CN114185151A - Two-waveband image space telecentric scanning objective lens with long entrance pupil distance - Google Patents
Two-waveband image space telecentric scanning objective lens with long entrance pupil distance Download PDFInfo
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- 210000001747 pupil Anatomy 0.000 title claims abstract description 50
- 230000003287 optical effect Effects 0.000 claims abstract description 33
- 238000012544 monitoring process Methods 0.000 claims abstract description 27
- 238000003384 imaging method Methods 0.000 abstract description 19
- 230000004075 alteration Effects 0.000 abstract description 6
- 238000001514 detection method Methods 0.000 description 16
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/0015—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design
- G02B13/005—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design having spherical lenses only
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/0055—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing a special optical element
- G02B13/006—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing a special optical element at least one element being a compound optical element, e.g. cemented elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/22—Telecentric objectives or lens systems
Abstract
The invention discloses a two-waveband image space telecentric scanning objective lens with a long entrance pupil distance, which is sequentially provided with an entrance pupil and an optical lens group from an object side to an image side along an optical axis, wherein the optical lens group comprises: the optical lens comprises a first lens with positive focal power, a second lens with positive focal power, a third lens with positive focal power, a fourth lens with negative focal power, a fifth lens with positive focal power, a sixth lens with positive focal power, a seventh lens with negative focal power, an eighth lens with positive focal power, a ninth lens with negative focal power, a tenth cemented lens with positive focal power and an eleventh lens with positive focal power; the entrance pupil position is disposed at an object focal plane position of the lens assembly. In a traditional image space telecentric light path, the entrance pupil distance of the galvanometer scanning system can be designed into an optical system far larger than the focal length by utilizing secondary imaging; and the dual-waveband confocal design is added, so that the real-time monitoring has the advantages of full-field high-resolution imaging, small aberration and low distortion.
Description
Technical Field
The invention relates to the technical field of optics, in particular to a two-waveband image space telecentric scanning objective lens with a long entrance pupil distance.
Background
The principle of the galvanometer scanning system is that light beams are collimated and then are incident to a focusing lens after being reflected by XY axes, and the light beams are focused on a working plane by the focusing lens. The beam is moved in the focal plane by rotation of the X and Y axes. In a traditional monitoring type scanning galvanometer, a light beam emitted by a light source is collimated and then incident on an XY scanning galvanometer, the collimated light beam is reflected by the galvanometer and then incident on a spectroscope, and the collimated light beam is focused on a sample through a scanning objective lens, wherein the XY scanning galvanometer is arranged at the entrance pupil position of the scanning objective lens, and the entrance pupil position of the scanning objective lens is superposed with the object focal plane position of the scanning objective lens, so that the focusing light of the scanning objective lens is an image-side telecentric light path; the external annular light source irradiates on a sample, and light beams reflected by the sample pass through the scanning objective lens, the spectroscope and the 2D monitoring lens and then are focused on an imaging surface, so that the purpose of real-time monitoring is achieved.
Particularly, the front objective lens matched with the front objective lens is required to be an image space telecentric lens, the image space telecentric optical path means that the aperture diaphragm is arranged at an object space focal plane of the system, at the moment, the chief rays of the light beam entering the objective lens all pass through the center of the entrance pupil, namely, the object space focal point at the center of the aperture diaphragm, and in the image space, the chief rays are all parallel to the optical axis. The imaging telecentric lens is adopted, the imaging telecentric light path is used for modulating the direction of the chief ray, so that the chief ray emitted by the imaging space of the system is parallel to the optical axis, and the chief ray can approximately extend the original light path to return after being reflected by the surface of the sample by using the characteristics of the parallel light path. In the visible near-infrared band, namely 400nm-1000nm, an XY scanning galvanometer is placed at the diaphragm of a scanning objective lens, namely the entrance pupil position, and the entrance pupil distance of the traditional telecentric optical path is smaller than or equal to the focal length. The current image space telecentric scanning objective of the monitoring type galvanometer scanning system is shorter in entrance pupil distance than focal length, the galvanometer is placed at the diaphragm of the scanning objective, because the size of the galvanometer is larger, when the entrance pupil distance is not enough to place the galvanometer at the diaphragm position, the entrance pupil distance needs to be lengthened, the structure limitation is limited, the entrance pupil distance is possibly larger than the focal length at the moment, when the entrance pupil distance is larger than the focal length, if a single group of lens is adopted, the lens caliber of the whole system is larger, the material selection and processing are more difficult, simultaneously, the imaging space telecentric optical path cannot be designed through one-time imaging, the long entrance pupil distance cannot be met, and the requirement of real-time 2D monitoring is met.
