference, independent imaging, consideration of different X-ray energy requirements and the like. The invention is particularly directed at Inertial Confinement Fusion (ICF) research, realizes the reflection of X-rays within a larger energy span, can effectively improve the observation precision of ICF physical experiments, and solves the difficulty of fusion ignition related research at home and abroad.
Description
Technical Field
The invention relates to the field of laser inertial confinement fusion observation, in particular to a multi-channel KB microscope structure with a quasi-coaxial observation function.
Background
X-ray imaging is an important diagnostic tool for High Energy Density Physical (HEDP) and Inertial Confinement Fusion (ICF) studies. The core of the method is that the temperature and the density of the hot spot plasma are reversely deduced by observing the signal intensity of the hot spot plasma in different energy X-ray energy sections at the later stage of ignition, which is the key point and the difficulty of fusion ignition related research at home and abroad at present. The observation has spatial features of small size (about several hundred microns) to the region of interest of the hot spot, so a KB (Kirkpatrick-Baez) microscope with high spatial resolution capability of 3-5 μm is a key instrument for performing such diagnostic observations. Meanwhile, spatial information of hot spot radiation has obvious difference at different observation visual angles, so that the optical structure of the multichannel KB microscope is required to be considered and eliminated as much as possible, and the influence of the difference of the observation visual angles among channels on the hot spot measurement precision is required. The optical structure of the currently common multi-channel KB microscope is shown in fig. 1 and is respectively a four-channel KB structure, an eight-channel KB structure and a sixteen-channel KB structure, and the structure is that two reflectors are arranged in parallel and oppositely in a meridional direction and a sagittal direction to form a reflector pair, and then a plurality of reflector pairs are sequentially arranged in a front-back order in an optical axis direction to form the multi-channel KB microscope, wherein for each reflector pair, the optical structure is shown in fig. 2. It can be seen that the observation angle of view δ of the two channels is limited by the initial structural parameters of object distance u and image distance v, grazing incidence angle θ, image point interval l, etc. The initial structure parameters are restricted by spatial resolution, working energy, surface element size of the image plane detector and space size of an experimental field, and cannot be selected randomly. The difference of observation visual angles of different channels is large, the difference of the observation visual angles of the currently used multi-channel KB system is several degrees, the consistency of the hot spot measurement process is seriously influenced, and the measurement accuracy of the hot spot plasma temperature and density is further limited.
In addition, in the existing multi-channel configuration, the mirrors share a common relationship, for example, in fig. 1 (b), the eight-channel KB microscope uses six mirrors to realize imaging of eight channels, and in fig. 1 (c), the sixteen-channel KB microscope uses eight mirrors to realize imaging of sixteen channels. The core of hot spot plasma observation is that the temperature and density of a hot spot are reversely deduced through measuring the signal intensity of X-rays with different energies. In order to achieve high reflection efficiency of X-ray signals, a multilayer film structure designed for different X-ray energies is generally plated on the surface of a reflector, so that different imaging channels respectively respond to different X-ray energies. In order to ensure the back-stepping precision of the hot spot temperature and density, certain distinction of X-ray energy is required, which has insuperable difficulty in preparing a multi-channel KB structure of a shared reflector, so that the conventional multichannel KB microscope only generally works on single energy or energy band.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a multi-channel KB microscope structure with quasi-coaxial observation function.
The purpose of the invention can be realized by the following technical scheme:
The utility model provides a multichannel KB microscope structure with accurate coaxial observation function, this structure includes a plurality of speculum groups that set gradually along the optical axis direction, and every speculum group is equallyd divide and is constituteed by a first speculum that sets up along the meridian direction and a second speculum that sets up along the sagittal direction respectively to constitute a plurality of independent imaging channel.
The working reflecting surfaces of the first reflectors in each reflector group are arranged along the direction of an optical axis.
The working reflecting surfaces of the second reflectors in each reflector group are arranged along the optical axis direction.
The surface of the first reflector in each reflector group is plated with a multilayer film structure for reflecting X-rays with different energies.
The surface of the second reflector in each reflector group is plated with a multilayer film structure for reflecting X-rays with different energy.
The X-ray energy corresponding to the multilayer film structure of the first reflector and the X-ray energy corresponding to the multilayer film structure of the second reflector in each reflector group are set according to different imaging requirements.
Each imaging channel is independently imaged on the top detector.
The image points imaged by each imaging channel on the item detector have a set distance from each other and do not overlap with each other.
