CN102513918A - Silicon nitride ceramic ball grinding method based on flexible grinding material fixing grinding tool - Google Patents
Silicon nitride ceramic ball grinding method based on flexible grinding material fixing grinding tool Download PDFInfo
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- CN102513918A CN102513918A CN201110412217XA CN201110412217A CN102513918A CN 102513918 A CN102513918 A CN 102513918A CN 201110412217X A CN201110412217X A CN 201110412217XA CN 201110412217 A CN201110412217 A CN 201110412217A CN 102513918 A CN102513918 A CN 102513918A
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Abstract
A silicon nitride ceramic ball grinding method based on a flexible grinding material fixing grinding tool includes steps of 1), preparing the flexible grinding material fixing grinding tool consisting of flexible grinding materials, curing agent and filler; 2), forming prepared ingredients in a mold by means of hot pressing, completing heat curing after the grinding tool is released from the mold, repairing the upper end surface and the lower end surface of the grinding tool, and guaranteeing flatness and parallelism of the upper end surface and the lower end surface of the grinding tool; and 3), mounting the flexible grinding material fixing grinding tool on an upper disc of a grinding machine, and using a cast iron grinding disc or another flexible grinding material fixing grinding tool as a lower disc. A silicon nitride ceramic ball to be machined is placed in a raceway of the lower disc, the grinding machine is started, water-base cooling liquid is filled in a space between the upper disc and the lower disc, the surface of the silicon nitride ceramic ball is scratched by grains on each flexible grinding material fixing grinding tool, machining efficiency is improved, and production cost is lowered.
Description
Technical field
The present invention relates to a kind of Ginding process of silicon nitride ceramic ball, especially efficient, the high-quality Ginding process used of silicon nitride ceramic ball fine finishining.
Background technology
Along with the development of industrial technology, performance requirements such as high speed, high accuracy, high reliability have been proposed for lathe and instrument and equipment.Compare with traditional bearing steel; It is little that silicon nitride ceramics has density; Hardness is high, elastic modelling quantity is high (rigidity is high), wear-resistant, thermal coefficient of expansion is low, heat endurance and chemically stable is good, excellent comprehensive performances very such as insulation, no magnetic; Be considered to make the optimal material of bearing roller, and in the application of ceramic ball bearing (steel race ring, ceramic material rolling element .), obtain very ten-strike.Ceramic ball bearing has that long service life (steel bearing 2～5 times), rotating speed are high, overall precision and good rigidity, thermal stability is good and excellent comprehensive performance such as nonmagnetic; At high temperature, at a high speed, have boundless application prospect under the condition of work such as high accuracy, acid and alkali corrosion, galvano-cautery, high-intensity magnetic field, unlubricated or medium be lubricated, be widely used in numerous areas such as Aero-Space, military affairs, oil, chemical industry and high speed and precision machinery.
But; Silicon nitride ceramics belongs to hard crisp difficult-to-machine material; Traditional ceramic ball processing mainly adopts the V-shaped groove polishing that grinds the steel ball; The diamond abrasive that adopts hard adopts the free abrasive abrasive method to process as abrasive media, the process-cycle long (accomplish the ceramic batch ball and need 12～15 days).Very long process and expensive diamond abrasive have caused high manufacturing cost.The domestic and international research experience shows that the working (machining) efficiency of silicon nitride ceramics rolling element is low, the processing cost height is the main cause that the restriction ceramic ball bearing is applied.
