CN114185151B - Dual-band image space telecentric scanning objective lens with long entrance pupil distance - Google Patents
Dual-band image space telecentric scanning objective lens with long entrance pupil distance Download PDFInfo
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- CN114185151B CN114185151B CN202111456530.3A CN202111456530A CN114185151B CN 114185151 B CN114185151 B CN 114185151B CN 202111456530 A CN202111456530 A CN 202111456530A CN 114185151 B CN114185151 B CN 114185151B
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- 210000001747 pupil Anatomy 0.000 title claims abstract description 51
- 230000003287 optical effect Effects 0.000 claims abstract description 37
- 238000012544 monitoring process Methods 0.000 claims description 27
- 230000009977 dual effect Effects 0.000 claims 3
- 238000003384 imaging method Methods 0.000 abstract description 14
- 230000004075 alteration Effects 0.000 abstract description 6
- 238000001514 detection method Methods 0.000 description 13
- 238000010586 diagram Methods 0.000 description 5
- 238000010276 construction Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/0015—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design
- G02B13/005—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design having spherical lenses only
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/0055—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing a special optical element
- G02B13/006—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing a special optical element at least one element being a compound optical element, e.g. cemented elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/22—Telecentric objectives or lens systems
Abstract
The invention discloses a dual-band image space telecentric scanning objective lens with long entrance pupil distance, which sequentially comprises an entrance pupil and an optical lens group from an object side to an image side along an optical axis, wherein the optical lens group comprises the following components sequentially arranged: a first lens with positive focal power, a second lens with positive focal power, a third lens with positive focal power, a fourth lens with negative focal power, a fifth lens with positive focal power, a sixth lens with positive focal power, a seventh lens with negative focal power, an eighth lens with positive focal power, a ninth lens with negative focal power, a tenth cemented lens with positive focal power and an eleventh lens with positive focal power; the entrance pupil position is arranged at an object focal plane position of the lens combination. According to the invention, on a traditional image space telecentric optical path, the entrance pupil distance of a galvanometer scanning system can be designed into an optical system far larger than a focal length by utilizing secondary imaging; and a dual-band confocal design is added, so that the advantages of full-view-field high-resolution imaging, small aberration and low distortion are realized.
Description
Technical Field
The invention relates to the technical field of optics, in particular to a dual-band image space telecentric scanning objective lens with long entrance pupil distance.
Background
The principle of the galvanometer scanning system is that the light beam is collimated and then reflected by the XY axis to enter a focusing lens, and the light beam is focused on a working plane by the focusing lens. The beam is moved in the focal plane by rotation of the X and Y axes. In the traditional monitoring type scanning galvanometer, light beams emitted by a light source are collimated and then are incident on an XY scanning galvanometer, reflected by the galvanometer and then are incident on a spectroscope, and the collimated light beams are focused on a sample through a scanning objective lens, wherein the XY scanning galvanometer is arranged at the entrance pupil position of the scanning objective lens, and the entrance pupil position of the scanning objective lens is overlapped with the object space focal plane position of the scanning objective lens, so that the focusing light of the scanning objective lens is an image space telecentric light path; the external annular light source irradiates the sample, and the light beam reflected by the sample passes through the scanning objective lens, the spectroscope and the 2D monitoring lens and is focused on the imaging surface, so that the purpose of real-time monitoring is achieved.
In particular, the front objective lens matched with the front objective lens is required to be an image space telecentric lens, wherein an aperture diaphragm is arranged at an object space focal plane of the system, and at the moment, all principal rays of a light beam entering the objective lens pass through the center of an entrance pupil, namely an object space focal point of the center of the aperture diaphragm, and are parallel to an optical axis at the image space. The image side telecentric lens is adopted, the principal ray emitted by the image side of the system is parallel to the optical axis by utilizing the modulation of the image side telecentric light path on the principal ray trend, and the characteristic of the parallel light path is utilized, so that the light can return along the original light path approximately after being reflected by the surface of the sample. In the near infrared band of visible light, i.e. 400nm-1000nm, an XY scanning galvanometer is placed at the diaphragm of a scanning objective, i.e. the entrance pupil position, and the entrance pupil distance of a traditional telecentric light path is smaller than or equal to the focal length. The existing image space telecentric scanning objective lens of the monitoring type galvanometer scanning system is shorter in entrance pupil distance than focal length, the galvanometer is placed at the position of a scanning objective lens diaphragm, due to the fact that the size of the galvanometer is large, when the entrance pupil distance is insufficient to place the galvanometer at the position of the diaphragm, the entrance pupil distance needs to be lengthened, the monitoring type galvanometer scanning system is limited by structures, the entrance pupil distance is possibly larger than the focal length, when the entrance pupil distance is larger than the focal length, if a single lens is adopted, the aperture of the lens of the whole system is large, materials are difficult to select and process, an imaging space telecentric light path cannot be designed at one time, and the requirements of long entrance pupil distance and real-time 2D monitoring cannot be met.