The adjustment of the position and the distance of the image point is realized by adjusting the spatial postures of the first reflector and the second reflector in each reflector group.
The difference in viewing angle between adjacent channels is of the order of less than 0.1.
Compared with the prior art, the invention has the following advantages:
firstly, a plurality of reflectors are arranged in parallel and oppositely in a meridional direction and a sagittal direction to form a reflector pair, and then the plurality of reflector pairs are sequentially arranged in a front-back order to form the multi-channel KB microscope. According to the multichannel KB microscope structure provided by the invention, the working reflecting surfaces of the reflectors are arranged in the same direction, and the observation visual angle difference between adjacent channels can be reduced to a magnitude lower than 0.1 degree, so that the multichannel observation of hot spot plasma has strong coaxiality, and the measurement precision of the temperature and the density of the hot spot plasma is obviously improved.
Secondly, a sharing relation exists among all reflectors of the existing multichannel KB structure, the multilayer film structure plated on the surface of the reflectors has to meet different X-ray energy requirements, and the design, preparation and final performance of the multilayer film are strongly limited.
Drawings
Fig. 1 is a schematic diagram of a conventional multichannel KB microscope, in which fig. 1a is a schematic diagram of a four-channel KB microscope, fig. 1b is a schematic diagram of an eight-channel KB microscope, and fig. 1c is a schematic diagram of a sixteen-channel KB microscope.
Fig. 2 is a diagram of the optical path structure of each mirror pair of the prior multi-channel KB microscope.
FIG. 3 is a schematic view of the present invention.
Figure 4 is a side view in the meridian direction of the present invention.
Detailed Description
The invention is described in detail below with reference to the figures and the specific embodiments.
Examples
As shown in fig. 3 and 4, the present invention provides a multichannel KB microscope structure with quasi-coaxial observation function, which is composed of 2n equidirectionally arranged KB mirrors 1 to 2n, the mirrors are sequentially combined in the meridional direction and the sagittal direction respectively to form a plurality of independent imaging channels, i.e. mirror 1 and 1 ' form image 1, mirror 2 and 2 ' form image 2, … …, and mirrors n and n ' form image n.
For the KB mirrors 1 to n in the meridional direction, the working reflection surfaces thereof are all arranged in the same direction, and for the KB mirrors 1 'to n' in the sagittal direction, the working reflection surfaces thereof are also arranged in the same direction.
The KB reflectors arranged in the same direction have small difference in spatial posture, and X-rays emitted by object points form image points with certain spatial intervals on an image surface after passing through the KB reflectors, so that KB imaging of n channels is realized.
The n imaging channels are all independently imaged in work, and can be respectively plated on the surfaces of the reflectors of the imaging channels according to the condition of E1To EnMultilayer film structure for reflecting energy X-ray, so that images 1 to n of the multichannel KB microscope are respectively E1To EnImaging signal of energy.
The multichannel KB reflector provided by the invention is used for X-ray imaging diagnosis of a hot spot region at the later stage of an implosion compression process of a laser device, can realize measurement of two energy points, namely E1 (5.4 keV (Cr K alpha line) and E2 (8.0 keV (Cu K alpha line)), namely X-ray imaging of two channels (corresponding to E1 and E2 respectively) needs to be realized finally, the size of the hot spot region needing to be observed is about 300 mu m, the expected spatial resolution of a KB system is about 3 mu m, the observation angle of the two channels is required to be smaller than 3 mu m/300 mu m and about 0.57 degrees, the difference of the observation angles is in the spatial resolution range of the KB system at the moment, the experimental data analysis is not influenced, and the requirement of the observation angle cannot be realized if the KB with the conventional symmetrical structure.
By adopting the multichannel KB microscope structure with the quasi-coaxial observation function, the designed initial structure parameters are shown in the table 1 according to the application requirements of spatial resolution and light collecting efficiency, in order to reduce the processing and manufacturing difficulty, the four reflectors all adopt the same curvature radius R which is 20m, and the image point interval corresponding to the reflector 1 and the reflector 2 is set to be 16mm in the meridian direction according to the spatial arrangement requirement of an image plane detector; in the sagittal direction, the distance between the image points of the mirror 1 'and the mirror 2' is set at 20 mm. According to the parameters, the angle difference of the incident X-ray optical axes of the two imaging channels in the meridional and sagittal directions, that is, the observation angle difference δ, can be finally determined, and it can be known through simple calculation that the observation angle difference δ corresponding to the reflector 1 and the reflector 2 in the meridional direction is equal to 0.164 °; in the sagittal direction, the difference δ ' between the observation angles corresponding to the reflector 1 ' and the reflector 2 ' is 0.232 °, which is obviously better than the requirement of the observation angle of 0.57 °.
