CN208895373U - The confocal focusing optical system of dual wavelength - Google Patents
The confocal focusing optical system of dual wavelength Download PDFInfo
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- CN208895373U CN208895373U CN201821439648.9U CN201821439648U CN208895373U CN 208895373 U CN208895373 U CN 208895373U CN 201821439648 U CN201821439648 U CN 201821439648U CN 208895373 U CN208895373 U CN 208895373U
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Abstract
The utility model discloses a kind of confocal focusing optical system of dual wavelength, including Zoom optic lens and f θ camera lens, Zoom optic lens include: the first lens, the second lens, the third lens, the 4th lens and the galvanometer system set gradually along incident light direction, f θ camera lens is set to below galvanometer system, first lens, the second lens, the third lens, the 4th lens and galvanometer system are located in same optical axis, light is realized by the spacing changed between the first lens and the second lens and is focused through f θ lens focus.The focusing of the utility model realization laser, in entire focussing process, the focus point good imaging quality of laser, consistency in focusing range is good, and during laser focusing, the focus of the visible light of lighting system and the focus of laser are confocal, and the consistency of laser processing Yu monitoring system focal position is achieved, so as to carry out the positioning of laser spot (Z axis) using video monitoring system, visualization processing is realized.
Description
Technical field
The utility model relates to laser machine field of optical systems more particularly to a kind of confocal focal optical system of dual wavelength
System.
Background technique
At present, laser application has been deep into the various aspects of our modern lives.Wherein the industrial application of laser is also more next
It is more extensive, and the applied optics system for meeting various techniques and requiring is be unable to do without in laser application.
In the laser three-D system of processing risen at present, due to the complexity of three-dimensional space, in three-dimensional process
Laser positioning bring challenge.In Three-dimension process system, other than the scanning system of conventional X, Y axial plane, it is also necessary to
Laser variable-focus system forms the Z axis in laser processing, to realize the 3 D stereo processing of laser.Laser variable-focus optical system
It is to be very important component part in 3 D stereo laser processing.
It is divided into prefocusing system and rear focusing system in three-dimensional laser processing again.Prefocusing system leans on the optics of system completely
Zoom, and make focus realize fixed point processing on three-dimensional space in conjunction with software control.Its focal-distance tuning range is big, focal length
Longer, so that processing effect is poor, the consistency for processing solid space region is more poor.It is processed for most of stereo laser
In, since it is high to the coherence request of dimensional accuracy and processing effect, do not use the optical system generally, and focused after using
Laser machine optical system.
Then Focused Optical system is to be implemented in combination with three-dimensional laser with f θ lens optical system by varifocal optical system to add
Work.F θ lens optical system is a field flattening optical system, and its advantages are the laser processing effects in the same X, Y-axis plane
Fruit is very consistent.Again by the way that in conjunction with varifocal optical system, the focal plane of the f θ lens optical system after zoom will be in different Z
On shaft position, a three-dimensional machining area is constituted.To form the consistent three-dimension process area of space of a processing effect.
And traditional zoom optical system is mainly for one-wavelength laser wavelength, the coke of the focus of laser and visual illumination light
Point differs bigger distance.And in high accuracy three-dimensional laser-processing system, it is desirable that have high accuracy three-dimensional synchronizing visual
Positioning system, this requires the focus of laser and the focus of visual illumination light completely the same in three dimensions.Otherwise, vision capture
The focus of the point and laser that arrive is not in same position, it is difficult to high-precision requirement needed for reaching processing.
Utility model content
The purpose of the utility model is to overcome the deficiencies in the prior art, provide a kind of confocal focusing optical system of dual wavelength,
So that the focus of point and laser that vision capture arrives is in same position, to greatly improve the machining accuracy of three-dimensional laser.
