CN117352527B - Six-channel array type Schwarzschild extreme ultraviolet imaging system - Google Patents
Six-channel array type Schwarzschild extreme ultraviolet imaging system Download PDFInfo
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- CN117352527B CN117352527B CN202311291417.3A CN202311291417A CN117352527B CN 117352527 B CN117352527 B CN 117352527B CN 202311291417 A CN202311291417 A CN 202311291417A CN 117352527 B CN117352527 B CN 117352527B
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- 238000003384 imaging method Methods 0.000 title claims abstract description 37
- 230000003287 optical effect Effects 0.000 claims abstract description 27
- 230000000737 periodic effect Effects 0.000 claims description 5
- 239000011247 coating layer Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 238000003745 diagnosis Methods 0.000 abstract description 7
- 230000000007 visual effect Effects 0.000 abstract description 2
- 230000004927 fusion Effects 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21B—FUSION REACTORS
- G21B1/00—Thermonuclear fusion reactors
- G21B1/05—Thermonuclear fusion reactors with magnetic or electric plasma confinement
- G21B1/057—Tokamaks
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Abstract
The invention discloses a six-channel array Schwarzschild extreme ultraviolet imaging system which comprises a turning mirror, a secondary mirror group, a main mirror group and an image surface detector group, wherein the secondary mirror group is positioned between the turning mirror and the main mirror group, the turning mirror is a plane mirror, the main mirror group comprises six main mirrors which are rotationally symmetrical and uniformly distributed around a main optical axis, the main mirrors are convex spherical mirrors, the secondary mirror group comprises six secondary mirrors which are rotationally symmetrical and uniformly distributed around the main optical axis, the secondary mirrors are concave spherical mirrors, each main mirror and the corresponding secondary mirror form a mirror pair, and the optical axis of the mirror pair is rotationally symmetrical around the main optical axis. The six-channel array type Schwarzschild extreme ultraviolet imaging system with the structure is adopted, all channels work completely and independently, mutual interference is avoided in space, and multi-energy point, large visual field and high-resolution diagnosis of plasma in a partial filter area of a Tokamak device can be realized.
Description
Technical Field
The invention relates to the technical field of extreme ultraviolet imaging, in particular to a six-channel array type Schwarzschild extreme ultraviolet imaging system.
Background
The controllable nuclear fusion has important significance on national defense safety, heavy requirements such as clean energy, basic front research such as high energy density physics and the like, wherein magnetic confinement nuclear fusion and inertial confinement fusion are two important ways for realizing the controllable nuclear fusion. In the field of magnetically confined nuclear fusion, tokamak devices are currently in the leading position. The divertor acts as the core area for the tokamak plasma to interact with the wall, the high thermal load experienced by the target plate and the strong interaction of the plasma with the target plate, become a serious challenge for safe steady-state operation of high-parameter tokamak devices and future fusion stacks. The EAST device successfully realizes the link of the heat flow of the divertor by actively injecting impurity gas into the divertor and the scraping layer, but the physical mechanism thereof, particularly the relevance problem of plasma parameter distribution, impurity transportation, radiation distribution and the like of the divertor region below the X point and the heat load of the target plate, still needs to be studied deeply.
In the Tokamak experiment process, the impurities are various, the information is rich and complex, the plasma radiation in the divertor region is concentrated in the extreme ultraviolet band, and the space span of the plasma parameters is large. The existing infrared camera and divertor probe system can only give plasma parameter information of the surface of the target plate, and lack effective diagnosis on the divertor region between the X point and the target plate. The Schwarzschild optical system is an optical system formed by combining a normal incidence two-mirror structure with a multi-layer film for an extreme ultraviolet band, is widely applied to the fields of microscopic imaging, astronomical observation and the like of the extreme ultraviolet band, the light path structure of the traditional Schwarzschild system is shown as a figure 1, and emergent light rays of a to-be-diagnosed object 1 are imaged at an image point 4 after being repeatedly refracted by a Schwarzschild main mirror 2 and a Schwarzschild auxiliary mirror 3. Wherein the object-side aperture angle and the image-side aperture angle of the Schwarzschild main mirror 2 are u1 and u 1', respectively, and the object-side aperture angle and the image-side aperture angle of the Schwarzschild sub mirror 3 are u2 and u 2', respectively. However, the conventional Schwarzschild system has a limited field of view and does not have a multi-channel imaging function, so that the requirement of plasma precise diagnosis in a divertor region of a Tokamak device cannot be met.
