WO2021031936A1

WO2021031936A1 - Soft x-ray microscopic imaging detector

Info

Publication number: WO2021031936A1
Application number: PCT/CN2020/108479
Authority: WO
Inventors: 郑睿; 肖鹏; 谢庆国; 钟胜; 王卫东; 唐江; 褚倩; 白翔
Original assignee: 苏州瑞派宁科技有限公司
Priority date: 2019-08-21
Filing date: 2020-08-11
Publication date: 2021-02-25
Also published as: CN110455835A

Abstract

A soft X-ray microscopic imaging detector, comprising a cavity (10), a fluorescence conversion screen (20), and a photoelectric conversion device (40). The cavity (10) comprises a first opening and a second opening. A reflective device (30) that reflects the light incident from the first opening to the second opening is provided in the cavity (10). A first angle is defined between the direction in which the light propagates from the first opening toward the reflective device (30) and the direction in which the light propagates from the reflective device (30) toward the second opening. The fluorescence conversion screen (20) is provided at the first opening. The photoelectric conversion device (40) is provided at the second opening. The photoelectric conversion device (40), the fluorescence conversion screen (20), and the cavity (10) form a closed space. The soft X-ray microscopic imaging detector avoids direct radiation of soft X-rays onto the photoelectric conversion device (40), improves the detection effect, prolongs the service life of the photoelectric conversion device (40), and is simple in structure and easy to implement.

Description

A soft X-ray microscopic imaging detector

This disclosure claims priority for the Chinese patent application 201910771982.7 filed on August 21, 2019, the entire content of which is incorporated herein by reference.

Technical field

The present invention relates to the field of microscopic imaging technology, and more specifically to a soft X-ray microscopic imaging detector.

Background technique

Traditional optical microscopy imaging technology uses visible light (wavelength range of 390nm to 700nm) for imaging. Due to the limitation of diffraction limit, the resolution is difficult to reach below 200nm. Electron microscope imaging technology uses electrons for imaging. Although the resolution is improved, the electron’s weak penetrating ability cannot penetrate cells to perform three-dimensional imaging inside the cells. At the same time, electron microscope imaging requires biological samples such as sectioning and dehydration. Processing, this undoubtedly destroys the internal structural information of the sample, and it is impossible to image complete water-containing cells.

X-rays have high penetrating power and can penetrate many materials that are opaque to visible light. Generally, super-hard X-rays with a wavelength of less than 0.1 angstroms, and hard X-rays with wavelengths in the range of 0.1-10 angstroms. It is called soft X-ray in the range of 10-100 angstroms. In recent years, soft X-rays have gradually been used in microscopic imaging technology. Compared with optical microscopy imaging and electron microscopy imaging technology, soft X-ray microscopy imaging technology has its unique advantages.

Soft X-ray microscopy imaging technology uses soft X-rays with wavelengths much smaller than the wavelength of visible light for imaging. The theoretical limit resolution can reach 1.2nm; at the same time, in some soft X-ray wavelength ranges, for example, the wavelength is 2.3nm～4.4 nm, energy 284eV～534eV, the absorption of photons by protein, lipids and other carbon and nitrogen compounds is one order of magnitude higher than that of water. The water environment in this waveband is transparent to biological samples and can provide clear cell images through natural contrast . Therefore, the samples used in the soft X-ray microscopic imaging technology usually do not need to be dehydrated, and do not need to be in a high vacuum state during observation, which can better show the natural state of the organism and give quantitative biological imaging information. Further through tomography and three-dimensional reconstruction technology, soft X-ray microscopic imaging technology can also obtain the three-dimensional fine structure inside the cell.

