CN117705722A - One-dimensional X-ray microscopic imaging optical structure with large view field and high spatial resolution - Google Patents
One-dimensional X-ray microscopic imaging optical structure with large view field and high spatial resolution Download PDFInfo
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- CN117705722A CN117705722A CN202311485993.1A CN202311485993A CN117705722A CN 117705722 A CN117705722 A CN 117705722A CN 202311485993 A CN202311485993 A CN 202311485993A CN 117705722 A CN117705722 A CN 117705722A
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Abstract
The invention discloses a one-dimensional X-ray microscopic imaging optical structure with large view field and high spatial resolution, which relates to the technical field of X-ray imaging diagnosis, and the technical scheme is as follows: the system comprises an object point, an image point, a first reflecting mirror, a second reflecting mirror, a third reflecting mirror and a fourth reflecting mirror, wherein the first reflecting mirror, the second reflecting mirror, the third reflecting mirror and the fourth reflecting mirror have the same curvature radius and glancing incidence working angle, the first reflecting mirror and the second reflecting mirror are connected in series to form a first double-mirror structure, the third reflecting mirror and the fourth reflecting mirror are connected in series to form a second double-mirror structure, and the first double-mirror structure and the second double-mirror structure are oppositely arranged. The invention adopts a plurality of spherical mirrors or meridian cylindrical mirrors with the same structural parameters which are easy to process and obtain to continuously reflect, realizes large-view-field and high-resolution imaging, and does not need to resort to complex aspheric surface isofacial design which is difficult to process; the configuration can reduce the processing difficulty of the reflector, is convenient for system construction, has the submicron imaging capability of millimeter-level view field, and improves the microscopic imaging diagnosis capability.
Description
Technical Field
The invention relates to the technical field of X-ray imaging diagnosis, in particular to a one-dimensional X-ray microscopic imaging optical structure with a large field of view and high spatial resolution.
Background
Laser inertial confinement fusion (ICF, inertial Confinement Fusion) is one of the effective technological approaches for developing controlled nuclear fusion in the peace period, and is expected to solve the future energy problem. The high-resolution X-ray microscopic imaging technology can reveal phenomena and rules under the condition of extreme substances, and becomes a key technology for deeply understanding the implosion compression process and inverting implosion physical parameters.
Common X-ray imaging diagnosis techniques mainly comprise a pinhole camera, a Kirkpatrick-Baez (KB) microscope, a KBA microscope, a Wolter microscope, a spherical bent crystal and the like. X-ray microscopic imaging systems based on the principle of grazing incidence reflection operate at off-axis conditions in a grazing incidence manner, with the imaging image quality being primarily affected by the configurational vertical axis aberrations. When the imaging field of view range is enlarged to the millimeter level, the spatial resolution of the system may be significantly reduced as the field of view range is enlarged. Presently known grazing incidence reflective imaging optical structures have difficulty meeting millimeter-scale large field, high spatial resolution imaging requirements. In addition, due to the limitations of the optical initial configuration and the mirror processing level, the optimal spatial resolution of the X-ray microscopic imaging diagnostic systems currently used in diagnosis is limited to the order of 3-5 μm, which is difficult to further increase to < 3 μm and even sub-micron levels. The X-ray microscopic imaging technology with larger field of view and higher spatial resolution is a technology which is urgently needed by inertial confinement fusion imaging diagnosis, and is hopeful to reveal implosion compression detail characteristics which are difficult to discover or clearly see by the existing diagnostic equipment.
Disclosure of Invention
The invention aims to solve the problems, and provides a one-dimensional X-ray microscopic imaging optical structure with a large view field and high spatial resolution, which can effectively make up for the defects of the existing X-ray microscopic imaging optical structure in the aspects of large view field, high spatial resolution imaging and the like and can further improve the technical level of grazing incidence reflective imaging.
The technical aim of the invention is realized by the following technical scheme: the utility model provides a high spatial resolution's of large visual field one-dimensional X ray microscopic imaging optical structure, optical structure includes object point, first speculum, second speculum, third speculum, fourth speculum and image point, first speculum with the second speculum establishes ties and constitutes first double mirror structure, third speculum with the fourth speculum establishes ties and constitutes second double mirror structure, first double mirror structure with second double mirror structure is placed relatively, first speculum, second speculum, third speculum and fourth speculum have the same radius of curvature and glancing incidence operational angle.
