CN108318516A - A kind of micromation X-ray array combination refractor integrated package - Google Patents
A kind of micromation X-ray array combination refractor integrated package Download PDFInfo
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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Abstract
A kind of micromation X-ray array combination refractor integrated package, it include the x-ray diAN_SNhragm for carrying out X-ray beam first time shaping and filtering, it is shaped as the X-ray dioptric apparatus of class directional light for the second time for carrying out X-ray beam, X-ray array combination lens for being focused respectively to incident multiple X-ray beamlets and component plummer, the component plummer is for carrying the x-ray diAN_SNhragm, X-ray dioptric apparatus and X-ray array combination refractor, the x-ray diAN_SNhragm, X-ray dioptric apparatus and X-ray array combination refractor are sequentially located in same optical axis, the array structure of the X-ray array combination refractor is laid out, ensure that each beamlet is formed by focusing spot in same position and on optical axis.High microcell resolution ratio and high sensitivity can be achieved at the same time in the present invention, and can carry out field assay.
Description
Technical field
It is especially a kind of for the new of MICRO-BEAM XRF ANALYSIS system the present invention relates to X-ray detection and imaging field
Type X-ray array combination refractor integrated package.
Background technology
X-ray fluorescence (XRF, X-Ray Fluorescence) analysis system can be under normal pressure to various forms (solid-state/liquid
State/powder etc.) sample carries out simple and quick, high-resolution and lossless element quantitative measurment is analyzed.And micro-beam X-ray fluorescence point
Analysis system (micro-XRF) is received significant attention because it is with higher microcell resolution ratio.
MICRO-BEAM XRF ANALYSIS system (micro-XRF) is usually required for being equipped with X-ray focusing device.X has been used to penetrate
The X-ray fluorescence analyzing system of line focus device, although microcell resolution ratio, which increases substantially, (can usually improve an order of magnitude
More than), but counting rate can decline, and affect detectivity.Fluorescence Spectrometer of the prior art based on X-ray capillary tube device
(the patent No.：201010180956.6) it, is focused using X-ray capillary tube device, microcell resolution ratio is typically only capable to reach several
Ten microns, not only microcell resolution ratio is not high enough, and because counting rate decline leads to detectivity also decrease to some degree；Together
When complicated, bulky dimensions, cannot achieve portable.Inventor also proposed a kind of portable micro-beam X-ray fluorescence light before
Spectrometer (the patent No.：201310356270.1 it is and the immediate prior art of the present invention), it is obtained with X-ray combination refractor
Microbeam must be detected, although microcell resolution ratio increases substantially, counting rate is low, affects detectivity.
X-ray combination refractor is integrated-type micro structural component, and numerical aperture is small, and the light that X-ray light pipe is sent out cannot
The lens reception that is all combined also adds noise not only so that counting rate reduces but also wastes X-ray light energy.If
New device architecture can be invented, the X-ray light as much as possible sent out using X-ray light pipe can not only then increase considerably meter
Digit rate and then raising detectivity, while energy consumption can also be reduced, reduce noise.
Invention content
In order to overcome existing Xray fluorescence spectrometer microcell resolution ratio high not enough, especially cause because counting rate is low
Detectivity is not high enough and complicated, bulky dimensions, cannot achieve portable deficiency, the present invention provides a kind of miniature
Change X-ray array combination refractor integrated package, is applied to miniaturization MICRO-BEAM XRF ANALYSIS system, it can be simultaneously
It realizes high microcell resolution ratio and high sensitivity, and field assay can be carried out.
