CN110455835A - A kind of Soft X-ray microimaging detector - Google Patents
A kind of Soft X-ray microimaging detector Download PDFInfo
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- CN110455835A CN110455835A CN201910771982.7A CN201910771982A CN110455835A CN 110455835 A CN110455835 A CN 110455835A CN 201910771982 A CN201910771982 A CN 201910771982A CN 110455835 A CN110455835 A CN 110455835A
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
Abstract
The invention discloses a kind of Soft X-ray microimaging detectors, including cavity, fluorescence conversion screen and electrooptical device, cavity includes the first opening and the second opening, inside cavity is provided with will reflex to the reflection device of the second opening from the light of the first opening incidence, and light is open between the direction propagated to the reflection device direction propagated and self-reflection device to the second opening from first has the first angle；Fluorescence conversion screen is set to the first opening；Electrooptical device is set to the second opening, and electrooptical device, fluorescence conversion screen and cavity form confined space.The invention avoids grenz rays to be directly radiated on electrooptical device, improves Effect on Detecting, extends the service life of electrooptical device, has the advantages of simple structure and easy realization.
Description
Technical field
The present invention relates to micro-imaging technique fields, relate more specifically to a kind of Soft X-ray microimaging detector.
Background technique
Traditional optical microscopy imaging technology is imaged using visible light (wave-length coverage 390nm~700nm), due to by
To the limitation of diffraction limit, resolution ratio is extremely difficult to 200nm or less.Electron Microscope images technology is imaged using electronics,
Although resolution ratio improve, since the penetration capacity of electronics is weak, can not penetrating cell to cell interior carry out three-dimensional imaging；Together
When, whens Electron Microscope images, needs to be sliced biological sample, be dehydrated etc. processing, this undoubtedly destroys the interior of sample
Portion's structural information, it is impossible to which complete water-containing cell is imaged.
X-ray has very high penetrating power, many substances opaque to visible light can be penetrated, in general, wavelength is less than
The title Super-hard X-ray of 0.1 Ethylmercurichlorendimide, title hard X ray of the wavelength within the scope of 0.1~10 Ethylmercurichlorendimide, wavelength is in 10~100 Ethylmercurichlorendimide ranges
Interior title grenz ray.In recent years, grenz ray is gradually applied in micro-imaging technique.Compared to optical microscopy imaging and electricity
Sub- microscope imaging technology, Soft X-ray microimaging technology have its unique advantage.
Grenz ray of the Soft X-ray microimaging technology using wavelength much smaller than visible wavelength is imaged, theoretic
Limiting resolution can reach 1.2nm；Meanwhile in the section of certain wavelength of soft X-ray, for example, wavelength 2.3nm~4.4nm, energy
Measure 284eV~534eV, the high an order of magnitude of absorptance water of protein, lipid and other carbon containing, nitrogen compounds to photon, In
Water environment is transparent relative to biological sample in the wave band, can provide clearly cell image by nature contrast.Therefore, soft X is penetrated
Line micro-imaging technique sample used, which is typically without, to be carried out dehydrating, can without the state for being in high vacuum when observation
Preferably show the nature of organism, and the bio-imaging information of quantitative.Further pass through tomographic imaging and three-dimensional
Reconfiguration technique, Soft X-ray microimaging technology can also obtain the three-dimensional fine structure of cell interior.
Soft X-ray microimaging equipment uses soft x-ray detector to obtain the structure data for projection of sample, therefore, soft X
Ray detector is the key factor for influencing equipment imaging effect.Soft x-ray detector can be divided into indirect detection type and directly
Detecting, wherein grenz ray is converted into visible light using fluorescent screen, scintillation crystal etc. by indirect detection type, then by with flashing
The electrooptical device of crystal coupling is detected, and indirect detection type has high dynamic range, wide energy coverage area, CCD core
The advantages that piece service life is long；Direct detection type then utilizes depletion layer interaction in the photon and detector chip of grenz ray to generate
Electron hole pair realize detection, direct detection type have many advantages, such as spatial resolution height, high sensitivity.For example, common is straight
The quantum efficiency of the Soft X-Ray Region of detecting is connect up to 80% or more, Pixel Dimensions at 15 microns or less.
