CN107058972B - The micro- cutter coat three-dimensional precise displacement work table applied under hot vacuum environment - Google Patents
The micro- cutter coat three-dimensional precise displacement work table applied under hot vacuum environment Download PDFInfo
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- CN107058972B CN107058972B CN201710249791.5A CN201710249791A CN107058972B CN 107058972 B CN107058972 B CN 107058972B CN 201710249791 A CN201710249791 A CN 201710249791A CN 107058972 B CN107058972 B CN 107058972B
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- cultrating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
Abstract
The micro- cutter coat three-dimensional precise displacement work table applied under hot vacuum environment, belongs to the chemical vapour deposition technique field of diamond thin.Brass platform, thermal insulation board and lifting platform are connected by ceramic screw, graphite cannula is set in the mounting hole of brass platform, in graphite cannula, thermocouple is fastenedly connected micro- Cutting tool installation manner with brass platform, thermal insulation board and thermocouple fixed station, and brass platform, thermal insulation board and thermocouple fixed station three connect；Cultrate elevating mechanism upper end it is affixed with lifting platform, lower end is affixed with fine adjustment block；Double rotational directions screw rod is connect with the radial tapped through hole of the connecting column for elevating mechanism of cultrating, fine adjustment block is arranged on table base, it is symmetrical arranged positioned at four lateral positions of fine adjustment block there are four micrometer adjusting screw mounting blocks on table base, the fine thread hole internal screw thread of each micrometer adjusting screw mounting blocks is connected with fine-pitch screw, and four fine-pitch screw ends act against on the side of fine adjustment block.The present invention is used to prepare micro- cutter chemical gas-phase deposition of diamond coating under hot vacuum environment.
Description
Technical field
The present invention relates to a kind of to prepare the three-dimensional position of micro- cutter chemical gas-phase deposition of diamond coating under hot vacuum environment
Workbench is moved, the chemical vapour deposition technique field of diamond thin is belonged to.
Background technique
With the continuous development of micrometer-nanometer processing technology, people propose the cutting ability of micro- cutter with processing quality higher
Requirement.The generally existing cutting ability of the micro- milling cutter of traditional hard alloy is poor, the service life is short, is also easy to produce abrasion and crackle, processing work
The defects of part surface quality is poor, and improving micro- Tool in Cutting performance by changing cutter material is solve the problems, such as this effective
One of approach.
Chemical vapor deposition (Chemical Vapor Deposition, CVD) diamond cutter because have ultrahigh hardness,
The advantages such as good wearability, coating impurity is few and paid close attention in micro manufacturing field, have become microfabrication height
Hold the critical component of equipment.Heat wire method is to prepare one of cvd diamond film most efficient method, utilizes high temperature tungsten wire or tantalum
Silk, by carbon containing mixed gas Dissociative excitation, undergoes a series of complex chemical reaction to generate gold in matrix surface as heater material
Hard rock.It is the polycrystalline structure of diamond by the diamond thin that heat wire method deposits, for performance close to natural diamond, thickness is general
Less than 20 μm.Its coefficient of friction is low, and mechanical performance is excellent, surface chemical property stablize, processing non ferrous metal and their alloy,
When the difficult-to-machine materials such as composite material, high molecular material and inorganic non-metallic material, have a clear superiority.And heat wire method CVD
Diamond preparation cost is low, suitable for the matrix of complicated shape, easily realization large-scale industrial production, therefore is the micro- cutter of manufacture
Ideal material.
Currently, China aims at the equipment that micro- cutter carries out chemical vapour deposition diamond has independent intellectual property right not yet
Commercially produced product, wherein the design of the three-dimensional micro-displacement work table for fixing and adjusting tool position is even more to need to be broken through
Difficulties.Lack available regulating structure for micro displacement in traditional heat wire method CVD system, this is because the chemical gaseous phase of diamond
Deposition reaction needs the environment of high-temperature vacuum, spherical guide structure used by general work platform, lubricant grease at 50 DEG C just
It can fail and vacuum environment is polluted.And there is also bulky dimensions, degree of regulation are poor, uncomfortable for the structure of common workbench
The defects of clamping for micro- cutter.So developing a kind of three-dimensional for the micro- cutter chemical gas-phase deposition system of diamond coatings
Displacement work table has necessity and urgency, this provides great help to the development of micro-fabrication technology.