Disclosure of Invention
The invention aims to provide a six-channel array type Schwarzschild extreme ultraviolet imaging system, wherein all channels work completely and independently, mutual interference is avoided in space, and multi-energy point, large visual field and high-resolution diagnosis of plasma in a partial filter area of a Tokamak device can be realized.
In order to achieve the above purpose, the invention provides a six-channel array Schwarzschild extreme ultraviolet imaging system, which comprises a turning mirror, a secondary mirror group, a main mirror group and an image plane detector group, wherein the secondary mirror group is positioned between the turning mirror and the main mirror group, the turning mirror is a plane mirror, the main mirror group comprises six main mirrors which are rotationally symmetrical and uniformly distributed around a main optical axis, the main mirrors are convex spherical mirrors, the secondary mirror group comprises six secondary mirrors which are rotationally symmetrical and uniformly distributed around the main optical axis, the secondary mirrors are concave spherical mirrors, each main mirror and the corresponding secondary mirror form a mirror pair, and the optical axis of the mirror pair is rotationally symmetrical around the main optical axis; light emitted by the object point passes through the aperture at the inner side of the auxiliary lens group after being deflected by the deflection lens, and reaches the corresponding auxiliary lens after being reflected by the main lens, the light is reflected again by the back surface of the auxiliary lens, passes through the aperture at the outer side of the main lens group, and irradiates the image plane detector group to form two-dimensional imaging.
Preferably, the surface of the turning mirror is plated with a broadband non-periodic multilayer film, the surfaces of the main mirror and the auxiliary mirror of each mirror pair are plated with extreme ultraviolet multilayer films with the same material and the same film pair number, the main mirror and the auxiliary mirror of each mirror pair have different coating layer periodic thicknesses, and the main mirror and the auxiliary mirror of different mirror pairs are plated with extreme ultraviolet multilayer films with different structures.
Preferably, the main lens group and the auxiliary lens group share an optical axis, the reflecting surface of the main lens faces the incident direction of the object point light, and the reflecting surface of the auxiliary lens faces the emergent direction of the object point light.
Preferably, the image plane detector group comprises six micro-channel plates which are rotationally symmetrical around the main optical axis and are uniformly arranged, the micro-channel plates are correspondingly arranged with the mirrors, and the imaging points of the mirrors are positioned on the receiving surfaces of the micro-channel plates.
Preferably, the radii of curvature of the primary mirrors of the primary mirror group are identical, and the radii of curvature of the secondary mirrors of the secondary mirror group are identical.
Preferably, the projections of the reflecting surfaces of the primary mirror and the secondary mirror in the sagittal direction are both fan-shaped.
Therefore, the six-channel array type Schwarzschild extreme ultraviolet imaging system adopting the structure has the following beneficial effects:
1. The plasma diagnosis of the divertor region of the existing tokamak device is limited to the conventional diagnosis methods such as an infrared camera, a divertor probe and the like, and only the surface plasma parameters of a target plate can be measured.
2. The traditional Schwarzschild imaging system only has a single imaging channel, a plurality of Schwarzschild objectives are combined with a plurality of layers of extreme ultraviolet films, and multi-channel high-resolution extreme ultraviolet imaging of a bias filter area of a Tokamak device is realized through array arrangement.
The technical scheme of the invention is further described in detail through the drawings and the embodiments.
Drawings
FIG. 1 is a schematic diagram of a conventional Schwarzschild system;
FIG. 2 is a schematic diagram of a six-channel array type Schwarzschild extreme ultraviolet imaging system in accordance with an embodiment of the present invention;
FIG. 3 is a diagram of a secondary mirror according to an embodiment of the present invention;
FIG. 4 is a diagram of a primary mirror according to an embodiment of the present invention;
FIG. 5 shows simulation results obtained by ZEMAX, an optical design software, in accordance with an embodiment of the present invention.
Reference numerals
1. A substance to be diagnosed; 2. schwarzschild primary mirror; 3. schwarzschild secondary mirror; 4. an image point; 5. turning a mirror; 6. a secondary mirror; 7. a primary mirror; 8. a microchannel plate; 9. and (5) an extreme ultraviolet beam.
Detailed Description
The technical scheme of the invention is further described below through the attached drawings and the embodiments.
Examples
As shown in fig. 2, a six-channel array Schwarzschild extreme ultraviolet imaging system includes a turning mirror 5, a secondary mirror group, a primary mirror group, and an image plane detector group, where the secondary mirror group is located between the turning mirror 5 and the primary mirror group, the turning mirror 5 is a plane mirror, the primary mirror group includes six primary mirrors 7 rotationally symmetric and uniformly arranged around a primary optical axis, the primary mirrors 7 are convex spherical mirrors, the secondary mirror group includes six secondary mirrors 6 rotationally symmetric and uniformly arranged around the primary optical axis, the secondary mirrors 6 are concave spherical mirrors, each primary mirror 7 and the corresponding secondary mirror 6 form a mirror pair, that is, an imaging channel, and the optical axes of the mirror pair are rotationally symmetric around the primary optical axis.