In the free abrasive process of lapping, abrasive particle is mainly realized the material removal with the mode of rolling, and the abrasive particle quantity of participating in the material removal in the unit interval is few, and material removing rate is low.In order to overcome the lower problem of free abrasive working (machining) efficiency; Reports such as at present existing patent, technical paper have been developed the quick removal that fixed abrasive material (emery wheel) grinding technique is used for the allowance of Ceramic Balls, utilize the efficient removal of mechanisms such as the delineation realization of hard abrasive materials (hardness of these abrasive materials will be higher than the Ceramic Balls material) such as the diamond that is consolidated, boron carbide, carborundum to the Ceramic Balls material.In the fixed abrasive material attrition process, abrasive particle is cemented in together, and abrasive particle is mainly removed workpiece material with the form of delineation, and the abrasive particle quantity of participating in processing is many, can obtain very high material removing rate.But; Silicon nitride ceramic ball with hard crisp characteristic is very responsive to the surface/subsurface crackle; Under big load effect; Realize that with the mechanism of hard abrasive materials such as diamond, boron carbide, carborundum the material of silicon nitride ceramic ball removes, be easy to cause such as surface damages such as pit, cut and micro-cracks on the silicon nitride ceramic ball surface.These blemish externally effect of load can be expanded the bigger embrittlement cracking of formation down, thereby cause the catastrophic failure of Ceramic Balls, have seriously reduced the serviceability of silicon nitride ceramic ball.Therefore, the fixed abrasive material process technology of exploitation mainly is applicable to the efficient removal of silicon nitride ceramic ball allowance at present, is difficult to obtain the high-quality surface of no surface damage.The accurately machined main purpose of silicon nitride ceramic ball is further to improve the Surface Machining defective that semifinishing causes, and improves the surface quality and the precision of Ceramic Balls, up to the requirement that reaches finished product.Therefore, the fixed abrasive material processing method of hard abrasive materials such as these diamonds, boron carbide, carborundum is seldom adopted in the fine finishining of silicon nitride ceramic ball.And still adopt the grinding/finishing method of the free abrasive of chromium oxide, diadust etc. to carry out fine finishining, therefore, the working (machining) efficiency in silicon nitride ceramic ball fine finishining stage is still very low.
Summary of the invention
In order to overcome the deficiency that silicon nitride ceramic ball fine finishining stage efficient is low, cost is high, the present invention provides a kind of machined surface quality, working (machining) efficiency is high, production cost the is low silicon nitride ceramic ball Ginding process based on mild abrasives set grinding tool.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of silicon nitride ceramic ball Ginding process based on mild abrasives set grinding tool, said Ginding process may further comprise the steps:
1) preparation of mild abrasives set grinding tool: described mild abrasives set grinding tool is by mild abrasives; Curing agent and filler are formulated, and said soft hardness of grain is lower than silicon nitride ceramics, and the quality percentage composition of three kinds of components is respectively: mild abrasives 60%～80%; Curing agent 10%～20%; Filler 10%～20% mixes mild abrasives, curing agent, filler, stirs;
2) making of mild abrasives set grinding tool: the batching that will configure hot forming in mould, accomplish heat cure after the demoulding, and its upper and lower end face is repaired, guarantee the flatness and the depth of parallelism of grinding tool upper and lower end face;
3) mild abrasives set grinding tool is to the fine finishining of silicon nitride ceramic ball: mild abrasives set grinding tool is installed on the dish of going up of grinder, and lower wall adopts cast iron mill or mild abrasives set grinding tool.Silicon nitride ceramic ball to be processed is placed in the raceway of lower wall, starts grinder, and between upper lower burrs, injects water base cooling fluid; Abrasive particle on the mild abrasives set grinding tool is drawn wiping to the silicon nitride ceramic ball surface, realizes the fine finishining to silicon nitride ceramic ball.
Preferably; In said step 3); Under the effect of pressure and relative velocity, mild abrasives on set grinding tool and the silicon nitride contact area and silicon nitride material generation solid phase reaction generate one deck reaction product layer soft, that be prone to removal; And utilize the rubbing action between follow-up abrasive material and the product layer that the product layer is removed, thereby realize the fine finishining of silicon nitride ceramic ball.
Further, described mild abrasives is the mixing of following one or several: 1. cerium oxide, 2. zirconia, 3. iron oxide, 4. chromium oxide.
Further again, described curing agent is one of following: 1. epoxy curing agent, 2. unsaturated-resin curing agent, 3. novolac resin, 4. thermosetting phenolic resin, 5. polyamide curing agent, 6. phenolic aldehyde-acetal resin, 7. phenolic aldehyde-epoxy resin, 8. boron bakelite resin, 9. organosilicon phenolic resins etc.
Further, described filler is one or several following mixing: 1. NaOH, 2. sodium acid carbonate, 3. starch based filler, 4. carbohydrate filler, 5. cellulose family filler, 6. inorganic salts filler.