Table 1 initial structural parameters of the design
| Serial number | Objective lens | Object distance | Grazing incidence angle | Radius of curvature | Magnification ratio | Working energy |
| 1 | 1 | u1＝180mm | θ1＝0.9507° | R＝20m | 11.7778 | E1＝5.4keV |
| 2 | 1′ | u1′＝190mm | θ1′＝0.9987° | R＝20m | 11.1053 | E1＝5.4keV |
| 3 | 2 | u2＝210mm | θ2＝1.0934° | R＝20m | 9.9524 | E2＝8.0keV |
| 4 | 2′ | u1′＝225mm | θ2′＝1.1631° | R＝20m | 9.2222 | E2＝8.0keV |
In order to achieve an energy response to two energy point X-rays, the respective multilayer film structures required are also designed independently for the four mirrors, mirror 1 and mirror 1 'operating at energy E1 of 5.4keV and mirror 2' operating at energy E2 of 8.0 keV. The X-ray multilayer film structures designed at the respective grazing incidence angles are shown in table 2.
TABLE 2 design thinking X-ray multilayer film structure under different grazing incidence angles
Claims (1)
1. The utility model provides a multichannel KB microscope structure with accurate coaxial observation function, a serial communication port, this structure includes a plurality of speculum groups that set gradually along the optical axis direction, every speculum group equallys divide and is become by a first speculum that sets up along the meridian direction and a second speculum that sets up along the sagittal direction, thereby constitute a plurality of independent image channels, first speculum in every speculum group, all arrange along the optical axis direction between its work plane of reflection, second speculum in every speculum group, all arrange along the optical axis direction between its work plane of reflection, first speculum surface in every speculum group all plates the multilayer film structure to different energy X-ray reflection, second speculum surface in every speculum group all plates the multilayer film structure to different energy X-ray reflection, the X light energy that the multilayer film structure of first speculum in every speculum corresponds with the X light energy that the multilayer film structure of second speculum corresponds according to the multilayer film structure of different energy X-ray reflection Different imaging requirements are set, each imaging channel independently images on the item surface detector, image points imaged on the item surface detector by each imaging channel have a set distance between each other and do not overlap with each other, the adjustment of the position and the distance of the image points is realized by adjusting the spatial postures of the first reflector and the second reflector in each reflector group, and the difference of the observation visual angles between the adjacent channels is lower than the magnitude of 0.1 degrees.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010294854.0A CN111562716B (en) | 2020-04-15 | 2020-04-15 | Multichannel KB microscope structure with accurate coaxial observation function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010294854.0A CN111562716B (en) | 2020-04-15 | 2020-04-15 | Multichannel KB microscope structure with accurate coaxial observation function |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111562716A CN111562716A (en) | 2020-08-21 |
| CN111562716B true CN111562716B (en) | 2022-06-28 |
Family
ID=72074409
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010294854.0A Active CN111562716B (en) | 2020-04-15 | 2020-04-15 | Multichannel KB microscope structure with accurate coaxial observation function |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111562716B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112798625A (en) * | 2021-02-09 | 2021-05-14 | 中国工程物理研究院激光聚变研究中心 | Ultrahigh space-time resolution X-ray imaging diagnosis device |
| CN113741137B (en) * | 2021-06-09 | 2023-08-29 | 同济大学 | X-ray optical imaging system with high resolution and high monochromaticity |
| CN117352527B (en) * | 2023-10-08 | 2024-04-26 | 同济大学 | Six-channel array type Schwarzschild extreme ultraviolet imaging system |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103234987A (en) * | 2013-04-17 | 2013-08-07 | 同济大学 | Time-resolved multicolor single-energy X-ray imaging spectrometer |
| CN103514966A (en) * | 2012-06-20 | 2014-01-15 | 同济大学 | Aiming device and aiming method of X-ray optical system for plasma diagnosis |
| CN106356111A (en) * | 2016-09-30 | 2017-01-25 | 同济大学 | Precision assembly method of eight-channel Kirkpatrick-Baez microscope |
