CN208334244U - For the x-ray diAN_SNhragm of X-ray array combination refractor integrated package to be miniaturized - Google Patents
For the x-ray diAN_SNhragm of X-ray array combination refractor integrated package to be miniaturized Download PDFInfo
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- CN208334244U CN208334244U CN201820584450.3U CN201820584450U CN208334244U CN 208334244 U CN208334244 U CN 208334244U CN 201820584450 U CN201820584450 U CN 201820584450U CN 208334244 U CN208334244 U CN 208334244U
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- snhragm
- combination refractor
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- array combination
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Abstract
It is a kind of for the x-ray diAN_SNhragm of X-ray array combination refractor integrated package to be miniaturized, the x-ray diAN_SNhragm includes shaping unit and filtering part, and the shaping unit refers to the stray light injected except X-ray array combination refractor using x-ray diAN_SNhragm construction insulation and the structure tentatively collimated to light beam；The filtering part refers to the filter structure of euphotic zone and light blocking tape alternation arrangement in x-ray diAN_SNhragm structure, and X-ray light wave is split into multiple beamlets by filter structure.The utility model is applied to micromation X-ray array combination refractor integrated package, high microcell resolution ratio and high sensitivity can be achieved at the same time, and can carry out field assay.
Description
Technical field
The utility model relates to X-ray detections and imaging field, especially a kind of to be used for MICRO-BEAM XRF ANALYSIS system
X-ray array combination refractor integrated package x-ray diAN_SNhragm.
Background technique
X-ray fluorescence (XRF, X-Ray Fluorescence) analysis system can be under normal pressure to various forms (solid-state/liquid
State/powder etc.) sample carries out simple and quick, high-resolution and lossless element quantitative measurment is analyzed.And micro-beam X-ray fluorescence point
Analysis system (micro-XRF) is received significant attention because it is with higher microcell resolution ratio.
MICRO-BEAM XRF ANALYSIS system (micro-XRF) usually requires to be equipped with X-ray focusing device.X has been used to penetrate
The X-ray fluorescence analyzing system of line focus device, although microcell resolution ratio, which increases substantially, (usually can be improved an order of magnitude
More than), but counting rate can decline, and affect detectivity.Fluorescence Spectrometer of the prior art based on X-ray capillary tube device
It (patent No.: 201010180956.6), is focused using X-ray capillary tube device, microcell resolution ratio is typically only capable to reach several
Ten microns, not only microcell resolution ratio is not high enough, and because counting rate decline leads to detectivity also decrease to some degree；Together
When structure is complicated, bulky dimensions, cannot achieve portable.Inventor also proposed a kind of portable micro-beam X-ray fluorescence light before
Spectrometer (patent No.: 201310356270.1, be and the immediate prior art of the present invention), it is obtained with X-ray combination refractor
Microbeam must be detected, although microcell resolution ratio increases substantially, counting rate is low, affects detectivity.
X-ray combination refractor is integrated-type micro structural component, and numerical aperture is small, and the light that X-ray light pipe issues cannot
All be combined lens reception, reduces counting rate but also wastes X-ray light energy, also adds noise.If
New device architecture can be invented, the X-ray light as much as possible issued using X-ray light pipe can not only then increase considerably meter
Digit rate and then raising detectivity, while energy consumption can also be reduced, reduce noise.
Summary of the invention
In order to overcome existing Xray fluorescence spectrometer microcell resolution ratio high not enough, especially cause because counting rate is low
Detectivity it is not high enough, and structure is complicated, bulky dimensions, cannot achieve portable deficiency, and the utility model provides one kind
For the x-ray diAN_SNhragm of X-ray array combination refractor integrated package to be miniaturized, it is applied to miniaturization micro-beam X-ray
System of fluorescence analysis can be achieved at the same time high microcell resolution ratio and high sensitivity, and can carry out field assay.
The technical scheme adopted by the utility model to solve the technical problem is as follows:
It is a kind of for the x-ray diAN_SNhragm of X-ray array combination refractor integrated package, the x-ray diAN_SNhragm to be miniaturized
Including shaping unit and filtering part, the shaping unit, which refers to, injects X-ray array combination using x-ray diAN_SNhragm construction insulation
Stray light except refractor and the structure that light beam is tentatively collimated；The filtering part refers to x-ray diAN_SNhragm structure
The filter structure of middle euphotic zone and light blocking tape alternation arrangement, and X-ray light wave is split by multiple beamlets by filter structure.
