CN209659696U - A kind of soft X_ray source - Google Patents
A kind of soft X_ray source Download PDFInfo
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- CN209659696U CN209659696U CN201822258974.6U CN201822258974U CN209659696U CN 209659696 U CN209659696 U CN 209659696U CN 201822258974 U CN201822258974 U CN 201822258974U CN 209659696 U CN209659696 U CN 209659696U
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- ray source
- displacement
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- X-Ray Techniques (AREA)
Abstract
This application discloses a kind of soft X_ray sources, including vacuum target chamber, refrigerating chamber and nozzle, refrigerating chamber and nozzle are placed in vacuum target chamber, nozzle is set on refrigerating chamber, support plate is set on vacuum target chamber, the refrigerant inlet pipeline, refrigerant outlet pipeline and process gas pipes of support plate are provided through in support plate, refrigerant inlet pipeline and refrigerant outlet pipeline are connected to refrigerating chamber respectively, and process gas pipes pass through refrigerating chamber and connect with nozzle；Three-D displacement mechanism includes the first displacement governor, second displacement adjuster and third displacement governor, and the first displacement governor, second displacement adjuster and third displacement governor are all set between support plate and vacuum target chamber and control support plate is moved along orthogonal three directions respectively.The application may be implemented to adjust nozzle location in tri- axis direction of X, Y, Z, improve the performance of grenz ray.
Description
Technical field
This application involves grenz ray fields, relate more specifically to a kind of soft X_ray source.
Background technique
X-ray is a kind of electromagnetic radiation that wavelength is very short, and wavelength is about 0.01~100 Ethylmercurichlorendimide, between ultraviolet light and γ
Between ray, there is very high penetrating power, many substances opaque to visible light can be penetrated.The shorter X-ray energy of wavelength
Amount is bigger, also referred to as hard X ray, and the long X-ray energy of wavelength is lower, referred to as grenz ray.In general, wavelength is less than 0.1 angstrom
The title Super-hard X-ray of rice, title hard X ray of the wavelength within the scope of 0.1~10 Ethylmercurichlorendimide, wavelength is within the scope of 10~100 Ethylmercurichlorendimides
Claim grenz ray.
In recent years, grenz ray is widely used in many scientific domains, especially in Soft X-ray microimaging
In the fields such as Soft X-ray Projection Lithography Technology, to low-debris, high brightness, high stability soft X_ray source demand increasingly
Strongly.In addition, usually may require that grenz ray light in the subjects such as atomic spectroscopy, Molecular Spectroscopy, plasma physics
Source is as required means are tested, and therefore, the application demand of soft X_ray source is constantly in zooming trend.
Earliest laser plasma soft X-ray light source uses solid metal target, and this target can generate more gold
Belong to clast, these clasts may damage the optical device by close to sources, make its function that can not bring into normal play, greatly drop
Low effect causes the optical path in experiment or instrument can not work normally.Therefore, with advances in technology, liquid miniflow target is opened
Begin widely used.It is mainly in contact in the prior art by semiconductor cooling device with the pipeline for being connected with working gas to realize gas
Body fluid, there are two o'clock deficiencies for this refrigerating plant: first, lower for some liquefaction points working gas (for example, nitrogen,
- 196 DEG C of liquefaction point under normal pressure) for, the refrigerating capacity of semiconductor cooling device is unable to reach by its liquefied degree, even
Under high pressure；Second, refrigerating plant it is inefficient, use between screw type ventilation pipe and semiconductor chilling plate lead to
It crosses metal heat-conducting plate to be in contact, the efficiency of heat transfer is not high, this makes the temperature at snorkel be difficult to protect with the temperature of cooling piece
It holds consistent.Working gas lower for most of liquefaction points, even if after successfully liquefying, since evaporative condenser effect can produce
Growing nitrogen-fixing crystallization, so that low temperature liquid stream is difficult to maintain stable injection.
Meanwhile liquid miniflow in the prior art does not have special collection device, only immediately below liquid stream upright position
Cavity bottom, which has, is connected with sky pump line road at one, so that the vacuum degree in vacuum target chamber is unable to maintain that in very high level.Due to soft X
Ray belongs to low energy X ray, and wavelength is longer, and aerial absorption is very strong, and the deficiency of vacuum degree can make laser in vacuum target chamber
Grenz ray caused by plasma is partially absorbed, and the light intensity of light source will weaken.