The technical solution adopted by the present invention to solve the technical problems is：
A kind of micromation X-ray array combination refractor integrated package, including be used to carry out X-ray beam for the first time it is whole
Shape and the x-ray diAN_SNhragm of filtering, the X-ray dioptric apparatus for being shaped as class directional light for the second time for carrying out X-ray beam, for pair
The X-ray array combination lens and component plummer that incident multiple X-ray beamlets are focused respectively, the component carrying
Platform is penetrated for carrying the x-ray diAN_SNhragm, X-ray dioptric apparatus and X-ray array combination refractor, the x-ray diAN_SNhragm, X
Line dioptric apparatus and X-ray array combination refractor are sequentially located in same optical axis, the X-ray array combination refractor
Array structure is laid out, and ensures that each beamlet is formed by focusing spot in same position and on optical axis.
Further, in the x-ray diAN_SNhragm, first time shaping and filtering are received and carry out, the first time shaping refers to
According to the numerical aperture of the X-ray array combination refractor, shaping is carried out to incident X-rays light wave；The filtering refers to
Incident X-rays light wave is divided to form multiple beamlets, number and the combination in X-ray array combination refractor of beamlet
Refractor number is identical.
Further, it in the X-ray dioptric apparatus, receives the X-ray light wave for having split into multiple beamlets and carries out light
Second of shaping of beam, second of shaping of the light beam ensure the multiple X-ray beamlets being emitted from X-ray dioptric apparatus, with
Corresponding X-ray combination refractor in the mode incidence array of class directional light.
Further, the X-ray array combination refractor includes (M+1) a X-ray combination refractor, the M
For positive integer and it is even number.The X-ray array combination refractor is axisymmetricly distributed along its optical axis, the X-ray array
Combine the optical axis coincidence of zero level X-ray combination refractor in the optical axis and array of refractor, the X-ray array combination folding
The optical axis included angle for penetrating the positive and negative level-one X-ray combination refractor in the optical axis and array of lens is θ, the X-ray array group
The optical axis for closing refractor combines the optical axis included angle of refractor with the positive and negative secondary X-ray in array as 2 θ, and so on；
The layout structure of (M+1) a combination refractor in the X-ray array combination refractor so that all (M+
1) focal spot that a X-ray combination refractor focuses is in same position, and is located on optical axis.
The structure and performance parameters of (M+1) a X-ray combination refractor are obtained according to following equation：
The optical constant of X-ray wave band：N=1- δ+i β (1)
The focal length of X-ray combination refractor：
The focal spot size of X-ray combination refractor：
The numerical aperture of X-ray combination refractor：
Wherein n represents optical constant, and δ represents the refraction of X-ray band material, and β represents the absorption of X-ray band material, N
The number for representing refractive elements in X-ray combination refractor combines refractor parabolic by taking parabolic shape refractive elements as an example
The radius of curvature of vertex of surface is R, and paraboloidal opening size is R0, f represents the focal length of X-ray combination refractor, and λ represents wave
Long, μ represents the linear absorption coefficient of X-ray,
The X-ray dioptric apparatus, close to placement, realizes incident X-ray beam with the X-ray array combination refractor
Second of shaping, second of shaping refers to that X-ray dioptric apparatus can be to positive and negative in X-ray array combination refractor
Level-one compound lens refractive power θ angles, to the positive and negative 2 θ angles of two level compound lens refractive power in X-ray array combination refractor,
The rest may be inferred, final to realize that the class directional light of combination refractor single to each in X-ray array combination refractor enters
It penetrates.
The structure size of the x-ray diAN_SNhragm, according to the structure size of the X-ray array combination refractor determine,
Realize that the first time shaping and filtering of incident X-ray beam, the first time shaping of the light beam refer to utilizing x-ray diAN_SNhragm knot
The structure barrier stray light injected except X-ray array combination refractor and the function that light beam is tentatively collimated；The filter
Wave refers to the filter structure of euphotic zone and light blocking tape alternation arrangement in x-ray diAN_SNhragm structure, and by filter structure by X-ray light
Wavelength-division is cleaved into multiple beamlets.