Summary of the invention
When cutter chemical vapor deposition micro- the purpose of the present invention is to solve diamond coatings under hot vacuum environment, micro- knife
The support of tool is fixed with position regulation problem, and then provides the micro- cutter coat three-dimensional precise position applied under a kind of hot vacuum environment
Move workbench.
The present invention is directed to illustrate a kind of mechanism adjusted in diamond chemical vapor deposition to the support of micro- cutter and position,
And there is high-precision, high temperature resistant (1000 DEG C of highest), suitable for vacuum environment, compact-sized characteristic.Three-dimensional precise displacement
Workbench uses worm drive principle, including in-plane displancement mechanism, lifting displacement mechanism and heat-insulated fixed mechanism, workbench to put down
The adjusting range of face displacement is ± 5 mm, and the adjusting range for elevating mechanism of cultrating is ± 10 mm.
Realize above-mentioned purpose, the technical scheme is that
The micro- cutter coat three-dimensional precise displacement work table applied under hot vacuum environment, it includes heat-insulated fixed mechanism, liter
Displacement mechanism and in-plane displancement mechanism drop；The heat-insulated fixed mechanism includes that graphite cannula, brass platform, thermal insulation board, thermocouple are solid
Determine platform and thermocouple, the lifting displacement mechanism includes lifting platform, double rotational directions screw rod, handle and elevating mechanism of cultrating, described
In-plane displancement mechanism include fine adjustment block, table base, four micrometer adjusting screw mounting blocks and four fine-pitch screws；
The thermal insulation board is horizontally set on lifting platform and thermocouple fixed station, the brass platform be horizontally set on every
On hot plate, multiple threaded holes one are coaxially arranged on brass platform, thermal insulation board and lifting platform, brass platform, thermal insulation board and thermocouple are solid
Determine to be coaxially arranged with threaded hole two on platform, brass platform, thermal insulation board and lifting platform pass through the ceramic spiral shell in the multiple threaded holes one of screw-in
It clenches and is solidly connected, brass platform is equipped with a mounting hole, is set with graphite cannula, the lower end of micro- cutter in mounting hole described in brass platform
It is mounted in the graphite cannula, the thermocouple comes with external screw thread, and thermocouple and brass platform, thermal insulation board and thermocouple are solid
The threaded hole two for determining platform is fastenedly connected, and brass platform, thermal insulation board and thermocouple fixed station three are connected by multiple fastening screws；
Lifting platform lower end surface is equipped with left side wall and right side wall, and the left side wall of lifting platform and the rear end of right side wall are respectively along respective
Length direction be equipped with a upper long hole, upper long hole face setting, the left back upper end for elevating mechanism of cultrating and the right side described in two
Upper end is slidably connected by a upper stay bolt and two upper long holes afterwards, the left front upper end and right front upper end point of elevating mechanism of cultrating
It is not affixed by the left side wall front end of a upper lag bolt and lifting platform and right side wall front end；The fine adjustment block is horizontally disposed,
Fine adjustment block upper surface is equipped with left support plate and right support plate, and the left support plate of fine adjustment block and the rear end of right support plate are respectively along respective
Length direction is equipped with a lower long hole, lower long hole face setting described in two, behind the left back lower end and the right side of elevating mechanism of cultrating
Lower end is slidably connected by a lower stay bolt and two lower long holes, the left front lower end for elevating mechanism of cultrating and right front lower end difference
It is affixed by the left support plate front end and right support plate front end of a lower lag bolt and fine adjustment block；It cultrates before two of elevating mechanism
It is equipped with radial tapped through hole in the middle part of connecting column disposed in parallel afterwards, connecting column described in the double rotational directions screw rod and two
Radial tapped through hole is threadedly coupled, and the front end of double rotational directions screw rod is equipped with handle；
The fine adjustment block is arranged on table base, and four sides of fine adjustment block are located on the table base
Place is symmetrical arranged there are four micrometer adjusting screw mounting blocks, and the lateral surface middle part of each micrometer adjusting screw mounting blocks is equipped with perpendicular to fine tuning
The fine thread hole of block is threaded with fine-pitch screw in the fine thread hole of each micrometer adjusting screw mounting blocks, described in four
The end of fine-pitch screw act against on the opposite side of fine adjustment block.
