CN106584218B - A kind of fine structure surface finishing method, medium and device - Google Patents
A kind of fine structure surface finishing method, medium and device Download PDFInfo
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- CN106584218B CN106584218B CN201710002212.7A CN201710002212A CN106584218B CN 106584218 B CN106584218 B CN 106584218B CN 201710002212 A CN201710002212 A CN 201710002212A CN 106584218 B CN106584218 B CN 106584218B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/10—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work
- B24B31/102—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work using an alternating magnetic field
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F7/00—Magnets
- H01F7/02—Permanent magnets [PM]
- H01F7/0231—Magnetic circuits with PM for power or force generation
- H01F7/0242—Magnetic drives, magnetic coupling devices
Abstract
The Key Scientific And Technicals problems such as the present invention is easy to destroy for minutiae structure in fine structure surface (characteristic size is less than 500 μm) finishing, finishing homogeneity is difficult to ensure, material removing rate is low, have invented a kind of magnetic force and speed drives the novel superfine structure surface intelligence controllable light adjusting method and device of special magnetic shear thickening finishing medium.It is control effectively alternating magnetic field by the magnetic field control unit of device, motion control unit and ancillary coil control unit, and the speed of mainshaft is cooperated to adjust, the forms of motion and sphere of action for realizing intelligent control finishing active force and special magnetic shear thickening finishing medium, to reach the high-efficiency soft skin processing of minutiae body structure surface.Provide the composition and method of manufacturing technology of special magnetic shear thickening finishing medium.The present invention can be avoided the operating space limitation and manufacture difficulty when structuring minutiae finishing of traditional finishing process to part, to realize efficient, high-precision, high quality flexibility skin processing.
Description
Technical field
The present invention relates to a kind of controllable polishing processing method in fine structure surface, special finishing medium and finishing dresses
It sets, belongs to the high-efficiency and precision Finishing field of difficult-to-machine material part key minutiae body structure surface.
Background technique
The surface finishing technology of machine components is that workpiece surface integrality further increases after mechanical Precision Machining
Continue, by not cutting off or only cutting off very thin material surface layer, to realize the micro- flaw in removal surface, micro-crack, stretch remnants
Stressor layers reduce workpiece surface roughness or enhancing compressive residual stress with strengthening surface intensity, raising part service life
Deng.Currently, common surface finishing process mainly includes mechanical grinding and polishing, chemical polishing, electrolysis finishing, chemical machine
Tool polishing, the grinding and polishing of ultrasonic wave auxiliary, crush and grind, fluid finishing, Magnetorheological Polishing, magnetic grinding etc..Mechanical grinding and polishing
As classical contact finishing method, using abrasive material, grinding tool or polishing pad under mutual moving-state with workpiece surface
Direct Mechanical Contact, the surface of smooth workpiece to be machined.Chemical polishing is similar to the principle of electrobrightening, passes through matching for polishing fluid
It is standby, complicated mechanical equipment is not needed, complex-shaped workpiece surface polishing, still, the surface roughness of polishing can be realized
It is higher, generally ten to some tens of pm magnitude.Chemically mechanical polishing is partly being led using the principle of chemistry and mechanical Compound Machining
In body silicon wafer and the polishing of photoelectric crystal substrate, Subnano-class Super-smooth Surface Polishing is realized, but processing cost is very expensive, and
And it is typically only used for plane finishing.By the ultrasonic polishing method of supersonic oscillations abrasive suspension, processing macroforce is small, will not
Cause workpiece to deform, in conjunction with the compound action of chemistry and electrochemistry, processing efficiency can be effectively improved.By swiftly flowing liquid
And its abrasive grain carried washes away the polishing method of workpiece surface, has significant processing to the inner surface finishing of complicated bend blind hole
Advantage.By field drives, the technique that finishing is carried out to workpiece surface using magnetic abrasive medium or magnetorheological finishing medium
Method has the characteristics that high in machining efficiency, processing conditions is easily controllable, burnishes integrality is good, is widely used in difficult add
The surface finishing of work material.However, existing surface finishing method is mainly for macro surface skin processing, for fine structure
Change surface, especially complicated micro- texture surface is easy to destroy minutiae, it is difficult to ensure that material removes homogeneity, and exist
The low equal technology barriers of material removing rate, it is more difficult to directly apply.As current precision die designs the fast development with manufacturing technology,
The structured topography of mold to high-precision, miniaturization development, the micro-features size of mold surmounted 500 μm hereinafter,
Even develop to nanoscale.Therefore, develop it is novel it is efficient, high-precision, (characteristic size is less than the fine structure of high quality
500 μm) surface finishing method has important theoretical significance and practical application value with technology.