The number of the euphotic zone is that (M+1) is a, and refractor is combined with the X-ray array combination refractor
Number is identical, and the width of the euphotic zone and light blocking band is calculated by following equation respectively：
Zero level euphotic zone T0, positive and negative level-one euphotic zone, just identical as the numerical aperture size of X-ray combination refractor
Negative two level euphotic zone ..., and so on, euphotic zone width means are：
Positive and negative level-one light blocking band, positive and negative two level light blocking band ..., and so on, light blocking bandwidth is expressed as：
GM=Ltan (0.5M θ) (6)
Wherein L represents the geometrical length of X-ray combination refractor, is expressed as L=Nl, and wherein l is refractive elements axis
To thickness.
The x-ray diAN_SNhragm selection absorption characteristic meets any material of following equation, the absorption system of X-ray band material
Number：
Wherein NARepresent Avgadro constant, r0Electron radius is represented, A represents atomic mass, f2Represent atomic scattering because
Son, ρ represent electron density, and the element species in i representation compounds are i=1 when material is simple substance；
The material thickness t of the x-ray diAN_SNhragm meets expression formula e-β·t<<1。
The X-ray dioptric apparatus selective refraction characteristic meets any simple substance or compound-material of following equation,
The refraction coefficient of X-ray band material：
Wherein NARepresent Avgadro constant, r0Electron radius is represented, λ represents wavelength, and A represents atomic mass, subscript i
Indicate that the element species in compound, subscript j are that positive integer ρ represents electron density, subscript i indicates the Element Species in compound
Class, the i=1 when material is simple substance, v represent atom number, and subscript i indicates that the element species in compound, subscript j are just whole
Number, Z represent atomic number, and subscript i indicates the element species in compound.
The non-refractive power area material thickness t of the X-ray dioptric apparatusZ0It indicates, the non-refractive power area of the X-ray dioptric apparatus is wide
Spend size TZ=T0+2G2, the material thickness t in refractive power areaZMIt is calculated by following equation：
tZM=tZ0+TM·tan(0.5M·θ) (9)。
Wherein, G2For the width of positive and negative two level light blocking band, it is calculated when taking M=2 by above-mentioned formula (6)；TMFor euphotic zone
Width, be calculated by above-mentioned formula (5).
The present invention technical concept be：X-ray combination refractor is a kind of novel X-ray focusing based on refraction effect
Device, theoretical focused spot size is up to nanometer scale, and actual test gained focused spot size is usually in several microns, profit
High quality detection microbeam can be obtained by being focused to X-ray beam with X-ray combination refractor, improve system of fluorescence analysis
Microcell resolution ratio.
It is proposed novel micromation X-ray array combination refractor integrated package, each X-ray combination in array
Refractor focuses respectively, by the structure design of X-ray array combination refractor, coordinates X-ray dioptric apparatus and X-ray light
Door screen can make (M+1) in X-ray array combination refractor a combination refractor focus on identical focal spot position,
The intensity of focal spot is effectively improved, therefore increases substantially the counting rate of detection, that is, improves the detectivity of system of fluorescence analysis.
In addition, micromation X-ray array combination refractor integrated package has, size is small, manufacture craft is simple, robust
Property it is good, can batch machining the advantages of, simultaneously because it is based on refraction effect, therefore need not turn back when being focused to X-ray beam
Light path, therefore it is formed by that system of fluorescence analysis is compact-sized, size is small, light-weight, it is appropriate for portable field assay.
Beneficial effects of the present invention are mainly manifested in：1, invention micromation X-ray array combination refractor integrated package
As the focus device of Xray fluorescence spectrometer, while higher microcell resolution ratio and detectivity are realized, wherein higher
Microcell resolution ratio is realized by the single X-ray combination refractor in array, higher detectivity is then by array combination
The Overlay that refractor focuses is realized；2, invented new device x-ray diAN_SNhragm and X-ray dioptric apparatus are utilized, to X
Ray beam carries out shaping and filtering, simple in structure, can integrated batch making；3, X-ray array combination refractor is based on
Refraction effect works, and need not turn back light path when being focused to X-ray beam, therefore is formed by detection device or apparatus structure is tight
Gather, size is small, light-weight, be suitble to make portable instrument device, field assay may be implemented.