There are still problems for traditional soft x-ray detector, for example, traditional grenz ray imaging device uses laser
Plasma is as light source, and not only Soft X-Ray Region radiation efficiency is low, but also along with from visible light to X-ray broadband range
Interior electromagnetic interference, these visible lights, ultraviolet light and X-ray are difficult to be purged using conventional light path design, can be right
Imaging makes a big impact；Simultaneously because the intensity of light source of Soft X-ray microimaging instrument is weaker, traditional ccd detector is logical
Time exposure is crossed to obtain imaging picture, is a kind of week that the duration is very short using the grenz ray that laser plasma generates
The pulse of phase property, within this section of time for exposure, effective duration proportion very little of grenz ray causes a large amount of noise
Accumulation, reduces imaging signal to noise ratio.Secondly, traditional soft x-ray detector is detected using direct detection type CCD, CCD core
Piece is exposed outside, is easy to be contaminated by dust, splash etc., damage；Therefore, it is necessary to optional equipment filter discs, and filter disc is generally by several
The metallic film of hundred nanometer thickness is constituted, using metal mesh as support, it is easy to damage.Again, traditional grenz ray, which is imaged, visits
The X-ray that survey device not can avoid higher-energy directly radiates on CCD chip, can not only generate noise jamming, make for a long time
With can also damage chip.In addition, equipment also needs the optical devices such as optional equipment aperture, cone, use it is sufficiently complex,
Light leakage phenomena generation is not can avoid.
Summary of the invention
The object of the present invention is to provide a kind of Soft X-ray microimaging detectors, to solve the problems, such as above-mentioned at least one.
Soft X-ray microimaging detector provided by the invention, which includes cavity, glimmering
Light conversion screen and electrooptical device, cavity include the first opening and the second opening, and the inside cavity is provided with will be from institute
The light for stating the incidence of the first opening reflexes to the reflection device of second opening, and the light is open from described first to described
The direction and there is the first angle from the reflection device between the direction of the second opening propagation that reflection device is propagated；Institute
It states fluorescence conversion screen and is set to first opening；The electrooptical device is set to second opening, the light
Power conversion device, the fluorescence conversion screen and the cavity form confined space.
According to one embodiment of present invention, the cavity includes interconnected the first cavity and the second cavity, described
First opening is located on first cavity, and second opening is located on second cavity.
According to one embodiment of present invention, is formed between first cavity and the extending direction of second cavity
Two angles, second angle are identical as the size of first angle.
According to one embodiment of present invention, the range of first angle is between 30 ° -270 °.
According to one embodiment of present invention, the fluorescence conversion screen is scintillation material, and the scintillation material includes silicic acid
Yttrium lutetium, sodium iodide, cesium iodide, bismuth germanium oxide, cesium iodide, ceramic scintillator or plastic scintillant.
According to one embodiment of present invention, the direction of propagation of the plane where the fluorescence conversion screen and the light is hung down
Directly, the thickness of the fluorescence conversion screen is between 10 μm -100 μm.
According to one embodiment of present invention, filter disc is provided on the surface of the fluorescence conversion screen.
According to one embodiment of present invention, less than 1%, the soft X of the filter disc is penetrated the visible light transmittance of the filter disc
Line transmitance is not less than 60%.
According to one embodiment of present invention, the thickness of the filter disc is between 60nm-500nm.
According to one embodiment of present invention, the filter disc is aluminium, titanium, copper, iron, gold or nickel.
According to one embodiment of present invention, it is anti-not less than 98% to be provided with light reflectivity for the surface of the reflection device
Penetrate film.
According to one embodiment of present invention, the electrooptical device is silicon photo multiplier device.
According to one embodiment of present invention, the first condenser lens is additionally provided in the cavity, described first focuses thoroughly
Mirror is between the reflection device and the electrooptical device.
According to one embodiment of present invention, focus lens group is provided in the cavity, the focus lens group includes
It is set between the reflection device and the electrooptical device and the first condenser lens being parallel to each other and second focuses thoroughly
Mirror.