The soft X-ray microscopic imaging equipment uses a soft X-ray detector to obtain the structure projection data of the sample. Therefore, the soft X-ray detector is a key factor affecting the imaging effect of the equipment. Soft X-ray detectors can be divided into indirect detection type and direct detection type. Among them, the indirect detection type uses fluorescent screens, scintillation crystals, etc. to convert soft X-rays into visible light, and then detects through a photoelectric conversion device coupled with the scintillation crystals. The type has the advantages of high dynamic range, wide energy coverage, and long life of the CCD chip; the direct detection type uses the electron-hole pairs generated by the interaction of soft X-ray photons and the depletion layer in the detector chip to achieve detection, direct detection type It has the advantages of high spatial resolution and high sensitivity. For example, the common direct detection type soft X-ray band has a quantum efficiency of more than 80% and a pixel size of less than 15 microns.

Traditional soft X-ray detectors still have many problems. For example, traditional soft X-ray imaging equipment uses laser plasma as the light source, which not only has low radiation efficiency in the soft X-ray band, but also is accompanied by electromagnetic waves in a wide range from visible light to X-ray. Radiation interference, these visible light, ultraviolet and X-rays are difficult to remove by conventional optical path design, which will have a great impact on imaging; at the same time, because the light source intensity of soft X-ray microscopy imaging instruments is weak, traditional CCD detectors pass for a long time. Exposure is used to obtain imaging pictures. The soft X-ray generated by laser plasma is a short-duration periodic pulse. During this exposure time, the effective duration of soft X-rays accounts for a small proportion, causing a large number of The accumulation of noise reduces the imaging signal-to-noise ratio. Secondly, traditional soft X-ray detectors use direct detection type CCD for detection. The CCD chip is exposed, and it is easily stained by dust, splashes, etc., causing damage; therefore, additional filters are required, which are generally several hundred nanometers thick. It is made of metal film and uses metal mesh as support, which is easy to damage. Third, traditional soft X-ray imaging detectors cannot avoid direct radiation of higher energy X-rays on the CCD chip, which will not only cause noise interference, but also damage the chip when used for a long time. In addition, the equipment needs to be additionally equipped with optical devices such as apertures and light-shielding tubes, which is very complicated to use and cannot avoid light leakage.

Summary of the invention

The purpose of the present invention is to provide a soft X-ray microscopic imaging detector to solve at least one of the above-mentioned problems.

The soft X-ray microscopic imaging detector provided by the present invention includes a cavity, a fluorescence conversion screen, and a photoelectric conversion device. The cavity includes a first opening and a second opening. A reflecting device is provided to reflect light incident from the first opening to the second opening, and the direction in which the light propagates from the first opening to the reflecting device is the same as the direction from the reflecting device to the reflecting device. There is a first angle between the propagation directions of the second opening; the fluorescence conversion screen is disposed at the first opening; the photoelectric conversion device is disposed at the second opening, and the photoelectric conversion device, the The fluorescent conversion screen and the cavity form a closed space.

According to an embodiment of the present invention, the cavity includes a first cavity and a second cavity communicating with each other, the first opening is located on the first cavity, and the second opening is located on the second cavity. On the cavity.

According to an embodiment of the present invention, a second included angle is formed between the extending direction of the first cavity and the second cavity, and the second included angle is the same as the first included angle.

According to an embodiment of the present invention, the range of the first included angle is between 30° and 270°.

According to an embodiment of the present invention, the fluorescence conversion screen is a scintillation material, and the scintillation material includes yttrium lutetium silicate, sodium iodide, cesium iodide, bismuth germanate, cesium iodide, ceramic scintillator or plastic scintillator .

According to an embodiment of the present invention, the plane on which the fluorescence conversion screen is located is perpendicular to the propagation direction of the light, and the thickness of the fluorescence conversion screen is between 10 μm and 100 μm.

According to an embodiment of the present invention, a filter is provided on the surface of the fluorescence conversion screen.

According to an embodiment of the present invention, the visible light transmittance of the filter is less than 1%, and the soft X-ray transmittance of the filter is not less than 60%.

According to an embodiment of the present invention, the thickness of the filter is between 60 nm and 500 nm.

According to an embodiment of the present invention, the filter is aluminum, titanium, copper, iron, gold or nickel.

