CN105717041B - The single abrasive particle that a kind of acted as reference mutual method repaiies hard crisp test specimen in advance continuously scratches test method - Google Patents

The single abrasive particle that a kind of acted as reference mutual method repaiies hard crisp test specimen in advance continuously scratches test method Download PDF

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CN105717041B
CN105717041B CN201610077991.2A CN201610077991A CN105717041B CN 105717041 B CN105717041 B CN 105717041B CN 201610077991 A CN201610077991 A CN 201610077991A CN 105717041 B CN105717041 B CN 105717041B
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test specimen
backing
abrasive particle
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repaiies
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CN105717041A (en
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姜峰
张涛
言兰
徐西鹏
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Huaqiao University
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    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N19/00Investigating materials by mechanical methods
    • G01N19/06Investigating by removing material, e.g. spark-testing

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Abstract

Single abrasive particle for repairing hard crisp test specimen in advance the invention discloses a kind of acted as reference mutual method continuously scratches test method, belong to the material properties test in mechanical processing and precise and ultraprecise machining field, hard crisp test specimen is first subjected to backing, the test specimen and backing are handled using acted as reference mutual method, reach the surface quality needed for test and depth of parallelism requirement;The subsequent top that changes the outfit is connected with the tool heads of single abrasive particle, and is carried out in replacement process to knife;Scratching test is finally entered, test specimen is switched to specified cutting-in to specify rotating speed to rotate under tool heads, tool heads radial feed forms spiral scratch in test specimen end face, and measuring system gathers the physical quantitys such as scratching power, acoustic emission signal in the process.The present invention can ensure between abrasive particle and test specimen to realize high-speed, high precision scratching, dependence test result can be used for the research of Material Removal Mechanism in process of friction and wear and grinding apart from upper steady contact in longer scratching.

Description

The single abrasive particle that a kind of acted as reference mutual method repaiies hard crisp test specimen in advance continuously scratches test method
Technical field
The invention belongs to the material properties test in being machined and precise and ultraprecise machining field, and in particular to a kind of The single abrasive particle that acted as reference mutual method repaiies hard crisp test specimen in advance continuously scratches test method.
Background technology
Abrasive machining process can regard that abrasive surface largely arranges uneven, the irregular different mill of distribution as The working angles that grain is completed jointly.In scientific research, complicated phenomenon is often abstracted into a kind of pattern of simplification, to inquire into The problem of most essential.The shear action of tiny abrasive particle is the basis of grinding, and single abrasive particle scratches, ploughs plough, cutting conduct The basic model of grinding, becomes a kind of important means of the complicated ablation of understanding.
The scratching, plough plough of single abrasive particle, the means of testing of cutting behavior mainly has four kinds of forms:Straight line scratching, wedge surface are drawn Wipe, ball disk scratching and single pendulum scratch.Existing lot of documents and publication analysis are found, four kinds of test methods exist corresponding Deficiency:Straight line scratches and the scratching underspeed (maximum linear velocity only 4m/s) of wedge surface scratching test, it is difficult to simulation well Abrasive machining process (maximum linear velocity is up to 200m/s);Ball disk scratching test method is actually that a kind of typical tribology is surveyed Method for testing, the material removing method in ball disk friction process are very different with the material removing method during abrasive machining, When reaching stable friction phase, removed even without material, at the same it is non-to the form accuracy and surface smoothness requirements of frictional disk Chang Gao;Single pendulum scratching test is considered as that a kind of means of testing of materials process is removed closest to abrasive particle, but measuring stability Difference, since the collection of too short abrasive particle-material removal process physical quantity such as workpiece time of contact, cutting force becomes a problem.