In addition, be used in the prior art structure fix, uncontrollable liquid miniflow target assembly, the position of nozzle
It is fixed nonadjustable, the application of many grenz rays, in Soft X-ray Microscope, it is desirable that light source has after the installation is complete
The geometrical symmetry of height, if light supply apparatus work in-process causes nozzle location to occur partially there are error or due to Aging equipment
Difference, it will directly influence the application of instrument, reduce application performance.
In short, in liquid miniflow target laser plasma soft X ray light source in the prior art, there is liquid miniflow targets
The performances such as refrigeration performance insufficient, the stability of liquid stream is poor, laser plasma size, spatial stability and brightness compared with
The problems such as poor, it is difficult to meet application demand.
Summary of the invention
The purpose of the application is to provide a kind of soft X_ray source, to solve at least one of above-mentioned technical problem.
In order to solve the above-mentioned technical problem, the technical solution of the application is to provide a kind of soft X_ray source, the grenz ray
Light source includes vacuum target chamber, refrigerating chamber and nozzle, and the refrigerating chamber and the nozzle are placed in the vacuum target chamber, the spray
Mouth is set on the refrigerating chamber, and a support plate is set on the vacuum target chamber, is provided through in the support plate described
Refrigerant inlet pipeline, refrigerant outlet pipeline and the process gas pipes of support plate, the refrigerant inlet pipeline and described
Refrigerant outlet pipeline is connected to the refrigerating chamber respectively, the process gas pipes pass through the refrigerating chamber and with the nozzle
Connection；The soft X_ray source further includes three-D displacement mechanism, the three-D displacement mechanism be set to the support plate with it is described
Between vacuum target chamber, the three-D displacement mechanism includes that the first displacement governor, second displacement adjuster and third displacement are adjusted
Save device, first displacement governor, second displacement adjuster and third displacement governor be all set in the support plate with
Between the vacuum target chamber and the support plate is controlled respectively to move along orthogonal three directions.
According to one embodiment of the application, the vacuum target chamber includes: tee tube, and the tee tube has opposite the
One outlet, second outlet and the third outlet between the first outlet and the second outlet, the first outlet
It is connect with support plate, refrigerant inlet pipeline, refrigerant outlet pipeline and process gas pipes are each passed through the support plate
And connect with the refrigerating chamber, the third outlet is connect with vacuum evacuation device；And multi-pass pipe, the multi-pass pipe include opposite
Top opening, bottom opening and be open positioned at several sides of the top opening and the family of the bottom opening, institute
Top opening is stated closely to connect with the second outlet, at the bottom opening be arranged vacuum outlet, the position of the nozzle with
The side opening corresponds to, and setting is fluted below the nozzle, and the groove is fixed by adapter, the adapter setting
At the vacuum outlet, the groove is connected to the vacuum outlet.
According to one embodiment of the application, adapter is provided with below the refrigerating chamber, the nozzle is set to described
On adapter, the process gas pipes are connect by the adapter with the nozzle.
According to one embodiment of the application, temperature sensor is provided at the nozzle.
According to one embodiment of the application, the groove is set at the top of a taper platform, the taper platform with described turn
Connector is fixedly connected.
According to one embodiment of the application, having heaters is arranged in the nozzle periphery.
According to one embodiment of the application, the soft X_ray source further includes bellows, and the bellows is set to institute
It states between support plate and the vacuum target chamber, the refrigerant inlet pipeline, refrigerant outlet pipeline and process gas pipes are equal
It is passed through from the bellows interior.
According to one embodiment of the application, the soft X_ray source further include be arranged parallel and be sheathed on it is described
The first support plate, the second support plate and third support plate on the outside of bellows, first support plate pass through the third position
It moves adjuster to be movably fixed in the support plate, second support plate is movable by the second displacement adjuster
Ground is fixed in first support plate, and second support plate passes through first displacement governor simultaneously and movably fixes
In in the third support plate, the third support plate is fixed on the vacuum target chamber.
According to one embodiment of the application, first displacement governor includes the first support frame, the first propeller, the
One guide rail and first rail groove, first support frame are fixed in the third support plate, and first propeller is fixed
In on first support frame and corresponding with second support plate, first guide rail is fixed on the third along first direction
In support plate, the first rail groove is fixed below second support plate and is slidably matched with first guide rail.
According to one embodiment of the application, the second displacement adjuster includes the second support frame, the second propeller, the
Two guide rails and the second guide-track groove, second support frame are fixed in second support plate, and second propeller is fixed
In on second support frame and corresponding with first support plate, second guide rail is fixed on described second in a second direction
In support plate, second guide-track groove is fixed below first support plate and is slidably matched with second guide rail, described
First direction is mutually perpendicular to the second direction.