The present invention is easy to brokenly for minutiae structure in fine structure surface (characteristic size is less than 500 μm) finishing
The Key Scientific And Technicals problems such as bad, finishing homogeneity is difficult to ensure, material removing rate is low have been invented a kind of special magnetism of magnetic drive and have been cut
The novel finishing method and apparatus for cutting thickening finishing medium avoids conventional tool to zero by the Untouched control of operating force
Machining interference when the structured features finishing of part, to realize high-effect high-quality finishing.
Summary of the invention
The present invention provides a kind of controllable polishing processing method in fine structure surface, medium and device.Utilize alternation coil
The intelligent control of special magnetic shear thickening finishing medium is realized in the effect for generating magnetic field, solves the dynamic of surface finishing active force
Control problem improves finishing quality and efficiency；Meanwhile the coupled vibrations of special finishing medium is generated by applying driving signal,
Further increase finishing efficiency.
A kind of fine structure surface finishing method, special magnetic shear thickening medium and its finishing dress of the invention
Technical solution provided by setting is as follows:
1. described device includes magnetic field control unit, motion control unit, ancillary coil control unit；Magnetic field control unit
It mainly include high-speed main spindle, main shaft connecting plate, magnetizer, electromagnetic coil, coil base；The main shaft one end of the connection board connection is high
Fast main shaft, the other end connect electromagnetic coil pedestal；The electromagnetic coil is wound on electromagnetic coil pedestal；Motion control unit master
It to include three-axis accurate electricity driving displacement platform, the Three Degree Of Freedom for providing fine structure part is mobile；Ancillary coil control unit
It mainly include main ancillary coil, connecting plate, the one end of the connection board connects ancillary coil, and the other end is connected to three-axis accurate electricity
On dynamic displacement platform, and it is placed on the lower section to finishing fine structure part；Described device further include fine structure part,
Fixture, clamp connecting plate；Described clamp connecting plate one end jockey, the other end connect three-axis accurate electricity driving displacement platform；Institute
It states and processes vacuum suction air inlet on fixture, it can be achieved that the absorption of fine structure part clamp, mechanical point is avoided to contact pair
Thin-walled part easy to damage generates stress and concentrates.
2. the finishing method, is realized by following steps:
(1) electromagnetic coil is wound in coil base；
(2) it is adjusted by three-axis accurate electricity driving displacement platform to magnetic fields region to the fine structure part of finishing；
(3) magnetic field force that two pairs of electromagnetic coils of vertical distribution are formed after being powered is applied to special magnetic shear thickening light
On whole medium；
(4) three-axis accurate electricity driving displacement platform controls the fine structure part to finishing to magnetic fields area, by it
The precision positioning of workpiece is realized in stroke control；
(5) it is applied to the driving signal and adjustment main axis speed of electromagnetic coil by control, changes special magnetism and cuts
The active force and the mode of action between thickening finishing medium and fine structure part are cut, and then is realized to special magnetic shear thickening
The digital intelligent of finishing medium controls；
(6) electromagnetic coil applies the radial vibration magnetic field force that high-frequency signal generates and the axial vibration that ancillary coil generates
Moving field power further increases superfine structure surface skin processing efficiency.
