CN105738281B - The single abrasive particle that a kind of spherical mounted point repaiies hard crisp test specimen in advance continuously scratches act of interference test method - Google Patents
The single abrasive particle that a kind of spherical mounted point repaiies hard crisp test specimen in advance continuously scratches act of interference test method Download PDFInfo
- Publication number
- CN105738281B CN105738281B CN201610077962.6A CN201610077962A CN105738281B CN 105738281 B CN105738281 B CN 105738281B CN 201610077962 A CN201610077962 A CN 201610077962A CN 105738281 B CN105738281 B CN 105738281B
- Authority
- CN
- China
- Prior art keywords
- test specimen
- abrasive particle
- mounted point
- spherical mounted
- scratching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N19/00—Investigating materials by mechanical methods
- G01N19/06—Investigating by removing material, e.g. spark-testing
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Single abrasive particle for repairing hard crisp test specimen in advance the invention discloses a kind of spherical mounted point continuously scratches act of interference test method, belong to the material properties test in mechanical processing and precise and ultraprecise machining field, by the way that hard crisp test specimen is fixed on electro spindle, on-line dynamic balancing is carried out to the test specimen；Then the test specimen is carried out to repair disk using spherical mounted point, reaches end face run-out and roughness requirements needed for test；The subsequent top that changes the outfit is connected with the tool heads of single abrasive particle, and is carried out in replacement process to knife；Scratching test is finally entered, test specimen is to specify rotating speed to rotate, and tool heads form interference spiral scratch in test specimen end face to specify cutting-in radial feed, and measuring system gathers the physical quantitys such as scratching power, acoustic emission signal in the process.The present invention can simulate the act of interference between high-speed grinding process abrasive particle.Dependence test result can be used for the further investigation of grinding principle and the optimization of grinding parameter.
Description
Technical field
The invention belongs to the material properties test in being machined and precise and ultraprecise machining fields, and in particular to a kind of
The single abrasive particle that spherical mounted point repaiies hard crisp test specimen in advance continuously scratches act of interference test method.
Background technology
Grinding process can be regarded as abrasive surface and largely arrange irregular, the irregular different abrasive particle of distribution
The working angles completed jointly.In scientific research, complicated phenomenon is often abstracted into a kind of pattern of simplification, to inquire into some originally
The problem of matter.The shear action for forming the tiny abrasive particle of emery wheel is the basis of grinding, and single abrasive grain cutting adds as grinding
The basic model of work becomes a kind of important means of the complicated ablation of understanding.In actual grinding process, on the grinding tools such as emery wheel
Abrasive particle interferes on the same position of machined surface, complicates the form of abrasive particle removal material, therefore abrasive machining
The formation of middle machined surface is often more abrasive grain cuttings on same position, cultivated plough or scratching effect as a result, therefore studying
The interference effect of more abrasive particles on the surface adds power, temperature, the chip formation mechanism of material and the workpiece in analysis grinding process
Work surface quality has important directive significance.
Many scholars have experimentally done substantial amounts of work in single abrasive particle scratching, have developed relevant test method and its dress
It puts, but due to the shortcoming of research technique and experimental rig, does not all account for the influence that more abrasive particles interfere, more abrasive particles
The research interfered also rests on simulation stage mostly, is such as removed using the material of Boolean calculation emulation abrasive particle interventional procedures,
Or analysis is modeled to the interventional procedures of more abrasive particles using numerical value emulation method.Also have that study more abrasive particles on a small quantity mutually dry
The device of influence is related to, such as arranges more abrasive particles with certain relative angle and radial spacing, scratching when generates interference
Effect, but arrangement error of the more abrasive particles in radial spacing is larger (10 μm of resolution ratio), therefore more abrasive particles interfere
When, the control accuracy of actual amount of interference can only carry out the interference of some large scale (being more than 100 μm) abrasive particles not higher than 10 μm
Test, while device structure is complicated, adjustment process is largely dependent upon the experience of operator, is not carried out automation adjustment
And position feedback control, thus it is difficult to realize high-precision act of interference test.
The content of the invention
It is an object of the invention in place of overcome the deficiencies in the prior art, provide a kind of spherical mounted point to repair hard crisp test specimen in advance
Single abrasive particle continuously scratch act of interference test method, repair disk and precise motion feedback control with reference to Ultra-precision Turning, utilize
Single abrasive particle can make the scratching act of interference of more abrasive particles, and device structure is simple, and the control accuracy of abrasive particle amount of interference is high；Phase
The further investigation that test result can be used for grinding mechanism and grinding skin forming process is closed, so as to optimize grinding ginseng
Number improves product quality.