According to one embodiment of present invention, first opening is provided with adjusting aperture, inside the adjusting aperture
Hollow and have loophole, the loophole is oppositely arranged with the fluorescence conversion screen.
According to one embodiment of present invention, second opening is provided with cooling-part, and the cooling-part is to institute
State the transmitting of electrooptical device heat.
Soft X-ray microimaging detector provided by the invention, by by light path design at the deflection with certain angle
It avoids grenz ray to be directly radiated on electrooptical device, improve Effect on Detecting while extending electrooptical device
Service life, it is also an option that different optical path lengths is to meet the imaging demands of different spatial resolutions.The present invention is further
By the way that filter disc is arranged in fluorescence conversion screen, the conversion quality of grenz ray can be improved, while guaranteeing that filter disc is less likely to be damaged,
It avoids generating light leakage phenomena.In addition, the configuration of the present invention is simple, it is easy to accomplish, save the cost.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
The some embodiments recorded in invention, for those of ordinary skill in the art, in the premise of not making the creative labor property
Under, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is the diagrammatic cross-section of Soft X-ray microimaging detector according to an embodiment of the invention；
Fig. 2 is the diagrammatic cross-section of Soft X-ray microimaging detector in accordance with another embodiment of the present invention；
Fig. 3 is the diagrammatic cross-section of the Soft X-ray microimaging detector of another embodiment according to the present invention；
Fig. 4 is the diagrammatic cross-section of Soft X-ray microimaging detector in accordance with another embodiment of the present invention；
Fig. 5 is the diagrammatic cross-section of the Soft X-ray microimaging detector of another embodiment according to the present invention；
Fig. 6 is the diagrammatic cross-section of Soft X-ray microimaging detector in accordance with another embodiment of the present invention.
Specific embodiment
Below in conjunction with specific embodiment, the present invention will be further described.It should be understood that following embodiment is merely to illustrate this
The range of invention and is not intended to limit the present invention.
It should be noted that it can directly set when component/part is referred to as on " setting exists " another component/part
It sets on another component/part or there may also be component/parts placed in the middle.When component/part is referred to as " connection/connection
Connect " to another component/part, it, which can be, is directly connected to/is attached to another component/part or may be simultaneously present residence
Middle component/part.Term as used herein " connection/connection " may include electrical and/or mechanical-physical connection/connection.This
Term "comprises/comprising" used in text refers to feature, step or the presence of component/part, but is not precluded one or more
Other feature, step or the presence of component/part or addition.Term as used herein "and/or" includes one or more phases
Close any and all combinations of listed item.
Unless otherwise defined, all technical and scientific terms used herein and the technical field for belonging to the application
The normally understood meaning of technical staff is identical.Term used herein is intended merely to the purpose of description specific embodiment, and
It is not intended to limitation the application.
In addition, term " first ", " second " etc. are used for description purposes only pair similar with distinguishing in the description of the present application
As between the two and sequencing being not present, indication or suggestion relative importance can not be interpreted as.In addition, the application's
In description, unless otherwise indicated, the meaning of " plurality " is two or more.
Fig. 1 is the diagrammatic cross-section of Soft X-ray microimaging detector according to an embodiment of the invention, can by Fig. 1
Know, Soft X-ray microimaging detector provided by the invention include at least cavity 10, fluorescence conversion screen 20, reflection device 30 with
And electrooptical device 40, wherein cavity 10 includes the first cavity 11 and the second cavity between extending direction at an angle
12, the first cavity 11 and the second cavity 12 are interconnected and end is respectively arranged with opening, and the opening of the first cavity 11 is set
It is equipped with fluorescence conversion screen 20, the opening of the second cavity 12 is provided with electrooptical device 40, and reflection device 30 is set to cavity
10 inside and the junction for being located at the first cavity 11 and the second cavity 12, the position of reflection device 30 is adjustable so that from the
The light of one cavity, 11 opening incidence, which can be reflected by reflection device 30 and pass through the second cavity 12, is mapped to electrooptical device
On 40.