3. the special magnetic shear thickening finishing medium is as follows:
(1) finishing medium ingredients are adjusted by abrasive material, magnetic medium, dispersed phase, decentralized medium, oxidant, activator and PH
Agent composition；Abrasive material selects metal oxide abrasive, silicon carbide, garnet or diamond, and granularity is 1-200 μm；Magnetic medium choosing
With iron carbonyl, granularity is 1-50 μm；Dispersed phase selects calcium carbonate, silica, polystyrene or polymethyl methacrylate
(PMMA), partial size is less than 1 μm；Decentralized medium is selected water, salting liquid, ethylene glycol (EG), propylene glycol (PG), butanediol (BG), is gathered
Ethylene glycol (PEG) or mineral oil；Oxidant and activator select sodium peroxide, sodium hypochlorite, potassium permanganate or peroxidating
Calcium；PH regulator selects sodium carbonate, potassium carbonate or sodium bicarbonate；
(2) finishing media fabrication process is as follows: using oil bath paddling process or ball-milling method under ultrasonic wave added by dispersed phase with
Decentralized medium mixing, is made dispersion, and solid masses content is 10%-80%；When dispersed phase partial size be 1 nm-100 nm,
The mode for selecting oil bath paddling process to combine with ultrasonic dispersion makes the dispersion, will under 70-90 DEG C of oil bath temperature
Quantitative dispersed phase is slowly added in decentralized medium, and mechanical stirring 1-2 h is carried out under ultrasonic wave added, controls velocity interval
Dispersion is made until dispersed phase is abundant and is evenly dispersed into decentralized medium in 200-350 r/min；When dispersed phase
When partial size is 100 nm-1 μm, mode of the ball-milling method in conjunction with ultrasonic dispersion is selected to make the dispersion, with abrading-ball
The dispersed phase 0.5-1 h for dry grinding quantitative is then added quantitative decentralized medium and carries out ball milling 3-5 h under ultrasonic wave added, is made
The dispersion；The quantitatively dispersion and quantitative abrasive material, magnetic medium, oxidant, activator, PH regulator are mixed
It closes, ball milling 1-2 h is carried out under ultrasonic wave added, abrasive dispersion system is made, be placed into 24 h in vacuum oven, control temperature
20-27 DEG C of range, the bubble in the abrasive dispersion system is removed, manufacture is at special magnetic shear thickening finishing medium.
The beneficial effects of the present invention are: a kind of 1, fine structure surface finishing method of the present invention, passes through
The adjusting of alternating magnetic field is easy to the digital intelligent control of skin processing convenient for control magnetic force；2, of the present invention
A kind of fine structure surface finishing method generates different by adjusting the relative position of two pairs of electromagnetic coil magnetizers
The magnetic line of force of distribution is distributed.The lower inside magnetic confining field generated of remote configuration, magnetic shear thickening finishing is situated between in overlay region
Matter is in stable state, can under the drive of high-speed main spindle high-speed motion；It can produce aggregation protrusion in magnetic field under closely configuring
Magnetic shear thickening finishing medium can be used as flexible finishing " small-sized aggregation grinding tool ", avoid rigid machining tool to micro-structural
The limitation of surface processing space；3, the electromagnetic coil of a kind of fine structure surface finishing device of the present invention and auxiliary
Index contour circle, by apply driving signal can in fine structure surface finishing process coupled vibrations, improve skin processing efficiency.
Detailed description of the invention
Fig. 1 is that a kind of magnetic field of fine structure surface finishing method described in specific embodiment one or two is formed
Schematic diagram.
Fig. 2 is a kind of overall structure signal of fine structure surface finishing device described in specific embodiment three
Figure.
Fig. 3 is a kind of coil configuration structure of fine structure surface finishing device described in specific embodiment three
Schematic diagram.
Fig. 4 is the knot that part is processed in a kind of fine structure surface finishing device described in specific embodiment five
Structure schematic surface.
Specific embodiment
Specific embodiment 1: illustrating in conjunction with Fig. 1, Fig. 2, Fig. 3 and Fig. 4, a kind of fine structure described in present embodiment
The surface finishing method of the special magnetic shear thickening finishing medium in surface, the method are mainly real by following basic step
It is existing:
(1) electromagnetic coil 3-2 is wound on 3-3 in coil base；
(2) it is adjusted by three-axis accurate electricity driving displacement platform 2-6 to magnetic field and is made to the fine structure part 2-4 of finishing
Use region；
(3) magnetic field force that two couples of electromagnetic coil 3-2 of vertical distribution are formed after being powered is applied to special magnetic shear thickening
On finishing medium 4-2；
(4) three-axis accurate electricity driving displacement platform 2-6 control to the fine structure part 2-4 of finishing to magnetic fields area,
The precision positioning for realizing workpiece is controlled by its stroke；
(5) it is applied to the field drives signal and adjustment main shaft 2-1 velocity of rotation of electromagnetic coil 3-2 by control, changes
Active force and the mode of action between special magnetism shear thickening finishing medium 4-2 and fine structure part 2-4, and then realization pair
The digital intelligent control of special magnetism shear thickening finishing medium；
(6) what the radial vibration magnetic field force and ancillary coil 2-10 that electromagnetic coil 3-2 application high-frequency signal generates generated
Axial vibration magnetic field force further increases superfine structure surface skin processing efficiency.