The technical solution adopted by the present invention to solve the technical problems is：
The single abrasive particle that a kind of spherical mounted point repaiies hard crisp test specimen in advance continuously scratches act of interference test method, including：
1) hard crisp test specimen is fixed on electro spindle, test specimen can be rotated by electro spindle；The test specimen is carried out online dynamic flat
Weighing apparatus；
2) test specimen is carried out to repair disk using spherical mounted point, to form end face run-out amount better than IT1 grades in surface of test piece, table
Face average roughness Ra repaiies disk area better than 10nm's, is as follows：
Disk is repaiied in 2-1) spherical mounted point roughing：Spherical mounted point and test specimen are cooled down while repairing disk, test specimen when repairing disk
The range of speeds for 3000~10000rpm, spherical mounted point is with the rotating speed rotation of 8000~20000rpm, while on the outside of test specimen
With 10~50 μm of cutting-in along test specimen radial feed, feed speed scope is 0.4~1.2mm/s, and feeding distance is test specimen diameter
1/4~1/2；
Disk is repaiied in 2-2) spherical mounted point finishing：Spherical mounted point and test specimen are cooled down while repairing disk, test specimen when repairing disk
The range of speeds for 3000~10000rpm, spherical mounted point is with the rotating speed rotation of 8000~20000rpm, while on the outside of test specimen
With 2~10 μm of cutting-in along test specimen radial feed, feed speed scope is 0.1~0.3mm/s, and feeding distance is test specimen diameter
1/4~1/2；
3) spherical mounted point touching tool setting gauge determines to repair difference in height h of the disk area with tool setting gauge to knife plane0；By pot mill
Head is changed to the tool heads that top is connected with single abrasive particle, the abrasive particle touching tool setting gauge on tool heads top, then tool heads edge is tried
The axial direction of part rotation moves up h0+ δ, so that the abrasive particle on tool heads top is located at test specimen and repaiies above disk area at δ, completion pair
Knife；
4) tool heads level is moved to directly over the scratching point for repairing disk area, and moves down δ+apSo that scratching depth is ap；Root
According to the scratching radius R where scratching speed v and the scratching point that need to be tested, pass throughThe setting speed n of calculation testing piece；
According to interference ratio ρ, the arc radius r of single abrasive particle that need to be tested, scratching depth ap, pass through
The radial feed speed s of calculating instrument head；Test specimen is rotated according to setting speed n, and tool heads according to radial feed speed s and are drawn
Wipe depth apAlong test specimen radial feed, so that abrasive particle scratches to form the cuts of predetermined interference degrees repairing disk area, during this
Data during being scratched by the measuring system acquisition being connected with tool heads.
In one embodiment：In the step 4), tool heads are according to radial feed speed s and scratching depth apAlong test specimen radially
It is fed while feeding along test specimen rotation axis direction.
In one embodiment：The abrasive particle is diamond, CBN, oxide ceramics or nitride ceramics, and abrasive particle shape is ball
Shape, cone or polygonal pyramid shape；The abrasive particle is fixed in tool heads top by mechanical grip, plating or soldering；The tool heads
For pressure head.
In one embodiment：The test specimen is disc；Described when repairing disk, the feeding distance of spherical mounted point is less than test specimen half
Disk area is repaiied as circular ring shape in footpath.
In one embodiment：The measuring system be dynamometry and acoustic emission system, including mutual signal connection dynamometer, sound
Emission system, data collecting card and signal amplifier；The tool heads are connected with dynamometer and acoustic emission system.
In one embodiment：The intrinsic frequency of the dynamometer is higher than 4KHz, and dynamometry precision is better than 0.01N；The data are adopted
The sample rate of truck is higher than 2M/s.
In one embodiment：The tool heads are superior in the axial direction and the positioning accuracy of radial direction rotated along test specimen
0.1 μm, which passes through displacement sensor and the cooperation control of corresponding position feedback system.
In one embodiment：The positioning accuracy of the tool setting gauge is better than 0.1 μm.
In one embodiment：The cut is continuous helical shape cut, and the cut number of turns is more than 3.
In one embodiment：The tool heads axis is parallel to test specimen rotation axis；The spherical mounted point axis is parallel to examination
Part rotation axis；The direction of rotation of test specimen and the direction of rotation of spherical mounted point are identical or opposite when repairing disk.
In addition to being described, the connection mode between the single treatment process of each device according to the present invention and each device is equal
For this field routine techniques, it is not described in detail in herein.
Compared with background technology, it has the following advantages that the technical program：
1. the high precision measurement method of single abrasive particle scratching act of interference disclosed in this invention, utilizes single abrasive particle
The scratching act of interference of more abrasive particles is made, depth, different interference degrees, difference are scratched different available for single abrasive particle is studied
Act of interference under speed is scratched, due to being that continuous scratching can collect scratching force signal with accurate stable；Device structure is simple,
The control accuracy of abrasive particle amount of interference is high；Dependence test result can be used for the depth of grinding mechanism and grinding skin forming process
Enter research, so as to optimize grinding parameter, improve product quality.
2. the present invention carries out on-line dynamic balancing to main shaft-sample system, the significantly end face in high-speed rotation is avoided
Bounce or circular runout, so as to keep the steady contact state between abrasive particle and test specimen；Meanwhile test specimen is carried out using spherical mounted point
On-line machining, while the form accuracy and surface smoothness of test specimen are improved, improve test specimen rotating accuracy and grain motion essence
Degree so as to ensure that the relative motion precision between abrasive particle and test specimen, coordinates dynamic balancing, further ensures between abrasive particle and test specimen
It above can continually and steadily be contacted in longer scratching distance, test scratched so as to fulfill the high-speed, high precision of abrasive particle.