More specifically, cavity 10 can be using the material production that can shield grenz ray, such as lead, the thickness of cavity 10
It can be selected according to related radiation protection standard, the first cavity 11 and the second cavity 12 of cavity 10 are preferably manufactured to cylindrical shape,
It will be appreciated by those skilled in the art that cavity 10 can also be made as other shapes, such as rectangular section tube or variable cross-section
Pipe etc., details are not described herein.
Fluorescence conversion screen 20 is preferably using the material that grenz ray can be converted to visible light, such as scintillation crystal, packet
Include LYSO, NaI, BGO, CsI etc.；The propagation of the extending direction or light of plane and the first cavity 11 where fluorescence conversion screen 20
Direction is vertical, and the shape of fluorescence conversion screen 20 is preferably matched with the shape of the cross section of the first cavity 11, so as to pass through
Fluorescence conversion screen 20 is fixed on the opening of the first cavity 11 by conventional sealing technology；The thickness of fluorescence conversion screen 20 is preferably
Between 10 μm -100 μm, more preferably between 20 μm -50 μm, so that fluorescence conversion screen 20 will can effectively enter
The grenz ray penetrated is converted to visible light.
Further, Soft X-ray microimaging detector provided by the invention can also include filter disc 21, and filter disc 21 is arranged
In in fluorescence conversion screen 20, filter disc 21 is preferably plated on by fluorescence conversion screen using coating process (such as technique for vacuum coating etc.)
On 20 outer surfaces；The preferably use of filter disc 21 can filter out visible light and material, such as aluminium, nickel etc. through grenz ray；Filter
The thickness of piece 21 is preferably ranges between 60nm-500nm, more preferably 100nm, so that filter disc 21 can effectively be gone
Except the visible component in incident light, through the grenz ray of the overwhelming majority.Those skilled in the art should be noted that selection
Filter disc 21 grenz ray transmitance should be made not less than 60%, it is seen that light transmission rate is lower than 1%, the measurement of specific transmitance
For technical means commonly used by such a person skilled in the art, details are not described herein.Plated film is carried out using on the surface of fluorescence conversion screen 20
Filter disc 21 is made, fluorescence conversion screen 20 can be effectively utilized as support protection, so that filter disc 21 is less likely to be damaged, mention significantly
High service life, while adopting coating film treatment and being also possible that the completely covering fluorescence conversion screen 20 of filter disc 21, it is existing to avoid light leakage
The generation of elephant.
Reflection device 30 preferably uses reflecting mirror, and reflective film can be set in the surface of reflection device 30, for example is arranged
The high-reflecting film of assembly of thin films material, the thickness of reflective film and period can be set according to the peak wavelength of fluorescence conversion screen 20
Meter, it is therefore an objective to so that visible reflectance is maintained at 98% or more, guarantee the propagation efficiency of visible light.Reflection device 30 can change
The direction of propagation on darkening road, so that a part of grenz ray through fluorescence conversion screen 20 will not be irradiated to electrooptical device 40
On, avoid noise jamming and chip damage.
Electrooptical device 40 receives fluorescence conversion screen 20 and converts and pass through the visible light that reflection device 30 reflects, simultaneously
These visible lights are converted into electric signal, electric signal is further transmitted by the electronic system connecting with electrooptical device 40
It is handled to computer, specific signal processing belongs to technical means commonly used by such a person skilled in the art, and details are not described herein.
Electrooptical device 40 preferably uses silicon photo multiplier device (SiPM), the number that SiPM can be independently read out using each channel
Change design technology, while meeting highly sensitive, single pixel size is at 30 microns hereinafter, performance is splendid.Those skilled in the art
Member is it should be noted that the refreshing frequency of electrooptical device 40 should be with the plasma light pulse for generating grenz ray
Frequency matching, the i.e. refreshing frequency of electrooptical device 40 are matched not less than the frequency of plasma light pulse, preferably the two frequency
Rate is identical to realize optimal detection efficient.
