CN201026588Y - Magnetorheological apparatus for grinding and polishing curved surface - Google Patents

Magnetorheological apparatus for grinding and polishing curved surface Download PDF

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Publication number
CN201026588Y
CN201026588Y CNU2006201556379U CN200620155637U CN201026588Y CN 201026588 Y CN201026588 Y CN 201026588Y CN U2006201556379 U CNU2006201556379 U CN U2006201556379U CN 200620155637 U CN200620155637 U CN 200620155637U CN 201026588 Y CN201026588 Y CN 201026588Y
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China
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curved surface
grinding
magnetic
milling tool
polishing
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Expired - Fee Related
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CNU2006201556379U
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Chinese (zh)
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阎秋生
高伟强
路家斌
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Guangdong University of Technology
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Guangdong University of Technology
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Abstract

The utility model discloses a MR effect curved surface grinding and polishing device the technical scheme of which is that work pieces are arranged on the working table and an X-direction feed system and a Y-direction feed system are respectively connected with the working table and a numerical control system. The numerical control system is connected with a computer. A Z-direction feed system is arranged on the bench of the frame and connected with the numerical system, realizing the moving interpolation between the grinding and polishing tool and the work pieces. The lower end of the bench of the frame is provided with a spindle motor of the grinding and polishing tool and the spindle motor is provided with the grinding and polishing tool. The grinding and polishing liquids are filled between the grinding and polishing tool and the work pieces by a nozzle. The device constrains and agglomerates loose abrasives to form a MR effect grinding and polishing brush adopting the MR fluids and under the magnetic field. The a lapping and polishing pressure of the hardness of the grinding and polishing brush to the surface of the work piece and the grinding and processing effect of abrasive particles to the surface of the work piece can correct the shape of the curved surface, reaching the effect of effectively and precisely grinding and processing the super-smooth surface.

Description

Curved grinding-and-buffing attachment using magnetorheological effect
Technical field
The utility model relates to a kind of curved grinding-and-buffing attachment using magnetorheological effect.
Background technology
High speed and high capacity along with information computerization and photosignal transmission, the demand of the photoelectron product of fusion electronic technology and optical technology is increasing, as the CD/DVD optical reading head, light/electricity (PD) and electricity/light (LD) signal adapter in the optical-fibre communications, projecting apparatus, laser printer, molecular laser etc., one of core component of photovoltaic is exactly the optical element (lens that use in the light path, speculum), the manufacture method of optical element mainly contains pottery, the single and mini-batch production machining of hard brittle materials such as optical glass is shaped and plastics, but the industrial production mold pressing of heating plastic formed materials such as glass shapes, and optical element surface and hot pressing die surface all need to reach its form accuracy and surface accuracy requirement by machining process.Optical element will reach the good optical performance, and its surface accuracy need reach the ultra-smooth degree, and surface figure accuracy also has higher requirements.The processing method of optical surface mainly contains diamond tool cutting, grinding and grinding and polishing and combination thereof, and grinding and polishing is the effective processing method that finally obtains super-smooth surface.
The application on ultra-smooth plane is more and more, as compact disc mold surface, monocrystalline silicon sheet surface etc., finally need reach required form precision and surface roughness by grinding and polish processing.Have more and more hard brittle material such as optical glass, engineering ceramics, ultra-fine cemented carbide and the stainless steels etc. of adopting of material that the part of super-smooth surface requirement uses.
Attrition process is to utilize soft abrasive disk and lapping liquid (mixture of oil or aqueous substance and free abrasive), apply certain pressure by abrasive disk to free abrasive and act on surface of the work, abrasive material produces on abrasive disk and workpiece interface and rolls or slide, from workpiece to be machined surface removal one deck material as thin as a wafer, reach the purpose that improves workpiece form accuracy and surface accuracy.
Existing grinding and polishing device mainly is made of with the rotary table that is connected motor that is used to install workpiece the abrasive disk that is installed on the main shaft that connects motor.During work, workpiece is installed on the workbench, keeps certain movement relation between abrasive disk and the workpiece, abrasive disk applies certain pressure to free abrasive and realizes the grinding and polishing of surface of the work is processed.