According to one embodiment of the application, the third displacement governor includes screw rod and nut, and the screw rod is along
Three directions are uniformly fixed in first support plate, and the support plate is fixed by the cooperation of the nut and the bolt
In on the bolt, the third direction is mutually perpendicular to the first direction, the second direction.
In view of the above deficiencies three-D displacement mechanism is arranged on device to realize in soft X_ray source provided by the present application
X, nozzle location is adjusted in tri- axis direction of Y, Z, to realize the adjusting of light source geometric position.In addition, having used multichannel vacuum system
System is cooperated below nozzle using cone-shaped metal platform and vacuum-pump line, prevents low temperature miniflow further during flowing
Gasification reduces vacuum degree, and causes the consumption of grenz ray, and another group of vacuum pump is provided with above vacuum target chamber cavity and is extracted
Intracavity gas maintains intracavitary high vacuum.Meanwhile using in refrigerating chamber refrigerant and the direct piping that is connected with working gas it is direct
The mode of contact cools down, and refrigeration effect can be adjusted with the selection of refrigerant, and can achieve extremely low temperature and liquid
Change the lower working gas of certain liquefaction points, such as liquid nitrogen；It is heated by resistance wire in nozzle exit in nozzle periphery,
To increase liquid stream stability.
Detailed description of the invention
In order to illustrate the technical solutions in the embodiments of the present application or in the prior art more clearly, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
The some embodiments recorded in application, for those of ordinary skill in the art, in the premise of not making the creative labor property
Under, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is the stereoscopic schematic diagram according to the soft X_ray source of one embodiment of the application；
Fig. 2 is that three-D displacement machine is shown according to the stereoscopic schematic diagram of the partial enlargement of the soft X_ray source of Fig. 1
Structure；
Fig. 3 is the stereoscopic schematic diagram according to the local cutting of the soft X_ray source of Fig. 1；
Fig. 4 is according to the diagrammatic cross-section of the soft X_ray source of Fig. 1, wherein illustrating only top half；
Fig. 5 is according to the diagrammatic cross-section of the soft X_ray source of Fig. 1, wherein illustrating only lower half portion；
Fig. 6 is that nozzle and heating is shown according to the stereoscopic schematic diagram of the partial enlargement of the soft X_ray source of Fig. 5
Mechanism；
Fig. 7 is the schematic diagram connected according to the external equipment of the soft X_ray source of Fig. 1.
Specific embodiment
Below in conjunction with specific embodiment, the application is described further.It should be understood that following embodiment is merely to illustrate this
Application is not for limitation scope of the present application.
It should be noted that it can directly set when component/part is referred to as on " setting exists " another component/part
It sets on another component/part or there may also be component/parts placed in the middle.When component/part is referred to as " connection/connection
Connect " to another component/part, it, which can be, is directly connected to/is attached to another component/part or may be simultaneously present residence
Middle component/part.Term as used herein " connection/connection " may include electrical and/or mechanical-physical connection/connection.This
Term "comprises/comprising" used in text refers to feature, step or the presence of component/part, but is not precluded one or more
Other feature, step or the presence of component/part or addition.Term as used herein "and/or" includes one or more phases
Close any and all combinations of listed item.
Unless otherwise defined, all technical and scientific terms used herein and the technical field for belonging to the application
The normally understood meaning of technical staff is identical.Term used herein is intended merely to the purpose of description specific embodiment, and
It is not intended to limitation the application.
In addition, term " first ", " second " etc. are used for description purposes only pair similar with distinguishing in the description of the present application
As between the two and sequencing being not present, indication or suggestion relative importance can not be interpreted as.In addition, the application's
In description, unless otherwise indicated, the meaning of " plurality " is two or more.
Fig. 1 is according to the stereoscopic schematic diagram of the soft X_ray source of one embodiment of the application, as shown in Figure 1, the application
The soft X_ray source of offer includes three-D displacement mechanism, vacuum target chamber, refrigeration mechanism and light source generation mechanism, below with reference to attached
Figure carries out the detailed description of components.