Therefore, it is necessary to design a dual-band image space telecentric scanning objective lens with a long entrance pupil distance, and adopt a secondary imaging structure, so that the whole optical path system is an image space telecentric optical path while a sufficient space is provided for placing the galvanometer, and the requirement of 2D monitoring while 3D detection is met.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention provides the dual-band image space telecentric scanning objective lens with a long entrance pupil distance, which can meet the imaging requirement of a system and realize 2D monitoring when in dual-band beam splitting work.
The technical scheme adopted by the invention is as follows:
A dual-band image-side telecentric scan objective with a long entrance pupil distance, in order from an object side to an image side along an optical axis, an entrance pupil and an optical lens group, the optical lens group comprising, in order: a first lens with positive focal power, a second lens with positive focal power, a third lens with positive focal power, a fourth lens with negative focal power, a fifth lens with positive focal power, a sixth lens with positive focal power, a seventh lens with negative focal power, an eighth lens with positive focal power, a ninth lens with negative focal power, a tenth cemented lens with positive focal power and an eleventh lens with positive focal power; the entrance pupil position is arranged at an object focal plane position of the lens combination.
Preferably, the entrance pupil distance of the dual-band image space telecentric scanning objective lens is L, wherein L is more than or equal to 70mm and less than or equal to 90mm.
Preferably, the focal length of the dual-band image-side telecentric scan objective is f, where |f| < L.
Preferably, the focal length of each lens in the optical lens group is f1、f2、f3、f4、f5、f6、f7、f8、f9、f10、f11, in turn, wherein the range of values is ：-3≤f1/f≤-0.5、-6≤f2/f≤-0.5、-3≤f3/f≤-0.5、0.2≤f4/f≤2、-3≤f5/f≤-0.5、-2≤f6/f≤-0.2、0.1≤f7/f≤2、-3≤f8/f≤-0.2、0.2≤f9/f≤3、-3≤f10/f≤-0.5、-3≤f11/f≤-0.2.
Preferably, the first lens and the second lens are separated by d 1, wherein d 1/f is less than or equal to-0.1 and less than or equal to-0.005,
The interval between the second lens and the third lens is d 2, wherein d 2/f is less than or equal to-2 and less than or equal to-1,
The interval between the third lens and the fourth lens is d 3, wherein d 3/f is less than or equal to-0.5 and less than or equal to-0.05,
The interval between the fourth lens and the fifth lens is d 4, wherein d 4/f is less than or equal to-1 and less than or equal to-0.2,
The interval between the fifth lens and the sixth lens is d 5, wherein d 5/f is more than or equal to-0.1 and less than or equal to-0.005,
The interval between the sixth lens and the seventh lens is d 6, wherein d 6/f is less than or equal to-1 and less than or equal to-0.2,
The interval between the seventh lens and the eighth lens is d 7, wherein d 7/f is less than or equal to-1 and less than or equal to-0.2,
The interval between the eighth lens and the ninth lens is d 8, wherein d 8/f is less than or equal to-1 and less than or equal to-0.1,
The distance between the ninth lens and the tenth cemented lens is d 9, wherein d 9/f is more than or equal to-0.1 and less than or equal to-0.005,
The distance between the tenth cemented lens and the eleventh lens is d 10, wherein d 10/f is more than or equal to-0.1 and less than or equal to-0.005.
Preferably, the working wave band of the dual-band image space telecentric scanning objective lens is divided into a 3D interference detection working wave band and a 2D monitoring working wave band, the range of the 3D interference detection working wave band is 840+/-20 nm, and the range of the 2D monitoring working wave band is 630+/-20 nm.
Preferably, the tenth cemented lens is in the form of a positive power lens-negative power lens configuration.
Preferably, each lens in the optical lens group is a spherical lens.