Preferred another kind of scheme: said step 2), in the heat pressure forming process, pressure is 300-600kg/cm
2, hot pressing temperature is arranged on 100-200 ℃ according to the difference of curing agent, and hot pressing time is arranged on 45-120min according to difference between the grinding tool.
Said step 2) in, curing process, oven temperature remain on 80-200 ℃, drying time 10-48 hour; Be made into the monoblock type grinding tool for the mild abrasives set grinding tool of grinding tool diameter less than
; For the mild abrasives set grinding tool of diameter greater than
; Be made into fan-shaped grinding tool piece, be assembled into circular millstone in use.
Said step 2) in, in the dressing process, the flatness and the depth of parallelism are controlled in the 0.1mm.
Technical conceive of the present invention is: adopt the low mild abrasives of hardness ratio silicon nitride ceramic ball hardness; Be mixed with the fixed abrasive material grinding tool; In the process, utilize the solid phase reaction between mild abrasives and the silicon nitride material, form one deck reaction product layer soft, that be prone to removal on the silicon nitride ceramic ball surface; And utilize the rubbing action between follow-up abrasive material and the product layer that the product layer is removed, thereby realize the fine finishining of silicon nitride ceramic ball.Because; The abrasive hardness that is adopted is far below the hardness of silicon nitride ceramic ball; Therefore cause when this processing method can not cause hard abrasive materials processing silicon nitride ceramic ball such as diamond, boron carbide, carborundum to silicon nitride ceramic ball such as surface damages such as pit, cut and micro-cracks, therefore improved the crudy that can improve silicon nitride ceramic ball.On the other hand,, soft abrasive material is consolidated, the abrasive particle quantity of participating in processing is provided, therefore improved the accurately machined working (machining) efficiency of silicon nitride ceramic ball owing to adopted the fixed abrasive material grinding tool.
Utilize the solid phase reaction between mild abrasives and the silicon nitride material; Form one deck reaction product layer soft, that be prone to removal on the silicon nitride ceramic ball surface; And utilize the rubbing action between follow-up abrasive material and the product layer that the product layer is removed, thereby realize the fine finishining of silicon nitride ceramic ball.Below provided 1. cerium oxide (CeO
2), 2. zirconia (ZrO
2), 3. iron oxide (Fe
2O
3), 4. chromium oxide (Cr
2O
3) and silicon nitride (Si
3N
4) the solid phase reaction equation that takes place of ceramic material:
Si
3N
4+ZrO
2→SiO
2+ZrSiO
4/ZrO
2.SiO
2+ZrN+N
2(g) (1)
Si
3N
4+CeO
2→SiO
2+CeO
1.72+CeO
1.83+Ce
2O
3+N
2(g) (2)
Si
3N
4+Fe
2O
3→SiO
2+FeO+FeSiO
3/FeO.SiO
2+Fe
2N+N
2 (3)
Si
3N
4+Cr
2O
3→SiO
2+CrN (4)
Two types chemical reaction is arranged: oxidation-reduction reaction and displacement reaction (being cation and anionic displacement in the materials such as silicate) here.Si
3N
4: Si → SiO
2Or SiO
4 2-, and N → N
3-, N
2(g) or NH
3(g).In water base polishing fluid, Fe
2O
3, Cr
2O
3, ZrO
2And CeO
2Abrasive material and Si
3N
4Chemical reaction between the material all is feasible from thermodynamic (al) angle.Silica (SiO
2) be silicon nitride (Si
3N
4) the key reaction product that retains of Ceramic Balls surface, its hardness is far below the hardness of silicon nitride ceramics, and close with the hardness of abrasive materials such as cerium oxide, zirconia.Therefore; Adopt these mild abrasives that silicon nitride ceramic ball is carried out fine finishining; It or not the pure mechanism of utilizing abrasive material; Remove but chemical-mechanical (friction) effect that has utilized abrasive material and workpiece realizes material, thereby can not cause such as surface damages such as pit, cut and micro-cracks, thereby obtain smooth undamaged surface silicon nitride ceramic ball.