In Fig. 1, three-D displacement mechanism includes support plate 10, bellows 60, first flange disk 30, the first displacement governor
70, second displacement adjuster 80 and third displacement governor 14, wherein support plate 10 is plate-like；Bellows 60 is cylindrical in shape simultaneously
It may be implemented along its axial stretching, the top of bellows 60 is sealed on the lower face of support plate 10, the bottom of bellows 60
Portion is closely connect with first flange disk 30, and support plate 10, bellows 60 and first flange disk 30 form closed substantially tubular
Space；The vertical centerline for defining the cylindrical space is (paper vertical i.e. in figure) for Z-direction, and definition is hung down with Z-direction
Two mutual mutually perpendicular directions are X-axis and Y direction in straight plane；Several are provided on first flange disk 30 along Z
The first screw rod 24 that axis direction extends, the top of the first screw rod 24 are fixedly installed the third support plate 23 of annular, third support
The first displacement governor 70 is provided on plate 23；Second support plate 22 is identical as 23 shape of third support plate and is parallel to each other and sets
It sets, the second support plate 22 is located at 23 top of third support plate and is connect by the first displacement governor 70 with third support plate 23,
Second displacement adjuster 80 is provided in second support plate 22；First support plate 21 is identical and mutual as 22 shape of the second support plate
It is arranged in parallel, the first support plate 21 is located at 22 top of the second support plate and by second displacement adjuster 80 and the second support plate 22
Connection；First support plate 21, the second support plate 22 and the substantially arranged stacked of third support plate 23 and leading to same size
Hole, bellows 60 are placed in these through-holes；Several (usually three) are arranged in first support plate 21 to extend along Z-direction
The second screw rod 15, support plate 10 is fixed on the second screw rod 15 by adjusting nut 14, and adjusting nut 14 is formed as at this time
Third displacement governor, third displacement governor 14 can adjust the position of support plate 10 along Z-direction；It is also set in support plate 10
It is equipped with process gas pipes 11, refrigerant outlet pipeline 12 and refrigerant inlet pipeline 13, process gas pipes 11, refrigerant
Outlet conduit 12 and refrigerant inlet pipeline 13 pass through support plate 10 outside certainly and are inserted into inside bellows 60.
Further, in Fig. 1, vacuum target chamber includes tee tube 40 and multi-pass pipe 50, and there are three go out for the tool of tee tube 40
Mouthful: top exit, outlet at bottom and side exit form the tubular extended along Z-direction between top exit and outlet at bottom
Space, side exit are connected to the cylindrical space；It is provided with second flange disk 41 at top exit, is provided at side exit
Three ring flanges 42 are provided with the 4th ring flange 43 at outlet at bottom；First flange disk 30 and second flange disk 41 by gasket and
Bolt closely connects；Multi-pass pipe 50 has upper opening, under shed and several sides opening, shape between upper opening and under shed
At the cylindrical space extended along Z-direction, side opening is connected to the cylindrical space, meanwhile, the 5th method is formed at upper opening
Blue disk 51, lower opening are formed with the 6th ring flange 53, and corresponding ring flange 52,54 etc. has can be set in side opening, the
Five ring flanges 51 are closely connect with the 4th ring flange 43 by gasket core bolt；Vacuum evacuation is provided in the middle part of 6th ring flange 53
Mouth 511.Although those skilled in the art should be noted that first flange disk 30 is closely connect with second flange disk 41,
Tubular in the tee tube 40 of 41 downside of cylindrical space and second flange disk in the bellows 60 of 30 upside of first flange disk is empty
Between be not attached to it is logical；Although the 4th ring flange 43 is closely connect with the 5th ring flange 51,43 upside of the 4th ring flange
Cylindrical space in the multi-pass pipe 50 of 51 downside of cylindrical space and the 5th ring flange in tee tube 40 is connected to logical.Multi-pass pipe
Multiple side openings of 50 lateral positions can according to need corresponding setting CCD fixator 55, CCD adapter 56；Laser is anti-
Means are commonly arranged for those skilled in the art in shield 57, observation window 58,59 etc., and details are not described herein.