According to an embodiment of the present invention, the surface of the reflective device is provided with a reflective film with a light reflectivity of not less than 98%.

According to an embodiment of the present invention, the photoelectric conversion device is a silicon photomultiplier device.

According to an embodiment of the present invention, a first focusing lens is further provided in the cavity, and the first focusing lens is located between the reflective device and the photoelectric conversion device.

According to an embodiment of the present invention, a focusing lens group is arranged in the cavity, and the focusing lens group includes a first focusing lens and a second focusing lens which are arranged between the reflecting device and the photoelectric conversion device and are parallel to each other. lens.

According to an embodiment of the present invention, an adjusting aperture is provided at the first opening, the inside of the adjusting aperture is hollow and has a light transmission hole, and the light transmission hole is arranged opposite to the fluorescence conversion screen.

According to an embodiment of the present invention, a cooling member is provided at the second opening, and the cooling member transfers heat to the photoelectric conversion device.

The soft X-ray microscopic imaging detector provided by the present invention avoids direct radiation of soft X-rays to the photoelectric conversion device by designing the optical path to have a certain angle of deflection, which improves the detection effect and prolongs the service life of the photoelectric conversion device. Different optical path lengths can also be selected to meet the imaging requirements of different spatial resolutions. In the present invention, a filter is further provided on the fluorescence conversion screen, which can improve the conversion quality of soft X-rays, while ensuring that the filter is not easily damaged and avoiding light leakage. In addition, the invention has a simple structure, is easy to implement, and saves costs.

Description of the drawings

In order to explain the embodiments of the present invention or the technical solutions in the prior art more clearly, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only These are some embodiments described in the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative labor.

Fig. 1 is a schematic cross-sectional view of a soft X-ray microscopic imaging detector according to an embodiment of the present invention;

2 is a schematic cross-sectional view of a soft X-ray microscopic imaging detector according to another embodiment of the present invention;

3 is a schematic cross-sectional view of a soft X-ray microscopic imaging detector according to another embodiment of the present invention;

4 is a schematic cross-sectional view of a soft X-ray microscopic imaging detector according to another embodiment of the present invention;

5 is a schematic cross-sectional view of a soft X-ray microscopic imaging detector according to another embodiment of the present invention;

Fig. 6 is a schematic cross-sectional view of a soft X-ray microscopic imaging detector according to another embodiment of the present invention.

detailed description

The present invention will be further described below in conjunction with specific embodiments. It should be understood that the following examples are only used to illustrate the present invention and not to limit the scope of the present invention.

It should be noted that when a component/part is said to be "disposed on" another component/part, it can be directly disposed on another component/part or there may also be a central part/part. When a part/part is referred to as being "connected/connected" to another part/part, it can be directly connected/connected to another part/part or there may be a centered part/part at the same time. The term "connection/connection" as used herein may include electrical and/or mechanical physical connection/connection. The term "including/comprising" as used herein refers to the existence or addition of features, steps or components/parts, but does not exclude the existence or addition of one or more other features, steps or components/parts. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.

Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field of this application. The terminology used herein is only for the purpose of describing specific embodiments, and is not intended to limit the application.

In addition, in the description of this application, the terms "first", "second", etc. are only used for description purposes and to distinguish similar objects. There is no sequence between the two, nor can they be understood as indicating or implying relative importance. Sex. In addition, in the description of the present application, unless otherwise specified, "plurality" means two or more.

Fig. 1 is a schematic cross-sectional view of a soft X-ray microscopic imaging detector according to an embodiment of the present invention. It can be seen from Fig. 1 that the soft X-ray microscopic imaging detector provided by the present invention at least includes a cavity 10, a fluorescence conversion screen 20, The reflective device 30 and the photoelectric conversion device 40, wherein the cavity 10 includes a first cavity 11 and a second cavity 12 with a certain angle between the extension directions, the first cavity 11 and the second cavity 12 are in communication with each other and end The openings are respectively provided with openings, the opening of the first cavity 11 is provided with a fluorescence conversion screen 20, the opening of the second cavity 12 is provided with a photoelectric conversion device 40, and the reflection device 30 is provided inside the cavity 10 and located in the first cavity. At the junction of the body 11 and the second cavity 12, the position of the reflective device 30 is adjustable so that the light incident from the opening of the first cavity 11 can be refracted by the reflective device 30 and passed through the second cavity 12 to the photoelectric conversion On device 40.