Water base cooling fluid also is the important component part of the solid phase reaction of silicon nitride ceramics.Water has not only promoted the carrying out of chemically mechanical polishing, and has participated in the chemical reaction with silicon nitride material directly, has strengthened the effect of chemically mechanical polishing.Silicon nitride can generate SiO with the water hydrolytic reactions
2And NH
3And under higher temperature (＞200 ℃), NH
3Just might resolve into N
2(g) and H
2(g).Their reaction equation is following:
Si
3N
4+6H
2O＝3SiO
2+4NH
3 (5)
Si
3N
4+6H
2O＝3SiO
2+2N
2(g)+6H
2(g)(T＞200℃) (6)
Solid phase reaction between this mild abrasives and the silicon nitride ceramic ball can not be carried out in the oil base environment.Its main cause is that the conductance and the dissolubility of oil base polishing fluid is almost nil.The carrying out that oil film between abrasive material and the workpiece has stoped chemical reaction between them is even have also very faint.
On the other hand; Owing to adopted the fixed abrasive material grinding tool, soft abrasive material is consolidated, grind with traditional free abrasive and compare; Not only improved the abrasive particle quantity of participating in processing; And increased constraint to abrasive particle, and reduced freely rolling of abrasive particle, therefore improved the accurately machined working (machining) efficiency of silicon nitride ceramic ball.
Beneficial effect of the present invention mainly shows: reduce the surface damage that abrasive particle machinery removal effect causes silicon nitride ceramic ball, improve the crudy of silicon nitride ceramic ball, process velocity is very fast, working (machining) efficiency is high, reduce production costs.
Description of drawings
Fig. 1 is the structural representation of mild abrasives set grinding tool.
Fig. 2 is a kind of structural representation of large diameter mild abrasives set grinding tool piecemeal assembling.
Fig. 3 is that a kind of mild abrasives set grinding tool is installed in the principle schematic on the grinder.
The principle schematic of Fig. 4 mild abrasives and silicon nitride ceramic ball generation solid phase reaction.
The specific embodiment
Below in conjunction with accompanying drawing the present invention is further described.
A kind of silicon nitride ceramic ball Ginding process based on mild abrasives set grinding tool, this Ginding process may further comprise the steps:
1) preparation of mild abrasives set grinding tool:
With reference to Fig. 1, said mild abrasives set grinding tool comprises soft abrasive particle 1, curing agent (bond) 2 and filler 3, and its quality percentage composition is respectively: mild abrasives 60%～80%, curing agent 10%～20%, filler 10%～20%; Mild abrasives, curing agent, filler are mixed, stir;
2) making of mild abrasives set grinding tool:
The mild abrasives set grinding tool batching that configures is put into grinding tool, hot forming.Pressure is 300-600kg/cm
2, hot pressing temperature is arranged on 100-200 ℃ according to the difference of curing agent, and hot pressing time is arranged on 45-120min according to difference between the grinding tool.The grinding tool demoulding behind the hot forming, put into curing oven, oven temperature remains on 80-200 ℃, drying time 10-48 hour; Can directly be made into the monoblock type grinding tool for the mild abrasives set grinding tool of grinding tool diameter less than
.For the mild abrasives set grinding tool of diameter greater than
; With reference to Fig. 2; Can be made into fan-shaped grinding tool piece 1; During use, some fan-shaped grinding tool pieces are bonded on the circular base plate 2 with binding agent, are assembled into circular millstone.After mild abrasives set grinding tool completes, its end face is repaired, to guarantee the flatness and the depth of parallelism of grinding tool machined surface, the flatness and the depth of parallelism should be controlled in the 0.1mm.
3) adopt mild abrasives set grinding tool that silicon nitride ceramic ball is carried out fine finishining:
At first, carry out the installation of mild abrasives set grinding tool: with reference to Fig. 3, adopt binding agent that mild abrasives set grinding tool 1 is bonded on the grinding tool basal disc 2, with bolt basal disc 2 is connected with the upper plate tire 3 of grinder again.Mild abrasives set grinding tool uses as the dish of going up of grinder.Basal disc is processed by steel, cast iron or aluminium alloy.
