CN216622819U - Flat field achromatic microscope objective - Google Patents
Flat field achromatic microscope objective Download PDFInfo
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- CN216622819U CN216622819U CN202122830685.0U CN202122830685U CN216622819U CN 216622819 U CN216622819 U CN 216622819U CN 202122830685 U CN202122830685 U CN 202122830685U CN 216622819 U CN216622819 U CN 216622819U
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Abstract
The utility model provides a flat field achromatic microobjective which sequentially comprises a first lens with positive focal power, a second lens with positive focal power, a third lens with positive focal power, a fourth lens with negative focal power, a fifth lens with positive focal power, a sixth lens with positive focal power, a seventh lens with positive focal power, an eighth lens with positive focal power, a ninth lens with negative focal power, a tenth lens with negative focal power, an eleventh lens with positive focal power and a twelfth lens with negative focal power from an object side to an image side along an optical axis; the diaphragm is arranged between the third lens and the fourth lens, the microscope objective has reasonable structural design, solves the problem of chromatic aberration while having high magnification, and has high measurement precision. In addition, the working distance of the microscope objective can reach 3.5mm, and the problems that the working distance of the existing objective is small and the height of a product is limited are solved.
Description
Technical Field
The utility model belongs to the field of optical detection, and particularly relates to a flat field achromatic microobjective.
Background
The microscope objective is an important part of an optical microscope, and is also a main determinant part of the imaging performance of the microscope, when the dimension of the cross section of the PCB slice is detected, the effective detection function can not be realized due to the small dimension and limited magnification and imaging resolution of the conventional detection lens, so that the micro objective with large aperture and high resolution is used to detect the products with small size, but also has certain limitation, firstly, white light illumination is adopted, the chromatic aberration is generated in the lens of the microscope objective, the chromatic aberration influence is generated on the measurement precision due to the existence of the chromatic aberration, the chromatic aberration correction of the microscope objective has very important significance, in addition, the working distance of the high-magnification microscope objective used at present is smaller than 1 mm, under the condition that the section of the PCB slice is not flat or the PCB slice is three-dimensional, the product can not be placed under the microscope objective, and the condition that the detection cannot be carried out can be caused.
Disclosure of Invention
In view of the above, the present invention provides a flat field achromatic microscope objective, which has a reasonable structural design, a high magnification, a high measurement accuracy and a capability of solving the problem of chromatic aberration. In addition, the working distance of the microscope objective can reach 3.5mm, and the problems that the working distance of the existing objective is small and the height of a product is limited are solved.
The specific technical scheme is as follows:
an achromatic field microscope objective lens, comprising, in order along an optical axis from an object side to an image side:
the lens comprises a first lens with positive focal power, a second lens with positive focal power, a third lens with positive focal power, a fourth lens with negative focal power, a fifth lens with positive focal power, a sixth lens with positive focal power, a seventh lens with positive focal power, an eighth lens with positive focal power, a ninth lens with negative focal power, a tenth lens with negative focal power, an eleventh lens with positive focal power and a twelfth lens with negative focal power; the diaphragm is arranged between the third lens and the fourth lens, the second lens and the third lens form a double cemented lens, the fourth lens and the fifth lens form a double cemented lens, the sixth lens and the seventh lens form a double cemented lens, the eighth lens, the ninth lens and the tenth lens form a three cemented lens, and the eleventh lens and the twelfth lens form a double cemented lens.
Furthermore, the surfaces of the first lens on the object side and the image side are both bent to the object side;
the surfaces of the object side and the image side of the second lens are both bent to the image side;
the surface of the third lens on the object side is bent to the image side, and the surface of the third lens on the image side is bent to the object side;
the surfaces of the object side and the image side of the fourth lens are both bent to the image side;
the surface of the fifth lens on the object side is bent to the image side, and the surface of the fifth lens on the image side is bent to the object side;
the surfaces of the object side and the image side of the sixth lens are both bent to one side of the image side;
the surface of the seventh lens on the object side is bent to the image side, and the surface of the image side is bent to the object side;
the surfaces of the object side and the image side of the eighth lens are both bent to the image side;
the surface of the ninth lens on the object side is bent to the image side, and the surface of the image side is bent to the object side;
the surface of the tenth lens on the object side is bent to the object side, and the surface of the image side is bent to the image side;
the surface of the eleventh lens on the object side is bent to the image side, and the surface of the image side is bent to the object side;
the surface of the twelfth lens on the object side is curved to the object side, and the surface of the image side is curved to the image side.
Further, the object space working distance is 3.5 mm.
Further, the lens operation F # is 0.86.
Further, the NA of the object space of the lens is 0.65.
Additional aspects and advantages of the utility model will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.