By adjusting the relative position of two couples of electromagnetic coil magnetizer 1-1, different distributions magnetic line of force 1-2 is generated, long distance is worked as
From internal magnetic confining field under configuration condition, is generated, in the 1-3 of overlay region, special magnetism shear thickening finishing medium 4-2 is in steady
Determine state, the high-speed motion under the drive of high-speed main spindle 2-1 realizes the finishing of fine structure surface flexible；When short distance configures
Under the conditions of, the special magnetism shear thickening finishing medium 4-2 for generating magnetic field aggregation protrusion can be used as flexible finishing " small-sized aggregation mill
Tool " 1-4, realizes the finishing of fine structure surface flexible.
Specific embodiment 2: illustrating in conjunction with Fig. 2 and Fig. 3, a kind of fine structure surface finishing described in present embodiment
The operating device of processing method, it includes magnetic field control unit 2-3, motion control unit, ancillary coil 2-10 control unit；Magnetic
Field control unit 2-3 mainly includes high-speed main spindle 2-1, main shaft connecting plate 2-2, magnetizer 3-1, electromagnetic coil 3-2, coil base
3-3, described one end main shaft connecting plate 2-2 connect high-speed main spindle 2-1, and the other end connects electromagnetic coil pedestal 3-3, the electromagnetic wire
Circle 3-2 is wound on electromagnetic coil pedestal 3-3；Motion control unit mainly includes three-axis accurate electricity driving displacement platform 2-6, is provided
The Three Degree Of Freedom of fine structure part 2-4 is mobile；Ancillary coil 2-10 control unit mainly include main ancillary coil 2-10,
Connecting plate 2-11, the one end of the connection board connect ancillary coil 2-10, and the other end is connected to three-axis accurate electricity driving displacement platform 2-6
On, and it is placed on the lower section to finishing fine structure part 2-4.
Specific embodiment 3: being illustrated in combination with fig. 2, a kind of fine structure surface finishing side described in present embodiment
The operating device of method, it includes fine structure part 2-4, fixture 2-5, clamp connecting plate 2-9；The clamp connecting plate 2-9
One end jockey 2-5, the other end connect three-axis accurate electricity driving displacement platform 2-6, other compositions and connection relationship and it is specific in fact
It is identical to apply mode two.
Specific embodiment 4: being illustrated in combination with fig. 2, a kind of fine structure surface finishing side described in present embodiment
The operating device of method, process vacuum suction air inlet 2-8 on the fixture 2-5, it can be achieved that fine structure part 2-4 absorption
Clamping avoids mechanical point contact from generating stress to thin-walled part easy to damage and concentrates, other compositions and connection relationship and it is specific in fact
It is identical to apply mode two or three.
Specific embodiment 5: illustrating in conjunction with Fig. 2 and Fig. 4, a kind of fine structure surface finishing described in present embodiment
The operating device of processing method, the electromagnetic coil 3-2, ancillary coil 2-10 can apply driving signal by controller 2-7, produce
Raw alternating magnetic field, adjusting control signal can realize that special magnetism shear thickening finishing medium 4-2 is recessed to fine structure part 2-4
The skin processing of groove sidewall face 4-1 and bottom surface 4-3, formed Digital manufacturing control, other compositions and connection relationship and it is specific in fact
Apply mode two, three or four identical.
Specific embodiment 6: illustrating in conjunction with Fig. 2 and Fig. 3, a kind of fine structure surface finishing described in present embodiment
The operating device of processing method, the electromagnetic coil 3-2 and ancillary coil 2-10 apply the radial direction generated after driving signal and axis
Surface finishing efficiency, other compositions and connection relationship and specific embodiment two, three, four are helped to improve to complex vibration
Or five is identical.
Based on a kind of fine structure surface finishing method, medium and dress described in specific embodiment one to six
It sets, using minute groove surface as test sample, carries out the surface finishing with micrometer-class form workpiece, can pass through
The control signal and adjustment main axis speed of electromagnetic coil, which are formed, acts on special magnetic shear thickening finishing medium 4-2 finishing
The control of the digital intelligent of intensity and range.
