CN201026589Y - Magnetorheological device for grinding and polishing plane surface - Google Patents
Magnetorheological device for grinding and polishing plane surface Download PDFInfo
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- CN201026589Y CN201026589Y CNU2006201556383U CN200620155638U CN201026589Y CN 201026589 Y CN201026589 Y CN 201026589Y CN U2006201556383 U CNU2006201556383 U CN U2006201556383U CN 200620155638 U CN200620155638 U CN 200620155638U CN 201026589 Y CN201026589 Y CN 201026589Y
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Abstract
The utility model discloses a MR effect plane grinding and polishing device the technical scheme of which is that the work piece the machined surface of which is a plane is arranged on a rotary table which is connected with a spindle which is connected with the spindle motor of the rotary table and a transmission mechanism. A grinding and polishing tool X-direction feed system and a grinding and polishing Y-direction feed system are arranged on the bench of the frame and connected with the grinding and polishing disc spindle of a machine tool. The spindle motor of the grinding and polishing tool is connected with the transmission mechanism of the spindle of the grinding and polishing tool. The grinding and polishing disc spindle and the transmission mechanism of the spindle of the grinding and polishing tool are connected with each other and arranged on the bench of the frame. The grinding and polishing disc spindle is provided with the grinding and polishing tool and the grinding and polishing liquids are filled between the grinding and polishing tool and the work pieces by a nozzle. The array type MR effect grinding and polishing brush or continuous MR effect sand belt forming on the surface of the grinding and polishing tool reaches the effect of effectively and precisely grinding and processing the super-smooth surface.
Description
Technical field
The utility model relates to a kind of flat grinding-and-buffing attachment using magnetorheological effect.
Background technology
High speed and high capacity along with information computerization and photosignal transmission, the demand of the photoelectron product of fusion electronic technology and optical technology is increasing, as the CD/DVD optical reading head, light/electricity (PD) and electricity/light (LD) signal adapter in the optical-fibre communications, projecting apparatus, laser printer, molecular laser etc., one of core component of photovoltaic is exactly the optical element (lens that use in the light path, speculum), the manufacture method of optical element mainly contains pottery, the single and mini-batch production machining of hard brittle materials such as optical glass is shaped and plastics, but the industrial production mold pressing of heating plastic formed materials such as glass shapes, and optical element surface and hot pressing die surface all need to reach its form accuracy and surface accuracy requirement by machining process.Optical element will reach the good optical performance, and its surface accuracy need reach the ultra-smooth degree, and surface figure accuracy also has higher requirements.The processing method of optical surface mainly contains diamond tool cutting, grinding and grinding and polishing and combination thereof, and grinding and polishing is the effective processing method that finally obtains super-smooth surface.
The application on ultra-smooth plane is more and more, as compact disc mold surface, monocrystalline silicon sheet surface etc., finally need reach required form precision and surface roughness by grinding and polish processing.Have more and more hard brittle material such as optical glass, engineering ceramics, ultra-fine cemented carbide and the stainless steels etc. of adopting of material that the part of super-smooth surface requirement uses.
Attrition process is to utilize soft abrasive disk and lapping liquid (mixture of oil or aqueous substance and free abrasive), apply certain pressure by abrasive disk to free abrasive and act on surface of the work, abrasive material produces on abrasive disk and workpiece interface and rolls or slide, from workpiece to be machined surface removal one deck material as thin as a wafer, reach the purpose that improves workpiece form accuracy and surface accuracy.
Existing grinding and polishing device mainly is made of with the rotary table that is connected motor that is used to install workpiece the abrasive disk that is installed on the main shaft that connects motor.During work, workpiece is installed on the workbench, keeps certain movement relation between abrasive disk and the workpiece, abrasive disk applies certain pressure to free abrasive and realizes the grinding and polishing of surface of the work is processed.
Existing grinding and polishing device mainly contains (1) and makes the abrasive disk matrix by metal material, and the mechanical lapping that free abrasive joins between abrasive disk and the workpiece is polished, and for example the cast iron abrasive disk adds grinding agent/abrasive pastes; (2) use polishing pad between abrasive disk and workpiece, polishing pad produces the effect that applies polishing pressure and constraint free abrasive; (3) the mechanochemistry grinding and polishing of increase chemical/electrochemical effect in the mechanical lapping process, they all belong to free abrasive processing.
The problem that existing free abrasive grinding and polishing device exists has: the movement velocity of free abrasive particulate between abrasive disk and workpiece, track, holdup time etc. all can't effectively be controlled, free state abrasive material between abrasive disk and workpiece interface has only the abrasive particle of large-size to produce elaboration, promptly break away from abrasive disk and workpiece interface because the abrasive particle of the effect considerable part reduced size of relative motion does not produce interference effect with surface of the work as yet, cause machining accuracy and inefficiency.
Summary of the invention
The purpose of this utility model is to provide a kind of flat grinding-and-buffing attachment using magnetorheological effect at the problem of existing grinding and polishing device existence.
The technical scheme of the grinding and polishing device that the utility model provides is, machined surface is that the workpiece 2-1 on plane is installed on the rotary table 5, rotary table 5 links to each other with rotary table main shaft 6, and rotary table main shaft 6 is connected with rotary table spindle motor and transmission mechanism 7; Milling tool X is installed on the fuselage stand 8 and with lathe abrasive disk main shaft 10 to feed system 14 with milling tool Y to feed system 13 and is connected, milling tool spindle motor 12 is connected with milling tool spindle drive 11, lathe abrasive disk main shaft 10 is connected with milling tool spindle drive 11 and is installed on the fuselage stand 8, above-mentioned lathe abrasive disk main shaft 10 is equipped with milling tool, annotates grinding and polishing liquid 3 to milling tool and the workpiece by grinding and polishing nozzle for liquid 15.
Above-mentioned grinding and polishing liquid is magnetic flow liquid and abrasive material mixed liquor, the free abrasive particulate 3-2 in the above-mentioned grinding and polishing liquid by the ferromagnetic particles 3-1 chain in magnetic flow liquid parcel, constrain in and constitute magnetic rheology effect abrasive brush 4 together.
Above-mentioned magnetic flow liquid can be selected existing commercialization magnetic flow liquid for use, the following magnetic flow liquid that also can select for use its parts by weight to form: silicone oil percentage by weight 50～60%, solid dispersed particle weight percentage 30～40%, oleic acid percentage by weight 2～3%, abrasive material percentage by weight 3～15%.
The solid dispersed particle of above-mentioned homemade magnetic flow liquid mainly is a ferromagnetic material, and carbonyl iron dust, reduced iron powder are arranged.
The free abrasive that adds in the above-mentioned magnetic flow liquid has carborundum (SiC), diamond, cube nitrogenize roc (CBN), alundum (Al (Al
2O
3), silicon nitride (Si
3N
4), zirconia (ZrO
2) wherein one or more mixtures, the abrasive particle diameter is less than 20 microns, the percentage by weight of free abrasive and magnetic flow liquid is less than 15%.
Above-mentioned milling tool is selected dot matrix magnetic plane lapping instrument 1-1 for use.
Above-mentioned milling tool is selected else with distributed magnetic plane lapping instrument 1-2.
The magnetic that is distributed with some fine excellent post shapes on the above-mentioned dot matrix magnetic plane lapping instrument 1-1 constitutes the array of magnetic rheology effect abrasive brush 4, the matrix of above-mentioned dot matrix magnetic plane lapping instrument 1-1 is made by nonmagnetic substance, the magnetic of fine excellent post shapes is selected unit permanent magnetism cylinder 1-1-1 or the ferromagnetic cylinder 1-1-2 in unit for use, and the ferromagnetic cylinder 1-1-2 in unit connects dc source 1-1-3 around solenoid 1-1-4 and is connected with conduction copper band slide block assembly 9.
The distributed magnetic plane lapping instrument magnetic 1-2-1 that above-mentioned distributed magnetic plane lapping instrument 1-2 is made by ferromagnetic material is cut apart band 1-1-3 through copper and is divided into circulus and forms distributed magnetic field, magnetism isolating spacer circle 1-2-3 is installed between distributed magnetic plane lapping instrument magnetic 1-2-1 and the distributed magnetic plane lapping tool base, distributed magnetic plane lapping tool base is inlayed solenoid or permanent magnetism lasso 1-2-4, and distributed magnetic plane lapping tool base is made by nonmagnetic substance.
Above-mentioned workbench is selected the workbench of rotary table or the control of numerical control moving interpolation for use.
Be flat shape on the face machined flat integral macroscopic of above-mentioned milling tool.
Itself can rotate above-mentioned milling tool, also can not rotate.
Above-mentioned workpiece material can also can be nonmagnetic substances such as stainless steel for hard brittle materials such as optical glass, carbide alloy, engineering ceramics.
The utility model is a grinding and polishing liquid with the mixed liquor of magnetic flow liquid and free abrasive, use magnetic as the milling tool matrix, utilize the magnetic rheology effect of magnetic flow liquid adhesive solidification under the effect of magnetic field that free abrasive constraint, reunion are formed the magnetic rheology effect abrasive brush on milling tool matrix top.The magnetic rheology effect abrasive brush that undersized magnetic permutation and combination is become to have planar structure, its end face forms dot matrix concentrating type milling tool, free abrasive is constrained in each micro-dimension magnetic rheology effect abrasive brush, has guaranteed wear particle concentration and stability between milling tool and the surface of the work.Because the magnetic rheology effect abrasive brush that the dot matrix cluster distributes in the milling tool has certain rigidity surface of the work is produced polishing pressure, abrasive particle to the effect of surface of the work generation attrition process, reach the effect of high efficiency high accuracy attrition process super-smooth surface.
Magnetic flow liquid is the general name that can be controlled the functional liquid material of its viscosity by magnetic field intensity, ferromagnetic particle bunchiness under the effect of magnetic field is arranged in the magnetic flow liquid, showing as apparent viscosity increases, make and can not the generation of shear-stable liquid have the yield stress of obvious surrender effect, this phenomenon is magnetic rheology effect.
Action principle of the present utility model is: the fine abrasive that will dissociate is sneaked in the magnetic rheological liquid, utilize the magnetic flow liquid magnetic rheology effect that ferromagnetic particle chaining distribution viscosity increases under the effect of magnetic field, the free abrasive particulate is wrapped up by the ferromagnetic particles chain in the magnetic flow liquid, constrain in and form the magnetic rheology effect abrasive brush together, when making tool base with permanent magnet or electromagnet, then form the radial magnetic line of force on the magnetic pole top, because arranging to have produced along the magnetic line of force, ferromagnetic particles is gathered in magnetic pole top abundance zone formation magnetic rheology effect abrasive brush, the milling tool matrix is made when having distributed magnetic pole of dot matrix or continuous distributed formula magnetic pole, will form organized dot matrix magnetic rheology effect abrasive brush or magnetic rheology effect grinding band in abrasive tool surface, when between milling tool and the workpiece during relative motion magnetic rheology effect abrasive brush or magnetic rheology effect grind band and form the compound movement track and produce the micro-cutting effect at surface of the work thereupon, can implement attrition process to surface of the work and reach the ultra-smooth degree.
The basic different manifestations of the utility model and existing abrasive working appts exists: 1) the utility model abrasive tool surface has the magnetic generation magnetic field of array distribution or continuous distributed; 2) the utility model produces abrasive action on milling tool and workpiece interface is that the magnetic rheology effect of the magnetic rheology effect abrasive brush of array or continuous distributed grinds band rather than individual layer, single free abrasive, has reduced the influence of free abrasive size inhomogeneities to machining accuracy and efficient; 3) the utility model abrasive particle is that magnetic rheology effect abrasive brush or magnetic rheology effect grind the normal pressure of band generation and the resultant effect of shearing force to the micro-cutting power of surface of the work generation, magnetic rheology effect abrasive brush or magnetic rheology effect grind band itself and have elasticity, the process that acts on finished surface is even, gentle, controlled, rather than apply to free abrasive by mechanism between milling tool matrix or abrasive disk and the workpiece in the mechanical lapping, help obtaining super-smooth surface; 4) magnetic rheology effect abrasive brush or magnetic rheology effect grind band at its different parts because the magnetic field intensity difference has different rigidity and to the maintenance intensity of abrasive particle, simultaneously magnetic rheology effect abrasive brush or magnetic rheology effect grind in the band wear particle concentration and can control, and are beneficial to the control of working (machining) efficiency and machining accuracy in the attrition process process.
The beneficial effects of the utility model: the array magnetic rheology effect abrasive brush or the continuous magnetic rheology effect that form in abrasive tool surface grind band, having produced the free abrasive particulate evenly and stably is distributed in abrasive tool surface and acts on workpiece machining surface, having solved existing grinding technique free abrasive can't evenly distribute and abrasive concentration is difficult to keep in workpiece interface, the inhomogeneous difficult problem that influences grinding precision and efficient that waits of abrasive material size, the bond strength that the intensity decision magnetic rheology effect abrasive brush in magnetic field or continuous magnetic rheology effect grind abrasive particle in the band, the process feature is between fixed-abrasive and free abrasive, can remain the concentration and the uniformity of free abrasive material on the workpiece factory interface on the one hand, magnetic rheology effect belongs to soft-constraint to the free abrasive particulate simultaneously, centrifugal force and the effect of micro-cutting power all may make abrasive particle shake off, when being subjected to excessive cutting force, the abrasive particle blunt can cause escaping near the solid-state mobile abrasive particle of magnetic flow liquid surrender, abrasive particle self mechanism in the process constantly comes off the blunt abrasive particle, increased flowing of abrasive particle, improved the removal effect of material, simultaneously, do not need to consider to perplex the tool wear problem of general process.Magnetic rheology effect abrasive brush or continuous magnetic rheology effect grinding band itself have viscoplasticity on the other hand, played the effect of polishing pad, can not resemble the fixed-abrasive grinding tool in the process of lapping and may damage the workpiece machined surface, reach high efficiency high accuracy attrition process purpose.
Description of drawings
Fig. 1 is the structural representation of magnetic rheology effect ground flat burnishing device;
Fig. 2 is the fundamental diagram of magnetic rheology effect ground flat burnishing device;
Fig. 3 is that magnetic rheology effect ground flat burnishing device carries out plane machining principle figure;
Fig. 4 is the dot matrix magnetic plane lapping tool construction schematic diagram that the utility model uses;
Fig. 5 is the magnetic body structure schematic diagram of the dot matrix magnetic plane lapping instrument of the utility model use;
Fig. 6 is the distributed magnetic plane lapping tool construction schematic diagram that the utility model uses;
Respectively number implication among the figure: 1. magnetic, 1-1. dot matrix magnetic plane lapping instrument, the distributed magnetic plane lapping of 1-2. instrument, 1-1-1. unit permanent magnetism cylinder, 1-1-2. the ferromagnetic cylinder in unit, 1-1-3. dc source, 1-1-4. solenoid, the distributed magnetic plane lapping of 1-2-1. instrument magnetic, 1-2-2. copper is cut apart band, 1-2-3. the magnetism isolating spacer circle, 1-2-4. solenoid or permanent magnetism lasso, 2. finished surface, 2-1. machined surface is the workpiece on plane, 3. grinding and polishing liquid (magnetic flow liquid and abrasive material mixed liquor), 3-1. ferromagnetic particles, 3-2. abrasive particle, 4. magnetic rheology effect abrasive brush, 5. workbench, 6. rotary table main shaft, 7. rotary table spindle motor and transmission mechanism, 8. fuselage stand, 9. conduction copper band slide block assembly, 10. lathe milling tool main shaft, 11. milling tool spindle drives, 12. milling tool spindle motor, 13.X to feed system, 14.Y is to feed system, 15. grinding and polishing nozzle for liquid.
The specific embodiment
Below in conjunction with accompanying drawing the utility model is done further concrete description, but embodiment of the present utility model is not limited thereto.
Fig. 1 shows the concrete structure that the present invention is used for ultra-smooth plane lapping polishing processing, by array magnetic plane lapping instrument 1-1 or distributed magnetic plane lapping instrument 1-2, conduction copper band slide block assembly 9, dc source 1-1-3 etc. constitute the plane lapping instrument of macroscopic view, milling tool and lathe abrasive disk main shaft 10 link together, milling tool spindle motor 12 is realized the gyrations of plane lapping instrument through milling tool spindle drives 11, be installed in milling tool X on the fuselage stand 8 can realize magnetic plane lapping instrument 1-1 to feed system 14 to feed system 13 and milling tool Y X to Y to feeding.Machined surface is that the workpiece 2-1 on plane is installed on the rotary table 5, rotary table 5 links to each other with rotary table main shaft 6, rotary table spindle motor and transmission mechanism 6 are realized gyration, to instrument and workpiece interface, realize attrition process by grinding and polishing nozzle for liquid 15 filling grinding and polishing liquid (magnetic flow liquid and abrasive material mixed liquors) 3 to workpiece.
Fig. 2 the utility model utilizes magnetic rheology effect to make the principle of smooth surface milling tool, be that magnetic 1 is placed among the grinding and polishing liquid (magnetic flow liquid and abrasive material mixed liquor) 3, ferromagnetic particle 3-1 arranges along magnetic line of force bunchiness in the magnetic flow liquid under the effect of magnetic field, the abrasive particle 3-2 that sneaks into wherein is wrapped, constrains between the ferromagnetic particle 3-1 of bunchiness distribution, because the magnetic 1 end magnetic line of force is intensive and radially distribute, thereby free abrasive is assembled and is formed the magnetic rheology effect abrasive brush 4 that can carry out grinding and polishing processing with certain rigidity and bond strength.
Fig. 3 shows magnetic rheology effect ground flat burnishing device and carries out plane machining principle figure, as seen from the figure, machined surface is that the workpiece 2-1 on plane is installed on the rotary table 5, dot matrix magnetic plane lapping instrument 1-1 or distributed magnetic plane lapping instrument 1-2 have revolution and axial feed motion, to instrument and workpiece interface, realize grinding and polishing processing by grinding and polishing nozzle for liquid 15 filling grinding and polishing liquid (magnetic flow liquid and abrasive material mixed liquors) 3 to workpiece.
Dot matrix magnetic plane lapping instrument 1-1 can be a structure shown in Figure 4, on dot matrix magnetic plane lapping instrument 1-1, be distributed with the magnetic 1-1-1 or the 1-1-2 of some fine excellent post shapes, form the array of magnetic rheology effect abrasive brush 4, the matrix of dot matrix magnetic plane lapping instrument 1-1 is made by nonmagnetic substance.
Shown in Figure 5, the magnetic 1 of fine excellent post shapes can be made by unit permanent magnetism cylinder 1-1-1, also can be made by dc source 1-1-3 and solenoid 1-1-4 by the ferromagnetic cylinder 1-1-2 in unit.
Distributed magnetic plane lapping instrument 1-2 can be a structure shown in Figure 6, cut apart band 1-2-2 by distributed magnetic plane lapping instrument magnetic 1-2-1, copper, magnetism isolating spacer circle 1-2-3, solenoid or permanent magnetism lasso 1-2-4 form, the magnetic 1-2-1 that distributed magnetic plane lapping instrument 1-2 is made by ferromagnetic material is cut apart band 1-1-3 through copper and is divided into circulus and forms distributed magnetic field, forms magnetic rheology effect and grind and be with in grinding and polishing liquid (magnetic flow liquid and abrasive material mixed liquor) 3.
Claims (9)
1. flat grinding-and-buffing attachment using magnetorheological effect, machined surface is that the workpiece on plane is installed on the rotary table, and rotary table links to each other with the rotary table main shaft, and the rotary table main shaft is connected with rotary table spindle motor and transmission mechanism; Milling tool X is installed on the fuselage stand and with lathe abrasive disk main shaft to feed system with milling tool Y to feed system and is connected, the milling tool spindle motor is connected with the milling tool spindle drive, lathe abrasive disk main shaft is connected with the milling tool spindle drive and is installed on the fuselage stand, it is characterized in that: above-mentioned lathe abrasive disk main shaft is equipped with milling tool, annotates grinding and polishing liquid to milling tool and the workpiece by the grinding and polishing nozzle for liquid.
2. plane lapping burnishing device according to claim 1 is characterized in that: the free abrasive particulate in the above-mentioned grinding and polishing liquid by the ferromagnetic particles chain in magnetic flow liquid parcel, constrain in and constitute the magnetic rheology effect abrasive brush together.
3. plane lapping burnishing device according to claim 1 is characterized in that: above-mentioned milling tool is selected dot matrix magnetic plane lapping instrument for use.
4. plane lapping burnishing device according to claim 1 is characterized in that: above-mentioned milling tool is selected else with distributed magnetic plane lapping instrument.
5. plane lapping burnishing device according to claim 3, it is characterized in that: the magnetic that is distributed with some fine excellent post shapes on the above-mentioned dot matrix magnetic plane lapping instrument constitutes the array of magnetic rheology effect abrasive brush, the matrix of above-mentioned dot matrix magnetic plane lapping instrument is made by nonmagnetic substance, the magnetic of fine excellent post shapes is selected the ferromagnetic cylinder of unit permanent magnetism cylinder or unit for use, and the ferromagnetic cylinder of said units is connected dc source around solenoid and is connected with conduction copper band slide block assembly.
6. plane lapping burnishing device according to claim 4, it is characterized in that: the distributed magnetic plane lapping instrument magnetic that above-mentioned distributed magnetic plane lapping instrument is made by ferromagnetic material is cut apart band through copper and is divided into circulus, the magnetism isolating spacer circle is installed between distributed magnetic plane lapping instrument magnetic and the distributed magnetic plane lapping tool base, distributed magnetic plane lapping tool base is inlayed solenoid or permanent magnetism lasso, and distributed magnetic plane lapping tool base is made by nonmagnetic substance.
7. plane lapping burnishing device according to claim 1 is characterized in that: be flat shape on the face machined flat integral macroscopic of above-mentioned milling tool.
8. plane lapping burnishing device according to claim 1 is characterized in that: above-mentioned milling tool itself rotates or does not rotate.
9. plane lapping burnishing device according to claim 1 is characterized in that: above-mentioned workpiece material is optical glass, carbide alloy, engineering ceramics or stainless steel.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2006201556383U CN201026589Y (en) | 2006-12-31 | 2006-12-31 | Magnetorheological device for grinding and polishing plane surface |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2006201556383U CN201026589Y (en) | 2006-12-31 | 2006-12-31 | Magnetorheological device for grinding and polishing plane surface |
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| CN201026589Y true CN201026589Y (en) | 2008-02-27 |
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| CNU2006201556383U Expired - Fee Related CN201026589Y (en) | 2006-12-31 | 2006-12-31 | Magnetorheological device for grinding and polishing plane surface |
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| CN100486765C (en) * | 2006-12-31 | 2009-05-13 | 广东工业大学 | Grinding polishing method based on magnetic rheology effect and its polishing device |
| CN101585159B (en) * | 2009-06-10 | 2011-01-26 | 中国人民解放军国防科学技术大学 | Device of inhibiting high frequency error in magnetic rheology based on principle of entropy increase |
| CN103072069A (en) * | 2012-12-19 | 2013-05-01 | 广东工业大学 | Magneto-rheological effect viscoelastic clamping electroceramic substrate flexible grinding and polishing device and method |
| CN103182687A (en) * | 2011-12-30 | 2013-07-03 | 陈炤彰 | Electric field assisted chemical mechanical polishing system and method thereof |
| CN103273385A (en) * | 2013-06-09 | 2013-09-04 | 湖南大学 | Surface contact magneto-rheological flat polishing device and method with uniform magnetic field |
| CN103537955A (en) * | 2013-10-21 | 2014-01-29 | 中国地质大学（武汉） | Magnetic field auxiliary polishing equipment and polishing method thereof |
| CN104942661A (en) * | 2015-06-30 | 2015-09-30 | 深圳市智博高科光电装备有限公司 | Magneto-rheological polish grinding head and device suitable for plane optical part |
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| CN105690185A (en) * | 2013-09-28 | 2016-06-22 | 浙江科惠医疗器械股份有限公司 | Ultrasonic magnetorheological composite polisher for medical titanium alloy tiny parts |
| CN105904332A (en) * | 2016-04-13 | 2016-08-31 | 宋佳 | Magneto-rheological amorphous alloy polishing device, polishing agent and polishing method |
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| CN101585159B (en) * | 2009-06-10 | 2011-01-26 | 中国人民解放军国防科学技术大学 | Device of inhibiting high frequency error in magnetic rheology based on principle of entropy increase |
| CN103182687B (en) * | 2011-12-30 | 2016-03-02 | 陈炤彰 | Electric field-assisted chemical-mechanical polishing system and method thereof |
| CN103182687A (en) * | 2011-12-30 | 2013-07-03 | 陈炤彰 | Electric field assisted chemical mechanical polishing system and method thereof |
| CN103072069B (en) * | 2012-12-19 | 2015-12-23 | 广东工业大学 | The electroceramics substrate flexible grinding and polishing device of magnetic rheology effect viscoplasticity clamping and method |
| CN103072069A (en) * | 2012-12-19 | 2013-05-01 | 广东工业大学 | Magneto-rheological effect viscoelastic clamping electroceramic substrate flexible grinding and polishing device and method |
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| CN103273385A (en) * | 2013-06-09 | 2013-09-04 | 湖南大学 | Surface contact magneto-rheological flat polishing device and method with uniform magnetic field |
| CN105690185B (en) * | 2013-09-28 | 2017-08-25 | 浙江科惠医疗器械股份有限公司 | A kind of medical titanium alloy small piece ultrasonic-magnetorheological compound finishing machine |
| CN105690185A (en) * | 2013-09-28 | 2016-06-22 | 浙江科惠医疗器械股份有限公司 | Ultrasonic magnetorheological composite polisher for medical titanium alloy tiny parts |
| CN103537955A (en) * | 2013-10-21 | 2014-01-29 | 中国地质大学（武汉） | Magnetic field auxiliary polishing equipment and polishing method thereof |
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| CN104942661A (en) * | 2015-06-30 | 2015-09-30 | 深圳市智博高科光电装备有限公司 | Magneto-rheological polish grinding head and device suitable for plane optical part |
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