The beneficial effect of the present invention compared with the existing technology is: the present invention is using (the lifting displacement of precision auger transmission mechanism
It is worm drive on mechanism and in-plane displancement mechanism principle), with compact-sized, output accuracy is high, high temperature resistant, is suitable for very
The advantages that Altitude, mountable different model micro- cutter, micro- tool position can be effectively adjusted, on the table convenient for micro- cutter
Installation and removal.
It is proposed of the invention provides a kind of effective for the multiple degrees of freedom accurate displacement adjusting of cutter micro- under hot vacuum environment
Solution will provide safeguard condition for the development of the micro- cutter of chemical vapour deposition diamond and application.
Detailed description of the invention
Fig. 1 is that micro- cutter coat three-dimensional precise displacement work table for applying under hot vacuum environment of the invention is integrally-built
Axonometric drawing；Fig. 2 is the main view of heat-insulated fixed mechanism；Fig. 3 is the A-A cross-sectional view of Fig. 2；Fig. 4 is the main view for going up and down displacement mechanism
Figure；Fig. 5 is the left view of Fig. 4；Fig. 6 is the top view of in-plane displancement mechanism；Fig. 7 is the main view of Fig. 6；Fig. 8 is the B-B of Fig. 6
Cross-sectional view.
In figure: micro- cutter 1, graphite cannula 2, brass platform 3, thermal insulation board 4, thermocouple fixed station 5, thermocouple 6, lifting platform 7, on
Long hole 7-1, sheet metal component 8, connecting column 9, stop nut 1, double rotational directions screw rod 11, handle 12, fine adjustment block 13, lower long hole 13-1,
Micrometer adjusting screw mounting blocks 14, fine-pitch screw 15, stop nut 2 16, table base 17, cultrate elevating mechanism 18, locking nut
19, it cultrates part 20.
Specific embodiment
Specific embodiment 1: as Figure 1-Figure 8, present embodiment describe applied under a kind of hot vacuum environment it is micro-
Cutter coat three-dimensional precise displacement work table, it includes heat-insulated fixed mechanism, lifting displacement mechanism and in-plane displancement mechanism；It is described
Heat-insulated fixed mechanism include graphite cannula 2, brass platform 3, thermal insulation board 4(using thermal insulation ceramics material), thermocouple fixed station 5 and heat
Galvanic couple 6, the lifting displacement mechanism include lifting platform 7, double rotational directions screw rod 11, handle 12 and elevating mechanism 18 of cultrating, described
In-plane displancement mechanism include fine adjustment block 13,17, four micrometer adjusting screw mounting blocks 14 of table base and four fine-pitch screws 15；
The thermal insulation board 4 is horizontally set on lifting platform 7 and thermocouple fixed station 5, and the brass platform 3 is horizontally disposed
On thermal insulation board 4, multiple threaded holes one, brass platform 3, thermal insulation board 4 are coaxially arranged on brass platform 3, thermal insulation board 4 and lifting platform 7
And threaded hole two is coaxially arranged on thermocouple fixed station 5, brass platform 3, thermal insulation board 4 and lifting platform 7 are by screwing in multiple screw threads
Ceramic screw in hole one is fastenedly connected, and brass platform 3 is equipped with a mounting hole, is set with stone in mounting hole described in brass platform 3
Ink set 2, the lower end of micro- cutter 1 is mounted in the graphite cannula 2, and the thermocouple 6 comes with external screw thread, thermocouple 6 with
The threaded hole two of brass platform 3, thermal insulation board 4 and thermocouple fixed station 5 is fastenedly connected, and brass platform 3, thermal insulation board 4 are fixed with thermocouple
By the connection of multiple fastening screws, (brass platform 3, thermal insulation board 4 and thermocouple fixed station 5 are equipped with multiple coaxial spiral shells to 5 three of platform
Pit three, brass platform 3, thermal insulation board 4 are connect with thermocouple fixed station 5 by the fastening screw screwed in multiple threaded holes three)；
7 lower end surface of lifting platform is equipped with left side wall and right side wall, and the left side wall of lifting platform 7 and the rear end of right side wall are respectively along each
