CN211438581U - Ultraviolet light scanning field lens - Google Patents
Ultraviolet light scanning field lens Download PDFInfo
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- CN211438581U CN211438581U CN201922267034.8U CN201922267034U CN211438581U CN 211438581 U CN211438581 U CN 211438581U CN 201922267034 U CN201922267034 U CN 201922267034U CN 211438581 U CN211438581 U CN 211438581U
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Abstract
The utility model provides an ultraviolet ray scanning field lens starts from laser incident direction, including setting up first lens, second lens, third lens, fourth lens and the fifth lens on same optical axis, wherein first lens is unsmooth positive lens, the second lens is biconcave negative lens, the third lens is unsmooth positive lens, the fourth lens is biconvex positive lens, the fifth lens is biconvex positive lens. The utility model is not only simple in structure, easily quick production has excellent performance moreover on relevant optical index, has improved the technological effect in the field lens application effectively.
Description
Technical Field
The utility model relates to a scanning field lens field, concretely relates to ultraviolet ray scanning field lens.
Background
In recent years, as the application technology of laser processing is rapidly developed, field lenses are widely used in various laser processing, welding, and surface treatment. In particular, consumer electronics products are being developed to be small, lightweight, and compact, and thus, higher demands are being made on laser processing technology. In order to better meet the market demand and improve the laser processing quality, ultraviolet light is generally adopted for laser processing, and the ultraviolet light with the wavelength of 355nm is easier to focus to a smaller spot radius than the laser light with other wave bands due to the short wavelength; even if the ultraviolet light has the same scale of focusing spot radius as the laser of other wave bands, the ultraviolet light is more beneficial to the processing of the laser because the focal depth is longer; furthermore, uv light has a low reflectivity and high absorption in interaction with some materials, and is therefore a very important wavelength for laser processing applications. However, even though the ultraviolet light is widely applied to the field lens at present, because the optical materials suitable for the 355nm waveband are very few, and in the suitable materials, it is difficult to make the field lens have optical indexes such as the diameter of a focusing spot, a scanning range, telecentricity, imaging quality and the like, the use effect of the field lens is greatly influenced.
SUMMERY OF THE UTILITY MODEL
The utility model provides an ultraviolet ray scanning field lens, it is simple structure not only, easily quick production has excellent performance moreover on relevant optical index, has improved the technological effect in the field lens application effectively.
The utility model provides an ultraviolet ray scanning field lens starts from laser incident direction, including setting up first lens, second lens, third lens, fourth lens and the fifth lens on same optical axis, wherein first lens is unsmooth positive lens, the second lens is biconcave negative lens, the third lens is unsmooth positive lens, the fourth lens is biconvex positive lens, the fifth lens is biconvex positive lens.
Further, a spherical surface of the first lens close to the incident light is a first spherical surface S1, and a curvature radius R1 of the first spherical surface S1 of the first lens satisfies: -80mm < R1 < -60mm, thickness D1 satisfies: d1 is more than 5mm and less than 15 mm; the spherical surface of the first lens close to the second lens is a second spherical surface S2, and the curvature radius R2 of the second spherical surface S2 of the first lens satisfies: -60mm < R2 < -45mm, thickness D2 satisfies: d2 is more than 10mm and less than 20 mm.
Further, the curvature radius R1 of the first spherical surface S1 of the first lens is-73.8168 mm, and the thickness D1 is 10 mm; the curvature radius R2 of the second spherical surface S2 of the first lens is-49.7539 mm, and the thickness D2 of the second spherical surface S2 of the first lens is 15 mm.
Further, the curvature radius R3 of the first spherical surface S3 of the second lens is-38.566 mm, the thickness D3 is 10mm, the curvature radius of the second spherical surface S4 of the second lens is 393.5645mm, and the thickness D4 is 12.54 mm; the curvature radius R5 of the first spherical surface S5 of the third lens is-136.093 mm, the thickness D5 of the first spherical surface S5 of the third lens is 18mm, the curvature radius R6 of the second spherical surface S6 of the third lens is-80.8078 mm, and the thickness D6 of the second spherical surface S6 of the third lens is 5.11 mm; the curvature radius R7 of the first spherical surface S7 of the fourth lens is-1928.57 mm, the thickness D7 of the first spherical surface S7 of the fourth lens is 28mm, the curvature radius R8 of the second spherical surface S8 of the fourth lens is-81.4735 mm, and the thickness D8 of the second spherical surface S8 of the fourth lens is 0.1 mm; the curvature radius R9 of the first spherical surface S9 of the fifth lens is 206.0935mm, the thickness D9 of the first spherical surface S9 of the fifth lens is 18mm, the curvature radius R10 of the second spherical surface S10 of the fifth lens is-1363.57 mm, and the thickness D10 of the second spherical surface S10 of the fifth lens is 228.81 mm.