Existing burnishing device mainly contains (1) and makes the abrasive disk matrix by metal material, and the mechanical lapping that free abrasive joins between abrasive disk and the workpiece is polished, and for example the cast iron abrasive disk adds grinding agent/abrasive pastes; (2) use polishing pad between abrasive disk and workpiece, polishing pad produces the effect that applies polishing pressure and constraint free abrasive; (3) the mechanochemistry grinding and polishing of increase chemical/electrochemical effect in the mechanical lapping process; (4) the small size tool scans grinding and polishing of curved surface processing; (5) the impartial grinding and polishing processing of air bag, they all belong to free abrasive processing.
The problem that existing free abrasive grinding and polishing device exists has: the movement velocity of free abrasive particulate between abrasive disk and workpiece, track, holdup time etc. all can't effectively be controlled, free state abrasive material between abrasive disk and workpiece interface has only the abrasive particle of large-size to produce elaboration, promptly break away from abrasive disk and workpiece interface because the abrasive particle of the effect considerable part reduced size of relative motion does not produce interference effect with surface of the work as yet, cause machining accuracy and inefficiency.The grinding and polishing processing of curved surface is more difficult with respect to plane lapping polishing processing, reaches super-smooth surface again because should guarantee the form accuracy of curved surface.
Summary of the invention
The purpose of this utility model is to provide a kind of curved grinding-and-buffing attachment using magnetorheological effect at the problem of existing burnishing device existence.
The technical scheme of the grinding and polishing device that the utility model provides is, workpiece is installed on the workbench 5, X is connected with digital control system 9 respectively to feed system 8 with Z to feed system 7 to feed system 6, Y, digital control system 9 connects computer 10, X is connected with workbench 5 to feed system 7 to feed system 6, Y, Z is installed on the fuselage stand 11 to feed system 8, realizes the moving interpolation between milling tool and the curve surface of workpiece; Z installs milling tool spindle motor 12 to feed system 8 lower ends, and above-mentioned milling tool spindle motor 12 is equipped with curved surface milling tool 1-1, annotates grinding and polishing liquid 3 to milling tool and the workpiece by grinding and polishing nozzle for liquid 13.
Above-mentioned grinding and polishing liquid is magnetic flow liquid and abrasive material mixed liquor, the free abrasive particulate 3-2 in the above-mentioned grinding and polishing liquid by the ferromagnetic particles 3-1 chain in magnetic flow liquid parcel, constrain in and constitute magnetic rheology effect abrasive brush 4 together.
Above-mentioned magnetic flow liquid can be selected existing commercialization magnetic flow liquid for use, the following magnetic flow liquid that also can select for use its parts by weight to form: silicone oil percentage by weight 50~60%, solid dispersed particle weight percentage 30~40%, oleic acid percentage by weight 2~3%, abrasive material percentage by weight 3~15%.
The solid dispersed particle of above-mentioned homemade magnetic flow liquid mainly is a ferromagnetic material, and carbonyl iron dust, reduced iron powder are arranged.
The free abrasive that adds in the above-mentioned magnetic flow liquid has carborundum (SiC), diamond, cube nitrogenize roc (CBN), alundum (Al (Al 2O 3), silicon nitride (Si 3N 4), zirconia (ZrO 2) wherein one or more mixtures, the abrasive particle diameter is less than 20 microns, the percentage by weight of free abrasive and magnetic flow liquid is less than 15%.
Above-mentioned milling tool is selected combined type magnetic curved surface milling tool for use.
Above-mentioned milling tool can be selected distributed magnetic curved surface milling tool for use in addition.
Above-mentioned milling tool selects for use combined type magnetic curved surface milling tool to be made of magnetic curved surface milling tool matrix 1-1-1 and circular cross-section permanent magnet 1-1-2, forms the magnetic rheology effect abrasive brush with circular cross-section; Above-mentioned several circular cross-section permanent magnets 1-1-2 is around being installed in around the magnetic curved surface milling tool matrix 1-1-1, and magnetic curved surface milling tool matrix 1-1-1 is made by nonmagnetic substance.
Above-mentioned distributed magnetic curved surface milling tool is by magnetic curved surface milling tool matrix 1-2-1, and the distributed magnetic 1-2-5 that solenoid or permanent magnetism lasso 1-2-2, magnetism isolating spacer circle 1-2-3, copper are cut apart band 1-2-4 and circular cross-section shape forms; Magnetic curved surface milling tool matrix 1-2-1 is made by nonmagnetic substance, circular cross-section distribution of shapes formula magnetic 1-2-5 is made by ferromagnetic material to be cut apart band 1-2-4 through copper and cuts apart the magnetic rheology effect that forms distributed magnetic field and have circular cross-section and grind to be with, solenoid or permanent magnetism lasso 1-2-2 are embedded among the magnetic curved surface milling tool matrix 1-2-1, and magnetism isolating spacer circle 1-2-3 is installed between magnetic curved surface milling tool matrix 1-2-1 and solenoid or the permanent magnetism lasso 1-2-2.