More specifically, the cavity 10 can be made of materials that can shield soft X-rays, such as lead. The thickness of the cavity 10 can be selected according to relevant radiation protection standards. The first cavity 11 and the second cavity 12 of the cavity 10 are preferably The ground is made into a cylindrical shape. Those skilled in the art should understand that the cavity 10 can also be made into other shapes, such as a rectangular section tube or a variable section tube, etc., which will not be repeated here.

The fluorescence conversion screen 20 preferably adopts a material that can convert soft X-rays into visible light, such as scintillation crystals, including LYSO, NaI, BGO, CsI, etc.; the plane where the fluorescence conversion screen 20 is located and the extension direction of the first cavity 11 or light The propagation direction of the fluorescence conversion screen 20 is vertical, and the shape of the fluorescence conversion screen 20 preferably matches the shape of the cross section of the first cavity 11, so that the fluorescence conversion screen 20 can be fixed to the opening of the first cavity 11 through a conventional sealing process; The thickness of the conversion screen 20 is preferably between 10 μm and 100 μm, more preferably between 20 μm and 50 μm, so that the fluorescence conversion screen 20 can effectively convert incident soft X-rays into visible light.

Further, the soft X-ray microscopic imaging detector provided by the present invention may also include a filter 21, which is arranged on the fluorescence conversion screen 20, and preferably a coating process (such as a vacuum coating process, etc.) is used to plate the filter 21 On the outer surface of the fluorescence conversion screen 20; the filter 21 is preferably made of a material capable of filtering visible light and transmitting soft X-rays, such as aluminum, nickel, etc.; the thickness of the filter 21 is preferably between 60nm-500nm, and more It is preferably 100 nm, so that the filter 21 can effectively remove visible light components in the incident light and transmit most of the soft X-rays. It should be noted by those skilled in the art that the filter 21 should be selected so that the soft X-ray transmittance is not less than 60%, and the visible light transmittance is less than 1%. The specific transmittance measurement is commonly used by those skilled in the art. The technical means will not be repeated here. The filter 21 is formed by coating the surface of the fluorescence conversion screen 20, which can effectively use the fluorescence conversion screen 20 as a support and protection, so that the filter 21 is not easily damaged, and the service life is greatly improved. At the same time, the coating treatment can also make the filter The sheet 21 completely covers the fluorescent conversion screen 20 to avoid light leakage.

The reflective device 30 preferably adopts a mirror. The surface of the reflective device 30 can be provided with a reflective film, such as a high-reflection film made of multilayer film material. The thickness and period of the reflective film can be designed according to the peak wavelength of the fluorescence conversion screen 20. It keeps the visible light reflectivity above 98% and ensures the transmission efficiency of visible light. The reflective device 30 can change the propagation direction of the light path, so that a part of the soft X-rays passing through the fluorescence conversion screen 20 will not irradiate the photoelectric conversion device 40, avoiding noise interference and chip damage.

The photoelectric conversion device 40 receives the visible light converted by the fluorescence conversion screen 20 and reflected by the reflective device 30, and at the same time, converts these visible lights into electrical signals. The electrical signals are further transmitted to the computer for processing through the electronic system connected to the photoelectric conversion device 40. The signal processing belongs to the technical means commonly used by those skilled in the art, and will not be repeated here. The photoelectric conversion device 40 preferably adopts a silicon photomultiplier device (SiPM). The SiPM can adopt a digital design process with independent readout of each channel. While satisfying high sensitivity, the single pixel size is below 30 microns, and the performance is excellent. Those skilled in the art should note that the refresh frequency of the photoelectric conversion device 40 should match the frequency of the plasma light pulse used to generate soft X-rays, that is, the refresh frequency of the photoelectric conversion device 40 is not less than the frequency match of the plasma light pulse, preferably The two frequencies are the same in order to achieve the best detection efficiency.