Further, the ultraviolet light scanning field lens further comprises a sixth lens, the sixth lens is arranged between the third lens and the fourth lens along an optical axis, and the sixth lens is a concave-convex lens.
Further, the ultraviolet light scanning field lens further comprises a window glass, and the window glass is arranged behind the fifth lens along the optical axis.
Further, the curvature radius R1 of the first spherical surface Q1 of the first lens satisfies: -100mm < A1 < -90mm, thickness D1 satisfies: 4mm < B1 < 8mm, and the curvature radius R2 of the second spherical surface Q2 of the first lens satisfies: -70mm < A2 < -60mm, thickness D2 satisfies: b2 is more than 20mm and less than 30 mm; the curvature radius R11 of the first spherical surface S11 of the sixth lens satisfies: -370mm < R11 < -360mm, thickness D11 satisfies: 25mm < D11 < 15mm, and the radius of curvature R12 of the second spherical surface S12 of the sixth lens satisfies: -120mm < R12 < -110mm, thickness D12 satisfies: d12 is more than 1mm and less than 0.1 mm.
Further, the curvature radius R1 of the first spherical surface S1 of the first lens is-91.63 mm, the thickness D1 is 5.5mm, the curvature radius R2 of the second spherical surface S2 of the first lens is-60.84 mm, and the thickness D2 is 22.29 mm;
the curvature radius R11 of the first spherical surface S11 of the sixth lens is-361.72 mm, the thickness D11 is 20.5mm, the curvature radius R12 of the second spherical surface S12 of the sixth lens is-119.22 mm, and the thickness D12 is 0.5 mm.
Further, the curvature radius R3 of the first spherical surface S3 of the second lens is-43.29 mm, the thickness D3 is 5mm, the curvature radius R4 of the second spherical surface S4 of the second lens is 1399.83mm, and the thickness D4 is 9.76 mm; the curvature radius R5 of the first spherical surface S5 of the third lens is-85.63 mm, the thickness D5 of the first spherical surface S5 of the third lens is 20.5mm, the curvature radius R6 of the second spherical surface S6 of the third lens is-80.2 mm, and the thickness D6 of the second spherical surface S6 of the third lens is 7.5 mm; the curvature radius R7 of the first spherical surface S7 of the fourth lens is-390.31 mm, the thickness D7 of the first spherical surface S7 of the fourth lens is 26.5mm, the curvature radius R8 of the second spherical surface S8 of the fourth lens is-104.99 mm, and the thickness D8 of the second spherical surface S8 of the fourth lens is 0.5 mm; the curvature radius R11 of the first spherical surface S11 of the fifth lens is 253.87mm, the thickness D11 of the fifth lens is 26.5mm, the curvature radius R12 of the second spherical surface S12 of the fifth lens is-912 mm, and the thickness D12 of the fifth lens is 5 mm.
Further, the focal lengths of the scanning field lenses are all 160 mm.
The utility model discloses an ultraviolet ray scanning field lens has simple structure, easily quick production, has excellent performance moreover on relevant optical index, has improved the technological effect of the performance in the field lens application effectively.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without any creative effort.
Fig. 1 is a structural diagram of an ultraviolet scanning field lens according to an embodiment of the present invention;
fig. 2 is a ray tracing diagram of a preferred embodiment of the present invention;
FIG. 3 is a diagram of an image quality point array provided by an embodiment of the present invention;
fig. 4 is another structural diagram of an ultraviolet scanning field lens according to an embodiment of the present invention;
fig. 5 is a ray tracing diagram of another preferred embodiment provided by the present invention;
fig. 6 is another image quality point chart provided by the embodiment of the present invention.