The technical solution of the utility model is as follows: providing a kind of confocal focusing optical system of dual wavelength, including optical zoom
Camera lens and f θ camera lens, the Zoom optic lens include: the first lens set gradually along incident light direction, the second lens,
The third lens, the 4th lens and galvanometer system, f θ camera lens are set to below the galvanometer system, the first lens, the second lens,
The third lens, the 4th lens and galvanometer system are located in same optical axis, and light is through f θ lens focus, by changing the first lens
Spacing between the second lens realizes focusing.
First lens are biconvex positive lens, focal power f1；Second lens are double concave type negative lens,
Focal power is f2；The third lens and the 4th lens are the positive lens of curved month type, are bent to light incident direction, the
Three power of lens are f3, and the 4th power of lens is f4, and each power of lens ratio meets claimed below:
-0.35<f2/f1<-0.25
1.1<f3/f1<1.4
4.0<f4/f1<4.5
Further, the confocal focusing system of the dual wavelength can be imaged in two wave bands of visible light and laser, it is seen that light
Focus and the focus of laser are confocal.
Further, the first power of lens f1 is 83.5mm, and the second power of lens f2 is -26.5mm, third
Power of lens f3 is 99.7mm, and the 4th power of lens f4 is 359.8mm.
Further, the wavelength of the laser is 1064nm, and the wavelength of the visible light is 625 ± 15nm.
Further, the first lens are 5mm in the thickness d 1 of optical axis center, and the second lens are in the thickness d 3 of optical axis center
2mm, the third lens are 5mm in the thickness d 5 of optical axis center, and the 4th lens are in optical axis center d7 with a thickness of 4mm.
Further, the first lens include the radius of curvature R 1 of first surface S1 and the second curved surface S2, first surface S1
Desired value be 70.576mm, the desired value R2 of the radius of curvature of the second curved surface S2 is -370.7mm, and second lens include
Third curved surface S3 and the 4th curved surface S4, the desired value R3 of the radius of curvature of third curved surface S3 are -75.04mm, the 4th curved surface S4
Radius of curvature desired value R4 be 28.58mm, the third lens include the 5th curved surface S5 and the 6th curved surface S6, the 5th
The desired value R5 of the radius of curvature of curved surface S5 is -124.45mm, the desired value R6 of the radius of curvature of the 6th curved surface S6 is -
40.581mm, the 4th lens include the 7th curved surface S7 and the 8th curved surface S8, the expectation of the radius of curvature of the 7th curved surface S7
Value R7 is -29.907mm, and the desired value R8 of the radius of curvature of the 8th curved surface S8 is -28.58mm.
Further, the desired value of the first lens material optical parameter Nd1:Vd1 is 1.73/54.7, the second lens material
The desired value of optical parameter Nd3:Vd3 is 1.8/25.4, and the desired value of the third lens materials optical parameter Nd5:Vd5 is 1.6/
The desired value of 60.6, the 4th lens material optical parameter Nd7:Vd7 are 1.8/25.4.
Further, the spacing distance d2 of the first lens and the second lens on optical axis is 18 ± 5mm, the second lens with
The desired value of spacing distance d4 of the third lens on optical axis is 25.3mm, the third lens and interval of the 4th lens on optical axis
The desired value of distance d6 is 11.6mm, and the desired value of the spacing distance d8 of the 4th lens and galvanometer system on optical axis is 20mm, f
The desired value of distance d9 of the θ camera lens away from galvanometer system is 47mm, and the focal length of f θ camera lens is 260mm, the variation model of back focal length Bf
It encloses for 233mmm-286mm.
Using the above scheme, the utility model has the following beneficial effects:
First is that realizing the focusing of laser, in entire focussing process, the focus point good imaging quality of laser, in focusing range
Interior consistency is good.
Second is that the focus of the visible light of lighting system and the focus of laser are confocal during laser focusing, thus real
The consistency with monitoring system focal position is now laser machined, to carry out laser spot (Z axis) using video monitoring system
Visualization processing is realized in positioning.
Detailed description of the invention
Fig. 1 is the system diagram of the utility model.
