CN115775647A - Series orthogonal X-ray microscopic imaging optical structure with equal magnification - Google Patents

Series orthogonal X-ray microscopic imaging optical structure with equal magnification Download PDF

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CN115775647A
CN115775647A CN202211517135.6A CN202211517135A CN115775647A CN 115775647 A CN115775647 A CN 115775647A CN 202211517135 A CN202211517135 A CN 202211517135A CN 115775647 A CN115775647 A CN 115775647A
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reflector
mirror
plane
optical structure
imaging
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李亚冉
孙涵涵
穆宝忠
马焕臻
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Shanghai Institute of Technical Physics of CAS
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Abstract

The invention discloses a series orthogonal X-ray microscopic imaging optical structure with equal magnification, which relates to the technical field of microscopic imaging, and adopts the technical scheme that: comprises an object plane, a first reflector, a second reflector, a third reflector and an image plane; the object plane is provided with object points, and the image plane is provided with image points; the object plane, the first reflector, the second reflector, the third reflector and the image plane are sequentially arranged, the first reflector and the third reflector are used for focusing and imaging in the meridian direction, and the second reflector is used for focusing and imaging in the sagittal direction. The optical structure is beneficial to improving the problem that the magnification factor is inconsistent in two focusing directions in the series orthogonal grazing incidence X-ray microscopic imaging optical structure objectively, reducing the image distortion caused by the inconsistent magnification factor and improving the capability of X-ray microscopic imaging for describing the shape and the outline of the target in the object space.