Drawings
FIG. 1 is a schematic diagram of the optical path structure of a flat field achromatic microscope objective of the present invention;
FIG. 2 is a distribution diagram of the spots of the present invention flat field achromatic microscope objective;
FIG. 3 is a MTF plot of an optical system of an achromatic field plano-field microscope objective of the present invention;
FIG. 4 is a full field transverse aberration plot of an achromatic plano-field microscope objective of the present invention;
FIG. 5 is a color spherical aberration diagram of a flat field achromatic microscope objective of the present invention;
FIG. 6 is a field curvature curve and distortion plot of a flat field achromatic microscope objective of the present invention;
FIG. 7 is a diagram of the diffraction energy distribution of an achromatic flat field microscope objective of the present invention;
FIG. 8 is a wave phase difference diagram for an achromatic field microscope objective according to the present invention;
the optical lens system comprises a lens, a lens holder, a lens, a.
Detailed Description
The following description is presented to disclose the utility model so as to enable any person skilled in the art to practice the utility model. The preferred embodiments in the following description are given by way of example only, and other obvious variations will occur to those skilled in the art. The basic principles of the utility model, as defined in the following description, may be applied to other embodiments, variations, modifications, equivalents, and other technical solutions without departing from the spirit and scope of the utility model.
As shown in fig. 1, the field-flattened achromatic microscope objective of the present embodiment sequentially includes, from an object side to an image side: a first lens 1 with positive focal power, a second lens 2 with positive focal power, a third lens 3 with positive focal power, a fourth lens 4 with negative focal power, a fifth lens 5 with positive focal power, a sixth lens 6 with positive focal power, a seventh lens 7 with positive focal power, an eighth lens 8 with positive focal power, a ninth lens 9 with negative focal power, a tenth lens 10 with negative focal power, an eleventh lens 11 with positive focal power, and a twelfth lens 12 with negative focal power; a diaphragm 100 is arranged between the third lens 3 and the fourth lens 4, the second lens 2 and the third lens 3 form a double cemented lens, the fourth lens 4 and the fifth lens 5 form a double cemented lens, the sixth lens 6 and the seventh lens 7 form a double cemented lens, the eighth lens 8, the ninth lens 9 and the tenth lens 10 form a three cemented lens, and the eleventh lens 11 and the twelfth lens 12 form a double cemented lens. All lenses are spherical, and the parameters satisfy the following table:
furthermore, the surfaces of the first lens 1 on the object side and the image side are both bent to the object side;
the surfaces of the object side and the image side of the second lens 2 are both bent to the image side;
the surface of the third lens 3 on the object side is bent to the image side, and the surface of the third lens on the image side is bent to the object side;
the surfaces of the fourth lens 4 on the object side and the image side are both bent to the image side;
the surface of the fifth lens 5 on the object side is curved toward the image side, and the surface on the image side is curved toward the object side;
the surfaces of the sixth lens 6 on the object side and the image side are both bent to the image side;
the surface of the seventh lens 7 on the object side is curved toward the image side, and the surface on the image side is curved toward the object side;
the surfaces of the eighth lens 8 on the object side and the image side are both bent to the image side;
the surface of the ninth lens 9 on the object side is curved toward the image side, and the surface on the image side is curved toward the object side;
the surface of the tenth lens 10 on the object side is curved toward the object side, and the surface on the image side is curved toward the image side;
the surface of the eleventh lens 11 on the object side is curved toward the image side, and the surface on the image side is curved toward the object side;
the surface of the twelfth lens 12 on the object side is curved toward the object side, and the surface on the image side is curved toward the image side.
Further, the object space working distance is 3.5 mm.
Further, the lens operation F # is 0.86.
Further, the NA of the object space of the lens is 0.65.
The spectral range of the achromatic microscope objective can reach 400-700nm, the object space working distance is 3.5mm, the working F # of the system is 0.86, the numerical aperture (n.a.) is 0.65, the magnification M is 40 x, the focal length F is 4mm, the system conjugate distance is 195mm, and the diaphragm size is 8.4 mm. The imaging quality of the microscope objective is observed by combining the light spot distribution diagram of FIG. 2, the imaging quality of the system is researched by the concentration ratio of the light reaching the image plane, the light reaching the image plane of the system is almost in the Airy spot range, and the maximum RMS RADIUS of the flat field apochromatic microscope objective is 0.7 μm under the fields of 0 view, 0.5 view and 1.0 view and is close to the diffraction limit value of 0.62 μm.
The transfer function (MTF) of the optical system is shown in fig. 3, and it can be seen that the MTF value of the system is close to the diffraction limit.
FIG. 4 is a plot of the full field transverse aberration of a flat field apochromatic microobjective with the abscissa representing the normalized entrance pupil aperture and the ordinate representing the transverse aberration, with + -0.02 mm on the ordinate representing a maximum value of 0.02 mm and a minimum value of-0.02 mm. In fig. 4, the left side diagram shows meridional aberration curves of the respective relative fields of view (0, 0.5, 0.7, 1), and the right side diagram shows sagittal aberration curves corresponding to the relative fields of view of the left side diagram.
Fig. 5 is a color spherical aberration graph with normalized entrance pupil diameter on the ordinate and color spherical aberration on the abscissa, and it can be seen from fig. 5 that the axial chromatic aberration between the wavelengths is well corrected and the secondary spectrum is much smaller than the apochromatic prescribed value.