Therefore, it is necessary to design a two-band image space telecentric scanning objective lens with a long entrance pupil distance, and a secondary imaging structure is adopted, so that when the galvanometer is placed in a sufficient space, the whole optical path system is an image space telecentric optical path, and the requirement of performing 2D monitoring while 3D detection is met.
Disclosure of Invention
In order to overcome the defects of the prior art, the two-waveband image space telecentric scanning objective lens with the long entrance pupil distance can meet the imaging requirement of a system and realize 2D monitoring during two-waveband light splitting.
The technical scheme adopted by the invention is as follows:
a two-waveband image space telecentric scanning objective lens with long entrance pupil distance comprises an entrance pupil and an optical lens group from the object side to the image side along the optical axis, wherein the optical lens group comprises: the optical lens comprises a first lens with positive focal power, a second lens with positive focal power, a third lens with positive focal power, a fourth lens with negative focal power, a fifth lens with positive focal power, a sixth lens with positive focal power, a seventh lens with negative focal power, an eighth lens with positive focal power, a ninth lens with negative focal power, a tenth cemented lens with positive focal power and an eleventh lens with positive focal power; the entrance pupil position is disposed at an object focal plane position of the lens assembly.
Preferably, the entrance pupil distance of the two-waveband image space telecentric scanning objective lens is L, wherein L is more than or equal to 70mm and less than or equal to 90 mm.
Preferably, the focal length of the two-band image-side telecentric scanning objective lens is f, wherein | f | < L.
Preferably, the focal length of each lens in the optical lens group is f in sequence1、f2、f3、f4、f5、f6、f7、f8、f9、f10、f11Wherein the value range is as follows: -3. ltoreq. f1/f≤-0.5、-6≤f2/f≤-0.5、-3≤f3/f≤-0.5、0.2≤f4/f≤2、-3≤f5≤-0.5、-2≤f6/f≤-0.2、0.1≤f7/f≤2、-3≤f8/f≤-0.2、0.2≤f9/f≤3、-3≤f10/f≤-0.5、-3≤f11≤-0.2。
Preferably, the first and second electrodes are formed of a metal,
the first lens and the second lens are spaced by d1Wherein-0.1 is not more than d1/f≤-0.005，
The second lens is spaced from the third lens by a distance d2Wherein-2 is not more than d2/f≤-1，
The third lens and the fourth lens are spaced by d3Wherein-0.5 is not more than d3/f≤-0.05，
The fourth lens and the fifth lens are spaced by d4Wherein-1 is not more than d4/f≤-0.2，
The interval between the fifth lens and the sixth lens is d5Wherein-0.1 is not more than d5/f≤-0.005，
The sixth lens and the seventh lens are spaced by d6Wherein-1 is not more than d6/f≤-0.2，
The seventh lens and the eighth lens are spaced by d7Wherein-1 is not more than d7/f≤-0.2，
The eighth lens is spaced from the ninth lens by an interval d8Wherein-1 is not more than d8/f≤-0.1，
The ninth lens is spaced from the tenth cemented lens by an interval d9Wherein-0.1 is not more than d9/f≤-0.005，
The tenth cemented lens is spaced apart from the eleventh lens by a distance d10Wherein-0.1 is not more than d10/f≤-0.005。
Preferably, the working wave band of the two-wave-band image-space telecentric scanning objective lens is divided into a 3D interference detection working wave band and a 2D monitoring working wave band, the range of the 3D interference detection working wave band is 840 +/-20 nm, and the range of the 2D monitoring working wave band is 630 +/-20 nm.
Preferably, the tenth cemented lens is in the form of a positive power lens-negative power lens structure.
Preferably, each lens in the optical lens group is a spherical lens.