The invention is further provided with: the first reflecting mirror, the second reflecting mirror, the third reflecting mirror and the fourth reflecting mirror are spherical mirrors.
The invention is further provided with: the first reflecting mirror, the second reflecting mirror, the third reflecting mirror and the fourth reflecting mirror are all meridian cylindrical mirrors.
The invention is further provided with: the combined focal power of the first double-lens structureThe expression of (2) is:
wherein R is the radius of curvature, θ, of the first and second mirrors 0 Is the grazing incidence angle, u 1 Is the distance from the object point to the center of the first mirror, u 2 Is the distance from the object point to the center of the second reflector;
the combined focal power of the first double-lens structureThe expression of (2) is:
wherein R is the radius of curvature, θ, of the third and fourth mirrors 0 Is the grazing incidence angle, u 3 Is the distance from the object point to the center of the third mirror, u 4 Is the distance from the object point to the center of the fourth mirror.
The invention is further provided with: combined optical power of the optical structureExpressed as:
wherein g 23 Is the spacing of the centers of the dual mirror configuration along the X-axis.
By adopting the technical scheme.
The invention is further provided with: the imaging formula of the optical structure in the meridian plane is as follows:
where u is the nominal object distance, defined as the distance from the object point to the center of the configuration, according to u= (u) 2 +u 3 ) Calculating to obtain M is magnification, f is equivalent focal length of the configuration;
accordingly, a relationship between the object distance and the optical power of the configuration is established, and the expression is:
by adopting the technical scheme.
The invention is further provided with: offset distance Z of the image point in the Z-axis direction img The method comprises the following steps:
Z img ＝[(M+1)u-(u 4 -u 1 )]tanθ 0 -(u 2 -u 1 )tanθ 0 -(u 4 -u 3 )tanθ 0 -(u 3 -u 2 )tan3θ 0 (6)
the effective geometrical collection solid angle Ω of the optical structure geo Representations such asThe following steps:
wherein w is the slit width of the detector on the order of 0.1mm; l (L) 1 Is the effective mirror length of the first mirror along the X axis; u (u) 1 Is the distance from the object point to the center of the first reflecting mirror, θ 0 Is the grazing incidence angle of the mirror;
effective light collecting solid angle omega of optical structure eff Calculated according to the following formula:
wherein eta 1 、η 2 、η 3 And eta 4 The reflectivity of the first mirror, the second mirror, the third mirror and the fourth mirror are respectively.
In summary, the invention has the following beneficial effects:
1. the spherical aberration and the off-axis aberration of the point on the axis are corrected through four grazing incidence reflections, so that the configuration has high spatial resolution imaging capability in a millimeter-level view field range, and imaging image quality is superior to that of the conventional grazing incidence reflection imaging optical structure, and the imaging optical structure comprises a single spherical reflection single mirror, KB configuration and the like;
2. the invention adopts a plurality of spherical mirrors (or meridian cylindrical mirrors) which are easy to process and obtain to continuously reflect, realizes large-view-field and high-resolution imaging, does not need to resort to complex aspheric surface and other surface designs which are difficult to process, and obviously reduces the optical processing and detection difficulty of the reflecting mirror through configuration design;
3. the invention adopts four spherical reflectors or meridian cylindrical lenses with the same size and the same curvature radius, and the parameters are completely the same and can be interchanged. And each reflecting mirror does not need to be customized, so that the processing and using difficulties of the reflecting mirrors are reduced, and the feasibility of the configuration is further improved.
4. After four grazing incidence reflections, the outgoing light rays of the patent configuration and the incoming light rays keep the same direction, namely the direction of the incoming light rays is not changed by the patent configuration. This has a great significance for the alignment of the beam paths, while simplifying the application to the synchrotron radiation beam line.
