CN1613605A - Ultrasonic magnetic rheological composite polishing method and polisher thereof - Google Patents
Ultrasonic magnetic rheological composite polishing method and polisher thereof Download PDFInfo
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- CN1613605A CN1613605A CN 200410044076 CN200410044076A CN1613605A CN 1613605 A CN1613605 A CN 1613605A CN 200410044076 CN200410044076 CN 200410044076 CN 200410044076 A CN200410044076 A CN 200410044076A CN 1613605 A CN1613605 A CN 1613605A
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Abstract
An ultrasonic-magnetorheologic polishing method features that the mixture of abrasive material and magnetorheologic liquid is filled in a small-diameter rotary hollow polishing head and a magnetic field is applied to it to make the magnetorheologic liquid become flexible polishing liquid on the polishing head while the ultrasonic vibration is applied to it for higher polishing effect. Its apparatus is composed of polishing head, ultrasonic generator, and electromagnet.
Description
Technical field:
The present invention relates to ultraprecise processing and optics processing technique field, be specifically related to material devices surfaces such as optical glass be carried out the ultraprecise method for processing and are the designed device of this method of realization by ultrasonic magnetic rheology composite polishing.
Background technology:
Along with the extensive use of aspheric surface device, not only the requirement to its precision, reliability improves day by day, also requires to possess efficient, mass-producted ability.Polishing mainly is the surface breakdown layer that manufacturing procedure produces before removing as the most important operation of optical precision processing, revises face shape error, reduces workpiece surface roughness.Magnetorheological polishing (MRF) technology is the external optical aspherical surface New Machining Technology that occurs in recent years, people such as Wm I.Kordonski of Byelorussia in 1992 and I.Prokhorov are applied to magnetic converting technique the Precision Machining of optical glass device the earliest, the optics machining center COM of nineteen ninety-five U.S. Rochester university (Thecenter for Optic Manufacturing) cooperates with Kordonski, first magnetic converting technique is applied in the optics processing, optical polish (MRF) technology that becomes the basis with magnetic current has been carried out a large amount of experimental studies.Technique of Magnetorheological Finishing has realized the comprehensive removal effect of machinery, chemistry to optical material, not only improved polishing efficiency, polishing process is controlled easily, can not produced the surface breakdown layer again, be fit to the demand of contemporary optics system the process industrial art performance of optics.The basic principle of magnetorheological polishing is that the magnetic flow liquid that will contain the finite concentration fine abrasive injects polishing area, apply a controlled high-gradient magnetic field simultaneously in this zone, under the effect in magnetic field, this regional magnetic flow liquid produces rheological effect, viscosity increases rapidly in the time at Millisecond, form the polishing tool of semi-solid on the polishing wheel surface, drive by polishing wheel and under the effect of hydrodynamic, realize polishing.After Technique of Magnetorheological Finishing is studied successfully by optics manufacturing center of U.S. Rochester university (COM) and QED company, obtaining good effect aspect the optical aspherical surface processing, be considered to the revolutionary change of optical precision polishing technology abroad, make polishing technology move towards science, improved the efficient of optical aspherical surface processing greatly from manual skill.But because the restriction of polishing wheel radius, this method relatively is suitable for processing the bigger concave curved surface of convex surface, plane and radius of curvature, the concave curved surface (it is 15mm that the Q22-XE numerical control magnetorheological polishing machine bed of the up-to-date release of present U.S. QED company can be processed minimum concave curved surface radius of curvature) that has than small curvature radius can not be processed, especially dark concave surface can not be processed.