Compared with the prior art, the invention has the beneficial effects that:
The focal length of the integral objective lens is-35.5 mm, the entrance pupil distance is 70-90mm, the 3D interference detection working wave band is 840+/-20 nm, and the 2D monitoring working wave band is 630+/-20 nm. Therefore, on the basis of the traditional image space telecentric light path principle, the entrance pupil distance of the galvanometer scanning system can be designed to be far larger than the optical system of the focal length by utilizing secondary imaging, and enough space can be provided for placing the galvanometer at the diaphragm, namely the entrance pupil; the system is mainly used for a white light interference system in the field of industrial machine vision detection, the working wave band of the 3D interference detection is 840+/-20 nm, a dual-wave-band confocal design is added, and when the interference detection is carried out on a sample, the main wave band 840+/-20 nm realizes real-time synchronous monitoring by the 2D monitoring wave band 630+/-20 nm. Because each lens of the objective lens has reasonable focal power distribution and reasonable spacing, aberration can be effectively inhibited, and the objective lens with long entrance pupil distance and double-band image space telecentric is designed, and has the advantages of full-view field high-resolution imaging, small aberration and low distortion.
Drawings
FIG. 1 is a block diagram of a dual-band image-side telecentric scan objective provided by the present invention;
FIG. 2 is a view showing the construction of a scanning objective lens having an entrance pupil distance of 90mm provided in example 1;
FIG. 3 is a graph of MTF for the scanning objective lens of example 1 at 840.+ -.20 nm in the 3D interferometric operating band;
FIG. 4 is a graph of MTF for the scanning objective of example 1 at 630+ -20 nm of the 2D monitoring band of operation;
FIG. 5 is a graph showing the distortion of the scanning objective lens in example 1 at 840.+ -.20 nm of the 3D interferometric detection operating band
FIG. 6 is a graph of distortion of the scanning objective of example 1 at a 2D monitoring operating band of 630+ -20 nm;
FIG. 7 is a plot of telecentricity of the scanning objective lens of example 1 at 840.+ -.20 nm in the 3D interferometric operating band;
FIG. 8 is a plot of telecentricity of the scanning objective of example 1 at a 2D monitoring operating band of 630+ -20 nm;
FIG. 9 is a view showing the construction of a scanning objective lens having an entrance pupil distance of 80mm provided in example 2;
FIG. 10 is a graph showing the MTF of the scanning objective lens of example 2 at 840.+ -.20 nm in the 3D interferometric operating band;
FIG. 11 is a graph of MTF for the scanning objective of example 2 at 630+ -20 nm of the 2D monitoring band of operation;
FIG. 12 is a graph showing distortion of the scanning objective lens in example 2 at a sum of 840.+ -. 20nm in the 3D interference detection operating band;
FIG. 13 is a graph of distortion of the scanning objective of example 2 at 630+ -20 nm of the 2D monitoring band of operation;
FIG. 14 is a plot of telecentricity of the scanning objective lens of example 2 at 840.+ -.20 nm in the 3D interferometric operating band;
FIG. 15 is a plot of telecentricity of the scanning objective of example 2 at a 2D monitoring operating band of 630+ -20 nm;
FIG. 16 is a block diagram of a two-band image-side telecentric scan objective lens with an entrance pupil distance of 70mm provided in example 3;
FIG. 17 is a graph showing the MTF of the scanning objective lens of example 3 at 840.+ -.20 nm in the 3D interferometric operating band;
FIG. 18 is a graph of MTF for the scanning objective of example 3 at 630+ -20 nm of the 2D monitoring band of operation;
FIG. 19 is a graph showing the distortion of the scanning objective lens in example 3 at 840.+ -.20 nm in the 3D interferometric detection operating band;
FIG. 20 is a graph of distortion of the scanning objective of example 3 at a 2D monitoring operating band of 630+ -20 nm;
FIG. 21 is a plot of telecentricity of the scanning objective lens of example 3 at 840.+ -.20 nm in the 3D interferometric operating band;
FIG. 22 is a plot of telecentricity of the scanning objective of example 3 at a 2D monitoring operating band of 630+ -20 nm; wherein: 1-a first lens; 2-a second lens; 3-a third lens; 4-a fourth lens; 5-a fifth lens; 6-a sixth lens; 7-seventh lens; 8-eighth lens; 9-a ninth lens; 10-a cemented lens;
11-eleventh lens; 12-entrance pupil; 13-principal ray of each field of view; 14 image plane.
Detailed Description
In order to make the purpose and technical solution of the embodiments of the present invention more clear, the technical solution of the present invention will be clearly and completely described below in connection with the embodiments of the present invention.