Drawings
FIG. 1 is a schematic diagram of a one-dimensional X-ray microscopic imaging optical structure with large field of view and high spatial resolution;
FIG. 2 is an imaging optical path in the meridian plane for a patent configuration;
FIG. 3 is an imaging optical path in the sagittal plane for a patent configuration;
FIG. 4 is a spatial resolution curve of an embodiment;
fig. 5 is a graph of spatial resolution of KBA configuration under the same conditions of use.
In the figure: 1. an object point; 2. a first double mirror structure; m1, a first reflecting mirror; m2, a second reflecting mirror; 3. a second double mirror structure; m3, a third mirror; m4, a fourth reflecting mirror; 4. an image point; 5. an image plane of the imaging detector.
Detailed Description
In order that those skilled in the art will better understand the present invention, a more particular description of the invention will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings, wherein it is to be understood that the illustrated embodiments are merely exemplary of some, but not all, of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
It should be noted that, without conflict, the embodiments of the present invention and features of the embodiments may be combined with each other. The present invention will be described in detail with reference to examples.
Examples:
as shown in fig. 1, a one-dimensional X-ray microscopic imaging optical structure with a large field of view and high spatial resolution comprises an object point 1, a first reflecting mirror M1, a second reflecting mirror M2, a third reflecting mirror M3, a fourth reflecting mirror M4 and an image point 4, wherein the four reflecting mirrors are all spherical mirrors (or meridian cylindrical mirrors) and are placed in series; the first reflecting mirror M1, the second reflecting mirror M2, the third reflecting mirror M3 and the fourth reflecting mirror M4 have the same curvature radius and glancing incidence working angle; the first mirror M1 and the second mirror M2 form a first double-mirror structure 2, and the third mirror M3 and the fourth mirror M4 are disposed on opposite sides of the first mirror M1 and the second mirror M2 to form a second double-mirror structure 3. The four grazing incidence reflectors act together to form an optical structure of one-dimensional microscopic imaging with large field of view and high spatial resolution.
The combined optical power of the first double mirror structure 2The expression is:
wherein R is the radius of curvature of the mirror, θ 0 Is the grazing incidence angle, u 1 Is the distance from the object point 1 to the center of the first mirror M1, u 2 Is the distance from the object point 1 to the center of the second mirror M2.
The combined optical power of the second double mirror structure 3The expression is:
wherein u is 3 Is the distance from the object point 1 to the center of the third mirror M3, u 4 Is the distance from the object point 1 to the center of the fourth mirror M4.
The combined focal power of the optical structure of the inventionExpressed as:
wherein: g 23 Is the spacing of the centers of the dual mirror configuration along the X-axis.
The imaging formula of the optical structure in the meridian plane is as follows:
where u is the nominal object distance, defined as the distance from the object point to the center of the configuration, according to u= (u) 2 +u 3 ) And (2) calculating to obtain that M is the magnification factor and f is the equivalent focal length of the configuration.
Hereby, a link between the object distance of the formation and the optical power can be established.
By combining the formulas (1) - (5), the key optical structural parameters of the patent configuration such as the nominal object distance u, the system magnification M and the glancing incidence angle theta can be completed 0 The radius of curvature R of the spherical mirror.
In the coordinate system shown in FIG. 2, the direction in which the outgoing light and the incoming light are consistent is configured, and the offset Z of the imaged image point in the Z-axis direction is calculated according to the following equation img ：
Z img ＝[(M+1)u-(u 4 -u 1 )]tanθ 0 -(u 2 -u 1 )tanθ 0 -(u 4 -u 3 )tanθ 0 -(u 3 -u 2 )tan3θ 0 (6)
As shown in fig. 3, the optical structure of the present invention has an effective geometrical light collecting solid angle Ω geo The expression is as follows:
wherein w is the slit width of the detector, which is adjustable, about 0.1mm; l (L) 1 Is the effective mirror length of the first mirror M1 along the X axis; u (u) 1 Is the distance θ between the object point and the center of the first mirror M1 0 Is the grazing incidence angle of the mirror.
The optical structure of the invention effectively collects light with solid angle omega eff The expression is as follows:
η1, η2, η3 and η4 are the reflectances of the first mirror M1, the second mirror M2, the third mirror M3 and the fourth mirror M4, respectively.