Be the circular cross-section shape on the face machined flat integral macroscopic of above-mentioned milling tool, can rotate or not rotate.
Above-mentioned workpiece is the workpiece 2-2 of axisymmetric curved surface or the workpiece 2-1 of non-axisymmetric curved surface.
Above-mentioned workbench 5 is rectangle travelling table or rotary table.
Above-mentioned workpiece is the curved surface of concave curved surface or convex surface or convex-concave combination.
Above-mentioned workpiece material can also can be nonmagnetic substances such as stainless steel for hard brittle materials such as optical glass, carbide alloy, engineering ceramics.
The utility model is a grinding and polishing liquid with the mixed liquor of magnetic flow liquid and free abrasive, use magnetic as the milling tool matrix, utilize the magnetic rheology effect of magnetic flow liquid adhesive solidification under the effect of magnetic field that free abrasive constraint, reunion are formed the magnetic rheology effect abrasive brush on milling tool matrix top.The magnetic rheology effect abrasive brush that undersized magnetic permutation and combination is become to have arc rotary surface structure, its end face forms the combined type milling tool, free abrasive is constrained in each small size magnetic rheology effect abrasive brush, has guaranteed wear particle concentration and stability between milling tool and the surface of the work.Because the hardness that the magnetic rheology effect abrasive brush that makes up in the milling tool has produces polishing pressure to surface of the work, abrasive particle produces the attrition process effect to surface of the work, and the gap becomes reverse proportionate relationship between magnetic rheology effect abrasive brush abrasive action and milling tool and the surface of the work, because the relation of the precise geometrical between milling tool and the surface of the work can produce the effect of curve form correction, salient point has higher material removing rate concave point that lower material removing rate is arranged on the surface of the work, therefore can reach the effect of high efficiency high accuracy grinding and polishing processing super-smooth surface.
Magnetic flow liquid is the general name that can be controlled the functional liquid material of its viscosity by magnetic field intensity, ferromagnetic particle bunchiness under the effect of magnetic field is arranged in the magnetic flow liquid, showing as apparent viscosity increases, make and can not the generation of shear-stable liquid have the yield stress of obvious surrender effect, this phenomenon is magnetic rheology effect.
Action principle of the present utility model is: the fine abrasive that will dissociate is sneaked in the magnetic rheological liquid, utilize the magnetic flow liquid magnetic rheology effect that ferromagnetic particle chaining distribution viscosity increases under the effect of magnetic field, the free abrasive particulate is wrapped up by the ferromagnetic particle chain in the magnetic flow liquid, constrain in and form the magnetic rheology effect abrasive brush together, when making tool base with permanent magnet or electromagnet, then form the radial magnetic line of force on the magnetic pole top, because ferromagnetic particle is arranged along the magnetic line of force and has been produced the abrasive particle abundance zone formation magnetic rheology effect abrasive brush that is gathered in the magnetic pole top, the milling tool matrix is made when having combined type magnetic pole or continous way magnetic pole, will form organized magnetic rheology effect abrasive brush or magnetic rheology effect grinding band in abrasive tool surface, when between milling tool and the workpiece during relative motion magnetic rheology effect abrasive brush or magnetic rheology effect grind band and form the compound movement track and produce the micro-cutting effect at surface of the work thereupon, can implement grinding and polishing processing to surface of the work, improve its form accuracy and reduce its surface roughness and reach the ultra-smooth degree.