| CN109975857A (en) * | 2019-05-06 | 2019-07-05 | 中国工程物理研究院激光聚变研究中心 | A kind of Multichannel narrow band grenz ray image-forming assembly |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103234634B (en) * | 2013-04-17 | 2015-11-04 | 同济大学 | A kind of imaging system and application thereof realizing multiple energy point spectrum resolution on extreme ultraviolet band |
| JP6478433B2 (en) * | 2015-09-25 | 2019-03-06 | 国立大学法人大阪大学 | X-ray microscope |
-
2020
- 2020-04-15 CN CN202010294854.0A patent/CN111562716B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103514966A (en) * | 2012-06-20 | 2014-01-15 | 同济大学 | Aiming device and aiming method of X-ray optical system for plasma diagnosis |
| CN103234987A (en) * | 2013-04-17 | 2013-08-07 | 同济大学 | Time-resolved multicolor single-energy X-ray imaging spectrometer |
| CN106356111A (en) * | 2016-09-30 | 2017-01-25 | 同济大学 | Precision assembly method of eight-channel Kirkpatrick-Baez microscope |
| CN109975857A (en) * | 2019-05-06 | 2019-07-05 | 中国工程物理研究院激光聚变研究中心 | A kind of Multichannel narrow band grenz ray image-forming assembly |
Non-Patent Citations (3)
| Title |
|---|
| 4.75keV能点四通道Kirkpatrick-Baez显微镜;穆宝忠;《强激光与粒子束》;20130430;903-906 * |
| X射线高空间分辨多色显微成像系统研制及应用;曹柱荣;《强激光与粒子束》;20150331;第1页第2段-第8页第3段及附图1，6 * |
| 激光等离子体诊断用Wolter型X射线显微镜的设计;李亚冉;《强激光与粒子束》;20180630;1-5 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111562716A (en) | 2020-08-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111562716B (en) | Multichannel KB microscope structure with accurate coaxial observation function | |
| CN103234987B (en) | Time-resolved multicolor single-energy X-ray imaging spectrometer | |
| WO2017051890A1 (en) | X-ray microscope | |
| KR20080045156A (en) | Lobster eye x-ray imaging system and method of fabrication thereof | |
| CN109716434B (en) | Four-dimensional multi-plane broadband imaging system based on non-reentrant quadratic distortion (NRQD) grating and prismatic grating | |
| CN113029340B (en) | Incidence pupil off-axis image mapping spectrometer structure | |
| CN109752842A (en) | A kind of chromatography imaging method based on aplanatic super structure lens | |
| CN102903413B (en) | Four-channel KB microimaging system working under small-size backlight | |
| CN108051414B (en) | Zoom optical tweezer two-photon microscopic imaging device and method | |
| CN107320120B (en) | X-ray framing imaging device | |
| Li et al. | Study on the optical properties of Angel Lobster eye X-ray flat micro pore optical device | |
| WO2021162947A1 (en) | X-ray mirror optics with multiple hyperboloidal / hyperbolic surface profiles | |
| Boyle et al. | Imaging characteristics of an axisymmetric, grazing incidence x‐ray microscope designed for laser fusion research | |
| CN112903713A (en) | Dark field imaging and spatial phase-shifting interference combined microsphere defect detection device and method | |
| CN113552094B (en) | Measuring device and measuring method for ICF target pellet ice layer refractive index three-dimensional reconstruction | |
| CN113741137B (en) | X-ray optical imaging system with high resolution and high monochromaticity | |
| CN113834421A (en) | Imaging lens group and interferometer using same | |
| CN117352527B (en) | Six-channel array type Schwarzschild extreme ultraviolet imaging system | |
| CN111273453B (en) | Polarization multiplexing-based large-field-of-view imaging device and method | |
| CN104819987B (en) | The X ray glancing incidence micro imaging system that a kind of superelevation spectrum is differentiated | |
| CN218675673U (en) | High axial resolution linear dispersion objective lens device | |
| Grubsky et al. | Adaptive lobster-eye hard x-ray telescope with high-angular resolution and wide field of view | |
| CN115798774A (en) | Four-channel four-energy-point high-resolution X-ray microscopic imaging optical structure | |
| CN110274689A (en) | A kind of EO-1 hyperion camera based on microlens array | |
| CN115775647A (en) | Series orthogonal X-ray microscopic imaging optical structure with equal magnification |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230323 Address after: Building B-1, East, 88 Beijing East Road, Loudong Street, Taicang City, Suzhou City, Jiangsu Province, 215000 Patentee after: Kejingruisi (Suzhou) Technology Co.,Ltd. Address before: 200092 Siping Road 1239, Shanghai, Yangpu District Patentee before: TONGJI University |
|
| TR01 | Transfer of patent right |