Reference numerals: 1. a first lens; 2. a second lens; 3. a third lens; 4. a fourth lens; 5. a fifth lens; 6. an image plane; 7. a diaphragm; 8. a sixth lens; 9. a window glass.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, not all, of the embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
It will be understood that the terms "comprises" and/or "comprising," when used in this specification and the appended claims, specify the presence of stated features, integers, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, operations, elements, components, and/or groups thereof.
It is also to be understood that the terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used in the specification and the appended claims, the singular forms "a", "an", and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It should be further understood that the term "and/or" as used in the specification and the appended claims refers to any and all possible combinations of one or more of the associated listed items, and includes such combinations.
Referring to fig. 1, a block diagram of an ultraviolet light scan field lens is shown. Generally, in a laser processing system, a field lens is a very important optical module, and the performance of the field lens directly affects the final processing quality. Important indexes for representing the quality of the field lens are mainly diameter of a focusing light spot, scanning range, telecentricity, imaging quality and the like. Therefore, under the current requirements on the field lens that the size of a focusing light spot is as small as possible, the scanning range is as large as possible, and the telecentricity is as small as possible, the optical structure shown in fig. 1 is adopted, which can effectively realize the balance of various optical indexes, thereby improving the performance of the whole ultraviolet light scanning field lens.
Specifically, as can be seen from fig. 1, the power profile adopted by the lens in this embodiment is "+ - ++", and the incident light from the diaphragm 7 is: the lens comprises a first lens 1, a second lens 2, a third lens 3, a fourth lens 4 and a fifth lens 5, wherein the first lens 1 is a concave-convex positive lens, the second lens 2 is a double-concave negative lens, the third lens 3 is a concave-convex positive lens, the fourth lens 4 is a double-convex positive lens, and the fifth lens 5 is a double-convex positive lens. In order to make the performance of the ultraviolet scanning field lens more excellent, each lens is made of fused quartz.
The spherical surface of the first lens 1 close to the incident light is a first spherical surface S1, and the curvature radius R1 of the first spherical surface S1 of the first lens 1 satisfies: -80mm < R1 < -60mm, thickness D1 satisfies: 5mm < D1 < 15mm, the spherical surface of the first lens 1 close to the second lens 2 is a second spherical surface S2, and the curvature radius R2 of the second spherical surface S2 of the first lens 1 satisfies: -60mm < R2 < -45mm, thickness D2 satisfies: d2 is more than 10mm and less than 20 mm.
According to the above requirements, there is further provided a preferred embodiment, the specific parameters refer to the parameters of the uv scanning field lens in table 1;
| spherical surface | Radius of curvature (mm) | Thickness (mm) | Material of |
| S1 | R1＝-73.8168 | D1＝10.00 | Fused quartz |
| S2 | R2＝-49.7539 | D2＝15.00 | Fused quartz |
| S3 | R3＝-38.5566 | D3＝10.00 | Fused quartz |
| S4 | R4＝393.5645 | D4＝12.54 | Fused quartz |
| S5 | R5＝-136.093 | D5＝18.00 | Fused quartz |
| S6 | R6＝-80.8078 | D6＝5.11 | Fused quartz |
| S7 | R7＝-1928.57 | D7＝28.00 | Fused quartz |
| S8 | R8＝-81.4735 | D8＝0.10 | Fused quartz |
| S9 | R9＝206.0935 | D9＝18.00 | Fused quartz |
| S10S | R10＝-1363.57 | D10＝228.81 | Fused quartz |
TABLE 1
Therefore, it can be seen that the curvature radius R1 of the first spherical surface S1 of the first lens 1 is-73.8168 mm, the thickness D1 is 10mm, the curvature radius R2 of the second spherical surface S1 of the first lens 1 is-49.7539 mm, and the thickness D2 is 15 mm; the curvature radius R3 of the first spherical surface S3 of the second lens 2 is-38.566 mm, the thickness D3 is 10mm, the curvature radius of the second spherical surface S4 of the second lens 2 is 393.5645mm, and the thickness D4 is 12.54 mm; the curvature radius of the first spherical surface S5 of the third lens 3 is-136.093 mm, the thickness D5 is 18mm, the curvature radius of the second spherical surface S6 of the third lens 3 is-80.8078 mm, and the thickness D6 is 5.11 mm; the curvature radius of the first spherical surface S7 of the fourth lens 4 is-1928.57 mm, the thickness D7 is 28mm, the curvature radius of the second spherical surface S8 of the fourth lens 4 is-81.4735 mm, and the thickness D8 is 0.1 mm; the curvature radius of the first spherical surface S9 of the fifth lens 5 is 206.0935mm, the thickness D9 is 18mm, the curvature radius of the second spherical surface S10 of the fifth lens 5 is-1363.57 mm, and the thickness D10 is 228.81 mm.