In the description of the present application, it should be understood that the terms "length," "upper," "lower," "vertical," "horizontal," and the like indicate an orientation or a positional relationship based on that shown in the drawings, and are merely for convenience of description and simplification of the description, and do not indicate or imply that the apparatus or element in question must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application.
As shown, a two-band image-side telecentric scan objective with a long entrance pupil distance, in order from the object side to the image side along the optical axis, is an entrance pupil 12 and an optical lens group comprising, in order: a first lens 1 having positive optical power, a second lens 2 having positive optical power, a third lens 3 having positive optical power, a fourth lens 4 having negative optical power, a fifth lens 5 having positive optical power, a sixth lens 6 having positive optical power, a seventh lens 7 having negative optical power, an eighth lens 8 having positive optical power, a ninth lens 9 having negative optical power, a tenth cemented lens 10 having positive optical power, and an eleventh lens 11 having positive optical power; the entrance pupil 12 position is arranged at the object-side focal plane position of the lens combination.
The focal length of each lens in the optical lens group is f1、f2、f3、f4、f5、f6、f7、f8、f9、f10、f11, in turn, wherein the value range is ：-3≤f1/f≤-0.5、-6≤f2/f≤-0.5、-3≤f3/f≤-0.5、0.2≤f4/f≤2、-3≤f5/f≤-0.5、-2≤f6/f≤-0.2、0.1≤f7/f≤2、-3≤f8/f≤-0.2、0.2≤f9/f≤3、-3≤f10/f≤-0.5、-3≤f11/f≤-0.2.
The interval between the first lens and the second lens is d 1, wherein d 1/f is less than or equal to-0.1 and less than or equal to-0.005,
The interval between the second lens and the third lens is d 2, wherein d 2/f is less than or equal to-2 and less than or equal to-1,
The interval between the third lens and the fourth lens is d 3, wherein d 3/f is less than or equal to-0.5 and less than or equal to-0.05,
The interval between the fourth lens and the fifth lens is d 4, wherein d 4/f is less than or equal to-1 and less than or equal to-0.2,
The interval between the fifth lens and the sixth lens is d 5, wherein d 5/f is more than or equal to-0.1 and less than or equal to-0.005,
The interval between the sixth lens and the seventh lens is d 6, wherein d 6/f is less than or equal to-1 and less than or equal to-0.2,
The interval between the seventh lens and the eighth lens is d 7, wherein d 7/f is less than or equal to-1 and less than or equal to-0.2,
The interval between the eighth lens and the ninth lens is d 8, wherein d 8/f is less than or equal to-1 and less than or equal to-0.1,
The distance between the ninth lens and the tenth cemented lens is d 9, wherein d 9/f is more than or equal to-0.1 and less than or equal to-0.005,
The distance between the tenth cemented lens and the eleventh lens is d 10, wherein d 10/f is more than or equal to-0.1 and less than or equal to-0.005.
In the parameter tables of the following embodiments, the chinese meaning of each english name is: nd: refractive index of material, vd: abbe coefficient of the material. Parameter table: the object focal plane with the surface number 0 being the object focal plane of the entrance pupil, the surface numbers 1 and 2 being the two surfaces of the first lens 1, the surface numbers 3 and 4 being the two surfaces of the second lens 2, the surface numbers 5 and 6 being the two surfaces of the third lens 3, the surface numbers 7 and 8 being the two surfaces of the fourth lens 4, the surface numbers 9 and 10 being the two surfaces of the fifth lens 5, the surface numbers 11 and 12 being the two surfaces of the sixth lens 6, the surface numbers 13 and 14 being the two surfaces of the seventh lens 7, the surface numbers 15 and 16 being the two surfaces of the eighth lens 8, the surface numbers 17 and 18 being the two surfaces of the ninth lens 9, the surface numbers 19 and 20 being the two surfaces of the tenth cemented lens 10, the surface numbers 21 and 22 being the two surfaces of the eleventh lens 11, and the surface number 23 being the image plane.
The pitch shown in the table is the pitch of each surface of the lens from the next lens surface, and if the pitch is the pitch of two surfaces of the same lens, the pitch is the thickness of the lens, and if the pitch is the pitch of the surfaces of different lenses, the pitch shown in the row 0 of the surface serial number is the pitch of the surface serial number 1 of the first lens, and the distance from the surface of the first lens to the object focal plane where the entrance pupil is located, namely the entrance pupil distance in the invention.
