CN108318516B - Miniature X-ray array combined refraction lens integrated assembly - Google Patents

Miniature X-ray array combined refraction lens integrated assembly Download PDF

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CN108318516B
CN108318516B CN201810366254.3A CN201810366254A CN108318516B CN 108318516 B CN108318516 B CN 108318516B CN 201810366254 A CN201810366254 A CN 201810366254A CN 108318516 B CN108318516 B CN 108318516B
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CN108318516A (en
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乐孜纯
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Zhejiang University of Technology ZJUT
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Abstract

The utility model provides a miniaturized X ray array combination refraction lens integrated component, is including the X ray diaphragm that is used for carrying on X ray beam primary shaping and filtering, the X ray refractor that is used for carrying on X ray beam secondary shaping to type parallel light, the X ray array combination lens and the subassembly plummer that are used for focusing respectively to a plurality of X ray sub-beams of incidenting, the subassembly plummer is used for bearing X ray diaphragm, X ray refractor and X ray array combination refraction lens, X ray diaphragm, X ray refractor and X ray array combination refraction lens are located same optical axis in proper order, X ray array combination refraction lens's array structure layout guarantees that the focus that each sub-beam formed is in same position and is located the optical axis. The invention can realize high micro-area resolution and high sensitivity at the same time, and can carry out field analysis.

Description

Miniature X-ray array combined refraction lens integrated assembly
Technical Field
The invention relates to the field of X-ray detection and imaging, in particular to a novel X-ray array combined refraction lens integrated component for a microbeam X-ray fluorescence analysis system.
Background
The X-Ray Fluorescence (XRF) analysis system can carry out simple, rapid, high-resolution and nondestructive quantitative element measurement and analysis on various morphological (solid/liquid/powder and the like) samples under normal pressure. Micro-beam X-ray fluorescence analysis systems (micro-XRF) have received much attention due to their higher resolution of micro-zones.
Microbeam X-ray fluorescence analysis systems (micro-XRF) are typically equipped with X-ray focusing devices. Although the resolution of a micro-area is greatly improved (generally by more than one order of magnitude), the counting rate is reduced, and the detection sensitivity is influenced by the X-ray fluorescence analysis system using the X-ray focusing device. In the prior art, a fluorescence spectrometer (patent number: 201010180956.6) based on an X-ray capillary device uses the X-ray capillary device for focusing, the resolution of a micro-area can only reach dozens of microns generally, the resolution of the micro-area is not high enough, and the detection sensitivity is reduced to a certain extent due to the reduction of the counting rate; meanwhile, the structure is complex, the size is large, and portability cannot be realized. The inventor also previously proposed a portable microbeam X-ray fluorescence spectrometer (patent No. 201310356270.1, the closest prior art to the present invention), which uses an X-ray combination refractive lens to obtain the detected microbeam, although the resolution of the micro-area is greatly improved, the counting rate is low, and the detection sensitivity is affected.
The X-ray combined refraction lens is an integrated microstructure device, the numerical aperture is small, and light emitted by the X-ray light pipe cannot be completely received by the combined lens, so that the counting rate is reduced, the energy of X-ray light is wasted, and noise is increased. If a new device structure can be invented, and the X-ray light emitted by the X-ray light tube is utilized as much as possible, the counting rate can be greatly increased, the detection sensitivity is further improved, and meanwhile, the energy consumption and the noise can be reduced.
Disclosure of Invention
In order to overcome the defects that the micro-area resolution of the existing X-ray fluorescence spectrometer is not high enough, particularly the detection sensitivity is not high enough due to low counting rate, the structure is complex, the size is large, and the portability cannot be realized, the invention provides a miniaturized X-ray array combined refraction lens integrated assembly which is applied to a miniaturized micro-beam X-ray fluorescence analysis system, can realize high micro-area resolution and high sensitivity at the same time, and can carry out field analysis.
