CN115910421A - X-ray microscopic imaging optical structure with high resolution and high light collecting efficiency - Google Patents
X-ray microscopic imaging optical structure with high resolution and high light collecting efficiency Download PDFInfo
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Abstract
The invention discloses an X-ray microscopic imaging optical structure with high resolution and high light collecting efficiency in the technical field of X-ray optics, which comprises an open type rotating hyperboloid mirror, an open type rotating ellipsoid mirror, an imaging detector and an imaging object plane; the method of building the optical structure is as follows: establishing a space rectangular coordinate system, and placing the open type rotating hyperboloidal mirror and the open type rotating ellipsoidal mirror in an eighth quadrant of the space rectangular coordinate system, wherein the open type rotating hyperboloidal mirror and the open type rotating ellipsoidal mirror keep similar grazing incidence angles; the open type rotating hyperboloid mirror and the open type rotating ellipsoid mirror keep coaxial confocal points; adjusting the angle between the open type rotating hyperboloid mirror and the open type rotating ellipsoid mirror, and determining the positions of a hyperboloid focus and an ellipsoid focus; the hyperboloid focus and the ellipsoidal focus are both located on an x axis of the space rectangular coordinate system, the imaging object plane is located at the hyperboloid focus, and the imaging detector is located at the ellipsoidal focus.
Description
Technical Field
The invention belongs to the technical field of X-ray optics, and particularly relates to an X-ray microscopic imaging optical structure with high resolution and high light collection efficiency.
Background
In laser inertial confinement fusion, high-precision X-ray imaging diagnostic equipment or techniques have become key to the in-depth understanding of the implosion process and the quantitative inversion of implosion parameters. The method plays an important role in the research of a plurality of physical problems such as radiation uniformity, implosion compression symmetry, hydrodynamic instability, fuel mixing and the like.
The X-ray imaging diagnostic equipment applied to inertial confinement fusion diagnosis at present mainly comprises a pinhole camera, a Kirkpatrick-Baez (KB) microscope, a Wolter microscope, a spherical curved crystal and the like. The spatial resolution of pinhole camera and KB microscope is limited to 5-10 μm by optical configuration, and the solid angles of light collection are respectively limited to-10 -8 sr and-10 -7 Of the order of sr. The traditional closed Wolter microscope configuration can obtain theoretically high spatial resolution, but the advantage of high-resolution imaging is difficult to be exerted because the processing of a small-caliber closed inner surface super-smooth reflecting mirror is difficult to realize, and the reflecting mirror surface type and the surface roughness which meet the imaging requirements are difficult to obtain. The spherical curved crystal is mainly used as a monochromatic imaging technical means, the spatial resolution is limited to 5 mu m, and the further improvement is difficult. In summary, the spatial resolution of the existing X-ray imaging diagnostic device is limited by the optical configuration and the processing capability of the key optical element, the spatial resolution is limited to 5-10 μm, and the requirement of inertial confinement fusion on high-precision X-ray imaging diagnosis is difficult to meet.
Chinese patent publication No. CN 102945688A proposes an X-ray KBA microscopic imaging system, which includes an objective lens M1, an objective lens M2, an objective lens M3, an objective lens M4, an optical prism block N1 and an optical prism block N2, wherein the working reflective surfaces of the objective lens M1 and the objective lens M2 in the meridional direction are abutted against two adjacent surfaces T1 and T2 of the optical prism block N1 having an angle η 1, and the working reflective surfaces of the objective lens M3 and the objective lens M4 in the sagittal direction are abutted against two adjacent surfaces T3 and T4 of the optical prism block N2 having an angle η 2.
However, in the above technical solution, a KBA configuration of the spherical mirrors is adopted, the meridional and sagittal directions are focused and imaged respectively, and the two spherical mirrors in each focusing direction have the same curvature radius, and the KBA structure proposed in the above technical solution forms aperture diaphragms in the meridional and sagittal focusing directions to form a small light-passing area, and does not have the characteristic of high light-collecting efficiency, so that it is necessary to provide an X-ray microscopic imaging optical structure with high resolution and high light-collecting efficiency.
Disclosure of Invention
In order to solve the above problems, it is an object of the present invention to provide an optical structure for X-ray microscopic imaging with high resolution and high light collection efficiency.