Description of the drawings
Fig. 1 is a kind of structural schematic diagram of micromation X-ray array combination refractor integrated package of the present invention, wherein 1
X-ray diAN_SNhragm is represented, 2 X-ray dioptric apparatus is represented, 3 represents X-ray array combination refractor, 4 proxy component plummers.
Fig. 2 is that the structure of x-ray diAN_SNhragm in a kind of micromation X-ray array combination refractor integrated package of the present invention is shown
It is intended to (partial structurtes for only depicting M≤2), wherein T0For the width of zero level euphotic zone, T2For the width of positive and negative level-one euphotic zone
Degree, t are the thickness of x-ray diAN_SNhragm, (a) front view, (b) vertical view.
Fig. 3 is the structure of X-ray dioptric apparatus in a kind of micromation X-ray array combination refractor integrated package of the present invention
Schematic diagram (partial structurtes for only depicting M≤2), wherein TZFor the width in non-refractive power area, tZ0For non-refractive power area material thickness,
tZMFor the material thickness in refractive power area, (a) front view, (b) vertical view.
Fig. 4 is that X-ray array combination reflects in a kind of micromation X-ray array combination refractor integrated package of the present invention
The structural schematic diagram (partial structurtes for only depicting M≤2) of lens, wherein T0It is refractive elements for bore, the l of refractive elements
Axial width size.
Specific implementation mode
The invention will be further described below in conjunction with the accompanying drawings.
Referring to Fig.1~Fig. 4, a kind of micromation X-ray array combination refractor integrated package, including x-ray diAN_SNhragm 1, X
Ray dioptric apparatus 2, X-ray array combination lens 3 and component plummer 4, X-ray beam are radiated at the X-ray array combination
It on refractor integrated package, is received first by x-ray diAN_SNhragm, and carries out first time shaping and filtering, the first time shaping
Refer to the numerical aperture according to the X-ray array combination refractor, shaping is carried out to incident X-rays light wave；The filtering
Refer to dividing incident X-rays light wave to form multiple beamlets, in the number and X-ray array combination refractor of beamlet
It is identical to combine refractor number.The X-ray light wave for having split into multiple beamlets then enters to inject the X-ray dioptric apparatus,
Second of shaping of light beam is carried out through X-ray dioptric apparatus, second of shaping of the light beam ensures to be emitted from X-ray dioptric apparatus more
A X-ray beamlet, the corresponding X-ray combination refractor in incidence array in a manner of class directional light.The X-ray battle array
Row combination refractor is focused incident multiple X-ray beamlets respectively, the X-ray array combination refractor
Array structure is laid out, and ensures that each beamlet is formed by focusing spot in same position, and on optical axis.The component
Plummer is used to carry the x-ray diAN_SNhragm, X-ray dioptric apparatus, X-ray array combination refractor, and in the X-ray light
Door screen, X-ray dioptric apparatus, the relative position of X-ray array combination refractor and optical axis are fixed after adjusting.
Further, include (M+1) a X-ray combination refractor in the X-ray array combination refractor, it is described
M is positive integer and is even number.The X-ray array combination refractor is axisymmetricly distributed along its optical axis, the X-ray array
Combine the optical axis coincidence of zero level X-ray combination refractor in the optical axis and array of refractor, the X-ray array combination folding
The optical axis included angle for penetrating the positive and negative level-one X-ray combination refractor in the optical axis and array of lens is θ, the X-ray array group
The optical axis for closing refractor combines the optical axis included angle of refractor with the positive and negative secondary X-ray in array as 2 θ, and so on.
Further, (M+1) a layout structure for combining refractor in the X-ray array combination refractor, makes
Must own the focal spot of (M+1) a X-ray combination refractor focusing in same position, and on optical axis.