Description

Series orthogonal X-ray microscopic imaging optical structure with equal magnification
Technical Field
The invention relates to the technical field of microscopic imaging, in particular to a series orthogonal X-ray microscopic imaging optical structure with equal magnification.
Background
Laser Inertial Confinement Fusion (ICF) is a controlled nuclear fusion technology still in the development stage, and has important significance on energy development, basic scientific research, strategic national defense and the like. High power laser targeting devices, represented by the U.S. NIF devices, have been able to compress laser energy in the megajoule range to extremely small spatio-temporal scales for research, pushing the state of the fusion fuel to the edge of the ignition cliff.
The high-precision X-ray imaging diagnosis equipment based on the ultra-smooth reflector has the characteristics of high spatial resolution, high light collection efficiency and spectral band screening, becomes a key for revealing the physical state of implosion in an extreme environment, and is used as a main force device for researching a plurality of physical problems such as irradiation uniformity, implosion compression symmetry, fluid mechanics instability, fuel mixing and the like.
The Kirkpatrick-Baez (KB) microscope is a tandem type orthogonal grazing incidence optical structure that is currently widely used in diagnostic science. The basic principle is that two meridional mirrors and sagittal mirrors which are orthogonally arranged from front to back are utilized to realize focusing imaging in two-dimensional directions. However, since the mirrors are placed in series, it is difficult to achieve imaging with equal magnification in two imaging directions due to the objective axial mirror length. In the application of implosion diagnosis, the difficulty of inconsistent image amplification ratios in two directions is caused, image distortion is caused, and difficulty is brought to the judgment of the outline of the implosion hot spot.
In order to overcome the defects, the invention provides a series orthogonal type X-ray microscopic imaging optical structure with equal magnification. The imaging with equal magnification in the horizontal direction and the meridian direction is realized, the image distortion caused by inconsistent magnification is reduced, and the description capacity of X-ray microscopic imaging on the target contour of an object space is improved. Can play an important role in microscopic observation with a field of view of hundreds of microns and high precision (better than 3 mu m).
Disclosure of Invention
The invention aims to provide a series orthogonal type equal-magnification X-ray microscopic imaging optical structure which can solve the problem that the magnification of the series orthogonal type grazing incidence X-ray microscopic imaging optical structure is inconsistent in two focusing directions. Reduce the image distortion caused by the inconsistent magnification, and improve the description capacity of the X-ray microscopic imaging to the target contour of the object space. Can play an important role in microscopic observation with a field of view of hundreds of microns and high precision (better than 3 mu m).
The technical purpose of the invention is realized by the following technical scheme: a series orthogonal X-ray microscopic imaging optical structure with equal magnification comprises an object plane, a first reflector, a second reflector, a third reflector and an image plane; the object plane is provided with object points, and the image plane is provided with image points; the object plane, the first reflector, the second reflector, the third reflector and the image plane are sequentially arranged, the first reflector and the third reflector are used for focusing and imaging in the meridian direction, and the second reflector is used for focusing and imaging in the sagittal direction.
The invention is further configured to: the first reflector and the third reflector form a separated double-reflector structure to realize imaging in the meridian direction (vertical direction); the second reflector is positioned between the first reflector and the third reflector, and the separated double-reflector structure enables the main plane of the system in the meridian plane to be arranged at the central position of the second reflector and to be superposed with the main plane of the sagittal plane system, so that the equal magnification of the two imaging directions is realized.
The invention is further configured to: the surface types of the first reflector and the third reflector are a spherical mirror and a spherical mirror, a cylindrical mirror and a cylindrical mirror or a hyperbolic cylindrical mirror and an elliptic cylindrical mirror.
The invention is further configured to: and a second reflector single-mirror configuration is adopted in the sagittal direction, and the surface type of the second reflector is a spherical mirror, a cylindrical surface or an elliptic cylindrical surface.
The invention is further configured to: the first reflector and the third reflector form a double-reflector structure, and the curvature radius value of the double-reflector structure is calculated by the following formula:
Figure BDA0003972263160000031
wherein R is 1 Is the radius of curvature, R, of the first mirror 3 Is the radius of curvature of the third mirror, M is the system magnification, u is the distance from the object point to the center of the second mirror, θ 1 Is the grazing incidence angle of the first mirror;
the formula for the radius of curvature of the second mirror is as follows:
Figure BDA0003972263160000032
wherein R is 2 Is the radius of curvature of the second mirror, M is the system magnification, u is the distance from the object point to the center of the second mirror, θ 2 Is the grazing incidence angle of the second mirror;
the calculation formula of the geometric light collection efficiency of the series orthogonal type equal magnification optical structure is as follows:
Figure BDA0003972263160000033
wherein, theta 1 Is the grazing incidence angle, θ, of the first mirror 2 Is the grazing incidence angle, L, of the second mirror 1 Is the mirror length of the first mirror, L 2 Is the mirror length of the second mirror, u is the distance from the object point to the center of the second mirror;
the effective collection solid angle for reflectivity is calculated as:
Figure BDA0003972263160000041
wherein eta is 1 、η 2 And η 3 Respectively, the reflectivities of the first, second and third mirrors.
In conclusion, the invention has the following beneficial effects: the problem that the magnification factors in two directions are inconsistent in the traditional series orthogonal grazing incidence X-ray microscopic imaging optical structure can be solved. Reduce the image distortion caused by the inconsistent magnification, and improve the description capacity of the X-ray microscopic imaging to the target contour of the object space.
Drawings
FIG. 1 is a schematic diagram of an optical structure of a tandem-type orthogonal equal-magnification X-ray microscopic imaging according to an embodiment of the present invention;
FIG. 2 is a diagram of an imaging optical path in the noon (vertical) direction according to an embodiment of the present invention;
FIG. 3 is an image optical path diagram in the sagittal direction (horizontal direction) for an embodiment of the present invention;
FIG. 4 is a graph of the reflectance of a Pt film plated with a mirror according to an embodiment of the present invention;
FIG. 5 is a graph of the variation of the spatial resolution of the patented configuration with the field of view (meridional direction) in an embodiment of the invention;
FIG. 6 is a curve of spatial resolution of a proprietary configuration as a function of field of view (sagittal direction) in an embodiment of the present invention;
FIG. 7 is a plot of effective collection solid angle versus field of view (meridional direction) for a patented configuration in an embodiment of the invention;