The basic different manifestations of the utility model and existing abrasive working appts exists: 1) the utility model abrasive tool surface has the magnetic generation magnetic field of combination or continuous distributed; 2) the utility model produces abrasive action on milling tool and workpiece interface is that the magnetic rheology effect of combination magnetic rheology effect abrasive brush or continuous distributed grinds band rather than individual layer, single free abrasive, has reduced the influence of free abrasive size inhomogeneities to machining accuracy and efficient; 3) the utility model abrasive particle is that magnetic rheology effect abrasive brush or magnetic rheology effect grind the normal pressure of band generation and the resultant effect of shearing force to the micro-cutting power of surface of the work generation, magnetic rheology effect abrasive brush or magnetic rheology effect grind band itself and have elasticity, the process that acts on finished surface is even, gentle, controlled, rather than apply to free abrasive by mechanism between milling tool matrix or abrasive disk and the workpiece in the mechanical lapping, help obtaining super-smooth surface; 4) magnetic rheology effect abrasive brush or magnetic rheology effect grind band at its different parts because the magnetic field intensity difference has different rigidity and to the maintenance intensity of abrasive particle, simultaneously magnetic rheology effect abrasive brush or magnetic rheology effect grind in the band wear particle concentration and can control, and are beneficial to the control of working (machining) efficiency and machining accuracy in the attrition process process; 5) gap becomes reverse proportionate relationship between magnetic rheology effect abrasive brush abrasive action and milling tool and the surface of the work, salient point has higher material removing rate concave point that lower material removing rate is arranged on the surface of the work, can reach the effect of high efficiency high accuracy grinding and polishing processing super-smooth surface.
The beneficial effects of the utility model: the combined magnetic rheological effect abrasive brush or the continuous magnetic rheology effect that form in abrasive tool surface grind band, having produced the free abrasive particulate evenly and stably is distributed in abrasive tool surface and acts on workpiece machining surface, having solved existing grinding technique free abrasive can't evenly distribute and abrasive concentration is difficult to keep in workpiece interface, the inhomogeneous difficult problem that influences grinding precision and efficient that waits of abrasive material size, the bond strength that the intensity decision magnetic rheology effect abrasive brush in magnetic field or continuous magnetic rheology effect grind abrasive particle in the band, the process feature is between fixed-abrasive and free abrasive, can remain the concentration and the uniformity of free abrasive material on the workpiece factory interface on the one hand, magnetic rheology effect belongs to soft-constraint to the free abrasive particulate simultaneously, centrifugal force and the effect of micro-cutting power all may make abrasive particle shake off, when being subjected to excessive cutting force, the abrasive particle blunt can cause escaping near the solid-state mobile abrasive particle of magnetic flow liquid surrender, abrasive particle self mechanism in the process constantly comes off the blunt abrasive particle, increased moving of abrasive particle, improved the removal effect of material, simultaneously, do not need to consider to perplex the tool wear problem of general process.Magnetic rheology effect abrasive brush or continuous magnetic rheology effect grinding band itself have viscoplasticity on the other hand, have played the effect of polishing pad, can not resemble the concretion abrasive grinding tool in the process of lapping and may damage the workpiece machined surface, reach high accuracy attrition process purpose.
Description of drawings
Fig. 1 is the structural representation of curved grinding-and-buffing attachment using magnetorheological effect;
Fig. 2 is the fundamental diagram of curved grinding-and-buffing attachment using magnetorheological effect;
Fig. 3 is that the utility model application magnetic rheology effect Ginding process carries out axial symmetry surface of revolution machining principle figure;
Fig. 4 is that the utility model application magnetic rheology effect Ginding process carries out non-axisymmetric curved surface machining principle figure;
Fig. 5 is the combined type magnetic curved surface milling tool structural representation that the utility model uses;
Fig. 6 is the profile of the combined type magnetic curved surface milling tool structural representation of the utility model use;
Fig. 7 is the distributed magnetic curved surface milling tool structural representation that the utility model uses;
Fig. 8 is the profile of the distributed magnetic curved surface milling tool structural representation of the utility model use;
Respectively number implication among the figure: 1. magnetic, 1-1. combined type magnetic curved surface milling tool, 1-1-1. combined type magnetic curved surface milling tool matrix, 1-1-2. the circular cross-section permanent magnet, the distributed magnetic curved surface of 1-2. milling tool, the distributed magnetic curved surface of 1-2-1. milling tool matrix, 1-2-2. solenoid or permanent magnetism lasso, 1-2-3. the magnetism isolating spacer circle, 1-2-4. copper is cut apart band, 1-2-5. circular cross-section distribution of shapes formula magnetic, 2. finished surface, 2-1. machined surface is the workpiece of non-axisymmetric curved surface, the 2-2. machined surface is the workpiece of axial symmetry surface of revolution, 3. grinding and polishing liquid (magnetic flow liquid and abrasive material mixed liquor), 3-1. ferromagnetic particle, 3-2. abrasive particle, 4. magnetic rheology effect abrasive brush, 5. workbench, 6.X to feed system, 7.Y to feed system, 8.Z is to feed system, 9. digital control system, 10. computer, 11. the fuselage stand, 12. milling tool spindle motors, 13. lapping liquid nozzles.