Specifically, since the size of the focused spot diameter is proportional to the focal length of the field lens, as shown in equation (1):
in the formula (1), dFTo focus the spot diameter, λ is the wavelength of the laser, M2 is the beam mass, f is the focal length of the field lens, and D is the incident spot diameter. Therefore, the focal spot diameter at this time is correlated with the size of the focal length f of the field lens, and the focal length f constituting the field lens can be adjusted accordingly to adjust the focal spot diameter.
Through the combination of the lens groups in the embodiment, the focal length of the obtained ultraviolet light scanning field lens is 160mm, the obtained scanning range of the ultraviolet light scanning field lens can be 89.1mm under the condition that the incident light is an ultraviolet light wave of 355nm, the maximum light spot incident diameter is 10mm, the entrance pupil distance is 28.88mm, and the working distance is 228.8mm, the telecentricity is less than 1.8 degrees, the diameter of the focusing light spot is in direct proportion to the focal length of the ultraviolet light scanning field lens, and the diameter of the generated focusing light spot is smaller under the condition that the focal length is not large.
As shown in fig. 2, it is an optical path diagram of the uv scanning field lens of the present embodiment, in which the uv light is irradiated along five different angles, and the uv light is further irradiated again at three different positions by repeating five angles. At this time, after the ultraviolet light passes through the first lens 1, the second lens 2, the third lens 3 and the fourth lens 4 in sequence at the same position and at different angles, the ultraviolet light can finally pass through the fifth lens at an angle perpendicular to the fifth lens 5 and irradiate on different points on the image plane 6, and the ultraviolet light at the same angle can finally be converged on the same point on the image plane 6 through the ultraviolet light scanning lens when the ultraviolet light at different positions irradiates. As can be seen from fig. 2, the ultraviolet scanning lens in this embodiment can have a larger scanning range with a smaller telecentricity.
As shown in fig. 3, this is an image quality dot diagram of the ultraviolet light scanning field lens of the present embodiment, and the dot diagram is one of important methods for evaluating the quality of an image. The circles in the figure represent the airy disk radius, while the figure shows a plot of 5 image heights, corresponding to the five convergence points in figure 2, with image heights from bottom to top of 0mm, 26mm, 44.1mm, 56.7mm and 63mm, respectively. The RMS of the image height 0 is 0.027 μm, the RMS of the image height 26mm is 1.394 μm, the RMS of the image height 44.1mm is 0.663 μm, the RMS of the image height 56.7mm is 0.851 μm, the RMS of the image height 63mm is 1.365 μm, wherein the RMS is the root mean square radius value, and a smaller RMS indicates a higher image quality.
Therefore, in summary, the ultraviolet light scanning field lens in the embodiment has excellent performance in the optical indexes such as the size of a focusing light spot, the scanning range, the telecentricity, the imaging quality and the like, that is, the performance of the ultraviolet light scanning field lens is greatly improved.
Referring to fig. 4, which shows a structure diagram of an ultraviolet light scanning field lens according to another embodiment of the present invention, it can be seen that the power distribution adopted by the lens in this embodiment is "+ - +++" and the power distribution from the diaphragm 7 along the incident light is as follows: a first lens 1, a second lens 2, a third lens 3, a sixth lens 8, a fourth lens 4, a fifth lens 5, and a window glass 9. The first lens element 1 is a positive meniscus lens element, the second lens element 2 is a negative biconcave lens element, the third lens element 3 is a positive meniscus lens element, the sixth lens element 8 is a positive meniscus lens element, the fourth lens element 4 is a positive biconvex lens element, the fifth lens element 5 is a positive biconvex lens element, and the window glass 9 is arranged behind the fifth lens element. In order to make the performance of the ultraviolet scanning field lens more excellent, the lenses are made of fused quartz materials. Compared with the previous embodiment, the sixth lens 8 and the window glass 9 added in the present embodiment can ensure that the focal length of the field lens is 160mm, further improve the scanning range and reduce the telecentricity.