FIG. 8 is a plot of the solid angle of effective collection (sagittal direction) versus field of view for the patented configuration in an embodiment of the invention.
Detailed Description
The present invention is described in further detail below with reference to figures 1-8.
Example (b): a series-connection orthogonal X-ray microscopic imaging optical structure with equal magnification is shown in figures 1-8 and comprises an object plane, a first reflector, a second reflector, a third reflector and an image plane; the object plane is provided with object points, and the image plane is provided with image points; the object plane, the first reflector, the second reflector, the third reflector and the image plane are sequentially arranged, the first reflector and the third reflector are used for focusing and imaging in the meridian direction, and the second reflector is used for focusing and imaging in the sagittal direction. The series orthogonal X-ray microscopic imaging optical structure with equal magnification is shown in figure 1, wherein 1 is an object point; 2 is the object plane; 3 is a first mirror; 4 is a second mirror; 5 is a third mirror; 6 is the image plane; and 7 is an image point.
The imaging optical path in the meridional (vertical) direction of the optical structure is shown in fig. 2. The first reflector and the third reflector form a separated double-mirror structure to realize imaging in the meridian direction (vertical direction); the second reflector is positioned between the first reflector and the third reflector, and the separated double-reflector structure enables the main plane of the system in the meridian plane to be arranged at the central position of the second reflector and to be superposed with the main plane of the sagittal plane system, so that the equal magnification of the two imaging directions is realized. High-resolution imaging capability in a single direction and a large field of view range can be obtained through a split double-mirror configuration. The surface types of the first reflector and the third reflector are a spherical mirror and a spherical mirror, a cylindrical mirror and a cylindrical mirror or a hyperbolic cylindrical mirror and an elliptic cylindrical mirror. And a second reflector single-mirror configuration is adopted in the sagittal direction, and the surface type of the second reflector is a spherical mirror, a cylindrical surface or an elliptic cylindrical surface.
The first reflector and the third reflector form a double-reflector structure, and the curvature radius value of the double-reflector structure is calculated by the following formula:
Figure BDA0003972263160000061
wherein R is 1 Is the radius of curvature, R, of the first mirror 3 Is the radius of curvature of the third mirror, M is the system magnification, u is the distance from the object point to the center of the second mirror, θ 1 Is the grazing incidence angle of the first mirror; if an aspherical mirror such as a hyperbolic cylindrical surface or an elliptic cylindrical surface is adopted, the curvature radius value on the flower spray is taken as a fitting reference value.
The formula for the radius of curvature of the second mirror is as follows:
Figure BDA0003972263160000062
wherein R is 2 Is the radius of curvature of the second mirror, M is the system magnification, u is the distance from the object point to the center of the second mirror, θ 2 Is the grazing incidence angle of the second mirror; if an aspherical mirror is adopted, the curvature radius value is taken as a fitting reference value.
The calculation formula of the geometric light collection efficiency of the series orthogonal type equal magnification optical structure is as follows:
Figure BDA0003972263160000063
wherein, theta 1 Is the grazing incidence angle, θ, of the first mirror 2 Is the grazing incidence angle, L, of the second mirror 1 Is the mirror length of the first mirror, L 2 Is the mirror length of the second mirror, u is the distance from the object point to the center of the second mirror;
the effective collection solid angle for reflectivity is calculated as:
Figure BDA0003972263160000064
wherein eta is 1 、η 2 And η 3 Respectively, the reflectivities of the first, second and third mirrors.
A set of hard X-ray microscope optical structures operating at several keV energy points. The application purpose of the method is to meet the requirement of high-precision hard X-ray imaging diagnosis of equal magnification factor in the process of implosion observation in inertial confinement fusion diagnosis.
The system level specifications are summarized in table 1. The design working energy point of the optical structure is 0-10.3keV, and the design grazing incidence angle is 0.45 degrees. The object distance of the system is 250mm, and the magnification is 20 times. The specific optical configuration parameters of the mirror are shown in table 2.
The first reflector and the third reflector adopt a double-mirror combined structure of hyperbolic cylindrical surface and elliptic cylindrical surface to realize high-precision imaging in the meridian direction (vertical direction). The object target high-resolution imaging within the field range of +/-0.5 mm is realized. The main plane of the system can be positioned at the center of the second reflector by adjusting the working angles of the first reflector and the third reflector. Under this condition, the optical structure has the same magnification in the meridional and sagittal directions. The fitted radius of curvature of the first mirror and the third mirror can be calculated to be 121.3m from equation (1).
The second reflecting mirror adopts a concave spherical mirror to realize imaging in the sagittal direction (horizontal direction). The radius of curvature of the mirror can be calculated from equation (2) to be 60.6m.
The geometric light collection solid angle of the structure is 2.0 × 10 according to the calculation of the formula (3) -7 And sr. Wide mirror surface coatingThe reflectance curve of the Pt film with high reflectance in the spectrum is shown in fig. 4. Assuming a film reflectivity of 77.7%, the effective collection solid angle for the system is 9.4 × 10 according to equation (4) -8 sr。
TABLE 1 System level specifications for optical structures
Figure BDA0003972263160000071
Figure BDA0003972263160000081
TABLE 2 optical construction parameters of the mirrors
Figure BDA0003972263160000082
a The hyperbolic cylindrical equation is: x is the number of 2 /a 2 -z 2 /b 2 ＝1；
b The ellipsoidal cylindrical equation is: x is the number of 2 /a 2 +z 2 /b 2 ＝1；
c The spherical equation is: x is the number of 2 +y 2 ＝R 2 ；
The spatial resolution in the meridional and sagittal directions is plotted against the field of view in fig. 5 and 6, respectively. The RMS value of the diffuse spot radius is used as an evaluation criterion for the spatial resolution of the optical structure. In the meridional direction, the resolution of the system is better than 0.21 μm over a field of view of + -0.5 mm. In the sagittal direction, the resolution of the system is better than 6.0 μm over a field of view of ± 0.5mm, subject to the optical configuration.
Fig. 7 and 8 show the variation curves of the effective collection solid angle in the meridional and sagittal directions, respectively, under the 8keV energy point condition. Effective collection solid angle of 9.4 x 10 for central field of view -8 sr, consistent with the calculation result.
The system has the characteristics of large visual field, high resolution and equal magnification, and is expected to play an important role in high-precision X-ray diagnosis of laser inertia constraint convergence in the future.
The present embodiment is only for explaining the present invention, and it is not limited to the present invention, and those skilled in the art can make modifications without inventive contribution to the present embodiment as required after reading the present specification, but all of them are protected by patent law within the scope of the present invention.

