CN105699291B - The single abrasive particle that a kind of acted as reference mutual method repaiies hard crisp test specimen in advance continuously scratches act of interference test method - Google Patents
The single abrasive particle that a kind of acted as reference mutual method repaiies hard crisp test specimen in advance continuously scratches act of interference test method Download PDFInfo
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- CN105699291B CN105699291B CN201610077809.3A CN201610077809A CN105699291B CN 105699291 B CN105699291 B CN 105699291B CN 201610077809 A CN201610077809 A CN 201610077809A CN 105699291 B CN105699291 B CN 105699291B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N19/00—Investigating materials by mechanical methods
- G01N19/06—Investigating by removing material, e.g. spark-testing
Abstract
Single abrasive particle for repairing hard crisp test specimen in advance the invention discloses a kind of acted as reference mutual method continuously scratches act of interference test method, belong to the material properties test in mechanical processing and precise and ultraprecise machining field, hard crisp test specimen is first subjected to backing, the test specimen and backing are handled using acted as reference mutual method, reach the surface quality needed for test and depth of parallelism requirement；The subsequent top that changes the outfit is connected with the tool heads of single abrasive particle, and is carried out in replacement process to knife；Scratching test is finally entered, test specimen is to specify rotating speed to rotate, and tool heads form interference spiral scratch in test specimen end face to specify cutting-in radial feed, and measuring system gathers the physical quantitys such as scratching power, acoustic emission signal in the process.The present invention can simulate the act of interference between high-speed grinding process abrasive particle.Dependence test result can be used for the further investigation of grinding principle and the optimization of grinding parameter.
Description
Technical field
The invention belongs to the material properties test in being machined and precise and ultraprecise machining field, and in particular to a kind of
The single abrasive particle that acted as reference mutual method repaiies hard crisp test specimen in advance continuously scratches act of interference test method.
Background technology
Grinding process can be regarded as abrasive surface and largely arrange uneven, the irregular different abrasive particle of distribution
The working angles completed jointly.In scientific research, complicated phenomenon is often abstracted into a kind of pattern of simplification, to inquire into some originally
The problem of matter.The shear action for forming the tiny abrasive particle of emery wheel is the basis of grinding, and single abrasive grain cutting adds as grinding
The basic model of work, becomes a kind of important means of the complicated ablation of understanding.In actual grinding process, on the grinding tool such as emery wheel
Abrasive particle interferes on the same position of machined surface, complicates the form that abrasive particle removes material, therefore abrasive machining
The formation of middle machined surface is often more abrasive grain cuttings on same position, cultivated plough or scratching effect as a result, therefore studying
The interference effect of more abrasive particles on the surface adds power, temperature, the chip formation mechanism of material and the workpiece in analysis grinding process
Work surface quality has important directive significance.
Many scholars have experimentally done substantial amounts of work in single abrasive particle scratching, have developed relevant test method and its dress
Put, but due to the shortcoming of research technique and experimental rig, all do not account for the influence that more abrasive particles interfere, more abrasive particles
The research interfered also rests on simulation stage mostly, is such as removed using the material of Boolean calculation emulation abrasive particle interventional procedures,
Or analysis is modeled to the interventional procedures of more abrasive particles using numerical value emulation method.Also have that to study more abrasive particles on a small quantity mutually dry
The device of influence is related to, such as arranges more abrasive particles with certain relative angle and radial spacing, scratching when produces interference
Effect, but arrangement error of the more abrasive particles in radial spacing is larger (10 μm of resolution ratio), therefore more abrasive particles interfere
When, the control accuracy of actual amount of interference is not higher than 10 μm, therefore can only carry out the interference of some large scale (being more than 100 μm) abrasive particles
Test, while device structure is complicated, adjustment process is largely dependent upon the experience of operator, is not carried out automation adjustment
And position feedback control, thus it is difficult to realize high-precision act of interference test.
The content of the invention
It is an object of the invention in place of overcome the deficiencies in the prior art, there is provided a kind of acted as reference mutual method repaiies hard crisp examination in advance
Single abrasive particle of part continuously scratches act of interference test method, and disk and precise motion feedback control are repaiied with reference to Ultra-precision Turning, profit
The scratching act of interference of more abrasive particles can be made with single abrasive particle, device structure is simple, and the control accuracy of abrasive particle amount of interference is high；
Dependence test result can be used for the further investigation of grinding mechanism and grinding skin forming process, so as to optimize grinding
Parameter, improves product quality.
