CN100373994C

CN100373994C - Soft X ray light source of laser plasma for liquid microflow jetting target

Info

Publication number: CN100373994C
Application number: CNB2004100111941A
Authority: CN
Inventors: 尼启良; 齐立红; 陈波
Original assignee: Changchun Institute of Optics Fine Mechanics and Physics of CAS
Current assignee: Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority date: 2004-11-02
Filing date: 2004-11-02
Publication date: 2008-03-05
Anticipated expiration: 2024-11-02
Also published as: CN1728915A

Abstract

The present invention relates to a laser plasma soft X-ray light source of a liquid micro flow jetting target, which belongs to the light source in the technical field of a light source with a short waveband. A technical problem to be solved by the present invention is that the laser plasma soft X-ray light source of a liquid micro-flow jetting target is provided. The present invention has the solving technical scheme that the present invention comprises a vacuum target chamber, a flange, an outer barrel, a high pressure chamber, a cooling pipe, a resistance heating filament, a sealing and positioning cylinder, a rotary handle, a heat isolating plate, a valve rod, a nozzle, etc., wherein the outer barrel is sealed and fixed at the vacuum target chamber at the top of the vacuum target chamber through the flange, an inlet and an outlet of the cooling pipe are respectively sealed and fixed at a left heat isolating pipe and a right heat isolating pipe, and the cooling pipe extending into the vacuum target chamber is close wound around the flat straight segment of the high pressure chamber. The outer side is also wound with the resistance heating filament, the sealing and positioning cylinder is welded at the center of the top of the outer barrel, the side surface of the heat isolating plate and the inner surface of the sealing and positioning cylinder are in sliding contact, and the upper end of a valve body is fixedly connected with a corrugated pipe and is inserted into a lower groove of the heat isolating plate. A valve tip can seal the nozzle, a laser beam focuses on a micro flow jetted from the nozzle, and a laser plasma radiation soft X-ray is generated.

Description

A kind of liquid miniflow sputtering target laser plasma soft X-ray light source

One, technical field

The invention belongs to a kind of liquid miniflow sputtering target laser plasma soft X-ray light source that relates in the short-wave band light sources technical field.

Two, technical background

In modern sciences such as space optics, astrophysics, radiant quantity are explored, often need the grenz ray light source as means, in modern high-tech field such as medical diagnosis, material analysis, projection lithography, microscopy, the grenz ray light source has obtained more application.It is reported and several types such as synchrotron radiation, capillary discharging, laser plasma are arranged the grenz ray light source of researching and developing in the world at present.Laser plasma soft X-ray light source the earliest, be that the great pulse laser focusing of power density is on the metal target surface, produce high-temperature laser plasma resonance grenz ray, this situation is when laser plasma forms, also be accompanied by the generation of metal fragment, can cause the soft x-ray optics element of contiguous light source and damage or the reduction optical property, will the material of target be changed for this reason, scientists is changed into gas or liquid to the material of target in recent years.

The prior art the most approaching with the present invention is the patent US6 of the U.S., 760.406B ₂, as shown in Figure 1: comprise vacuum pump 1, condenser lens 2, laser 3, vacuum target chamber 4, pressurized tank 5, refrigeration 6, air inlet pipe 7, pressurized tank nozzle 8, resistive heater 9, miniflow 10, laser beam 11.

Operation material in the pressurized tank 5, after refrigeration 6 refrigeration of pressurized tank 5 end faces, from 8 ejections of pressurized tank nozzle, forming miniflow 10 enters the laser that vacuum target chamber 4, laser 3 launch and is focused into laser beam 11 through collector lens 2, beat on miniflow 10, form laser plasma, produce grenz ray.

The subject matter that this grenz ray light source exists is: refrigeration unreasonable structure partly, be an end face refrigeration, the speed of refrigeration is slow, and the costing an arm and a leg of refrigeration head, there is not valve gated nozzle, can not quit work after the pressurization, can not regulate, especially unfavorable for the situation that nozzle is thicker.

Three, summary of the invention

In order to overcome the defective that prior art exists, the objective of the invention is to optimized Structure Design, improve refrigerating efficiency, reduce cost, easy to use, a kind of simple and practical liquid miniflow sputtering target grenz ray light source of ad hoc meter.

