CN112099221B - Digital microscopic optical imaging device with long working distance - Google Patents

Digital microscopic optical imaging device with long working distance Download PDF

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CN112099221B
CN112099221B CN202010899533.3A CN202010899533A CN112099221B CN 112099221 B CN112099221 B CN 112099221B CN 202010899533 A CN202010899533 A CN 202010899533A CN 112099221 B CN112099221 B CN 112099221B
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lens
biconvex
optical
biconcave
positive
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CN112099221A (en
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宋旸
刘梦涵
蔡华俊
施雨清
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Nanjing University of Science and Technology
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Nanjing University of Science and Technology
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/36Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/361Optical details, e.g. image relay to the camera or image sensor
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/02Objectives
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/025Mountings, adjusting means, or light-tight connections, for optical elements for lenses using glue

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Lenses (AREA)

Abstract

The invention discloses a long-working-distance digital microscopic optical imaging device, which consists of a microscopic imaging light path and an industrial camera, belongs to the technical field of detection equipment, and utilizes optical design software ZEMAX to simulate the optical imaging effect, thereby providing a microscopic optical system with the working distance of 400mm, the diameter of a field range of view of 4mm, a working wave band of visible light and the resolution of 10 mu m. The optical system has the characteristics of long working distance, high-resolution imaging and the like, and can be applied to non-contact detection in the industrial field.