The improved method that some disclosed patents propose single abrasive test, single pendulum scratching test method is improved, Change traditional workpiece is static, abrasive particle rotating manner for abrasive particle is static, workpiece rotating manner, so as to obtain longer cut, because This has the physical quantitys such as longer time collection cutting force, but does not retrieve the relevant paper of these patents and product, mainly Be because the specific implementations of these patented methods there are problems with:It is opposite to abrasive particle and workpiece to transport due to the increase of cut length Dynamic required precision increases substantially, and the above method can not keep being in high-precision steady contact between abrasive particle and workpiece all the time State, therefore, it is difficult to realize stable scratching, the high-speed, high precision it is even more impossible to realize small grain size abrasive particle scratches test.Above problem pole The earth constrains the progress of single abrasive particle scratching experimental technique.
The content of the invention
It is an object of the invention in place of overcome the deficiencies in the prior art, there is provided a kind of acted as reference mutual method repaiies hard crisp examination in advance Single abrasive particle of part continuously scratches test method, can ensure to connect apart from upper stabilization in longer scratching between abrasive particle and test specimen Touch, realize the high-speed, high precision scratching of small grain size abrasive particle, so as to stabilization, accurately gather during single abrasive particle scratching Cutting force, the physical quantity such as chip deformation, dependence test result can be used for material in process of friction and wear and grinding to remove The research of mechanism.
The technical solution adopted by the present invention to solve the technical problems is:
The single abrasive particle that a kind of acted as reference mutual method repaiies hard crisp test specimen in advance continuously scratches test method, including:
1) hard crisp test specimen is fixed together with non-ferrous metal backing;
2) polishing is ground to test specimen end face, its flatness is reached IT1 grades, surface roughness Ra is better than 5nm;
3) test specimen is fixed on electro spindle with backing and backing is upward, test specimen can be rotated with backing by electro spindle;It is right Test specimen carries out on-line dynamic balancing with backing;
4) backing is carried out to repair disk using diamond single point cutter, is better than with forming end face run-out amount on backing surface IT1 grades, surface average roughness Ra repaiies disk area better than 5nm's, and the depth of parallelism of disk area and test specimen end face is repaiied on backing surface Within IT1 grades, comprise the following steps that:
4-1) polycrystalline diamond single-point lathe tool repaiies disk:Vertical turning pattern, when repairing disk the range of speeds of backing for 2000~ 10000rpm, polycrystalline diamond single-point lathe tool is on the outside of the backing with 10~50 μm of cutting-in along backing radial feed, feed speed Scope is 0.4~1.2mm/s, and feeding distance is the 1/4~1/2 of backing diameter;
4-2) single-crystal diamond single-point lathe tool repaiies disk:Vertical turning pattern, when repairing disk the range of speeds of backing for 2000~ 10000rpm, single-crystal diamond single-point lathe tool is on the outside of the backing with 2~10 μm of cutting-in along backing radial feed, feed speed model It is the 1/4~1/2 of backing diameter to enclose for 0.1~0.3mm/s, feeding distance;
5) test specimen and backing are removed, overturn, test specimen is fixed on electro spindle with backing again and test specimen is upward, test specimen and Backing can be rotated by electro spindle;On-line dynamic balancing is carried out to test specimen and backing;
6) diamond single point cutter touching tool setting gauge, determines difference in height h of the test specimen end face with tool setting gauge to knife plane0;Will Diamond single point cutter is changed to the tool heads that top is connected with single abrasive particle, and the abrasive particle on tool heads top touches tool setting gauge, then Tool heads are moved up into h along test specimen and the rotating axial direction of backing0+ δ, so that the abrasive particle on tool heads top is located on test specimen end face At square δ, complete to knife;
7) tool heads level is moved to directly over the scratching point of test specimen end face, and moves down δ+apSo that scratching depth is ap;Root According to the scratching radius R where scratching speed v and the scratching point that need to be tested, pass throughThe setting of calculation testing piece and backing Rotating speed n;Test specimen is rotated with backing according to setting speed n, and tool heads are radially fed, so that abrasive particle scratches shape in test specimen end face Spirality cut, the data during being scratched during this by the measuring system collection being connected with tool heads.