Compared with the prior art, the invention has the beneficial effects that:
the focal length of the integral objective lens is-35.5 mm, the entrance pupil distance is 70-90mm, the working wavelength band of 3D interference detection is 840 +/-20 nm, and the working wavelength band of 2D monitoring is 630 +/-20 nm. Therefore, on the basis of the traditional image space telecentric light path principle, the entrance pupil distance of the galvanometer scanning system can be designed into an optical system far larger than the focal length by utilizing secondary imaging, and enough space can be provided for placing the galvanometer at the diaphragm, namely the entrance pupil; the system is mainly used for a white light interference system in the field of industrial machine vision detection, the 3D interference detection working wave band is 840 +/-20 nm, a dual-wave-band confocal design is added, and when the main wave band 840 +/-20 nm carries out interference detection on a sample, the 2D monitoring wave band 630 +/-20 nm realizes real-time synchronous monitoring. Because each lens of the objective lens has reasonable focal power distribution and reasonable distance, aberration can be effectively inhibited, the long-entrance pupil distance and two-waveband image space telecentric objective lens is designed, and the objective lens has the advantages of full-field high-resolution imaging, small aberration and low distortion.
Drawings
FIG. 1 is a structural diagram of a two-band image space telecentric scanning objective lens provided by the present invention;
FIG. 2 is a structural view of a scanning objective lens with an entrance pupil distance of 90mm provided in example 1;
FIG. 3 is a graph of MTF of the scanning objective lens in example 1 in a 3D interferometric detection operating band 840 + -20 nm;
FIG. 4 is a graph of MTF of the scanning objective lens in example 1 in the 2D monitoring operation band 630 + -20 nm;
FIG. 5 is a graph showing the distortion of the scanning objective lens in the working wavelength range 840. + -.20 nm of 3D interference detection in example 1
FIG. 6 is a distortion curve diagram of the scanning objective lens in example 1 in the 2D monitoring operation wavelength band 630 +/-20 nm;
FIG. 7 is a telecentricity curve diagram of the scanning objective lens in example 1 in a 3D interferometric working wavelength range 840 +/-20 nm;
FIG. 8 is a graph of telecentricity of the scanning objective in example 1 in the 2D monitoring operating band 630. + -.20 nm;
FIG. 9 is a view showing the structure of a scanning objective lens having an entrance pupil distance of 80mm as provided in example 2;
FIG. 10 is a graph of MTF of the scanning objective lens in the working wavelength range 840 + -20 nm for 3D interference detection in example 2;
FIG. 11 is a graph of MTF of the scanning objective lens in example 2 in the 2D monitoring operation band 630 + -20 nm;
FIG. 12 is a graph showing the distortion of the scanning objective lens in the 3D interferometric detection operating band 840. + -.20 nm and in example 2;
FIG. 13 is a distortion curve diagram of the scanning objective lens in example 2 in the 2D monitoring operation wavelength band 630 +/-20 nm;
FIG. 14 is a graph of telecentricity of the scanning objective lens in example 2 in a 3D interferometric working wavelength range 840. + -.20 nm;
FIG. 15 is a graph of telecentricity of the scanning objective lens in example 2 in the 2D monitoring operating band 630. + -.20 nm;
FIG. 16 is a structure diagram of a two-band image-side telecentric scanning objective lens with an entrance pupil distance of 70mm provided in example 3;
FIG. 17 is a graph of MTF of the scanning objective lens in the working wavelength range 840 + -20 nm for 3D interference detection in example 3;
FIG. 18 is a graph of MTF of the scanning objective lens in example 3 in the 2D monitoring operation band 630 + -20 nm;
FIG. 19 is a graph showing the distortion of the scanning objective lens in the 3D interferometric detection operating band 840. + -.20 nm in example 3;
FIG. 20 is a distortion curve diagram of the scanning objective lens in example 3 in the 2D monitoring operation wavelength band 630 +/-20 nm;
FIG. 21 is a graph of telecentricity of the scanning objective lens in example 3 in a 3D interferometric working wavelength range 840. + -.20 nm;
FIG. 22 is a graph of telecentricity of the scanning objective lens in example 3 in the 2D monitoring operating band 630. + -.20 nm;
wherein: 1-a first lens; 2-a second lens; 3-a third lens; 4-a fourth lens; 5-a fifth lens; 6-sixth lens; 7-a seventh lens; 8-an eighth lens; 9-ninth lens; 10-a cemented lens; 11-eleventh lens; 12-entrance pupil; 13-chief ray of each field of view; and 14, imaging.