Description

Digital microscopic optical imaging device with long working distance
Technical Field
The invention relates to an optical imaging technology, in particular to a long-working-distance digital microscopic optical imaging device.
Background
The microscope has wide application, can be applied to the field of biology, and plays a significant role in other scientific fields such as medicine, astronomy, materials science and the like. Just because the microscope plays such an important role, every innovation in the scientific research field can not be separated from the microscope, so the microscope becomes an important mark for scientific development and also becomes a wide application in the detection field and industrial production.
However, when the workpiece is in a relatively harsh environment, the microscope needs to perform high-resolution imaging on the surface of the workpiece to be measured over a long working distance to observe the change of the sample to be measured, such as observing the thermal expansion phenomenon of metal. The existing microscopic imaging system has a small object distance generally and is difficult to meet the requirement of long working distance imaging.
Disclosure of Invention
The invention aims to provide a digital microscopic optical imaging device with a long working distance, which solves the problems of short working distance, low resolution and the like of a microscope in industrial dynamic measurement.
The technical solution for realizing the purpose of the invention is as follows: a digital microscopic optical imaging device with long working distance comprises an optical system, a CCD assembly positioned at the exit pupil of the optical system, and a lens cone device connected with the optical system and the CCD assembly;
the optical system comprises a biconcave lens, a first biconvex lens and a second biconvex lens;
the first cemented doublet object surface is a negative lens surface, and the image surface is a positive lens surface;
the object surface of the second double cemented lens is a negative lens surface, and the image surface of the second double cemented lens is a positive lens surface;
in the lens barrel device, a CCD is connected with a camera sleeve and is connected with a CCD assembly and a lens barrel through a threaded ring, a biconcave lens, a first biconvex lens and a second biconvex lens are placed in the lens barrel together, and the lenses are fixed through a fixed position blocking piece.
Compared with the prior art, the invention has the following remarkable advantages: in order to realize the imaging long working distance environment and the image resolution, the optical system meets the matching requirement of an industrial camera with the imaging resolution of 1292 multiplied by 964 by adjusting the selection of each lens and the optical interval; the optical system has the characteristics of long working distance, high-resolution imaging and the like, and can be applied to non-contact detection in the industrial field.
Drawings
Fig. 1 is an optical path diagram of a long working distance micro-optical system.
Fig. 2 is a point alignment diagram of a long working distance micro-optical system.
Fig. 3 is a wave aberration diagram of a long working distance micro-optical system.
Fig. 4 is a mechanical block diagram of a long working distance micro-optical system.
Fig. 5 is a cross-sectional view of the mechanical structure of the optical system.
Fig. 6 is a schematic diagram of the image acquisition results of 4 stripe patterns at 100 line width positions of the resolution board.
Detailed Description
A digital microscopic optical imaging device with long working distance comprises an optical system, a CCD assembly positioned at the exit pupil of the optical system, and a lens cone device connected with the optical system and the CCD assembly;
the optical system comprises a biconcave lens, a first biconvex lens and a second biconvex lens;
the first cemented doublet object surface is a negative lens surface, and the image surface is a positive lens surface;
the object surface of the second double cemented lens is a negative lens surface, and the image surface of the second double cemented lens is a positive lens surface;
in the lens barrel device, a CCD is connected with a camera sleeve and is connected with a CCD assembly and a lens barrel through a threaded ring, and a biconcave lens, a first biconvex lens and a second biconvex lens are placed in the lens barrel together and are fixed through a retaining sheet at a fixed position.
The optical distance between the CCD camera and the biconcave lens is 25.65 mm; the optical interval between the biconcave lens and the first biconvex lens is 5.6 mm; the optical interval between the first biconvex lens and the second biconvex lens is 340 mm; the optical separation between the second biconvex lens and the sample to be measured was 414.515 mm.
The center thickness of the biconcave lens is 3 +/-0.1 mm; the center thickness of the positive lens of the first biconvex lens is 6 +/-0.1 mm, and the center thickness of the negative lens is 2.4 +/-0.1 mm; the center thickness of the positive lens of the second double cemented lens is 3.6 +/-0.1 mm, and the center thickness of the negative lens is 2.5 +/-0.1 mm.
Furthermore, in the CCD assembly, the camera model is Mer-125-30UM, and a C-mount interface is used for coupling the optical microscopic assembly and the CCD to realize microscopic image shooting.
Furthermore, the biconcave lens is fixed at the exit pupil of the eyepiece through a threaded pressing ring, the distance between the two lenses is ensured through a spacer ring, the second biconcave convex lens is fixed at the entrance pupil of the lens barrel through the threaded pressing ring, and the lens barrel sleeve ring plays a role in protection and prevents the lens barrel from deforming.
Further, in order to reduce reflected light, the inner wall of the lens barrel is treated by matte black
The long working distance optical system has the characteristics that:
since the conventional long working distance optical system has a small field of view, there is a small amount of homeotropic aberration. However, since the working distance and numerical aperture of the system are large, axial aberration is greatly affected, and therefore, the axial aberration of the long-working-distance optical system should be corrected.