In the present embodiment, the curvature radius R1 of the first spherical surface S1 of the first lens satisfies: -100mm < A1 < -90mm, thickness D1 satisfies: 4mm < B1 < 8mm, and the curvature radius R2 of the second spherical surface S2 of the first lens satisfies: -70mm < A2 < -60mm, thickness D2 satisfies: b2 is more than 20mm and less than 30 mm; the curvature radius R11 of the first spherical surface S11 of the sixth lens satisfies: -370mm < R11 < -360mm, thickness D11 satisfies: d11 is more than 25mm and less than 15 mm; the curvature radius R12 of the second spherical surface S12 of the sixth lens satisfies: -120mm < R12 < -110mm, thickness D12 satisfies: d12 is more than 1mm and less than 0.1 mm. Specifically, due to the addition of the sixth lens 8 and the window glass 9, in order to keep the focal length of the field lens at 160mm, the ranges of the first lens 1, the second lens 2, the third lens 3, the fourth lens 4 and the fifth lens 5 are correspondingly adjusted so as to ensure that the size of a focused light spot is not changed.
In accordance with the above requirements, there is further provided a preferred embodiment, wherein the specific parameters refer to the parameters of the uv scanning field lens in table 2:
| spherical surface | Radius of curvature (mm) | Thickness (mm) | Material of |
| S1 | R1＝-91.63 | D1＝5.50 | Fused quartz |
| S2 | R2＝-60.84 | D2＝22.29 | Fused quartz |
| S3 | R3＝-43.29 | D3＝5.00 | Fused quartz |
| S4 | R4＝1388.83 | D4＝9.76 | Fused quartz |
| S5 | R5＝-85.63 | D5＝20.50 | Fused quartz |
| S6 | R6＝-80.20 | D6＝7.50 | Fused quartz |
| S11 | R11＝-361.72 | D11＝20.50 | Fused quartz |
| S12 | R12＝-119.22 | D12＝0.50 | Fused quartz |
| S7 | R7＝-390.31 | D7＝26.50 | Fused quartz |
| S8 | R8＝-104.99 | D8＝0.50 | Fused quartz |
| S9 | R9＝235.87 | D9＝21.00 | Fused quartz |
| S10 | R10＝-912.00 | D10＝5.00 | Fused quartz |
| Window glass | Infinite number of elements | 5.00 | Fused quartz |
| Window glass | Infinite number of elements | 218.73 | Fused quartz |
TABLE 2
Specifically, the curvature radius R1 of the first spherical surface S1 of the first lens 1 is-91.63 mm, the thickness D1 is 5.5mm, the curvature radius R2 of the second spherical surface S2 of the first lens 1 is-60.84 mm, and the thickness D2 is 22.29 mm; the curvature radius R3 of the first spherical surface S3 of the second lens 2 is-43.29 mm, the thickness D3 is 5mm, the curvature radius R4 of the second spherical surface S4 of the second lens 2 is 1399.83mm, and the thickness D4 is 9.76 mm; the curvature radius R5 of the first spherical surface S5 of the third lens 3 is-85.63 mm, the thickness D5 is 20.5mm, the curvature radius R6 of the second spherical surface S6 of the third lens 3 is-80.2 mm, and the thickness D6 is 7.5 mm; the curvature radius R11 of the first spherical surface S11 of the sixth lens 8 is-361.72 mm, the thickness D11 is 20.5mm, the curvature radius R12 of the second spherical surface S12 of the sixth lens 8 is-119.22 mm, and the thickness D12 is 0.5 mm; the curvature radius R7 of the first spherical surface S7 of the fourth lens 4 is-390.31 mm, the thickness D7 is 26.5mm, the curvature radius R8 of the second spherical surface S8 of the fourth lens 4 is-104.99 mm, and the thickness D8 is 0.5 mm; the curvature radius R11 of the first spherical surface S11 of the fifth lens 5 is 253.87mm, the thickness D11 is 26.5mm, the curvature radius R12 of the second spherical surface S12 of the fifth lens 5 is-912 mm, and the thickness D12 is 5 mm.