Claims (8)
1. a kind of special magnetic shear thickening finishing medium in fine structure surface, it is characterised in that:
(1) composition of the finishing medium is by abrasive material, magnetic medium, dispersed phase, decentralized medium, oxidant, activator and PH tune
Save agent composition；Abrasive material selects metal oxide abrasive, silicon carbide, garnet or diamond, and granularity is 1-200 μm；Magnetic medium
Iron carbonyl is selected, granularity is 1-50 μm；Dispersed phase selects calcium carbonate, silica, polystyrene or polymethyl methacrylate
(PMMA), partial size is less than 1 μm；Decentralized medium is selected water, salting liquid, ethylene glycol (EG), propylene glycol (PG), butanediol (BG), is gathered
Ethylene glycol (PEG) or mineral oil；Oxidant and activator select sodium peroxide, sodium hypochlorite, potassium permanganate or peroxidating
Calcium；PH regulator selects sodium carbonate, potassium carbonate or sodium bicarbonate；
(2) manufacturing process flow of the finishing medium includes: that will be divided under ultrasonic wave added using oil bath paddling process or ball-milling method
Dephasing is mixed with decentralized medium, and dispersion is made, and solid masses content is 10%-80%；When the partial size of dispersed phase is 1 nm-
100 nm, the mode for selecting oil bath paddling process to combine with ultrasonic dispersion makes the dispersion, in 70-90 DEG C of oil bath temperature
Under degree, quantitative dispersed phase is slowly added in decentralized medium, and carries out mechanical stirring 1-2 h under ultrasonic wave added, control speed
Range 200-350 r/min is spent, until dispersed phase is abundant and is evenly dispersed into decentralized medium, dispersion is made；When point
When the partial size of dephasing is 100 nm-1 μm, selects mode of the ball-milling method in conjunction with ultrasonic dispersion to make the dispersion, transport
The dispersed phase 0.5-1 h for dry grinding quantitative with abrading-ball is then added quantitative decentralized medium and carries out ball milling 3-5 under ultrasonic wave added
The dispersion is made in h；It will the quantitative dispersion and quantitative abrasive material, magnetic medium, oxidant, activator, PH adjusting
Agent mixing, ball milling 1-2 h is carried out under ultrasonic wave added, abrasive dispersion system is made, is placed into 24 h in vacuum oven, is controlled
20-27 DEG C of temperature range, the bubble in the abrasive dispersion system is removed, manufacture is at special magnetic shear thickening finishing medium.
2. a kind of surface finishing of the special magnetic shear thickening finishing medium in fine structure surface according to claim 1
Processing method, it is characterised in that: the method is mainly realized by following basic step:
(1) electromagnetic coil (3-2) is wound in coil base (3-3)；
(2) it is adjusted by three-axis accurate electricity driving displacement platform (2-6) to magnetic fields to the fine structure part (2-4) of finishing
Region；
(3) magnetic field force that two pairs of electromagnetic coils (3-2) of vertical distribution are formed after being powered is applied to special magnetic shear thickening light
On whole medium (4-2)；
(4) three-axis accurate electricity driving displacement platform (2-6) control to the fine structure part (2-4) of finishing to magnetic fields area,
The precision positioning for realizing workpiece is controlled by its stroke；
(5) it is applied to the field drives signal and adjustment main shaft (2-1) velocity of rotation of electromagnetic coil (3-2) by control, changes
Active force and the mode of action between special magnetism shear thickening finishing medium (4-2) and fine structure part (2-4), Jin Ershi
Now the digital intelligent of special magnetic shear thickening finishing medium (4-2) is controlled；
(6) what the radial vibration magnetic field force and ancillary coil (2-10) that electromagnetic coil (3-2) application high-frequency signal generates generated
Axial vibration magnetic field force further increases superfine structure surface skin processing efficiency.
3. a kind of fine structure surface finishing method according to claim 2, it is characterised in that: by adjusting two
It to the relative position of electromagnetic coil magnetizer (1-1), generates the different distributions magnetic line of force (1-2), under remote configuration condition, produces
Raw internal magnetic confining field, in overlay region (1-3), feature magnetism shear thickening finishing medium (4-2) is in stable state, in height
The finishing of fine structure surface flexible is realized in high speed relative motion under the drive of fast main shaft (2-1)；When short distance configuration condition
Under, the special magnetic shear thickening finishing medium (4-2) for generating magnetic field aggregation protrusion can be used as flexible finishing " small-sized aggregation mill
Tool " (1-4) realizes the finishing of fine structure surface flexible.
4. a kind of operating device of fine structure surface finishing method according to claim 2 or 3, feature exist
In: described device includes magnetic field control unit (2-3), motion control unit, ancillary coil (2-10) control unit；Magnetic field control
Unit (2-3) mainly includes high-speed main spindle (2-1), main shaft connecting plate (2-2), magnetizer (3-1), electromagnetic coil (3-2), coil
Pedestal (3-3)；Described main shaft connecting plate one end (2-2) connects high-speed main spindle (2-1), and the other end connects electromagnetic coil pedestal (3-
3)；The electromagnetic coil (3-2) is wound on electromagnetic coil pedestal (3-3)；Motion control unit mainly includes three-axis accurate electricity
Dynamic displacement platform (2-6), the Three Degree Of Freedom for providing fine structure part (2-4) are mobile；Ancillary coil (2-10) control unit
It mainly include main ancillary coil (2-10), connecting plate (2-11), the one end of the connection board connects ancillary coil (2-10), another
End is connected on three-axis accurate electricity driving displacement platform (2-6), and is placed on the lower section to finishing fine structure part (2-4).