The technical problem to be solved in the present invention is: a kind of liquid miniflow sputtering target laser plasma soft X-ray light source is provided.The technical scheme of technical solution problem is as shown in Figure 2: comprise that vacuum target chamber window 12, laser beam 13, collector lens 14, vacuum target chamber 15, flange 16, outer bucket 17, instlated tubular 18, refrigerator pipes entrance point 19, sealing positioning tube 20, rotary handle 21, operation material are input into pipe 22, the refrigerator pipes port of export 23, thermal insulation board 24, hydraulic-formed bellows 25, high pressure chest 26, refrigerator pipes 27, resistive heater 28, valve rod 29, nozzle 30, miniflow 31, vacuum pump 32.

Outer bucket 17 is connected by the top and vacuum target chamber 15 sealings of flange 16 at vacuum target chamber 15, about two instlated tubulars 18 pass outer bucket 17 and fix in the top of bucket 17 outside with its welding, the installation that is sealed and matched of the entrance point 19 of refrigerator pipes 27 and the instlated tubular 18 on the left side, refrigerator pipes 27 outside stretching in bucket 17 and the vacuum target chamber 15 closely are wrapped in top and have on the high pressure chest 26 Lower Half flat segments of hydraulic-formed bellows 25, the outside in the refrigerator pipes 27 of twining, also closely twine resistive heater 28 and the refrigerator pipes 27 common temperature of controlling high pressure chests 26, refrigerator pipes 27 is freezed in order to introduce cooling substance.The entrance point that the operation material of drawing from high pressure chest 26 is input into pipe 22 stretches out outer barrel 17, be connected with outer bucket 17 welding, operation material is input into pipe 22 in order to be input into the hydraulic fluid that forms miniflow, the port of export 23 of refrigerator pipes 27 and the instlated tubular 18 on the right are sealed and matched and install and stretch out outside the outer bucket 17, and the circulator that forms cooling substance causes; Miniflow is regulated partly by rotary handle 21, sealing positioning tube 20, thermal insulation board 24 and valve rod 29 are formed, sealing positioning tube 20 is weldingly fixed on the center of top of outer bucket 17, between the rotating shaft push rod of rotary handle 21 and the sealing positioning tube 20 is threaded engagement, the lower end is inserted in the upper groove of thermal insulation board 24, the side of thermal insulation board 24 and the inner surface sliding contact that seals positioning tube 20, but slide down is advised, the upper end of the valve rod 29 in high pressure chest 26 is passed hydraulic-formed bellows 25 and is connected with it, the head that stretches out is inserted in the low groove of thermal insulation board 24, the valve point of valve rod 29 lower ends, move with valve rod and can shut high pressure chest 26 bottom nozzles 30, in order to regulate the size of miniflow 31, the rotating shaft push rod and the valve rod 29 of rotary handle 21 are on the coaxial line; Laser beam 13 focuses on the miniflow 31 by collector lens 14 and vacuum target chamber window 12, under the effect of laser, produce laser plasma and EUV radiation, below vacuum target chamber 15, communicate, be equipped with vacuum pump 32 with it, vacuum chamber is vacuumized, to guarantee the vacuum degree of vacuum target chamber 15.

The operation principle explanation: the high-pressure work material enters high pressure chest 26 from the import that operation material is input into pipe 22, under the effect of high pressure, if liquid directly sprays from nozzle, if gas, through spraying from nozzle 30 after the refrigeration of the outer refrigerator pipes 27 of high pressure chest, form miniflow and enter vacuum target chamber 15, laser beam 13 focuses on the miniflow 31 by vacuum target chamber window 12 through condenser lenses 14, form laser plasma, produce grenz ray and EUV radiation.

High pressure chest 26 lower flat straight sections twine refrigerator pipes 27, the outside of the refrigerator pipes 27 of twining is twined resistive heater again, after feeding refrigerant liquid (as liquid nitrogen) in the refrigerator pipes, with the gas refrigeration that feeds in the high pressure chest, make it to form the liquid miniflow from nozzle 30 ejections, the effect of resistive heater 28 makes high pressure chest 26 under the common control of refrigerator pipes 27 and resistive heater 28, be issued to heat balance at a certain design temperature, can set different temperature for different operation materials.

Valve rod 29 is fixed with one at the epimere and the hydraulic-formed bellows 25 of high pressure chest 26, after feeding the high-pressure work material, valve rod 29 rises, operation material is from nozzle 30 ejections, in running order, when rotating rotary handle 21, can make valve rod 29 shut nozzle 30, stop the work of light source at the state that needn't remove high pressure.