The specific embodiment
Below in conjunction with accompanying drawing the utility model is done further concrete description, but embodiment of the present utility model is not limited thereto.
Fig. 1 shows the concrete structure that the utility model is used for the processing of ultra-smooth curved surface grinding and polishing, curved surface magnetically grinding instrument 1-1 can realize rotating under the driving of milling tool spindle motor 12, machined surface is that the workpiece 2-1 of non-axisymmetric curved surface is installed on the workbench 5 with 3 Shaft and NC Machining Test moving interpolations, X is to feed system 6, Y is realizing that to feed system 8 curved surface magnetically grinding instrument 1-1 and machined surface are the moving interpolation between the workpiece 2-1 of non-axisymmetric curved surface to feed system 7 and Z under the control of digital control system 9, computer 10 is to digital control system 9 transmission process datas, to instrument and workpiece interface, realize attrition process by grinding and polishing nozzle for liquid 13 filling grinding and polishing liquid (magnetic flow liquid and abrasive material mixed liquors) 3 to curve surface of workpiece.
Fig. 2, the utility model utilizes magnetic rheology effect to make the principle of smooth surface milling tool, be that magnetic 1 is placed among the grinding and polishing liquid (magnetic flow liquid and abrasive material mixed liquor) 3, ferromagnetic particle 3-1 arranges along magnetic line of force bunchiness in the magnetic flow liquid under the effect of magnetic field, the abrasive particle 3-2 that sneaks into wherein is wrapped, constrain between the ferromagnetic particles 3-1 of bunchiness distribution, because the magnetic 1 end magnetic line of force is intensive and radially distribute, thereby free abrasive is assembled and is formed the magnetic rheology effect abrasive brush 4 that can carry out grinding and polishing processing with certain rigidity and bond strength.
Fig. 3 shows the utility model and is used for smooth shaft symmetry surface of revolution grinding and polishing machining principle figure, as seen from the figure, machined surface is that the workpiece 2-2 of axial symmetry surface of revolution is installed on the rotary table 5, magnetic curved surface milling tool 1-1 has revolution and axial feed motion, have simultaneously and surface of the work between look into and mend motion, to instrument and workpiece interface, realize grinding and polishing processing by grinding and polishing nozzle for liquid 13 filling grinding and polishing liquid (magnetic flow liquid and abrasive material mixed liquors) 3 to curve surface of workpiece.
Fig. 4 shows the schematic diagram that the utility model is used for smooth non-axisymmetric curved surface attrition process, as seen from the figure, machined surface is that the workpiece 2-1 of non-axisymmetric curved surface is installed on the workbench 5 with numerical control moving interpolation, magnetic curved surface milling tool 1-1 has revolution and axial feed motion, to instrument and workpiece interface, realize grinding and polishing processing by grinding and polishing nozzle for liquid 13 filling grinding and polishing liquid (magnetic flow liquid and abrasive material mixed liquors) 3 to curve surface of workpiece.
Fig. 5 shows a kind of concrete structure of magnetic curved surface milling tool, is made of magnetic curved surface milling tool matrix 1-1-1 and circular cross-section permanent magnet 1-1-2, forms the magnetic rheology effect abrasive brush with circular cross-section.
Fig. 6 shows the another kind of concrete structure of magnetic curved surface milling tool, by magnetic curved surface milling tool matrix 1-2-1, solenoid or permanent magnetism lasso 1-2-2, magnetism isolating spacer circle 1-2-3, the distributed magnetic 1-2-5 that copper is cut apart band 1-2-4 and circular cross-section shape forms, and circular cross-section distribution of shapes formula magnetic 1-2-5 is made by ferromagnetic material to be cut apart band 1-2-4 through copper and cut apart the magnetic rheology effect that forms distributed magnetic field and have circular cross-section and grind and be with.
The utility model can be processed curved surface, its implementation process and the above similar process of convex surface or convex-concave combination by grinding and polishing equally.

Claims (10)

1. curved grinding-and-buffing attachment using magnetorheological effect, workpiece is installed on the workbench, X is connected with digital control system with workbench respectively to feed system to feed system, Y, and digital control system connects computer, and Z is installed on the fuselage stand and with digital control system to feed system and is connected; The milling tool spindle motor is installed in fuselage stand lower end, and it is characterized in that: above-mentioned milling tool spindle motor is equipped with milling tool, annotates grinding and polishing liquid to milling tool and the workpiece by the grinding and polishing nozzle for liquid.