The embodiment is implemented by adopting four grazing incidence spherical reflectors, and an imaging object point 1, a first reflector M1, a second reflector M2, a third reflector M3, a fourth reflector M4 and an image point 4 are sequentially arranged from left to right. Four mirrors are placed in series and operated at a small glancing incidence angle. The four spherical mirrors have the same radius of curvature and glancing incidence angle. The first mirror M1 and the second mirror M2 form a first double-mirror structure 2, and the third mirror M3 and the fourth mirror M4 are disposed on opposite sides of the first mirror M1 and the second mirror M2 to form a second double-mirror structure 3.
The system level specifications for the optical structures are summarized in table 1. Wherein, the design grazing incidence working angle theta of the patent configuration 0 1 DEG, nominal object distance u of 500mm, magnification of 20X. The distances from the object point to the centers of the first mirror M1, the second mirror M2, the third mirror M3 and the fourth mirror M4 are 462.5mm,487.5mm,512.5mm and 537.5mm, respectively.
The response energy point of the optical structure is determined by the coating film on the surface of the reflecting mirror, and the response of a wide spectrum range or the response aiming at a specific energy point is realized according to the requirement. In the embodiment, the Cu K is realized by plating a W/Si periodic multilayer film on the surface of a reflector α1 8.04keV energy point response.
Table 1 technical index of optical structure
Using equations (1) to (5), the radius of curvature R of the spherical mirror can be calculated to be 211.39m. The optical structural parameters of the mirrors are shown in table 2.
Table 2 optical structural parameters of mirrors
a The spherical equation is: x is x 2 +y 2 +z 2 ＝R 2 ；
The direction of the emergent light and the direction of the incident light are kept consistent. In the coordinate system shown in fig. 2, the offset distance Z of the imaging point 4 in the Z-axis direction is calculated according to the following equation (6) img 179.8mm.
The geometric collection solid angle of the configuration is calculated according to formula (7). Limited by the detector slit width of 0.1mm, the geometrical light collection solid angle of the configuration is 7.77×10 -9 sr. Due to the one-dimensional imaging optical structure, the geometric light collection efficiency of the system is affected by the configuration and the slit width of the detector. In practical application, the signal to noise ratio of the acquired image can be combined, and the adjustment of the image intensity can be realized by switching slits with different widths. The geometric light collecting efficiency of the patent configuration is not limited to 10 -9 The sr order, which is artificially set to 500mm working distance for large field imaging in the embodiment, reduces the order of geometric light collection efficiency.
The effective light collecting solid angle considering the mirror efficiency was calculated according to formula (8), and the peak reflectance of the W/Si periodic multilayer film was 50%, then the effective light collecting solid angle was 4.86×10 -10 sr。
Fig. 4 shows the spatial resolution of the patent configuration in the meridian direction as a function of field of view (Z axis). The RMS value of the image plane speckle radius is used as the standard (converted to object space) for evaluating the image quality. Compared withConventional grazing incidence reflective imaging configurations, systems have imaging levels better than 3 μm and even near sub-micron in the millimeter scale field of view. Examples spatial resolution is better than 0.6 μm over a field of view of + -0.5 mm, spatial resolution of configuration is better than 1.0 μm over a field of view of more than
To further demonstrate the advantages of the present invention over conventional configurations in terms of spatial resolution, etc., fig. 5 shows the spatial resolution of KBA configurations (employing two spherical mirrors) under the same optical index requirements. The KBA configuration has the same glancing incidence angle, nominal object distance, magnification, etc. as the proprietary configuration, with a design radius of curvature of 102.6m. By contrast, the proprietary configuration has superior homeotropic aberration suppression capability, i.e., large field of view, high resolution imaging capability, compared to the KBA configuration. It can be seen that the advantages of the patent configuration are mainly reflected in the improvement of the resolution in the range of the central millimeter-scale field of view, which is helpful for improving the resolution of the X-ray grazing incidence reflective imaging to the submicron order. The traditional single spherical mirror or KB microscope configuration and the like do not have the inhibition capability on the vertical axis aberration, the spatial resolution of the configuration is rapidly reduced along with the expansion of the field of view, and the requirement of large-field high-resolution imaging is difficult to meet.