(1) And (4) correcting spherical aberration and position chromatic aberration. The optical system of the invention adopts the convex-concave lens combination to correct spherical aberration and position chromatic aberration, and the position chromatic aberration of the combined optical system is smaller than that of a single lens combination.
(2) And correcting curvature of field. The optical system of the invention adopts the combined microscope to carry out the field curvature correction, and because the combined microscope consists of the front group of convex lenses and the rear group of concave lenses, the focal powers of the combined microscope are separated into positive and negative focal powers, and the signs are opposite, so the field curvature of the combined system is smaller than that of a single lens.
(3) Correction of astigmatism. When the optical system selects an initial structure, the double-cemented lens system exists in the positive group, so that astigmatism with opposite signs can be generated to counteract the original astigmatism of the system. But at the same time some higher order aberrations may be generated, and in order to reduce the higher order aberrations, the optical system according to the invention selects cemented lenses with as large a difference in glass refractive index and dispersion as possible.
The long working distance optical system is further described with reference to the drawings and the embodiments.
Examples
Optical structure design part:
referring to fig. 1, a light path diagram of a microscope assembly of the optical system includes a biconcave lens, an achromatic biconvex lens i and a biconvex lens ii sequentially disposed on a main optical axis from right to left; wherein,
the diameter phi of the biconcave lens is 25.4mm, the biconcave lens is made of BK7 material, the center thickness of the biconcave lens is 3 +/-0.1 mm, and the edge thickness of the biconcave lens is 5 +/-0.1 mm;
the first lens and the second lens are both achromatic lenses formed by bonding a positive lens and a negative lens;
the diameter phi of the first lens is 25.4mm, the double convex lenses are made of N-BK7 materials, the meniscus lenses are made of H-ZF2 materials, the center thickness of the lenses is 8.4 +/-0.1 mm, and the edge thickness of the lenses is 6.85 +/-0.1 mm. The object plane is a positive meniscus of the negative lens, and the image plane is a positive meniscus of the positive lens.
The diameter phi of the second lens is 25.4mm, the double convex lenses are made of BK7 materials, the meniscus lenses are made of SF5 materials, the center thickness of the lenses is 6.1 +/-0.1 mm, and the edge thickness of the lenses is 5.1 +/-0.1 mm. The object plane is a positive meniscus of the negative lens, and the image plane is a positive meniscus of the positive lens.
The optical distance between the CCD camera and the biconcave lens is 25.65 mm; the optical interval between the biconcave lens and the first lens is 5.6 mm; the optical interval between the first lens and the second lens is 340 m; and the optical interval between the second lens and the sample to be measured is 414.515 mm.
The specific structural data of the lens assembly with the above-mentioned implementation structure are shown in the table:
surface of Type (B) Radius of curvature Distance between the surfaces (mm) Lens diameter (mm)
Article surface 414.515
1 Standard noodle
2 Standard noodle 119.758 3.6 25.4
3 Standard noodle -90.616 2.5 25.4
4 Standard noodle -277.773 340 25.4
5 Standard noodle 76.812 6 25.4
6 Standard noodle -55.621 2.4 25.4
7 Standard noodle -162.722 5.6 25.4
8 Standard noodle 78.032 3 25.4
9 Standard noodle -78.032 25.65 25.4
Image plane
As shown in fig. 2, the root mean square radius of the dot sequence diagram at the maximum field of view is 13.215 μm, most of the scattered spots are located in airy spots, as shown in fig. 3, the PTV distance in the wavefront map is close to 1/4 wavelengths, the RMS value is close to 1/14, and the comprehensive phase difference and the image quality of the embodiment both meet the requirements.
And a mechanical structure design part:
as shown in fig. 4, the CCD camera is connected to the optical path lens barrel through a threaded ring to form an optical system, the components used in the lens barrel and the three lenses are coaxially arranged, the total length of the center of the optical system component is 415mm, the total mass is about 503g, and the optical system component is coupled to the CCD through a C-mount interface to realize microscopic image shooting.
Fig. 5 is a cross-sectional view of an optical system device, the CCD camera assembly 1 is sleeved with an optical lens barrel 6 through a camera sleeve 2, the lens barrel 6 is shown in the figure, the caliber of the outer wall of the lens barrel is 32mm, the narrowest caliber of the inner wall is 21.4mm, the total length of the narrowest part is 340.5mm, the distance between two double-cemented lenses is fixed, and the caliber of the inner wall of the lens barrel at the position where the lens is placed is 25.4 mm.
Biconcave lens 3, biconcave lens 4 and biconcave lens two 7 are placed respectively in the figure of the drawing position, CCD camera lens is 24.5mm with 3 mirror surface centre intervals of biconcave lens, biconcave lens 3 is fixed through screw thread clamping ring 9 in eyepiece exit pupil department to guarantee the distance between two lenses through spacer ring 5 (the width is 4.91mm), biconcave lens two 7 are fixed at lens cone entrance pupil department through screw thread clamping ring 10.
On the basis, the resolution of the optical system is verified, an optical system device is used for carrying out image acquisition on 4 stripe patterns at the position of 100 line widths of the GCG-020101 type resolution plate at a distance of about 414mm, the image acquisition result of the figure 6 is obtained, the minimum resolvable resolution of the resolution plate is 0.0025mm, the corresponding resolution of the 100 line widths is 10 mu m, and the index of the imaging system with the resolution of 10 mu m is achieved.