The technical scheme adopted by the invention for solving the technical problems is as follows:
the utility model provides a miniaturized X ray array combination refraction lens integrated component, is including the X ray diaphragm that is used for carrying on X ray beam primary shaping and filtering, the X ray refractor that is used for carrying on X ray beam secondary shaping to type parallel light, the X ray array combination lens and the subassembly plummer that are used for focusing respectively to a plurality of X ray sub-beams of incidenting, the subassembly plummer is used for bearing X ray diaphragm, X ray refractor and X ray array combination refraction lens, X ray diaphragm, X ray refractor and X ray array combination refraction lens are located same optical axis in proper order, X ray array combination refraction lens's array structure layout guarantees that the focus that each sub-beam formed is in same position and is located the optical axis.
Further, in the X-ray diaphragm, receiving, shaping for the first time, and filtering, wherein the shaping for the first time is to shape incident X-ray light waves according to the numerical aperture of the X-ray array combined refraction lens; the filtering means splitting incident X-ray light waves into a plurality of sub-beams, and the number of the sub-beams is the same as that of the combined refractive lenses in the X-ray array combined refractive lens.
Still further, in the X-ray refractor, the X-ray light wave which is split into a plurality of sub-beams is received and the secondary beam shaping is carried out, and the secondary beam shaping ensures that the plurality of X-ray sub-beams which are emitted from the X-ray refractor are all incident to the corresponding X-ray combined refraction lens in the array in a parallel light-like mode.
Further, the X-ray array combined refractive lens includes (M +1) X-ray combined refractive lenses, M being a positive integer and an even number. The X-ray array combined refraction lens is axially symmetrically distributed along the optical axis, the optical axis of the X-ray array combined refraction lens is superposed with the optical axis of a zero-order X-ray combined refraction lens in the array, the included angle between the optical axis of the X-ray array combined refraction lens and the optical axis of a positive-negative first-order X-ray combined refraction lens in the array is theta, the included angle between the optical axis of the X-ray array combined refraction lens and the optical axis of a positive-negative second-order X-ray combined refraction lens in the array is 2 theta, and so on;
the layout structure of the (M +1) combined refractive lenses in the X-ray array combined refractive lens enables focal spots focused by all the (M +1) X-ray combined refractive lenses to be at the same position and be located on the optical axis.
The structure and performance parameters of the (M +1) X-ray combined refractive lenses are obtained according to the following formula:
optical constant of X-ray wave band n 1-delta + i β (1)
Focal length of X-ray combined refractive lens:
Figure BDA0001637236360000031
focal spot size of X-ray combined refractive lens:
Figure BDA0001637236360000032
numerical aperture of X-ray combined refractive lens:
Figure BDA0001637236360000033
wherein N represents an optical constant, δ represents refraction of the material in the X-ray band, β represents absorption of the material in the X-ray band, and N represents the number of refraction elements in the X-ray combined refraction lens, such as parabolic refraction elementsFor example, the vertex of the paraboloid of the combined refractive lens has a radius of curvature of R, and the opening of the paraboloid has a size of R0F represents the focal length of the X-ray combination refractive lens, λ represents the wavelength, μ represents the linear absorption coefficient of X-rays,
Figure BDA0001637236360000041
the X-ray refractor and the X-ray array combined refraction lens are arranged in a close manner, so that secondary shaping of incident X-ray beams is realized, the secondary shaping refers to that the X-ray refractor can refract theta angles to a positive-negative primary combined lens in the X-ray array combined refraction lens, refract 2 theta angles to a positive-negative secondary combined lens in the X-ray array combined refraction lens, and the like, and finally parallel light incidence to each single combined refraction lens in the X-ray array combined refraction lens is realized.
The structure size of the X-ray diaphragm is determined according to the structure size of the X-ray array combined refraction lens, so that the first shaping and filtering of incident X-ray beams are realized, and the first shaping of the beams refers to the function of utilizing the X-ray diaphragm structure to block stray light which enters the outside of the X-ray array combined refraction lens and preliminarily collimating the beams; the filtering is a filtering structure with alternately arranged light transmission bands and light blocking bands in the X-ray diaphragm structure, and the X-ray light wave is split into a plurality of sub-beams through the filtering structure.