In one embodiment:The abrasive particle is diamond, CBN, oxide ceramics or nitride ceramics, and abrasive particle shape is ball Shape, cone or polygonal pyramid shape;The abrasive particle is fixed in tool heads top by mechanical grip, plating or soldering;The tool heads For pressure head.
In one embodiment:The backing is disc, and test specimen is stacked with backing and is fixed together, and test specimen periphery without departing from Outside backing edge.
In one embodiment:The backing or test specimen are connected by vacuum cup with electro spindle.
In one embodiment:The measuring system is dynamometry and acoustic emission system, includes dynamometer, the sound of the connection of mutual signal Emission system, data collecting card and signal amplifier;The tool heads are connected with dynamometer and acoustic emission system.
In one embodiment:The intrinsic frequency of the dynamometer is higher than 4KHz, and dynamometry precision is better than 0.01N;The data are adopted The sample rate of truck is higher than 2M/s.
In one embodiment:The tool heads are superior in the positioning accuracy along the rotating axial direction of test specimen and radial direction 0.1μm。
In one embodiment:The positioning accuracy of the tool setting gauge is better than 0.1 μm.
In one embodiment:The cut is continuous helical shape cut, and the cut number of turns is more than 3.
In one embodiment:The tool heads axis is parallel to test specimen rotation axis.
In addition to being described, the connection mode between the single treatment process of each device according to the present invention and each device is equal For this area routine techniques, it is not described in detail in herein.
Compared with background technology, it has the following advantages that the technical program:
1. the present invention carries out on-line dynamic balancing to main shaft-sample system, the significantly end face in high-speed rotation is avoided Bounce or circular runout, so as to keep the steady contact state between abrasive particle and test specimen;Simultaneously as the hard brittle material such as sapphire Difficult processing characteristics, directly carry out hard brittle material to repair disk online, can cause the decline of process time and processing quality, therefore use The method of acted as reference mutual, after the hard brittle material surface roughness such as sapphire has been guaranteed in advance that, by the hard brittle materials such as sapphire with One backing for being easily worked material bonds together, and the backing of test specimen is carried out using single-point diamond Ultraprecision Machining On-line machining repaiies disk, it is ensured that end face run-out has enough precision, final to ensure surface roughness and end face run-out at the same time, carries High relative positional accuracy, so as to solve overlong time and the processing qualities caused by hard brittle material such as direct-on-line processing sapphire The problem of poor, ensure that the relative motion precision between abrasive particle and test specimen, coordinates dynamic balancing, further ensures abrasive particle and test specimen Between above can continually and steadily be contacted in longer scratching distance, scratch test so as to fulfill the high-speed, high precision of abrasive particle.
2. according to the general knowledge of this area, the machined surface quality of test specimen must be better than the surface that related grinding process obtains Quality, is preferably higher by an order of magnitude, and obtained cut test result could be used for the analysis of grinding process cutting mechanisms;Due to The present invention greatly improves the quality of surface of test piece, therefore disclosure satisfy that wanting for the high accuracy analysis such as grinding process cutting mechanisms Ask, the research available for Material Removal Mechanism in process of friction and wear and grinding.
3. abrasive particle scratching depth is more than more than the 5 times stability that just can guarantee that scratching of surface of test piece fluctuating quantity, due to The present invention greatly improves the quality of surface of test piece, and surface of test piece precision and finish are good, even the abrasive particle of small grain size also can Realize and stablize high accuracy scratching, therefore can be used for the single abrasive particle scratching test of small grain size abrasive particle, further expanded this hair Bright application range, and single abrasive particle scratching experimental technique of the industry is greatly facilitated.
Brief description of the drawings
The invention will be further described with reference to the accompanying drawings and examples.
Fig. 1 is the test method principle schematic of the present invention.
Fig. 2 repaiies disk Principle of Process schematic diagram for the present invention's.