3. according to the common sense of this field, the machined surface quality of test specimen must be better than the surface that related grinding process obtains
Quality is preferably higher by an order of magnitude, and obtained cut test result could be used for the analysis of grinding process cutting mechanisms；Due to
The present invention greatly improves the quality of surface of test piece, therefore disclosure satisfy that wanting for the high accuracy analysis such as grinding process cutting mechanisms
It asks, the research available for Material Removal Mechanism in process of friction and wear and grinding.
4. abrasive particle scratching depth is more than 5 times or more the stability that just can guarantee scratching of surface of test piece fluctuating quantity, due to
The present invention greatly improves the quality of surface of test piece, and surface of test piece precision and finish are good, even the abrasive particle of small grain size also can
It realizes that stablizing high-precision scratches, therefore can be used for the single abrasive particle scratching test of small grain size abrasive particle, further expanded this hair
Bright application range and single abrasive particle scratching experimental technique of the industry is greatly facilitated.
Description of the drawings
The invention will be further described with reference to the accompanying drawings and examples.
Fig. 1 is the test method principle schematic of the present invention.
Fig. 2 repaiies disk Principle of Process schematic diagram for the present invention's.
Fig. 3 is the act of interference schematic diagram of the present invention.
Fig. 4 is the comparison that surface of test piece three-dimensional appearance before and after disk is repaiied in the embodiment of the present invention, and wherein Fig. 4 a is repair (warp before disk
Conventional plane fine grinding technology is processed), after Fig. 4 b is repair disk.
Fig. 5 is the comparison that surface of test piece end face run-out amount before and after disk is repaiied in the embodiment of the present invention, before wherein Fig. 5 a is repair disk
(being processed through conventional planar accurate grinding technique), end face run-out amount maximum is up to 29.1 μm；After Fig. 5 b is repair disk, end face run-out
It is 9.1 μm to measure maximum.
Reference numeral：Test specimen 1, vacuum cup 2, tool heads 3 repair disk area 4, tool setting gauge 5, spherical mounted point 6.
Specific embodiment
Present disclosure is illustrated below by embodiment：
Embodiment 1
The single abrasive particle that a kind of spherical mounted point repaiies hard crisp test specimen in advance continuously scratches act of interference test method, used dress
Put including：
Lathe, the firmly crisp test specimen 1 of disc is installed in by vacuum cup 2 on the electro spindle of lathe, and test specimen 1 can pass through electricity
Main shaft rotates；
Dynamic balance instrument, for carrying out on-line dynamic balancing to test specimen 1；
Spherical mounted point 6, for carrying out repairing disk to 1 end face of test specimen；The spherical mounted point 6 is dismantledly installed in stent, and leads to
It crosses stent and is movably installed in lathe；6 axis of spherical mounted point is parallel to 1 rotation axis of test specimen；
Tool heads 3, for carrying out scratching test；3 top of tool heads is connected with the abrasive particle of single；The tool heads 3 can be with
Spherical mounted point is installed in stent with mutually replacing assembly and disassembly, and passes through stent and be movably installed in lathe；3 axis of tool heads parallel to
1 rotation axis of test specimen, the axial direction and move in the radial direction that tool heads 3 can be rotated in test specimen 1, and in both direction
Positioning accuracy is superior to 0.1 μm, which is ensured by grating scale and its corresponding position feedback system cooperation control；
Tool setting gauge 5, for being carried out to spherical mounted point 6 and tool heads 3 to knife, positioning accuracy is better than 0.1 μm；It is installed in machine
Bed, and the relative position between test specimen 1 is kept fixed；
Measuring system, for dynamometry and acoustic emission system, dynamometer, acoustic emission system including the connection of mutual signal, data
Capture card and signal amplifier；The tool heads 3 are connected with dynamometer and acoustic emission system；The connection of data acquisition card signal calculates
Machine；The intrinsic frequency of dynamometer is higher than 4KHz, and dynamometry precision is better than 0.01N；The sample rate of data collecting card is higher than 2M/s.
Air-cooler, for repairing the spherical mounted point during disk and tool heads and test specimen during test specimen and scratching
Cooling is blowed.