Further, the number of the euphotic zone is that (M+1) is a, and combines folding in the X-ray array combination refractor
The number for penetrating lens is identical.
Further, the width of the euphotic zone and light blocking band is calculated by following equation respectively:
Zero level euphotic zone T0, positive and negative level-one euphotic zone, just identical as the numerical aperture size of X-ray combination refractor
Negative second level euphotic zone ..., and so on, euphotic zone width means are as follows:
θ is the light of the positive and negative level-one X-ray combination refractor in the optical axis and array of X-ray array combination refractor
Axle clamp angle；
Positive and negative level-one light blocking band, positive and negative second level light blocking band ..., and so on, light blocking bandwidth indicates are as follows:
GM=Ltan (0.5M θ) (2)
Wherein L represents the geometrical length of X-ray combination refractor, is expressed as L=Nl, and wherein l is refractive elements axis
To thickness.
Further, the x-ray diAN_SNhragm selection absorption characteristic meets any material of following equation, X-ray wave band material
The absorption coefficient of material:
Wherein NARepresent Avgadro constant, r0Electron radius is represented, λ represents wavelength, and A represents atomic mass, f2It represents
Atomic scattering factor, ρ represent electron density, and the element species in subscript i representation compound are i=1 when material is simple substance；
The material thickness t of the x-ray diAN_SNhragm meets expression formula e-β·t< < 1.
The beneficial effects of the utility model are mainly manifested in: 1, utilizing invented new device x-ray diAN_SNhragm, penetrate to X
Line beam carries out shaping and filtering, structure is simple, can integrated batch making 2, X-ray array combination refractor be based on refraction
Effect work, optical path of turning back is not needed when focusing to X-ray beam, thus be formed by detection device or apparatus structure it is compact,
Size is small, light-weight, is suitble to production portable instrument device, field assay may be implemented.
Detailed description of the invention
Fig. 1 is the knot of x-ray diAN_SNhragm in a kind of micromation X-ray array combination refractor integrated package of the utility model
Structure schematic diagram (only depicts the partial structurtes of M≤2), wherein T0For the width of zero level euphotic zone, T2The negative one that is positive grade euphotic zone
Width, t be x-ray diAN_SNhragm thickness, (a) front view, (b) top view.
Fig. 2 is a kind of structural schematic diagram that X-ray array combination refractor integrated package is miniaturized of the utility model,
In 1 represent x-ray diAN_SNhragm, 2 represent X-ray dioptric apparatus, 3 represent X-ray array combination refractor, 4 proxy component plummers.
Fig. 3 is X-ray dioptric apparatus in a kind of micromation X-ray array combination refractor integrated package of the utility model
Structural schematic diagram (only depicts the partial structurtes of M≤2), wherein TZFor the width in non-refractive power area, tZ0For the material in non-refractive power area
Thickness, tZMFor the material thickness in refractive power area, (a) front view, (b) top view.
Fig. 4 is X-ray array combination in a kind of micromation X-ray array combination refractor integrated package of the utility model
The structural schematic diagram (only depicting the partial structurtes of M≤2) of refractor, wherein T0Bore, l for refractive elements are that refraction is single
The axial width size of member.
Specific embodiment
The utility model is further described with reference to the accompanying drawing.
Referring to Fig.1~Fig. 4, it is a kind of for the x-ray diAN_SNhragm of X-ray array combination refractor integrated package to be miniaturized,
The x-ray diAN_SNhragm includes shaping unit and filtering part, and the shaping unit refers to be injected using x-ray diAN_SNhragm construction insulation
Stray light except X-ray array combination refractor and the structure that light beam is tentatively collimated；The filtering part refers to X
The filter structure of euphotic zone and light blocking tape alternation arrangement in ray mechanism of diaphragm, and divided X-ray light wave by filter structure
At multiple beamlets.
Further, the number of the euphotic zone is that (M+1) is a, and combines folding in the X-ray array combination refractor
The number for penetrating lens is identical.