From length direction be equipped with a upper long hole 7-1, upper long hole 7-1 face setting, a left side for elevating mechanism 18 of cultrating described in two
Afterwards upper end and it is right after upper end be slidably connected (the left back upper end for elevating mechanism 18 of cultrating by long holes on a upper stay bolt and two
Upper through-hole after being respectively equipped with upper end behind the right side, the left back upper end for elevating mechanism 18 of cultrating is with upper end behind the right side by penetrating described in two
Rear upper through-hole in upper stay bolt and two upper long holes be slidably connected), the left front upper end for elevating mechanism 18 of cultrating and right front upper
Left side wall front end and right side wall front end of the end respectively by a upper lag bolt and lifting platform 7 it is affixed (left side wall of lifting platform 7 and
The front end of right side wall is respectively equipped with connecting hole on one, upper connecting hole face setting, a left side for elevating mechanism 18 of cultrating described in two
Preceding upper end and right front upper end upper through-hole before being respectively equipped with, the left front upper end and right front upper end for elevating mechanism 18 of cultrating pass through respectively wears
The left side wall front end and right side wall front end of upper through-hole and upper lag bolt and lifting platform 7 in upper connecting hole are affixed before entering)；It is described
Fine adjustment block 13 it is horizontally disposed, 13 upper surface of fine adjustment block is equipped with left support plate and right support plate, the left support plate of fine adjustment block 13 and
The rear end of right support plate is equipped with a lower long hole 13-1 along respective length direction respectively, and lower long hole 13-1 face described in two is set
It sets, the left back lower end and right posterior end for elevating mechanism 18 of cultrating are slidably connected by a lower stay bolt and two lower long hole 13-1
(the left back lower end and right posterior end for elevating mechanism 18 of cultrating are respectively equipped with rear lower through-hole, the left back lower end for elevating mechanism 18 of cultrating
It is slidably connected with right posterior end by lower stay bolt in rear lower through-hole described in penetrating two and two lower long hole 13-1), it cuts
The left front lower end and right front lower end of shape elevating mechanism 18 pass through the left support plate front end of a lower lag bolt Yu fine adjustment block 13 respectively
With right support plate front end it is affixed (left support plate of fine adjustment block 13 and the front end of right support plate are respectively equipped with connecting hole, two
The lower connecting hole face setting, the left front lower end and right front lower end of the elevating mechanism 18 of cultrating are respectively equipped with front lower logical
Hole, the left front lower end and right front lower end for elevating mechanism 18 of cultrating are respectively by short under penetrating in preceding lower through-hole and lower connecting hole
The left support plate front end and right support plate front end of bolt and fine adjustment block 13 are affixed)；Two of elevating mechanism 18 front and backs of cultrating are parallel
It is equipped with radial tapped through hole in the middle part of the connecting column 9 of setting, the diameter of connecting column 9 described in the double rotational directions screw rod 11 and two
It is threadedly coupled to tapped through hole, the front end of double rotational directions screw rod 11 is equipped with handle 12；
The fine adjustment block 13 is arranged on table base 17, positioned at fine adjustment block 13 on the table base 17
Four lateral positions are symmetrical arranged there are four micrometer adjusting screw mounting blocks 14, and the lateral surface middle part of each micrometer adjusting screw mounting blocks 14 is all provided with
There is the fine thread hole perpendicular to fine adjustment block 13, is threaded in the fine thread hole of each micrometer adjusting screw mounting blocks 14 thin
Tooth screw 15(uses 6 class precisions, screw pitch for the fine-pitch screw of 0.5 mm), the end of fine-pitch screw 15 described in four abuts against
(fix the position of fine adjustment block 13) on the opposite side of fine adjustment block 13.