If the outer rotary handle 21 of valve rod 29 and vacuum chamber is connected, will produce very strong heat conduction, make the sealing dimension to realize that introduce location thermal insulation board 24, its effect is to block heat conduction, locatees valve rod 29 simultaneously for this reason.

Good effect of the present invention: utilize refrigerator pipes to twine high pressure chest, refrigeration mechanism is reasonable, makes simply, and refrigeration is even, and running is convenient, and produce effects is fast, and the while is cheap, increases valve rod adjusting nozzle, can stop experiment at any time, helps using.

Four, description of drawings: Fig. 1 is the structural representation of prior art, and Fig. 2 is a structural representation of the present invention, and Figure of abstract is selected Fig. 2 for use.

Five, embodiment: the present invention implements by structure shown in Figure 2, and wherein, the material of vacuum vessel port 12 adopts quartzy optical glass, and the wavelength of laser beam 13 is 1.06 μ m power 8 * 10 ¹¹W/cm ²The focal length of collector lens 14 is pressed the size of vacuum target chamber and is selected, and vacuum target chamber 15 adopts cylindrical, the long 245mm of diameter, and high 300mm, vacuum degree 10 during work ^-4More than the holder, flange 16, outer bucket 17, instlated tubular 18, sealing positioning tube 20, rotary handle 21, operation material are input into the material of parts such as pipe 22, hydraulic-formed bellows 25, high pressure chest 26, valve rod 29 and select stainless steel for use, wherein high pressure chest will bear 30 atmospheric pressure, it is the copper pipe of 3mm that refrigerator pipes 27 adopts external diameter, and resistive heater 28 adopts the tungsten filament of 0.1-0.5mm.The material selection polytetrafluoroethylene of thermal insulation board 24, the valve point of valve rod 29 will be through special processings, and be low temperature resistant, wear-resisting, flexible, and nozzle 30 adopts that U.S. Ted Pella companies produce is used for aperture diaphragm on the electron microscope.

Claims

1. liquid miniflow sputtering target laser plasma soft X-ray light source comprises vacuum target chamber, vacuum pump, collector lens, laser beam, heater strip, nozzle, it is characterized in that also comprising flange (16), outer bucket (17), instlated tubular (18), refrigerator pipes entrance point (19), sealing positioning tube (20), rotary handle (21), operation material be input into pipe (22), the refrigerator pipes port of export (23), thermal insulation board (24), hydraulic-formed bellows (25), high pressure chest (26), refrigerator pipes (27), valve rod (29), miniflow (31); Outer bucket (17) is connected by the top and vacuum target chamber (15) sealing of flange (16) at vacuum target chamber (15), about two instlated tubulars (18) pass outer bucket (17) and fix in the top of bucket (17) outside with its welding, the installation that is sealed and matched of the entrance point (19) of refrigerator pipes (27) and the instlated tubular (18) on the left side, refrigerator pipes (27) outside stretching in bucket (17) and the vacuum target chamber (15) closely is wrapped in top and has on high pressure chest (26) the Lower Half flat segments of hydraulic-formed bellows (25), the outside in the refrigerator pipes (27) of twining, also closely twine resistive heater (28), bucket outside the entrance point that the operation material of drawing from high pressure chest (26) is input into pipe (22) stretches out, be connected with outer bucket welding, the port of export (23) of refrigerator pipes (27) and the instlated tubular (18) on the right are sealed and matched and install and stretch out outside the outer bucket (17), sealing positioning tube (20) is weldingly fixed on the center of top of outer bucket (17), the rotating shaft push rod of rotary handle (21) and sealing positioning tube (20) threaded engagement, the lower end is inserted in the upper groove of thermal insulation board (24), the side of thermal insulation board (24) and the inner surface sliding contact that seals positioning tube (20), but slide down is advised, the upper end of the valve rod (29) in high pressure chest (26) is passed hydraulic-formed bellows (25) and is connected with it, the head that stretches out is inserted in the low groove of thermal insulation board (24), the valve point of valve rod (29) lower end, move with valve rod and can shut high pressure chest (26) bottom nozzle (30), the rotating shaft push rod of rotary handle (21) and valve rod (29) are on the coaxial line, laser beam (13) focuses on the miniflow (31) by collector lens (14) and vacuum target chamber window (12), and vacuum pump (32) communicates with vacuum target chamber (15).