In the embodiment of FIG. 1, the soft X-ray microscopic imaging detector provided by the present invention may further include a first focusing lens 50, which is installed in the cavity 10 and located in the reflecting device 30 and the photoelectric conversion device 40. At this time, the distance between the fluorescence conversion screen 20 and the reflective device 30 is L, the distance between the reflective device 30 and the center of the first focusing lens 50 is H, and the center of the first focusing lens 50 and the photoelectric conversion device The distance between 40 is S. By adjusting L, H, and S, visible light can be focused on the photoelectric conversion device 40, which is beneficial to improve the signal conversion effect of the photoelectric conversion device 40.

It is worth noting that after the installation of the cavity 10, the fluorescence conversion screen 20 and the photoelectric conversion device 40 is completed, the inside of the cavity 10 is airtight and opaque, which helps to improve the visible light converted by the fluorescence conversion screen 20 in the cavity. 10 internal transfer efficiency.

Fig. 2 is a schematic cross-sectional view of a soft X-ray microscopic imaging detector according to another embodiment of the present invention. Compared with the embodiment of Fig. 1, the same or similar parts of the embodiment of Fig. 2 are marked by adding 100 reference numerals. Mark, only the different parts compared with the previous embodiment are described here. In the embodiment of FIG. 2, when the soft X-rays generated by the soft X-ray source pass through the filter 121 and are incident on the fluorescence conversion screen 120, the fluorescence conversion screen 120 converts a part of the soft X-rays into visible light, and the visible light travels along the first cavity. The folding angle α of the body 111 that is refracted after being incident on the reflecting device 130 is 60 degrees. Those skilled in the art should note that the folding angle α of the optical path (that is, the light from the first cavity The total angle of refraction after 111 hits the reflective device 130) is preferably between 30° and 270°. Those skilled in the art should note that the essence of the cavity 100 is to change the optical path of visible light so that the photoelectric conversion device is no longer located in the direction of incidence of soft X-rays, thereby avoiding noise interference and chip damage, and improving the quality of signal conversion. Therefore, the specific shape of the cavity 100 or the shapes of the first cavity and the second cavity should not be a limitation of the present invention, and will not be repeated here.

Fig. 3 is a schematic cross-sectional view of a soft X-ray microscopic imaging detector according to another embodiment of the present invention. Compared with the embodiment of Fig. 1, the embodiment of Fig. 3 has the same or similar components by adding a reference number of 200. Notation, only the different parts compared with the embodiment in FIG. 1 are described here. In the embodiment of FIG. 3, the soft X-ray microscopic imaging detector may further include an adjusting aperture 260, the adjusting aperture 260 is disposed at the opening of the first cavity 211, the inside of the adjusting aperture 260 is a hollow structure and has a light-transmitting hole 261, the diameter of the light-transmitting hole 261 is smaller than the diameter of the inner hollow part of the adjusting aperture 260, and the light-transmitting hole 261 faces the filter 221 and the fluorescence conversion screen 220. The diameter of the light-transmitting hole 261 can be selected in different sizes according to needs. After the soft X-rays generated by the soft X-ray light source pass through the sample, adjusting the aperture 260 can effectively remove the stray light therein, so that the effective soft X-rays passing through the sample enter the filter 221 through the transparent hole 261 to prevent the interference of refracted light.