In present embodiment, ceramic screw and thermal insulation board 4 can prevent heat be transmitted to from brass platform 3 lifting platform 7 and
Following structure plays heat-insulated effect.
Present embodiment is in the assembling process of graphite cannula 2, it is ensured that corresponding fit tolerance between hole and axis, brass platform
Between 3 installation bore dia and the outer circumference surface diameter of graphite cannula 2 use H7/g6 clearance fit, the diameter of bore of graphite cannula 2 and
F8/h7 clearance fit is used between micro- 1 knife handle outside diameter of cutter, to facilitate repeated disassembled and assembled cutter substrate.
The thermal conductivity of brass platform 3 and graphite cannula 2 is higher, can transfer out the heat in micro- milling cutter to come and be transmitted to outside.
Thermocouple fixed station 5 is equipped in order to facilitate the installation of temperature element thermocouple 6, in heat-insulated fixed mechanism to carry out it
Fixed, thermocouple 6 is equipped with external screw thread, is connected through a screw thread and fastens with thermocouple fixed station 5, realizes thermocouple 6 and coating
The system integration of three-dimensional precise displacement work table.
To adapt to hot vacuum environment and guaranteeing the consistency of material thermal deformation under the high temperature conditions, lifting displacement mechanism is used
304 stainless steel materials are made.The adjusting range for going up and down displacement mechanism is ± 10 mm, and double rotational directions screw rod 11 uses 5 class precisions, spiral shell
Away from the fine thread for 0.5 mm, to realize that precision micro-displacement adjusts.
The in-plane displancement of workbench uses 5 class precisions, screw pitch to be adjusted for the fine-pitch screw 15 of 0.5 mm, to guarantee
X is to the precision being displaced with Y-direction.
It is connected through a screw thread on the four direction of table base 17 and is symmetrically installed four micrometer adjusting screw mounting blocks 14, often
Hole and fine-pitch screw 15 is threaded in a micrometer adjusting screw mounting blocks 14 to cooperate, screw end head on 13 side of fine adjustment block with
The position of fixed fine adjustment block.In order to avoid screw is got loose in the course of work, screw is carried out locking with stop nut 16.
The micro- cutter coat three-dimensional precise displacement work table applied under this hot vacuum environment is applied to the micro- knife of diamond coatings
Have in chemical gas-phase deposition system, can effectively adjust micro- tool position, meet diamond chemical vapour deposition reaction
When environment, adjusting range and precision etc. require.
Specific embodiment 2: as shown in Figure 1, present embodiment is made furtherly to specific embodiment one
Bright, the diameter of bore of the graphite cannula 2 is 3mm, 4mm, 5mm or 1/8 inch (application demand to meet micro- cutter).
Graphite cannula 2 can be processed into different size inner holes to adapt to the outer diameter of different micro- knife handles, to form graphite
Part series is covered, the applicability of this workbench is expanded.
Specific embodiment 3: as shown in Figure 1, present embodiment be specific embodiment one or two is made it is further
Illustrate, the graphite cannula 2 is drilled with coaxial threaded hole four, the threaded hole four of graphite cannula 2 and brass platform 3 with 3 side of brass platform
Internal screw thread is connected with jackscrew, to the micro- cutter 1 of fixation.
In present embodiment, in order to keep the working depth of micro- cutter before deposition adjustable, and substrate is avoided to loosen,
Graphite cannula 2 is drilled with coaxial threaded hole four with 3 side of brass platform, and the axial position of micro- cutter 1 is fixed with jackscrew.