Further, the structure and performance parameters of described (M+1) a X-ray combination refractor are obtained according to following equation
Go out：
The optical constant of X-ray wave band：N=1- δ+i β (1)
The focal length of X-ray combination refractor：
The focal spot size of X-ray combination refractor：
The numerical aperture of X-ray combination refractor：
Wherein n represents optical constant, and δ represents the refraction of X-ray band material, and β represents the absorption of X-ray band material, N
The number for representing refractive elements in X-ray combination refractor combines refractor parabolic by taking parabolic shape refractive elements as an example
The radius of curvature of vertex of surface is R, and paraboloidal opening size is R0, f represents the focal length of X-ray combination refractor, and λ represents wave
Long, μ represents the linear absorption coefficient of X-ray,
Further, the X-ray dioptric apparatus is realized incident with the X-ray array combination refractor close to placement
Second of shaping of X-ray beam, second of shaping refer to that X-ray dioptric apparatus can be to X-ray array combination refractor
In positive and negative level-one compound lens refractive power θ angles, to the positive and negative two level compound lens refractive power in X-ray array combination refractor
2 θ angles, and so on, it is final to realize that the class of combination refractor single to each in X-ray array combination refractor is flat
Row light is incident.
Further, the structure size of the x-ray diAN_SNhragm, according to the structure of the X-ray array combination refractor
Size determines, realizes the first time shaping and filtering of incident X-ray beam, the first time shaping of the light beam, refers to being penetrated using X
The stray light that linear light door screen construction insulation is injected except X-ray array combination refractor and the work(that light beam is tentatively collimated
Energy；The filtering refers to the filter structure of euphotic zone and light blocking tape alternation arrangement in x-ray diAN_SNhragm structure, and passes through filter structure
X-ray light wave is split into multiple beamlets.
The number of the euphotic zone is that (M+1) is a, and refractor is combined with the X-ray array combination refractor
Number is identical.The width of the euphotic zone and light blocking band is calculated by following equation respectively：
Zero level euphotic zone T0, positive and negative level-one euphotic zone, just identical as the numerical aperture size of X-ray combination refractor
Negative two level euphotic zone ..., and so on, euphotic zone width means are：
Positive and negative level-one light blocking band, positive and negative two level light blocking band ..., and so on, light blocking bandwidth is expressed as：
GM=Ltan (0.5M θ) (6)
Wherein L represents the geometrical length of X-ray combination refractor, is expressed as L=Nl, and wherein l is refractive elements axis
To thickness.
Any material that absorption characteristic meets following equation may be selected in the x-ray diAN_SNhragm, generally selects the metals such as copper, lead
Material,
The absorption coefficient of X-ray band material：
Wherein NARepresent Avgadro constant, r0Electron radius is represented, A represents atomic mass, f2Represent atomic scattering because
Son, ρ represent electron density, and the element species in i representation compounds are i=1 when material is simple substance.
The material thickness t of the x-ray diAN_SNhragm meets expression formula e-β·t<<1。
Any simple substance or compound-material that refracting characteristic meets following equation may be selected in the X-ray dioptric apparatus,
The refraction coefficient of X-ray band material：
Wherein, NARepresent Avgadro constant, r0Electron radius is represented, λ represents wavelength, and A represents atomic mass, subscript i
Indicate that the element species in compound, subscript j are positive integer, ρ represents electron density, and subscript i indicates the Element Species in compound
Class, the i=1 when material is simple substance, v represent atom number, and subscript i indicates that the element species in compound, subscript j are just whole
Number, Z represent atomic number, and subscript i indicates the element species in compound.
The non-refractive power area material thickness t of the X-ray dioptric apparatusZ0It indicates, to reduce X-ray absorption loss, should make
Must be thin as possible, it is determined by manufacture craft.The non-refractive power sector width size T of the X-ray dioptric apparatusZ=T0+2G2, T0It is saturating for zero level
The width of light belt；tZ0For the material thickness in non-refractive power area, the material thickness t in refractive power areaZMIt is calculated by following equation：
tZM=tZ0+TM·tan(0.5M·θ) (9)。
Wherein, G2For the width of positive and negative two level light blocking band, it is calculated when taking M=2 by above-mentioned formula (6)；TMFor euphotic zone
Width, be calculated by above-mentioned formula (5).