In order to achieve the purpose, the technical scheme of the invention is as follows: an X-ray microscopic imaging optical structure with high resolution and high light collection efficiency comprises an open type rotating hyperboloid mirror, an open type rotating ellipsoid mirror, an imaging detector and an imaging object plane; the method of building the optical structure is as follows: establishing a space rectangular coordinate system, placing the open type rotating hyperboloid mirror and the open type rotating ellipsoidal mirror in an eighth quadrant of the space rectangular coordinate system, adjusting the angle between the open type rotating hyperboloid mirror and the open type rotating ellipsoidal mirror, and determining the positions of a hyperboloid focus and an ellipsoidal focus; the hyperboloid focus and the ellipsoidal focus are both located on an x axis of the space rectangular coordinate system, the imaging object plane is located at the hyperboloid focus, and the imaging detector is located at the ellipsoidal focus.
The length of the open type rotating hyperboloid mirror and the open type rotating ellipsoid mirror is 5-200 mm, the width of the mirror is 2-20 mm, the rms value of the surface type precision is lambda/10-lambda/100, and the roughness is more than 0.3nm.
The spatial resolution is negatively correlated with the vertical axis aberration, which is expressed as follows:
wherein, σ is the angle of view, and can be calculated approximately according to σ = q/u, q is the distance of the vertical axis of the object space field of view, u is the object distance from the object point to the center of the open type rotating hyperboloid mirror and the open type rotating ellipsoid mirror, and K 1 And K 2 Respectively are fitting coefficients;
the method for reducing the vertical axis aberration and realizing the high-resolution optical structure design comprises the following steps: enlarging grazing incidence angle, shortening mirror length and enlarging object distance.
The light collection efficiency is positively correlated with the geometric light collection solid angle, and the geometric light collection solid angle is calculated by the following method:
where w is the mirror width, grazing incidence angle θ 0 ，L 1 Is the mirror length, u is the object distance from the object point to the center of the open hyperboloid rotating mirror or the open ellipsoidal rotating mirror, and further, the expression of the effective light collecting solid angle of the reflectivity of the open hyperboloid rotating mirror and the open ellipsoidal rotating mirror is as follows:
wherein eta is 1 And η 2 The reflectivity of the open type rotating hyperboloid mirror and the open type rotating ellipsoid mirror respectively.
The design method for improving the effective light collecting solid angle is as follows: the method has the advantages of enlarging the length and width of the mirror, improving the grazing incidence angle, improving the reflectivity of the mirror surface and reducing the object distance.
The open type rotating hyperboloid mirror and the open type rotating ellipsoidal mirror are prepared by adopting elastic emission processing and ion beam polishing optical processing technologies.
After the scheme is adopted, the following beneficial effects are realized:
the optical configuration provided by the invention has the characteristics of high resolution and high light collecting efficiency, the resolution can reach a level superior to 3 mu m or even submicron level, and the geometric light collecting efficiency can reach 10 -6 ～10 -5 Of the order of sr. The optical technical index is superior to the X-ray imaging diagnostic equipment which is applied at present; the optical structure is improved through the open configuration design of the non-closed structure, and the requirements of processes such as ultra-precision optical machining, surface type and roughness detection, reflector coating and the like can be met.
The invention utilizes the combination of the open type rotating hyperboloid mirror and the open type rotating ellipsoid mirror, and can obviously reduce the geometric aberration objectively existing in a grazing incidence imaging system because the combination basically meets the Abbe sine condition, further improve the imaging capability of the marginal field of view of the system, enlarge the field range of high-resolution imaging of the system and improve the optimal resolution of the diagnostic system to be superior to 3 mu m magnitude.
The invention has high system response capability in the aspect of system light collection efficiency, and the geometric light collection solid angle is 10 -6 ～10 - 5 The sr magnitude is obviously superior to optical configurations such as a pinhole camera, a KB microscope and the like; the X-ray imaging diagnosis method is particularly suitable for X-ray imaging diagnosis with high space-time resolution and high requirements on radiation flux and signal-to-noise ratio.
Drawings
Fig. 1 is a schematic structural diagram of an open hyperboloid rotating mirror and an open ellipsoidal rotating mirror according to an embodiment of the present invention.
Fig. 2 is an imaging optical path diagram in the meridional direction in the spatial rectangular coordinate system according to the embodiment of the invention.
Fig. 3 is a schematic view of an open type rotating hyperboloid mirror according to an embodiment of the present invention.
FIG. 4 is a plot of horizontal spatial resolution versus field of view for an embodiment of the present invention.
FIG. 5 is a plot of vertical spatial resolution versus field of view for an embodiment of the present invention.