Specific embodiment 4: present embodiment is made to specific embodiment one as shown in Fig. 1, Fig. 4 and Fig. 5
It further illustrates, the elevating mechanism 18 of cultrating includes eight sheet metal components, 8, two connecting columns 9 and four locking nuts 19, often
Sheet metal component 8 described in two forms and is equipped with hinge hole in the middle part of an each sheet metal component 8 of the part 20(that cultrates, in part 20 of each cultrating
Portion is arranged in a crossed manner, and part 20 of each cultrating passes through the connection bolted splice that penetrates in the hinge hole), part of cultrating described in four
20 form one group two-by-two, and two groups of parts of cultrating are correspondingly arranged up and down, and every group of part or so of cultrating is set side by side, and superposed one group is cut
The two preceding lower ends and two posterior ends of shape part and positioned at lower part one group of part of cultrating two preceding upper ends and two after upper end
It is respectively equipped with circular hole, the both ends of two connecting columns 9 are equipped with external screw thread, before two of superposed one group of part of cultrating
Company described in penetrating one is slided in the circular hole of lower end and in the circular hole of two preceding upper ends of one group of part of cultrating of lower part
Connect column 9, two of one group of part of cultrating in the circular hole of two posterior ends of superposed one group of part of cultrating and positioned at lower part
It is to keep the amount of movement of two sides consistent that sliding, which penetrates another connecting column 9(, in the circular hole of upper end afterwards), the both ends of each connecting column 9 are equal
Fastening is combined with a locking nut 19.
Specific embodiment 5: as shown in Figure 1, present embodiment be specific embodiment one or four is made it is further
Illustrate, screw thread of the radial tapped through hole of each connecting column 9 close to 12 one end of handle is left hand thread, each connecting column
The screw thread of the 9 radial tapped through hole other end is right-handed thread.
Specific implementation six: as shown in Fig. 1 and Fig. 4, present embodiment is made furtherly to specific embodiment one
Bright, the double rotational directions screw rod 11 is located at the stop nut 1 for being equipped on front side of handle 12 and being threadedly coupled with double rotational directions screw rod 11.
Specific embodiment 7: as shown, present embodiment is the further explanation made to specific embodiment one,
Stop nut 2 16 is combined on each fine-pitch screw 15.
The course of work: after completing overall structure assembly by Fig. 1, rotational handle 12 drives lifting displacement mechanism to transport along Z-direction
Dynamic, rotating clockwise rises lifting platform 7, otherwise decline, until adjusting micro- cutter is located at proper height.Pass through rotation closely-pitched again
Screw 15 adjusts position of the in-plane displancement mechanism in XOY plane, two fine-pitch screws in X-direction for its X to
Displacement is adjusted, and two fine-pitch screws in Y direction are then responsible for it and are adjusted in the displacement of Y-direction, and micro- cutter is finally made to be in three-dimensional
Rational position in space, so that diamond be allowed smoothly efficiently to carry out in the chemical vapor deposition processes of micro- tool surface.