Specifically, since the size of the focused spot diameter is proportional to the focal length of the field lens, the specific formula refers to the aforementioned formula (1), and the focused spot diameter of the field lens is inconvenient in the case where the focal length of the field lens is maintained at 160mm and other conditions are the same. Meanwhile, under the condition that the incident light of the ultraviolet optical scanning mirror is 355nm ultraviolet light waves, the maximum light spot incident diameter is 12mm, the entrance pupil distance is 32mm, and the working distance is 218.7mm, the obtained scanning range can be 93mm × 893mm, the telecentricity is less than 0.7 degrees, and compared with the previous embodiment, the ultraviolet optical scanning mirror in the embodiment is wider in focusing range and lower in telecentricity.
As shown in fig. 5, it is an optical path diagram of the uv scanning field lens of this embodiment, in the diagram, the uv light is irradiated along three different angles, and the uv light is further irradiated once again by repeating three angles at three different positions, at this time, for the irradiation of the uv light at different angles at the same position, after passing through the first lens 1, the second lens 2, the third lens 3, and the sixth lens 8 in sequence, the uv light can finally pass through the fifth lens 5 and the window glass 9 at an angle perpendicular to the fifth lens 5 and irradiate on the image plane 6, and for the irradiation of the uv light at the same angle at different positions, the uv light can finally converge on the same point on the image plane 6 through the uv scanning lens. As can be seen from fig. 5, the ultraviolet scanning lens in this embodiment can have a larger scanning range with a smaller telecentricity.
As shown in fig. 6, this is an image quality dot diagram of the ultraviolet light scan field lens of the present embodiment, and the dot diagram is one of important methods for evaluating the quality of an image. The circles represent the airy disk radius, while the figure shows a plot of 3 image heights, corresponding to the three convergence points in figure 5, with image heights from bottom to top of 0mm, 47mm and 65.6mm, respectively. RMS for image height 0 is 0.1 μm, for image height 47mm is 0.83 μm, and for image height 65.6mm is 1.38 μm. Wherein, the RMS is a root mean square radius value, and the smaller the RMS is, the higher the quality of the image is. The RMS of the three image heights is kept at a small value, so that certain guarantee can be obtained on the image quality.
Therefore, in summary, the ultraviolet light scanning field lens in the embodiment has excellent performance in the optical indexes such as the size of a focusing light spot, the scanning range, the telecentricity, the imaging quality and the like, that is, the performance of the ultraviolet light scanning field lens is greatly improved.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily think of various equivalent modifications or replacements within the technical scope of the present invention, and these modifications or replacements should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
1. The ultraviolet light scanning field lens is characterized by comprising a first lens, a second lens, a third lens, a fourth lens and a fifth lens which are arranged on the same optical axis from the incident direction of laser, wherein the first lens is a concave-convex positive lens, the second lens is a double-concave negative lens, the third lens is a concave-convex positive lens, the fourth lens is a double-convex positive lens, and the fifth lens is a double-convex positive lens.
2. The uv scanning field lens of claim 1, wherein the spherical surface of the first lens near the incident light is a first spherical surface S1, and the radius of curvature R1 of the first spherical surface S1 satisfies: -80mm < R1 < -60mm, thickness D1 satisfies: 5mm < D1 < 15mm, the spherical surface of the first lens close to the second lens is a second spherical surface S2, and the curvature radius R2 of the second spherical surface S2 satisfies: -60mm < R2 < -45mm, thickness D2 satisfies: d2 is more than 10mm and less than 20 mm.
3. The uv scan field lens of claim 2, wherein the first spherical surface S1 of the first lens has a radius of curvature R1 of-73.8168 mm and a thickness D1 of 10mm, and the second spherical surface S2 of the first lens has a radius of curvature R2 of-49.7539 mm and a thickness D2 of 15 mm.