In the embodiment in figure 1, Soft X-ray microimaging detector provided by the invention can also include that the first focusing is saturating
Mirror 50, the first condenser lens 50 are installed in cavity 10 and between 30 remaining light power conversion device 40 of reflection device, at this point, glimmering
The distance between light conversion screen 20 and reflection device 30 be L, between reflection device 30 and the center of the first condenser lens 50 away from
From for H, the distance between the center of the first condenser lens 50 and electrooptical device 40 are S, can be made by adjusting L, H and S
Visible light focuses on electrooptical device 40, is conducive to the signal changing effect for improving electrooptical device 40.
It is worth noting that, after cavity 10, fluorescence conversion screen 20 and electrooptical device 40 are installed, cavity 10
Inside be it is closed lighttight, this, which is conducive to improve transmitting of the visible light converted of fluorescence conversion screen 20 cavity 10 inside, imitates
Rate.
Fig. 2 is the diagrammatic cross-section according to the Soft X-ray microimaging detector of another embodiment of the present invention, Fig. 2's
Embodiment is compared with the embodiment of Fig. 1, and same or similar component is indicated by increasing by 100 appended drawing reference, herein
Only description and the different part of a upper embodiment.In the embodiment of fig. 2, the grenz ray caused by the soft X_ray source
When being incident on fluorescence conversion screen 120 across filter disc 121, a part of grenz ray is converted to visible light by fluorescence conversion screen 120, can
The light-exposed folding angles α reflected after reflection device 130 that is incident on along the first cavity 111 is 60 degree, those skilled in the art
Member according to different paths it should be noted that need and observation needs, and (i.e. light is from the first chamber by the folding angles α of optical path
Body 111 is mapped to the total angle reflected after reflection device 130) it is preferably ranges between 30 ° -270 °.Those skilled in the art
It should be noted that the essence of cavity 100 is so that the optical path of visible light changes, so that electrooptical device is no longer at
In the incident direction of grenz ray, so that noise jamming and chip be avoided to damage, the quality of signal conversion, therefore, cavity are improved
The shape of 100 concrete shape or the first cavity and the second cavity should not become limitation of the invention, and details are not described herein.
Fig. 3 is the diagrammatic cross-section according to the Soft X-ray microimaging detector of another embodiment of the present invention, Fig. 3's
Embodiment is compared with the embodiment of Fig. 1, and same or similar component is indicated by increasing by 200 appended drawing reference, herein
Only description and the different part of Fig. 1 embodiment.In the fig. 3 embodiment, Soft X-ray microimaging detector can also wrap
It includes and adjusts aperture 260, adjust the opening that aperture 260 is set to the first cavity 211, the inside for adjusting aperture 260 is hollow knot
Structure and there is loophole 261, the diameter of loophole 261 is less than the diameter for adjusting 260 interior hollow section of aperture, while light transmission
261 face filter disc 221 of hole and fluorescence conversion screen 220, the diameter of loophole 261, which can according to need, selects different sizes.Soft X
After the grenz ray that ray source generates passes through sample, stray light therein can be effectively removed by adjusting aperture 260, so that by
Effective grenz ray of sample enters directive filter disc 221 by loophole 261, prevents the interference of refracted light.
Fig. 4 is the diagrammatic cross-section according to the Soft X-ray microimaging detector of another embodiment of the present invention, Fig. 4's
Embodiment is compared with the embodiment of Fig. 1, and same or similar component is indicated by increasing by 300 appended drawing reference, herein
Only description and the different part of Fig. 1 embodiment.In the fig. 4 embodiment, Soft X-ray microimaging detector can also wrap
Cooling-part 370 is included, cooling-part 370 is set to the opening of the second cavity 312, cooling-part 370 and electrooptical device
340 can carry out heat transmitting to cool down to electrooptical device 340.Cooling-part 370 should have the system at least down to -60 DEG C
Cold energy power is to guarantee the thermal noise for having enough abilities to reduce electrooptical device 340.