Claims (5)

1. A series orthogonal X-ray microscopic imaging optical structure with equal magnification is characterized in that: comprises an object plane, a first reflector, a second reflector, a third reflector and an image plane; the object plane is provided with object points, and the image plane is provided with image points; the object plane, the first reflector, the second reflector, the third reflector and the image plane are sequentially arranged, the first reflector and the third reflector are used for focusing and imaging in the meridian direction, and the second reflector is used for focusing and imaging in the sagittal direction.
2. The optical structure of claim 1, wherein: the first reflector and the third reflector form a separated double-mirror structure to realize imaging in the meridian direction (vertical direction); the second reflector is positioned between the first reflector and the third reflector, and the separated double-reflector structure enables the main plane of the system in the meridian plane to be arranged at the central position of the second reflector and to be superposed with the main plane of the sagittal plane system, so that the equal magnification of the two imaging directions is realized.
3. The optical structure of a serial orthogonal X-ray microscopic imaging with equal magnification as claimed in claim 1, wherein: the surface types of the first reflector and the third reflector are a spherical mirror and a spherical mirror, a cylindrical mirror and a cylindrical mirror or a hyperbolic cylindrical mirror and an elliptic cylindrical mirror.
4. The optical structure of a serial orthogonal X-ray microscopic imaging with equal magnification as claimed in claim 1, wherein: and a second reflector single-mirror configuration is adopted in the sagittal direction, and the surface type of the second reflector is a spherical mirror, a cylindrical surface or an elliptic cylindrical surface.
5. The optical structure of claim 2, wherein: the first reflector and the third reflector form a double-reflector structure, and the curvature radius value of the double-reflector structure is calculated by the following formula:
Figure FDA0003972263150000021
wherein R is 1 Is the radius of curvature, R, of the first mirror 3 Is the radius of curvature of the third mirror, M is the system magnification, u is the distance from the object point to the center of the second mirror, θ 1 Is the grazing incidence angle of the first mirror;
the formula for the radius of curvature of the second mirror is as follows:
Figure FDA0003972263150000022
wherein R is 2 Is the radius of curvature of the second mirror, M is the system magnification, u is the distance from the object point to the center of the second mirror, θ 2 Is the grazing incidence angle of the second mirror;
the geometric light collection efficiency of the series orthogonal type equal magnification optical structure is calculated by the following formula:
Figure FDA0003972263150000023
wherein, theta 1 Is the grazing incidence angle, θ, of the first mirror 2 Is the grazing incidence angle, L, of the second mirror 1 Is the mirror length of the first mirror, L 2 Is the mirror length of the second mirror, u is the distance from the object point to the center of the second mirror;
the effective collection solid angle for reflectivity is calculated as:
Figure FDA0003972263150000024
wherein eta is 1 、η 2 And η 3 Respectively, the reflectivities of the first, second and third mirrors.
CN202211517135.6A 2022-11-30 2022-11-30 Series orthogonal X-ray microscopic imaging optical structure with equal magnification Pending CN115775647A (en)

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