4. The uv scan field lens of claim 3, wherein the first spherical surface S3 of the second lens has a radius of curvature R3 of-38.566 mm and a thickness D3 of 10mm, and the second spherical surface S4 of the second lens has a radius of curvature 393.5645mm and a thickness D4 of 12.54 mm;
the curvature radius R5 of the first spherical surface S5 of the third lens is-136.093 mm, the thickness D5 of the first spherical surface S5 of the third lens is 18mm, the curvature radius R6 of the second spherical surface S6 of the third lens is-80.8078 mm, and the thickness D6 of the second spherical surface S6 of the third lens is 5.11 mm;
the curvature radius R7 of the first spherical surface S7 of the fourth lens is-1928.57 mm, the thickness D7 of the first spherical surface S7 of the fourth lens is 28mm, the curvature radius R8 of the second spherical surface S8 of the fourth lens is-81.4735 mm, and the thickness D8 of the second spherical surface S8 of the fourth lens is 0.1 mm;
the curvature radius R9 of the first spherical surface S9 of the fifth lens is 206.0935mm, the thickness D9 of the first spherical surface S9 of the fifth lens is 18mm, the curvature radius R10 of the second spherical surface S10 of the fifth lens is-1363.57 mm, and the thickness D10 of the second spherical surface S10 of the fifth lens is 228.81 mm.
5. The ultraviolet light scanning field lens of claim 1, further comprising a sixth lens disposed along the optical axis between the third lens and the fourth lens, the sixth lens being a meniscus lens.
6. The ultraviolet light scanning field lens of claim 5, further comprising a window glass disposed along the optical axis after the fifth lens.
7. The uv scan field lens of claim 6, wherein the first spherical surface S1 of the first lens has a radius of curvature R1 that satisfies: -100mm < A1 < -90mm, thickness D1 satisfies: 4mm < B1 < 8mm, and the curvature radius R2 of the second spherical surface S2 of the first lens satisfies: -70mm < A2 < -60mm, thickness D2 satisfies: b2 is more than 20mm and less than 30 mm;
the curvature radius R11 of the first spherical surface S11 of the sixth lens satisfies: -370mm < R11 < -360mm, thickness D11 satisfies: 25mm < D11 < 15mm, and the radius of curvature R12 of the second spherical surface S12 of the sixth lens satisfies: -120mm < R12 < -110mm, thickness D12 satisfies: d12 is more than 1mm and less than 0.1 mm.
8. The UV light field lens of claim 7, wherein the first spherical surface S1 of the first lens has a radius of curvature R1 of-91.63 mm and a thickness D1 of 5.5mm, and the second spherical surface S2 of the first lens has a radius of curvature R2 of-60.84 mm and a thickness D2 of 22.29 mm;
the curvature radius R11 of the first spherical surface S11 of the sixth lens is-361.72 mm, the thickness D11 of the first spherical surface S11 of the sixth lens is 20.5mm, the curvature radius R12 of the second spherical surface S12 of the sixth lens is-119.22 mm, and the thickness D12 of the second spherical surface S12 of the sixth lens is 0.5 mm.
9. The uv scan field lens of claim 8, wherein the first spherical surface S3 of the second lens has a radius of curvature R3 of-43.29 mm and a thickness D3 of 5mm, and the second spherical surface S4 of the second lens has a radius of curvature R4 of 1399.83mm and a thickness D4 of 9.76 mm;
the curvature radius R5 of the first spherical surface S5 of the third lens is-85.63 mm, the thickness D5 of the first spherical surface S5 of the third lens is 20.5mm, the curvature radius R6 of the second spherical surface S6 of the third lens is-80.2 mm, and the thickness D6 of the second spherical surface S6 of the third lens is 7.5 mm;
the curvature radius R7 of the first spherical surface S7 of the fourth lens is-390.31 mm, the thickness D7 of the first spherical surface S7 of the fourth lens is 26.5mm, the curvature radius R8 of the second spherical surface S8 of the fourth lens is-104.99 mm, and the thickness D8 of the second spherical surface S8 of the fourth lens is 0.5 mm;
the curvature radius R11 of the first spherical surface S11 of the fifth lens is 253.87mm, the thickness D11 of the fifth lens is 26.5mm, the curvature radius R12 of the second spherical surface S12 of the fifth lens is-912 mm, and the thickness D12 of the fifth lens is 5 mm.
10. The uv light scanning field lens of claim 1, wherein the focal lengths of the uv light scanning field lens are each 160 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922267034.8U CN211438581U (en) | 2019-12-17 | 2019-12-17 | Ultraviolet light scanning field lens |
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| CN112415739A (en) * | 2020-11-17 | 2021-02-26 | 南京波长光电科技股份有限公司 | Laser scanning optical system with variable working distance |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112415739A (en) * | 2020-11-17 | 2021-02-26 | 南京波长光电科技股份有限公司 | Laser scanning optical system with variable working distance |
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