The technical solution adopted by the present invention to solve the technical problems is：
1. the single abrasive particle that a kind of acted as reference mutual method repaiies hard crisp test specimen in advance continuously scratches act of interference test method, including：
1) hard crisp test specimen is fixed together with non-ferrous metal backing；
2) polishing is ground to test specimen end face, its flatness is reached IT1 grades, surface roughness Ra is better than 5nm；
3) test specimen is fixed on electro spindle with backing and backing is upward, test specimen can be rotated with backing by electro spindle；It is right
Test specimen carries out on-line dynamic balancing with backing；
4) backing is carried out to repair disk using diamond single point cutter, is better than with forming end face run-out amount on backing surface
IT1 grades, surface average roughness Ra repaiies disk area better than 5nm's, and the depth of parallelism of disk area and test specimen end face is repaiied on backing surface
Within IT1 grades, comprise the following steps that：
4-1) polycrystalline diamond single-point lathe tool repaiies disk：Vertical turning pattern, when repairing disk the range of speeds of backing for 2000~
10000rpm, polycrystalline diamond single-point lathe tool is on the outside of the backing with 10~50 μm of cutting-in along backing radial feed, feed speed
Scope is 0.4~1.2mm/s, and feeding distance is the 1/4~1/2 of backing diameter；
4-2) single-crystal diamond single-point lathe tool repaiies disk：Vertical turning pattern, when repairing disk the range of speeds of backing for 2000~
10000rpm, single-crystal diamond single-point lathe tool is on the outside of the backing with 2~10 μm of cutting-in along backing radial feed, feed speed model
It is the 1/4~1/2 of backing diameter to enclose for 0.1~0.3mm/s, feeding distance；
5) test specimen and backing are removed, overturn, test specimen is fixed on electro spindle with backing again and test specimen is upward, test specimen and
Backing can be rotated by electro spindle；On-line dynamic balancing is carried out to test specimen and backing；
6) diamond single point cutter touching tool setting gauge, determines difference in height h of the test specimen end face with tool setting gauge to knife plane0；Will
Diamond single point cutter is changed to the tool heads that top is connected with single abrasive particle, and the abrasive particle on tool heads top touches tool setting gauge, then
Tool heads are moved up into h along test specimen and the rotating axial direction of backing0+ δ, so that the abrasive particle on tool heads top is located on test specimen end face
At square δ, complete to knife；
7) tool heads level is moved to directly over the scratching point of test specimen end face, and moves down δ+apSo that scratching depth is ap；Root
According to the scratching radius R where scratching speed v and the scratching point that need to be tested, pass throughThe setting of calculation testing piece and backing
Rotating speed n；According to interference ratio ρ, the arc radius r of single abrasive particle that need to be tested, scratching depth ap, pass throughThe radial feed speed s of calculating instrument head；Test specimen is rotated with backing according to setting speed n, and work
Has head according to radial feed speed s and scratching depth apAlong test specimen radial feed so that abrasive particle scratched in test specimen end face to be formed it is pre-
Determine the cut of interference degrees, the data during being scratched during this by the measuring system collection being connected with tool heads.
In one embodiment：In the step 7), tool heads are according to radial feed speed s and scratching depth apAlong test specimen radially
Fed while feeding along test specimen rotation axis direction.
In one embodiment：The abrasive particle is diamond, CBN, oxide ceramics or nitride ceramics, and abrasive particle shape is ball
Shape, cone or polygonal pyramid shape；The abrasive particle is fixed in tool heads top by mechanical grip, plating or soldering；The tool heads
For pressure head.
In one embodiment：The backing is disc, and test specimen is stacked with backing and is fixed together, and test specimen periphery without departing from
Outside backing edge；The backing or test specimen are connected by vacuum cup with electro spindle.
In one embodiment：The measuring system is dynamometry and acoustic emission system, includes dynamometer, the sound of the connection of mutual signal
Emission system, data collecting card and signal amplifier；The tool heads are connected with dynamometer and acoustic emission system.
In one embodiment：The intrinsic frequency of the dynamometer is higher than 4KHz, and dynamometry precision is better than 0.01N；The data are adopted
The sample rate of truck is higher than 2M/s.
In one embodiment：The tool heads are superior in the positioning accuracy along the rotating axial direction of test specimen and radial direction
0.1 μm, which coordinates control by displacement sensor and corresponding position feedback system.
In one embodiment：The positioning accuracy of the tool setting gauge is better than 0.1 μm.
In one embodiment：The cut is continuous helical shape cut, and the cut number of turns is more than 3.
In one embodiment：The tool heads axis is parallel to test specimen rotation axis.
In addition to being described, the connection mode between the single treatment process of each device according to the present invention and each device is equal
For this area routine techniques, it is not described in detail in herein.
Compared with background technology, it has the following advantages that the technical program：
1. the high precision measurement method of single abrasive particle scratching act of interference disclosed in this invention, utilizes single abrasive particle
The scratching act of interference of more abrasive particles is made, depth, different interference degrees, difference are scratched different available for single abrasive particle is studied
Act of interference under speed is scratched, due to being that continuous scratching can collect scratching force signal with accurate stable；Device structure is simple,
The control accuracy of abrasive particle amount of interference is high；Dependence test result can be used for the depth of grinding mechanism and grinding skin forming process
Enter research, so as to optimize grinding parameter, improve product quality.