With reference to Fig. 3; Silicon nitride ceramic ball to be processed 4 (having accomplished roughing or semifinishing) is placed on (the rolling cross sectional shape is V-arrangement or semicircle) in the ring raceway of offering on the lower millstone 6 of grinder 5, and following abrasive disk is cast iron (or adopting mild abrasives set grinding tool equally).Press down the dish of going up that mild abrasives set grinding tool has been installed, start grinder.And between upper and lower dish, inject water-based cooling fluid 7.Under the effect of pressure and relative velocity; Mild abrasives on set grinding tool and the silicon nitride contact area and silicon nitride material generation solid phase reaction (referring to Fig. 4); Produce one deck reaction product layer soft, that be prone to removal; And utilize the rubbing action between follow-up abrasive material and the product layer that the product layer is removed, thereby realize the fine finishining of silicon nitride ceramic ball.Because the abrasive hardness that is adopted is far below the hardness of silicon nitride ceramic ball, therefore this processing method can not cause such as surface damages such as pit, cut and micro-cracks silicon nitride ceramic ball, has therefore improved the crudy that can improve silicon nitride ceramic ball.On the other hand,, soft abrasive material is consolidated, has improved the abrasive particle quantity of participating in processing, therefore improved the accurately machined working (machining) efficiency of silicon nitride ceramic ball owing to adopted the fixed abrasive material grinding tool.
Described mild abrasives is one or several following mixing: 1. cerium oxide, 2. zirconia, 3. iron oxide, 4. chromium oxide.The Mohs' hardness of these abrasive materials is evenly less than 7.
Described curing agent is one of following: 1. epoxy curing agent, 2. unsaturated-resin curing agent, 3. novolac resin, 4. thermosetting phenolic resin, 5. polyamide curing agent, 6. phenolic aldehyde-acetal resin, 7. phenolic aldehyde-epoxy resin, 8. boron bakelite resin, 9. organosilicon phenolic resins etc.
Described filler is one or several following mixing: 1. NaOH, 2. sodium acid carbonate, 3. starch based filler, 4. carbohydrate filler, 5. cellulose family filler, 6. inorganic salts filler.
Present embodiment is chosen at the fine finishining of carrying out silicon nitride ceramic ball on the vertical steel ball ball lapping machine of 3M7240L.The embodiment condition is as shown in table 1.Mild abrasives set grinding tool has adopted cerium oxide and two kinds of mild abrasives of zirconia to make respectively, and other making is all identical with machined parameters.Use these two kinds of mild abrasives set grinding tools that the silicon nitride ceramic ball of
is processed respectively.Adopt water base cooling fluid to cool off and lubricate in the process.Before embodiment began, the beforehand research time that needs 2-5 hour was used for guaranteeing that Ceramic Balls contact between the soft fixed abrasive material of groove that descends abrasive disk and top lap is good.
Table 1
Table 2 has shown the processing result of silicon nitride ceramic ball among the embodiment.The result shows; Silicon nitride ceramic ball material removing rate in the present embodiment is stable; Compare (under the same process condition, adopting free diadust that silicon nitride ceramic ball is carried out fine finishining) with traditional process of lapping, material removing rate almost is under the same conditions 2-3 a times.In the present embodiment; Adopt cerium oxide mild abrasives set grinding tool that silicon nitride ceramic ball is carried out fine finishining; Surface roughness is 3-6nm; Adopt zirconia mild abrasives set grinding tool that silicon nitride ceramic ball is carried out fine finishining, surface roughness is 4-8nm, all will obviously be superior to the surface roughness that traditional method for fine finishing obtains.This shows that mild abrasives set grinding tool Ginding process aspect the silicon nitride ceramic ball finishing technology that replaces biography, has a good application prospect.
Table 2
Last example only is preferred embodiment of the present invention, and every any modification and change of doing according to this patent all should be included in protection scope of the present invention.