The number of the light transmission band is (M +1), the number of the light transmission band is the same as that of the combined refraction lenses in the X-ray array combined refraction lens, and the widths of the light transmission band and the light blocking band are respectively calculated by the following formulas:
zero-order light transmission band T0The numerical aperture size of the X-ray combined refraction lens is the same as that of the X-ray combined refraction lens, and the width of the positive and negative first-level light transmission belts, the positive and negative second-level light transmission belts … and so on is expressed as follows:
Figure BDA0001637236360000042
positive and negative first-stage light-blocking bands, positive and negative second-stage light-blocking bands …, and so on, the width of the light-blocking bands is expressed as:
GM＝L·tan(0.5M·θ) (6)
wherein L represents the geometric length of the X-ray compound refractive lens, and is expressed as L ═ N · L, where L is the refractive element axial thickness dimension.
The X-ray diaphragm selects any material with absorption characteristics meeting the following formula, and the absorption coefficient of the material in the X-ray wave band:
Figure BDA0001637236360000051
wherein N isARepresents the Avogastron constant, r0Represents the electron radius, A represents the atomic mass, f2Represents an atomic scattering factor, rho represents an electron density, i represents element species in the compound, and when the material is a simple substance, i is 1;
the material thickness t of the X-ray diaphragm satisfies the expression e-β·t<<1。
The X-ray refractor selects any simple substance or compound material with the refractive property satisfying the following formula,
refractive index of X-ray band material:
Figure BDA0001637236360000052
wherein N isARepresents the Avogastron constant, r0Represents an electron radius, λ represents a wavelength, a represents an atomic mass, subscript i represents an element species in a compound, subscript j is a positive integer ρ represents an electron density, subscript i represents an element species in a compound, i ═ 1, v represents an atomic number, subscript i represents an element species in a compound, subscript j is a positive integer, Z represents an atomic number, and subscript i represents an element species in a compound.
The thickness t of the material in the non-refraction region of the X-ray refractorZ0Means that the width dimension T of the non-refraction region of the X-ray refractorZ＝T0+2G2Thickness t of material in the area of refractionZMCalculated from the following equation:
tZM＝tZ0+TM·tan(0.5M·θ) (9)。
wherein G is2The width of the positive and negative secondary light blocking bands is calculated by taking M as 2 according to the formula (6); t isMThe width of the light-transmitting band is calculated by the above formula (5).
The technical conception of the invention is as follows: the X-ray combined refraction lens is a novel X-ray focusing device based on refraction effect, the theoretical focusing light spot size can reach nanometer magnitude, the focusing light spot size obtained by actual test is usually several micrometers, high-quality detection microbeams can be obtained by focusing an X-ray beam by using the X-ray combined refraction lens, and the micro-area resolution of a fluorescence analysis system is improved.
The utility model provides a novel miniaturized X ray array combination refraction lens integrated component, each X ray combination refraction lens in the array focuses on respectively, through X ray array combination refraction lens's structural design, cooperation X ray refractometer and X ray diaphragm, can make (M +1) combination refraction lens focus in the X ray array combination refraction lens in the same focal spot position, effectively improve the intensity in focal spot, consequently, the count rate of surveying is increased substantially, improve fluorescence analytic system's detection sensitivity promptly.
In addition, the miniaturized X-ray array combined refraction lens integrated assembly has the advantages of small size, simple manufacturing process, good robustness and batch processing, and meanwhile, because the integrated assembly is based on the refraction effect, the optical path does not need to be folded when the X-ray beam is focused, so that the formed fluorescence analysis system is compact in structure, small in size and light in weight, and is suitable for portable field analysis.