Detailed Description
In order to make the purpose and technical solution of the embodiments of the present invention clearer, the technical solution of the present invention will be clearly and completely described below with reference to the embodiments of the present invention.
In the description of the present application, it is to be understood that the terms "length," "upper," "lower," "vertical," "horizontal," and the like, indicate an orientation or positional relationship based on that shown in the drawings, merely for convenience of description and simplicity of description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered limiting of the present application.
As shown, a two-band image space telecentric scanning objective lens with a long entrance pupil distance comprises an entrance pupil 12 and an optical lens group in sequence from an object side to an image side along an optical axis, wherein the optical lens group comprises: the optical lens comprises a first lens 1 with positive focal power, a second lens 2 with positive focal power, a third lens 3 with positive focal power, a fourth lens 4 with negative focal power, a fifth lens 5 with positive focal power, a sixth lens 6 with positive focal power, a seventh lens 7 with negative focal power, an eighth lens 8 with positive focal power, a ninth lens 9 with negative focal power, a tenth cemented lens 10 with positive focal power and an eleventh lens 11 with positive focal power; the entrance pupil 12 position is set at the object focal plane position of the lens assembly.
The focal length of each lens in the optical lens group is f in sequence1、f2、f3、f4、f5、f6、f7、f8、f9、f10、f11Wherein the value range is as follows: -3≤f1/f≤-0.5、-6≤f2/f≤-0.5、-3≤f3/f≤-0.5、0.2≤f4/f≤2、-3≤f5≤-0.5、-2≤f6/f≤-0.2、0.1≤f7/f≤2、-3≤f8/f≤-0.2、0.2≤f9/f≤3、-3≤f10/f≤-0.5、-3≤f11≤-0.2。
The first lens 1 and the second lens 2 are spaced by d1Wherein-0.1 is not more than d1The distance between the second lens 2 and the third lens 3 is d2Wherein-2 is not more than d2The distance between the third lens 3 and the fourth lens 4 is d3Wherein-0.5 is not more than d3The distance between the fourth lens 4 and the fifth lens 5 is d4Wherein-1 is not more than d4The distance between the fifth lens 5 and the sixth lens 6 is d5Wherein-0.1 is not more than d5The distance d between the sixth lens 6 and the seventh lens 7 is less than or equal to-0.0056Wherein-1 is not more than d6The distance d between the seventh lens 7 and the eighth lens 8 is less than or equal to-0.27Wherein-1 is not more than d7The distance between the eighth lens 8 and the ninth lens 9 is d8Wherein-1 is not more than d8The distance d between the ninth lens 9 and the tenth cemented lens 10 is less than or equal to-0.19Wherein-0.1 is not more than d9Is less than or equal to-0.005, and the tenth cemented lens 10 is spaced from the eleventh lens 11 by a distance d10Wherein-0.1 is not more than d10/f≤-0.005。
In the parameter table of the following embodiments, the chinese meaning of each english name is: nd: material refractive index, vd: abbe coefficient of the material. In the parameter table: the object focal plane where the entrance pupil is located is denoted by surface number 0, the object focal plane where the entrance pupil is located is denoted by surface numbers 1 and 2, the two surfaces of the first lens 1 are denoted by surface numbers 3 and 4, the two surfaces of the second lens 2 are denoted by surface numbers 5 and 6, the two surfaces of the third lens 3 are denoted by surface numbers 7 and 8, the two surfaces of the fourth lens 4 are denoted by surface numbers 9 and 10, the two surfaces of the fifth lens 5 are denoted by surface numbers 11 and 12, the two surfaces of the sixth lens 6 are denoted by surface numbers 13 and 14, the two surfaces of the seventh lens 7 are denoted by surface numbers 15 and 16, the two surfaces of the eighth lens 8 are denoted by surface numbers 17 and 18, the two surfaces of the ninth lens 9 are denoted by surface numbers 19 and 20, the two surfaces of the tenth cemented lens 10, the two surfaces of the eleventh lens 11 are denoted by surface numbers 21 and 22, and the image plane is denoted by surface number 23.