FIG. 6 is a graph of spatial resolution along an axis versus position of an object point according to an embodiment of the present invention.
FIG. 7 is a plot of spatial resolution in the horizontal direction of the Wolter configuration as a function of field of view.
FIG. 8 is a graph of vertical spatial resolution versus field of view for a Wolter configuration.
FIG. 9 is a graph of spatial resolution of the Wolter configuration along the axis as a function of position of the object point.
Detailed Description
The following is further detailed by way of specific embodiments:
reference numerals in the drawings of the specification include: the imaging system comprises an imaging target 1, an open type rotating hyperboloid mirror 21, an open type rotating ellipsoidal mirror 22, a target image 3, an imaging detector 4, an imaging object plane 6, a hyperboloid focus 7, a light barrier 8, an imaging plane 9, an ellipsoid focus 10, incident light 11 and an x axis 12.
The examples are substantially as shown in figures 1 to 9 of the accompanying drawings:
an X-ray microscopic imaging optical structure with high resolution and high light collection efficiency comprises an open type rotating hyperboloid mirror 21, an open type rotating ellipsoid mirror 22, an imaging detector 4 and an imaging object plane 6; the method of building the optical structure is as follows: establishing a space rectangular coordinate system, placing the open type rotating hyperboloid mirror 21 and the open type rotating ellipsoidal mirror 22 in the eighth quadrant of the space rectangular coordinate system, adjusting the angle between the open type rotating hyperboloid mirror 21 and the open type rotating ellipsoidal mirror 22, and determining the positions of the hyperboloid focus 7 and the ellipsoidal focus 10; the hyperboloid focus 7 and the ellipsoidal focus 10 are both located on an x-axis 12 of the space rectangular coordinate system, the imaging object plane 6 is located at the hyperboloid focus 7, and the imaging detector 5 is located at the ellipsoidal focus 10.
The length of the open type rotating hyperboloid mirror 21 and the open type rotating ellipsoid mirror 22 is 5-200 mm, the width of the mirror is 2-20 mm, the rms value of the surface type precision is lambda/10-lambda/100, and the roughness is more than 0.3nm.
The spatial resolution is negatively correlated with the vertical axis aberration, which is expressed as follows:
where σ is the angle of view, which can be approximately calculated from σ = q/u, q is the distance of the vertical axis of the object field of view, u is the object distance from the object point to the center of the open hyperboloid rotating mirror 21 or the open ellipsoidal rotating mirror 22, and K 1 And K 2 Respectively are fitting coefficients;
the method for reducing the vertical axis aberration and realizing the high-resolution optical structure design comprises the following steps: enlarging grazing incidence angle, shortening mirror length and increasing object distance.
The light collecting efficiency is positively correlated with the geometric light collecting solid angle, and the geometric light collecting solid angle is calculated by the following method:
where w is the mirror width, grazing incidence angle θ 0 ，L 1 Is the mirror length, u is the object distance from the object point to the center of the open hyperboloid rotating mirror 21 or the open ellipsoidal rotating mirror 22, and further, the expression of the effective light collecting solid angle of the reflectances of the open hyperboloid rotating mirror 21 and the open ellipsoidal rotating mirror 22 is as follows:
wherein eta 1 And η 2 The reflectivities of the open hyperboloid mirror 21 and the open ellipsoidal mirror 22, respectively.
The method for improving the solid angle of effective light collection comprises the following steps: the method has the advantages of enlarging the length and width of the mirror, improving the grazing incidence angle, improving the reflectivity of the mirror surface and reducing the object distance.
The open type rotating hyperboloid mirror 21 and the open type rotating ellipsoidal mirror 22 are prepared by adopting elastic emission processing and ion beam polishing optical processing technologies.