Further, Fig. 2 be according to the stereoscopic schematic diagram of the partial enlargement of the soft X_ray source of Fig. 1, as shown in Figure 2,
It is provided with equally distributed bolt hole at circumference on first flange disk 30 and second flange disk 41, by bolt hole interpolation
Enter the close connection that fastening bolt realizes first flange disk 30 and second flange disk 41；First flange disk 30 by several first
Screw rod 24 is fixedly connected with third support plate 23, so that not can be movable relatively therebetween；First displacement governor 70 includes the
One bracket 71, the first propeller 72, the first guide rail 73 and first rail groove 74 (Fig. 4), wherein first support 71 is L-shaped, the
One end of one bracket 71 is fixed in third support plate 23, the other end of first support 71 raise upward and with third support plate 23
The plane at place is vertical；First propeller 72 is set on the other end of first support 71 along X-direction and supports with second
Plate 22 is aligned, and allows the movement of the first propeller 72 that the second support plate 22 is pushed to move；Two the first guide rails 73 are set to
The upper surface of third support plate 23 and extend along X axis, two the first guide rails 73 are arranged symmetrically and mutually flat about bellows 60
It goes, the first rail groove 74 (Fig. 4) with the cooperation of the first guide rail 73, the first guide rail 73 is provided on the lower surface of the second support plate 22
It is placed in first rail groove 74 and can be slided along first rail groove 74, when the movement of the first propeller 72, the second support
Plate 22 is slided along the first guide rail 73 in X-direction；Second displacement adjuster 80 include second support 81, the second propeller 82,
Second guide rail 83 and the second guide-track groove, wherein second support 81 is L-shaped, and the second support is fixed in one end of second support 81
On plate 22, the other end of second support 81 raises upward and vertical with the plane where the first support plate 21；Second propeller 82
It is set on the other end of second support 81 along Y direction and is aligned with the first support plate 21, so that the second propeller 82
Movement can push the first support plate 21 to move；Two the second guide rails 83 are set to the upper surface of the second support plate 22 and along Y-axis
To extension, two the second guide rails 83 are arranged symmetrically and are parallel to each other about bellows 60, set on the lower surface of the first support plate 21
It is equipped with the second guide-track groove with the cooperation of the second guide rail 83, the second guide rail 83 is placed in the second guide-track groove and can lead along second
Track slot sliding, when the movement of the second propeller 82, the first support plate 21 is slided along the second guide rail 83 in Y direction；Due to wave
Line pipe 60 is cylindrical in shape and may be implemented axially retractable, and the top of bellows 60 is sealed on the lower face of support plate 10,
Support plate 10 is fixed on the second screw rod 15 by adjusting nut 14, therefore, is pushed away when adjusting the first propeller 71 and second respectively
When into device 82, support plate 10 can also be moved along X-direction, Y direction accordingly；When adjusting third displacement governor 14,
Support plate 10 is moved along Z-direction accordingly.
Further, Fig. 3 is according to the stereoscopic schematic diagram of the local cutting of the soft X_ray source of Fig. 1, and Fig. 4 is according to Fig. 1
Soft X_ray source diagrammatic cross-section, Fig. 5 be according to the diagrammatic cross-section of the soft X_ray source of Fig. 1, by Fig. 4, Fig. 5 combine
Fig. 3 is it is found that be additionally provided with process gas pipes 11, refrigerant outlet pipeline 12 and refrigerant inlet pipeline in support plate 10
13, process gas pipes 11, refrigerant outlet pipeline 12 and refrigerant inlet pipeline 13 pass through support plate 10 outside certainly and are inserted into
Inside bellows 60.Refrigeration mechanism includes refrigerating chamber 44, refrigerant inlet pipeline 13 and refrigerant outlet pipeline 12, wherein
Refrigerating chamber 44 is formed as tubular and is placed in vacuum target chamber, and specifically, the internal stretch of refrigerating chamber 44 from tee tube 40 enters more
The top that the inside of siphunculus 50, refrigerant inlet pipeline 13 and refrigerant outlet pipeline 12 distinguish self-supporting slab 10 passes through ripple
Inside pipe 60, first flange disk 30 and second flange disk 41 and fixation is connected to the top of refrigerating chamber 44 so that refrigerant can be with
The temperature that reduces refrigerating chamber 44 in, the gas that refrigerating chamber 44 in generates are conveyed into refrigerating chamber 44 from refrigerant inlet duct 13
Refrigerating chamber 44 is discharged via refrigerant outlet pipeline 12；The top of 11 self-supporting slab 10 of process gas pipes passes through in bellows 60
Portion, first flange disk 30, second flange disk 41 and refrigerating chamber 44, process gas pipes 11 connect after being pierced by refrigerating chamber 44 with nozzle
It connects, the middle part of process gas pipes 11 forms the condensation chamber 111 that a cross-sectional area increases, at least part of condensation chamber 111
In refrigerating chamber 44, it should be noted that the inside of process gas pipes 11 and the inside of refrigerating chamber 44 are not attached to lead to, work
Gas (such as nitrogen) is conveyed by process gas pipes 11 to nozzle, and is liquefied in the process, when flowing out via nozzle
The state of working gas has changed into liquefaction, and the moisture in working gas is condensed when passing through condensation chamber 11, so that after
The continuous working gas to advance keeps its purity to prevent nozzle blockage.