Specific test method is as follows：
1) sapphire wafer, that is, test specimen 1 of 6 inches (diameter about 150mm) is fixed on lathe with 2 clamping of vacuum cup
On electro spindle, test specimen 1 can be rotated by electro spindle；On-line dynamic balancing is carried out to the test specimen 1 with dynamic balance instrument, to reduce test specimen 1
Vibration when high speed rotates, so as to ensure that abrasive particle and test specimen 1 can be contacted steadily during scratching；
2) test specimen 1 is carried out repairing disk using spherical mounted point 6, first carries out roughing, then finished, in test specimen 1
Surface forms 3 μm of end face run-out amount, and the circular ring shape of surface average roughness Ra 10nm repaiies disk area 4, to reduce by 1 end face of test specimen
Jerk value improves surface quality, is further ensured that during scratching that abrasive particle and test specimen 1 can be contacted steadily；It is as follows：
Disk is repaiied in 2-1) spherical mounted point roughing：Air-cooler is opened while repairing disk, makes cold wind alignment spherical mounted point 6 and test specimen
1 is cooled down, and the rotating speed of test specimen 1 is 3000rpm when repairing disk, and spherical mounted point 6 is with the rotating speed rotation of 10000rpm, while from test specimen
With 10 μm of cutting-in along test specimen radial feed, feed speed scope is 0.4~1.2mm/s, feeding distance 45mm in 1 outside；
Disk is repaiied in 2-2) spherical mounted point finishing：Air-cooler is opened while repairing disk, makes cold wind alignment spherical mounted point 6 and test specimen
1 is cooled down, and the rotating speed of test specimen 1 is 3000rpm when repairing disk, and spherical mounted point 6 is with the rotating speed rotation of 10000rpm, while from test specimen
With 2 μm of cutting-in along test specimen radial feed, feed speed scope is 0.1~0.3mm/s, feeding distance 45mm in outside；
Fig. 4 and Fig. 5 are shown in the comparison for repairing 1 three-dimensional surface shape of test specimen and end face run-out amount before and after disk respectively；
3) spherical mounted point 6 touches tool setting gauge 5, determines to repair difference in height h of the disk area 4 with tool setting gauge 5 to knife plane0；By ball
Shape bistrique 6 is removed from stent, is changed to the tool heads 3 that top plating is connected with the spherical wear particles of single radius 0.1mm, instrument
First 3 top moves closer to tool setting gauge 5, and when the generation mutation of measuring system data, the abrasive particle on first 3 top of representational tool is just touched
Tool setting gauge 5 is to knife plane, then the axial direction that tool heads 3 are rotated along test specimen moves up h0+ δ, so that the abrasive particle on 3 top of tool heads
It repaiies above disk area 4 at δ, is completed to knife positioned at test specimen 1, so as to ensure follow-up test when can accurately control scratching depth；
4) every test parameter is calculated：
According to the scratching radius R (mm) where scratching speed v (m/s) and the scratching point that need to be tested, pass through
The setting speed n of calculation testing piece 1；
Among the present embodiment, the scratching speed v of required test takes 30~60m/s, and circular ring shape repaiies the radius of disk area
For 30~75mm, repair at this and the radius of scratching test is carried out in disk area be also set to 30~75mm, with this scratch speed and
The range of speeds of radius calculation testing piece simultaneously takes an appropriate median 8000rpm as rotating speed n；With this condition,
The corresponding scratching radius R of scratching speed of 30m/s is 35.8mm, and the corresponding scratching radius R of scratching speed of 60m/s is
71.6mm；
Interference degrees are generally with interference ratio ρ (mm/r2) characterize, the definition for interfering ratio is：
Wherein, s (mm/r) is every turn of amount of feeding along test specimen radial direction of tool heads, for the radial feed speed of characterization tool head
Degree；L (mm) is scratching width；R (mm) is the arc radius of single abrasive particle, and arc radius is the circular arc of the two-dimensional section of abrasive particle
Radius, when abrasive particle for it is spherical when arc radius it is equal with abrasive particle radius；ap(mm) it is scratching depth；
According to the interference ratio ρ that need to be tested, the arc radius r of single abrasive particle and scratching depth ap, utilize above-mentioned interference ratio
The defined formula of rate, passes throughThe radial feed speed s of tool heads is calculated；
Among the present embodiment, the interference ratio ρ of required test is set to 25%, 50%, 75%；Single spherical wear particles
Arc radius r is 0.1mm；Scratch depth ap10 μm, 20 μm, 30 μm, 40 μm, 50 μm are set to, calculates corresponding s respectively
Value.
As needed, during scratching, the axis direction upper feeding that tool heads make it be rotated in test specimen 1 can be adjusted,
Make scratching depth apIt changes, the scratching depth a of two adjacent rings cutpDifference be calculated as h, exist so as to study single abrasive particle
Act of interference under difference scratching depth；In the present embodiment, h=0.
3 level of tool heads is moved to and is repaiied directly over the setting scratching point of disk area 4, and moves down δ+apTo reach setting scratching
Depth ap；Air-cooler is opened, is cooled down cold wind alignment tools first 3 and test specimen 1；Test specimen 1 is according to above-mentioned setting speed n=
8000rpm is rotated, and tool heads 3 are according to the radial feed speed s of setting and scratching depth apAlong 1 radial feed of test specimen, with reference to
The rotation of test specimen 1, so that abrasive particle is repairing the continuous helical shape cut that the scratching formation interference ratio of disk area 4 is ρ, the cut number of turns is big
In 3；Data during being scratched during scratching by dynamometer and the acoustic emission system acquisition being connected with tool heads 3, and
Data collecting card is transmitted to by signal amplifier, then is transmitted to computer and is calculated, scratching power, acoustic emission signal can be obtained
Etc. physical quantitys, for study it is above-mentioned it is various under the conditions of act of interference.