Summary of the invention:
Technical problem to be solved by this invention is the defective that overcomes present Technique of Magnetorheological Finishing, a kind of ultrasonic magnetic rheology composite polishing method and device are provided, can realize the ultraprecise processing of the dark recessed aspherical optical element of small curvature radius, and be applied to the ultraprecise processing of free form surface optical element.Its step of finishing method of the present invention is as follows: one, adding is mixed with the Magnetorheologicai polishing liquid of abrasive material in stirring, constant temperature and permanent viscosity control device, and workpiece is fixed on the anchor clamps of workpiece numerical control table, NC table face; Start pump, make the Magnetorheologicai polishing liquid that is mixed with abrasive material pressure, flow out through the endoporus from tool heads such as circulation line by pump.Two, start electric main shaft, ultrasonic generator,, the Magnetorheologicai polishing liquid viscosity on tool heads surface is increased at Millisecond in the time rapidly, become semi-solid, form the flexible polishing head, with the tool heads rotation and make dither simultaneously to electromagnet energising.Three, the position of main shaft numerical control table, NC table control rubbing head, processing work is driven by the workpiece numerical control table, NC table, forms the machining locus that requires, and finally obtains high-precision optical surface.Four, the magnetic flow liquid after the polishing enters accumulator tank, flow into stirring, constant temperature and permanent viscosity control device, extract out by pump again, enter swivel joint by circulation line, through internal path, from the endoporus outflow of tool heads, so repeatedly, thereby realize recycling of magnetic flow liquid, and remain stable polishing characteristic.The vibration frequency of described ultrasonic generator 〉=16 kilo hertz; The rotary speed of described tool heads≤10000 rev/min; The magnetic induction intensity of described electromagnet 〉=1000 Gausses.Burnishing device of the present invention is by electric main shaft 1, main shaft numerical control table, NC table 2, ultrasonic generator 3, electromagnet 4, the tool heads 5 of hollow, anchor clamps 7, workpiece numerical control table, NC table 8, lathe bed 9, accumulator tank 10, stir, constant temperature and permanent viscosity control device 11, following circulation line 12, pump 14, cocycle pipeline 15, swivel joint 16 and internal path 17 are formed, the right-hand member that it is characterized in that main shaft numerical control table, NC table 2 is fixedlyed connected with the left end on lathe bed 9 tops, one side of electricity main shaft 1 is fixedlyed connected with the left end of main shaft numerical control table, NC table 2, fixedly connected with the output of electric main shaft 1 in the upper end of ultrasonic generator 3, fixedly connected with the lower end of ultrasonic generator 3 in the upper end of the tool heads 5 of hollow, electromagnet 4 skies are enclosed within ultrasonic generator 3 bottoms (skeleton that needs to guarantee electromagnet does not contact with ultrasonic generator), electromagnet or be fixed on the electric main shaft 1, or be fixed on the main shaft numerical control table, NC table 2, can control tool heads magnetic field intensity on every side, with the rheological behavior (also can adopt permanent magnet) of control magnetic flow liquid.Fixedly connected with the base portion upper end of lathe bed 9 in the lower end of workpiece numerical control table, NC table 8, fixedly connected with the upper surface of workpiece numerical control table, NC table 8 in the lower end of anchor clamps 7, accumulator tank 10 is fixed on the workpiece numerical control table, NC table 8 of anchor clamps 7 peripheries, the upper end of following circulation line 12 is connected with the lower end of accumulator tank 10, the lower end of following circulation line 12 and stirring, the upper end of constant temperature and permanent viscosity control device 11 is connected, the lower end of cocycle pipeline 15 and stirring, the downside of constant temperature and permanent viscosity control device 11 is connected, be serially connected with pump 14 on the cocycle pipeline 15, swivel joint 16 is fixed on the upper end of electric main shaft 1, the upper end of cocycle pipeline 15 is connected with swivel joint 16, electricity main shaft 1, be provided with inner passage 17 in the tool heads 5 of ultrasonic generator 3 and hollow, the upper end of inner passage 17 is connected with swivel joint 16.Stirring, constant temperature and permanent viscosity control device 11 are made up of motor and decelerator 22, power transmission shaft 23, stirring vane 24, cooling device 25, temperature sensor 26, temperature control equipment 27, viscosity control device 28, magnetic flow liquid carrier fluid supplementary device 29, pipeline 30, viscosity measurements device 31 and casing 32.Motor and decelerator 22 are arranged on the center on casing 32 tops, fixedly connected with the output shaft of motor and decelerator 22 in the upper end of power transmission shaft 23, fixedly connected with stirring vane 24 in the lower end of power transmission shaft 23, cooling device 25 is fixed on the bottom of casing 32 outer walls, temperature control equipment 27 is arranged on a side on casing 32 tops, temperature sensor 26 is located at the bottom in the casing 32, temperature sensor 26 is electrically connected with temperature control equipment, temperature control equipment 27 is electrically connected with cooling device 25, viscosity control device 28 and magnetic flow liquid carrier fluid supplementary device 29 are separately positioned on the opposite side on casing 32 tops, viscosity measurements device 31 is located at the bottom in the casing 32, viscosity measurements device 31 is electrically connected with viscosity control device 28, viscosity control device 28 is electrically connected with magnetic flow liquid carrier fluid supplementary device 29, is connected with pipeline 30 between magnetic flow liquid carrier fluid supplementary device 29 and the casing 32.Finishing method of the present invention has following advantage: with ultrasonic magnetic rheology composite polishing, concentration of energy acts on machining area, has improved crudy and efficient; Adopt the hollow polished tool heads of minor diameter, be applicable to that processing has the concave curved surface optical element than small curvature radius, is particularly suited for the processing of dark concave surface optical element; Combine with Numeric Control Technology, can not only process sphere, can also process aspheric surface, and can be applied to process the free form surface optical element.Burnishing device of the present invention has advantage simple in structure, compact, easy to operate, that machining accuracy is high.The present invention has very big using value in the ultraprecise manufacture field of aspherical optical element.Experiment showed, that optical glass (K9) surface roughness after the inventive method polishing has reached nanoscale.