Fig. 4 is a schematic cross-sectional view of a soft X-ray microscopy imaging detector according to another embodiment of the present invention. Compared with the embodiment of Fig. 1, the embodiment of Fig. 4 has the same or similar components by adding reference numerals of 300. Notation, only the different parts compared with the embodiment in FIG. 1 are described here. In the embodiment of FIG. 4, the soft X-ray microscopy imaging detector may further include a cooling component 370, which is disposed at the opening of the second cavity 312, and the cooling component 370 and the photoelectric conversion device 340 can perform heat transfer to The photoelectric conversion device 340 is cooled. The cooling component 370 should have a refrigeration capacity as low as -60° C. to ensure sufficient capacity to reduce the thermal noise of the photoelectric conversion device 340.

Fig. 5 is a schematic cross-sectional view of a soft X-ray microscopic imaging detector according to another embodiment of the present invention. Compared with the embodiment of Fig. 4, the embodiment of Fig. 5 has the same or similar components by adding 100 reference numerals. Notation, only the different parts compared with the embodiment in FIG. 4 are described here. In the embodiment of FIG. 5, a second focusing lens 451 is additionally provided between the first focusing lens 450 and the photoelectric conversion device 440, and the first focusing lens 450 and the second focusing lens 451 form a focusing lens group. At this time, The distance between the fluorescence conversion screen 420 and the reflecting device 430 is L, the distance between the reflecting device 430 and the center of the focusing lens 450 is H, the distance between the center of the focusing lens 450 and the second focusing lens 451 is M, The distance between the two focusing lens 451 and the photoelectric conversion device 440 is N. By adjusting the sizes of L, H, M, and N, the visible light can be better focused on the photoelectric conversion device 440, which is beneficial to improve the signal of the photoelectric conversion device 440. Conversion effect.

Fig. 6 is a schematic cross-sectional view of a soft X-ray microscopy imaging detector according to another embodiment of the present invention. Compared with the embodiment of Fig. 2, the embodiment of Fig. 6 has the same or similar components by adding a reference numeral of 400 Indicated, only the different parts compared with the embodiment in FIG. 2 are described here. In the embodiment of FIG. 6, the cavity 510 includes a first cavity 511 and a second cavity 512 connected to each other. The first cavity 511 and the second cavity 512 are in communication with each other and the ends are respectively provided with openings. A first opening is provided at the end of a cavity 511, and a second opening is provided at the end of the second cavity 512. The center line of the extension direction of the first cavity 511 is indicated by the dotted line ₁₁ , and the second cavity 512 the extending direction of the center line l ₃ by a broken line indicates, the reflection device 530 is disposed in the first cavity 511 and second cavity 512 of the connector, the light reflected from the reflection device 530 enters first opening to a second opening, At this time, the direction of the light propagating from the first opening to the reflecting device _{coincides with l 1} , and the propagating direction of the light after reflection is indicated by the dashed line l ₂ , and the angle between the incident direction l ₁ and the reflecting direction l _{2 is called} a first angle [alpha], the extending direction of the first cavity 511 _{l. 1} extending direction of the second cavity 512 l as a second angle between the angle beta] _3, can be found, in the embodiment of FIG. 6 In an example, the size of the first included angle α and the second included angle β may be different. In order to facilitate observation, the plane where the photoelectric conversion device 540 and the focusing lens 550 at the second opening are located is approximately horizontal.

The invention is placed next to the sample when in use, and the fluorescence conversion screen is placed toward the sample. After the soft X-ray generated by the soft X-ray light source passes through the sample, it can be incident on the fluorescence conversion screen through the light-transmitting hole on the adjusting aperture, and the fluorescence conversion screen will The soft X-ray is converted into visible light, and the visible light is further reflected by the reflective device in the closed cavity and directed toward the photoelectric conversion device. The photoelectric conversion device converts the visible light into an electrical signal for output and further processing. The present invention can improve the conversion quality of soft X-rays by arranging the filter on the fluorescence conversion screen, while ensuring that the filter is not easily damaged, and avoid light leakage; the present invention avoids soft X-rays by designing the light path to have a certain angle of deflection. The rays are directly radiated to the photoelectric conversion device, which improves the detection effect and prolongs the service life of the photoelectric conversion device. The length of the optical path can also be adjusted to meet the imaging requirements of different spatial resolutions. In addition, the photoelectric conversion device adopts SiPM, which is beneficial to The electrical signal is fully digitally sampled and processed, which not only can better match the frequency of the plasma light pulse, but also saves costs while ensuring the detection effect.