The specific implementation process is as follows:
providing a high-resolution high-light-collection-efficiency X-ray microscopic imaging optical structure with a working energy point of 8.04keV, establishing a space rectangular coordinate system, placing an open type rotating hyperboloidal mirror 21 and an open type rotating ellipsoidal mirror 22 in an eighth quadrant of the space rectangular coordinate system, adjusting an angle between the open type rotating hyperboloidal mirror 21 and the open type rotating ellipsoidal mirror 22, and determining positions of a hyperboloidal focus 7 and an ellipsoidal focus 10; the hyperboloid focus 7 and the ellipsoidal focus 10 are both located on an x-axis 12 of a space rectangular coordinate system, the imaging object plane 6 is located at the hyperboloid focus 7, and the imaging detector 5 is located at the ellipsoidal focus 10; technical indicators at the microscope system level are summarized in the following table:
| serial number | Item | Unit of | |
| 1 | Nominal object distance | mm | 400 |
| 2 | Nominal grazing incidence angle | ° | 1.2 |
| 3 | Magnification factor | - | 10 |
| 4 | Working energy point | keV | 8.04 |
| 5 | Desired spatial resolution | μm | ＜3 |
| 6 | Effective field of view | mm | ±1 |
| 7 | Geometric light collection solid angle | sr | 1.31×10 -5 |
The microscope adopts the combination of the open type rotating hyperboloid mirror 21 and the open type rotating ellipsoidal mirror 22, and the optical structure parameters of the open type rotating hyperboloid mirror 21 and the open type rotating ellipsoidal mirror 22 are shown in the following table:
the hyperboloid equation is: x is the number of 2 /a 2 -y 2 /b 2 ＝1；
The ellipsoidal equation is: x is a radical of a fluorine atom 2 /a 2 +y 2 /b 2 ＝1；
Calculated according to the formula of the geometric light collection solid angle of the microscope, the geometric light collection solid angle of the microscope is 1.31 multiplied by 10 -5 sr, calculated according to the solid angle formula of effective light collection, when the single-lens reflectivity of the multilayer film is 60%, the solid angle of effective light collection of the microscope is 4.7 multiplied by 10 -6 sr。
With reference to fig. 4, 5, 6, 7, 8 and 9, the geometrical aberration of the microscope was better than 1.66 μm within a field of view of ± 0.5mm, compared with a closed-type Wolter microscope using the same optical construction parameters; better than 6.02 μm in the field range of +/-1 mm; the microscopic imaging structure provided by the patent can obtain the spatial resolution better than 3 mu m within the field range of +/-1 mm, and the geometric light collection solid angle is 1.31 multiplied by 10 -5 sr, system effective light collection solid Angle 4.7 × 10 taking into account multilayer film reflectivity -6 sr, compared with the traditional closed Wolter microscope optical structure, can obtain a better spatial resolution level in a full field of view, has a larger depth of field, and reduces the alignment precision of an optical instrument; by means of open optical junctionsAnd the processing difficulty of the ultra-precise optical surface is reduced.
In the open configuration proposed by the invention, the effective mirror width directly influences the geometric light collection efficiency of the configuration; the enlargement of the mirror width of the reflector is beneficial to improving the geometric light collection efficiency of the system, but can also obviously increase the processing difficulty of the open structure rotary quadric surface mirror, so the selection of the mirror width needs to be determined according to the light collection efficiency requirement of an application target and the processing capacity of the reflector, the resolution capacity and the light collection efficiency of the system are mutually restricted, and the optimization of optical structure parameters needs to be carried out according to a specific application scene; by adjusting the mirror width, the geometric light collection solid angle of the configuration can be adjusted under the condition that the image quality is not greatly influenced; the geometric light collection solid angle of the system can be further improved on the basis of the configuration by increasing the mirror width, and meanwhile, the influence on the geometric aberration of the system is not obvious; in the open microscope optical configuration, the effect of mirror width on geometric collection solid angle and geometric aberrations is shown in the following table:
it can also be seen that the proposed open optical configuration has a resolution significantly better than that of a conventional closed Wolter microscope, and that the structure uses an open rotating quadric mirror to construct the system, rather than the closed inner surface mirror used by the conventional Wolter configuration; two reflectors are adopted to realize two-dimensional imaging in the meridian and sagittal directions, the number of the reflectors is small, and the reduction of response efficiency caused by multiple reflections can be effectively reduced.
The structure adopts an open type rotating hyperboloidal mirror and an open type rotating ellipsoidal mirror, and compared with the traditional Wolter configuration, the structure adopts a non-closed type rotating hyperboloidal mirror and a rotating ellipsoidal mirror to form a system, does not have the axial symmetry characteristic any more, and is an off-axis grazing incidence mode. A part of lenses of the rotating quadric surface mirror contributes to smaller vertical axis aberration, imaging quality of an off-axis field of the system is remarkably improved, and the system is remarkably superior to a traditional axisymmetric Wolter configuration. In addition, the open type structure has smaller numerical aperture and larger depth of field, and reduces the positioning precision of an object.