Embodiment 2
1) sapphire wafer, that is, test specimen 1 of 6 inches (diameter about 150mm) is fixed on lathe with 2 clamping of vacuum cup
On electro spindle, test specimen 1 can be rotated by electro spindle；On-line dynamic balancing is carried out to the test specimen 1 with dynamic balance instrument, to reduce test specimen 1
Vibration when high speed rotates, so as to ensure that abrasive particle and test specimen 1 can be contacted steadily during scratching；
2) test specimen 1 is carried out repairing disk using spherical mounted point 6, first carries out roughing, then finished, in test specimen 1
Surface forms 3 μm of end face run-out amount, and the circular ring shape of surface average roughness Ra 10nm repaiies disk area 4, to reduce by 1 end face of test specimen
Jerk value improves surface quality, is further ensured that during scratching that abrasive particle and test specimen 1 can be contacted steadily；It is as follows：
Disk is repaiied in 2-1) spherical mounted point roughing：Air-cooler is opened while repairing disk, makes cold wind alignment spherical mounted point 6 and test specimen
1 is cooled down, and the rotating speed of test specimen 1 is 3000rpm when repairing disk, and spherical mounted point 6 is with the rotating speed rotation of 10000rpm, while from test specimen
With 10 μm of cutting-in along test specimen radial feed, feed speed scope is 0.4~1.2mm/s, feeding distance 45mm in 1 outside；
Disk is repaiied in 2-2) spherical mounted point finishing：Air-cooler is opened while repairing disk, makes cold wind alignment spherical mounted point 6 and test specimen
1 is cooled down, and the rotating speed of test specimen 1 is 3000rpm when repairing disk, and spherical mounted point 6 is with the rotating speed rotation of 10000rpm, while from test specimen
With 2 μm of cutting-in along test specimen radial feed, feed speed scope is 0.1~0.3mm/s, feeding distance 45mm in outside；
3) spherical mounted point 6 touches tool setting gauge 5, determines to repair difference in height h of the disk area 4 with tool setting gauge 5 to knife plane0；By ball
Shape bistrique 6 is removed from stent, is changed to the tool heads 3 that top plating is connected with the spherical wear particles of single radius 0.2mm, instrument
First 3 top moves closer to tool setting gauge 5, and when the generation mutation of measuring system data, the abrasive particle on first 3 top of representational tool is just touched
Tool setting gauge 5 is to knife plane, then the axial direction that tool heads 3 are rotated along test specimen moves up h0+ δ, so that the abrasive particle on 3 top of tool heads
It repaiies above disk area 4 at δ, is completed to knife positioned at test specimen 1, so as to ensure follow-up test when can accurately control scratching depth；
4) every test parameter is calculated：
According to the scratching radius R (mm) where scratching speed v (m/s) and the scratching point that need to be tested, pass through
The setting speed n of calculation testing piece 1；
Among the present embodiment, the scratching speed v of required test takes 10~20m/s, and circular ring shape repaiies the radius of disk area
For 30~75mm, repair at this and the radius of scratching test is carried out in disk area be also set to 30~75mm, with this scratch speed and
The range of speeds of radius calculation testing piece simultaneously takes an appropriate median 3000rpm as rotating speed n；With this condition,
The corresponding scratching radius R of scratching speed of 10m/s is 31.8mm, and the corresponding scratching radius R of scratching speed of 20m/s is
63.6mm；
According to the interference ratio ρ that need to be tested, the arc radius r of single abrasive particle and scratching depth ap, pass throughThe radial feed speed s of tool heads is calculated；
Among the present embodiment, the interference ratio ρ of required test is set to 25%, 50%, 75%；Single spherical wear particles
Arc radius r is 0.2mm；Scratch depth ap10 μm, 20 μm, 30 μm, 40 μm, 50 μm are set to, calculates corresponding s respectively
Value；The axis direction that tool heads are rotated while with s radial feeds with the speed of 0.05mm/s along test specimen is fed down, so that
The scratching depth a of two adjacent rings cutpH=0.1 μm of difference.
3 level of tool heads is moved to and is repaiied directly over the setting scratching point of disk area 4, and moves down δ+apTo reach setting scratching
Depth ap；Air-cooler is opened, is cooled down cold wind alignment tools first 3 and test specimen 1；Test specimen 1 is according to above-mentioned setting speed n=
3000rpm is rotated, and tool heads 3 are according to the radial feed speed s of setting and scratching depth apAlong 1 radial feed of test specimen, simultaneously
With the speed axial feed of 0.05mm/s, with reference to the rotation of test specimen 1, so that abrasive particle is repairing the scratching formation interference ratio of disk area 4
For the continuous helical shape cut of ρ, the cut number of turns is more than 3；It is sent out during scratching by the dynamometer harmony being connected with tool heads 3
Penetrate the data during system acquisition scratching, and pass through signal amplifier and be transmitted to data collecting card, then be transmitted to computer into
Row calculates, and can obtain scratching power, the physical quantitys such as acoustic emission signal, for study it is above-mentioned it is various under the conditions of act of interference.
As needed, the hard brittle material can also be ceramics, silicon chip.