The present embodiment is only for explanation of the present invention and is not to be construed as limiting the present invention, and modifications to the present embodiment, which may not creatively contribute to the present invention as required by those skilled in the art after reading the present specification, are all protected by patent laws within the scope of claims of the present invention.
Claims (7)
1. A large-view-field high-spatial-resolution one-dimensional X-ray microscopic imaging optical structure is characterized in that: the optical structure comprises an object point (1), a first reflecting mirror (M1), a second reflecting mirror (M2), a third reflecting mirror (M3), a fourth reflecting mirror (M4) and an image point (6), wherein the first reflecting mirror (M1) and the second reflecting mirror (M2) are connected in series to form a first double-mirror structure (2), the third reflecting mirror (M3) and the fourth reflecting mirror (M4) are connected in series to form a second double-mirror structure (3), the first double-mirror structure (2) and the second double-mirror structure (3) are oppositely placed, and the first reflecting mirror (M1), the second reflecting mirror (M2), the third reflecting mirror (M3) and the fourth reflecting mirror (M4) have the same curvature radius and glancing incidence working angle.
2. A large field of view high spatial resolution one-dimensional X-ray microscopy imaging optical structure as defined in claim 1, wherein: the first reflecting mirror (M1), the second reflecting mirror (M2), the third reflecting mirror (M3) and the fourth reflecting mirror (M4) are spherical mirrors.
3. A large field of view high spatial resolution one-dimensional X-ray microscopy imaging optical structure as defined in claim 1, wherein: the first reflecting mirror (M1), the second reflecting mirror (M2), the third reflecting mirror (M3) and the fourth reflecting mirror (M4) are all meridian cylindrical mirrors.
4. A large field of view high spatial resolution one-dimensional X-ray microscopy imaging optical structure as defined in claim 1, wherein: the combined focal power of the first double-mirror structure (2)The expression of (2) is:
wherein R is the radius of curvature, θ, of the first mirror (M1) and the second mirror (M2) 0 Is the grazing incidence angle, u 1 Is the distance from the object point (1) to the center of the first mirror (M1), u 2 Is the distance from the object point (1) to the center of the second reflecting mirror (M2);
the combined focal power of the first double-mirror structure (2)The expression of (2) is:
wherein R is the radius of curvature, θ, of the third mirror (M3) and the fourth mirror (M4) 0 Is the grazing incidence angle, u 3 Is the distance from the object point (1) to the center of the third mirror (M3), u 4 Is the distance from the object point (1) to the center of the fourth mirror (M4).
5. The large field of view high spatial resolution one dimensional X-ray microscopy imaging optical structure of claim 4, wherein: combined optical power of the optical structureExpressed as:
6. the large field of view high spatial resolution one dimensional X-ray microscopy imaging optical structure of claim 5, wherein: the imaging formula of the optical structure in the meridian plane is as follows:
where u is the nominal object distance, defined as the distance from the object point to the center of the configuration, according to u= (u) 2 +u 3 ) Calculating to obtain M is magnification, f is equivalent focal length of the configuration;
accordingly, a relationship between the object distance and the optical power of the configuration is established, and the expression is:
7. the large field of view high spatial resolution one dimensional X-ray microscopy imaging optical structure of claim 6, wherein: offset distance Z of the image point (6) in the Z-axis direction img The method comprises the following steps:
Z img ＝[(M+1)u-(u 4 -u 1 )]tanθ 0 -(u 2 -u 1 )tanθ 0 -(u 4 -u 3 )tanθ 0 -(u 3 -u 2 )tan3θ 0 (6)
the effective geometrical collection solid angle Ω of the optical structure geo The expression is as follows:
wherein w is the slit width of the detector on the order of 0.1mm; l1 is the effective mirror length of the first mirror (M1) along the X-axis; u (u) 1 Is the distance, θ, from the object point (1) to the center of the first mirror (M1) 0 Is the grazing incidence angle of the mirror;
effective light collecting solid angle omega of optical structure eff Calculated according to the following formula:
wherein eta 1 、η 2 、η 3 And eta 4 The reflectances of the first mirror (M1), the second mirror (M2), the third mirror (M3) and the fourth mirror (M4) are respectively.
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