Description of drawings:
Fig. 1 is the structural representation of burnishing device of the present invention, and Fig. 2 is the structural representation of the specific embodiment three.Fig. 3 is the structural representation of the specific embodiment four.Fig. 4 is the structural representation of stirring, constant temperature and permanent viscosity control device 11.
The specific embodiment:
The specific embodiment one: its step of the finishing method of present embodiment is as follows: one, adding is mixed with the Magnetorheologicai polishing liquid of abrasive material in stirring, constant temperature and permanent viscosity control device, and workpiece is fixed on the anchor clamps of workpiece numerical control table, NC table face; Start pump, make the Magnetorheologicai polishing liquid that is mixed with abrasive material pressure, flow out through the endoporus from tool heads such as circulation line by pump.Two, start electric main shaft, ultrasonic generator,, the Magnetorheologicai polishing liquid viscosity on tool heads surface is increased at Millisecond in the time rapidly, become semi-solid, form the flexible polishing head, with the tool heads rotation and make dither simultaneously to electromagnet energising.Three, the position of main shaft numerical control table, NC table control rubbing head, processing work is driven by the workpiece numerical control table, NC table, forms the machining locus that requires, and finally obtains high-precision optical surface.Four, the magnetic flow liquid after the polishing enters accumulator tank, flow into stirring, constant temperature and permanent viscosity control device, extract out by pump again, enter swivel joint by circulation line, through internal path, from the endoporus outflow of tool heads, so repeatedly, thereby realize recycling of magnetic flow liquid, and remain stable polishing characteristic.The vibration frequency of described ultrasonic generator 〉=16 kilo hertz are generally the 16-1000 kilohertz; The rotary speed of described tool heads≤10000 rev/min; The magnetic induction intensity of described electromagnet 〉=1000 Gausses is generally 1000-20000 Gauss.
The specific embodiment two: (referring to Fig. 1, Fig. 4) ultrasonic magnetic rheology composite polishing device, it is by electric main shaft 1, main shaft numerical control table, NC table 2, ultrasonic generator 3, electromagnet 4, the tool heads 5 of hollow, anchor clamps 7, workpiece numerical control table, NC table 8, lathe bed 9, accumulator tank 10, stir, constant temperature and permanent viscosity control device 11, following circulation line 12, pump 14, cocycle pipeline 15, swivel joint 16 and internal path 17 are formed, the right-hand member that it is characterized in that main shaft numerical control table, NC table 2 is fixedlyed connected with the left end on lathe bed 9 tops, one side of electricity main shaft 1 is fixedlyed connected with the left end of main shaft numerical control table, NC table 2, fixedly connected with the output of electric main shaft 1 in the upper end of ultrasonic generator 3, fixedly connected with the lower end of ultrasonic generator 3 in the upper end of the tool heads 5 of hollow, electromagnet 4 skies are enclosed within ultrasonic generator 3 bottoms (skeleton that needs to guarantee electromagnet does not contact with ultrasonic generator), electromagnet or be fixed on the electric main shaft 1, or be fixed on the main shaft numerical control table, NC table 2, can control tool heads magnetic field intensity on every side, with the rheological behavior (also can adopt permanent magnet) of control magnetic flow liquid.Fixedly connected with the base portion upper end of lathe bed 9 in the lower end of workpiece numerical control table, NC table 8, fixedly connected with the upper surface of workpiece numerical control table, NC table 8 in the lower end of anchor clamps 7, accumulator tank 10 is fixed on the workpiece numerical control table, NC table 8 of anchor clamps 7 peripheries, the upper end of following circulation line 12 is connected with the lower end of accumulator tank 10, the lower end of following circulation line 12 and stirring, the upper end of constant temperature and permanent viscosity control device 11 is connected, the lower end of cocycle pipeline 15 and stirring, the downside of constant temperature and permanent viscosity control device 11 is connected, be serially connected with pump 14 on the cocycle pipeline 15, swivel joint 16 is fixed on the upper end of electric main shaft 1, the upper end of cocycle pipeline 15 is connected with swivel joint 16, electricity main shaft 1, be provided with inner passage 17 in the tool heads 5 of ultrasonic generator 3 and hollow, the upper