Fig. 2 is longitudinal focal shift figure of the utility model on focusing extreme position and middle position focal plane.
Fig. 3 is that light of the utility model on focusing extreme position and middle position focal plane fans figure.
Fig. 4 is point range figure of the utility model on focusing extreme position and middle position focal plane.
Fig. 5 is point spread function figure of the utility model on focusing extreme position and middle position focal plane.
Specific embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is described in detail.
Referring to Fig. 1, the utility model provide a kind of confocal focusing optical system of dual wavelength, including Zoom optic lens with
And f θ camera lens 11, comprising: the first lens L1 for setting gradually along incident light direction, the second lens L2, the third lens L3, the 4th are thoroughly
Mirror L4, galvanometer system 11, and the f θ camera lens 12 set on 11 lower section of the galvanometer system, the first lens L1, the second lens L2, the
Three lens L3, the 4th lens L4 and galvanometer system 12 are located in same optical axis, and the galvanometer system 12 is in this optical system
Similar with the effect of diaphragm, for defining the size of light beam (luminous flux), light is focused through f θ camera lens 11.
The first lens L1 is biconvex positive lens, focal power f1；The second lens L2 is that double concave type is negative saturating
Mirror, focal power f2；The third lens L3 and the 4th lens L4 is the positive lens of curved month type, to light incidence side
To bending, the focal power of the third lens L3 is f3, and the focal power of the 4th lens L4 is f4, each power of lens ratio meet with
Lower requirement:
-0.35<f2/f1<-0.25
1.1<f3/f1<1.4
4.0<f4/f1<4.5
The confocal focusing system of dual wavelength can be imaged in two wave bands of visible light and laser, it is seen that the focus and laser of light
Focus it is confocal, thus can be used CCD capture focus, thus realize visualization processing.In the present embodiment, it is seen that light is
LED light source.
The parameter of each lens is as follows:
First lens L1 is in optical axis center with a thickness of d1 comprising first surface S1 and the second curved surface S2, first is bent
The radius of curvature of face S1 is R1, and the radius of curvature of the second curved surface S2 is R2, and the materials optical parameter of the first lens L1 is Nd1:
Vd1；
Second lens L2 is in optical axis center with a thickness of d3 comprising third curved surface S3 and the 4th curved surface S4, third are bent
The radius of curvature of face S3 is R3, and the radius of curvature of the 4th curved surface S4 is R4, and the materials optical parameter of the second lens L2 is Nd3:
Vd3；
The third lens L3 is in optical axis center with a thickness of d5 comprising the 5th curved surface S5 and the 6th curved surface S6, the 5th is bent
The radius of curvature of face S5 is R5, and the radius of curvature of the 6th curved surface S6 is R6, the materials optical parameter Nd5:Vd5 of the third lens L3；
4th lens L4 is in optical axis center with a thickness of d7 comprising the 7th curved surface S7 and the 8th curved surface S8, the 7th is bent
The radius of curvature of face S7 is R7, and the radius of curvature of the 8th curved surface S8 is R8, and the materials optical parameter of the 4th lens L4 is Nd7:
Vd7。
The spacing distance of first lens L1 and the second lens L2 on optical axis is that d2, the second lens L2 and the third lens L3 exist
Spacing distance on optical axis is d4, and the spacing distance of the third lens L3 and the 4th lens L4 on optical axis is d6, the 4th lens L4
It is d8 with spacing distance of the galvanometer system 12 on optical axis, 11 distance away from galvanometer system 12 of f θ camera lens is d9, f θ camera lens 11
Focal length is f0, and the variation range of back focal length Bf, Bf are Bfa < Bf < Bfb.
Focusing is realized by the spacing changed between the first lens L1 and the second lens L2, is moved forward and backward the first lens L1, f
The back focal length Bf of θ camera lens can generate variation, in conjunction with the flat field that f θ camera lens 11 generates, to obtain three-dimensional machining area.