The invention has the following beneficial effects: 1. the miniaturized X-ray array combined refraction lens integrated component is used as a focusing device of an X-ray fluorescence spectrometer, and simultaneously realizes higher micro-area resolution and detection sensitivity, wherein the higher micro-area resolution is realized by a single X-ray combined refraction lens in an array, and the higher detection sensitivity is realized by the focusing superposition effect of the array combined refraction lens; 2. the novel device X-ray diaphragm and the X-ray refractor are utilized to shape and filter the X-ray beam, the structure is simple, and the device can be integrally manufactured in batch; 3. the X-ray array combined refraction lens works based on refraction effect, and a light path does not need to be folded when an X-ray beam is focused, so that the formed detection device or instrument has compact structure, small size and light weight, is suitable for manufacturing a portable instrument device, and can realize field analysis.
Drawings
Fig. 1 is a schematic structural diagram of a miniaturized X-ray array combined refractive lens integrated component according to the present invention, wherein 1 represents an X-ray diaphragm, 2 represents an X-ray refractor, 3 represents an X-ray array combined refractive lens, and 4 represents a component carrier stage.
FIG. 2 is a schematic structural diagram of an X-ray diaphragm in a miniaturized integrated X-ray array and refractive lens assembly according to the present invention (only a partial structure where M is less than or equal to 2 is shown), wherein T is0Width of zero-order transmission band, T2The width of the positive and negative primary light transmission bands, t is the thickness of the X-ray diaphragm, (a) a front view, and (b) a top view.
FIG. 3 is a schematic diagram of the structure of an X-ray refractor in a miniaturized integrated X-ray array and refractive lens assembly according to the present invention (only a partial structure of M ≦ 2 is shown), wherein T isZIs the width of the non-refraction area, tZ0Thickness of material, t, being non-refractive areaZMThe thickness of the material in the light folding area, (a) a front view, and (b) a top view.
FIG. 4 is a schematic diagram of the structure of an X-ray array-combined refractive lens in a miniaturized integrated X-ray array-combined refractive lens assembly according to the present invention (only a partial structure of M ≦ 2 is shown), wherein T is0Is the aperture of the refractive element and l is the axial thickness dimension of the refractive element.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
Referring to fig. 1 to 4, a miniaturized X-ray array combined refractive lens integrated component includes an X-ray diaphragm 1, an X-ray refractor 2, an X-ray array combined lens 3, and a component carrier 4, wherein an X-ray beam is irradiated on the X-ray array combined refractive lens integrated component, and is firstly received by the X-ray diaphragm, and is subjected to primary shaping and filtering, and the primary shaping is to shape an incident X-ray light wave according to a numerical aperture of the X-ray array combined refractive lens; the filtering means splitting incident X-ray light waves into a plurality of sub-beams, and the number of the sub-beams is the same as that of the combined refractive lenses in the X-ray array combined refractive lens. The X-ray light wave which is split into a plurality of sub-beams is then incident into the X-ray refractor, and the second shaping of the beam is carried out by the X-ray refractor, and the second shaping of the beam ensures that the plurality of X-ray sub-beams which are emergent from the X-ray refractor are incident into the corresponding X-ray combined refraction lens in the array in a parallel light-like mode. The X-ray array combined refraction lens is used for focusing a plurality of incident X-ray sub-beams respectively, and the array structure layout of the X-ray array combined refraction lens ensures that the focused focal spots formed by each sub-beam are at the same position and are positioned on the optical axis. The assembly bearing platform is used for bearing the X-ray diaphragm, the X-ray refractor and the X-ray array combined refraction lens, and the assembly bearing platform is fixed after the relative positions and the optical axes of the X-ray diaphragm, the X-ray refractor and the X-ray array combined refraction lens are adjusted.
Further, the X-ray array combined refractive lens includes (M +1) X-ray combined refractive lenses, where M is a positive integer and an even number. X ray array combination refracting lens is axial symmetry along its optical axis and distributes, zero order X ray combination refracting lens's optical axis coincidence in X ray array combination refracting lens's the optical axis and the array, X ray array combination refracting lens's optical axis and the positive negative grade X ray combination refracting lens's in the array optical axis contained angle is theta, X ray array combination refracting lens's optical axis and the positive negative second grade X ray combination refracting lens's in the array optical axis contained angle is 2 theta, so on.
Still further, the layout structure of the (M +1) combined refractive lenses in the X-ray array combined refractive lens enables focal spots focused by all the (M +1) X-ray combined refractive lenses to be at the same position and located on the optical axis.