In the embodiment of the present invention, for ease of description, single abrasive particle is spherical shape, but is not limited thereto, and abrasive particle shape is also
Can be cone or polygonal pyramid shape etc., the arc radius r of taper abrasive particle is the round end radius of taper abrasive particle, commercially available on the market
Buy the taper abrasive particle that round end radius is not waited in 50 μm~1mm；Abrasive particle can be diamond, CBN (cubic boron nitride), oxide
Ceramics or nitride ceramics；Abrasive particle shape can also be cone or polygonal pyramid shape；The abrasive particle passes through mechanical grip, plating or pricker
Solid welding is connected on tool heads top；The tool heads can be pressure head or other fixed grain forms.
As needed, repair disk parameter adjusted in following scope and carry out it is one or many repair disk, can be in surface of test piece
End face run-out amount is formed better than IT1 grades, surface average roughness Ra repaiies disk area better than 10nm's：
Disk is repaiied in 2-1) spherical mounted point roughing：Spherical mounted point and test specimen are cooled down while repairing disk, test specimen when repairing disk
The range of speeds for 3000~10000rpm, spherical mounted point is with the rotating speed rotation of 8000~20000rpm, while on the outside of test specimen
With 10~50 μm of cutting-in along test specimen radial feed, feed speed scope is 0.4~1.2mm/s, and feeding distance is test specimen diameter
1/4~1/2；The direction of rotation of test specimen identical can may be reversed with the direction of rotation of spherical mounted point when repairing disk, on the contrary may be used
To increase speed of related movement, processing quality is improved；
Disk is repaiied in 2-2) spherical mounted point finishing：Spherical mounted point and test specimen are cooled down while repairing disk, test specimen when repairing disk
The range of speeds for 3000~10000rpm, spherical mounted point is with the rotating speed rotation of 8000~20000rpm, while on the outside of test specimen
With 2~10 μm of cutting-in along test specimen radial feed, feed speed scope is 0.1~0.3mm/s, and feeding distance is test specimen diameter
1/4~1/2；The direction of rotation of test specimen identical can may be reversed with the direction of rotation of spherical mounted point when repairing disk, on the contrary can be with
Increase speed of related movement, improve processing quality.
Comparative example
It should be noted that the test condition in this comparative example is arranged to not interfere between adjacent cut, in order to right
Than the difference observed cut form, scratch effect, but this comparative example still can reflect that test method using the present invention can be with
Realize the act of interference test of high-speed, high precision.
Hard crisp test specimen is taken, after the processing of conventional planar accurate grinding technique, surface of test piece is divided into two regions, one of area
Domain disk step according to the invention of repairing carries out repairing disk, its surface quality is made to reach end face run-out amount better than IT1 grades, and surface is average thick
Rugosity Ra is better than 10nm, is denoted as and repaiies disk area；Another region is denoted as without repairing disk and does not repair disk area.
Above-mentioned test specimen test method using the present invention is carried out single abrasive particle continuously to scratch, under same test parameter
It repaiies disk area and does not repair and cut is formed in disk area, scratch depth very little can reach micron order, the results show that in scratch depth
In the case of very little, the cut for repairing disk area forms coherent spiral shape, in being evenly spaced on, detects its depth direction error
Less than 1 μm/1mm, show that abrasive particle and test specimen can be contacted continually and steadily in the longer scratching repaiied in disk area apart from upper, so as to
For the high-speed, high precision scratching act of interference test of abrasive particle；And the cut for not repairing disk area cannot form coherent spiral shape,
Cut interval is differed, and the cut depth, scratch width are respectively provided with macroscopic otherness, shows not holding between abrasive particle and test specimen
Continuous to be steadily contacted, it is even more impossible to be used for the scratching act of interference test of the high-speed, high precision of abrasive particle.
The above is only present pre-ferred embodiments, therefore cannot limit the scope implemented of the present invention according to this, i.e., according to
The equivalent changes and modifications that the scope of the claims of the present invention and description are made all should still belong in the range of the present invention covers.
Claims (10)
1. the single abrasive particle that a kind of spherical mounted point repaiies hard crisp test specimen in advance continuously scratches act of interference test method, it is characterised in that：
Including：
1) hard crisp test specimen is fixed on electro spindle, test specimen can be rotated by electro spindle；On-line dynamic balancing is carried out to the test specimen；
2) test specimen is carried out to repair disk using spherical mounted point, to form end face run-out amount better than IT1 grades in surface of test piece, surface is put down
Equal roughness Ra repaiies disk area better than 10nm, is as follows：
Disk is repaiied in 2-1) spherical mounted point roughing：Spherical mounted point and test specimen are cooled down while repairing disk, test specimen turns when repairing disk
Fast scope is 3000~10000rpm, and spherical mounted point is with the rotating speed rotation of 8000~20000rpm, while with 10 on the outside of the test specimen
For~50 μm of cutting-in along test specimen radial feed, feed speed scope is 0.4~1.2mm/s, and feeding distance is the 1/4 of test specimen diameter
~1/2；
Disk is repaiied in 2-2) spherical mounted point finishing：Spherical mounted point and test specimen are cooled down while repairing disk, test specimen turns when repairing disk
Fast scope is 3000~10000rpm, spherical mounted point with the rotating speed rotation of 8000~20000rpm, while on the outside of the test specimen with 2~
For 10 μm of cutting-in along test specimen radial feed, feed speed scope is 0.1~0.3mm/s, feeding distance for test specimen diameter 1/4~
1/2；
3) spherical mounted point touching tool setting gauge determines to repair difference in height h of the disk area with tool setting gauge to knife plane0；Spherical mounted point is replaced
The tool heads of single abrasive particle, the abrasive particle touching tool setting gauge on tool heads top are connected with for top, then tool heads are rotated along test specimen
Axial direction move up h0+ δ so that the abrasive particle on tool heads top is located at test specimen and repaiies at the δ of disk area top, is completed to knife；
4) tool heads level is moved to directly over the scratching point for repairing disk area, and moves down δ+apSo that scratching depth is ap；According to need
Scratching radius R where scratching speed v and the scratching point of test, passes throughThe setting speed n of calculation testing piece；According to
Interference ratio ρ, the arc radius r of single abrasive particle that need to be tested, scratching depth ap, pass throughIt calculates
The radial feed speed s of tool heads；Test specimen is rotated according to setting speed n, and tool heads are deep according to radial feed speed s and scratching
Spend apAlong test specimen radial feed, pass through so that abrasive particle scratches to form the cuts of predetermined interference degrees repairing disk area, during this
Data during the measuring system acquisition scratching being connected with tool heads.