2. the present invention carries out on-line dynamic balancing to main shaft-sample system, the significantly end face in high-speed rotation is avoided
Bounce or circular runout, so as to keep the steady contact state between abrasive particle and test specimen；Simultaneously as the hard brittle material such as sapphire
Difficult processing characteristics, directly carry out hard brittle material to repair disk online, can cause the decline of process time and processing quality, therefore use
The method of acted as reference mutual, after the hard brittle material surface roughness such as sapphire has been guaranteed in advance that, by the hard brittle materials such as sapphire with
One backing for being easily worked material bonds together, and the backing of test specimen is carried out using single-point diamond Ultraprecision Machining
On-line machining repaiies disk, it is ensured that end face run-out has enough precision, final to ensure surface roughness and end face run-out at the same time, carries
High relative positional accuracy, so as to solve overlong time and the processing qualities caused by hard brittle material such as direct-on-line processing sapphire
The problem of poor, ensure that the relative motion precision between abrasive particle and test specimen, coordinates dynamic balancing, further ensures abrasive particle and test specimen
Between above can continually and steadily be contacted in longer scratching distance, scratch test so as to fulfill the high-speed, high precision of abrasive particle.
3. according to the general knowledge of this area, the machined surface quality of test specimen must be better than the surface that related grinding process obtains
Quality, is preferably higher by an order of magnitude, and obtained cut test result could be used for the analysis of grinding process cutting mechanisms；Due to
The present invention greatly improves the quality of surface of test piece, therefore disclosure satisfy that wanting for the high accuracy analysis such as grinding process cutting mechanisms
Ask, the research available for Material Removal Mechanism in process of friction and wear and grinding.
4. abrasive particle scratching depth is more than more than the 5 times stability that just can guarantee that scratching of surface of test piece fluctuating quantity, due to
The present invention greatly improves the quality of surface of test piece, and surface of test piece precision and finish are good, even the abrasive particle of small grain size also can
Realize and stablize high accuracy scratching, therefore can be used for the single abrasive particle scratching test of small grain size abrasive particle, further expanded this hair
Bright application range, and single abrasive particle scratching experimental technique of the industry is greatly facilitated.
Brief description of the drawings
The invention will be further described with reference to the accompanying drawings and examples.
Fig. 1 is the test method principle schematic of the present invention.
Fig. 2 repaiies disk Principle of Process schematic diagram for the present invention's.
Fig. 3 is the act of interference schematic diagram of the present invention.
Fig. 4 is the contrast that backing surface end face jerk value before and after disk is repaiied in the embodiment of the present invention, before wherein Fig. 4 a is repair disk,
Its end face run-out amount maximum is up to 59.1 μm；After Fig. 4 b is repair disk, its end face run-out amount maximum is 8.4 μm.
Reference numeral：Test specimen 1, backing 2, vacuum cup 3, tool heads 4, diamond bit 5.
Embodiment
Present disclosure is illustrated below by embodiment：
Embodiment 1
The single abrasive particle that a kind of acted as reference mutual method repaiies hard crisp test specimen in advance continuously scratches act of interference test method, used
Device includes：
Lathe, the firmly crisp test specimen 1 of disc are installed on the electro spindle of lathe with non-ferrous metal backing 2 by vacuum cup 3,
And test specimen 1 can be rotated with backing 2 by electro spindle；
Dynamic balance instrument, for carrying out on-line dynamic balancing to test specimen 1 and backing 2；
Diamond single point cutter, is diamond bit 5, is specifically polycrystalline diamond (PCD) single-point lathe tool and single crystal diamond
Stone (ND) single-point lathe tool, for carrying out repairing disk to 2 end face of backing；The diamond bit 5 is dismantledly installed in stent, and passes through
Stent is movably installed in lathe；
Tool heads 4, for carrying out scratching test；4 top of tool heads is connected with the abrasive particle of single；The tool heads 4 can be with
Diamond single point cutter is installed in stent with mutually replacing assembly and disassembly, and is movably installed in lathe by stent；4 axis of tool heads
Parallel to 2 rotation axis of test specimen 1 and backing, tool heads 4 can be in test specimen 1 and 2 rotating axial direction of backing and radial direction
Upper movement, and 0.1 μm is superior in the positioning accuracy of both direction, which is fed back by grating scale and its corresponding position
System coordinates control to ensure；
Tool setting gauge, for carrying out being better than 0.1 μm to knife, positioning accuracy to diamond single point cutter and tool heads 4；It is installed in
Lathe, and the relative position between test specimen 1 and backing 2 keeps fixing；
Measuring system, is dynamometry and acoustic emission system, including the dynamometer of mutual signal connection, acoustic emission system, data
Capture card and signal amplifier；The tool heads 2 are connected with dynamometer and acoustic emission system；The connection of data acquisition card signal calculates
Machine；The intrinsic frequency of dynamometer is higher than 4KHz, and dynamometry precision is better than 0.01N；The sample rate of data collecting card is higher than 2M/s.