Fig. 3 is the contrast that backing surface end face jerk value before and after disk is repaiied in the embodiment of the present invention, before wherein Fig. 3 a is repair disk, Its end face run-out amount maximum is up to 59.1 μm;After Fig. 3 b is repair disk, its end face run-out amount maximum is 8.4 μm.
Reference numeral:Test specimen 1, backing 2, vacuum cup 3, tool heads 4, diamond bit 5.
Embodiment
Present disclosure is illustrated below by embodiment:
The single abrasive particle that a kind of acted as reference mutual method repaiies hard crisp test specimen in advance continuously scratches test method, used device bag Include:
Lathe, the firmly crisp test specimen 1 of disc are installed on the electro spindle of lathe with non-ferrous metal backing 2 by vacuum cup 3, And test specimen 1 can be rotated with backing 2 by electro spindle;
Dynamic balance instrument, for carrying out on-line dynamic balancing to test specimen 1 and backing 2;
Diamond single point cutter, is diamond bit 5, is specifically polycrystalline diamond (PCD) single-point lathe tool and single crystal diamond Stone (ND) single-point lathe tool, for carrying out repairing disk to 2 end face of backing;The diamond bit 5 is dismantledly installed in stent, and passes through Stent is movably installed in lathe;
Tool heads 4, for carrying out scratching test;4 top of tool heads is connected with the abrasive particle of single;The tool heads 4 can be with Diamond single point cutter is installed in stent with mutually replacing assembly and disassembly, and is movably installed in lathe by stent;4 axis of tool heads Parallel to 2 rotation axis of test specimen 1 and backing, tool heads 4 can be in test specimen 1 and 2 rotating axial direction of backing and radial direction Upper movement, and it is superior to 0.1 μm in the positioning accuracy of both direction;
Tool setting gauge, for carrying out being better than 0.1 μm to knife, positioning accuracy to diamond single point cutter and tool heads 4;It is installed in Lathe, and the relative position between test specimen 1 and backing 2 keeps fixing;
Measuring system, is dynamometry and acoustic emission system, including the dynamometer of mutual signal connection, acoustic emission system, data Capture card and signal amplifier;The tool heads 2 are connected with dynamometer and acoustic emission system;The connection of data acquisition card signal calculates Machine.
Specific test method is as follows:
1) it is with isodiametric non-ferrous metal disk by the disc sapphire sheet, that is, test specimen 1 of 6 inches (diameter about 150mm) Backing 2 is bonded together by paraffin;
2) polishing is ground using general grinding and polishing machine test specimen 1 end face good to backing, reaches its flatness IT1 grades, surface roughness Ra is better than 5nm;
3) test specimen 1 and backing 2 are fixed on the electro spindle of lathe by vacuum cup 3 and backing 2 are upward, test specimen 1 with Backing 2 can pass through the common coaxial high speed rotation of electro spindle;On-line dynamic balancing is carried out to the test specimen 1 and backing 2 with dynamic balance instrument, with Follow-up repair is reduced to vibrate caused by the rotation of disk process high speed;
4) backing 2 is carried out repairing disk using diamond bit 5, first repaiies disk with polycrystalline diamond single-point lathe tool, then with singly Diamond single-point lathe tool repaiies disk, and to form end face run-out amount within 3 μm on backing surface, surface average roughness Ra is better than The circular ring shape of 5nm repaiies disk area, so that disk area is repaiied with the depth of parallelism of 1 end face of test specimen within IT1 grades in 2 end face of backing, so that Ensure that abrasive particle and test specimen 1 can be contacted stably during subsequently scratching, and be concretely comprised the following steps:
4-1) polycrystalline diamond single-point lathe tool repaiies disk:The close turning pattern of vertical superfinishing, turn of test specimen 1 and backing 2 when repairing disk Speed is 3000rpm, and polycrystalline diamond single-point lathe tool is from the outside of backing 2 with 10 μm of cutting-in along 2 radial feed of backing, feed speed Scope is 0.4~1.2mm/s, feeding distance 50mm;
4-2) single-crystal diamond single-point lathe tool repaiies disk:The close turning pattern of vertical superfinishing, turn of test specimen 1 and backing 2 when repairing disk Speed is 3000rpm, and single-crystal diamond single-point lathe tool is from the outside of backing 2 with 2 μm of cutting-in along backing radial feed, feed speed model Enclose for 0.1~0.3mm/s, feeding distance 50mm;
Fig. 3 is distinguished in the contrast for repairing 2 end face run-out amount of backing before and after disk;
5) test specimen 1 and backing 2 are removed, is overturn, is again fixed on test specimen 1 and backing 2 on electro spindle by vacuum cup 3 And test specimen 1 is upward, test specimen 1 can pass through the common coaxial high speed rotation of electro spindle with backing 2;Test specimen 1 and backing 2 are carried out again Line dynamic balancing, to reduce vibration caused by the rotation of follow-up test process high speed;
6) diamond bit 5 touches tool setting gauge, determines difference in height h of 1 end face of test specimen with tool setting gauge to knife plane0;By gold Hard rock lathe tool 5 is removed from stent, is changed to the tool heads that top plating is connected with the spherical wear particles that single radius is 0.02mm 4,4 top of tool heads moves closer to tool setting gauge, when measuring system data produce mutation when first 4 top of representational tool abrasive particle just Touching tool setting gauge moves up h to knife plane, then by tool heads 4 along test specimen and the rotating axial direction of backing0+ δ, so that tool heads 2 The abrasive particle on top is located above 1 end face of test specimen at δ, completes to knife, so as to can accurately control scratching deep when ensureing follow-up test Degree;
7) 4 level of tool heads is moved to directly over the scratching point of test specimen end face, and moves down δ+apSo that scratching depth is ap; According to the scratching radius R where scratching speed v and the scratching point that need to be tested, pass throughCalculation testing piece 1 and backing 2 Setting speed n;Among the present embodiment, (scratching speed is with scratching half for 0m/s~78m/s by n=10000rpm, scratching speed v Footpath changes and changes), scratching depth apIt is respectively set as 5~15 μm;Test specimen 1 is rotated with backing 2 according to above-mentioned setting speed n, And tool heads 4 are radially fed with the speed of 1m/s, so that abrasive particle is scratched in 1 end face of test specimen, to form spacing be 100 μm continuous Spiral scratch, the cut number of turns are more than 3;Gathered during this by the dynamometer and acoustic emission system that are connected with tool heads 4 Data during scratching, and data collecting card is transmitted to by signal amplifier, then be transmitted to computer and calculated, it can obtain To physical quantitys such as scratching power, acoustic emission signals.
Among the present embodiment, the intrinsic frequency of the dynamometer is higher than 4KHz, and dynamometry precision is better than 0.01N;The data The sample rate of capture card is higher than 2M/s.
As needed, the hard brittle material can also be ceramics, silicon chip, the non-ferrous metal backing can be copper, aluminium and Its alloy;Test specimen is stacked Nian Jie with backing, can be the identical disk of diameter, can also shape it is different, as long as test specimen periphery is not It is that test specimen is the arbitrary shape smaller than backing outside backing edge;The abrasive particle can be diamond, CBN (cube Boron nitride), oxide ceramics or nitride ceramics;Abrasive particle shape can also be cone or polygonal pyramid shape;The abrasive particle passes through machine Tool clamping, plating or soldering are fixed in tool heads top;The tool heads can be pressure head or other fixed grain forms.