Example 1
The present invention will be described in detail with reference to fig. 1 and fig. 2-8, according to one embodiment of the present invention. By utilizing the dual-band image space telecentric scanning objective structure, a scanning objective with a lens focal length of-35.5 mm and an entrance pupil distance of 90mm is designed, wherein a 3D interference detection working band is 840+/-20 nm, and a 2D monitoring working band is 630+/-20 nm. The detailed design structure is shown in fig. 2, and the detailed design parameters are shown in table (1).
Table (1) parameters of scanning objective with entrance pupil distance of 90mm
The MTF curve chart of the imaging quality of the lens is shown in fig. 3 and 4, and the MTF is close to the diffraction limit under the full field, so that the lens has high resolution; the lens distortion curves are shown in fig. 5 and 6, and the distortion is less than 2%; the telecentricity curves of the lenses are shown in fig. 7 and 8, wherein the telecentricity CRA is less than or equal to 0.3 degrees, namely, the included angle between the principal ray of each view field emergent beam and the optical axis is less than 0.3 degrees. The magnitude of telecentricity influences the multiplying power error of the detected object, and the smaller the telecentricity is, the smaller the multiplying power error is.
Therefore, in the first embodiment, as can be seen from the diagrams in fig. 3 to 8, the galvanometer scanning lens design has the advantages of full-field high-resolution imaging, small aberration and low distortion.
Example two
The present invention will be described in detail with reference to fig. 1 and fig. 9-15, according to one embodiment of the present invention. By utilizing the dual-band image space telecentric scanning objective structure, a scanning objective with a lens focal length of-35.5 mm and an entrance pupil distance of 80mm is designed, wherein a 3D interference detection working band is 840+/-20 nm, and a 2D monitoring working band is 630+/-20 nm. The detailed design structure is shown in fig. 9, and the detailed design parameters are shown in table (2).
Table (2) parameters of scanning objective with entrance pupil distance of 80mm
As shown in fig. 10 and 11, the MTF curve chart of the lens imaging quality is close to the diffraction limit under the full field, and has high resolution; as shown in fig. 12 and 13, the distortion of the lens is less than 2%; the telecentricity curves of the lenses are shown in fig. 14 and 15, and telecentricity CRA is less than or equal to 0.3 degrees, namely, the included angle between the principal ray of each view field emergent beam and the optical axis is smaller than 0.3 degrees.
Therefore, in the second embodiment, as can be seen from the diagrams in fig. 10 to 15, the galvanometer scanning lens design has the advantages of full-field high-resolution imaging, small aberration and low distortion.
Example III
The present invention will be described in detail with reference to fig. 1 and fig. 16-22, according to one embodiment of the present invention. By utilizing the dual-band image space telecentric scanning objective structure, a scanning objective with a lens focal length of-35.5 mm and an entrance pupil distance of 70mm is designed, wherein a 3D interference detection working band is 840+/-20 nm, and a 2D monitoring working band is 630+/-20 nm. The detailed design structure is shown in fig. 16, and the detailed design parameters are shown in table (3).
Table (3) scanning objective parameters with entrance pupil distance of 70mm
As shown in fig. 17 and 18, the MTF curve chart of the lens imaging quality is close to the diffraction limit under the full field, and has high resolution; as shown in fig. 19 and 20, the lens distortion curve has distortion less than 2%; as shown in FIG. 20 and FIG. 21, the telecentricity curve of the lens is that the telecentricity CRA is less than or equal to 0.3 degrees, namely, the included angle between the principal ray of each view field emergent beam and the optical axis is less than 0.3 degrees.
Therefore, in the third embodiment, as can be seen from the diagrams in fig. 17 to 22, the galvanometer scanning lens design has the advantages of full-field high-resolution imaging, small aberration and low distortion.
The foregoing is a description of embodiments of the invention, which are specific and detailed, but are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention.