Specific test method is as follows：
1) it is with isodiametric non-ferrous metal disk by the disc sapphire sheet, that is, test specimen 1 of 6 inches (diameter about 150mm)
Backing 2 is bonded together by paraffin；
2) polishing is ground using general grinding and polishing machine test specimen 1 end face good to backing, reaches its flatness
IT1 grades, surface roughness Ra is better than 5nm；
3) test specimen 1 and backing 2 are fixed on the electro spindle of lathe by vacuum cup 3 and backing 2 are upward, test specimen 1 with
Backing 2 can pass through the common coaxial high speed rotation of electro spindle；On-line dynamic balancing is carried out to the test specimen 1 and backing 2 with dynamic balance instrument, with
Follow-up repair is reduced to vibrate caused by the rotation of disk process high speed；
4) backing 2 is carried out repairing disk using diamond bit 5, first repaiies disk with polycrystalline diamond single-point lathe tool, then with singly
Diamond single-point lathe tool repaiies disk, and to form end face run-out amount within 3 μm on backing surface, surface average roughness Ra is better than
The circular ring shape of 5nm repaiies disk area, so that disk area is repaiied with the depth of parallelism of 1 end face of test specimen within IT1 grades in 2 end face of backing, so that
Ensure that abrasive particle and test specimen 1 can be contacted stably during subsequently scratching, and be concretely comprised the following steps：
4-1) polycrystalline diamond single-point lathe tool repaiies disk：The close turning pattern of vertical superfinishing, turn of test specimen 1 and backing 2 when repairing disk
Speed is 3000rpm, and polycrystalline diamond single-point lathe tool is from the outside of backing 2 with 10 μm of cutting-in along 2 radial feed of backing, feed speed
Scope is 0.4~1.2mm/s, feeding distance 75mm；
4-2) single-crystal diamond single-point lathe tool repaiies disk：The close turning pattern of vertical superfinishing, turn of test specimen 1 and backing 2 when repairing disk
Speed is 3000rpm, and single-crystal diamond single-point lathe tool is from the outside of backing 2 with 2 μm of cutting-in along backing radial feed, feed speed model
Enclose for 0.1~0.3mm/s, feeding distance 75mm；
Repair 2 end face run-out amount of backing before and after disk to such as Fig. 4；
5) test specimen 1 and backing 2 are removed, is overturn, is again fixed on test specimen 1 and backing 2 on electro spindle by vacuum cup 3
And test specimen 1 is upward, test specimen 1 can pass through the common coaxial high speed rotation of electro spindle with backing 2；Test specimen 1 and backing 2 are carried out again
Line dynamic balancing, to reduce vibration caused by the rotation of follow-up test process high speed；
6) diamond bit 5 touches tool setting gauge, determines difference in height h of 1 end face of test specimen with tool setting gauge to knife plane0；By gold
Hard rock lathe tool 5 is removed from stent, is changed to the tool heads 4 that top plating is connected with the spherical wear particles that single radius is 0.2mm,
4 top of tool heads moves closer to tool setting gauge, and when measuring system data produce mutation, the abrasive particle on first 4 top of representational tool just touches
Tool setting gauge is touched to knife plane, then tool heads 4 are moved up into h along test specimen and the rotating axial direction of backing0+ δ, so that tool heads 2 are pushed up
The abrasive particle at end is located above 1 end face of test specimen at δ, completes to knife, so as to can accurately control scratching depth when ensureing follow-up test；
7) every test parameter is calculated：
According to the scratching radius R (mm) where scratching speed v (m/s) and the scratching point that need to be tested, pass through
The setting speed n of calculation testing piece 1 and backing 2；
Among the present embodiment, the scratching speed v of required test takes 30~60m/s, and circular ring shape repaiies the radius of disk area
For 0~75mm, repair at this and the radius of scratching test is carried out in disk area be set to 30~75mm, speed and radius are scratched with this
The range of speeds of range computation test specimen simultaneously takes an appropriate median 8000rpm as rotating speed n；On this condition, 30m/s
It is 35.8mm to scratch the corresponding scratching radius R of speed, and the corresponding scratching radius R of scratching speed of 60m/s is 71.6mm；
Interference degrees are generally with interference ratio ρ (mm/r2) characterize, the definition for interfering ratio is：
Wherein, s (mm/r) is every turn of amount of feeding along test specimen radial direction of tool heads, the radial feed speed for characterization tool head
Degree；L (mm) is scratching width；R (mm) is the arc radius of single abrasive particle, and arc radius is the circular arc of the two-dimensional section of abrasive particle
Radius, when abrasive particle is spherical, arc radius is equal with abrasive particle radius；Ap (mm) is scratching depth；
According to the interference ratio ρ that need to be tested, the arc radius r and scratching depth a of single abrasive particlep, utilize above-mentioned interference ratio
The defined formula of rate, passes throughThe radial feed speed s of tool heads is calculated；
Among the present embodiment, the interference ratio ρ of required test is set to 20%, 30%, 40%, 50%, 60%,
70%th, 80%；The arc radius r of single spherical wear particles is 0.2mm；Scratch depth ap30 μm, 50 μm are set to, is calculated respectively
Corresponding s values.