5. a kind of operating device of fine structure surface finishing method according to claim 4, it is characterised in that:
Described device includes fine structure part (2-4), fixture (2-5), clamp connecting plate (2-9)；The clamp connecting plate (2-9)
One end jockey (2-5), the other end connect three-axis accurate electricity driving displacement platform (2-6).
6. a kind of operating device of fine structure surface finishing method according to claim 5, it is characterised in that:
Vacuum suction air inlet (2-8) is processed on the fixture (2-5), it can be achieved that the absorption of fine structure part (2-4) clamps, and is kept away
Exempt from mechanical point contact and stress concentration is generated to thin-walled part easy to damage.
7. a kind of operating device of fine structure surface finishing method according to claim 6, it is characterised in that:
The electromagnetic coil (3-2), ancillary coil (2-10) can apply driving signal by controller (2-7), generate alternating magnetic field,
Adjusting control signal can realize special magnetic shear thickening finishing medium (4-2) to fine structure part (2-4) recess sidewall
The skin processing in face (4-1) and bottom surface (4-3) forms Digital manufacturing control.
8. a kind of operating device of fine structure surface finishing method according to claim 7, it is characterised in that:
The electromagnetic coil (3-2) and ancillary coil (2-10) generate radial and axial complex vibration after applying driving signal.
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| CN108687573B (en) * | 2018-05-23 | 2020-04-24 | 山东理工大学 | Automatic magnetic field assisted finishing device and method |
| CN108527016B (en) * | 2018-06-15 | 2023-10-13 | 绍兴文理学院 | Ultra-precise magnetic grinding device and method utilizing low-frequency alternating magnetic field |
| CN110039380B (en) * | 2019-04-11 | 2020-12-01 | 上海理工大学 | Magnetic composite fluid polishing device for polishing periodic micro-groove structure |
| CN110640614B (en) * | 2019-10-16 | 2024-04-09 | 浙江工业大学 | Negative pressure polishing device and method for polishing blind holes of conductive workpiece |
| CN111515874A (en) * | 2020-03-12 | 2020-08-11 | 浙江工业大学 | Efficient ultra-precision polishing method based on shear expansion effect |
| CN111716158B (en) * | 2020-06-03 | 2021-07-16 | 大连理工大学 | Method and device for polishing inner surface |
| CN112692716B (en) * | 2021-01-26 | 2022-10-28 | 山东理工大学 | Inner surface magnetic field auxiliary finishing device and method based on controllable magnetic field |
| CN112658817B (en) * | 2021-01-26 | 2022-05-13 | 山东理工大学 | Alternating magnetic field-based complex curved surface magnetic field auxiliary finishing device and method |
| CN112658962B (en) * | 2021-01-26 | 2022-09-16 | 山东理工大学 | Vibration finishing device and method |
| CN113714863B (en) * | 2021-09-10 | 2022-11-08 | 山东理工大学 | Bidirectional cooperative vibration polishing device and method based on magnetic field coupling |
| CN113999616A (en) * | 2021-11-12 | 2022-02-01 | 山东理工大学 | Magnetic shear thickening polishing medium and preparation method thereof |
| CN116117677B (en) * | 2023-04-04 | 2023-07-18 | 山东理工大学 | Magnetic guiding fixed threshold release magnetic shear thickening chemical polishing method |
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| US2787854A (en) * | 1955-11-18 | 1957-04-09 | Reflectone Corp | Method of treating an object |
| JPS57163057A (en) * | 1981-03-25 | 1982-10-07 | Toyo Kenmazai Kogyo Kk | Surface polishing method |
| JP3770790B2 (en) * | 2000-11-15 | 2006-04-26 | シャープ株式会社 | Ashing method |
| CN103559976A (en) * | 2013-11-08 | 2014-02-05 | 太原理工大学 | Electronic-control permanent magnetic field generator and applying method in magnetism grain finishing process |
| CN104669070B (en) * | 2014-12-05 | 2017-02-22 | 贵州西南工具(集团)有限公司 | Magnetic field distribution plate device for cutter blade magnetic passivation and production method thereof |
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