In the embodiment, the optical structural design of the imaging system mainly refers to the experimental environment of the tokamak device EAST in China to determine the object image distance of the system, and designs a multi-channel imaging system for eliminating three-level seidel aberrations according to the design method of the Schwarzschild system. Wherein the design of the turning mirror 5 facilitates plasma diagnostics for the divertor region in an actual tokamak device. The radii of curvature of the primary mirrors 7 of the primary mirror group are identical and the radii of curvature of the secondary mirrors 6 of the secondary mirror group are identical. The projections of the reflecting surfaces of the main mirror 7 and the auxiliary mirror 6 in the sagittal direction are nearly 1/6 sector, so that the space utilization rate is improved to the maximum extent, and the light collecting efficiency of the system is improved to the maximum extent.
Aiming at the plasma multi-channel imaging diagnosis requirement of a bias filter area of a tokamak device, the embodiment covers a plurality of extreme ultraviolet lights ranging from 10.31nm to 46.522nm, realizes simultaneous imaging of six channels, and can realize high spatial resolution.
The main lens group and the auxiliary lens group share the optical axis, the reflecting surface of the main lens 7 faces the incident direction of the object point light, and the reflecting surface of the auxiliary lens 6 faces the emergent direction of the object point light. The image plane detector group comprises six micro-channel plates 8 which are rotationally symmetrical around a main optical axis and are uniformly distributed, the micro-channel plates 8 are correspondingly arranged with the mirrors, and image points of all imaging channels are imaged on a receiving surface of the micro-channel plates 8 (MCP).
The extreme ultraviolet light beam 9 passes through the aperture at the inner side of the auxiliary lens group after being deflected by the deflection lens 5, and reaches the corresponding auxiliary lens 6 after being reflected by the main lens 7, the light beam is reflected again at the back of the auxiliary lens 6, passes through the aperture at the outer side of the main lens group, and irradiates the image plane detector group, so that two-dimensional imaging is formed. The six imaging channels are rotationally symmetric, so that a two-dimensional imaging of the six channels is formed. The specific imaging relationship is as follows: the a# primary mirror 7 and the 1# secondary mirror 6 form an image a, the b# primary mirror 7 and the 2# secondary mirror 6 form an image B, the c# primary mirror 7 and the 3# secondary mirror 6 form an image C, the d# primary mirror 7 and the 4# secondary mirror 6 form an image D, the e# primary mirror 7 and the 5# secondary mirror 6 form an image E, and the f# primary mirror 7 and the 6# secondary mirror 6 form an image F.
The surfaces of the main mirror 7 and the auxiliary mirror 6 of each mirror pair are plated with extreme ultraviolet multilayer films with the same materials and the same film pair numbers, and the main mirror 7 and the auxiliary mirror 6 of each mirror pair have different coating layer cycle thicknesses, so that narrow bandwidth and high reflectivity of extreme ultraviolet with specific wavelength in each channel are ensured. The main mirror 7 and the auxiliary mirror 6 of different mirror pairs are plated with extreme ultraviolet multilayer films with different structures, so that the energy points of six channel responses are expanded. The surface of the turning mirror 5 is plated with a broadband non-periodic multilayer film to cover all energy points aimed at by each channel, so that broadband response can be realized.
By plating different high-reflectivity extreme ultraviolet multilayer films on the surfaces of different mirrors, effective response to a plurality of energy characteristic lines or bremsstrahlung can be realized, and the film system design of the six-channel array type Schwarzschild extreme ultraviolet imaging system multilayer film device is shown in the following table.
Imaging performance of this embodiment was evaluated by the optical design software ZEMAX, and simulation results are shown in fig. 5, where the size of each channel image spot is 3.2mm when the object field is 200mm, and six channels can be imaged on a detector with a size of 40 mm. With mtf=0.3 as an evaluation standard, the imaging resolution of the system can reach better than 1mm.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention and not for limiting it, and although the present invention has been described in detail with reference to the preferred embodiments, it will be understood by those skilled in the art that: the technical scheme of the invention can be modified or replaced by the same, and the modified technical scheme cannot deviate from the spirit and scope of the technical scheme of the invention.