As needed, during scratching, can adjust tool heads 4 makes it in the rotating axis direction upper feeding of test specimen 1,
Make scratching depth apChange, the scratching depth a of two adjacent rings cutpDifference be calculated as h, exist so as to study single abrasive particle
Act of interference under difference scratching depth；In the present embodiment, h=0.
4 level of tool heads is moved to directly over the setting scratching point of 1 end face of test specimen, and moves down δ+apTo reach setting scratching
Depth ap；；Test specimen 1 and backing 2 are rotated according to above-mentioned setting speed n=8000rpm, and tool heads 4 according to setting radial direction into
To speed s and scratching depth apAlong 1 radial feed of test specimen, with reference to the rotation of test specimen 1 and backing 2, so that abrasive particle is in 1 end face of test specimen
Scratching forms the continuous helical shape cut that interference ratio is ρ, and the cut number of turns is more than 3；
Data during being scratched during scratching by dynamometer and the acoustic emission system collection being connected with tool heads 4,
And data collecting card is transmitted to by signal amplifier, then be transmitted to computer and calculated, scratching power, sound emission letter can be obtained
Number etc. physical quantity, for study it is above-mentioned it is various under the conditions of act of interference.
Embodiment 2
1) it is with isodiametric non-ferrous metal disk by the disc sapphire sheet, that is, test specimen 1 of 6 inches (diameter about 150mm)
Backing 2 is bonded together by paraffin；
2) polishing is ground using general grinding and polishing machine test specimen 1 end face good to backing, reaches its flatness
IT1 grades, surface roughness Ra is better than 5nm；
3) test specimen 1 and backing 2 are fixed on the electro spindle of lathe by vacuum cup 3 and backing 2 are upward, test specimen 1 with
Backing 2 can pass through the common coaxial high speed rotation of electro spindle；On-line dynamic balancing is carried out to the test specimen 1 and backing 2 with dynamic balance instrument, with
Follow-up repair is reduced to vibrate caused by the rotation of disk process high speed；
4) backing 2 is carried out repairing disk using diamond bit 5, first repaiies disk with polycrystalline diamond single-point lathe tool, then with singly
Diamond single-point lathe tool repaiies disk, and to form end face run-out amount within 3 μm on backing surface, surface average roughness Ra is better than
The circular ring shape of 5nm repaiies disk area, so that disk area is repaiied with the depth of parallelism of 1 end face of test specimen within IT1 grades in 2 end face of backing, so that
Ensure that abrasive particle and test specimen 1 can be contacted stably during subsequently scratching, and be concretely comprised the following steps：
4-1) polycrystalline diamond single-point lathe tool repaiies disk：The close turning pattern of vertical superfinishing, turn of test specimen 1 and backing 2 when repairing disk
Speed is 3000rpm, and polycrystalline diamond single-point lathe tool is from the outside of backing 2 with 10 μm of cutting-in along 2 radial feed of backing, feed speed
Scope is 0.4~1.2mm/s, feeding distance 75mm；
4-2) single-crystal diamond single-point lathe tool repaiies disk：The close turning pattern of vertical superfinishing, turn of test specimen 1 and backing 2 when repairing disk
Speed is 3000rpm, and single-crystal diamond single-point lathe tool is from the outside of backing 2 with 2 μm of cutting-in along backing radial feed, feed speed model
Enclose for 0.1~0.3mm/s, feeding distance 75mm；
5) test specimen 1 and backing 2 are removed, is overturn, is again fixed on test specimen 1 and backing 2 on electro spindle by vacuum cup 3
And test specimen 1 is upward, test specimen 1 can pass through the common coaxial high speed rotation of electro spindle with backing 2；Test specimen 1 and backing 2 are carried out again
Line dynamic balancing, to reduce vibration caused by the rotation of follow-up test process high speed；
6) diamond bit 5 touches tool setting gauge, determines difference in height h of 1 end face of test specimen with tool setting gauge to knife plane0；By gold
Hard rock lathe tool 5 is removed from stent, is changed to the tool heads 4 that top plating is connected with the spherical wear particles that single radius is 0.2mm,
4 top of tool heads moves closer to tool setting gauge, and when measuring system data produce mutation, the abrasive particle on first 4 top of representational tool just touches
Tool setting gauge is touched to knife plane, then tool heads 4 are moved up into h along test specimen and the rotating axial direction of backing0+ δ, so that tool heads 2 are pushed up
The abrasive particle at end is located above 1 end face of test specimen at δ, completes to knife, so as to can accurately control scratching depth when ensureing follow-up test；