The foregoing descriptions are only preferred embodiments of the present invention, and are not intended to limit the scope of the present invention. Various changes can be made to the foregoing embodiments of the present invention. That is to say, all simple and equivalent changes and modifications made in accordance with the claims of the present invention and the content of the description fall within the protection scope of the patent of the present invention. What is not described in detail in the present invention is conventional technical content.

Claims

A soft X-ray microscopic imaging detector, characterized in that the soft X-ray microscopic imaging detector comprises:

A cavity, the cavity includes a first opening and a second opening, the cavity is provided with a reflection device that reflects light incident from the first opening to the second opening, and the light is There is a first included angle between the direction in which the first opening propagates to the reflecting device and the direction in which the reflecting device propagates to the second opening;

A fluorescence conversion screen, the fluorescence conversion screen being arranged at the first opening; and

The photoelectric conversion device is arranged at the second opening, and the photoelectric conversion device, the fluorescence conversion screen and the cavity form a closed space.
The soft X-ray microscopic imaging detector according to claim 1, wherein the cavity comprises a first cavity and a second cavity that are connected to each other, and the first opening is located in the first cavity Above, the second opening is located on the second cavity.
The soft X-ray microscopic imaging detector according to claim 2, wherein a second included angle is formed between the extending direction of the first cavity and the second cavity, and the second included angle It is the same size as the first included angle.
The soft X-ray microscopic imaging detector according to claim 1, wherein the range of the first included angle is between 30° and 270°.
The soft X-ray microscopic imaging detector according to claim 1, wherein the fluorescence conversion screen is a scintillation material, and the scintillation material includes yttrium lutetium silicate, sodium iodide, cesium iodide, and bismuth germanate , Cesium iodide, ceramic scintillator or plastic scintillator.
The soft X-ray microscopic imaging detector according to claim 1, wherein the plane on which the fluorescence conversion screen is located is perpendicular to the propagation direction of the light, and the thickness of the fluorescence conversion screen is between 10 μm and 100 μm. between.
The soft X-ray microscopic imaging detector according to claim 1, characterized in that a filter is provided on the surface of the fluorescence conversion screen.
8. The soft X-ray microscopic imaging detector according to claim 7, wherein the visible light transmittance of the filter is less than 1%, and the soft X-ray transmittance of the filter is not less than 60%.
7. The soft X-ray microscopic imaging detector according to claim 7, wherein the thickness of the filter is between 60 nm and 500 nm.
The soft X-ray microscopic imaging detector according to claim 7, wherein the filter is aluminum, titanium, copper, iron, gold, or nickel.
The soft X-ray microscopic imaging detector according to claim 1 or 7, wherein the surface of the reflective device is provided with a reflective film with a light reflectivity of not less than 98%.
The soft X-ray microscopic imaging detector according to claim 1, wherein the photoelectric conversion device is a silicon photomultiplier device.
The soft X-ray microscopic imaging detector according to claim 1, wherein a first focusing lens is further provided in the cavity, and the first focusing lens is located between the reflecting device and the photoelectric conversion device. between.
The soft X-ray microscopy imaging detector according to claim 1, wherein a focusing lens group is arranged in the cavity, and the focusing lens group includes a group arranged between the reflecting device and the photoelectric conversion device The first focusing lens and the second focusing lens are parallel to each other.
The soft X-ray microscopic imaging detector according to claim 1, wherein an adjusting aperture is provided at the first opening, and the inside of the adjusting aperture is hollow and has a light transmission hole, and the light transmission hole is The relative settings of the fluorescence conversion screen are described.
The soft X-ray microscopic imaging detector according to claim 1, wherein a cooling component is provided at the second opening, and the cooling component transfers heat to the photoelectric conversion device.