Fig. 5 is the diagrammatic cross-section according to the Soft X-ray microimaging detector of another embodiment of the present invention, Fig. 5's
Embodiment is compared with the embodiment of Fig. 4, and same or similar component is indicated by increasing by 100 appended drawing reference, herein
Only description and the different part of Fig. 4 embodiment.In the 5 embodiment of figure 5, the first condenser lens 450 and electrooptical device
In addition second condenser lens 451 is provided between 440, the first condenser lens 450 constitutes poly- with the second condenser lens 451
Focus lens group, at this point, the distance between fluorescence conversion screen 420 and reflection device 430 are L, reflection device 430 and condenser lens
The distance between 450 center is H, and the distance between the center of condenser lens 450 and the second condenser lens 451 are M, and second is poly-
The distance between focus lens 451 and electrooptical device 440 are N, and the size by adjusting L, H and M, N can make visible light more
It focuses on well on electrooptical device 440, is conducive to the signal changing effect for improving electrooptical device 440.
Fig. 6 is the diagrammatic cross-section according to the Soft X-ray microimaging detector of another embodiment of the present invention, Fig. 6's
Embodiment is compared with the embodiment of Fig. 2, and same or similar component is indicated by increasing by 400 appended drawing reference, herein
Only description and the different part of Fig. 2 embodiment.In the embodiment in fig 6, cavity 510 includes the first cavity interconnected
511 and second cavity 512, the first cavity 511 and the second cavity 512 is interconnected and end is respectively arranged with opening, wherein
The first opening of end setting of first cavity 511, the second opening of end setting of the second cavity 512, the first cavity 511
The center line of extending direction l by a dotted line1It indicates, the center line of the extending direction of the second cavity 512 l by a dotted line3It indicates, instead
Emitter part 530 is set to the junction of the first cavity 511 and the second cavity 512, and reflection device 530 will be from the incidence of the first opening
Light reflex to the second opening, at this point, light from first be open to reflection device propagate direction and l1It is overlapped, light is by reflection
The l by a dotted line of the direction of propagation afterwards2It indicates, by the incident direction l of light1With reflection direction l2Between angle be known as the first angle
α, by the extending direction l of the first cavity 5111With the extending direction l of the second cavity 5123Between angle be known as the second angle β, can
With discovery, in the embodiment in fig 6, the first angle α can be different from the size of the second angle β.It is opened in order to facilitate observation, second
The plane where electrooptical device 540 and condenser lens 550 at mouthful is generally in a horizontal direction.
The present invention is placed in by sample when in use, and fluorescence conversion screen is placed towards sample, the soft X that soft X_ray source generates
After ray passes through sample, it may be adjusted the loophole on aperture and be incident on fluorescence conversion screen, fluorescence conversion screen is by grenz ray
Be converted to visible light, it is seen that light further passes through the reflection directive electrooptical device of reflection device, light in closed cavity
Power conversion device will be seen that light is converted to electric signal and exports and be further processed.The present invention is filtered by being arranged in fluorescence conversion screen
Piece, can be improved the conversion quality of grenz ray, while guarantee that filter disc is less likely to be damaged, and avoid generating light leakage phenomena；The present invention is logical
It crosses and light path design is avoided into grenz ray at the deflection with certain angle is directly radiated on electrooptical device, improve
Effect on Detecting extends the service life of electrooptical device simultaneously, can also adjust the length of optical path to meet different spaces point
The imaging demand of resolution；In addition, electrooptical device uses SiPM, be conducive to carry out electric signal totally digitilized sampling processing,
The frequency of plasma light pulse can not only be preferably matched, has more saved cost while guaranteeing Effect on Detecting.
Above-described, only presently preferred embodiments of the present invention, the range being not intended to limit the invention, of the invention is upper
Stating embodiment can also make a variety of changes.Made by i.e. all claims applied according to the present invention and description
Simply, equivalent changes and modifications fall within the claims of the invention patent.The not detailed description of the present invention is
Routine techniques content.