7) every test parameter is calculated：
According to the scratching radius R (mm) where scratching speed v (m/s) and the scratching point that need to be tested, pass through
The setting speed n of calculation testing piece 1 and backing 2；
Among the present embodiment, the scratching speed v of required test takes 10~20m/s, and circular ring shape repaiies the radius of disk area
For 0~75mm, repair at this and the radius of scratching test is carried out in disk area be set to 30~70mm, speed and radius are scratched with this
The range of speeds of range computation test specimen simultaneously takes an appropriate median 3000rpm as rotating speed n；On this condition, 10m/s
It is 31.8mm to scratch the corresponding scratching radius R of speed, and the corresponding scratching radius R of scratching speed of 20m/s is 63.6mm；
According to the interference ratio ρ that need to be tested, the arc radius r and scratching depth a of single abrasive particlep, pass throughThe radial feed speed s of tool heads is calculated；
Among the present embodiment, the interference ratio ρ of required test is set to 20%, 30%, 40%, 50%, 60%,
70%th, 80%；The arc radius r of single spherical wear particles is 0.2mm；Scratch depth ap30 μm, 50 μm are set to, is calculated respectively
Corresponding s values；Tool heads while with s radial feeds with the speed of 5 μm/s along the rotating axis direction of test specimen to lower feeding,
So that the scratching depth a of two adjacent rings cutpH=0.1 μm of difference.
4 level of tool heads is moved to directly over the setting scratching point of 1 end face of test specimen, and moves down δ+apTo reach setting scratching
Depth ap；；Test specimen 1 and backing 2 are rotated according to above-mentioned setting speed n=3000rpm, and tool heads 4 according to setting radial direction into
To speed s and scratching depth apAlong 1 radial feed of test specimen, while with the speed axial feed of 5 μm/s, with reference to test specimen 1 and backing 2
Rotation so that abrasive particle scratched in 1 end face of test specimen to be formed interference ratio be ρ continuous helical shape cut, the cut number of turns be more than 3
It is a；
Data during being scratched during scratching by dynamometer and the acoustic emission system collection being connected with tool heads 4,
And data collecting card is transmitted to by signal amplifier, then be transmitted to computer and calculated, scratching power, sound emission letter can be obtained
Number etc. physical quantity, for study it is above-mentioned it is various under the conditions of act of interference.
As needed, the hard brittle material can also be ceramics, silicon chip, the non-ferrous metal backing can be copper, aluminium and
Its alloy；Test specimen is stacked Nian Jie with backing, can be the identical disk of diameter, can also shape it is different, as long as test specimen periphery is not
It is that test specimen is the arbitrary shape smaller than backing outside backing edge；
In the embodiment of the present invention, for ease of description, single abrasive particle is spherical, but is not limited thereto, and abrasive particle shape is also
Can be cone or polygonal pyramid shape etc., the arc radius r of taper abrasive particle is the round end radius of taper abrasive particle, commercially available on the market
Buy the taper abrasive particle that round end radius is not waited in 50 μm~1mm；Abrasive particle can be diamond, CBN (cubic boron nitride), oxide
Ceramics or nitride ceramics；Abrasive particle shape can also be cone or polygonal pyramid shape；The abrasive particle passes through mechanical grip, plating or pricker
Solid welding is connected on tool heads top；The tool heads can be pressure head or other fixed grain forms.
As needed, repair disk parameter adjusted in following scope and carry out it is one or many repair disk, can be in backing table
Face forms end face run-out amount and is better than IT1 grades, and surface average roughness Ra repaiies disk area better than 5nm's, and backing end face is repaiied disk
The depth of parallelism of region and test specimen end face is within IT1 grades：
4-1) polycrystalline diamond single-point lathe tool repaiies disk：Vertical turning pattern, when repairing disk the range of speeds of backing for 2000~
10000rpm, polycrystalline diamond single-point lathe tool is on the outside of the backing with 10~50 μm of cutting-in along backing radial feed, feed speed
Scope is 0.4~1.2mm/s, and feeding distance is the 1/4~1/2 of backing diameter；Or：
4-2) single-crystal diamond single-point lathe tool repaiies disk：Vertical turning pattern, when repairing disk the range of speeds of backing for 2000~
10000rpm, single-crystal diamond single-point lathe tool is on the outside of the backing with 2~10 μm of cutting-in along backing radial feed, feed speed model
It is the 1/4~1/2 of backing diameter to enclose for 0.1~0.3mm/s, feeding distance.