end of inner passage 17 is connected with swivel joint 16.Stirring, constant temperature and permanent viscosity control device 11 are made up of motor and decelerator 22, power transmission shaft 23, stirring vane 24, cooling device 25, temperature sensor 26, temperature control equipment 27, viscosity control device 28, magnetic flow liquid carrier fluid supplementary device 29, pipeline 30, viscosity measurements device 31 and casing 32.Wherein the output shaft of motor and decelerator 22 links to each other with power transmission shaft 23 upper ends, and power transmission shaft 23 lower ends link to each other with stirring vane 24, and like this, motor and decelerator 22 can drive stirring vane 24 rotations, realize the stirring of magnetic flow liquid.Cooling device 25 is centered around casing 32 outer walls, and detect the temperature of magnetic flow liquid and pass to temperature control equipment 27 by temperature sensor 26, again by temperature control equipment 27 control cooling devices 25, thus the thermostatic control of realization magnetic flow liquid.The viscosity control of magnetic flow liquid is achieved as follows: viscosity measurements device 31 detects the viscosity of magnetic flow liquid, and testing result passed to viscosity control device 28, the carrier fluid discharge of viscosity control device 28 control magnetic flow liquid carrier fluid supplementary devices 29, carrier fluid flows in the casing 32 through the pipeline 30 of magnetic flow liquid carrier fluid supplementary device 29 lower ends.Like this, by stirring, constant temperature and the control of permanent viscosity, guarantee that magnetic flow liquid has stable polishing characteristic all the time.If the processing surface of revolution needs three-dimensional digital control system (being made of jointly workpiece numerical control table, NC table 8 and main shaft numerical control table, NC table 2); If the processing free form surface needs five coordinate digital control systems.The processing end of the tool heads 5 of hollow is spherical, adds man-hour, and magnetic flow liquid 13 is distributed in the workpiece 16 that acts on the spherical surface of tool heads 5 of hollow on the anchor clamps 7.
The specific embodiment three: the difference of (referring to Fig. 2) present embodiment and the specific embodiment one is, replace electric main shaft 1 by motor 18, shaft coupling 19, main spindle box 20, main shaft 21, connect with shaft coupling 19 between the input of the output of motor 18 and main spindle box 20, main shaft 21 on the main spindle box 20 is fixedlyed connected with supersonic generator 3, and other composition is identical with the specific embodiment two with annexation.
The specific embodiment four: the difference of (referring to Fig. 3) present embodiment and the specific embodiment one is, has cancelled electric main shaft 1 and swivel joint 16, and ultrasonic generator 3 is fixed on the left end of main shaft numerical control table, NC table 2.Other composition is identical with the specific embodiment one with annexation.
Claims (4)
1, ultrasonic magnetic rheology composite polishing method is characterized in that step is as follows: one, adding is mixed with the Magnetorheologicai polishing liquid of abrasive material in stirring, constant temperature and permanent viscosity control device, and workpiece is fixed on the anchor clamps of workpiece numerical control table, NC table face; Start pump, make the Magnetorheologicai polishing liquid that is mixed with abrasive material pressure, flow out through the endoporus from tool heads such as circulation line by pump; Two, start electric main shaft, ultrasonic generator,, the Magnetorheologicai polishing liquid viscosity on tool heads surface is increased at Millisecond in the time rapidly, become semi-solid, form the flexible polishing head, with the tool heads rotation and make dither simultaneously to electromagnet energising; Three, the position of main shaft numerical control table, NC table control rubbing head, processing work is driven by the workpiece numerical control table, NC table, forms the machining locus that requires, and finally obtains high-precision optical surface; Four, the magnetic flow liquid after the polishing enters accumulator tank, flows into stirring, constant temperature and permanent viscosity control device, is extracted out by pump again, enters swivel joint by circulation line, and through internal path, the endoporus outflow from tool heads so repeatedly, recycles magnetic flow liquid; The vibration frequency of described ultrasonic generator 〉=16 kilo hertz; The rotary speed of described tool heads≤10000 rev/min; The magnetic induction intensity of described electromagnet 〉=1000 Gausses.