In conjunction with the above parameter, we devise a Zoom optic lens, and design parameter is as follows:
Laser wavelength lambda0=1064nm, it is seen that light wavelength lambda1=625 ± 15nm
Each power of lens is respectively as follows:
F1=83.5mm f2=-26.5mm f3=99.7mm f4=359.8mm
Each power of lens ratio are as follows:
F2/f1=-0.32 f3/f1=1.19 f4/f1=4.31
The major parameter of each lens of system is as follows:
The first lens L1 is adjusted, control d2 changes between 13mm and 23mm, the parameter of the back focal length Bf of d2 and f θ camera lens
Relationship it is as follows:
| Focusing position | Focus position d2 | Back focal length Bf |
| Negative sense extreme position | 13 | 286 |
| Middle position | 18 | 260 |
| Direct limit position | 23 | 233 |
As seen from the above table, the variation range of back focal length Bf is 233mm-286mm.
Please refer to Fig. 2 to Fig. 5, in Fig. 2 (a) be focal length be 286 when longitudinal focal shift figure, (b) be focal length be 260
When longitudinal focal shift figure, (c) be focal length be 233 when longitudinal focal shift figure.In Fig. 3 (a) be focal length be 286 when
Ray fan figure, (b) be focal length be 260 when Ray fan figure, (c) be focal length be 233 when Ray fan figure.(a) is in Fig. 4
Focal length be 286 when point range figure, (b) be focal length be 260 when point range figure, (c) be focal length be 232 when point range figure.In Fig. 5
(a) be focal length be 286 when point spread function, (b) be focal length be 260 when point spread function, (c) be focal length be 232 when
Point spread function.It can be seen that from Fig. 2 and Fig. 3, lateral chromatic aberration of the system on different focal planes is all smaller, from Fig. 2
It can be seen that Fig. 5, image quality of the system on different focal planes is all fine, puts Spread scope all within 10um, point
Spread function is all 0.9 or more, this can reach good processing effect during laser focusing, and consistency is good, simultaneously
Also good confocal imaging effect can be obtained, carries out high accuracy positioning for visualizing monitor system.
In conclusion the utility model has the following beneficial effects:
First is that realizing the focusing of laser, in entire focussing process, the focus point good imaging quality of laser, in focusing range
Interior consistency is good.
Second is that during laser focusing, the focus of the visible light of lighting system and the focus of laser it is confocal, it can be achieved that
The consistency of laser processing and monitoring system focal position, to carry out determining for laser spot (Z axis) using video monitoring system
Visualization processing is realized in position.
The above is only the preferred embodiments of the present utility model only, is not intended to limit the utility model, all practical at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the guarantor of the utility model within novel spirit and principle
Within the scope of shield.
Claims (8)
1. a kind of confocal focusing optical system of dual wavelength, including Zoom optic lens and f θ camera lens, which is characterized in that the light
Learn zoom lens include: the first lens set gradually along incident light direction, the second lens, the third lens, the 4th lens and
Galvanometer system, f θ camera lens are set to below the galvanometer system, the first lens, the second lens, the third lens, the 4th lens and vibration
Mirror system is located in same optical axis, and light is real by changing the spacing between the first lens and the second lens through f θ lens focus
Now focus；
First lens are biconvex positive lens, focal power f1；Second lens are double concave type negative lens, light focus
Degree is f2；The third lens and the 4th lens are the positive lens of curved month type, are bent to light incident direction, and third is saturating
The focal power of mirror is f3, and the 4th power of lens is f4, and each power of lens ratio meets claimed below:
-0.35<f2/f1<-0.25
1.1<f3/f1<1.4
4.0<f4/f1<4.5。
2. the confocal focusing optical system of dual wavelength according to claim 1, which is characterized in that the confocal focusing of dual wavelength
System can be imaged in two wave bands of visible light and laser, it is seen that the focus of light and the focus of laser are confocal.