2. the single abrasive particle that a kind of spherical mounted point according to claim 1 repaiies hard crisp test specimen in advance continuously scratches act of interference survey
Method for testing, it is characterised in that：In the step 4), tool heads are according to radial feed speed s and scratching depth apAlong test specimen radially
It is fed while feeding along test specimen rotation axis direction.
3. the single abrasive particle that a kind of spherical mounted point according to claim 1 repaiies hard crisp test specimen in advance continuously scratches act of interference survey
Method for testing, it is characterised in that：The abrasive particle is diamond, CBN, oxide ceramics or nitride ceramics, abrasive particle shape for it is spherical,
Cone or polygonal pyramid shape；The abrasive particle is fixed in tool heads top by mechanical grip, plating or soldering；The tool heads are pressure
Head.
4. the single abrasive particle that a kind of spherical mounted point according to claim 1 repaiies hard crisp test specimen in advance continuously scratches act of interference survey
Method for testing, it is characterised in that：The test specimen is disc；It is described that the feeding distance of spherical mounted point is less than test specimen radius when repairing disk,
Disk area is repaiied as circular ring shape.
5. the single abrasive particle that a kind of spherical mounted point according to claim 1 repaiies hard crisp test specimen in advance continuously scratches act of interference survey
Method for testing, it is characterised in that：The measuring system be dynamometry and acoustic emission system, including mutual signal connection dynamometer, sound
Emission system, data collecting card and signal amplifier；The tool heads are connected with dynamometer and acoustic emission system.
6. the single abrasive particle that a kind of spherical mounted point according to claim 5 repaiies hard crisp test specimen in advance continuously scratches act of interference survey
Method for testing, it is characterised in that：The intrinsic frequency of the dynamometer is higher than 4KHz, and dynamometry precision is better than 0.01N；The data acquisition
The sample rate of card is higher than 2M/s.
7. the single abrasive particle that a kind of spherical mounted point according to claim 1 repaiies hard crisp test specimen in advance continuously scratches act of interference survey
Method for testing, it is characterised in that：The tool heads are superior in the axial direction and the positioning accuracy of radial direction rotated along test specimen
0.1 μm, which passes through displacement sensor and the cooperation control of corresponding position feedback system.
8. the single abrasive particle that a kind of spherical mounted point according to claim 1 repaiies hard crisp test specimen in advance continuously scratches act of interference survey
Method for testing, it is characterised in that：The positioning accuracy of the tool setting gauge is better than 0.1 μm.
9. the single abrasive particle that a kind of spherical mounted point according to claim 1 repaiies hard crisp test specimen in advance continuously scratches act of interference survey
Method for testing, it is characterised in that：The cut is continuous helical shape cut, and the cut number of turns is more than 3.