2, ultrasonic magnetic rheology composite polishing device, it is by electric main shaft (1), main shaft numerical control table, NC table (2), ultrasonic generator (3), electromagnet (4), the tool heads of hollow (5), anchor clamps (7), workpiece numerical control table, NC table (8), lathe bed (9), accumulator tank (10), stir, constant temperature and permanent viscosity control device (11), following circulation line (12), pump (14), cocycle pipeline (15), swivel joint (16) and internal path (17) are formed, the right-hand member that it is characterized in that main shaft numerical control table, NC table (2) is fixedlyed connected with the left end on lathe bed (9) top, one side of electricity main shaft (1) is fixedlyed connected with the left end of main shaft numerical control table, NC table (2), fixedly connected with the output of electric main shaft (1) in the upper end of ultrasonic generator (3), fixedly connected with the lower end of ultrasonic generator (3) in the upper end of the tool heads of hollow (5), electromagnet (4) sky is enclosed within ultrasonic generator (3) bottom, fixedly connected with the base portion upper end of lathe bed (9) in the lower end of workpiece numerical control table, NC table (8), fixedly connected with the upper surface of work numerical control table, NC table (8) in the lower end of anchor clamps (7), accumulator tank (10) is fixed on the peripheral workpiece numerical control table, NC table (8) of anchor clamps (7), the upper end of following circulation line (12) is connected with the lower end of accumulator tank (10), the lower end and the stirring of following circulation line (12), the upper end of constant temperature and permanent viscosity control device (11) is connected, the lower end and the stirring of cocycle pipeline (15), the downside of constant temperature and permanent viscosity control device (11) is connected, be serially connected with pump (14) on the cocycle pipeline (15), swivel joint (16) is fixed on the upper end of electric main shaft (1), the upper end of cocycle pipeline (15) is connected with swivel joint (16), electricity main shaft (1), be provided with inner passage (17) in the tool heads (5) of ultrasonic generator (3) and hollow, the upper end of inner passage (17) is connected with swivel joint (16).
3, ultrasonic magnetic rheology composite polishing device according to claim 2 is characterized in that the processing end of the tool heads (5) of hollow is sphere.
4, ultrasonic magnetic rheology composite polishing device according to claim 2, it is characterized in that stirring, constant temperature and permanent viscosity control device (11) are by motor and decelerator (22), power transmission shaft (23), stirring vane (24), cooling device (25), temperature sensor (26), temperature control equipment (27), viscosity control device (28), magnetic flow liquid carrier fluid supplementary device (29), pipeline (30), viscosity measurements device (31) and casing (32) are formed, motor and decelerator (22) are arranged on the center on casing (32) top, fixedly connected with the output shaft of motor and decelerator (22) in the upper end of power transmission shaft (23), fixedly connected with stirring vane (24) in the lower end of power transmission shaft (23), cooling device (25) is fixed on the bottom of casing (32) outer wall, temperature control equipment (27) is arranged on a side on casing (32) top, temperature sensor (26) is located at the bottom in the casing (32), temperature sensor (26) is electrically connected with temperature control equipment, temperature control equipment (27) is electrically connected with cooling device (25), viscosity control device (28) and magnetic flow liquid carrier fluid supplementary device (29) are separately positioned on the opposite side on casing (32) top, viscosity measurements device (31) is located at the bottom in the casing (32), viscosity measurements device (31) is electrically connected with viscosity control device (28), viscosity control device (28) is electrically connected with magnetic flow liquid carrier fluid supplementary device (29), is connected with pipeline (30) between magnetic flow liquid carrier fluid supplementary device (29) and the casing (32).
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| CN1216723C (en) * | 2003-08-22 | 2005-08-31 | 清华大学 | Magnetic rheologic polishing head in electromagnetic mode |
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