Further, the structure and performance parameters of the (M +1) X-ray combination refractive lenses are obtained according to the following formulas:
optical constant of X-ray wave band n 1-delta + i β (1)
Focal length of X-ray combined refractive lens:
Figure BDA0001637236360000091
focal spot size of X-ray combined refractive lens:
Figure BDA0001637236360000092
numerical aperture of X-ray combined refractive lens:
Figure BDA0001637236360000093
wherein N represents an optical constant, δ represents refraction of the material in the X-ray band, β represents absorption of the material in the X-ray band, and N represents the number of refraction units in the X-ray combined refraction lens, such as a parabolic refraction unit, the curvature radius of the vertex of the paraboloid of the combined refraction lens is R, and the opening size of the paraboloid is R0F represents the focal length of the X-ray combination refractive lens, λ represents the wavelength, μ represents the linear absorption coefficient of X-rays,
Figure BDA0001637236360000094
furthermore, the X-ray refractor is arranged close to the X-ray array combined refraction lens to realize the secondary shaping of the incident X-ray beam, wherein the secondary shaping refers to the refraction angle theta of the X-ray refractor to the positive and negative primary combined lens in the X-ray array combined refraction lens, the refraction angle 2 theta of the positive and negative secondary combined lens in the X-ray array combined refraction lens, and the like, and finally the parallel light incidence of each single combined refraction lens in the X-ray array combined refraction lens is realized.
Further, the structural size of the X-ray diaphragm is determined according to the structural size of the X-ray array combined refractive lens, so that the first shaping and filtering of incident X-ray beams are realized, wherein the first shaping of the beams refers to the function of blocking stray light which enters the outside of the X-ray array combined refractive lens by using the X-ray diaphragm structure and preliminarily collimating the beams; the filtering is a filtering structure with alternately arranged light transmission bands and light blocking bands in the X-ray diaphragm structure, and the X-ray light wave is split into a plurality of sub-beams through the filtering structure.
The number of the light-transmitting bands is (M +1), which is the same as the number of the combined refractive lenses in the X-ray array combined refractive lens. The widths of the light transmitting band and the light blocking band are respectively calculated by the following formulas:
zero-order light transmission band T0The numerical aperture size of the X-ray combined refraction lens is the same as that of the X-ray combined refraction lens, and the width of the positive and negative first-level light transmission belts, the positive and negative second-level light transmission belts … and so on is expressed as follows:
Figure BDA0001637236360000101
positive and negative first-stage light-blocking bands, positive and negative second-stage light-blocking bands …, and so on, the width of the light-blocking bands is expressed as:
GM＝L·tan(0.5M·θ) (6)
wherein L represents the geometric length of the X-ray compound refractive lens, and is expressed as L ═ N · L, where L is the refractive element axial thickness dimension.
The X-ray diaphragm can be made of any material with absorption characteristics satisfying the following formula, and is usually made of metal materials such as copper, lead and the like,
absorption coefficient of X-ray band material:
Figure BDA0001637236360000102
wherein N isARepresents the Avogastron constant, r0Represents the electron radius, A represents the atomic mass, f2Represents an atomic scattering factor, rho represents an electron density, i represents the element type in the compound, and when the material is a simple substance, i is 1.
The material thickness t of the X-ray diaphragm satisfies the expression e-β·t<<1。
The X-ray refractor may be selected from any elemental or compound material having refractive characteristics satisfying the following formulas,
refractive index of X-ray band material:
Figure BDA0001637236360000103
wherein N isARepresents the Avogastron constant, r0Represents an electron radius, λ represents a wavelength, a represents an atomic mass, subscript i represents an element species in a compound, subscript j is a positive integer, ρ represents an electron density, subscript i represents an element species in a compound, i ═ 1, v represents an atomic number when a material is a simple substance, subscript i represents an element species in a compound, subscript j is a positive integer, Z represents an atomic number, and subscript i represents an element species in a compound.