Compared with a nested segmented Wolter-I structure and a design method thereof disclosed by Chinese patent publication No. CN108572442A, the invention has different contents and invention characteristics; the invention is used for X-ray astronomical observation, and is different from the application scene of the invention; the astronomical observation system is used for focusing and imaging infinite parallel incident light, but the invention is used for imaging implosion target shots with limited working distance, and the incident light is a non-parallel light beam; the invention provides a sectional type conical surface reflector structure form, which can not perfectly image the on-axis point of incident parallel light, and loses the system resolution to a certain extent.
The foregoing is merely an example of the present invention, and common general knowledge in the field of known specific structures and characteristics is not described herein in any greater extent than that known in the art at the filing date or prior to the priority date of the application, so that those skilled in the art can now appreciate that all of the above-described techniques in this field and have the ability to apply routine experimentation before this date can be combined with one or more of the present teachings to complete and implement the present invention, and that certain typical known structures or known methods do not pose any impediments to the implementation of the present invention by those skilled in the art. It should be noted that, for those skilled in the art, without departing from the structure of the present invention, several changes and modifications can be made, which should also be regarded as the protection scope of the present invention, and these will not affect the effect of the implementation of the present invention and the practicability of the patent. The scope of the claims of the present application shall be determined by the contents of the claims, and the description of the embodiments and the like in the specification shall be used to explain the contents of the claims.
Claims (7)
1. An X-ray microscopic imaging optical structure with high resolution and high light collecting efficiency is characterized in that: the imaging device comprises an open type rotating hyperboloid mirror, an open type rotating ellipsoid mirror, an imaging detector and an imaging object plane; the method of building the optical structure is as follows: establishing a space rectangular coordinate system, placing the open type rotating hyperboloidal mirror and the open type rotating ellipsoidal mirror in an eighth quadrant of the space rectangular coordinate system, adjusting the angle between the open type rotating hyperboloidal mirror and the open type rotating ellipsoidal mirror, and determining the positions of a hyperboloidal focus and an ellipsoidal focus; the hyperboloid focus and the ellipsoidal focus are both located on an x axis of the space rectangular coordinate system, the imaging object plane is located at the hyperboloid focus, and the imaging detector is located at the ellipsoidal focus.
2. The high resolution, high light collection efficiency X-ray micro-imaging optical structure of claim 1, wherein: the length of the open type rotating hyperboloid mirror and the open type rotating ellipsoid mirror is 5-200 mm, the width of the mirror is 2-20 mm, the rms value of the surface type precision is lambda/10-lambda/100, and the roughness is more than 0.3nm.
3. The high resolution high light collection efficiency X-ray micro-imaging optical structure of claim 2, wherein: the spatial resolution is inversely related to the vertical axis aberration, which is expressed as follows:
where σ is the field angle and can be calculated approximately from σ = q/u, q is the distance of the vertical axis of the object field, u is the object distance from the object point to the center of the first mirror, K 1 And K 2 Respectively fitting coefficients.
4. The high resolution, high light collection efficiency X-ray microscopic imaging optical structure according to claim 3, wherein: the method for reducing the vertical axis aberration and realizing the high-resolution optical structure design comprises the following steps: enlarging grazing incidence angle, shortening mirror length and increasing object distance.
5. The high resolution high light collection efficiency X-ray micro-imaging optical structure according to claim 4, wherein: the light collection efficiency is positively correlated with the geometric light collection solid angle, and the geometric light collection solid angle is calculated by the following method:
where w is the mirror width, grazing incidence angle θ 0 ，L 1 Is the mirror length, u is the object distance from the object point to the center of the open hyperboloid rotating mirror or the open ellipsoidal rotating mirror, and further, the expression of the effective light collecting solid angle of the reflectivity of the open hyperboloid rotating mirror and the open ellipsoidal rotating mirror is as follows:
wherein eta is 1 And η 2 The reflectivity of the open type rotating hyperboloid mirror and the open type rotating ellipsoid mirror respectively.
6. The high resolution high light collection efficiency X-ray micro-imaging optical structure according to claim 5, wherein: the design method for improving the effective light collecting solid angle is as follows: the method has the advantages of expanding the length and width of the mirror, improving the grazing incidence angle, improving the reflectivity of the mirror surface and reducing the object distance.
7. The high resolution, high light collection efficiency X-ray microscopic imaging optical structure according to claim 6, wherein: the open type rotating hyperboloid mirror and the open type rotating ellipsoidal mirror are prepared by adopting elastic emission processing and ion beam polishing optical processing technologies.
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