The pitch shown in the table is a pitch between each surface of the lens and the next lens surface, and if the pitch is a pitch between two surfaces of the same lens, the thickness of the lens is shown, if the pitch is a pitch between different lens surfaces, the distance between the lenses is shown, the pitch shown in the row with the surface number of 0 indicates a distance between the surface number of the first lens and the object focal plane where the entrance pupil is located, that is, the entrance pupil distance L in the present invention.
Example one
The invention will be described in detail with reference to fig. 1 and fig. 2 to 8, according to an embodiment of the invention. By utilizing the structure of the two-waveband image space telecentric scanning objective lens, the scanning objective lens with the focal length of-35.5 mm and the entrance pupil distance of 90mm is designed, wherein the 3D interference detection working waveband is 840 +/-20 nm, and the 2D monitoring working waveband is 630 +/-20 nm. The detailed design structure is shown in fig. 2, and the detailed design parameters are shown in table (1).
TABLE (1) scanning Objective lens parameters with entrance pupil distance of 90mm
Lens imaging quality MTF graphs are shown in fig. 3 and 4, the MTF is close to a diffraction limit in a full field, and the lens has high resolution; the lens distortion curves are shown in fig. 5 and 6, and the distortion is less than 2%; the lens telecentricity curve is shown in fig. 7 and 8, the telecentricity CRA is less than or equal to 0.3 degrees, that is, the included angle between the principal ray of the emergent light beam of each view field and the optical axis is less than 0.3 degrees. The size of the telecentricity affects the magnification error of the detected object, and the smaller the telecentricity is, the smaller the magnification error is.
Therefore, in the first embodiment, as can be seen from fig. 3 to 8, the galvanometer scanning lens design has the advantages of full-field high-resolution imaging, small aberration and low distortion.
Example two
The invention will be described in detail with reference to fig. 1 and 9-15, according to an embodiment of the invention. By utilizing the structure of the two-waveband image space telecentric scanning objective lens, the scanning objective lens with the focal length of-35.5 mm and the entrance pupil distance of 80mm is designed, wherein the 3D interference detection working waveband is 840 +/-20 nm, and the 2D monitoring working waveband is 630 +/-20 nm. The detailed design structure is shown in fig. 9, and the detailed design parameters are shown in table (2).
TABLE (2) parameters of scanning objective lens with entrance pupil distance of 80mm
Lens imaging quality MTF graphs are shown in FIGS. 10 and 11, the MTF is close to the diffraction limit in the full field of view, and the lens has high resolution; the lens distortion curves are shown in fig. 12 and 13, and the distortion is less than 2%; the lens telecentricity curve is shown in fig. 14 and fig. 15, the telecentricity CRA is less than or equal to 0.3 degrees, that is, the included angle between the principal ray of the emergent light beam of each field and the optical axis is less than 0.3 degrees.
Therefore, in the second embodiment, as can be seen from fig. 10 to fig. 15, the galvanometer scanning lens design has the advantages of full-field high-resolution imaging, small aberration and low distortion.
EXAMPLE III
The invention will be described in detail with reference to fig. 1 and fig. 16 to 22, according to an embodiment of the invention. By utilizing the structure of the two-waveband image space telecentric scanning objective lens, the scanning objective lens with the focal length of-35.5 mm and the entrance pupil distance of 70mm is designed, wherein the 3D interference detection working waveband is 840 +/-20 nm, and the 2D monitoring working waveband is 630 +/-20 nm. The detailed design structure is shown in fig. 16, and the detailed design parameters are shown in table (3).
TABLE (3) parameters of scanning objective lens with entrance pupil distance of 70mm
Lens imaging quality MTF graphs are shown in FIGS. 17 and 18, the MTF is close to the diffraction limit in the full field of view, and the lens has high resolution; the lens distortion curves are shown in fig. 19 and 20, and the distortion is less than 2%; the lens telecentricity curve is shown in fig. 20 and 21, the telecentricity CRA is less than or equal to 0.3 degrees, that is, the included angle between the principal ray of the emergent light beam of each view field and the optical axis is less than 0.3 degrees.
Therefore, in the third embodiment, as can be seen from fig. 17 to 22, the galvanometer scanning lens design has the advantages of full-field high-resolution imaging, small aberration and low distortion.
The above are merely embodiments of the present invention, which are described in detail and with particularity, and therefore should not be construed as limiting the scope of the invention. It should be noted that, for those skilled in the art, various changes and modifications can be made without departing from the spirit of the present invention, and these changes and modifications are within the scope of the present invention.