Claims (10)
1. a kind of micromation X-ray array combination refractor integrated package, which is characterized in that the integrated package includes being used for
X-ray beam first time shaping is carried out with the x-ray diAN_SNhragm of filtering, to be shaped as class for the second time parallel for carrying out X-ray beam
The X-ray dioptric apparatus of light, the X-ray array combination lens for being focused respectively to incident multiple X-ray beamlets and
Component plummer, the component plummer is for carrying the x-ray diAN_SNhragm, X-ray dioptric apparatus and the refraction of X-ray array combination
Lens, the x-ray diAN_SNhragm, X-ray dioptric apparatus and X-ray array combination refractor are sequentially located in same optical axis, the X
The array structure of ray array combination refractor is laid out, and ensures that each beamlet is formed by focusing spot in same position
And on optical axis.
2. micromation X-ray array combination refractor integrated package as described in claim 1, which is characterized in that the X is penetrated
In linear light door screen, first time shaping and filtering are received and carry out, the first time shaping refers to being rolled over according to the X-ray array combination
The numerical aperture for penetrating lens carries out shaping to incident X-rays light wave；The filtering refers to dividing incident X-rays light wave to be formed
The number of multiple beamlets, beamlet is identical as the combination refractor number in X-ray array combination refractor.
3. micromation X-ray array combination refractor integrated package as claimed in claim 1 or 2, which is characterized in that described
In X-ray dioptric apparatus, receives the X-ray light wave for having split into multiple beamlets and carry out second of shaping of light beam, the light beam
Second of shaping ensure multiple X-ray beamlets for being emitted from X-ray dioptric apparatus, the incidence array in a manner of class directional light
In corresponding X-ray combination refractor.
4. micromation X-ray array combination refractor integrated package as claimed in claim 1 or 2, which is characterized in that described
X-ray array combination refractor includes (M+1) a X-ray combination refractor, and the M is positive integer and is even number.The X
Ray array combination refractor is axisymmetricly distributed along its optical axis, the optical axis and battle array of the X-ray array combination refractor
The optical axis coincidence of zero level X-ray combination refractor in row, in the optical axis and array of the X-ray array combination refractor
The optical axis included angle of positive and negative level-one X-ray combination refractor is θ, the optical axis and array of the X-ray array combination refractor
In positive and negative secondary X-ray combination refractor optical axis included angle be 2 θ, and so on；
The layout structure of (M+1) a combination refractor in the X-ray array combination refractor so that all (M+1) a X
Ray combines the focal spot of refractor focusing in same position, and on optical axis.
5. micromation X-ray array combination refractor integrated package as claimed in claim 4, which is characterized in that (the M+
1) structure and performance parameters of a X-ray combination refractor are obtained according to following equation：
The optical constant of X-ray wave band：N=1- δ+i β (1)
The focal length of X-ray combination refractor：
The focal spot size of X-ray combination refractor：
The numerical aperture of X-ray combination refractor：
Wherein n represents optical constant, and δ represents the refraction of X-ray band material, and β represents the absorption of X-ray band material, and N is represented
The number of refractive elements in X-ray combination refractor combines refractor paraboloid top by taking parabolic shape refractive elements as an example
The radius of curvature of point is R, and paraboloidal opening size is R0, f represents the focal length of X-ray combination refractor, and λ represents wavelength, μ
The linear absorption coefficient of X-ray is represented,
6. micromation X-ray array combination refractor integrated package as claimed in claim 1 or 2, which is characterized in that described
X-ray dioptric apparatus, close to placement, realizes second of shaping of incident X-ray beam with the X-ray array combination refractor,
Second of shaping, which refers to X-ray dioptric apparatus, to roll over the positive and negative level-one compound lens in X-ray array combination refractor
Light θ angles, to the positive and negative 2 θ angles of two level compound lens refractive power in X-ray array combination refractor, and so on, it is final real
Now the class directional light of combination refractor single to each in X-ray array combination refractor is incident.