Fig. 6 is according to the stereoscopic schematic diagram of the partial enlargement of the soft X_ray source of Fig. 5, by Fig. 6 combination Fig. 3 it is found that light source
Generation mechanism includes nozzle 36, and nozzle 36 is set to 44 lower section of refrigerating chamber and is fixed under refrigerating chamber 44 by adapter 35
Side, nozzle 36 be connected to process gas pipes 11 so that by condensation become the working gas of liquid from nozzle 36 from outflow；
Adapter 35 generallys use metal adapter so that temperature is transmitted more rapidly and accurately；The periphery of adapter 35 is provided with temperature
Sensor 31 is in order to monitor the temperature variations around nozzle 36 in real time, and temperature sensor 31 is by being arranged in support plate 10
One of plug 17 at top is connect with external device (ED).The lower section of refrigerating chamber 44 is additionally provided with connection sheet 32, in connection sheet 32
It is provided with resistance wire bracket 33, resistance wire 34 is provided on resistance wire bracket 33, a portion resistance wire twist wraps up
In the side of nozzle 36, resistance wire 34 is connect by conducting wire with another plug 17 that 10 top of support plate is arranged in facilitate
For resistance wire power supply.Temperature reduces caused by the heating of resistance wire 34 can be offset due to refrigerant liquid evacuator body, condensation, together
Shi Buhui destroys the high vacuum of cryogenic liquid ambient enviroment, so that the stability of microstream is further promoted, while working as nozzle 36
It is condensed to heat by resistance wire 34 when obstruction and be dredged.The lower section of nozzle 36 is additionally provided with metal frustum 37, leads to
Standing to be placed at 36 lower section 15mm of nozzle, the top of metal frustum 37 is provided with the groove to 37 inner hollow of metal cone platform,
The groove is used to receive the remaining liquid flowed out from nozzle 36.The design of the metal frustum 37 can preferably will due to evaporation pair
The remaining liquid that vacuum degree is affected is taken away in time, reduces the consumption of grenz ray.The lower section of metal frustum 37 further leads to
It crosses metal adapter 513 and metal joint 512 is connect with vaccum exhaust outlet 511, allow and incited somebody to action by vaccum exhaust outlet 511
The liquid of above-mentioned remnants is extracted out.It should be noted that being additionally provided with the heat conducting bar extended along Z-direction on metal adapter 513
38, heat conducting bar 38 is connect with refrigerating chamber 44 makes metal adapter 513, the temperature of metal frustum 37 and nozzle with logical heat transfer
Temperature at 36 is suitable, thus guarantee remaining liquid will not because of temperature change conversion conditions, make true in vacuum target chamber
Reciprocal of duty cycle reduces, and influences the brightness of grenz ray.Or the heat conducting pipe extended along Z-direction is additionally provided on metal adapter 513
38, heat conducting pipe pipe 38 is connect with refrigerating chamber 44 so that the refrigerant in refrigerating chamber 44 can be delivered to metal adapter 513, gold
Belong to frustum 37, it is suitable with the temperature in refrigerating chamber 44 to make its temperature, thus prevent cryogenic liquid miniflow during flowing into
The gasification of one step reduces vacuum degree, causes the consumption of grenz ray.
Since nozzle 36 is fixed on refrigerating chamber 44, refrigerating chamber 44 passes through refrigerant inlet pipeline 13, refrigerant outlet pipe
Road 12 and process gas pipes 11 are fixed in support plate 10, therefore, pass through the first displacement governor 70, second displacement adjuster
80 and the geometric position that nozzle 36 may be implemented of third displacement governor 14 multiaxis it is adjustable, it can be achieved that in light source working tune
Nozzle in vacuum target chamber is saved, to control the position of liquid miniflow, to be finally reached the soft X of adjusting in three directions of X, Y, Z axis and penetrate
The purpose of linear light source position.