Claims (7)
1. the micro- cutter coat three-dimensional precise displacement work table applied under a kind of hot vacuum environment, it include lifting displacement mechanism and
In-plane displancement mechanism；It is characterized by: the micro- cutter coat three-dimensional precise displacement work table applied under the hot vacuum environment
It further include heat-insulated fixed mechanism；The heat-insulated fixed mechanism includes graphite cannula (2), brass platform (3), thermal insulation board (4), thermocouple
Fixed station (5) and thermocouple (6), the lifting displacement mechanism include lifting platform (7), double rotational directions screw rod (11), handle (12)
And elevating mechanism of cultrating (18), the in-plane displancement mechanism include fine adjustment block (13), table base (17), four fine tuning spiral shells
Follow closely mounting blocks (14) and four fine-pitch screws (15)；
The thermal insulation board (4) is horizontally set on lifting platform (7) and thermocouple fixed station (5), and the brass platform (3) is horizontal
It is arranged on thermal insulation board (4), is coaxially arranged with multiple threaded holes one, brass on brass platform (3), thermal insulation board (4) and lifting platform (7)
Threaded hole two, brass platform (3), thermal insulation board (4) and liter are coaxially arranged on platform (3), thermal insulation board (4) and thermocouple fixed station (5)
Drop platform (7) is fastenedly connected by the ceramic screw screwed in multiple threaded holes one, and brass platform (3) is equipped with a mounting hole, brass
It is set in mounting hole described in platform (3) graphite cannula (2), the lower end of micro- cutter (1) is mounted in the graphite cannula (2), institute
The thermocouple (6) stated comes with external screw thread, the spiral shell of thermocouple (6) and brass platform (3), thermal insulation board (4) and thermocouple fixed station (5)
Pit two is fastenedly connected, and brass platform (3), thermal insulation board (4) are connect with thermocouple fixed station (5) three by multiple fastening screws；
Lifting platform (7) lower end surface is equipped with left side wall and right side wall, and the left side wall of lifting platform (7) and the rear end of right side wall are respectively along each
From length direction be equipped with one upper long hole (7-1), upper long hole (7-1) face setting, elevating mechanism of cultrating described in two
(18) upper end is slidably connected by a upper stay bolt and two upper long holes behind left back upper end and the right side, elevating mechanism of cultrating (18)
Left front upper end and right front upper end pass through respectively a upper lag bolt and lifting platform (7) left side wall front end and right side wall front end it is solid
It connects；The fine adjustment block (13) is horizontally disposed, and fine adjustment block (13) upper surface is equipped with left support plate and right support plate, fine adjustment block (13)
Left support plate and right support plate rear end respectively along respective length direction be equipped with a lower long hole (13-1), described in two under
The setting of long hole (13-1) face, the left back lower end and right posterior end of elevating mechanism of cultrating (18) pass through a lower stay bolt and two
Lower long hole (13-1) is slidably connected, and the left front lower end and right front lower end of elevating mechanism of cultrating (18) pass through a lower lag bolt respectively
It is affixed with the left support plate front end of fine adjustment block (13) and right support plate front end；Two of elevating mechanism (18) front and backs of cultrating are set in parallel
Radial tapped through hole, the double rotational directions screw rod (11) and connecting column (9) described in two are equipped in the middle part of the connecting column (9) set
Radial tapped through hole be threadedly coupled, the front end of double rotational directions screw rod (11) is equipped with handle (12)；
The fine adjustment block (13) is arranged on table base (17), and fine adjustment block is located on the table base (17)
(13) four lateral positions are arranged symmetrically, and there are four micrometer adjusting screw mounting blocks (14), the outsides of each micrometer adjusting screw mounting blocks (14)
Middle face is equipped with the fine thread hole perpendicular to fine adjustment block (13), in the fine thread hole of each micrometer adjusting screw mounting blocks (14)
It is threaded with fine-pitch screw (15), it is opposite to act against fine adjustment block (13) for the end of fine-pitch screw (15) described in four
On side.
2. the micro- cutter coat three-dimensional precise displacement work table applied under hot vacuum environment according to claim 1, special
Sign is: the diameter of bore of the graphite cannula (2) is 3mm, 4mm, 5mm or 1/8 inch.
3. the micro- cutter coat three-dimensional precise displacement work table applied under hot vacuum environment according to claim 1 or 2,
Be characterized in that: the graphite cannula (2) is drilled with coaxial threaded hole four, graphite cannula (2) and brass platform with brass platform (3) side
(3) four internal screw thread of threaded hole is connected with jackscrew, to the micro- cutter of fixation (1).