Claims (4)
1. A dual-band image space telecentric scanning objective lens with long entrance pupil distance sequentially comprises an entrance pupil and an optical lens group from an object side to an image side along an optical axis, and is characterized in that:
The optical lens group consists of the following lenses which are sequentially arranged: a first lens with positive focal power, a second lens with positive focal power, a third lens with positive focal power, a fourth lens with negative focal power, a fifth lens with positive focal power, a sixth lens with positive focal power, a seventh lens with negative focal power, an eighth lens with positive focal power, a ninth lens with negative focal power, a tenth cemented lens with positive focal power and an eleventh lens with positive focal power; the entrance pupil position is arranged at the object focal plane position of the lens combination;
The entrance pupil distance of the double-band image space telecentric scanning objective lens is L, wherein L is more than or equal to 70mm and less than or equal to 90mm; the working wave band of the dual-band image space telecentric scanning objective lens is divided into a common working wave band and a 2D monitoring working wave band, the range of the common working wave band is 840+/-20 nm, and the range of the 2D monitoring working wave band is 630+/-20 nm;
The focal length of the dual-band image space telecentric scanning objective lens is f, wherein |f| < L;
The focal length of each lens in the optical lens group is f1、f2、f3、f4、f5、f6、f7、f8、f9、f10、f11, in turn, wherein the value range is ：-3≤f1/f≤-0.5、-6≤f2/f≤-0.5、-3≤f3/f≤-0.5、0.2≤f4/f≤2、-3≤f5/f≤-0.5、-2≤f6/f≤-0.2、0.1≤f7/f≤2、-3≤f8/f≤-0.2、0.2≤f9/f≤3、-3≤f10/f≤-0.5、-3≤f11/f≤-0.2.
2. A dual band image-side telecentric scan objective with a long entrance pupil distance according to claim 1, wherein:
The interval between the first lens and the second lens is d 1, wherein d 1/f is less than or equal to-0.1 and less than or equal to-0.005,
The interval between the second lens and the third lens is d 2, wherein d 2/f is less than or equal to-2 and less than or equal to-1,
The interval between the third lens and the fourth lens is d 3, wherein d 3/f is less than or equal to-0.5 and less than or equal to-0.05,
The interval between the fourth lens and the fifth lens is d 4, wherein d 4/f is less than or equal to-1 and less than or equal to-0.2,
The interval between the fifth lens and the sixth lens is d 5, wherein d 5/f is more than or equal to-0.1 and less than or equal to-0.005,
The interval between the sixth lens and the seventh lens is d 6, wherein d 6/f is less than or equal to-1 and less than or equal to-0.2,
The interval between the seventh lens and the eighth lens is d 7, wherein d 7/f is less than or equal to-1 and less than or equal to-0.2,
The interval between the eighth lens and the ninth lens is d 8, wherein d 8/f is less than or equal to-1 and less than or equal to-0.1,
The distance between the ninth lens and the tenth cemented lens is d 9, wherein d 9/f is more than or equal to-0.1 and less than or equal to-0.005,
The distance between the tenth cemented lens and the eleventh lens is d 10, wherein d 10/f is more than or equal to-0.1 and less than or equal to-0.005.
3. A dual band image-side telecentric scan objective with a long entrance pupil distance according to claim 1, wherein: the tenth cemented lens adopts a structural form of a positive focal power lens-a negative focal power lens.
4. A dual band image-side telecentric scan objective with a long entrance pupil distance according to claim 1, wherein: each lens in the optical lens group is a spherical lens.
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| RU2278403C1 (en) * | 2004-12-24 | 2006-06-20 | Открытое акционерное общество "Лыткаринский завод оптического стекла" | Telocentric objective |
| CN203616527U (en) * | 2013-12-12 | 2014-05-28 | 山东亿能光学仪器股份有限公司 | Large-caliber long-distance of exit pupil high-power telescopic sight |
| JP2017102173A (en) * | 2015-11-30 | 2017-06-08 | 株式会社リコー | Imaging lens, camera, and inspection device |
| CN109061856A (en) * | 2018-09-04 | 2018-12-21 | 嘉兴中润光学科技有限公司 | The adjustable imaging lens of object space and image space doubly telecentric |
| CN111722382A (en) * | 2020-07-24 | 2020-09-29 | 东莞市宇瞳光学科技股份有限公司 | Visual lens |
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| JP5536995B2 (en) * | 2007-07-17 | 2014-07-02 | オリンパス株式会社 | Microscope objective lens and laser scanning microscope system |
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| RU2278403C1 (en) * | 2004-12-24 | 2006-06-20 | Открытое акционерное общество "Лыткаринский завод оптического стекла" | Telocentric objective |
| CN203616527U (en) * | 2013-12-12 | 2014-05-28 | 山东亿能光学仪器股份有限公司 | Large-caliber long-distance of exit pupil high-power telescopic sight |
| JP2017102173A (en) * | 2015-11-30 | 2017-06-08 | 株式会社リコー | Imaging lens, camera, and inspection device |
| CN109061856A (en) * | 2018-09-04 | 2018-12-21 | 嘉兴中润光学科技有限公司 | The adjustable imaging lens of object space and image space doubly telecentric |
| CN111722382A (en) * | 2020-07-24 | 2020-09-29 | 东莞市宇瞳光学科技股份有限公司 | Visual lens |
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