Fig. 7 is the schematic diagram connected according to the external equipment of the soft X_ray source of Fig. 1, as shown in Figure 7, the grenz ray light
Source further includes refrigerant memory 1, and refrigerant memory 1 is connect by transfer tube 2 with refrigerant inlet pipeline 13, transfer tube 2
On be provided with low-temperature solenoid valve 3 to automatically control the input quantity of refrigerant and pressure in refrigerating chamber is maintained to stablize；The grenz ray
Light source further comprises molecular pump 4, and molecular pump 4 is connected by vacuum transmission pipe 200 and refrigerant outlet pipeline 12
Connect, be provided with high-temperature buffer chamber 6 on vacuum transmission pipe 200, heater 7 is set at high-temperature buffer chamber 6, high-temperature buffer chamber 6 and point
It is additionally provided with vacuum solenoid 5 between sub- vacuum pump 4, is added by high-temperature buffer chamber 6 and 7 pairs of the heater low-temperature refrigerants extracted out
Heat, the refrigerant for preventing temperature too low damages vacuum solenoid 5 and vacuum degree can be set in molecular pump 4, vacuum solenoid 5
Threshold value is closed when pressure is too low in refrigerating chamber, and when refrigerating chamber too high pressure opens, to realize the control of refrigeration cavity temperature
System.By molecular pump 4 refrigerant circulation inside refrigerating chamber 44 is substituted, so that can be realized lower system at nozzle
Cold temperature, accurate adjustable, refrigerating efficiency is higher, and the very low gas of certain liquefaction points (such as nitrogen) can liquefy, and obtains more steady
Fixed injection and longer spray distance, so that the stability of soft X_ray source is stronger, while being also applied for a greater variety of gas
Body target.Vacuum meter interface 510 is additionally provided on the side of multi-pass pipe 50, vacuum meter passes through vacuum meter interface 510 and multi-pass pipe
50 connections are to measure the vacuum degree inside multi-pass pipe 50.Light source generation mechanism further includes High Power Laser Pulses generator, and high energy swashs
One of exit on 50 side of multi-pass pipe is arranged in light pulse entrance, is provided with laser focusing lens outside the outlet
8, laser focusing lens 8 can will be at nozzle 36 that High Power Laser Pulses 100 focus on inside multi-pass pipe 50 and to act on liquid micro-
On stream, so that liquid miniflow is plasmarized and generates grenz ray.In order to maintain in multi-pass pipe 50 and tee tube 40
It is true to be all connected with pumping at the third ring flange 42 on tee tube 40 and at the vaccum exhaust outlet 511 of 50 bottom of multi-pass pipe for vacuum degree
Empty device enables vacuum degree in vacuum target chamber since the gas outlet vacuumized is located at the upper and lower ends of vacuum target chamber
Enough maintain very high level.
Those skilled in the art should be noted that the first displacement governor being previously mentioned in technical scheme and
Two displacement governors can use differential head, and third displacement governor can be replaced using other step devices, i.e., all
Can be realized micron accuracy manually, the regulating mechanism of automatic adjustment straight-line displacement, such as electricity driving displacement platform each falls within the application's
Protection scope.Those skilled in the art are also to be noted that low temperature resistant glass atomizer, adapter, switching can be used in nozzle
Head and metal frustum etc. can be made of low temperature resistant metal material；High Power Laser Pulses can pass through high energy nanosecond arteries and veins
Laser generation is rushed, can also be generated by the light source of other short pulse superlasers, such as femtosecond pulse laser etc., herein
It repeats no more.Vacuum pump in the application can use ionic pump, lobe pump etc. to realize the high vacuum in vacuum target chamber.Work
Gas preferably uses nitrogen, and nitrogen is intended only as generating a kind of target substance of laser plasma, all to generate laser etc.
Gas ions can radiate the substance (gas or liquid) of some strength grenz ray, such as the substances such as alcohol, xenon, each fall within this
The protection scope of application.
Above-described, the only preferred embodiment of the application is not intended to limit the scope of the present application, and the application's is upper
Stating embodiment can also make a variety of changes.Made by i.e. all claims and description according to the application application
Simply, equivalent changes and modifications fall within the claims of the application patent.The not detailed description of the application is
Routine techniques content.
Claims (11)
1. a kind of soft X_ray source, the soft X_ray source includes vacuum target chamber, refrigerating chamber and nozzle, the refrigerating chamber and institute
It states nozzle to be placed in the vacuum target chamber, the nozzle is set on the refrigerating chamber, which is characterized in that
One support plate is set on the vacuum target chamber, and the refrigerant inlet of the support plate is provided through in the support plate
Pipeline, refrigerant outlet pipeline and process gas pipes, the refrigerant inlet pipeline and refrigerant outlet pipeline difference
It is connected to the refrigerating chamber, the process gas pipes pass through the refrigerating chamber and connect with the nozzle；
The soft X_ray source further includes three-D displacement mechanism, the three-D displacement mechanism be set to the support plate with it is described
Between vacuum target chamber, the three-D displacement mechanism includes that the first displacement governor, second displacement adjuster and third displacement are adjusted
Save device, first displacement governor, second displacement adjuster and third displacement governor be all set in the support plate with
Between the vacuum target chamber and the support plate is controlled respectively to move along orthogonal three directions.