Claims (16)
1. a kind of Soft X-ray microimaging detector, which is characterized in that the Soft X-ray microimaging detector includes:
Cavity, the cavity include the first opening and the second opening, and the inside cavity is provided with will be from first opening
Incident light reflexes to the reflection device of second opening, and the light is open from described first and propagates to the reflection device
Direction and from the reflection device to it is described second opening propagate direction between have the first angle；
Fluorescence conversion screen, the fluorescence conversion screen are set to first opening；And
Electrooptical device, the electrooptical device are set to second opening, the electrooptical device, described glimmering
Light conversion screen and the cavity form confined space.
2. Soft X-ray microimaging detector according to claim 1, which is characterized in that the cavity includes mutually interconnecting
Logical the first cavity and the second cavity, first opening are located on first cavity, and second opening is located at described the
On two cavitys.
3. Soft X-ray microimaging detector according to claim 2, which is characterized in that first cavity with it is described
The second angle is formed between the extending direction of second cavity, second angle is identical as the size of first angle.
4. Soft X-ray microimaging detector according to claim 1, which is characterized in that the range of first angle
Between 30 ° -270 °.
5. Soft X-ray microimaging detector according to claim 1, which is characterized in that the fluorescence conversion screen is to dodge
Bright material, the scintillation material includes yttrium luetcium silicate, sodium iodide, cesium iodide, bismuth germanium oxide, cesium iodide, ceramic scintillator or modeling
Expect scintillator.
6. Soft X-ray microimaging detector according to claim 1, which is characterized in where the fluorescence conversion screen
Plane it is vertical with the direction of propagation of the light, the thickness of the fluorescence conversion screen is between 10 μm -100 μm.
7. Soft X-ray microimaging detector according to claim 1, which is characterized in that the table of the fluorescence conversion screen
Filter disc is provided on face.
8. Soft X-ray microimaging detector according to claim 7, which is characterized in that the visible light of the filter disc is saturating
Rate is crossed less than 1%, the grenz ray transmitance of the filter disc is not less than 60%.
9. Soft X-ray microimaging detector according to claim 7, which is characterized in that the thickness of the filter disc between
Between 60nm-500nm.
10. Soft X-ray microimaging detector according to claim 7, which is characterized in that the filter disc be aluminium, titanium,
Copper, iron, gold or nickel.
11. according to claim 1 or Soft X-ray microimaging detector described in 7, which is characterized in that the reflection device
Surface be provided with light reflectivity be not less than 98% reflective film.
12. Soft X-ray microimaging detector according to claim 1, which is characterized in that the electrooptical device is
Silicon photo multiplier device.
13. Soft X-ray microimaging detector according to claim 1, which is characterized in that be additionally provided in the cavity
First condenser lens, first condenser lens is between the reflection device and the electrooptical device.
14. Soft X-ray microimaging detector according to claim 1, which is characterized in that be provided in the cavity poly-
Focus lens group, the focus lens group include being set between the reflection device and the electrooptical device and being parallel to each other
The first condenser lens and the second condenser lens.
15. Soft X-ray microimaging detector according to claim 1, which is characterized in that the first opening setting
There is an adjusting aperture, the adjusting aperture inner hollow and there is loophole, the loophole is opposite with the fluorescence conversion screen to be set
It sets.
16. Soft X-ray microimaging detector according to claim 1, which is characterized in that the second opening setting
There is cooling-part, the cooling-part is transmitted to the electrooptical device heat.
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| CN201910771982.7A CN110455835A (en) | 2019-08-21 | 2019-08-21 | A kind of Soft X-ray microimaging detector |
| PCT/CN2020/108479 WO2021031936A1 (en) | 2019-08-21 | 2020-08-11 | Soft x-ray microscopic imaging detector |
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| CN201910771982.7A CN110455835A (en) | 2019-08-21 | 2019-08-21 | A kind of Soft X-ray microimaging detector |
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Cited By (1)
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|---|---|---|---|---|
| WO2021031936A1 (en) * | 2019-08-21 | 2021-02-25 | 苏州瑞派宁科技有限公司 | Soft x-ray microscopic imaging detector |
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| CN110455835A (en) * | 2019-08-21 | 2019-11-15 | 苏州瑞派宁科技有限公司 | A kind of Soft X-ray microimaging detector |
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