Claims (3)

1. A digital microscopic optical imaging device with long working distance is characterized by comprising an optical system, a CCD assembly positioned at the exit pupil of the optical system, and a lens cone device connected with the optical system and the CCD assembly;
the optical system comprises a biconcave lens, a first biconvex lens and a second biconvex lens;
the first cemented doublet object surface is a negative lens surface, and the image surface is a positive lens surface;
the object surface of the second double cemented lens is a negative lens surface, and the image surface of the second double cemented lens is a positive lens surface;
in the lens barrel device, a CCD is connected with a camera sleeve and is connected with a CCD assembly and a lens barrel through a threaded ring, and a biconcave lens, a first biconvex lens and a second biconvex lens are placed in the lens barrel together and are fixed through a fixed position blocking piece;
the optical distance between the CCD camera and the biconcave lens is 25.65 mm; the optical interval between the biconcave lens and the first biconvex lens is 5.6 mm; the optical interval between the first biconvex lens and the second biconvex lens is 340 mm; the optical interval between the second biconvex lens and the sample to be measured is 414.515 mm;
the center thickness of the biconcave lens is 3 +/-0.1 mm; the center thickness of the positive lens of the first biconvex lens is 6 +/-0.1 mm, and the center thickness of the negative lens is 2.4 +/-0.1 mm; the center thickness of the positive lens of the second double cemented lens is 3.6 +/-0.1 mm, and the center thickness of the negative lens is 2.5 +/-0.1 mm;
the biconcave lens is fixed at the exit pupil of the eyepiece through a threaded pressing ring, the distance between the two lenses is ensured through a spacer ring, the second biconcave convex lens is fixed at the entrance pupil of the lens barrel through the threaded pressing ring, and the lens barrel ferrule plays a role in protection and prevents the lens barrel from deforming;
the diameter phi of the biconcave lens is 25.4mm, the biconcave lens is made of BK7 material, the center thickness is 3 +/-0.1 mm, and the edge thickness is 5 +/-0.1 mm;
the first double-cemented convex lens and the second double-cemented convex lens are achromatic lenses formed by bonding a positive lens and a negative lens, the diameter of the first double-cemented convex lens is 25.4mm, double convex lenses are made of N-BK7 materials, a meniscus is made of H-ZF2 materials, the center thickness of the lens is 8.4 +/-0.1 mm, the edge thickness of the lens is 6.85 +/-0.1 mm, the object plane is a positive meniscus of the negative lens, and the image plane is a positive meniscus of the positive lens; the diameter of the second biconvex convex lens is 25.4mm, the biconvex convex lens is made of BK7 material, the meniscus is made of SF5 material, the center thickness of the lens is 6.1 +/-0.1 mm, the edge thickness of the lens is 5.1 +/-0.1 mm, the object plane is a positive meniscus of a negative lens, and the image plane is a positive meniscus of a positive lens.
2. The long working distance digital microscopy optical imaging device according to claim 1, wherein the CCD assembly, with the camera model of Mer-125-30UM, uses a C-mount interface for coupling the optical microscopy assembly to the CCD to achieve microscopic image capture.
3. The long working distance digital micro-optical imaging device according to claim 1, wherein the inner wall of the lens barrel is treated with matte black.
CN202010899533.3A 2020-08-31 2020-08-31 Digital microscopic optical imaging device with long working distance Active CN112099221B (en)

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CN112596227B (en) * 2020-12-26 2022-08-30 南京理工大学 Long working distance high resolution microscopic imaging device for measuring sample in high and low temperature box

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006091181A1 (en) * 2005-07-01 2006-08-31 Roman Duplov Lens system with corrected secondary spectrum
CN107238916A (en) * 2017-07-13 2017-10-10 福建福光股份有限公司 Big zoom ratio, the high definition continuous magnification lens of long-focus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006091181A1 (en) * 2005-07-01 2006-08-31 Roman Duplov Lens system with corrected secondary spectrum
CN107238916A (en) * 2017-07-13 2017-10-10 福建福光股份有限公司 Big zoom ratio, the high definition continuous magnification lens of long-focus

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Inventor after: Song Yang

Inventor after: Liu Menghan

Inventor after: Cai Huajun

Inventor after: Shi Yuqing

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