Claims (8)
1. silicon nitride ceramic ball Ginding process based on mild abrasives set grinding tool, it is characterized in that: said Ginding process may further comprise the steps:
1) preparation of mild abrasives set grinding tool: described mild abrasives set grinding tool is by mild abrasives; Curing agent and filler are formulated, and said soft hardness of grain is lower than silicon nitride ceramics, and the quality percentage composition of three kinds of components is respectively: mild abrasives 60%～80%; Curing agent 10%～20%; Filler 10%～20% mixes mild abrasives, curing agent, filler, stirs;
2) making of mild abrasives set grinding tool: the batching that will configure hot forming in mould, accomplish heat cure after the demoulding, and its upper and lower end face is repaired, guarantee the flatness and the depth of parallelism of grinding tool upper and lower end face;
3) mild abrasives set grinding tool is to the fine finishining of silicon nitride ceramic ball: mild abrasives set grinding tool is installed on the dish of going up of grinder, and lower wall adopts cast iron mill or mild abrasives set grinding tool; Silicon nitride ceramic ball to be processed is placed in the raceway of lower wall, starts grinder, and between upper lower burrs, injects water base cooling fluid; Abrasive particle on the mild abrasives set grinding tool is drawn wiping to the silicon nitride ceramic ball surface, realizes the fine finishining to silicon nitride ceramic ball.
2. the silicon nitride ceramic ball Ginding process based on mild abrasives set grinding tool as claimed in claim 1; It is characterized in that: in said step 3); Under the effect of pressure and relative velocity, mild abrasives on set grinding tool and the silicon nitride contact area and silicon nitride material generation solid phase reaction generate one deck reaction product layer soft, that be prone to removal; And utilize the rubbing action between follow-up abrasive material and the product layer that the product layer is removed, thereby realize the fine finishining of silicon nitride ceramic ball.
3. according to claim 1 or claim 2 the silicon nitride ceramic ball Ginding process based on mild abrasives set grinding tool is characterized in that: described mild abrasives is the mixing of following one or several: 1. cerium oxide, 2. zirconia, 3. iron oxide, 4. chromium oxide.
4. according to claim 1 or claim 2 the silicon nitride ceramic ball Ginding process based on mild abrasives set grinding tool is characterized in that: described curing agent is one of following: 1. epoxy curing agent, 2. unsaturated-resin curing agent, 3. novolac resin, 4. thermosetting phenolic resin, 5. polyamide curing agent, 6. phenolic aldehyde-acetal resin, 7. phenolic aldehyde-epoxy resin, 8. boron bakelite resin, 9. organosilicon phenolic resins etc.
5. according to claim 1 or claim 2 the silicon nitride ceramic ball Ginding process based on mild abrasives set grinding tool, it is characterized in that: described filler is one or several following mixing: 1. NaOH, 2. sodium acid carbonate, 3. starch based filler, 4. carbohydrate filler, 5. cellulose family filler, 6. inorganic salts filler.
6. according to claim 1 or claim 2 the silicon nitride ceramic ball Ginding process based on mild abrasives set grinding tool, it is characterized in that: said step 2), in the heat pressure forming process, pressure is 300-600kg/cm
2, hot pressing temperature is arranged on 100-200 ℃ according to the difference of curing agent, and hot pressing time is arranged on 45-120min according to difference between the grinding tool.
7. the silicon nitride ceramic ball Ginding process based on mild abrasives set grinding tool as claimed in claim 6 is characterized in that: said step 2), curing process, oven temperature remain on 80-200 ℃, drying time 10-48 hour; Be made into the monoblock type grinding tool for the mild abrasives set grinding tool of grinding tool diameter less than
; For the mild abrasives set grinding tool of diameter greater than
; Be made into fan-shaped grinding tool piece, be assembled into circular millstone in use.
8. the silicon nitride ceramic ball Ginding process based on mild abrasives set grinding tool as claimed in claim 7 is characterized in that: said step 2), in the dressing process, the flatness and the depth of parallelism are controlled in the 0.1mm.
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| CN108081157A (en) * | 2017-11-29 | 2018-05-29 | 浙江工业大学 | A kind of mild abrasives fixation grinding tool for polishing lithium tantalate wafer and preparation method thereof |
| CN108081117A (en) * | 2017-11-29 | 2018-05-29 | 浙江工业大学 | A kind of lithium tantalate polishing method based on mild abrasives fixation grinding tool |
| CN108145556A (en) * | 2017-12-17 | 2018-06-12 | 山东泰广奕砂轮有限公司 | A kind of mill steel ball lathe special grinding wheel bonding supporting plate and preparation method thereof |
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