Comparative example
It should be noted that the test condition in this comparative example is arranged to not interfere between adjacent cut, in order to right
Than the difference observed cut form, scratch effect, but this comparative example still can reflect that test method using the present invention can be with
Realize the act of interference test of high-speed, high precision.
Take crisp test specimen and backing firmly affixed, hard crisp test specimen is handled according to the processing method of the embodiment of the present invention, and backing is frequent
After advising the processing of the conventional surface process techniques such as planar accurate grinding technique, backing end face is divided into two regions, one of region is pressed
Carry out repairing disk according to the disk step of repairing of the present invention, its surface quality is reached end face run-out amount better than IT1 grades, surface average roughness
Ra is better than 5nm, and disk area is repaiied with the depth of parallelism of test specimen end face within IT1 grades in backing end face, is denoted as and repaiies disk area；Another area
Domain is denoted as without repairing disk and does not repair disk area.
Above-mentioned hard crisp test specimen test method using the present invention is carried out single abrasive particle continuously to scratch, in same test parameter
Under test specimen end face formed cut, scratch depth very little, can reach micron order.The results show that in the situation of scratch depth very little
Under, in repairing in the corresponding test specimen end region of disk area for backing, cut forms coherent spiral shape, in being evenly spaced on,
Detect its depth direction error and be less than 1 μm/1mm, show that abrasive particle and test specimen can be contacted continually and steadily in longer scratching apart from upper,
So as to for the scratching act of interference test of the high-speed, high precision of abrasive particle；And backing does not repair disk area corresponding test specimen end face area
In domain, cut cannot form coherent spiral shape, and cut interval is differed, and the cut depth, scratch width are respectively provided with macroscopic difference
The opposite sex, shows continually and steadily contact between abrasive particle and test specimen, and it is even more impossible to the high-speed, high precision scratching interference row for abrasive particle
For test.
The above, is only present pre-ferred embodiments, therefore cannot limit the scope implemented of the present invention according to this, i.e., according to
The equivalent changes and modifications that the scope of the claims of the present invention and description are made, all should still belong in the range of the present invention covers.
Claims (10)
1. the single abrasive particle that a kind of acted as reference mutual method repaiies hard crisp test specimen in advance continuously scratches act of interference test method, its feature exists
In：Including：
1) hard crisp test specimen is fixed together with non-ferrous metal backing；
2) polishing is ground to test specimen end face, its flatness is reached IT1 grades, surface roughness Ra is better than 5nm；
3) test specimen is fixed on electro spindle with backing and backing is upward, test specimen can be rotated with backing by electro spindle；To test specimen
On-line dynamic balancing is carried out with backing；
4) backing is carried out to repair disk using diamond single point cutter, is better than IT1 grades to form end face run-out amount on backing surface,
Repair disk area of the surface average roughness Ra better than 5nm, and disk area is repaiied with the depth of parallelism of test specimen end face at IT1 grades in backing surface
Within, comprise the following steps that：
4-1) polycrystalline diamond single-point lathe tool repaiies disk：Vertical turning pattern, when repairing disk the range of speeds of backing for 2000~
10000rpm, polycrystalline diamond single-point lathe tool is on the outside of the backing with 10~50 μm of cutting-in along backing radial feed, feed speed
Scope is 0.4~1.2mm/s, and feeding distance is the 1/4~1/2 of backing diameter；
4-2) single-crystal diamond single-point lathe tool repaiies disk：Vertical turning pattern, when repairing disk the range of speeds of backing for 2000~
10000rpm, single-crystal diamond single-point lathe tool is on the outside of the backing with 2~10 μm of cutting-in along backing radial feed, feed speed model
It is the 1/4~1/2 of backing diameter to enclose for 0.1~0.3mm/s, feeding distance；
5) test specimen and backing are removed, overturns, test specimen is fixed on electro spindle with backing again and test specimen is upward, test specimen and backing
It can be rotated by electro spindle；On-line dynamic balancing is carried out to test specimen and backing；
6) diamond single point cutter touching tool setting gauge, determines difference in height h of the test specimen end face with tool setting gauge to knife plane0；By diamond
Single point cutter is changed to the tool heads that top is connected with single abrasive particle, the abrasive particle touching tool setting gauge on tool heads top, then by instrument
Head moves up h along test specimen and the rotating axial direction of backing0+ δ, so that the abrasive particle on tool heads top is located above test specimen end face at δ,
Complete to knife；
7) tool heads level is moved to directly over the scratching point of test specimen end face, and moves down δ+apSo that scratching depth is ap；According to need
Scratching radius R where scratching speed v and the scratching point of test, passes throughThe setting speed of calculation testing piece and backing
n；According to interference ratio ρ, the arc radius r of single abrasive particle that need to be tested, scratching depth ap, pass throughThe radial feed speed s of calculating instrument head；Test specimen is rotated with backing according to setting speed n, and
Tool heads are according to radial feed speed s and scratching depth apAlong test specimen radial feed, so that abrasive particle scratches to be formed in test specimen end face
The cut of predetermined interference degrees, the data during being scratched during this by the measuring system collection being connected with tool heads.