3. the confocal focusing optical system of dual wavelength according to claim 1, which is characterized in that the first power of lens f1
It is -26.5mm for 83.5mm, the second power of lens f2, the focal power f3 of the third lens is 99.7mm, the light of the 4th lens
Focal power f4 is 359.8mm.
4. the confocal focusing optical system of dual wavelength according to claim 2, which is characterized in that the wavelength of the laser is
1064nm, the wavelength of the visible light are 625 ± 15nm.
5. the confocal focusing optical system of dual wavelength according to claim 1, which is characterized in that the first lens are in optical axis center
Thickness d 1 be 5mm, the second lens are 2mm in the thickness d 3 of optical axis center, and the third lens are in the thickness d 5 of optical axis center
5mm, the 4th lens are 4mm in the thickness d 7 of optical axis center.
6. the confocal focusing optical system of dual wavelength according to claim 5, which is characterized in that the first lens include first bent
The desired value of the radius of curvature R 1 of face S1 and the second curved surface S2, first surface S1 is 70.576mm, the curvature of the second curved surface S2
The desired value R2 of radius is -370.7mm, and second lens include third curved surface S3 and the 4th curved surface S4, third curved surface S3
The desired value R3 of radius of curvature be -75.04mm, the desired value R4 of the radius of curvature of the 4th curved surface S4 is 28.58mm, described the
Three lens include the 5th curved surface S5 and the 6th curved surface S6, and the desired value R5 of the radius of curvature of the 5th curved surface S5 is -124.45mm,
The desired value R6 of the radius of curvature of 6th curved surface S6 is -40.581mm, and the 4th lens include the 7th curved surface S7 and the 8th
Curved surface S8, the desired value R7 of the radius of curvature of the 7th curved surface S7 are -29.907mm, the desired value of the radius of curvature of the 8th curved surface S8
R8 is -28.58mm.
7. the confocal focusing optical system of dual wavelength according to claim 6, which is characterized in that the first lens material Optical Parametric
The desired value of number Nd1:Vd1 is 1.73/54.7, and the desired value of the second lens material optical parameter Nd3:Vd3 is 1.8/25.4, the
The desired value of three lens material optical parameter Nd5:Vd5 is 1.6/60.6, the expectation of the 4th lens material optical parameter Nd7:Vd7
Value is 1.8/25.4.
8. the confocal focusing optical system of dual wavelength according to claim 1, which is characterized in that the first lens and the second lens
Spacing distance d2 on optical axis is 18 ± 5mm, the expectation of the spacing distance d4 of the second lens and the third lens on optical axis
Value is 25.3mm, and the desired value of the third lens and spacing distance d6 of the 4th lens on optical axis are 11.6mm, the 4th lens with
The desired value of spacing distance d8 of the galvanometer system on optical axis is 20mm, and the desired value of distance d9 of the f θ camera lens away from galvanometer system is
The focal length of 47mm, f θ camera lens is 260mm, and the variation range of back focal length Bf is 233mmm-286mm.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108857052A (en) * | 2018-09-04 | 2018-11-23 | 深圳市拓博瑞激光科技有限公司 | The confocal focusing optical system of dual wavelength |
| CN110940282B (en) * | 2019-10-24 | 2021-07-09 | 中国航空工业集团公司洛阳电光设备研究所 | Dual-wavelength laser receiving optical system and laser ranging receiving device |
-
2018
- 2018-09-04 CN CN201821439648.9U patent/CN208895373U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108857052A (en) * | 2018-09-04 | 2018-11-23 | 深圳市拓博瑞激光科技有限公司 | The confocal focusing optical system of dual wavelength |
| CN108857052B (en) * | 2018-09-04 | 2024-03-19 | 深圳市拓博瑞激光科技有限公司 | Dual-wavelength confocal focusing optical system |
| CN110940282B (en) * | 2019-10-24 | 2021-07-09 | 中国航空工业集团公司洛阳电光设备研究所 | Dual-wavelength laser receiving optical system and laser ranging receiving device |
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