As needed, repair disk parameter adjusted in following scope and carry out it is one or many repair disk, can be in backing table Face forms end face run-out amount and is better than IT1 grades, and surface average roughness Ra repaiies disk area better than 5nm's, and backing end face is repaiied disk The depth of parallelism of region and test specimen end face is within IT1 grades:
4-1) polycrystalline diamond single-point lathe tool repaiies disk:Vertical turning pattern, when repairing disk the range of speeds of backing for 2000~ 10000rpm, polycrystalline diamond single-point lathe tool is on the outside of the backing with 10~50 μm of cutting-in along backing radial feed, feed speed Scope is 0.4~1.2mm/s, and feeding distance is the 1/4~1/2 of backing diameter;Or:
4-2) single-crystal diamond single-point lathe tool repaiies disk:Vertical turning pattern, when repairing disk the range of speeds of backing for 2000~ 10000rpm, single-crystal diamond single-point lathe tool is on the outside of the backing with 2~10 μm of cutting-in along backing radial feed, feed speed model It is the 1/4~1/2 of backing diameter to enclose for 0.1~0.3mm/s, feeding distance.
Comparative example
Take crisp test specimen and backing firmly affixed, hard crisp test specimen is handled according to the processing method of the embodiment of the present invention, and backing is frequent After advising the processing of the conventional surface process techniques such as planar accurate grinding technique, backing end face is divided into two regions, one of region is pressed Carry out repairing disk according to the disk step of repairing of the present invention, its surface quality is reached end face run-out amount better than IT1 grades, surface average roughness Ra is better than 5nm, and disk area is repaiied with the depth of parallelism of test specimen end face within IT1 grades in backing end face, is denoted as and repaiies disk area;Another area Domain is denoted as without repairing disk and does not repair disk area.
Above-mentioned hard crisp test specimen test method using the present invention is subjected to single abrasive particle and continuously scratches test, in same test Cut is formed in test specimen end face under parameter, scratch depth very little, can reach micron order.The results show that in scratch depth very little In the case of, in repairing in the corresponding test specimen end region of disk area for backing, cut forms coherent spiral shape, in uniform intervals point Cloth, detects its depth direction error and is less than 1 μm/1mm, shows that abrasive particle and test specimen can continually and steadily connect in longer scratching apart from upper Touch, so as to realize the scratching test of the high-speed, high precision of abrasive particle;And backing is not repaiied in the corresponding test specimen end region of disk area, Cut cannot form coherent spiral shape, and cut interval is differed, and the cut depth, scratch width are respectively provided with macroscopic otherness, Show continually and steadily contact between abrasive particle and test specimen, it is difficult to realize the high-speed, high precision scratching test of abrasive particle.
The above, is only present pre-ferred embodiments, therefore cannot limit the scope implemented of the present invention according to this, i.e., according to The equivalent changes and modifications that the scope of the claims of the present invention and description are made, all should still belong in the range of the present invention covers.

Claims (10)

1. the single abrasive particle that a kind of acted as reference mutual method repaiies hard crisp test specimen in advance continuously scratches test method, it is characterised in that:Including:
1) hard crisp test specimen is fixed together with non-ferrous metal backing;
2) polishing is ground to test specimen end face, its flatness is reached IT1 grades, surface roughness Ra is better than 5nm;
3) test specimen is fixed on electro spindle with backing and backing is upward, test specimen can be rotated with backing by electro spindle;To test specimen On-line dynamic balancing is carried out with backing;
4) backing is carried out to repair disk using diamond single point cutter, is better than IT1 grades to form end face run-out amount on backing surface, Repair disk area of the surface average roughness Ra better than 5nm, and disk area is repaiied with the depth of parallelism of test specimen end face at IT1 grades in backing surface Within, comprise the following steps that:
4-1) polycrystalline diamond single-point lathe tool repaiies disk:Vertical turning pattern, when repairing disk the range of speeds of backing for 2000~ 10000rpm, polycrystalline diamond single-point lathe tool is on the outside of the backing with 10~50 μm of cutting-in along backing radial feed, feed speed Scope is 0.4~1.2mm/s, and feeding distance is the 1/4~1/2 of backing diameter;