7. micromation X-ray array combination refractor integrated package as claimed in claim 1 or 2, which is characterized in that described
The structure size of x-ray diAN_SNhragm is determined according to the structure size of the X-ray array combination refractor, realizes incident X-rays
The first time shaping and filtering of light beam, the first time shaping of the light beam refer to injecting X using x-ray diAN_SNhragm construction insulation to penetrate
The function that linear array combines the stray light except refractor and tentatively collimated to light beam；The filtering refers to X-ray light
The filter structure of euphotic zone and light blocking tape alternation arrangement in late structure, and by filter structure split into X-ray light wave multiple
Beamlet.
8. micromation X-ray array combination refractor integrated package as claimed in claim 7, which is characterized in that described
The number of light belt is that (M+1) is a, and the number that refractor is combined with the X-ray array combination refractor is identical, described
The width of euphotic zone and light blocking band is calculated by following equation respectively：
Zero level euphotic zone T0, positive and negative level-one euphotic zone, positive and negative two level identical as the numerical aperture size of X-ray combination refractor
Euphotic zone ..., and so on, euphotic zone width means are：
Positive and negative level-one light blocking band, positive and negative two level light blocking band ..., and so on, light blocking bandwidth is expressed as：
GM=Ltan (0.5M θ) (6)
Wherein L represents the geometrical length of X-ray combination refractor, is expressed as L=Nl, and wherein l is that refractive elements are axial thick
Spend size.
9. micromation X-ray array combination refractor integrated package as claimed in claim 1 or 2, which is characterized in that described
X-ray diAN_SNhragm selection absorption characteristic meets any material of following equation, the absorption coefficient of X-ray band material：
Wherein NARepresent Avgadro constant, r0Electron radius is represented, A represents atomic mass, f2Represent atomic scattering factor, ρ
Electron density is represented, the element species in i representation compounds are i=1 when material is simple substance；
The material thickness t of the x-ray diAN_SNhragm meets expression formula e-β·t＜ ＜ 1.
10. micromation X-ray array combination refractor integrated package as claimed in claim 8, which is characterized in that the X
Ray dioptric apparatus selective refraction characteristic meets any simple substance or compound-material of following equation,
The refraction coefficient of X-ray band material：
Wherein NARepresent Avgadro constant, r0Electron radius is represented, λ represents wavelength, and A represents atomic mass, and subscript i is indicated
Element species in compound, subscript j are positive integer, and ρ represents electron density, and subscript i indicates the element species in compound, when
I=1 when material is simple substance, v represent atom number, and subscript i indicates that the element species in compound, subscript j are positive integer, Z generations
Table atomic number, subscript i indicate the element species in compound；
The non-refractive power area material thickness t of the X-ray dioptric apparatusZ0It indicates, the non-refractive power sector width ruler of the X-ray dioptric apparatus
Very little TZ=T0+2G2, the material thickness t in refractive power areaZMIt is calculated by following equation：
tZM=tZ0+TM·tan(0.5M·θ) (9)。
Wherein, G2For the width of positive and negative two level light blocking band, it is calculated when taking M=2 by above-mentioned formula (6)；TMFor the width of euphotic zone
Degree, is calculated by above-mentioned formula (5).
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| KR20060086076A (en) * | 2005-01-26 | 2006-07-31 | 최재호 | Fabrication method of the x-ray compound refractive lens system |
| CN103454299A (en) * | 2013-08-15 | 2013-12-18 | 浙江工业大学 | Portable microbeam X-ray fluorescence spectrophotometer |
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