10. the single abrasive particle that a kind of spherical mounted point according to claim 1 repaiies hard crisp test specimen in advance continuously scratches act of interference
Test method, it is characterised in that：The tool heads axis is parallel to test specimen rotation axis；The spherical mounted point axis is parallel to examination
Part rotation axis；The direction of rotation of test specimen and the direction of rotation of spherical mounted point are identical or opposite when repairing disk.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610077962.6A CN105738281B (en) | 2016-02-04 | 2016-02-04 | The single abrasive particle that a kind of spherical mounted point repaiies hard crisp test specimen in advance continuously scratches act of interference test method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610077962.6A CN105738281B (en) | 2016-02-04 | 2016-02-04 | The single abrasive particle that a kind of spherical mounted point repaiies hard crisp test specimen in advance continuously scratches act of interference test method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105738281A CN105738281A (en) | 2016-07-06 |
| CN105738281B true CN105738281B (en) | 2018-05-25 |
Family
ID=56244884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610077962.6A Active CN105738281B (en) | 2016-02-04 | 2016-02-04 | The single abrasive particle that a kind of spherical mounted point repaiies hard crisp test specimen in advance continuously scratches act of interference test method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105738281B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111640687B (en) * | 2020-06-08 | 2023-03-14 | 郑州磨料磨具磨削研究所有限公司 | Method for determining optimal scribing direction of single crystal wafer |
| CN113686679A (en) * | 2021-08-26 | 2021-11-23 | 山东建筑大学 | High-speed mechanical scribing test method and device for semiconductor crystal |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102519869A (en) * | 2012-01-06 | 2012-06-27 | 北京理工大学 | Method for testing cutting and bonding friction characteristics with point-contact opened-closed type pin-disc friction system |
| CN103630453A (en) * | 2013-11-11 | 2014-03-12 | 湖南大学 | Controllable and high-precision experimental device for researching grinding mechanism |
| CN104759954A (en) * | 2015-05-06 | 2015-07-08 | 广州大学 | Prestress grinding method for revolved body workpiece |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7163434B2 (en) * | 2004-09-27 | 2007-01-16 | Ceradyne, Inc. | Method and apparatus for generating complex shapes on cylindrical surfaces |
| EP2022576A1 (en) * | 2007-08-03 | 2009-02-11 | Wolfgang Linnenbrink | Method of improving the running performance of gearwheels and gear finishing machine for implementing the method |
-
2016
- 2016-02-04 CN CN201610077962.6A patent/CN105738281B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102519869A (en) * | 2012-01-06 | 2012-06-27 | 北京理工大学 | Method for testing cutting and bonding friction characteristics with point-contact opened-closed type pin-disc friction system |
| CN103630453A (en) * | 2013-11-11 | 2014-03-12 | 湖南大学 | Controllable and high-precision experimental device for researching grinding mechanism |
| CN104759954A (en) * | 2015-05-06 | 2015-07-08 | 广州大学 | Prestress grinding method for revolved body workpiece |
Non-Patent Citations (1)
| Title |
|---|
| 单颗金刚石磨粒划擦SiC的实验研究;贺勇;《中国优秀硕士学位论文全文数据库 工程科技Ⅰ辑》;20150215(第2期);正文第11-16页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105738281A (en) | 2016-07-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105571971B (en) | The abrasive grain that diamond cutter has non-ferrous metal test specimen in advance continuously scratches test method | |
| CN104568628B (en) | A kind of grinding experiment method under the conditions of single abrasive particle multistage speed | |
| AU2005271466B2 (en) | Raster cutting technology for ophthalmic lenses | |
| Arif et al. | Analytical model to determine the critical conditions for the modes of material removal in the milling process of brittle material | |
| CN105717030B (en) | A kind of single abrasive grain high speed is continuous to scratch testing machine and its application | |
| CN105738281B (en) | The single abrasive particle that a kind of spherical mounted point repaiies hard crisp test specimen in advance continuously scratches act of interference test method | |
| CN205538587U (en) | Testing machine is wiped to single high -speed drawing in succession of grit | |
| CN105717002B (en) | A kind of single abrasive grain high speed is continuous to scratch act of interference test machine and its application | |
| CN105675492B (en) | Diamond cutter has the abrasive grain scratching interference testing method of non-ferrous metal test specimen in advance | |
| CN105548003B (en) | The abrasive grain scratching that diamond cutter has non-ferrous metal test specimen in advance stops test method fastly | |
| CN105716978B (en) | The single abrasive particle that a kind of spherical mounted point repaiies hard crisp test specimen in advance continuously scratches test method | |
| CN105717031B (en) | The single abrasive particle that a kind of CBN cutters repair ferrous metal test specimen in advance continuously scratches test method | |
| CN106687238B (en) | Processing unit (plant) | |
| CN105717043B (en) | The single abrasive particle that a kind of spherical mounted point repaiies ferrous metal test specimen in advance continuously scratches act of interference test method | |
| CN107457703B (en) | A kind of bronze boart boart wheel disc precise dressing method of the end surface full jumping better than 2 μm | |
| CN105538154B (en) | The single abrasive particle that a kind of CBN cutters repair ferrous metal test specimen in advance continuously scratches act of interference method of testing | |
| CN105717041B (en) | The single abrasive particle that a kind of acted as reference mutual method repaiies hard crisp test specimen in advance continuously scratches test method | |
| CN105699291B (en) | The single abrasive particle that a kind of acted as reference mutual method repaiies hard crisp test specimen in advance continuously scratches act of interference test method | |
| CN112198077A (en) | Single abrasive grain scratching experimental method for pre-repairing hard and brittle material by dip angle method | |
| CN105717042B (en) | The single abrasive particle that a kind of spherical mounted point repaiies ferrous metal test specimen in advance continuously scratches test method | |
| Gong et al. | Research on simulation and experiment for surface topography machined by a novel point grinding wheel | |
| CN109459332A (en) | A kind of parameter controllable type mono-/multi- abrasive grain high speed moving indentation test device | |
| CN105716977B (en) | A kind of acted as reference mutual method repairs the high-speed friction test method of hard brittle material friction pair in advance | |
| CN205483918U (en) | Single high -speed performance testing machine of wading of drying of drawing in succession of grit | |
| CN105606531B (en) | The abrasive grain scratching that CBN cutter repairs ferrous metal test specimen in advance stops test method fastly |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |