CN1331635C - Electric current variable effect grinding method and its grinding device - Google Patents

Electric current variable effect grinding method and its grinding device Download PDF

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Publication number
CN1331635C
CN1331635C CNB031403859A CN03140385A CN1331635C CN 1331635 C CN1331635 C CN 1331635C CN B031403859 A CNB031403859 A CN B031403859A CN 03140385 A CN03140385 A CN 03140385A CN 1331635 C CN1331635 C CN 1331635C
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grinding
milling tool
abrasive
electric
electric field
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CN1590023A (en
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阎秋生
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Guangdong University of Technology
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Guangdong University of Technology
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Abstract

The present invention relates to an electric current variable effect grinding method and a grinding device thereof. Free grinding material is added in particle dispersively suspended type electrorheological fluid to form grinding agent. A base body of a grinding tool of which the surface has tapers is used as one electrode of an electric field, and a metal sheet with a hole structure is arranged between the base body of the grinding tool and a work piece and used as the other electrode of the electric field. 1000-5000 V/mm voltage is exerted between the two electrodes to form the grinding tool. In the present invention, the array of tiny free grinding grain balls, which is formed on the surface of the grinding tool, generates free grinding grains which are uniformly and stably distributed on the surface of the grinding tool to act on the surface of the work piece and solves the problem that the grinding material is difficult to distribute uniformly on the interface of the grinding tool and the work piece in the existing grinding technique. The diameter of the tiny free grinding material ball and the binding strength of grinding grains depend on the strength of an applied field. The characteristics of the working process is between fixed grinding material and free grinding material, and simultaneously, no abrasion problem of the tiny free abrasive balls needs to be considered. The purpose of high efficient high-precision abrasive work is achieved.

Description

Electric rheological effect Ginding process and lapping device thereof
Technical field
The present invention relates to grinding method and processing unit (plant), sneak into free abrasive in a kind of specifically employing ER fluid and form small free abrasive pelletizing as grinding agent applied current change effect and be distributed in the milling tool matrix surface, improve the electric rheological effect Ginding process of super-smooth surface grinding precision and efficient.
The invention still further relates to the device that described electric rheological effect Ginding process uses.
Background technology
High speed and high capacity along with information computerization and photosignal transmission, the demand of the photoelectron product of fusion electronic technology and optical technology is increasing, as the CD/DVD optical reading head, light/electricity (PD) and electricity/light (LD) signal adapter in the optical-fibre communications, projecting apparatus, laser printer, molecular laser etc., one of core component of photovoltaic is exactly the aspherical optical element (lens that use in the light path, speculum), the manufacture method of aspherical optical element has pottery, the moulding of single and mini-batch production machining and the plastics of hard brittle materials such as optical glass, but the industrial production mold pressing machine-shaping of heating plastic formed materials such as glass, but the aspheric curve of molding die also needs to reach required precision by machining.Aspherical optical element will reach the good optical performance, the machining accuracy of aspheric curve must reach the form accuracy below 0.5 micron and the ultra-smooth degree of 30 nanometer following table surface roughness, the processing method of aspheric curve mainly contains diamond cutter cutting, grinding and grinding and combination thereof, and grinding is the effective processing method that finally obtains the ultra-smooth aspheric curve.
The application on ultra-smooth plane is also more and more, as the compact disc mold surface, finally also needs to reach required form precision and surface roughness by attrition process.The more and more hard brittle materials such as optical glass, engineering ceramics that adopt of material with part use of super-smooth surface requirement.
Attrition process is the mixture that utilizes coating or press embedding free abrasive and grinding agent, on the soft milling tool of certain rigidity, apply certain pressure by milling tool and workpiece to abrasive material, abrasive material is done to roll on milling tool and workpiece interface and is slided, from by grinding work-piece surface removal material as thin as a wafer, reach the purpose that improves workpiece form accuracy and surface accuracy.
Existing lapping device mainly is made of with the rotary table that is connected motor that is used to install workpiece the milling tool that is installed on the main shaft that connects motor.During work, workpiece is installed on the workbench, keeps certain movement relation between milling tool and the workpiece, milling tool applies certain pressure to free abrasive surface of the work is carried out attrition process.
Existing Ginding process mainly contains (1) and makes the milling tool matrix by metal material, and abrasive material is free or press the mechanical lapping that is embedded in abrasive tool surface, and for example the cast iron abrasive disk adds grinding agent/abrasive pastes; (2) mechanochemistry that increases the chemical/electrochemical effect in the mechanical lapping process is ground, and they all belong to free abrasive processing.
The problem that existing free abrasive processing method exists is as follows: the movement velocity of free abrasive particulate between milling tool and workpiece, track, holdup time etc. all can't effectively be controlled, free state abrasive material on milling tool and workpiece interface has only the free abrasive of large-size to produce elaboration, the reduced size free abrasive of considerable part does not produce interference effect with surface of the work and promptly breaks away from abrasive disk and workpiece interface, causes attrition process precision and inefficiency.For grinding this free abrasive processing method, the key that improves free abrasive working (machining) efficiency and machining accuracy is how to guarantee that milling tool and workpiece contact interface have uniform abrasive concentration and distribute, and can keep this state long-term and stably, the Ginding process of existing mechanical and chemistry all can't be accomplished this point, thereby has influenced the precision and the efficient of super-smooth surface attrition process.
Summary of the invention
The objective of the invention is to problem at existing super-smooth surface grinding technology existence, a kind of Ginding process of applied current change effect is provided, with particle dispersion suspension type ER fluid and free abrasive is grinding agent, utilize the ER fluid electrorheological property that viscosity increases under electric field action to make free abrasive form array abrasive particle pelletizing and be distributed in abrasive tool surface uniformly and stably, eliminate because the uneven influence of abrasive material size, produce the attrition process effect by a plurality of abrasive particles that vary in size peripheral in the abrasive particle pelletizing, reach the effect of high efficiency high accuracy attrition process super-smooth surface.
The present invention also aims to provide the device of described electric rheological effect Ginding process use.
ER fluid is the general name that can be controlled the functional liquid material of its viscosity by electric-field intensity, particle dispersion suspension type ER fluid dispersed particle chaining under electric field action distributes, increase several magnitude during the comparable no electric field of its apparent viscosity, make and can not shear-stable liquid generation surrender have tangible yield stress, this phenomenon is electric rheological effect.
Electric rheological effect Ginding process of the present invention is to place between milling tool matrix and the workpiece as grinding agent to add free abrasive in the particle dispersion suspension type ER fluid, the milling tool matrix that has taper with the surface is electric field one utmost point, has the sheet metal of pore space structure as another utmost point of electric field in (near the milling tool matrix) setting between milling tool matrix and the workpiece, between two electrodes, apply 1000~5000V/mm voltage, constitute milling tool, can carry out attrition process workpiece.
Described particle dispersion suspension type ER fluid can be existing commercialization ER fluid, also can be the special ER fluid of the present invention, and it is composed as follows:
The solid dispersed particle is 8~45% with the volume parts ratio of decentralized photo liquid; The additive volume parts is 1~5%.
The solid dispersed particle of described particle dispersion-type ER fluid mainly contains metal oxide and slaine inorganic compound two classes.
Described metal oxide has: silica (Si 3O 2), tin ash (SnO 2), titanium dioxide (TiO 2), alundum (Al (Al 2O 3), zirconia (ZrO 2), cuprous oxide one or more mixtures wherein such as (CuO); Described metal inorganic salt inorganic compound has: one or more mixtures in calcium carbide, titanate, the alumino-silicate.
Described decentralized photo liquid has silicone oil, mineral oil, transformer oil, bobbin oil or kerosene.
Described additive has water, shows activating agent, suds or aliphatic acid.
In the electric rheological effect Ginding process, the free abrasive micro mist that adds in particle dispersion suspension type ER fluid has carborundum (SiC), diamond, cubic boron nitride (CBN), alundum (Al (Al 2O 3), silicon nitride (Si 3N 4), zirconia (ZrO 2) waiting one or more mixtures wherein, the abrasive material diameter is less than 10 microns, and the w/v of free abrasive and ER fluid is less than 0.3g/cc.
Electric rheological effect lapping device of the present invention is made of with the workbench that is connected motor that is used to install workpiece the milling tool that is installed on the main shaft that connects motor, be characterized in that the grinding agent that sheet metal with pore space structure that described milling tool nearby is provided with by milling tool matrix and milling tool and ER fluid and free abrasive are formed is constituted, tool base is electric field one utmost point, sheet metal with pore space structure applies 1000~5000V/mm electric field as another utmost point of electric field between two electrodes.
In order to realize assembling and retraining the effect of free abrasive particulate, the surface of described milling tool matrix has the taper shape of array distribution.
In order to realize grinding, be plane, cambered surface or spheroid form on the face machined flat integral macroscopic of described milling tool to aspheric curve, free form surface.
For the taper at the milling tool matrix surface forms consistent electric field with being installed in the sheet metal that nearby has pore space structure, described sheet material is a copper sheet.
Action principle of the present invention is: utilize the particle dispersion suspension type ER fluid electric rheological effect that dispersed particle chaining distribution viscosity increases under electric field action; the fine abrasive that will dissociate is sneaked in the current liquid; the free abrasive particulate can be constrained in together by ER fluid dispersible granule subchain is bonding; when the negative electrode (or anode) that with the pointed cone shape tool is electric field; the most advanced and sophisticated other end that power line one end is gathered in the tool base taper when nigh metal copper sheet with hole being set being anode (or negative electrode) is radiated metallic copper film perforation inboard; the particle chain of electric current change simultaneously produces an end to be assembled other end radiation and forms the free abrasive pelletizing; have at the milling tool matrix surface and will form the organized dot matrix small free abrasive pelletizing that distributes when the small taper of dot matrix distributes; when between milling tool and the workpiece during relative motion small free abrasive pelletizing form the compound movement track and produce the micro-cutting effect at surface of the work thereupon, can implement attrition process to surface of the work and reach the ultra-smooth degree.
The basic different manifestations of the present invention and existing grinding technique exists: 1) milling tool matrix surface of the present invention has sharp body distribution of the small awl of array rather than smooth flat; 2) the present invention produces abrasive action on milling tool and workpiece interface is small free abrasive pelletizing array, that be made up of the size dimension abrasive particle rather than individual layer, single free abrasive, thereby has reduced the influence of free abrasive size inhomogeneities to machining accuracy and efficient; 3) the micro-cutting power of abrasive particle of the present invention is that electric rheological effect produces, puts on surface of the work by small free abrasive pelletizing, the free abrasive pelletizing itself has elasticity, mechanism is even, gentle, controlled, rather than apply to free abrasive by the mechanism between milling tool matrix and the workpiece in the mechanical lapping, help improving the grinding precision of super-smooth surface.
Above-mentioned milling tool base shape can be plane, cambered surface and sphere; On its working surface, has the microsize taper that array distributes, milling tool anode (or negative electrode), milling tool and motion electric insulation that to be conductor link to each other and form electric field with the positive pole (or negative pole) of high voltage source.
Have the hole that dot matrix distributes on the above-mentioned electrode copper sheet, the regularity of distribution in hole is identical with the milling tool matrix, the bore dia size is bored sharp diameter dimension greater than the milling tool matrix, copper sheet has suitable thickness, the negative electrode (or anode) that copper sheet and high voltage source negative pole (or anodal) link to each other and form electric field, the electrode copper sheet is linked to each other with the milling tool matrix by the insulation retainer and keeps being synchronized with the movement, and electrode copper sheet and surface of the work keep certain clearance, prevent to scratch finished surface.
The insulation link that employing has high voltage electrically insulating energy and high-strength material is an one with electrode copper sheet and milling tool matrix mechanical connection.
Above-mentioned high voltage source by the 220V power frequency supply through obtain after pressure regulation, transformation and the rectification 500 to 5000 volts can linear regulation voltage, can be that direct current also can be a power frequency.Power supply maximum current intensity is relevant with milling tool micro-dimension taper quantity, presses 5 milliamperes of calculating by each taper.
Workpiece material is non-conductive or weakly conducting hard brittle materials such as optical glass, engineering ceramics, electric insulation between workpiece and the workbench.
The milling tool motion has the rotation main motion.
Processing unit (plant) is made up of workpiece working table movement mechanism and body etc., and workbench has revolution or the motion of interpolation relation.
Beneficial effect of the present invention: at the small free abrasive pelletizing array of abrasive tool surface formation, the free abrasive particulate evenly and stably is distributed in abrasive tool surface and acts on workpiece machining surface, having solved existing grinding technique free abrasive can't be evenly distributed and the inhomogeneous difficult problem that influences grinding precision and efficient of abrasive material size in workpiece interface, the intensity that applies electric field determines the diameter of free abrasive pelletizing and the bond strength of abrasive particle, the process feature is between fixed-abrasive and free abrasive, can remain the concentration and the uniformity of free abrasive material on the workpiece factory interface on the one hand, the free abrasive particulate is belonged to soft-constraint centrifugal force to the while electric rheological effect and the effect of micro-cutting power all may make abrasive particle shake off, when being subjected to excessive cutting force, the abrasive particle blunt can cause escaping near the solid-state mobile abrasive particle of ER fluid surrender, abrasive particle self mechanism in the process makes sharp abrasive material can enter the abrasive particle pelletizing and participates in grinding, the size of small free abrasive pelletizing has dynamic stability, do not need to consider to perplex the tool wear problem of general process, small on the other hand free abrasive pelletizing itself has viscoplasticity, can not resemble fixed-abrasive grinding tool damage workpiece machined surface in the process of lapping, reach high efficiency high accuracy attrition process purpose.
Description of drawings
Fig. 1 is the fundamental diagram of electric rheological effect Ginding process of the present invention;
Fig. 2 is the vertical view that applied current change effect of the present invention forms the free abrasive pelletizing;
Fig. 3 is the structural representation of the device of the inventive method use;
Fig. 4 is another structural representation of the device of the inventive method use;
Fig. 5 is the used high voltage source schematic diagram of the present invention.
Respectively number implication among the figure: 1-milling tool matrix, 2. copper plate electrode, 3. insulation link, 4. high voltage source, 5. particle dispersion-type electric current liquid, 6. free abrasive particulate, 7. workpiece, 8. insulating barrier, 9. lapping machine main shaft, 10. spindle motor of machine tool, 11. machine tool chief axis transmission mechanisms, 12. machine tool chief axis travel mechanism, 13. rotary table, 14. workbench rotary electric machines, 15. workpiece motion s transmission mechanisms, 16. workbench turning cylinder, 17. the grinding agent nozzle, 18. grinding agents (abrasive material and particle dispersion-type ER fluid mixed liquor), 19.Z is to servomotor, 20.X to servomotor, 21.Y is to servomotor.
The specific embodiment
Below in conjunction with accompanying drawing the present invention is done further concrete description, but embodiments of the present invention are not limited thereto.
With reference to Fig. 1,2, the present invention utilizes electric rheological effect to make the method for super-smooth surface processing with milling tool, be to form the small free abrasive pelletizing of single-point in milling tool matrix micro-dimension taper end, its basic formation comprises that the surface has the milling tool matrix 1 of the sharp body of dot matrix distribution awl, copper plate electrode 2, electric insulation link 3, high voltage source 4, particle dispersion-type electric current liquid 5, free abrasive particulate 6 and workpiece 7, because milling tool matrix taper is as electric field one utmost point, copper sheet is as another utmost point of electric field, the milling tool matrix is bored sharp body and is placed copper plate electrode hole central authorities, electric current becomes the distribution of particle chaining under electric field action, one end is gathered in the most advanced and sophisticated other end of the sharp body of awl and is radiated around the inboard, copper sheet hole, the particle of electric current change simultaneously constrains in the free abrasive particulate between the chain, free abrasive particulate and electric current become particle and constitute small free abrasive pelletizing, the array taper of milling tool matrix forms small free abrasive pelletizing distribution array, constitutes the electric rheological effect milling tool.
Fig. 3 shows the concrete structure that the present invention is used for the processing of ultra-smooth plane lapping, as seen from the figure, electric insulation link 3 is whole with milling tool matrix 1 and copper plate electrode 2 mechanical connections, milling tool matrix 1 and copper plate electrode 2 apply electric field by high voltage source 4, milling tool matrix and lapping machine main shaft keep electric insulation and mechanically coupled together by insulating trip 8, milling tool is (by 1,2,3,4,5,6 form) and lapping machine main shaft 9 under the driving of motor 10 and transmission mechanism 11, rotate, and the radial direction at the effect lower edge of machine tool chief axis travel mechanism 12 rotary table 13 moves, workpiece 7 is installed on the rotary table 13, motor 14 drives work spindles and workbench 13 rotations by transmission mechanism 15, and grinding agent (abrasive material and particle dispersion-type ER fluid mixed liquor) 18 adds to milling tool and workpiece interface by nozzle 17.
Fig. 4 shows the concrete structure that the present invention is used for ultra-smooth curved surface attrition process, as seen from the figure, milling tool matrix 1, copper plate electrode 2, electric insulation link 3 and particle dispersion-type ER fluid 5, free abrasive particulate 6 and high voltage source 4 constitute the spherical grinding instrument of macroscopic view, milling tool and lapping machine main shaft 9 link together and insulate through insulating trip 8 and lapping machine main shaft 9, lapping machine main shaft 9 rotates under the driving of motor 10 and transmission mechanism 11, Z under the effect of servomotor 19 lapping machine main shaft 9 and milling tool (by 1,2,3,4,5,6 form) can move up and down by Z, and can with workbench X, the Y direction realizes moving interpolation, workpiece 7 is installed on the workbench 13, and workbench 13 can be realized moving interpolation to servomotor 20 and Y at X under the effect of servomotor 21.
Fig. 5 shows the present invention and is used to produce electric rheological effect high voltage source schematic diagram, and the 220V power frequency supply obtains 500 to the 5000 volts of direct currents that can regulate or AC power frequency voltage through after pressure regulation, transformation and the rectification.

Claims (10)

1, a kind of electric rheological effect Ginding process, it is characterized in that placing between milling tool matrix and the workpiece as grinding agent to add free abrasive in the particle dispersion suspension type ER fluid, the milling tool matrix that has taper with the surface is electric field one utmost point, between milling tool matrix and workpiece, be provided with and have the sheet metal of pore space structure as another utmost point of electric field, between two electrodes, apply 1000~5000V/mm voltage, constitute milling tool, workpiece is carried out attrition process.
2, according to the described electric rheological effect Ginding process of claim 1, it is characterized in that described particle dispersion suspension type ER fluid is an ER fluid composed of the following components: the solid dispersed particle is 8~45% with the volume parts ratio of decentralized photo liquid; The additive volume parts is 1~5%.
3,, it is characterized in that the solid dispersed particle of described particle dispersion-type ER fluid mainly contains metal oxide and slaine inorganic compound two classes according to the described electric rheological effect Ginding process of claim 2.
4,, it is characterized in that described metal oxide has: one or more mixtures in silica, tin ash, titanium dioxide, alundum (Al, zirconia, the cuprous oxide according to the described electric rheological effect Ginding process of claim 3; Described metal inorganic salt inorganic compound has: one or more mixtures in calcium carbide, titanate, the alumino-silicate.
5,, it is characterized in that described decentralized photo liquid has silicone oil, mineral oil, transformer oil, bobbin oil or kerosene according to the described electric rheological effect Ginding process of claim 2.
6,, it is characterized in that described additive has water, shows activating agent, suds or aliphatic acid according to the described electric rheological effect Ginding process of claim 2.
7, according to the described electric rheological effect Ginding process of claim 1, it is characterized in that the free abrasive micro mist that adds in the described particle dispersion suspension type ER fluid has one or more mixtures in carborundum, diamond, cubic boron nitride, alundum (Al, silicon nitride, the zirconia, the abrasive material diameter is less than 10 microns, and the w/v of free abrasive and ER fluid is less than 0.3g/cc.
8, a kind of electric rheological effect lapping device, constitute with the workbench that is connected motor that is used to install workpiece by the milling tool that is installed on the main shaft that connects motor, it is characterized in that the grinding agent that sheet metal with pore space structure that described milling tool nearby is provided with by milling tool matrix and milling tool and ER fluid and free abrasive are formed is constituted, tool base is electric field one utmost point, sheet metal with pore space structure applies 100~5000V/mm electric field as another utmost point of electric field between two electrodes.
9, electric rheological effect lapping device according to claim 8 is characterized in that described milling tool base shape is plane, cambered surface or sphere; Have the microsize point centrum that array distributes on its working surface, the milling tool matrix is that conductor links to each other with the negative or positive electrode of high voltage source and forms the male or female of electric field, milling tool and motion electric insulation.
10, electric rheological effect lapping device according to claim 8 is characterized in that being plane, cambered surface or spheroid form on the face machined flat integral macroscopic of described milling tool.
CNB031403859A 2003-09-03 2003-09-03 Electric current variable effect grinding method and its grinding device Expired - Fee Related CN1331635C (en)

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CN1331635C true CN1331635C (en) 2007-08-15

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CN101497177B (en) * 2008-01-29 2010-07-14 北京理工大学 Probe-shaped electrorheological polishing tool
CN101284367B (en) * 2008-05-15 2010-08-25 北京理工大学 DC pulse type bielectrode microminiature grinding and polishing tool
CN102873591B (en) * 2012-09-11 2016-06-01 上海交通大学 Based on the mold cavity surface processing device of transducing head
CN110193777A (en) * 2019-06-06 2019-09-03 嘉兴星微纳米科技有限公司 Processing induction type grinding pad based on viscoelastic material
CN112496480B (en) * 2020-11-24 2021-12-17 南京航空航天大学 Free insulating particle assisted electrolytic wire cutting machining device and method
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