Claims (4)
1. A six-channel array Schwarzschild extreme ultraviolet imaging system, characterized in that: the mirror comprises a turning mirror, a secondary mirror group, a main mirror group and an image plane detector group, wherein the secondary mirror group is positioned between the turning mirror and the main mirror group, the turning mirror is a plane mirror, the main mirror group comprises six main mirrors which are rotationally symmetrical and uniformly distributed around a main optical axis, the main mirrors are convex spherical mirrors, the secondary mirror group comprises six secondary mirrors which are rotationally symmetrical and uniformly distributed around the main optical axis, the secondary mirrors are concave spherical mirrors, each main mirror and the corresponding secondary mirror form a mirror pair, and the optical axes of the mirror pairs are rotationally symmetrical around the main optical axis; light rays emitted by the object point are deflected by the turning mirror, pass through the aperture at the inner side of the auxiliary mirror group, reach the corresponding auxiliary mirror after being reflected by the main mirror, reflect the light rays again at the back side of the auxiliary mirror, and irradiate the image plane detector group through the aperture at the outer side of the main mirror group to form two-dimensional imaging;
The surface of the turning mirror is plated with a broadband non-periodic multilayer film, the surfaces of the main mirror and the auxiliary mirror of each mirror pair are plated with extreme ultraviolet multilayer films with the same materials and the same film pair numbers, the main mirror and the auxiliary mirror of each mirror pair have different coating layer periodic thicknesses, and the main mirror and the auxiliary mirror of different mirror pairs are plated with extreme ultraviolet multilayer films with different structures; the main lens group and the auxiliary lens group share the optical axis, the reflecting surface of the main lens faces the incident direction of the object point light, and the reflecting surface of the auxiliary lens faces the emergent direction of the object point light.
2. A six channel array Schwarzschild extreme ultraviolet imaging system as set forth in claim 1, wherein: the image plane detector group comprises six micro-channel plates which are rotationally symmetrical around a main optical axis and are uniformly distributed, the micro-channel plates are correspondingly arranged with the mirrors, and imaging points of the mirrors are positioned on the receiving surfaces of the micro-channel plates.
3. A six channel array Schwarzschild extreme ultraviolet imaging system as set forth in claim 1, wherein: the curvature radius of each main mirror of the main mirror group is identical, and the curvature radius of each auxiliary mirror of the auxiliary mirror group is identical.
4. A six channel array Schwarzschild extreme ultraviolet imaging system as set forth in claim 1, wherein: the projections of the reflecting surfaces of the primary mirror and the secondary mirror in the sagittal direction are all fan-shaped.
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| CN202311291417.3A CN117352527B (en) | 2023-10-08 | 2023-10-08 | Six-channel array type Schwarzschild extreme ultraviolet imaging system |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102778748A (en) * | 2011-05-11 | 2012-11-14 | 同济大学 | Aiming device for microscope for plasma diagnosis and use method thereof |
| CN103235398A (en) * | 2013-04-17 | 2013-08-07 | 同济大学 | Multichannel normal-incidence electrode ultraviolet imaging objective lens and application thereof |
| CN103234634A (en) * | 2013-04-17 | 2013-08-07 | 同济大学 | Imaging system for realizing multiple energy point spectrum resolution on extreme ultraviolet band and application of imaging system |
| CN111562716A (en) * | 2020-04-15 | 2020-08-21 | 同济大学 | Multichannel KB microscope structure with quasi-coaxial observation function |
| CN116313167A (en) * | 2023-03-23 | 2023-06-23 | 核工业西南物理研究院 | Atomic reaction quantitative diagnosis method and system for nuclear fusion device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9329373B2 (en) * | 2013-02-13 | 2016-05-03 | Canon Kabushiki Kaisha | Catadioptric optical system with multi-reflection element for high numerical aperture imaging |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102778748A (en) * | 2011-05-11 | 2012-11-14 | 同济大学 | Aiming device for microscope for plasma diagnosis and use method thereof |
| CN103235398A (en) * | 2013-04-17 | 2013-08-07 | 同济大学 | Multichannel normal-incidence electrode ultraviolet imaging objective lens and application thereof |
| CN103234634A (en) * | 2013-04-17 | 2013-08-07 | 同济大学 | Imaging system for realizing multiple energy point spectrum resolution on extreme ultraviolet band and application of imaging system |
| CN111562716A (en) * | 2020-04-15 | 2020-08-21 | 同济大学 | Multichannel KB microscope structure with quasi-coaxial observation function |
| CN116313167A (en) * | 2023-03-23 | 2023-06-23 | 核工业西南物理研究院 | Atomic reaction quantitative diagnosis method and system for nuclear fusion device |
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