2. soft X_ray source according to claim 1, which is characterized in that the vacuum target chamber includes:
Tee tube, the tee tube have opposite first outlet, second outlet and are located at the first outlet and described the
Third outlet between two outlets, the first outlet connect with support plate, refrigerant inlet pipeline, refrigerant outlet pipeline with
And process gas pipes are each passed through the support plate and connect with the refrigerating chamber, the third outlet connects with vacuum evacuation device
It connects；And
Multi-pass pipe, the multi-pass pipe include opposite top opening, bottom opening and are located at the top opening and the bottom
Several sides of the family of portion's opening are open, and the top opening is closely connect with the second outlet, at the bottom opening
Vacuum outlet is set, and the position of the nozzle is corresponding with side opening, and fluted, the groove is arranged below the nozzle
It is fixed by adapter, the adapter is set at the vacuum outlet, and the groove is connected to the vacuum outlet.
3. soft X_ray source according to claim 1, which is characterized in that be provided with adapter below the refrigerating chamber, institute
It states nozzle to be set on the adapter, the process gas pipes are connect by the adapter with the nozzle.
4. soft X_ray source according to claim 1, which is characterized in that be provided with temperature sensor at the nozzle.
5. soft X_ray source according to claim 2, which is characterized in that the groove is set at the top of a taper platform, institute
Taper platform is stated to be fixedly connected with the adapter.
6. soft X_ray source according to claim 1, which is characterized in that having heaters is arranged in the nozzle periphery.
7. soft X_ray source according to claim 1, which is characterized in that the soft X_ray source further includes bellows,
The bellows is set between the support plate and the vacuum target chamber, the refrigerant inlet pipeline, refrigerant outlet pipe
Road and process gas pipes are passed through from the bellows interior.
8. soft X_ray source according to claim 7, which is characterized in that the soft X_ray source further includes being parallel to each other
Arrange and be sheathed on the first support plate on the outside of the bellows, the second support plate and third support plate, first support
Plate is movably fixed in the support plate by the third displacement governor, and second support plate passes through described second
Displacement governor is movably fixed in first support plate, and second support plate passes through first displacement simultaneously and adjusts
Section device is movably fixed in the third support plate, and the third support plate is fixed on the vacuum target chamber.
9. soft X_ray source according to claim 8, which is characterized in that first displacement governor includes first
Support, the first propeller, the first guide rail and first rail groove, first support frame are fixed in the third support plate,
First propeller is fixed on first support frame and corresponding with second support plate, and first guide rail is along first
Direction is fixed in the third support plate, and the first rail groove is fixed below second support plate and with described first
Guide rail is slidably matched.
10. soft X_ray source according to claim 9, which is characterized in that the second displacement adjuster includes second
Support, the second propeller, the second guide rail and the second guide-track groove, second support frame are fixed in second support plate,
Second propeller is fixed on second support frame and corresponding with first support plate, and second guide rail is along second
Direction is fixed in second support plate, and second guide-track groove is fixed below first support plate and with described second
Guide rail is slidably matched, and the first direction is mutually perpendicular to the second direction.
11. soft X_ray source according to claim 10, which is characterized in that the third displacement governor includes screw rod
And nut, the screw rod are uniformly fixed in first support plate along third direction, the support plate passes through the nut
Cooperation with the screw rod is fixed on the screw rod, and the third direction and the first direction, the second direction are mutual
Vertically.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822258974.6U CN209659696U (en) | 2018-12-29 | 2018-12-29 | A kind of soft X_ray source |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822258974.6U CN209659696U (en) | 2018-12-29 | 2018-12-29 | A kind of soft X_ray source |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020134500A1 (en) * | 2018-12-29 | 2020-07-02 | 苏州瑞派宁科技有限公司 | Soft x-ray light source |
| WO2020134501A1 (en) * | 2018-12-29 | 2020-07-02 | 苏州瑞派宁科技有限公司 | Soft x-ray light source |
| CN114166122A (en) * | 2021-12-02 | 2022-03-11 | 中国工程物理研究院流体物理研究所 | Automatic target adjusting device |
-
2018
- 2018-12-29 CN CN201822258974.6U patent/CN209659696U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020134500A1 (en) * | 2018-12-29 | 2020-07-02 | 苏州瑞派宁科技有限公司 | Soft x-ray light source |
| WO2020134501A1 (en) * | 2018-12-29 | 2020-07-02 | 苏州瑞派宁科技有限公司 | Soft x-ray light source |
| US11751318B2 (en) | 2018-12-29 | 2023-09-05 | Raycan Technology Co., Ltd. (Suzhou) | Soft X-ray light source |
| CN114166122A (en) * | 2021-12-02 | 2022-03-11 | 中国工程物理研究院流体物理研究所 | Automatic target adjusting device |
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