The thickness t of the material in the non-refraction region of the X-ray refractorZ0It is shown that in order to reduce the X-ray absorption loss, it should be made as thin as possible, depending on the manufacturing process. The width dimension T of the non-refraction region of the X-ray refractorZ＝T0+2G2，T0The width of the zero-order light transmission band; t is tZ0Is the thickness t of the material in the non-refraction area and the thickness t of the material in the refraction areaZMCalculated from the following equation:
tZM＝tZ0+TM·tan(0.5M·θ) (9)。
wherein G is2The width of the positive and negative secondary light blocking bands is calculated by taking M as 2 according to the formula (6); t isMThe width of the light-transmitting band is calculated by the above formula (5).

Claims (10)

1. The integrated assembly is characterized by comprising an X-ray diaphragm, an X-ray refractor, an X-ray array combined lens and an assembly bearing table, wherein the X-ray diaphragm is used for performing primary shaping and filtering on an X-ray beam, the X-ray refractor is used for performing secondary shaping on the X-ray beam into parallel light, the X-ray array combined lens is used for focusing a plurality of incident X-ray sub-beams respectively, the assembly bearing table is used for bearing the X-ray diaphragm, the X-ray refractor and the X-ray array combined refractive lens, the X-ray diaphragm, the X-ray refractor and the X-ray array combined refractive lens are sequentially positioned on the same optical axis, and the array structure layout of the X-ray array combined refractive lens ensures that a focusing focal spot formed by each sub-beam is positioned on the same position and the optical axis.
2. The integrated miniaturized X-ray array combined refractive lens assembly of claim 1, wherein the X-ray stop receives, shapes and filters an incident X-ray light wave according to a numerical aperture of the X-ray array combined refractive lens; the filtering means splitting incident X-ray light waves into a plurality of sub-beams, and the number of the sub-beams is the same as that of the combined refractive lenses in the X-ray array combined refractive lens.
3. The integrated miniaturized X-ray array combined refractive lens assembly according to claim 1 or 2, wherein the X-ray refractor receives the X-ray light wave split into a plurality of sub-beams and performs a second beam shaping, and the second beam shaping ensures that the plurality of X-ray sub-beams emitted from the X-ray refractor are incident on the corresponding X-ray combined refractive lens in the array in a parallel-like manner.
4. The miniaturized X-ray array combined refractive lens integrated component of claim 1 or 2, wherein the X-ray array combined refractive lens comprises (M +1) X-ray combined refractive lenses, the M being a positive integer and an even number; the X-ray array combined refraction lens is axially symmetrically distributed along the optical axis, the optical axis of the X-ray array combined refraction lens is superposed with the optical axis of a zero-order X-ray combined refraction lens in the array, the included angle between the optical axis of the X-ray array combined refraction lens and the optical axis of a positive-negative first-order X-ray combined refraction lens in the array is theta, the included angle between the optical axis of the X-ray array combined refraction lens and the optical axis of a positive-negative second-order X-ray combined refraction lens in the array is 2 theta, and so on;
the layout structure of the (M +1) combined refractive lenses in the X-ray array combined refractive lens enables focal spots focused by all the (M +1) X-ray combined refractive lenses to be at the same position and be located on the optical axis.
5. The integrated component of a miniaturized X-ray array combined refractive lens of claim 4, wherein the structural and performance parameters of the (M +1) X-ray combined refractive lenses are obtained according to the following formula:
optical constant of X-ray wave band n 1-delta + i β (1)
Focal length of X-ray combined refractive lens:
Figure FDA0002413939320000021
focal spot size of X-ray combined refractive lens:
Figure FDA0002413939320000022
numerical aperture of X-ray combined refractive lens:
Figure FDA0002413939320000023
wherein N represents an optical constant, δ represents refraction of the material in the X-ray band, β represents absorption of the material in the X-ray band, and N represents the number of refraction units in the X-ray combined refraction lens, such as a parabolic refraction unit, the curvature radius of the vertex of the paraboloid of the combined refraction lens is R, and the opening size of the paraboloid is R0F represents the focal length of the X-ray combination refractive lens, λ represents the wavelength, μ represents the linear absorption coefficient of X-rays,
Figure FDA0002413939320000024
6. the integrated miniaturized X-ray array combined refractive lens assembly according to claim 1 or 2, wherein the X-ray refractor is disposed adjacent to the X-ray array combined refractive lens to perform a second shaping of the incident X-ray beam, wherein the second shaping is performed by the X-ray refractor to refract the positive and negative primary combined lenses in the X-ray array combined refractive lens at the angle of theta, refract the positive and negative secondary combined lenses in the X-ray array combined refractive lens at the angle of 2 theta, and so on, and finally perform the parallel-like light incidence on each single combined refractive lens in the X-ray array combined refractive lens.
7. The integrated component of a miniaturized X-ray array combined refractive lens according to claim 1 or 2, wherein the structural size of the X-ray diaphragm is determined according to the structural size of the X-ray array combined refractive lens, so as to realize the first shaping and filtering of an incident X-ray beam, and the first shaping of the beam refers to the function of blocking stray light entering the outside of the X-ray array combined refractive lens by using the X-ray diaphragm structure and preliminarily collimating the beam; the filtering is a filtering structure with alternately arranged light transmission bands and light blocking bands in the X-ray diaphragm structure, and the X-ray light wave is split into a plurality of sub-beams through the filtering structure.
8. The integrated miniaturized X-ray array combined refractive lens module according to claim 7, wherein the number of the light-transmitting bands is (M +1) which is the same as the number of the combined refractive lenses of the X-ray array combined refractive lens, and the widths of the light-transmitting bands and the light-blocking bands are calculated by the following formulas, respectively:
zero-order light transmission band T0The numerical aperture size of the X-ray combined refraction lens is the same as that of the X-ray combined refraction lens, and the width of the positive and negative first-level light transmission belts, the positive and negative second-level light transmission belts … and so on is expressed as follows:
Figure FDA0002413939320000031
positive and negative first-stage light-blocking bands, positive and negative second-stage light-blocking bands …, and so on, the width of the light-blocking bands is expressed as:
GM＝L·tan(0.5M·θ) (6)
wherein L represents the geometric length of the X-ray compound refractive lens, and is expressed as L ═ N · L, where L is the refractive element axial thickness dimension.
9. The integrated miniaturized X-ray array combined refractive lens assembly of claim 1 or 2, wherein the X-ray stop selects any material having an absorption characteristic satisfying the following formula, an absorption coefficient of an X-ray band material:
Figure FDA0002413939320000032
wherein N isARepresents the Avogastron constant, r0Represents the electron radius, A represents the atomic mass, f2Represents an atomic scattering factor, rho represents an electron density, i represents element species in the compound, and when the material is a simple substance, i is 1;
the material thickness t of the X-ray diaphragm satisfies the expression e-β·t＜＜1。
10. The integrated miniaturized X-ray array and refractive lens assembly of claim 8, wherein the X-ray refractor selects any elemental or compound material having a refractive characteristic satisfying the following formula,
refractive index of X-ray band material:
Figure FDA0002413939320000033
wherein N isARepresents the Avogastron constant, r0Represents an electron radius, λ represents a wavelength, a represents an atomic mass, subscript i represents an element species in a compound, subscript j is a positive integer, ρ represents an electron density, subscript i represents an element species in a compound, i ═ 1, v represents an atomic number when a material is a simple substance, subscript i represents an element species in a compound, subscript j is a positive integer, Z represents an atomic number, subscript i represents an element species in a compound;
the thickness t of the material in the non-refraction region of the X-ray refractorZ0Is shown by the X-rayWidth dimension T of non-refraction zone of linear refractorZ＝T0+2G2Thickness t of material in the area of refractionZMCalculated from the following equation:
tZM＝tZ0+TM·tan(0.5M·θ) (9)；
wherein G is2The width of the positive and negative secondary light blocking bands is calculated by taking M as 2 according to the formula (6); t isMThe width of the light-transmitting band is calculated by the above formula (5).
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