2. curved surface grinding and polishing device according to claim 1 is characterized in that: the free abrasive particulate in the above-mentioned grinding and polishing liquid by the ferromagnetic particles chain in magnetic flow liquid parcel, constrain in and constitute the magnetic rheology effect abrasive brush together.
3. curved surface grinding and polishing device according to claim 1 is characterized in that: above-mentioned milling tool is selected combined type magnetic curved surface milling tool for use.
4. curved surface grinding and polishing device according to claim 1 is characterized in that: above-mentioned milling tool is selected else with distributed magnetic curved surface milling tool.
5. curved surface grinding and polishing device according to claim 3 is characterized in that: combinations thereof formula magnetic curved surface milling tool is made of magnetic curved surface milling tool matrix and circular cross-section permanent magnet, forms the magnetic rheology effect abrasive brush with circular cross-section; Above-mentioned several circular cross-section magnet rings are around being installed in around the magnetic curved surface milling tool matrix.
6. curved surface grinding and polishing device according to claim 4, it is characterized in that: above-mentioned distributed magnetic curved surface milling tool is by magnetic curved surface milling tool matrix, solenoid or permanent magnetism lasso, magnetism isolating spacer circle, copper are cut apart the distributed magnetic composition of band and circular cross-section shape; Circular cross-section distribution of shapes formula magnetic is made by ferromagnetic material and is cut apart band through copper and cut apart the magnetic rheology effect that forms distributed magnetic field and have circular cross-section and grind to be with, solenoid or permanent magnetism lasso are embedded in the magnetic curved surface milling tool matrix, and the magnetism isolating spacer circle is installed between magnetic curved surface milling tool matrix and solenoid or the permanent magnetism lasso.
7. according to claim 1 or 3 or 4 described curved surface grinding and polishing devices, it is characterized in that: be the circular cross-section shape on the face machined flat integral macroscopic of above-mentioned milling tool.
8. curved surface grinding and polishing device according to claim 1 is characterized in that: above-mentioned workpiece is the workpiece of axisymmetric curved surface or the workpiece of non-axisymmetric curved surface.
9. according to claim 1 or 8 described curved surface grinding and polishing devices, it is characterized in that: above-mentioned workpiece is the curved surface of concave curved surface or convex surface or convex-concave combination.
10. curved surface grinding and polishing device according to claim 1 is characterized in that: above-mentioned workpiece material is optical glass, carbide alloy, engineering ceramics or stainless steel.
CNU2006201556379U 2006-12-31 2006-12-31 Magnetorheological apparatus for grinding and polishing curved surface Expired - Fee Related CN201026588Y (en)

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CN100486765C (en) * 2006-12-31 2009-05-13 广东工业大学 Grinding polishing method based on magnetic rheology effect and its polishing device
CN101564824B (en) * 2009-06-05 2010-11-03 湖南大学 Method and device for polishing magneto-rheological inclined shaft
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CN101564824B (en) * 2009-06-05 2010-11-03 湖南大学 Method and device for polishing magneto-rheological inclined shaft
CN101585159B (en) * 2009-06-10 2011-01-26 中国人民解放军国防科学技术大学 Device of inhibiting high frequency error in magnetic rheology based on principle of entropy increase
CN103269828A (en) * 2010-12-23 2013-08-28 Qed技术国际股份有限公司 System for magnetorheological finishing of substrates
CN103269828B (en) * 2010-12-23 2016-03-02 Qed技术国际股份有限公司 For the system of base material MRF
CN102161168A (en) * 2011-01-19 2011-08-24 湖南大学 Small-caliber aspherical composite precise processing machine tool
CN102161168B (en) * 2011-01-19 2012-07-18 湖南大学 Small-caliber aspherical composite precise processing machine tool
CN102501162A (en) * 2011-11-08 2012-06-20 苏州大学 Machining method for aspheric surface of semiconductor
CN102873591A (en) * 2012-09-11 2013-01-16 上海交通大学 Cavity surface treatment machining device based on energy conversion device
CN106541312A (en) * 2016-12-07 2017-03-29 中山市光大光学仪器有限公司 For the equipment of prism polishing
CN106826539A (en) * 2016-12-30 2017-06-13 赵善文 Flexible abrasive material for surface grinding and the magnetically grinding component based on the abrasive material
CN106826539B (en) * 2016-12-30 2019-08-30 深圳市五湖智联实业有限公司 Flexible abrasive material for surface grinding and the magnetically grinding component based on the abrasive material
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