4-2) single-crystal diamond single-point lathe tool repaiies disk:Vertical turning pattern, when repairing disk the range of speeds of backing for 2000~ 10000rpm, single-crystal diamond single-point lathe tool is on the outside of the backing with 2~10 μm of cutting-in along backing radial feed, feed speed model It is the 1/4~1/2 of backing diameter to enclose for 0.1~0.3mm/s, feeding distance;
5) test specimen and backing are removed, overturns, test specimen is fixed on electro spindle with backing again and test specimen is upward, test specimen and backing It can be rotated by electro spindle;On-line dynamic balancing is carried out to test specimen and backing;
6) diamond single point cutter touching tool setting gauge, determines difference in height h of the test specimen end face with tool setting gauge to knife plane0;By diamond Single point cutter is changed to the tool heads that top is connected with single abrasive particle, the abrasive particle touching tool setting gauge on tool heads top, then by instrument Head moves up h along test specimen and the rotating axial direction of backing0+ δ, so that the abrasive particle on tool heads top is located above test specimen end face at δ, Complete to knife;
7) tool heads level is moved to directly over the scratching point of test specimen end face, and moves down δ+apSo that scratching depth is ap;According to need Scratching radius R where scratching speed v and the scratching point of test, passes throughThe setting speed of calculation testing piece and backing n;Test specimen is rotated with backing according to setting speed n, and tool heads are radially fed, so that abrasive particle scratches to form spiral shell in test specimen end face Shape cut is revolved, the data during being scratched during this by the measuring system collection being connected with tool heads.
2. the single abrasive particle that a kind of acted as reference mutual method according to claim 1 repaiies hard crisp test specimen in advance continuously scratches test side Method, it is characterised in that:The abrasive particle is diamond, CBN, oxide ceramics or nitride ceramics, and abrasive particle shape is spherical, circular cone Shape or polygonal pyramid shape;The abrasive particle is fixed in tool heads top by mechanical grip, plating or soldering;The tool heads are pressure head.
3. the single abrasive particle that a kind of acted as reference mutual method according to claim 1 repaiies hard crisp test specimen in advance continuously scratches test side Method, it is characterised in that:The backing is disc, and test specimen is stacked with backing and is fixed together, and test specimen periphery is without departing from backing Outside edge.
4. the single abrasive particle that a kind of acted as reference mutual method according to claim 1 repaiies hard crisp test specimen in advance continuously scratches test side Method, it is characterised in that:The backing or test specimen are connected by vacuum cup with electro spindle.
5. the single abrasive particle that a kind of acted as reference mutual method according to claim 1 repaiies hard crisp test specimen in advance continuously scratches test side Method, it is characterised in that:The measuring system is dynamometry and acoustic emission system, including the dynamometer of mutual signal connection, sound emission System, data collecting card and signal amplifier;The tool heads are connected with dynamometer and acoustic emission system.
6. the single abrasive particle that a kind of acted as reference mutual method according to claim 5 repaiies hard crisp test specimen in advance continuously scratches test side Method, it is characterised in that:The intrinsic frequency of the dynamometer is higher than 4KHz, and dynamometry precision is better than 0.01N;The data collecting card Sample rate is higher than 2M/s.
7. the single abrasive particle that a kind of acted as reference mutual method according to claim 1 repaiies hard crisp test specimen in advance continuously scratches test side Method, it is characterised in that:The tool heads are superior to 0.1 μ in the positioning accuracy along the rotating axial direction of test specimen and radial direction m。
8. the single abrasive particle that a kind of acted as reference mutual method according to claim 1 repaiies hard crisp test specimen in advance continuously scratches test side Method, it is characterised in that:The positioning accuracy of the tool setting gauge is better than 0.1 μm.
9. the single abrasive particle that a kind of acted as reference mutual method according to claim 1 repaiies hard crisp test specimen in advance continuously scratches test side Method, it is characterised in that:The cut is continuous helical shape cut, and the cut number of turns is more than 3.
10. the single abrasive particle that a kind of acted as reference mutual method according to claim 1 repaiies hard crisp test specimen in advance continuously scratches test side Method, it is characterised in that:The tool heads axis is parallel to test specimen rotation axis.
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