Further, the width of the euphotic zone and light blocking band is calculated by following equation respectively:
Zero level euphotic zone T0, positive and negative level-one euphotic zone, just identical as the numerical aperture size of X-ray combination refractor
Negative second level euphotic zone ..., and so on, euphotic zone width means are as follows:
θ is the light of the positive and negative level-one X-ray combination refractor in the optical axis and array of X-ray array combination refractor
Axle clamp angle；
Positive and negative level-one light blocking band, positive and negative second level light blocking band ..., and so on, light blocking bandwidth indicates are as follows:
GM=Ltan (0.5M θ) (2)
Wherein L represents the geometrical length of X-ray combination refractor, is expressed as L=Nl, and wherein l is refractive elements axis
To thickness.
Further, the x-ray diAN_SNhragm selection absorption characteristic meets any material of following equation, X-ray wave band material
The absorption coefficient of material:
Wherein NARepresent Avgadro constant, r0Electron radius is represented, λ represents wavelength, and A represents atomic mass, f2It represents
Atomic scattering factor, ρ represent electron density, and the element species in subscript i representation compound are i=1 when material is simple substance；
The material thickness t of the x-ray diAN_SNhragm meets expression formula e-β·t< < 1.
The x-ray diAN_SNhragm of the utility model is applied to micromation X-ray array combination refractor integrated package, it is described
Integrated package includes x-ray diAN_SNhragm 1, X-ray dioptric apparatus 2, X-ray array combination lens 3 and component plummer 4, X-ray beam
It is radiated on the X-ray array combination refractor integrated package, is received first by x-ray diAN_SNhragm, and carry out whole for the first time
Shape and filtering, the first time shaping refers to according to the numerical aperture of the X-ray array combination refractor, penetrates to incident X
Linear light wave carries out shaping；The filtering, which refers to, divides incident X-rays light wave to form multiple beamlets, the number and X of beamlet
Combination refractor number in ray array combination refractor is identical.The X-ray light wave for having split into multiple beamlets connects
Enter to inject the X-ray dioptric apparatus, through X-ray dioptric apparatus carry out second of shaping of light beam, second of shaping of the light beam
Guarantee the multiple X-ray beamlets being emitted from X-ray dioptric apparatus, corresponding X is penetrated in incidence array in a manner of class directional light
Line combines refractor.The X-ray array combination refractor is focused incident multiple X-ray beamlets respectively,
The array structure of the X-ray array combination refractor is laid out, and guarantees that each beamlet is formed by focusing spot same
One position, and be located on optical axis.The component plummer is for carrying the x-ray diAN_SNhragm, X-ray dioptric apparatus, X-ray array
Combine refractor, and the x-ray diAN_SNhragm, X-ray dioptric apparatus, X-ray array combination refractor relative position and
Optical axis is fixed after adjusting.
It further, include (M+1) a X-ray combination refractor in the X-ray array combination refractor, it is described
M is positive integer and is even number.The X-ray array combination refractor is axisymmetricly distributed along its optical axis, the X-ray array
Combine the optical axis coincidence of zero level X-ray combination refractor in the optical axis and array of refractor, the X-ray array combination folding
The optical axis included angle for penetrating the positive and negative level-one X-ray combination refractor in the optical axis and array of lens is θ, the X-ray array group
It is 2 θ that the optical axis for closing refractor, which combines the optical axis included angle of refractor with the positive and negative secondary X-ray in array, and so on.
Further, (M+1) a layout structure for combining refractor in the X-ray array combination refractor, makes
Must own the focal spot of (M+1) a X-ray combination refractor focusing in same position, and be located on optical axis.
Further, the structure and performance parameters of described (M+1) a X-ray combination refractor are obtained according to following equation
Out:
The optical constant of X-ray wave band: n=1- δ+i β (4)
The focal length of X-ray combination refractor:
The focal spot size of X-ray combination refractor:
The numerical aperture of X-ray combination refractor:
Wherein n represents optical constant, and δ represents the refraction of X-ray band material, and β represents the absorption of X-ray band material, N
The number for representing refractive elements in X-ray combination refractor combines refractor parabolic by taking parabolic shape refractive elements as an example
The radius of curvature of vertex of surface is R, and paraboloidal opening size is R0, f represents the focal length of X-ray combination refractor, and λ represents wave
Long, μ represents the linear absorption coefficient of X-ray,
Further, the X-ray dioptric apparatus is realized incident with the X-ray array combination refractor close to placement
Second of shaping of X-ray beam, second of shaping refer to that X-ray dioptric apparatus can be to X-ray array combination refractor
In positive and negative level-one compound lens refractive power θ angle, to the positive and negative second level compound lens refractive power in X-ray array combination refractor
2 θ angles, and so on, the final class for realizing combination refractor single to each in X-ray array combination refractor is flat
Row light is incident.
Any simple substance or compound-material that refracting characteristic meets following equation may be selected in the X-ray dioptric apparatus,
The refraction coefficient of X-ray band material:
Wherein, NARepresent Avgadro constant, r0Electron radius is represented, λ represents wavelength, and A represents atomic mass, subscript i
Indicate the element species in compound, subscript j is positive integer, and ρ represents electron density, and subscript i indicates the Element Species in compound
Class, the i=1 when material is simple substance, v represent atom number, and subscript i indicates the element species in compound, and subscript j is positive whole
Number, Z represent atomic number, and subscript i indicates the element species in compound.
The non-refractive power area material thickness t of the X-ray dioptric apparatusZ0It indicates, to reduce X-ray absorption loss, should make
Must be thin as far as possible, it is determined by manufacture craft.The non-refractive power sector width size T of the X-ray dioptric apparatusZ=T0+2G2, T0It is saturating for zero level
The width of light belt；tZ0For the material thickness in non-refractive power area, the material thickness t in refractive power areaZMIt is calculated by following equation:
tZM=tZ0+TM·tan(0.5M·θ) (9)。
Wherein, G2For the width of positive and negative second level light blocking band, it is calculated when taking M=2 by above-mentioned formula (2)；TMFor euphotic zone
Width, be calculated by above-mentioned formula (1).
Claims (4)
1. a kind of for the x-ray diAN_SNhragm of X-ray array combination refractor integrated package to be miniaturized, it is characterised in that: the X
Ray diaphragm includes shaping unit and filtering part, and the shaping unit, which refers to, injects X-ray using x-ray diAN_SNhragm construction insulation
Stray light except array combination refractor and the structure that light beam is tentatively collimated；The filtering part refers to X-ray
The filter structure of euphotic zone and light blocking tape alternation arrangement in mechanism of diaphragm, and by filter structure split into X-ray light wave more
A beamlet.
2. it is as described in claim 1 for the x-ray diAN_SNhragm of X-ray array combination refractor integrated package to be miniaturized,
Be characterized in that: the number of the euphotic zone is that (M+1) is a, and combines refractor in the X-ray array combination refractor
Number it is identical.
3. it is as claimed in claim 2 for the x-ray diAN_SNhragm of X-ray array combination refractor integrated package to be miniaturized,
Be characterized in that: the width of the euphotic zone and light blocking band is calculated by following equation respectively:
Zero level euphotic zone T0, positive and negative level-one euphotic zone, positive and negative second level identical as the numerical aperture size of X-ray combination refractor
Euphotic zone ..., and so on, euphotic zone width means are as follows:
θ is the optical axis folder of the positive and negative level-one X-ray combination refractor in the optical axis and array of X-ray array combination refractor
Angle；
Positive and negative level-one light blocking band, positive and negative second level light blocking band ..., and so on, light blocking bandwidth indicates are as follows:
GM=Ltan (0.5M θ) (2)
Wherein L represents the geometrical length of X-ray combination refractor, is expressed as L=Nl, and wherein l is that refractive elements are axial thick
Size is spent, N represents the number of refractive elements in X-ray combination refractor.
4. the x-ray diAN_SNhragm of micromation X-ray array combination refractor integrated package as claimed in claim 1 or 2, special
Sign is that the x-ray diAN_SNhragm selection absorption characteristic meets any material of following equation,
The absorption coefficient of X-ray band material:
Wherein NARepresent Avgadro constant, r0Electron radius is represented, λ represents wavelength, and A represents atomic mass, f2Represent atom
Dispersion factor, ρ represent electron density, and the element species in subscript i representation compound are i=1 when material is simple substance；
The material thickness t of the x-ray diAN_SNhragm meets expression formula eβ·t< < 1.
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| CN108398448A (en) * | 2018-04-23 | 2018-08-14 | 浙江工业大学 | X-ray diAN_SNhragm for X-ray array combination refractor integrated package to be miniaturized |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108398448A (en) * | 2018-04-23 | 2018-08-14 | 浙江工业大学 | X-ray diAN_SNhragm for X-ray array combination refractor integrated package to be miniaturized |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
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| AV01 | Patent right actively abandoned |
Granted publication date: 20190104 Effective date of abandoning: 20200630 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20190104 Effective date of abandoning: 20200630 |