4. the micro- cutter coat three-dimensional precise displacement work table applied under hot vacuum environment according to claim 1, special
Sign is: the elevating mechanism of cultrating (18) includes eight sheet metal components (8), two connecting columns (9) and four locking nuts
(19), sheet metal component described in every two (8) forms a part of cultrating (20), and part (20) of cultrating described in four forms one two-by-two
Group, two groups of parts of cultrating are correspondingly arranged up and down, and every group of part or so of cultrating is set side by side, before two of superposed one group of part of cultrating
Lower end and two posterior ends and positioned at lower part one group of part of cultrating two preceding upper ends and two after upper end be respectively equipped with circular hole,
The both ends of two connecting columns (9) are equipped with external screw thread, the circular hole of two preceding lower ends of superposed one group of part of cultrating
It is interior and in the circular hole of two preceding upper ends of one group of part of cultrating of lower part sliding penetrate one described in connecting column (9), position
The upper end after two of one group of part of cultrating in the circular hole of two posterior ends of one group of part of cultrating on top and positioned at lower part
Sliding penetrates another connecting column (9) in circular hole, and the both ends of each connecting column (9), which fasten, is combined with a locking nut (19).
5. the micro- cutter coat three-dimensional precise displacement work table applied under hot vacuum environment according to claim 1 or 4,
Be characterized in that: the radial tapped through hole of each connecting column (9) is left hand thread close to the screw thread of handle (12) one end, often
The screw thread of the radial tapped through hole other end of a connecting column (9) is right-handed thread.
6. the micro- cutter coat three-dimensional precise displacement work table applied under hot vacuum environment according to claim 1, special
Sign is: the double rotational directions screw rod (11) is located at locking equipped with being threadedly coupled with double rotational directions screw rod (11) on front side of handle (12)
Nut one (10).
7. the micro- cutter coat three-dimensional precise displacement work table applied under hot vacuum environment according to claim 1, special
Sign is: being combined with stop nut two (16) on each fine-pitch screw (15).
Priority Applications (1)
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| CN107740067B (en) * | 2017-09-28 | 2020-03-13 | 哈尔滨工业大学 | Chemical vapor deposition device and method for micro-cutter diamond coating |
| CN112730744B (en) * | 2020-12-21 | 2023-02-03 | 中国科学院宁波材料技术与工程研究所 | Composite material interface mechanics evaluation device and method based on microdroplet debonding method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201143628Y (en) * | 2007-12-28 | 2008-11-05 | 比亚迪股份有限公司 | Adjustable jigs for wire cutting process |
| CN102708930A (en) * | 2012-05-29 | 2012-10-03 | 合肥工业大学 | Three-dimensional decoupled micro-displacement stage with floating driver |
| CN103234481A (en) * | 2013-04-28 | 2013-08-07 | 哈尔滨工业大学 | High-efficiency and high-precision detection device for circular arc roundness of cutter point of diamond cutter |
| CN106282964A (en) * | 2016-08-18 | 2017-01-04 | 哈尔滨工业大学 | The electrode system of micro-tool surface hot-filament cvd reactor diamond coatings |
| CN106498367A (en) * | 2016-10-21 | 2017-03-15 | 哈尔滨工业大学 | A kind of compact type vacuum reaction unit for chemical vapor deposition diamond film |
-
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201143628Y (en) * | 2007-12-28 | 2008-11-05 | 比亚迪股份有限公司 | Adjustable jigs for wire cutting process |
| CN102708930A (en) * | 2012-05-29 | 2012-10-03 | 合肥工业大学 | Three-dimensional decoupled micro-displacement stage with floating driver |
| CN103234481A (en) * | 2013-04-28 | 2013-08-07 | 哈尔滨工业大学 | High-efficiency and high-precision detection device for circular arc roundness of cutter point of diamond cutter |
| CN106282964A (en) * | 2016-08-18 | 2017-01-04 | 哈尔滨工业大学 | The electrode system of micro-tool surface hot-filament cvd reactor diamond coatings |
| CN106498367A (en) * | 2016-10-21 | 2017-03-15 | 哈尔滨工业大学 | A kind of compact type vacuum reaction unit for chemical vapor deposition diamond film |
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