2. the single abrasive particle that a kind of acted as reference mutual method according to claim 1 repaiies hard crisp test specimen in advance continuously scratches act of interference
Test method, it is characterised in that：In the step 7), tool heads are according to radial feed speed s and scratching depth apAlong test specimen footpath
Fed to while feeding along test specimen rotation axis direction.
3. the single abrasive particle that a kind of acted as reference mutual method according to claim 1 repaiies hard crisp test specimen in advance continuously scratches act of interference
Test method, it is characterised in that：The abrasive particle is diamond, CBN, oxide ceramics or nitride ceramics, and abrasive particle shape is ball
Shape, cone or polygonal pyramid shape；The abrasive particle is fixed in tool heads top by mechanical grip, plating or soldering；The tool heads
For pressure head.
4. the single abrasive particle that a kind of acted as reference mutual method according to claim 1 repaiies hard crisp test specimen in advance continuously scratches act of interference
Test method, it is characterised in that：The backing is disc, and test specimen is stacked with backing and is fixed together, and test specimen periphery does not surpass
Go out outside backing edge；The backing or test specimen are connected by vacuum cup with electro spindle.
5. the single abrasive particle that a kind of acted as reference mutual method according to claim 1 repaiies hard crisp test specimen in advance continuously scratches act of interference
Test method, it is characterised in that：The measuring system is dynamometry and acoustic emission system, including the dynamometer of mutual signal connection,
Acoustic emission system, data collecting card and signal amplifier；The tool heads are connected with dynamometer and acoustic emission system.
6. the single abrasive particle that a kind of acted as reference mutual method according to claim 5 repaiies hard crisp test specimen in advance continuously scratches act of interference
Test method, it is characterised in that：The intrinsic frequency of the dynamometer is higher than 4KHz, and dynamometry precision is better than 0.01N；The data are adopted
The sample rate of truck is higher than 2M/s.
7. the single abrasive particle that a kind of acted as reference mutual method according to claim 1 repaiies hard crisp test specimen in advance continuously scratches act of interference
Test method, it is characterised in that：The tool heads are excellent in the positioning accuracy along the rotating axial direction of test specimen and radial direction
In 0.1 μm, which coordinates control by displacement sensor and corresponding position feedback system.
8. the single abrasive particle that a kind of acted as reference mutual method according to claim 1 repaiies hard crisp test specimen in advance continuously scratches act of interference
Test method, it is characterised in that：The positioning accuracy of the tool setting gauge is better than 0.1 μm.
9. the single abrasive particle that a kind of acted as reference mutual method according to claim 1 repaiies hard crisp test specimen in advance continuously scratches act of interference
Test method, it is characterised in that：The cut is continuous helical shape cut, and the cut number of turns is more than 3.
10. the single abrasive particle that a kind of acted as reference mutual method according to claim 1 repaiies hard crisp test specimen in advance continuously scratches interference row
For test method, it is characterised in that：The tool heads axis is parallel to test specimen rotation axis.
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|---|---|---|---|---|
| CN102519869A (en) * | 2012-01-06 | 2012-06-27 | 北京理工大学 | Method for testing cutting and bonding friction characteristics with point-contact opened-closed type pin-disc friction system |
| CN103630453A (en) * | 2013-11-11 | 2014-03-12 | 湖南大学 | Controllable and high-precision experimental device for researching grinding mechanism |
| CN104759954A (en) * | 2015-05-06 | 2015-07-08 | 广州大学 | Prestress grinding method for revolved body workpiece |
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| US7163434B2 (en) * | 2004-09-27 | 2007-01-16 | Ceradyne, Inc. | Method and apparatus for generating complex shapes on cylindrical surfaces |
| EP2022576A1 (en) * | 2007-08-03 | 2009-02-11 | Wolfgang Linnenbrink | Method of improving the running performance of gearwheels and gear finishing machine for implementing the method |
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|---|---|---|---|---|
| CN102519869A (en) * | 2012-01-06 | 2012-06-27 | 北京理工大学 | Method for testing cutting and bonding friction characteristics with point-contact opened-closed type pin-disc friction system |
| CN103630453A (en) * | 2013-11-11 | 2014-03-12 | 湖南大学 | Controllable and high-precision experimental device for researching grinding mechanism |
| CN104759954A (en) * | 2015-05-06 | 2015-07-08 | 广州大学 | Prestress grinding method for revolved body workpiece |
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