Claims (8)
1. The utility model provides a two-waveband image space telecentric scanning objective with long income interpupillary distance, is entrance pupil and optical lens group along optical axis from the thing side to image side in proper order, its characterized in that:
the optical lens group comprises: the optical lens comprises a first lens with positive focal power, a second lens with positive focal power, a third lens with positive focal power, a fourth lens with negative focal power, a fifth lens with positive focal power, a sixth lens with positive focal power, a seventh lens with negative focal power, an eighth lens with positive focal power, a ninth lens with negative focal power, a tenth cemented lens with positive focal power and an eleventh lens with positive focal power; the entrance pupil position is disposed at an object focal plane position of the lens assembly.
2. The objective of claim 1, wherein the objective comprises: the entrance pupil distance of the two-waveband image space telecentric scanning objective lens is L, wherein L is more than or equal to 70mm and less than or equal to 90 mm.
3. The objective of claim 2, wherein the objective comprises: the focal length of the two-waveband image space telecentric scanning objective lens is f, wherein | f | < L.
4. A two-band image-side telecentric scanning objective lens with a long entrance pupil distance as claimed in claim 3, wherein: the focal length of each lens in the optical lens group is f in sequence1、f2、f3、f4、f5、f6、f7、f8、f9、f10、f11Wherein the value range is as follows: -3. ltoreq. f1/f≤-0.5、-6≤f2/f≤-0.5、-3≤f3/f≤-0.5、0.2≤f4/f≤2、-3≤f5≤-0.5、-2≤f6/f≤-0.2、0.1≤f7/f≤2、-3≤f8/f≤-0.2、0.2≤f9/f≤3、-3≤f10/f≤-0.5、-3≤f11≤-0.2。
5. A two-band image-side telecentric scanning objective lens with a long entrance pupil distance as claimed in claim 3, wherein:
the first lens and the second lens are spaced by d1Wherein-0.1 is not more than d1/f≤-0.005，
The second lens is spaced from the third lens by a distance d2Wherein-2 is not more than d2/f≤-1，
The third lens and the fourth lens are spaced by d3Wherein-0.5 is not more than d3/f≤-0.05，
The fourth lens and the fifth lens are spaced by d4Wherein-1 is not more than d4/f≤-0.2，
The interval between the fifth lens and the sixth lens is d5Wherein-0.1 is not more than d5/f≤-0.005，
The sixth lens and the seventh lens are spaced by d6Wherein-1 is not more than d6/f≤-0.2，
The seventh lens and the eighth lens are spaced by d7Wherein-1 is not more than d7/f≤-0.2，
The eighth lens is spaced from the ninth lens by an interval d8Wherein-1 is not more than d8/f≤-0.1，
The ninth lens is spaced from the tenth cemented lens by an interval d9Wherein-0.1 is not more than d9/f≤-0.005，
The tenth cemented lens is spaced apart from the eleventh lens by a distance d10Wherein-0.1 is not more than d10/f≤-0.005。
6. The objective of claim 1, wherein the objective comprises: the working wave band of the double-wave-band image space telecentric scanning objective lens is divided into a common working wave band and a 2D monitoring working wave band, the range of the common working wave band is 840 +/-20 nm, and the range of the 2D monitoring working wave band is 630 +/-20 nm.
7. The objective of claim 1, wherein the objective comprises: the tenth cemented lens adopts a structural form of a positive focal power lens and a negative focal power lens.
8. The objective of claim 1, wherein the objective comprises: and each lens in the optical lens group is a spherical lens.
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| CN115128782A (en) * | 2022-07-06 | 2022-09-30 | 闽都创新实验室 | High-magnification long-working-distance coaxial illumination telecentric optical system and lens |
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| CN111722382A (en) * | 2020-07-24 | 2020-09-29 | 东莞市宇瞳光学科技股份有限公司 | Visual lens |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115128782A (en) * | 2022-07-06 | 2022-09-30 | 闽都创新实验室 | High-magnification long-working-distance coaxial illumination telecentric optical system and lens |
| CN115128782B (en) * | 2022-07-06 | 2024-02-02 | 闽都创新实验室 | High-magnification long-working-distance coaxial illumination telecentric optical system and lens |
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| CN114185151B (en) | 2024-04-30 |
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