FIG. 6 is a field curvature curve and distortion plot, with the field curvature plot on the left with field view on the ordinate and deviation of the meridional and sagittal light on the abscissa; the distortion curve on the right side of the figure shows the field of view on the ordinate and the distortion ratio on the abscissa, and it can be seen from fig. 6 that the distortion of the apochromatic field microscope objective in this example is less than 0.5%.
Fig. 7 is a diffraction energy distribution graph of the apochromatic microscope objective in this embodiment, in which the ordinate is percentage of the energy of the scattered spots and the abscissa is the diameter of the scattered spots, and it can be seen from the graph that 90% of the energy of the scattered spots is concentrated in an energy circle of 1.5 μm, indicating that the apochromatic microscope objective has a high energy concentration.
Fig. 8 is a wave phase difference diagram of the flat field apochromatic microscope objective lens in the present embodiment, which represents the deviation of the actual wave front from the ideal wave front at the entrance pupil in units of wavelength (λ). The phase difference of PV wave of the apochromatic micro objective is about lambda/10, and the phase difference of RMS wave is about lambda/40, which is close to the ideal wave surface.
The microscope objective of the embodiment has high magnification and solves the problem of chromatic aberration through reasonable and optimized structural design, and the measurement precision is high. In addition, the working distance of the microscope objective can reach 3.5mm, and the problems that the working distance of the existing objective is small and the height of a product is limited are solved.
It will be appreciated by persons skilled in the art that the embodiments of the utility model described above and shown in the drawings are given by way of example only and are not limiting of the utility model. The objects of the present invention have been fully and effectively accomplished. The functional and structural principles of the present invention have been shown and described in the examples, and any variations or modifications of the embodiments of the present invention may be made without departing from the principles.
Claims (5)
1. An achromatic field microscope objective lens, comprising, in order along an optical axis from an object side to an image side:
the lens comprises a first lens with positive focal power, a second lens with positive focal power, a third lens with positive focal power, a fourth lens with negative focal power, a fifth lens with positive focal power, a sixth lens with positive focal power, a seventh lens with positive focal power, an eighth lens with positive focal power, a ninth lens with negative focal power, a tenth lens with negative focal power, an eleventh lens with positive focal power and a twelfth lens with negative focal power; the diaphragm is arranged between the third lens and the fourth lens, the second lens and the third lens form a double cemented lens, the fourth lens and the fifth lens form a double cemented lens, the sixth lens and the seventh lens form a double cemented lens, the eighth lens, the ninth lens and the tenth lens form a three cemented lens, and the eleventh lens and the twelfth lens form a double cemented lens.
2. The field achromatic microscope objective of claim 1, wherein surfaces of the first lens on the object side and the image side are curved toward the object side;
the surfaces of the object side and the image side of the second lens are both bent to the image side;
the surface of the third lens on the object side is bent to the image side, and the surface of the third lens on the image side is bent to the object side;
the surfaces of the object side and the image side of the fourth lens are both bent to the image side;
the surface of the fifth lens on the object side is bent to the image side, and the surface of the fifth lens on the image side is bent to the object side;
the surfaces of the object side and the image side of the sixth lens are bent to the image side;
the surface of the seventh lens on the object side is bent to the image side, and the surface of the image side is bent to the object side;
the surfaces of the object side and the image side of the eighth lens are both bent to the image side;
the surface of the ninth lens on the object side is bent to the image side, and the surface of the image side is bent to the object side;
the surface of the tenth lens on the object side is bent to the object side, and the surface of the image side is bent to the image side;
the surface of the eleventh lens on the object side is bent to the image side, and the surface of the image side is bent to the object side;
the surface of the twelfth lens on the object side is curved to the object side, and the surface of the image side is curved to the image side.
3. The field achromatic microscope objective of claim 1, wherein the object-side working distance is 3.5 mm.
4. The field achromatic microscope objective of claim 1, wherein the lens has a working F # of 0.86.
5. The field achromatic microscope objective of claim 1, wherein the objective NA of the lens is 0.65.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122830685.0U CN216622819U (en) | 2021-11-18 | 2021-11-18 | Flat field achromatic microscope objective |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122830685.0U CN216622819U (en) | 2021-11-18 | 2021-11-18 | Flat field achromatic microscope objective |
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| CN216622819U true CN216622819U (en) | 2022-05-27 |
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| CN202122830685.0U Active CN216622819U (en) | 2021-11-18 | 2021-11-18 | Flat field achromatic microscope objective |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116909007A (en) * | 2023-09-13 | 2023-10-20 | 长春长光智欧科技有限公司 | Large-view-field flat-field apochromatic microscope objective lens |
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2021
- 2021-11-18 CN CN202122830685.0U patent/CN216622819U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116909007A (en) * | 2023-09-13 | 2023-10-20 | 长春长光智欧科技有限公司 | Large-view-field flat-field apochromatic microscope objective lens |
| CN116909007B (en) * | 2023-09-13 | 2023-11-28 | 长春长光智欧科技有限公司 | Large-view-field flat-field apochromatic microscope objective lens |
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